CN106625020B - High speed and super precision machine tool chief axis, electro spindle incremental magnetic induction type bus type encoder - Google Patents
High speed and super precision machine tool chief axis, electro spindle incremental magnetic induction type bus type encoder Download PDFInfo
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- CN106625020B CN106625020B CN201710111233.2A CN201710111233A CN106625020B CN 106625020 B CN106625020 B CN 106625020B CN 201710111233 A CN201710111233 A CN 201710111233A CN 106625020 B CN106625020 B CN 106625020B
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q17/00—Arrangements for observing, indicating or measuring on machine tools
- B23Q17/007—Arrangements for observing, indicating or measuring on machine tools for managing machine functions not concerning the tool
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q17/00—Arrangements for observing, indicating or measuring on machine tools
- B23Q17/24—Arrangements for observing, indicating or measuring on machine tools using optics or electromagnetic waves
- B23Q17/248—Arrangements for observing, indicating or measuring on machine tools using optics or electromagnetic waves using special electromagnetic means or methods
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
- G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
- G01D5/243—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the phase or frequency of ac
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- Transmission And Conversion Of Sensor Element Output (AREA)
Abstract
The present invention relates to high speed and super precision machine tool chief axis, electro spindle incremental magnetic induction type bus type encoder, including measure gear and magnetic induction read head；Magnetic induction component is equipped in magnetic induction read head, signal conditioning circuit, reference zero comparator circuit and FPGA interpolation sub-circuit, magnetic induction component and the measurement just tangent installation of circumference of gear, magnetic induction component carries out sine and cosine orthogonal differential signal and reference zero differential signal caused by non-contact scanning to gear is measured, after signal conditioning circuit, by FPGA interpolation sub-circuit to its direct current biasing error, amplitude error and quadrature phase error are corrected and are compensated in real time, and combine reference zero comparator circuit, the absolute position values of relative position value and the shaft rotation angle relative to reference zero signal that angle is rotated relative to the shaft for powering on the moment are generated respectively, mechanical transmission structure is simple, improve machine tool chief axis positioning, repetitive positioning accuracy, improve numerically-controlled machine tool entirety accuracy in measurement and Processing efficiency.
Description
Technical field
The present invention relates to a kind of encoder (Encoder), more particularly, to a kind of high speed and super precision machine tool chief axis, electro spindle magnetic
Incude incremental bus type encoder, can be widely applied to the fields such as numerically-controlled machine tool, robot, elevator and industrial automation.
Background technique
Encoder be it is a kind of for detection angles, position, velocity and acceleration sensor, be machinery rotation angle position
It moves or straight-line displacement is worked out, being converted to can be used for communicates, the equipment of the electrical signal form of transimission and storage, be mechanical with electricity
The accurate measurement device that son is combined closely, is widely used in the various fields such as motor, automobile, wind-powered electricity generation, robot.From measurement function
On, coding code device can be divided into incremental value encoder (being also incremental encoder) and absolute value encoder.From measuring principle, compile
Code device includes photoelectric encoder and magnetic induction encoder.
Incremental value encoder does not have for providing information of the current location relative to prior location and remembers current absolute position
The function of setting.When electromechanical equipment power-off, if mechanical location changes because external force is mobile or rotation, position is caused to generate inclined
It moves, and when electromechanical equipment restarting, incremental value encoder will be unable to judge the signal of current location and be recorded before powering off
Position signal it is whether identical, thus the operation that encoder is returned to zero must be adjusted.Each position of absolute value encoder
A corresponding determining digital code, therefore its indicating value is only related to the starting and ending positions of the measurement, and the centre with measurement
Process is unrelated.When electromechanical equipment power-off after send a telegram in reply again when, absolute value encoder can read immediately current spindle rotation angle or
Absolute position.
In the industrial production, widely applied encoder is mostly photo-electric, its working principle is that: LED light source and condenser
The light source of stable raster diffraction stripe is provided；The grating structure for scanning exposure mask and measuring basis is same or similar, works as the two
Slit has a light transmission when being aligned, and light can not pass through when the two groove is aligned, and photocell senses when the two relative motion
Light intensity just occur it is strong and weak alternately change, this alternately variation is in triangular wave patterns, but since grating diffration effect is this
Alternately variation is actually in sine wave.Sine and cosine encoded signal refers to that the sinusoidal signal for being 90 degree with two-way phase difference loads position
The code device signal of confidence breath.Photoelectric encoder not only can detect angle displacement, but also can detect under mechanical switching device help straight
Line position has many advantages, such as low inertia, low noise, high-precision, high-resolution, the disadvantage is that poor to environmental suitability, for moisture,
The resistivity of dust, greasy dirt and temperature change is weaker, needs to do encapsulation process in practical application；In addition, photoelectric encoder grating
Disk is mostly glass material, when around axis high speed rotation, the influence because of external environments such as shaft vibration, impacts is easy, so that grating disc
Fragmentation.
When photoelectric encoder on machine tool chief axis in use, its first position feedback photoelectric encoder and the second position feed back
Photoelectric encoder cannot be connected directly with machine tool chief axis, usually with the mechanical transmission mechanisms such as synchronizing wheel, belt and machine tool chief axis
It is indirectly connected with, transmission process are as follows: the spindle servo electric machine of built-in first position encoder drives belt movement, belt band motivation
Bed motion of main shaft, machine tool chief axis drive synchronizing wheel to rotate, and synchronizing wheel drives the rotation of second position encoder, thus entire mechanical biography
Dynamic structure is more complicated, causes servo motor maximum speed lower.Mating CNC digital control system is not, it can be achieved that high to required precision
The functions such as screw thread process, rigid tapping, orientation trouble and tool magazine tool changing.If long-play, since receiving load is larger, skin
Band, synchronous belt flexible deformation, expand with heat and contract with cold and wear so that numerically-controlled machine tool overall processing precision the more can become the more poor.
When machine tool chief axis is higher to positioning accuracy request, first position feedback needs to use 17 or higher resolution
Photoelectric encoder, second position feedback will use the high-precision encoders such as magnetic resistance, magnetic grid, while axial coding is fed back in the second position
Device and machine tool chief axis want direct-connected, to reduce driving error.It is integrated with machine tool chief axis that electro spindle realizes spindle motor, will be high
Precision encoding device and machine tool chief axis are direct-connected, are reducing transmission device bring error simultaneously, processing, positioning accurate greatly improved
Degree, and there are a series of excellent drive characteristics, it is a kind of desired transmission mode that can meet high speed and high precision processing requirement.
To the motor driven using digit position and controlling technology of velocity, high-precision sine and cosine encoder can provide 1Vpp electricity
The sinusoidal increment signal of ordinary mail number, signal quality height become to carry out high frequency multiplication interpolation subdivision in follow-up signal processing circuit
It may.For example, if being carried out in follow-up signal processing circuit to the rotary encoder of 512 signal periods of every circle 4096 times thin
Point, 2,000,000 measurement step pitches or line number can be generated in a circle, be equivalent to 21 resolution ratio.Even if revolving speed reaches 24000
Revolutions per second, frequency when signal reaches control system input circuit also only has about 200KHz.The sinusoidal increment signal of 1Vpp is due to defeated
Spectrum component out is relatively simple, can transmit larger distance compared with square wave and unattenuated or distortion, the cable of permission
Length is up to 150 meters.
In addition to photoelectric encoder, magnetic induction encoder is also widely used in industrial production.Magnetic induction encoder is based on magnetic
Sensor, and Magnetic Sensor is widely used in modern industry and electronic product is measured with induced magnetic field intensity and its distribution
The physical parameters such as electric current, position, direction.In the prior art, there are many different types of sensors for measuring magnetic field and its
His parameter, for example, by using Hall (Hall) element, anisotropic magnetoresistance (Anisotropic MagnetoResistance,
AMR) element, giant magnetoresistance (Gaint MagnetoResistance, GMR) element, tunnel magneto resistance TMR (Tunnel
MagnetoResistance) element is the Magnetic Sensor for measuring sensing element.Compared to other magnetic sensor elements, TMR element
Has the advantages that micro energy lose, high resolution, dynamic range are big, excellent temperature stability and high sensitivity.
In the servo-system that high speed, high-precision, high dynamic performance require, the magnetic for generalling use output cosine and sine signal is passed
Sensor detecting element is fed back for position and speed.Its output signal includes that periodic sine and cosine (SINE, COSINE) is orthogonal
Differential signal often rotates a circle and also exports reference zero (INDEX) differential signal all the way, when electromechanical equipment starting, though it can be through
Later continue signal processing circuit and carry out high frequency multiplication interpolation subdivision, but the absolute position of current spindle rotation angle can not be read immediately
Value, until shaft rotation after reference zero signal, can just obtain current spindle rotation angle absolute place value.If using
The mode of traditional pulse string transmits signal, on the one hand with the raising of position-measurement device resolution ratio and precision, output line number
It is increasing, it is more demanding to subsequent control device interface when motor runs at high speed, it is easy to appear high frequency section transmission
Miscount, to influence numerical control device feedback control；On the other hand, train of pulse output is easy by industrial environment apart from limited
Electromagnetic interference, be not suitable for the high-speed transfer of industry spot.Position is reliably transmitted in order to improve position feedback precision and high speed
Data are set, in digital control system, digital serial bus formula communication device are used between position-measurement device and control device, by controlling
End unit processed and measurement end unit are connected and composed by communication cable, compared with Transistor-Transistor Logic level and sine and cosine burst mode, serially
Bus type transmission mode improves anti-interference ability, has higher reliability and real-time, while transmission increment position may be selected
Set value or absolute position.
Currently, the installation positioning method of magnetic induction encoder is very coarse, the positioning reference plane of read head is plane.Pacifying
When dress, using positioning tool it is difficult to ensure that magnetic induction read head center, measure gear, machine tool chief axis installation concentricity, meanwhile,
The positioning reference plane of read head and measure circumference of gear section be parallel to each other, read head and the guarantee for the distance between measuring gear
Also highly difficult, it is very poor so as to cause the accuracy and consistency of read head actual installation, and then greatly reduce magnetic induction coding
The control precision of device.
In addition, magnetic induction sine and cosine encoder is in engineer application, due to by fluted disc processing technology, power-supply fluctuation, ring
The influence of border temperature change, the factors such as non-linear of read head magnetic induction chip, the output of position detecting element magnetic induction chip
Cosine and sine signal is often accompanied by direct current biasing error, amplitude error and quadrature phase error, harmonic component error, noise error etc.,
These errors directly influence the precision and reliability of servo-control system.How the Angle Position of sine and cosine encoder output is believed
Number error is effectively corrected and is compensated, and high-resolution position is extracted from cosine and sine signal using suitable interpolation method
Confidence breath, to meet the high speed of servo-system, high-precision control require important research and application value.
The Chinese invention patent application disclosed on March 9th, 2016, number of patent application 201511029653.3 are open
Number be CN105387879A, disclose the absolute place value magnetic coder of Large central aperture axial charging structure, for a kind of magnet ring type compile
Code device, wherein used by magnet ring type coding disk be that ductile material by ferromagnetic material powder and as binder passes through note
The cyclic structure of the techniques machine-shapings such as modeling, die casting or casting is limited by the uniformity of material, and magnetizes position also difficult precisely control
System, so that magnetic moment size, power and uniformity is more difficult is further enhanced on coding disk, and during engineer application,
Since coding disk upper magnetic pole is exposed to outside, it is easy absorption flying dust and tiny iron filings and brings error to detection.As motor is processed
The rising of temperature, the coding disk temperature characterisitic of heat transfer will be the factors for having to consider, and coding disk can be magnetic decaying, cause
Accuracy of waveform deteriorates, and closely influences machining accuracy.
In the Chinese utility model patent of bulletin on April 29th, 2015, number of patent application 201420861460.9, bulletin
Number be CN204301754U, disclose gear rotary encoder, output signal is divided into the road A, the road B and the road Z, with analog signal or
The form of square wave exports, and does not have bus type data output capacities；Its incude the gap between read head and gear be 0.1 to
0.15mm, gap is too small, and mechanical erection requires excessively harshness, and installation and debugging is caused to expend a large amount of working hours；Have at program inside it
Chip is managed, needs to debug signal parameter by computer software, and program write-in program memory is saved, non intelligent behaviour
Control, manually adjust it is very complicated, it is time-consuming and laborious, and homogeneity of product is not high.
Summary of the invention
One kind is provided in order to solve the control precision of encoder in the prior art and the lower technical problem of reliability, the present invention
Suitable for high speed and super precision machine tool chief axis, electro spindle incremental magnetic induction type bus type encoder, which incudes magnetic
Line of force working principle carries out non-contact scanning to gear is measured, generates high reliability sine and cosine orthogonal differential signal and reference
Zero point differential signal is realized and is segmented to the high accuracy interpolation of cosine and sine signal, and tied using FPGA field programmable logic device
Reference zero comparator circuit is closed, to generate the height for rotating angle relative to the shaft for powering on the moment respectively in decoder internal
The high line number absolute position values of line number relative position value and the shaft rotation angle relative to reference zero signal, it is complicated reducing
While mechanical transmission mechanism, positioning, the repetitive positioning accuracy of machine tool chief axis greatly improved, to improve numerically-controlled machine tool
Whole accuracy in measurement and processing efficiency.
High speed and super precision machine tool chief axis of the present invention, electro spindle incremental magnetic induction type bus type encoder, including it is sleeved on lathe
On main shaft, electro spindle and with machine tool chief axis, electro spindle synchronous rotary measurement gear and with measure the magnetic strength that is used cooperatively of gear
Answer read head；The measurement gear is equipped with sine and cosine orthogonal differential signal output magnetic track and reference zero differential signal exports magnetic
Road；It is thin that magnetic induction component, signal conditioning circuit, reference zero comparator circuit and FPGA interpolation are equipped in magnetic induction read head
Parallel circuit, magnetic induction component and the measurement just tangent installation of circumference of gear；The magnetic induction component is non-to gear progress is measured
Sine and cosine orthogonal differential signal and reference zero differential signal caused by contact type scanning, after signal conditioning circuit, by
FPGA interpolation sub-circuit is corrected and is compensated in real time to its direct current biasing error, amplitude error and quadrature phase error,
And reference zero comparator circuit is combined, to generate the relative position value for rotating angle relative to the shaft for powering on the moment respectively
With the absolute position values of the shaft rotation angle relative to reference zero signal.
Preferably, the FPGA interpolation sub-circuit include direct current biasing error compensation module, amplitude error compensating module,
It is raw that cosine and sine signal is most worth module, memory module, frequency multiplication module, Coordinate Rotation Digital computing module and shaft rotation angle
At module, shaft rotation angle generation module is connect with reference zero comparator circuit, Coordinate Rotation Digital computing module, direct current
Biased error compensating module, amplitude error compensating module, frequency multiplication module and Coordinate Rotation Digital computing module are sequentially connected,
Cosine and sine signal is most worth module and connect respectively with direct current biasing error compensation module, amplitude error compensating module, memory module, just
Cosine signal most value module is used to seek the sampling maximum value and minimum value of cosine and sine signal, and memory module is inclined for storing direct current
Set the operation result of error compensation module, amplitude error compensating module, cosine and sine signal most value module.
Preferably, the frequency multiplication module includes cosine and sine signal multiplier module, cosine and sine signal phase shift block, adjustment
Circuit module, there are two wherein cosine and sine signal multiplier module is set, the input terminal and amplitude of a cosine and sine signal multiplier module
Error compensation module connection, output end are connect with adjustment circuit module；The input terminal of another cosine and sine signal multiplier module is logical
It crosses cosine and sine signal phase shift block to connect with amplitude error compensating module, output end is connect with adjustment circuit module, adjustment circuit
Module is connect with Coordinate Rotation Digital computing module.
Preferably, the direct current biasing error compensation module and amplitude error compensating module derive cosine and sine signal respectively
Direct current biasing error and amplitude error；Then using frequency multiplication module by phase shift, frequency multiplication by quadrature phase error
It is transformed into direct current biasing error and amplitude error, after adjusted circuit module goes removing DC bias error and adjustment amplitude, with two
The two-way cosine and sine signal of frequency multiplication carries out interpolation subdivision as original signal again in Coordinate Rotation Digital computing module；The seat
It marks rotary digital computing module and calculates arc tangent, seek phase value, show that shaft rotates angle present position values, i.e., relative to upper
The relative position value of the shaft rotation angle at electric moment；The signal conditioning circuit to reference zero differential signal amplification shaping,
Single-ended signal is generated after filtering, into reference zero comparator circuit, is converted into the digital signal of low and high level, is recently entered and is turned
Axis rotates angle generation module, generates the absolute position values of the shaft rotation angle relative to reference zero signal.
The memory module is that FLASH ROM, FPGA the interpolation sub-circuit in FPGA piece calls FLASH ROM institute
Direct current biasing error compensation module, the amplitude error compensating module operation result of storage, to realize FPGA program school again automatically
The quasi- and automatic adjusument to error.
Preferably, the seating side of the magnetic induction read head and measurement gear side are in same plane；Magnetic induction is read
The housing bottom of head is taken to be equipped with the symmetrical protrusion being easily installed, symmetrical rising height one, which is shown, realizes magnetic induction component and measurement
The just tangent installation of circumference of gear, i.e. realization magnetic induction component center, the concentricity for measuring gear, machine tool chief axis installation.
Compared with the existing technology, the present invention has the following advantages that and positive technical effect:
1, inventive encoder has hypersensitivity, precision and reaction speed using a kind of, and matches with gear is measured
The magnetic resistance sensor with higher advantageous characteristic is closed, using gear induced magnetism line working principle, gear progress is non-to measuring
Contact type scanning generates high reliability cosine and sine signal and reference zero signal, right using FPGA field programmable logic device
Cosine and sine signal direct current biasing error, amplitude error and the quadrature phase error of ADC modulus switching device sampling carry out real-time
Amendment and compensation, and save and call using by error parameter write-in FPGA field programmable logic device in-chip FLASH ROM
Mode, carry out FPGA program power on it is automatic recalibrate and the automatic adjusument to error, realize the height to cosine and sine signal
Accuracy interpolation subdivision, and reference zero comparator circuit is combined, to generated respectively inside encoder system relative to powering on
The high line of the high line number relative position value of the shaft rotation angle at moment and the shaft rotation angle relative to reference zero signal
Number absolute position values, realize the various errors of cosine and sine signal are calibrated automatically, automatic adjusument function, improve encoder
Precision and reliability, and without manual debugging be fully automated operation, greatly improve production efficiency.Inventive encoder
In the operating conditions such as rapid drilling, rapid changing knife and continuity tapping, the processing, positioning, control essence of stability can be remained
Degree；Structure is simple, small in size, light-weight, easy to install and impact resistance and environmental suitability are strong, high reliablity, anti-vibration, height
Positioning, the resetting essence of machine tool chief axis greatly improved while reducing complicated machinery transmission mechanism in frequency response, high-precision
Degree, to improve the whole accuracy in measurement and processing efficiency of numerically-controlled machine tool.
2, using serial bus type transmission mode, anti-interference ability is improved, there is higher reliability and real-time, inspection
It surveys precision height and can be carried out high-speed response.Incremental magnetic induction type bus type code device signal is connect by RS485 RS422 bus
Mouth output, the serial communication protocols such as compatible BISS, SSI, and can be surveyed under conditions of 20000 revs/min of turn up or more
Determine absolute position.Magnetic induction read head has selected high-precision sensing chip, can be with using gear induced magnetism line working principle
Identification is located at the angle position that gear is measured immediately below chip, realizes high-precision, high reliability detection.
3, heavy caliber hollow shaft is installed, and without complicated mechanical transmission structure, is not needed to carry any bearing, also not needed
Any machenical coupling measures direct geared and is sleeved on machine tool chief axis, on electro spindle and with machine tool chief axis, the synchronous rotation of electro spindle
Turn.High-precision encoder and machine tool chief axis, electro spindle is direct-connected, reducing transmission device bring error simultaneously, is greatly improving
Processing, positioning accuracy, solve the problems such as photoelectric encoder high speed rotation is to axial float and sensitive circular runout, improve
The adaptability of product, and there are a series of excellent drive characteristics, especially suitable for machine tool chief axis, electro spindle high speed and high precision processing
Occasion.
4, coding disk is done with greater advantage compared to magnet ring type coding disk with measurement gear, plasticity is good, is convenient for
Processing, uniformity are good, and dimensional accuracy more preferably controls, and meets different applications, and more most heavy is produced through magnetic resistance sensor
Raw cosine and sine signal accuracy of waveform is high, and consistency is good.
5, the simplification of magnetic induction encoder mechanical structure is firm, measure between gear and magnetic induction read head using it is non-contact,
It is designed without abrasion, the characteristic with anti-vibration, anticorrosive, antipollution and wide operating temperature, fast response time adapts to high speed and revolves
Transhipment is dynamic, can be applied to the immalleable field of photoelectric encoder, precision is high, and the service life is long, and direct-drive machine error is small, and does not have
There is mechanism back clearance problem.
6, magnetic induction read head structure novel, the firm, strong shock resistance of design, degree of protection are high, up to IP68, environment
Adaptability is good, and stable and reliable working performance, accurate positioning, installation are easy and easy to use.
Detailed description of the invention
Fig. 1 is high speed and super precision machine tool chief axis of the present invention, electro spindle incremental magnetic induction type bus type encoder overall structure is shown
It is intended to；
Fig. 2 is the schematic block circuit diagram of magnetic induction read head of the present invention；
Fig. 3 is the functional block diagram of FPGA interpolation sub-circuit of the present invention；
Fig. 4 A is a kind of structural schematic diagram that the present invention measures gear；
Fig. 4 B is another structural schematic diagram that the present invention measures gear；
Fig. 5 is BISSC serial communication protocol timing waveform of the present invention.
Specific embodiment
Below in conjunction with embodiment and Figure of description, the present invention is described in further detail, but implementation of the invention
Mode is without being limited thereto.
Embodiment
Referring to Fig. 1, high speed and super precision machine tool chief axis of the present invention, electro spindle incremental magnetic induction type bus type encoder include suit
On machine tool chief axis, electro spindle and with the ferromagnetism of machine tool chief axis, electro spindle synchronous rotary measure gear 1, and with measure tooth
The magnetic induction read head 2 that wheel 1 is used cooperatively.The gear 1 that measures is equipped with a centre bore for being mounted in live spindle
11；The magnetic induction read head 2 is mounted on the outer upper side for measuring gear 1, the seating side 26 and measurement of magnetic induction read head
The side 12 of gear is in same plane, and adjust magnetic induction read head 2 and measure gear 1 between gap be 0.1 to
0.3mm。
Such as Fig. 2, the circuit part of magnetic induction read head is encapsulated in metal shell 21, including first circuit board 22, magnet steel
23, electrical connector 24, second circuit board 25 are provided with cooperation magnet steel on first circuit board 22 and carry out to change of magnetic field strength situation
The magnetic induction component of real-time detection；The signal condition electricity being electrically connected with magnetic induction component is provided on second circuit board 25
Road and ADC analog to digital conversion circuit, reference zero comparator circuit, FPGA (field programmable logic device) interpolation subdivision electricity
Road and input/output interface circuit, wherein signal conditioning circuit respectively with ADC analog to digital conversion circuit, reference zero comparator circuit
Connection, FPGA (field programmable logic device) interpolation sub-circuit respectively with ADC analog to digital conversion circuit, reference zero comparator
Circuit, input/output interface circuit connection, and input/output interface terminal is drawn from input/output interface circuit.Magnetic induction member
Device generates sine and cosine (A, B) orthogonal differential signal and reference zero (Z) differential signal, sine and cosine (A, B) orthogonal differential signal
After signal conditioning circuit amplification, filtering processing, the single-ended sine and cosine letter of digital quantity is converted into ADC analog to digital conversion circuit
Number, finally handled by FPGA interpolation sub-circuit；And reference zero (Z) differential signal amplifies through signal conditioning circuit and whole
After managing into single-ended signal, into reference zero comparator circuit, it is converted into the digital signal of low and high level, it is thin to be sent into FPGA interpolation
Parallel circuit is handled.The metal shell 21 of magnetic induction read head 2 uses copper alloy or aluminum alloy material, including 27 He of cylinder body
Upper cover 28 of the spiral-lock right above cylinder body 27, is attached between cylinder body 27 and upper cover 28 by screw or solid gum, and carry out
Electron pouring sealant sealing, the circuit part of magnetic induction read head are placed in cylinder body and the seal chamber of upper cover composition, and outside is equipped with
Metal waterproof connector is electrically connected with input/output interface circuit, realizes the output of incremental bus type current position signal.
The magnetic induction component is SMRE (Semiconductor MagnetoResistive Element) semiconductor
Magnetoresistive element or TMR (Tunnel MagnetoResistance) tunnel magneto resistance sensor.Magnetic resistance sensor chip
Can be superior, there is high magnetic field gradient sensitivity, can detecte small changes of magnetic field, output signal has good temperature
Stability uses push-pull type Wheatstone bridge design, and the gradient value to externally-applied magnetic field along sensor sensing direction provides difference
Voltage output, and the quadrature voltage output signal that two-way has precise phase difference is generated, to detect the position for measuring gear rotation
It sets and direction.Cooperate magnetic induction encoder location and installation technique and welding circuit board production technology, such as magnetic induction chip pin
The design etc. of pad guarantees that cosine and sine signal quadrature phase error is reasonably limiting in range.
In work, machine tool chief axis, electro spindle, which drive, measures gear rotation, the magnetic strength on magnetic induction read head first circuit board
It answers component to cooperate magnet steel, using gear induced magnetism line working principle, carries out non-contact scanning to gear is measured, generate high
Reliability sine and cosine orthogonal differential signal and reference zero differential signal put differential signal by signal conditioning circuit
Greatly, shaping, and high frequency spurs are filtered out, ADC analog to digital conversion circuit is sampled using FPGA field programmable logic device just remaining
String signal direct current biasing error, amplitude error and quadrature phase error are corrected and are compensated in real time, and error parameter is write
Enter FPGA field programmable logic device in-chip FLASH ROM and save and power on calling, realizes the high-precision to cosine and sine signal
Interpolation subdivision, and reference zero comparator circuit is combined, to generated respectively inside encoder system relative to powering on the moment
Shaft rotation angle high line number relative position value and relative to reference zero signal shaft rotation angle high line number it is exhausted
To positional value.
The present invention uses FPGA field programmable logic device, straight to the cosine and sine signal of ADC analog to digital conversion circuit sampling
Stream biased error, amplitude error and quadrature phase error are corrected and are compensated in real time, are realized to the high-precision of cosine and sine signal
Interpolation subdivision is spent, functional block diagram is as shown in figure 3, include direct current biasing error compensation module, amplitude error compensating module, sine and cosine
Signal is most worth module, memory module, frequency multiplication module, Coordinate Rotation Digital computing module and shaft rotation angle and generates mould
Block, shaft rotation angle generation module are connect with reference zero comparator circuit, Coordinate Rotation Digital computing module, direct current biasing
Error compensation module, amplitude error compensating module, frequency multiplication module and Coordinate Rotation Digital computing module are sequentially connected, just remaining
String signal is most worth module and connect respectively with direct current biasing error compensation module, amplitude error compensating module, memory module, stores mould
Block is used to store the operation result of direct current biasing error compensation module, amplitude error compensating module, cosine and sine signal most value module.
Frequency multiplication module includes cosine and sine signal multiplier module, cosine and sine signal phase shift block, adjustment circuit module, wherein sine and cosine
There are two signal multiplication module is set, the input terminal of a cosine and sine signal multiplier module is connect with amplitude error compensating module, defeated
Outlet is connect with adjustment circuit module；The input terminal of another cosine and sine signal multiplier module passes through cosine and sine signal phase shift block
It is connect with amplitude error compensating module, output end is connect with adjustment circuit module, adjustment circuit module and Coordinate Rotation Digital meter
Calculate module connection.
The sine and cosine orthogonal differential signal of magnetic induction component output, by signal conditioning circuit, to orthogonal differential signal
It amplifies, Shape correction, and filters out high frequency spurs and even-order harmonic.Using ADC analog to digital conversion circuit to sine wave signal and
Cosine wave signal carries out the acquisition of high speed real-time synchronization, and carries out digital filtering, filtering method by FPGA are as follows: eight numbers of continuous acquisition
According to maximum two sampled values of removal, the smallest two sampled values, the average value of lower four sampled values of remainder is as current form
Sampled value.Using such digital filtering method, the shake, jump and interference of sampled data are eliminated well.
Due to being influenced by factors such as measurement Gearmaking Technology, power-supply fluctuation, variation of ambient temperature, monocycle sine and cosine
The sampling maximum value and minimum value of signal can all have data dithering all the time, measure the sine and cosine letter that gear revolves sampling of turning around
Number maximum value and minimum value also can all have data dithering all the time, in order to smoothed data shake bring subdivision error, adopt
Take following method to be handled: machine shaft rotates after reference zero signal, and starting cosine and sine signal is most worth module, motor
When shaft passes through reference zero signal for each revolution, count one maximum value of sinusoidal signal, a minimum value, cosine signal one
A maximum value, a minimum value, eight periods of continuous counter sample and obtain eight sinusoidal signal maximum values, minimum values, and more than eight
String signal maximum value, minimum value.Maximum two sampled values, the smallest two sampled values are removed, lower four sampled values of remainder
Sampling maximum value and minimum value of the average value as cosine and sine signal.
Following formula is run in direct current biasing error compensation module and amplitude error compensating module, derives direct current biasing
Error and amplitude error；
SIN (θ+)=VCC/2+offset_A+Ksin (θ+α)；<1>
SIN (θ -)=VCC/2+offset_B-Lsin (θ+α)；<2>
SIN (θ)=SIN (θ+)-SIN (θ -)=offset_A-offset_B+ (K+L) sin (θ+α)；<3>
COS (θ+)=VCC/2+offset_C+Mcos (θ+β)；<4>
COS (θ -)=VCC/2+offset_D-Ncos (θ+β)；<5>
COS (θ)=COS (θ+)-COS (θ -)=offset_C-offset_D+ (M+N) cos (θ+β)；<6>
In above-mentioned formula, SIN (θ+), SIN (θ -), COS (θ+), COS (θ -) are that magnetic induction component exports sine and cosine letter
Number differential signal, SIN (θ), COS (θ) are the cosine and sine signal obtained after signal conditioning circuit.offset_A,
Offset_C is the DC deviation amount of sine and cosine positive differential signal, and offset_B, offset_D are sine and cosine negative differential signal
DC deviation amount, K, M are the amplitude deviation factor of sine and cosine positive differential signal, and L, N are that the amplitude of sine and cosine negative differential signal is inclined
Poor coefficient, α, β are cosine and sine signal phase deviation.From the maximum value of cosine and sine signal, minimum value:
SIN (90 °)=offset_A-offset_B+ (K+L) sin (90 °)；<7>
SIN (270 °)=offset_A-offset_B+ (K+L) sin (270 °)；<8>
SIN (90 °)+SIN (270 °)=2 (offset_A-offset_B)；<9>
SIN (90 °)-SIN (270 °)=2 (K+L)；<10>
Offset_A-offset_B=(SIN (90 °)+SIN (270 °))/2；<11>
K+L=(SIN (90 °)-SIN (270 °))/2；<12>
Obtain the sampling maximum value and minimum value of sinusoidal signal, the direct current biasing error and amplitude of sinusoidal signal that you can get it
Error similarly can also obtain the direct current biasing error and amplitude error of cosine signal.
Direct current biasing error is subtracted by the current any position moment waveform sample values by digital filtering processing, can be obtained
To the cosine and sine signal comprising amplitude error and quadrature phase error:
SIN (θ)-(offset_A-offset_B)=(K+L) sin (θ+α)
COS (θ)-(offset_C-offset_D)=(M+N) cos (θ+β)
Both sides obtain formula simultaneously multiplied by amplitude deviation factor:
(M+N) (SIN (θ)-(offset_A-offset_B))=(M+N) (K+L) sin (θ+α)
(K+L) (COS (θ)-(offset_C-offset_D))=(K+L) (M+N) cos (θ+β)
The two-way cosine and sine signal of the direct current biasing error that is eliminated and amplitude error, the tangent letter of negating if two formulas are divided by
Cosine and sine signal angular positional value only comprising quadrature phase error can be obtained in number.
The direct current biasing error amount and amplitude that above-mentioned operation obtains are carried out to sampling maximum value, the minimum value of cosine and sine signal
Error amount is written FPGA in-chip FLASH ROM (i.e. memory module) and saves, and calls in automatically after powering on next time, and then to magnetic strength
The error for the cosine and sine signal for answering component to generate carries out amendment in real time and compensation.If error deviation threshold value is greater than a certain setting
Value, such as influence situations such as magnetic induction read head is reinstalled, then FPGA program is recalibrated automatically, to realize to error
Automatic adjusument.
Then the cosine and sine signal for having eliminated direct current biasing error and amplitude error is carried out using frequency multiplication technology
Amendment, i.e., be transformed into direct current biasing error and amplitude error for quadrature phase error by phase shift, frequency multiplication, adjust through rear class
After circuit module goes removing DC bias error and adjustment amplitude, use the cosine and sine signal of the two-way high quality of two frequencys multiplication as original
Signal carries out interpolation subdivision again in Coordinate Rotation Digital computing module, can improve subdivision accuracy and reduce to sine and cosine
The orthogonality requirement of signal.Coordinate Rotation Digital computing module is based on Coordinate Rotation Digital and calculates (CORDIC) algorithm, calculates anti-
Tangent seeks phase value, show that shaft rotates angle present position values, i.e., rotates the phase of angle relative to the shaft for powering on the moment
To positional value；The signal conditioning circuit is to single-ended signal is generated after reference zero differential signal amplification shaping, filtering, into ginseng
Zero point comparator circuit is examined, the digital signal of low and high level is converted into, shaft rotation angle generation module is recently entered, generates phase
For the absolute position values of the shaft rotation angle of reference zero signal.
The ADA4950-2 collection of high-speed-differential operational amplifier preferred Anolog Devices company in signal conditioning circuit
At circuit chip；ADC modulus switching device preferred embodiment, using the multi-level differential assembly line of Anolog Devices company
The high-speed parallel AD9248 IC chip of framework；The preferred FPGA field programmable logic device of interpolation sub-circuit
10M16SCU169I7G IC chip.
The characteristics of whole algorithms are handled using FPGA, sufficiently use the operation of FPGA pipeline parallel method, and utilize FPGA
The modules such as inside included memory block, hardware multiplier improve hardware algorithm and realize performance, and speed is fast, and real-time is high, meet
Requirement of the motion control arithmetic to current location real-time.Magnetic induction component is exported just using digital circuit processing mode
The various errors of cosine signal are effectively corrected and are compensated, and improve the accuracy and reliability that difference mends subdivision, and then improve
The subdivision accuracy and resolution ratio of cosine and sine signal, and save and adjust using by error parameter write-in FPGA in-chip FLASH ROM
Mode, progress FPGA program is recalibrated automatically and the automatic adjusument to error.Pass through high-speed ADC analog to digital conversion circuit
With working in coordination for FPGA field programmable logic device, the data acquisition and procession of high-speed, high precision is realized, by serial
Communications protocol bus realizes the data output of high-speed and high-efficiency, to provide more accurate location information for servo-control system
Meet the requirement of high speed, high-precision control.
For the measurement gear tool there are two types of magnetic track, one is that sine and cosine (A, B) orthogonal differential signal exports magnetic track 14, the number of teeth
It is preferred that 512 teeth；Secondly exporting magnetic track 13 for reference zero (Z) differential signal.Reference zero (Z) differential signal output magnetic track has
Two kinds of structure types, one kind only lacking a tooth than sine and cosine magnetic track for a circle, and as shown in Figure 4 A, one kind is only one, a circle
Tooth, as shown in Figure 4 B.
In normal use condition and range, can be according to practical main shaft or motor space the case where, is to measuring the outer of gear
Diameter, thickness, hole size and modulus claim, measure gear specification modulus can for 0.2,0.3,0.4,0.5,0.6,0.8,
1.0 or 2.0.Measure when gear and magnetic induction read head are installed notably direction, it is necessary to carry out corresponding installation up and down, otherwise signal
It is bad.When magnetic induction read head being installed and measuring gear, it is recommended to use the clearance gauge of standard thickness (such as 0.15 millimeter), it both can be accurate
Guarantee magnetic induction component and measures the clipping room of gear away between 0.3mm, and can get splendid signal quality 0.1.
In addition, being equipped with the symmetrical protrusion being easily installed in the bottom of the metal shell 21 of magnetic induction read head, symmetrical protrusion is located at metal
The symmetrical rising height of the two sides of 21 bottom of shell, two sides is consistent, to realize magnetic induction component and measure circumference of gear positive
It cuts, that is, the concentricity realized magnetic induction component center, measure gear, machine tool chief axis installation, then passes through screw for magnetic induction
Read head is fastenedly connected with read head fixing base, finally extracts clearance gauge out or rotation measures gear and takes out clearance gauge.
The precision for measuring Gear Processing has a huge impact the precision and consistency of code device signal.Industrial application
In, the precise measure gear of 6 grades of Ying Xuanyong national standard or higher precision.Code device signal line number can be carried out by measuring number of gear teeth
Adjustment, and machine tooling, positioning accuracy are influenced in turn.There are three types of mounting means: 1, hot charging for the measurement gear tool.Using this
When technique, the internal diameter for producing measurement gear should be slightly less than the main shaft diameter of axle.Under room temperature, measuring gear cannot connect with main shaft, lead to
Crossing heating measurement gear expands material, at this moment can will measure gear on main shaft, then the cooling gear that measures receives material
Contracting, the final gear that measures firmly are pressed on main shaft.2, it is tightened on the shaft shoulder.Gear will be measured on main shaft, use spiral shell
Nail is fixed on gear is measured on the main shaft shaft shoulder.3, it is clamped by axis nut.It measures gear to be installed on spindle shaft, passes through axis spiral shell
Mother is pressed on a component；Customer requirement can also be answered, an integration type shaft nut, therefore internal diameter are assembled on measuring gear
On have corresponding screw thread.
Inventive encoder data format is as shown in table 1, and BISSC serial communication protocol timing waveform is as shown in Figure 5:
1 incremental magnetic induction type bus type encoder data format of table
Note 1: " Ack ", confirmation signal, magnetic induction encoder receive the confirmation feedback of the clock signal of host computer transmission,
And begin preparing transmission location data.
Note 2: " Start " and " 0 ", serial communication data transmit start bit, and magnetic induction encoder signals are opened to main interface
Begin transmission data.
Note 3: " Relative Position " rotates the high line number relative position of angle relative to the shaft for powering on the moment
Value, binary format, 24, line number spilling raps around to zero.
Note 4: the high line number of " Absolute Position ", the shaft rotation angle relative to reference zero signal are absolute
Positional value, binary format, 24, line number spilling raps around to zero.
Note 5: " Zero ", zero signal flag bit, original state are " 0 ", low level；Shaft rotation is believed by reference zero
After number, the position " ZERO " position, perseverance is " 1 ", high level.
Note 6: " Error ", error bit, low level are effective." 1 " indicates the location information of transmission by magnetic induction read head
The verification of built-in security checking algorithm, as a result correctly；" 0 " indicates internal detection failure, and location information is insincere.
Note 7: " Warn " alerts position, and low level is effective." 1 " indicates the location information of transmission by magnetic induction read head
The verification of built-in security checking algorithm, as a result correctly；" 0 " indicates that internal detection exceeds threshold value, and location information is insincere.
Note 8: " CRC ", check bit, relative position, absolute position, mistake and alarm data check bit amount to 6.
In Fig. 5, " MA ", which refers to, is transferred to magnetic induction encoder position acquisition request and timing information (clock) from host computer
Magnetic induction encoder；" SLO " refers to position data from magnetic induction encoder transmission to the main interface synchronous with MA；"Timeout"
For time-out period, a request circulation starts and another request recycles the time between starting.
Incremental magnetic induction type bus type encoder data format is acted on, for used in high speed and super precision machine tool chief axis, electro spindle
Synchronous motor, asynchronous machine shaft rotation angle current location acquisition can be handled well.
Asynchronous machine rotor winding induced electromotive force and electric current due between magnetic field there is relative motion, and with magnetic field phase
Interaction generates electromagnetic torque, realizes energy conversion, because torque current is vertical with exciting current electrical angle, position data increment is true
Fixed, asynchronous machine is once powering on and can work normally；The position of magnetic pole for needing to know rotor when synchronous motor startup, can
High-torque starts servo motor, and absolute value encoder is thus needed definitely to detect the current location of rotor.However magnetic induction
Incremental bus type encoder one, which powers on, only knows relative position, in this way for synchronous motor, it is necessary to some special processing
Mode after finding reference zero signal, then is rotated with current spindle for example, shaft low speed first turns around with station-keeping data
Algorithm process, but this processing mode are done in the absolute position of angle, and first lap cannot be used for part processing because torque current with
Exciting current electrical angle phase relation do not determine, can high-torque starting when machine shaft rotation is after reference zero signal
Servo motor in engineer application, can use other software processing methods certainly, for example, high-frequency signal injection, to obtain electricity
Phase relation of angle.
Selection incremental magnetic induction type bus type encoder data format transmission method overcomes synchronization for synchronous motor
Motor powers on the drawbacks of just needing absolute value encoder definitely to detect rotor current location, expands application field, and also
One big advantage, i.e. measurement gear is relatively easy to machine, select the magnetic induction encoder of absolute position then measure gear structure it is complicated,
Difficulty of processing is big, requires machining tool overall performance high.
The incremental magnetic induction type bus type code device signal via 10 core shielded twisted pair lines, by RS485 or
The output of RS422 bus interface, the serial communication protocols such as compatible BISS, SSI, and can be at 20000 revs/min of turn up or more
Under conditions of measure absolute position, can be widely applied to the fields such as numerically-controlled machine tool, robot, elevator and industrial automation.
One of the foregoing is merely presently preferred embodiments of the present invention, is not intended to restrict the invention, all in the present invention
Spirit and principle within made any modifications, equivalent replacements, and improvements etc., should be included in protection scope of the present invention it
It is interior.
Claims (8)
1. high speed and super precision machine tool chief axis, electro spindle incremental magnetic induction type bus type encoder, which is characterized in that including being sleeved on machine
Bed main shaft, on electro spindle and with machine tool chief axis, the measurements gear of electro spindle synchronous rotary and the magnetic that is used cooperatively with measurement gear
Incude read head；The measurement gear is equipped with sine and cosine orthogonal differential signal output magnetic track and reference zero differential signal exports magnetic
Road；It is thin that magnetic induction component, signal conditioning circuit, reference zero comparator circuit and FPGA interpolation are equipped in magnetic induction read head
Parallel circuit, magnetic induction component and the measurement just tangent installation of circumference of gear；The magnetic induction component is non-to gear progress is measured
Sine and cosine orthogonal differential signal and reference zero differential signal caused by contact type scanning, after signal conditioning circuit, by
FPGA interpolation sub-circuit is corrected and is compensated in real time to its direct current biasing error, amplitude error and quadrature phase error,
And reference zero comparator circuit is combined, to generate the relative position value for rotating angle relative to the shaft for powering on the moment respectively
With the absolute position values of the shaft rotation angle relative to reference zero signal；
The FPGA interpolation sub-circuit includes direct current biasing error compensation module, amplitude error compensating module, cosine and sine signal
Most it is worth module, memory module, frequency multiplication module, Coordinate Rotation Digital computing module and shaft and rotates angle generation module, turns
Axis rotation angle generation module is connect with reference zero comparator circuit, Coordinate Rotation Digital computing module, direct current biasing error
Compensating module, amplitude error compensating module, frequency multiplication module and Coordinate Rotation Digital computing module are sequentially connected, sine and cosine letter
Number most value module is connect with direct current biasing error compensation module, amplitude error compensating module, memory module respectively, cosine and sine signal
Most value module is used to seek the sampling maximum value and minimum value of cosine and sine signal, and memory module is for storing direct current biasing error benefit
Repay the operation result of module, amplitude error compensating module, cosine and sine signal most value module；
The reference zero differential signal output magnetic track for measuring gear is the structure that a circle only has a tooth, or is a circle ratio
Sine and cosine orthogonal differential signal output magnetic track only lacks the structure of a tooth.
2. incremental magnetic induction type bus type encoder according to claim 1, which is characterized in that the frequency multiplication module
Including cosine and sine signal multiplier module, cosine and sine signal phase shift block, adjustment circuit module, wherein cosine and sine signal multiplier module
If there are two, the input terminal of a cosine and sine signal multiplier module is connect with amplitude error compensating module, output end and adjustment electricity
The connection of road module；The input terminal of another cosine and sine signal multiplier module is mended by cosine and sine signal phase shift block and amplitude error
Module connection is repaid, output end is connect with adjustment circuit module, and adjustment circuit module is connect with Coordinate Rotation Digital computing module.
3. incremental magnetic induction type bus type encoder according to claim 2, which is characterized in that the direct current biasing error
Compensating module and amplitude error compensating module derive the direct current biasing error and amplitude error of cosine and sine signal respectively；Then sharp
Quadrature phase error is transformed by direct current biasing error and amplitude error by phase shift, frequency multiplication with frequency multiplication module, is passed through
After adjustment circuit module goes removing DC bias error and adjustment amplitude, use the two-way cosine and sine signal of two frequencys multiplication as original signal
Carry out interpolation subdivision again in Coordinate Rotation Digital computing module；The Coordinate Rotation Digital computing module calculates arc tangent, asks
Phase value is taken, show that shaft rotates angle present position values, i.e., rotates the relative position of angle relative to the shaft for powering on the moment
Value；
The signal conditioning circuit is to single-ended signal is generated after reference zero differential signal amplification shaping, filtering, into reference to zero
Point comparator circuit, be converted into the digital signal of low and high level, recently enter shaft rotation angle generation module, generate relative to
The absolute position values of the shaft rotation angle of reference zero signal.
4. incremental magnetic induction type bus type encoder according to claim 1, which is characterized in that the memory module is position
In the direct current biasing error compensation mould that FLASH ROM, FPGA the interpolation sub-circuit in FPGA piece calls FLASH ROM to be stored
Block, amplitude error compensating module operation result, to realize that FPGA program is recalibrated and automatic adjusument to error automatically.
5. incremental magnetic induction type bus type encoder according to claim 1, which is characterized in that the magnetic induction read head
Positioned at upper side outside measurement gear and the gap between measurement gear is 0.1 to 0.3mm.
6. incremental magnetic induction type bus type encoder according to claim 1, which is characterized in that the magnetic induction read head
Seating side and measure gear side be in same plane；The housing bottom of magnetic induction read head is symmetrical equipped with being easily installed
Protrusion, symmetrical rising height one, which is shown, to be realized magnetic induction component and measures the just tangent installation of circumference of gear, i.e. realization magnetic induction
Component center, the concentricity for measuring gear, machine tool chief axis installation.
7. incremental magnetic induction type bus type encoder according to claim 1, which is characterized in that the measurement gear is equipped with
One centre bore for being mounted in live spindle；The measurement gear set specifications modulus be 0.2,0.3,0.4,0.5,0.6,
0.8,1.0 or 2.0.
8. incremental magnetic induction type bus type encoder according to claim 1, which is characterized in that the magnetic induction read head
Inside it is additionally provided with the ADC analog to digital conversion circuit being connected between signal conditioning circuit and FPGA interpolation sub-circuit.
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