CN106646323B - A kind of co-planar waveguide probe transmission characteristic measuring device and method - Google Patents
A kind of co-planar waveguide probe transmission characteristic measuring device and method Download PDFInfo
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- CN106646323B CN106646323B CN201611154288.3A CN201611154288A CN106646323B CN 106646323 B CN106646323 B CN 106646323B CN 201611154288 A CN201611154288 A CN 201611154288A CN 106646323 B CN106646323 B CN 106646323B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
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- G01R35/02—Testing or calibrating of apparatus covered by the other groups of this subclass of auxiliary devices, e.g. of instrument transformers according to prescribed transformation ratio, phase angle, or wattage rating
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Abstract
The application discloses a kind of co-planar waveguide probe transmission characteristic measuring device and method.Measuring device includes ultrafast laser generator, excitation signal generator, input converter, output translator, optical pulse delay unit, measurement probe, matched load；Ultrafast laser generator generates ultrashort pulse；Excitation signal generator generates impulse excitation signal；Optical pulse delay unit generates exploring laser light pulse and is incident on measurement probe；Measure the electric signal instantaneous value of the first co-planar waveguide probe and the second co-planar waveguide probe test lead；Input converter receives impulse excitation signal and is coupled to the first co-planar waveguide probe test lead；Output translator connects the second co-planar waveguide probe test lead and matched load.Measurement method includes measurement input signal, output signal time domain waveform；Frequency domain is transformed to respectively, and the transmission characteristic of co-planar waveguide probe is calculated according to the relationship between input, output signal spectrum, coaxial cable transmission characteristic, co-planar waveguide probe transmission characteristic.
Description
Technical field
This application involves meterings and the field of test technology more particularly to a kind of measuring device and measurement of co-planar waveguide probe
Method.
Background technique
With the rapid development of Microwave and millimeter wave integrated circuits technology, the microwave device of coplanar waveguide structure is more come
Attention and concern the more, when testing the device of this type, it is necessary to carry out turning for signal using co-planar waveguide probe
It changes, the planar transmission signal that co-planar waveguide device generates is converted into coaxial transmission signal.
In the ideal situation, it when planar transmission signal is converted to coaxial transmission signal by co-planar waveguide probe, will not produce
Raw distortion.But co-planar waveguide probe is not ideal interface unit in practical application, there are decaying and dispersion, signal is turning
Variation can be generated by changing front and back, and then reduce the accuracy of measurement result.To improve accuracy of measurement, it is necessary first to obtain coplanar wave
Probe decaying and dispersion characteristics, i.e. transmission characteristic are led, then measurement result is modified, obtains the true letter of measured signal
Breath.
Co-planar waveguide probe front can not directly be connect with general measuring instrument, conventional measurement method cannot be used to obtain
Its transmission characteristic is taken, therefore, a kind of measuring device of co-planar waveguide probe transmission characteristic is needed, exists to solve co-planar waveguide probe
The problem of in signal conversion process as decaying with the reduction of accuracy of measurement caused by dispersion and distorted signals.
Summary of the invention
The present invention proposes a kind of co-planar waveguide probe transmission characteristic measuring device and method, solves co-planar waveguide probe and is believing
It is reduced with accuracy of measurement caused by dispersion in number conversion process as decaying and the problem of distorted signals.
The embodiment of the present application provides a kind of co-planar waveguide probe transmission characteristic measuring device, and the co-planar waveguide probe includes
The identical first co-planar waveguide probe of transmission characteristic, the second co-planar waveguide probe；First co-planar waveguide probe and the second coplanar wave
The same shaft end for leading probe is connected by coaxial cable for high frequency.The measuring device includes ultrafast laser generator, pumping signal hair
Raw device, input converter, output translator, optical pulse delay unit, measurement probe, matched load；The ultrafast laser generator,
For generating ultrashort pulse；The excitation signal generator generates electric arteries and veins for receiving the ultrashort pulse triggering
Rush pumping signal；The optical pulse delay unit generates exploring laser light pulse, incidence for being delayed to the ultrashort pulse
To the measurement probe；The measurement probe, in the exploring laser light pulse incidence, for measuring first co-planar waveguide
The electric signal instantaneous value of probe and the second co-planar waveguide probe test lead；The input converter, for receiving the electric pulse
Pumping signal, and it is coupled to the test lead of the first co-planar waveguide probe；The output translator, for connecting the second co-planar waveguide
The test lead of probe and the matched load.
Preferably, the input converter includes to be used for transmission the electric pulse with shaft end and coplanar waveguide transmission line end
Pumping signal, and realize with the impedance matching between shaft end and coplanar waveguide transmission line end；The coplanar wave of the input converter
Transmission line end is led to be connected with the test lead of the first co-planar waveguide probe.
Preferably, the output translator include with shaft end and coplanar waveguide transmission line end, be used for transmission output signal, and
It realizes with the impedance matching between shaft end and coplanar waveguide transmission line end；The coplanar waveguide transmission line end of the output translator with
The test lead of the second co-planar waveguide probe is connected；The same shaft end of the output translator is connected with the matched load
It connects.
Preferably, the measurement probe includes optical probe or electro-optical probes.
For the embodiment of any one co-planar waveguide probe transmission characteristic measuring device of the present invention, it is preferable that described to swash
The pumping signal band for encouraging signal generator generation is wider than the bandwidth of operation of first co-planar waveguide, the second co-planar waveguide.
For the embodiment of any one co-planar waveguide probe transmission characteristic measuring device of the present invention, it is preferable that the light
The delay precision of pulse delay unit is higher than 300fs.
For the embodiment that any one co-planar waveguide probe transmission characteristic measuring device of the present invention advanced optimizes, preferably
Ground, the ultrafast laser generator include ultrafast laser, dispersion compensator, optical splitter；The ultrafast laser, for generating
Ultrashort pulse；The dispersion compensator carries out dispersion pre-compensation, is sent to described for receiving the ultrashort pulse
Optical splitter；The ultrashort pulse is divided into two-way by the optical splitter, is exported all the way to the excitation signal generator, separately
It is exported all the way to the optical pulse delay unit.
The embodiment of the present application also provides a kind of co-planar waveguide probe transmission characteristic measurement method, uses the application any one
Co-planar waveguide probe transmission characteristic measuring device described in embodiment comprising the steps of:
In the test lead junction of the input converter and the first co-planar waveguide probe, surveyed with the measurement probe
Measure input signal time domain waveform；
In the test lead junction of the output translator and the second co-planar waveguide probe, surveyed with the measurement probe
Measure output signal time domain waveform；
The input signal time domain waveform and output signal time domain waveform are transformed into frequency domain respectively, obtain input signal frequency
Spectrum and output signal spectrum；
According to output signal spectrum and input signal spectrum, the coaxial cable for high frequency transmission characteristic, the co-planar waveguide
Relationship between probe transmission characteristic calculates the transmission characteristic of co-planar waveguide probe.
Preferably, the co-planar waveguide probe transmission characteristic measurement method, when measuring input signal with the measurement probe
The step of domain waveform, specifically includes:
The measurement probe is placed in the test lead junction of the input converter and the first co-planar waveguide probe
Surface criterion position；
Excitation signal generator is triggered with ultrashort pulse, impulse excitation signal is generated, through the input converter
It is coupled to the test lead of the first co-planar waveguide probe；
The measurement probe, the measurement probe measurement and record delay will be input to after ultrashort pulse delay
The input signal instantaneous value at moment；
Change the ultrashort pulse amount of delay, the measurement probe measures and record again the input letter at delay moment
Number instantaneous value；Above step is repeated, input signal time domain waveform is finally obtained.
Preferably, the co-planar waveguide probe transmission characteristic measurement method, when measuring output signal with the measurement probe
The step of domain waveform, specifically includes:
The measurement probe is placed in the test lead junction of the output translator and the second co-planar waveguide probe
Surface criterion position；
Excitation signal generator is triggered with ultrashort pulse, impulse excitation signal is generated, through the input converter
It is coupled to the test lead of the first co-planar waveguide probe；
The measurement probe, the measurement probe measurement and record delay will be input to after ultrashort pulse delay
The output signal instantaneous value at moment；
Change the ultrashort pulse amount of delay, the measurement probe measures and record again the output letter at delay moment
Number instantaneous value；Above step is repeated, output signal time domain waveform is finally obtained.
At least one above-mentioned technical solution that the embodiment of the present application uses can reach following the utility model has the advantages that the technical program
It solves the problems, such as the measurement of co-planar waveguide probe transmission characteristic, is directly determined the plane of reference of measurement using the method for electro optical measurement
In the plane input port of co-planar waveguide probe, it can be avoided and introduce the influence of signal adapter in the measurement results and generate mistake
Difference improves the accuracy of measurement.
Detailed description of the invention
The drawings described herein are used to provide a further understanding of the present application, constitutes part of this application, this Shen
Illustrative embodiments and their description please are not constituted an undue limitation on the present application for explaining the application.In the accompanying drawings:
Fig. 1 is co-planar waveguide probe transmission characteristic measuring device schematic diagram；
Fig. 2 is another embodiment schematic diagram of co-planar waveguide probe transmission characteristic measuring device；
Fig. 3 is the connection schematic diagram of input converter of the present invention, output translator, co-planar waveguide probe；
Fig. 4 is that optical probe measures electric signal schematic illustration；
Fig. 5 is electro-optical probes measurement point signal schematic illustration；
Fig. 6 is the time diagram of synchronized sampling measurement method；
Fig. 7 is co-planar waveguide probe transmission characteristic measurement method flow chart；
Fig. 8 is the specific steps embodiment flow chart of measurement input time domain waveform；
Fig. 9 is the specific steps embodiment flow chart for measuring output time-domain waveform.
Specific embodiment
To keep the purposes, technical schemes and advantages of the application clearer, below in conjunction with the application specific embodiment and
Technical scheme is clearly and completely described in corresponding attached drawing.Obviously, described embodiment is only the application one
Section Example, instead of all the embodiments.Based on the embodiment in the application, those of ordinary skill in the art are not doing
Every other embodiment obtained under the premise of creative work out, shall fall in the protection scope of this application.
It should be noted that the co-planar waveguide probe transmission characteristic recorded in the embodiment of the present invention has following characteristics:
First, co-planar waveguide probe transmission characteristic Hprobe(f) it is plural form, H can be expressed asprobe(f)=α (f)+
β (f) i, wherein α (f) indicates signal attenuation characteristic, and β (f) indicates that dispersion characteristics, the two combination define signal and pass through coplanar wave
Lead the distortion of probe generation；
Second, co-planar waveguide probe port has reciprocity, when the impulse excitation signal is visited by the first co-planar waveguide
The test lead of needle inputs, and after high frequency cable is by the test lead output of the second co-planar waveguide probe, due to the reciprocity of port
Property, it is equivalent to and receives the influence of identical co-planar waveguide probe and a coaxial cable for high frequency twice, therefore can lead to
It crosses and accurately measures input signal time domain waveform and output signal time domain waveform data, signal is calculated by Spectrum Conversion and is declined
Subtract and dispersion, remove the influence of known coaxial cable for high frequency, and then obtains the transmission characteristic of co-planar waveguide probe.
Below in conjunction with attached drawing, the technical scheme provided by various embodiments of the present application will be described in detail.
Fig. 1 is co-planar waveguide probe transmission characteristic measuring device schematic diagram.The present embodiment provides a kind of co-planar waveguide probes
Transmission characteristics measurement device, the co-planar waveguide probe include that the identical first co-planar waveguide probe 1, second of transmission characteristic is coplanar
Waveguide probe 2；The same shaft end of first co-planar waveguide probe and the second co-planar waveguide probe is connected by coaxial cable for high frequency 3.Institute
State measuring device, including ultrafast laser generator 7, excitation signal generator 8, input converter 4, output translator 5, light pulse
Delayer 9, measurement probe 10, matched load 6；The ultrafast laser generator, for generating ultrashort pulse P (t)；It is described
Excitation signal generator generates impulse excitation signal S (t) for receiving the ultrashort pulse triggering；The light pulse
Delayer generates exploring laser light pulse P for being delayed to the ultrashort pulsed(t), it is incident on the measurement probe；Institute
Measurement probe is stated, in the exploring laser light pulse incidence, for measuring the first co-planar waveguide probe and the second coplanar wave
Lead the electric signal instantaneous value of probe test lead；The input converter for receiving the impulse excitation signal, and is coupled to
The test lead I of first co-planar waveguide probe；The output translator, for connect the second co-planar waveguide probe test lead O and
The matched load.
It should be noted that co-planar waveguide probe described in the embodiment of the present invention includes the first co-planar waveguide probe and second
Co-planar waveguide probe, the first co-planar waveguide probe transmission characteristic are Hprobe1(f), the second co-planar waveguide probe transmission
Characteristic is Hprobe2(f), and assume Hprobe1(f)=Hprobe2(f)=Hprobe(f).The first co-planar waveguide probe and described the
It is connected between two co-planar waveguide probe coaxial output line mouths by coaxial cable for high frequency, the coaxial cable for high frequency transmission characteristic Hcable
(f) it can be obtained by universal measurement method.
For example, the ultrafast laser generator output signal is femtosecond pulse, pulse width is lower than 200 femtoseconds (2 × 10-13Second), mean power (intensity) is greater than 50mW, repetition rate 80MHz (the corresponding period was 12.5 nanoseconds).
The excitation signal generator functionally plays the role of photoelectric conversion, it should be noted that described ultrafast sharp
The femtosecond pulse of photogenerator output has extremely wide bandwidth, and the excitation signal generator can only respond wherein low bandwidth model
Enclose interior information.Since inverse relation, the electric pulse excitation of the excitation signal generator output is presented in bandwidth and pulse width
The width of signal is far longer than the ultrafast laser pulse width of ultrafast laser generator output.In 200 femto-second laser pulse
Under trigger condition, the impulse excitation signal width is about 10 picosecond (1 × 10-11Second), frequency domain bandwidth is about 50GHz.
For example, the optical pulse delay unit can realize relative time delay by adjusting space length, especially by with lower section
Formula determines relative time delay size: Δ t=Δ l/v, wherein Δ t is delay size, and Δ l is mobile for the delayed synchronizer space
Distance, v are light in spatial velocity.
For the embodiment of any one co-planar waveguide probe transmission characteristic measuring device of the present invention, it is preferable that described to swash
The pumping signal band for encouraging signal generator generation is wider than the bandwidth of operation of first co-planar waveguide, the second co-planar waveguide.
For the embodiment of any one co-planar waveguide probe transmission characteristic measuring device of the present invention, it is preferable that the light
The delay precision of pulse delay unit is higher than 300fs.Herein, delay precision represents the delay order of accuarcy of optical time delay unit, and light prolongs
When device use 1ps~2ps as the size being delayed every time, delay precision refers to the error of delay (1ps~2ps) every time in scheme
Not higher than 300fs, 100fs can also be better than under normal circumstances.
As the embodiment that co-planar waveguide probe transmission characteristic measuring device of the present invention advanced optimizes, also comprising at data
Module 15 is managed, for receiving the data of the measurement probe, and calculation processing is carried out to data, obtains co-planar waveguide probe transmission
Characteristic.
Fig. 2 is another embodiment schematic diagram of co-planar waveguide probe transmission characteristic measuring device.It is any one as the present invention
Item co-planar waveguide probe transmission characteristic measuring device advanced optimizes embodiment, and the ultrafast laser generator includes ultrafast laser
Device 71, dispersion compensator 72, optical splitter 73；The ultrafast laser, for generating ultrashort pulse；The dispersion compensator
For receiving the ultrashort pulse, dispersion pre-compensation is carried out, the optical splitter is sent to；The optical splitter, will be described super
Fast laser pulse is divided into two-way, is exported all the way to the excitation signal generator 8, another output to the optical pulse delay unit
9.Wherein, the ultrafast laser is connect with the dispersion compensator by optical fiber, the dispersion compensator and the optical branching
Device is connected by optical fiber.
Fig. 3 is the connection schematic diagram of input converter of the present invention, output translator, co-planar waveguide probe.The input turns
Parallel operation 4 includes to be used for transmission the impulse excitation signal, and realization is with shaft end and altogether with shaft end and coplanar waveguide transmission line end
Impedance matching between coplanar waveguide transmission line end；The coplanar waveguide transmission line end of input converter wave coplanar with described first
The test lead I for leading probe 1 is connected；.The output translator 5 includes to be used for transmission with shaft end and coplanar waveguide transmission line end
Output signal, and realize with the impedance matching between shaft end and coplanar waveguide transmission line end；The coplanar wave of the output translator
Transmission line end is led to be connected with the test lead O of the second co-planar waveguide probe 2；The same shaft end of the output translator with it is described
Matched load is connected.The same shaft end 1C of the first co-planar waveguide probe and same shaft end 2C of the second co-planar waveguide probe
It is connected by a coaxial cable for high frequency 3.
Under the action of the impulse excitation signal, due to the input converter, output translator and measured object (
One co-planar waveguide probe+the+the second co-planar waveguide of coaxial cable for high frequency probe) connection, in the survey of the first co-planar waveguide probe 1
It tries end I and generates input signal win(t), output signal w is generated in the test lead O of the second co-planar waveguide probe 2out(t)。
It should be noted that since tested co-planar waveguide probe is typically designed as 50 ohm characteristic impedances, in order to guarantee to hinder
Anti- matching, reduces signal reflex, and all micro-strip sections and coax segments are required using 50 ohm characteristic impedances.Input, output conversion
The coaxial connector that device is 1.85mm using specification with shaft end, bandwidth highest can achieve 67GHz, and characteristic impedance is 50 Europe
Nurse.Micro-strip end is coplanar waveguide structure, and characteristic impedance is 50 ohm, and furthermore the spacing between coplanar waveguide electrode should be less than quilt
Survey the probe spacing (generally 25 microns~50 microns) of co-planar waveguide probe.
Fig. 4 is that optical probe measures electric signal schematic illustration.In the embodiment shown in fig. 4, the measurement probe 10 wraps
Containing optical probe 11 and lock-in amplifier 12.Since by tested electric signals radiation effect conductance is occurred for the test department of optical probe
Rate changes, in exploring laser light pulse Pd(t) when incident optical probe, optical probe to the reception response of exploring laser light pulse by
The influence of tested electric signals and change, generate electric signal by photoelectric conversion, then export through lock-in amplifier.In the present invention
In, the measurement probe, which is that the optical probe 11 is placed in the tested specific connection type of co-planar waveguide probe, is tested coplanar wave
The position directly above of probe and input, output translator contact point I, O is led, measurement obtains input signal win(t) or output signal
wout(t) waveform.
Fig. 5 is that electro-optical probes measure electric signal schematic illustration.In the embodiment shown in fig. 5, the measurement probe includes
Electro-optical probes 13 and balance detection amplifier 14.Exploring laser light pulse Pd(t) it is coupled in optical fiber, is incident on the electric light and visits
Needle enters since by tested electric signals radiation effect refraction index changing is occurred for the test department of photoelectricity probe in exploring laser light pulse
When penetrating photoelectricity probe, photoelectricity probe is influenced the reflex response of exploring laser light pulse by tested electric signals and is changed,
Electric signal is converted to by balance detection amplifier and amplifies output.In the present invention, the measurement probe and it is tested coplanar wave
Leading the specific connection type of probe is that the photoelectricity probe 13 is placed in tested co-planar waveguide probe and contacts with input, output translator
The position directly above of point I, O, measurement obtain input signal win(t) or output signal wout(t) waveform.
Fig. 6 is the time diagram of synchronized sampling measurement method.Exploring laser light pulse is provided by optical pulse delay unit, it is real
The measurement acquisition of existing waveform.The exploring laser light pulse concentration of optical pulse delay unit output is to the measurement probe.The measurement is visited
Needle, in the exploring laser light pulse Pd(t) it under acting on, is visited for measuring the first co-planar waveguide probe and the second co-planar waveguide
Electric signal instantaneous value of the needle test lead when the measurement probe is incident in the exploring laser light pulse.For example, flying described 200
Under second laser pulse trigger condition, the impulse excitation signal width is about 10 picoseconds, will use the exploring laser light pulse
Pd(t) (t-i × Δ t) amounts to N=5000~10000 delay time point to the impulse excitation signal and its transmission to=P
Response measures, and forms the sequence w of electric signal instantaneous valuein(i × Δ t) or wout(i × Δ t), in the above expression formula, i=1
~N, for example, N=5000, constitutes time domain waveform.It is input in the time domain waveform that the test lead of the first co-planar waveguide probe measures
Time domain plethysmographic signal；It is output signal time domain waveform in the time domain waveform that the test lead of the second co-planar waveguide probe measures.This hair
Probe is measured described in bright embodiment, the sampling interval for measuring obtained Wave data is determined by the optical pulse delay unit,
Gap size is the relative time delay Δ t；Preferably, sampling interval size is 1ps.
It should be noted that the waveform of the impulse excitation signal, input signal, output signal is comprising abundant in practice
Information also shake comprising pulse other than the pulse width (10ps) although being about 10ps referred to herein as electronic pulse width
The shape informations such as bell, overshoot, pre- punching, have apparent contribution to frequency spectrum.Accurate measurement result is obtained necessary not only for measurement
Information in 10ps pulse width, it is also necessary to measure except 10ps pulsewidth, in general measure time window be sized such that 5ns~
10ns, corresponding measurement points are exactly 5000~10000.Measurement delay point is more, and the accuracy of measurement is higher.Fig. 7 is total
Surface wave leads probe transmission characteristic measurement method flow chart the embodiment of the present application and also provides a kind of co-planar waveguide probe transmission characteristic survey
Amount method uses co-planar waveguide probe transmission characteristic measuring device described in the application any one embodiment comprising the steps of:
Step 100, in the test lead junction of the input converter and the first co-planar waveguide probe, with the survey
It measures probe and measures input signal time domain waveform；
For example, coplanar waveguide transmission line end and first co-planar waveguide of the measurement probe in the input converter
It measures to obtain input signal time domain waveform w at the test lead tie point of probein(t), input signal time domain waveform data include taking
Sample time and amplitude information；
Step 200, in the test lead junction of the output translator and the second co-planar waveguide probe, with the survey
It measures probe and measures output signal time domain waveform；
For example, coplanar waveguide transmission line end and second co-planar waveguide of the measurement probe in the output translator
It measures to obtain output signal time domain waveform w at probe test lead tie pointout(t), output signal time domain waveform data include sampling
Time and amplitude information.
The input signal time domain waveform and output signal time domain waveform are transformed to frequency domain by step 300 respectively, are obtained defeated
Enter signal spectrum and output signal spectrum；
For example, by the input signal time domain waveform win(t) and output signal time domain waveform wout(t) frequency is transformed to respectively
Domain obtains input signal spectrum Win(f) and output signal spectrum Wout(f)；
Step 400, according to output signal spectrum and input signal spectrum, the coaxial cable for high frequency transmission characteristic, described
Relationship between co-planar waveguide probe transmission characteristic calculates the transmission characteristic of co-planar waveguide probe.
For example, determining co-planar waveguide probe transmission characteristic by following formula:
Wherein, f is signal frequency, WinIt (f) is input signal time domain waveform data win(t) it is obtained through Spectrum Conversion defeated
Enter signal spectrum data, WoutIt (f) is output signal time domain waveform data wout(t) output signal spectrum obtained through Spectrum Conversion
Data, HprobeIt (f) is the co-planar waveguide probe transmission characteristic, HcableIt (f) is high frequency cable transmission characteristic.
Fig. 8 is the specific steps embodiment flow chart of measurement input time domain waveform.Input letter is measured with the measurement probe
The step of number time domain waveform, specifically include:
Step 101, the test that the measurement probe is placed in the input converter and the first co-planar waveguide probe
Hold the criterion position of the surface of junction；Most preferably, the measurement probe is placed in the input converter and described
The position 0.5mm above the test lead junction of first co-planar waveguide probe.
Step 102 triggers excitation signal generator with ultrashort pulse, impulse excitation signal is generated, through described defeated
Enter the test lead that converter is coupled to the first co-planar waveguide probe；
Step 103 will be input to the measurement probe after ultrashort pulse delay, the measurement probe measurement with
The input signal instantaneous value w at record delay momentin(i×Δt)；
Step 104 changes the ultrashort pulse amount of delay, and the measurement probe measures and record again the delay moment
Input signal instantaneous value；Above step is repeated, input signal time domain waveform is finally obtained.
Fig. 9 is the specific steps embodiment flow chart for measuring output time-domain waveform.The measurement probe measures output signal
The step of time domain waveform, specifically includes:
Step 201, the test that the measurement probe is placed in the output translator and the second co-planar waveguide probe
Hold the criterion position of the surface of junction；Most preferably, the measurement probe is placed in the output translator and described
The position 0.5mm above the test lead junction of second co-planar waveguide probe.
Step 202 triggers excitation signal generator with ultrashort pulse, impulse excitation signal is generated, through described defeated
Enter the test lead that converter is coupled to the first co-planar waveguide probe；
Step 203 will be input to the measurement probe after ultrashort pulse delay, the measurement probe measurement with
The output signal instantaneous value w at record delay momentout(i×Δt)；
Not thick 204, change the ultrashort pulse amount of delay, the measurement probe measures and record again the delay moment
Output signal instantaneous value；Above step is repeated, output signal time domain waveform is finally obtained.
It should also be noted that, the terms "include", "comprise" or its any other variant are intended to nonexcludability
It include so that the process, method, commodity or the equipment that include a series of elements not only include those elements, but also to wrap
Include other elements that are not explicitly listed, or further include for this process, method, commodity or equipment intrinsic want
Element.In the absence of more restrictions, the element limited by sentence "including a ...", it is not excluded that including described want
There is also other identical elements in the process, method of element, commodity or equipment.
The above description is only an example of the present application, is not intended to limit this application.For those skilled in the art
For, various changes and changes are possible in this application.All any modifications made within the spirit and principles of the present application are equal
Replacement, improvement etc., should be included within the scope of the claims of this application.
Claims (10)
1. a kind of co-planar waveguide probe transmission characteristic measuring device, the co-planar waveguide probe includes transmission characteristic identical first
Co-planar waveguide probe, the second co-planar waveguide probe；The same shaft end of first co-planar waveguide probe and the second co-planar waveguide probe passes through
Coaxial cable for high frequency connection；It is characterized in that, the measuring device include ultrafast laser generator, it is excitation signal generator, defeated
Enter converter, output translator, optical pulse delay unit, measurement probe, matched load；
The ultrafast laser generator, for generating ultrashort pulse；
The excitation signal generator generates impulse excitation signal for receiving the ultrashort pulse triggering；
The optical pulse delay unit generates exploring laser light pulse, is incident on the survey for being delayed to the ultrashort pulse
Measure probe；
The measurement probe, in the exploring laser light pulse incidence, for measuring the first co-planar waveguide probe and second
The electric signal instantaneous value of co-planar waveguide probe test lead；
The input converter for receiving the impulse excitation signal, and is coupled to the test of the first co-planar waveguide probe
End；
The output translator, for connecting the test lead and the matched load of the second co-planar waveguide probe.
2. co-planar waveguide probe transmission characteristic measuring device as described in claim 1, which is characterized in that
The input converter include with shaft end and coplanar waveguide transmission line end, be used for transmission the impulse excitation signal, and
Realize the impedance matching between the same shaft end and coplanar waveguide transmission line end；
The coplanar waveguide transmission line end of the input converter is connected with the test lead of the first co-planar waveguide probe.
3. co-planar waveguide probe transmission characteristic measuring device as described in claim 1, which is characterized in that
The output translator includes to be used for transmission output signal, and realize same shaft end with shaft end and coplanar waveguide transmission line end
Impedance matching between coplanar waveguide transmission line end；
The coplanar waveguide transmission line end of the output translator is connected with the test lead of the second co-planar waveguide probe；
The same shaft end of the output translator is connected with the matched load.
4. co-planar waveguide probe transmission characteristic measuring device as described in claim 1, which is characterized in that the measurement probe includes
Optical probe or electro-optical probes.
5. the co-planar waveguide probe transmission characteristic measuring device as described in Claims 1 to 4 any one, which is characterized in that described
The pumping signal band that excitation signal generator generates is wider than the bandwidth of operation of first co-planar waveguide, the second co-planar waveguide.
6. the co-planar waveguide probe transmission characteristic measuring device as described in Claims 1 to 4 any one, which is characterized in that described
The delay precision of optical pulse delay unit is higher than 300fs.
7. the co-planar waveguide probe transmission characteristic measuring device as described in Claims 1 to 4 any one, which is characterized in that described
Ultrafast laser generator includes ultrafast laser, dispersion compensator, optical splitter；
The ultrafast laser, for generating ultrashort pulse；
The dispersion compensator carries out dispersion pre-compensation, is sent to the optical splitter for receiving the ultrashort pulse；
The ultrashort pulse is divided into two-way by the optical splitter, is exported all the way to the excitation signal generator, another way
It exports to the optical pulse delay unit.
8. a kind of co-planar waveguide probe transmission characteristic measurement method is visited using co-planar waveguide described in claim 1~7 any one
Needle transmission characteristics measurement device, which is characterized in that comprise the steps of
In the test lead junction of the input converter and the first co-planar waveguide probe, measured with the measurement probe defeated
Enter time domain plethysmographic signal；
In the test lead junction of the output translator and the second co-planar waveguide probe, measured with the measurement probe defeated
Time domain plethysmographic signal out；
The input signal time domain waveform and output signal time domain waveform are transformed into frequency domain respectively, obtain input signal spectrum and
Output signal spectrum；
According to output signal spectrum and input signal spectrum, the coaxial cable for high frequency transmission characteristic, the co-planar waveguide probe
Relationship between transmission characteristic calculates the transmission characteristic of co-planar waveguide probe.
9. co-planar waveguide probe transmission characteristic measurement method as claimed in claim 8, which is characterized in that surveyed with the measurement probe
The step of amount input signal time domain waveform, specifically include
The measurement probe is being placed in the test lead junction of the input converter and the first co-planar waveguide probe just
The criterion position of top；
Excitation signal generator is triggered with ultrashort pulse, impulse excitation signal is generated, is coupled through the input converter
To the test lead of the first co-planar waveguide probe；
The measurement probe, the measurement probe measurement and record delay moment will be input to after ultrashort pulse delay
Input signal instantaneous value；
Change the ultrashort pulse amount of delay, the measurement probe measures and record again the input signal wink at delay moment
Duration；Above step is repeated, input signal time domain waveform is finally obtained.
10. co-planar waveguide probe transmission characteristic measurement method as claimed in claim 8, which is characterized in that with the measurement probe
The step of measurement output signal time domain waveform, specifically include
The measurement probe is being placed in the test lead junction of the output translator and the second co-planar waveguide probe just
The criterion position of top；
Excitation signal generator is triggered with ultrashort pulse, impulse excitation signal is generated, is coupled through the input converter
To the test lead of the first co-planar waveguide probe；
The measurement probe, the measurement probe measurement and record delay moment will be input to after ultrashort pulse delay
Output signal instantaneous value；
Change the ultrashort pulse amount of delay, the measurement probe measures and record again the output signal wink at delay moment
Duration；Above step is repeated, output signal time domain waveform is finally obtained.
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| CN112763082B (en) * | 2020-11-30 | 2022-04-19 | 北京无线电计量测试研究所 | Picosecond-level pulse waveform parameter measuring device and method based on photoconductive technology |
| CN112713374A (en) * | 2020-12-07 | 2021-04-27 | 北京无线电计量测试研究所 | Coplanar waveguide adaptive to coaxial connector |
| WO2022222097A1 (en) * | 2021-04-22 | 2022-10-27 | 北京航空航天大学 | Ultra-fast electric pulse generating and detecting device and use method therefor |
| CN113178220B (en) * | 2021-04-22 | 2022-11-22 | 北京航空航天大学 | Ultrafast electric pulse generating and detecting device and using method thereof |
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