CN106441403B - Bridge type magnetic sensor initial zero position voltage adjusting zero method - Google Patents

Bridge type magnetic sensor initial zero position voltage adjusting zero method Download PDF

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Publication number
CN106441403B
CN106441403B CN201610831805.XA CN201610831805A CN106441403B CN 106441403 B CN106441403 B CN 106441403B CN 201610831805 A CN201610831805 A CN 201610831805A CN 106441403 B CN106441403 B CN 106441403B
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zero
sensor
regulator resistor
type magnetic
resistance
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CN106441403A (en
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马少杰
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Suzhou Rong Weibang Information Technology Co Ltd
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Suzhou Rong Weibang Information Technology Co Ltd
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01DMEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D18/00Testing or calibrating apparatus or arrangements provided for in groups G01D1/00 - G01D15/00

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Measuring Magnetic Variables (AREA)
  • Measuring Instrument Details And Bridges, And Automatic Balancing Devices (AREA)
  • Indication And Recording Devices For Special Purposes And Tariff Metering Devices (AREA)

Abstract

The invention discloses a kind of bridge type magnetic sensor initial zero position voltage adjusting zero methods, are carried out using following steps: step 1, bridge type magnetic sensor production encapsulation before, Wheatstone bridge initial zero position voltage, the input resistance, output resistance of accurate measurement sensor;Step 2, the average resistance value size for calculating sensor;Step 3, the zero-regulator resistor for calculating the higher bridge arm parallel connection of current potential;Step 4, serial or parallel connection goes out the zero-regulator resistor of required resistance value from zero-regulator resistor sequence;Zero-regulator resistor is connected in parallel on the higher bridge arm of current potential, and completes the packaging and testing of sensor by step 5.Sensor external adjusting zero method is changed into internal adjusting zero method by the present invention, by sensor production manufacturer complete zeroing test and production, user using when no longer need to return to zero again, receiving degree is high, it returns to zero relative in parallel connection outside potentiometer, this method stable connection is reliable, increases service life.

Description

Bridge type magnetic sensor initial zero position voltage adjusting zero method
Technical field
The present invention relates to sensor field, more particularly a kind of bridge type magnetic sensor initial zero position voltage adjusting zero method.
Background technique
With the further development of microelectric technique and computer, the application of micro-cantilever bridge type magnetic sensor is more and more general Time, it is widely used in space flight, aviation, petrochemical industry, dynamic power machine, biomedical engineering, meteorology, geology, seismic survey etc. Every field.At this point, to realize that the precise measurement of piezoresistive bridge sensor and real-time monitoring are particularly important.Bridge type magnetic sensor It is important family in sensor family, the measurement of many physical quantitys such as pressure, load, strain, acceleration, displacement etc., frequently with The sensor of bridge-type principle.Since (ion distribution unevenness causes resistance value big to many reasons when such as MEMS technology production arm resistance It is small different), when input is when being measured as zero, output is not zero, that is, there is zero point.It is typically due to cantilever beam bridge-type sensing The voltage signal of device output is very faint, needs to carry out subsequent enhanced processing to voltage signal, if initial zero position voltage is excessive Operational amplifier saturation is caused then to be unable to reach the requirement of precise measurement.How zero-point voltage to be controlled in acceptable range It is interior, can usually there be two class of hardware and software there are many method.Hardware zeroing is directly to be eliminated zero point using circuit appropriate, He can have again is divided into hand adjustment zeroing and program automatic zero set.Zero point actually " is remembered " in software zeroing, then data processing again In eliminated.
Summary of the invention
1, the purpose of the present invention.
Before bridge type magnetic sensor encapsulation factory, the initial zero position voltage zeroing work of bridge type magnetic sensor is completed, user uses Shi Buzai needs to return to zero again.
2, the technical solution adopted in the present invention.
Bridge type magnetic sensor initial zero position voltage adjusting zero method proposed by the present invention carries out in accordance with the following steps:
Step 1, bridge type magnetic sensor production encapsulation before, the Wheatstone bridge initial zero position voltage of accurate measurement sensor、 Input resistance, output resistance:
WhereinFor four arm resistances of Wheatstone bridge,For supply voltage,Electricity is exported for zero-bit Pressure;
Step 2, the average resistance value size for calculating sensor:
Step 3, the zero-regulator resistor for calculating the higher bridge arm parallel connection of current potential:
Step 4, serial or parallel connection goes out the zero-regulator resistor of required resistance value from zero-regulator resistor sequence
Step 5, by zero-regulator resistorIt is connected in parallel on the higher bridge arm of current potential, and completes the packaging and testing of sensor.
In further specific embodiment, in the step 3:
It is available
In further specific embodiment, the zero-regulator resistor is non-pressure sensitive, is not become with sensor input signal Change and changes.
3, beneficial effects of the present invention.
(1) sensor external adjusting zero method is changed into internal adjusting zero method by the present invention, by sensor production manufacturer Complete zeroing test and production, user using when no longer need to return to zero again, receiving degree is high;
(2) adjusting zero method proposed by the present invention is more easy compared with other schemes, it is only necessary to which measuring three physical quantitys can be true The size of zero resistance of setting the tone resistance value;
(3) present invention returns to zero relative in parallel connection outside potentiometer, and this method stable connection is reliable, increases using the longevity Life;
(4) present invention is easy to sensor overall package, improves anti high overload ability;
(5) need to demarcate after inventive sensor completes, compared to returning to zero after transducer calibration, by zeroing circuit and Calibration helps to obtain the indexs such as the more accurate sensitivity of bridge type magnetic sensor, non-linear electric bridge sealing afterwards together.
Detailed description of the invention
Fig. 1 is circuit diagram of the bridge type magnetic sensor in no zeroing;
Fig. 2 is that bridge type magnetic sensor determines that the circuit diagram after zero-regulator resistor R, R indicate 1-3 resistance simultaneously by the method for the invention Resistance after connection or series connection.
Specific embodiment
Embodiment 1
The present invention provides a kind of method of zeroing that bridge type magnetic sensor reliable and stable can be rapidly completed, specific embodiment It is as follows:
Four arm resistances of Wheatstone bridge are, using direct current supply, supply voltage is, zero-bit Output voltage is, when sensor input signal is zero, have
WhenWhen, that is, there is total null voltage, needs to carry out zeroing processing to sensor.
The present invention according to the actual situation, using manual hardware return to zero mode, in being completed during manufacturing for sensor Zeroing work, needs to measure the average resistance value of Wheatstone bridge arm resistance during zeroing, calculate zeroing electricity by formula The size of resistance rationally determines zero-regulator resistor sequence, comes out zero-regulator resistor R by zero-regulator resistor combined sequence as few as possible, and Make the initial total null voltage of sensor no more than 1mv.
The step of specific bridge type magnetic sensor zeroing are as follows: sensor is powered using DC power supply, unit is, unit of resistance For k Ω.
(1) before bridge type magnetic sensor production encapsulation, the initial zero position voltage of accurate measurement sensor, input resistance, it is defeated Resistance out
(2) sensor is calculated to be averaged resistance value size
(3) parallel resistance resistance value size needed for being calculated according to formula
It is available
(4) by, zero-regulator resistor sequence (k Ω) can be obtained:
1 1.8 3.2 5.6
10 18 32 56
100 180 320 560
1000
The average resistance value that this group of resistance sequence is suitable for sensor arm resistance is 1-5 k Ω, when sensor is averaged resistance value When not in this range, zero-regulator resistor sequence can be analogized in proportion.
For example, pushing away to obtain zero-regulator resistor sequence when the average resistance value of sensor is 100-500 Ω are as follows:
100Ω 180Ω 320Ω 560Ω
1 kΩ 1.8 kΩ 3.2 kΩ 5.6 kΩ
10 kΩ 18 kΩ 32 kΩ 56 kΩ
100 kΩ
The resistance of resistance value needed for (serial or parallel connection) goes out is combined from zero-regulator resistor sequence, and resistance is non-sensitive electricity Resistance does not change with sensor input signal and is changed;
(5) will to be connected in parallel on current potential after the resistance combination (serial or parallel connection) in one or more zero-regulator resistor sequences higher Bridge arm, and the packaging and testing of sensor are completed, as shown in Figure 2, wherein R indicates the resistance after combination.
This method is described further in conjunction with bridge-type acceleration transducer example.
Specific adjustment process:
Example 1: during sensor production, input resistance is surveyed, output resistance, initial zero Position voltage, sensor is using the power supply of 3.3V DC power supply.
By formula
32 are chosen from zero-regulator resistor sequence、18、1.8Resistance, which is cascaded, forms zero-regulator resistor R=51.8
Example 2: during sensor production, input resistance is surveyed, output resistance, initial zero Position voltage, sensor is using the power supply of 3.3V DC power supply.
By formula
100 are chosen from zero-regulator resistor sequenceResistance directly obtains zero-regulator resistor R=100
Resistance R after combination is parallel to the higher electric bridge of current potential (such as figure two), at the beginning of the bridge type magnetic sensor after surveying zeroing Beginning, output voltage was less than 1.It can be encapsulated after resistance R in parallel is fixed, complete zeroing work, then carry out subsequent The work such as transducer calibration.

Claims (1)

1. a kind of bridge type magnetic sensor initial zero position voltage adjusting zero method, it is characterised in that:
Step 1, bridge type magnetic sensor production encapsulation before, the Wheatstone bridge initial zero position voltage of accurate measurement sensor, input Resistance, output resistance:
WhereinFor four arm resistances of Wheatstone bridge,For supply voltage,For zero-bit output voltage;
Step 2, the average resistance value size for calculating sensor:
Step 3, the zero-regulator resistor for calculating the higher bridge arm parallel connection of current potential:
Wherein
It is available
Step 4, serial or parallel connection goes out the zero-regulator resistor of required resistance value from zero-regulator resistor sequence, zero-regulator resistor is non-sensitive electricity Resistance does not change with sensor input signal and is changed;
Step 5, by zero-regulator resistorIt is connected in parallel on the higher bridge arm of current potential, and completes the packaging and testing of sensor.
CN201610831805.XA 2016-09-19 2016-09-19 Bridge type magnetic sensor initial zero position voltage adjusting zero method Active CN106441403B (en)

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Publication number Priority date Publication date Assignee Title
CN110006330B (en) * 2019-04-17 2020-09-15 中国工程物理研究院化工材料研究所 Strain test return-to-zero circuit of wide-resistance-value-range resistance strain sensor
CN114964346B (en) * 2022-04-11 2023-08-01 合肥通用机械研究院有限公司 Sensor testing method
CN115183918B (en) * 2022-07-20 2024-07-02 无锡芯感智半导体有限公司 Bridge balance structure with temperature compensation suitable for MEMS pressure sensor

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CN104913829A (en) * 2015-07-07 2015-09-16 国网上海市电力公司 Single crystal silicon piezoresistive type online oil level detector
CN205450659U (en) * 2015-12-31 2016-08-10 杭州士兰微电子股份有限公司 Signal processing circuit
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