CN105784570B - Particle on-line measuring device and its detection method based on micro-fluidic chip - Google Patents
Particle on-line measuring device and its detection method based on micro-fluidic chip Download PDFInfo
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- 239000000758 substrate Substances 0.000 claims abstract description 31
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- CXQXSVUQTKDNFP-UHFFFAOYSA-N octamethyltrisiloxane Chemical compound C[Si](C)(C)O[Si](C)(C)O[Si](C)(C)C CXQXSVUQTKDNFP-UHFFFAOYSA-N 0.000 claims description 7
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
- G01N15/10—Investigating individual particles
- G01N15/1031—Investigating individual particles by measuring electrical or magnetic effects
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L3/00—Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
- B01L3/50—Containers for the purpose of retaining a material to be analysed, e.g. test tubes
- B01L3/502—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures
- B01L3/5027—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
- G01N15/02—Investigating particle size or size distribution
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L2200/00—Solutions for specific problems relating to chemical or physical laboratory apparatus
- B01L2200/10—Integrating sample preparation and analysis in single entity, e.g. lab-on-a-chip concept
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
- G01N15/10—Investigating individual particles
- G01N2015/1024—Counting particles by non-optical means
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Abstract
The invention discloses a kind of particle on-line measuring device and its detection method based on micro-fluidic chip, described device includes micro-fluidic chip, the first impedance analyzer and the second impedance analyzer；The micro-fluidic chip includes substrate element and the chip body being arranged on substrate element；The chip body includes：The first inlet opening, the second inlet opening, the first fluid hole and the second fluid hole being arranged on substrate element；For the particle separated region under the influence of a magnetic field detaching the ferromagnetic particle in fluid and non-ferromagnetic debris；It is arranged on the magnetic part on substrate element and positioned at first microchannel side and places region；It is placed on the magnetic part to place on region, for providing the magnetic part in magnetic field；Particle detection zone；The present invention can realize that the differentiation of ferromagnetic particle and non-ferromagnetic debris and on-line continuous count in fluid, analyze suitable for fluid on-line checking, the oil liquid detection analysis particularly on navigating ship.
Description
Technical field
The invention belongs to oil liquid detection technical field, specially a kind of particle on-line measuring device based on micro-fluidic chip
And its detection method.
Background technology
Oil Monitoring Technique is a kind of performance change of lubricant currently in use by the monitored machine of analysis and takes
The situation of the wear particle of band, to obtain the lubrication information of machine and state of wear and evaluation machine operating mode and prediction failure,
And determine the technology of failure cause, fault type and failed part.Machine state detection based on Oil Monitoring Technique is modern
One of essential method in industrial maintenance activity, and with considerable economic benefit.For the inspection of metal worn particle in fluid
Survey technology has become the main contents of Oil Monitoring Technique at present.
It, can be by oil of the prior art according to the different operating principle of the sensor selected in fluid on-line detecting system
Liquid online measuring technique is divided into following several：
1st, physico-chemical analysis technology：Refer in laboratory using instrument to the viscosity of oil sample, flash-point, moisture, acid value and gold
Belong to the technology that the physical and chemical indexes such as abrasive grain are detected analysis.Physico-chemical analysis technology accuracy of detection is high, can detect each of lubricating oil
Item performance indicator, makes comprehensive analysis, effectively extends the replacement time limit of lubricating oil.Common oil physical and chemical analysis instrument has viscous
Degree meter, titrator and infrared spectrometer etc..But physico-chemical analysis technology exists simultaneously that detection time is long, of high cost, operating process is multiple
It is miscellaneous, be only used for laboratory measurement, be not suitable for fluid carry out quick online detection the defects of.
2nd, ferrous specturm technique：It is to be detached metal worn particle and according to size from lubricating oil using magnetic gradient and gravity gradient
The oil liquid detection technology arranged.Ferrous specturm technique can judge the size and property type of wear particle in fluid.It is common
Ferrograph device have on-line ferrograph instrument.But there is the inaccuracy of quantitative iron spectrum in ferrous specturm technique, Debris Analysis relies primarily on operation
The know-how and practical experience of person, sampling do not have representativeness, make iron spectrum and are also required to the long period, analyze speed is not high
Defect.
3rd, spectral analysis technique：Including atomic emission spectrometry, atomic absorption spectrography (AAS), infrared spectroscopy and ray
Fluorescent spectrometry.Spectral analysis technique is strong to particle recognition ability, and device integration is high.But there are spectrometers for spectral analysis technique
The defects of device is generally more expensive, and mounting condition is stringent, and experimental expenses is high.
4th, electricity monitoring technology：Common technology therein is resistance-type on-line monitoring technique, is mainly had using different abrasive grains
There is different resistivity, when fluid passes through electric resistance sensor, different resistance values reflect the concentration and size distribution of abrasive grain.But
Resistance-type on-line monitoring technique is not high there are sensitivity, the defects of can not making detection to molecule.
Therefore fluid online measuring technique of the prior art has some limitations, it is impossible to suitable well
For highly sensitive and fluid on-line checking demand.
Invention content
Present invention proposition in view of the above problems, and develop a kind of particle on-line measuring device based on micro-fluidic chip and
Its detection method.
The technological means of the present invention is as follows：
A kind of particle on-line measuring device based on micro-fluidic chip, including micro-fluidic chip, the first impedance analyzer and
Second impedance analyzer；The micro-fluidic chip includes substrate element and the chip body being arranged on substrate element；The core
Piece main body includes：
The first inlet opening, the second inlet opening, the first fluid hole and the second fluid hole being arranged on substrate element；
For the particle point under the influence of a magnetic field detaching the ferromagnetic particle in fluid and non-ferromagnetic debris
From region；The particle separated region includes the first microchannel and the second microchannel that are distributed on substrate element；Containing
The fluid of grain enters the first microchannel by the first inlet opening；Fluid containing particle is micro- logical into second by the second inlet opening
Road；The first opening is offered in the middle part of first microchannel, is offered in the middle part of second microchannel and the described first opening phase
Second opening of connection；The ferromagnetic particle obtained after separating treatment enters particle detection zone via the first microchannel,
The non-ferromagnetic debris obtained after separating treatment enters particle detection zone via the second microchannel；
It is arranged on the magnetic part on substrate element and positioned at first microchannel side and places region；
It is placed on the magnetic part to place on region, for providing the magnetic part in magnetic field；
Particle detection zone；The particle detection zone includes third microchannel, the 4th microchannel, is arranged on substrate element
It is upper and respectively positioned at the first detecting electrode of third microchannel both sides and the second detecting electrode and be arranged on substrate element and
It is located at the third detecting electrode and the 4th detecting electrode of the 4th microchannel both sides respectively；Third microchannel beginning and first micro-
Channel end is connected, and third microchannel end is connected with the first fluid hole；The 4th microchannel beginning and second
Microchannel is connected, and the 4th microchannel end is connected with the second fluid hole；
When ferromagnetic particle is passed through in the third microchannel, between first detecting electrode, the second detecting electrode
Capacitance changes；First impedance analyzer is connected with first detecting electrode, the second detecting electrode, obtains the
Capacitance variation situation between one detecting electrode, the second detecting electrode；According between the first detecting electrode, the second detecting electrode
Capacitance variation situation know the quantity of the ferromagnetic particle by third microchannel；
When non-ferromagnetic debris is passed through in the 4th microchannel, between the third detecting electrode, the 4th detecting electrode
Capacitance change；Second impedance analyzer is connected with the third detecting electrode, the 4th detecting electrode, obtains
Capacitance variation situation between third detecting electrode, the 4th detecting electrode；According to third detecting electrode, the 4th detecting electrode it
Between capacitance variation situation know the quantity of the non-ferromagnetic debris by the 4th microchannel；
In addition, the particle separated region further includes：
The first partition member and the second partition member being arranged between the first microchannel and the second microchannel；Described first
The one end part of partition member has inclined-plane in the beginning of the particle separated region, the other end；Second partition member
One end part in the end of the particle separated region, the other end has inclined-plane；First partition member has oblique
The inclined direction in face and the inclined direction on inclined-plane that second partition member has are symmetrical；By the first partition member and
The setting of second partition member so that the first opening of the first microchannel is more than the second opening of second microchannel；
In addition, described device further includes the display device being connected with the first impedance analyzer, the second impedance analyzer, it should
Display device is used to show the quantity of ferromagnetic particle, the quantity of non-ferromagnetic debris known；
Further, first partition member with inclined-plane angle of inclination and second partition member with
The angle of inclination on inclined-plane is 45 degree；
Further, the substrate element is made of PMMA materials；The chip body is made of PDMS material；
Further, known according to the capacitance variation situation between the first detecting electrode, the second detecting electrode by
The grain size state of the ferromagnetic particle of three microchannels；According to the capacitance variation between third detecting electrode, the 4th detecting electrode
Situation knows the grain size state of the non-ferromagnetic debris by the 4th microchannel.
A kind of particle online test method based on micro-fluidic chip, the detection method utilize described above based on micro-
The particle on-line measuring device of fluidic chip is realized, and is included the following steps：
Step 1：Fluid not containing particle is delivered to the first microchannel by the first inlet opening, by the oil containing particle
Liquid is delivered to the second microchannel by the second inlet opening；
Step 2：Into the ferromagnetic particle in particle separated region under the influence of a magnetic field, by the second microchannel by the
One microchannel and the region that the second microchannel is connected enter the first microchannel, and it is micro- logical along the first microchannel to be delivered to third
Road flows along the second microchannel into the non-ferromagnetic debris continuation in particle separated region and enters the 4th microchannel；
Step 3：When ferromagnetic particle is passed through in the third microchannel, first impedance analyzer obtains the first detection
Capacitance variation situation between electrode, the second detecting electrode；According to the capacitance between the first detecting electrode, the second detecting electrode
Value situation of change knows the quantity of the ferromagnetic particle by third microchannel；When nonferromagnetic is passed through in the 4th microchannel
During grain, second impedance analyzer obtains the capacitance variation situation between third detecting electrode, the 4th detecting electrode；According to
Capacitance variation situation between third detecting electrode, the 4th detecting electrode knows the non-ferromagnetic debris by the 4th microchannel
Quantity；
In addition, the detection method further includes following steps：
Known according to the capacitance variation situation between the first detecting electrode, the second detecting electrode by third microchannel
The grain size state of ferromagnetic particle；According to the capacitance variation situation between third detecting electrode, the 4th detecting electrode know through
Cross the grain size state of the non-ferromagnetic debris of the 4th microchannel.
By adopting the above-described technical solution, particle on-line measuring device provided by the invention based on micro-fluidic chip and
Its detection method, based on the capacitance detecting principle in electricity monitoring technology, can realize in fluid ferromagnetic particle with it is non-ferromagnetic
Property particle differentiation and on-line continuous count, analyzed suitable for fluid on-line checking, the particularly oil liquid detection on navigating ship
Analysis.
Description of the drawings
The structure diagram of Fig. 1 devices of the present invention；
Fig. 2 is the structure diagram of chip body of the present invention and substrate element；
Fig. 3 is the flow chart of the method for the invention；
In figure：1st, substrate element, 2, chip body, the 3, first inlet opening, the 4, second inlet opening, the 5, first fluid hole, 6,
Second fluid hole, 7, particle separated region, 8, magnetic part place region, 10, magnetic part, the 71, first microchannel, 72, the
Two microchannels, the 73, first opening, the 74, second opening, the 75, first partition member, the 76, second partition member, 77, inclined-plane, 91,
Third microchannel, the 92, the 4th microchannel, the 93, first detecting electrode, the 94, second detecting electrode, 95, third detecting electrode, 96,
4th detecting electrode.
Specific embodiment
A kind of particle on-line measuring device based on micro-fluidic chip as depicted in figs. 1 and 2, including micro-fluidic chip,
First impedance analyzer and the second impedance analyzer；The micro-fluidic chip includes substrate element 1 and is arranged on substrate element 1
Chip body 2；The chip body 2 includes：The first inlet opening 3, the second inlet opening 4, first being arranged on substrate element 1
5 and second fluid hole 6 of fluid hole；For the ferromagnetic particle in fluid and non-ferromagnetic debris to be carried out under the influence of a magnetic field
The particle separated region 7 of separation；The particle separated region 7 includes being distributed in the first microchannel 71 on substrate element 1 and the
Two microchannels 72；The fluid containing particle does not enter the first microchannel 71 by the first inlet opening 3；Fluid containing particle passes through
Second inlet opening 4 enters the second microchannel 72；First microchannel, 71 middle part offers the first opening 73, and described second is micro- logical
72 middle part of road offers the second opening 74 being connected with the described first opening 73；The ferromagnetism obtained after separating treatment
Grain enters particle detection zone via the first microchannel 71, and the non-ferromagnetic debris obtained after separating treatment is micro- via second
Channel 72 enters particle detection zone；It is arranged on substrate element 1 and positioned at the magnetic part of 71 side of the first microchannel
Place region 8；It is placed on the magnetic part to place on region 8, for providing the magnetic part 10 in magnetic field；Particle detections area
Domain；The particle detection zone includes third microchannel 91, the 4th microchannel 92, is arranged on substrate element 1 and is located at respectively
The first detecting electrode 93 and the second detecting electrode 94 of 91 both sides of third microchannel and be arranged on substrate element 1 and respectively
95 and the 4th detecting electrode 96 of third detecting electrode positioned at 92 both sides of the 4th microchannel；91 beginning of third microchannel and
One microchannel, 71 end is connected, and 91 end of third microchannel is connected with the first fluid hole 5；4th microchannel 92
Beginning is connected with the second microchannel 72, and 92 end of the 4th microchannel is connected with the second fluid hole 6；When the third is micro-
When channel 91 is by ferromagnetic particle, the capacitance between first detecting electrode 93, the second detecting electrode 94 changes；
First impedance analyzer is connected with first detecting electrode 93, the second detecting electrode 94, obtains the first detecting electrode
93rd, the capacitance variation situation between the second detecting electrode 94；According between the first detecting electrode 93, the second detecting electrode 94
Capacitance variation situation knows the quantity of the ferromagnetic particle by third microchannel 91；When the 4th microchannel 92 is by non-
During ferromagnetic particle, the capacitance between the third detecting electrode 95, the 4th detecting electrode 96 changes；Second resistance
Analysis resistant instrument is connected with the third detecting electrode 95, the 4th detecting electrode 96, obtains third detecting electrode the 95, the 4th and detects
Capacitance variation situation between electrode 96；According to the capacitance variation between third detecting electrode 95, the 4th detecting electrode 96
Situation knows the quantity of the non-ferromagnetic debris by the 4th microchannel 92；In addition, the particle separated region 7 further includes：Cloth
Put the first partition member 75 and the second partition member 76 between the first microchannel 71 and the second microchannel 72；Described first point
Every component 75 one end part in the beginning of the particle separated region 7, the other end has inclined-plane 77；Second separating part
The one end part of part 76 has inclined-plane 77 in the end of the particle separated region 7, the other end；First partition member 75
With inclined-plane 77 inclined direction and second partition member 76 with inclined-plane 77 inclined direction it is symmetrical；Pass through
The setting of first partition member 75 and the second partition member 76 so that the first opening 73 of the first microchannel 71 is more than described second
Second opening 74 of microchannel 72；It is connected in addition, described device is further included with the first impedance analyzer, the second impedance analyzer
Display device, the display device is for showing the quantity of ferromagnetic particle, the quantity of non-ferromagnetic debris known；
Further, first partition member 75 with inclined-plane 77 angle of inclination and second partition member 76 with it is oblique
The angle of inclination in face 77 is 45 degree；Further, the substrate element 1 is made of PMMA materials；The chip body 2 is adopted
It is made of PDMS material；Further, according to the capacitance variation situation between the first detecting electrode 93, the second detecting electrode 94
Know the grain size state by the ferromagnetic particle of third microchannel 91；According to third detecting electrode 95, the 4th detecting electrode 96
Between capacitance variation situation know the grain size state of the non-ferromagnetic debris by the 4th microchannel 92.
A kind of particle online test method based on micro-fluidic chip as shown in Figure 3, the detection method utilize above-mentioned
The particle on-line measuring device based on micro-fluidic chip is realized, and include the following steps：
Step 1：Fluid not containing particle is delivered to the first microchannel 71 by the first inlet opening 3, particle will be contained
Fluid the second microchannel 72 is delivered to by the second inlet opening 4；
Step 2：Into the ferromagnetic particle in particle separated region 7 under the influence of a magnetic field, it is passed through by the second microchannel 72
It crosses the first microchannel 71 and enters the first microchannel 71 with the region that the second microchannel 72 is connected, and is defeated along the first microchannel 71
It send to third microchannel 91, continues to go forward side by side along the flowing of the second microchannel 72 into the non-ferromagnetic debris in particle separated region 7
Enter the 4th microchannel 92；
Step 3：When the third microchannel 91 is by ferromagnetic particle, first impedance analyzer obtains the first inspection
Survey the capacitance variation situation between electrode 93, the second detecting electrode 94；According to the first detecting electrode 93, the second detecting electrode 94
Between capacitance variation situation know the quantity of the ferromagnetic particle by third microchannel 91；When the 4th microchannel 92
During by non-ferromagnetic debris, second impedance analyzer is obtained between third detecting electrode 95, the 4th detecting electrode 96
Capacitance variation situation；According to the capacitance variation situation between third detecting electrode 95, the 4th detecting electrode 96 know by
The quantity of the non-ferromagnetic debris of 4th microchannel 92；
In addition, the detection method further includes following steps：
Known according to the capacitance variation situation between the first detecting electrode 93, the second detecting electrode 94 micro- logical by third
The grain size state of the ferromagnetic particle in road 91；According to the capacitance variation between third detecting electrode 95, the 4th detecting electrode 96
Situation knows the grain size state of the non-ferromagnetic debris by the 4th microchannel 92.
The first detecting electrode 93 of the present invention, the second detecting electrode 94 are located at 91 both sides of third microchannel respectively, micro- in third
When channel 91 is without ferromagnetic particle, the capacitance between the first detecting electrode 93, the second detecting electrode 94 is a certain benchmark
Capacitance, the capacitance between corresponding first detecting electrode 93 of different size of ferromagnetic particle, the second detecting electrode 94 is not
With, different size of ferromagnetic particle is behind third microchannel 91, correspondingly, the first detecting electrode 93, second detection electricity
Capacitance between pole 94 changes, and first impedance analyzer can be according to the first detecting electrode 93, the second detecting electrode
Capacitance variation between 94 generates corresponding pulse signal, and the pulse signal amplitude that the first impedance analyzer generates becomes with capacitance
Change value is corresponding, the first detection electricity when capacitance variations value here refers to third microchannel 91 by ferromagnetic particle
Capacitance between pole 93, the second detecting electrode 94, the first detection electricity during with third microchannel 91 without ferromagnetic particle
The difference of capacitance between pole 93, the second detecting electrode 94；It is carried out by the pulse signal generated to the first impedance analyzer
Statistics can know the quantity of the ferromagnetic particle by third microchannel 91, and then display device can be utilized intuitively will
The quantity of ferromagnetic particle is shown；The size of capacitance variations value also is able to the grain size state of reaction ferromagnetic particle, can be with
The amplitude size of the pulse signal generated according to the first impedance analyzer show that the amplitude of pulse signal is higher, then illustrates ferromagnetic
The grain size of property particle is bigger, and the amplitude of pulse signal is lower, then illustrates that the grain size of ferromagnetic particle is smaller, i.e. the width of pulse signal
There are linear correspondences between value size and the particle size of ferromagnetic particle.
Third detecting electrode 95 of the present invention, the 4th detecting electrode 96 are located at 92 both sides of the 4th microchannel respectively, micro- the 4th
When channel 92 is without non-ferromagnetic debris, the capacitance between third detecting electrode 95, the 4th detecting electrode 96 is a certain base
Pseudo-capacitance value, the capacitance between the corresponding third detecting electrode 95 of different size of non-ferromagnetic debris, the 4th detecting electrode 96
It is different, different size of non-ferromagnetic debris is behind the 4th microchannel 92, correspondingly, third detecting electrode the 95, the 4th
Capacitance between detecting electrode 96 changes, and second impedance analyzer can be examined according to third detecting electrode the 95, the 4th
The capacitance variation surveyed between electrode 96 generates corresponding pulse signal, the pulse signal amplitude that the second impedance analyzer generates with
Capacitance variations value be it is corresponding, the when capacitance variations value here refers to the 4th microchannel 92 by non-ferromagnetic debris
Capacitance between three detecting electrodes 95, the 4th detecting electrode 96, when same 4th microchannel 92 is without non-ferromagnetic debris
The difference of capacitance between third detecting electrode 95, the 4th detecting electrode 96；Pass through the arteries and veins generated to the second impedance analyzer
It rushes signal to be counted, can know the quantity of the non-ferromagnetic debris by the 4th microchannel 92, and then display can be utilized
Device intuitively shows the quantity of non-ferromagnetic debris；The size of capacitance variations value also is able to reaction non-ferromagnetic debris
Grain size state, can be obtained according to the amplitude size of pulse signal that the second impedance analyzer generates, the amplitude of pulse signal
It is higher, then illustrate that the grain size of non-ferromagnetic debris is bigger, the amplitude of pulse signal is lower, then illustrates the grain size of non-ferromagnetic debris
Smaller, i.e., there are linear correspondences between the amplitude size of pulse signal and the particle size of non-ferromagnetic debris.
First detecting electrode 93 and the second detecting electrode 94 and third detecting electrode of the invention, 95 and the 4th detecting electrode
96 specific capacitance detecting principle is similar to plane-parallel capacitor, it is understood that the capacitance calculation formula of plane-parallel capacitor is：Wherein, ε be dielectric constant, the S of medium between metal polar plate be the area of metal polar plate, d is between two metal polar plates
Distance, it can thus be seen that when the permittivity ε between metal polar plate changes, corresponding capacitance C can also become
Change；Similarly, when ferromagnetic particle passes through four microchannels 92 by third microchannel 91 or non-ferromagnetic debris, can squeeze
Go out the fluid of corresponding particle volume, cause between the first detecting electrode 93 and the second detecting electrode 94 or third detecting electrode
95 and the 4th dielectric constant between detecting electrode 96 change, so as to cause the variation of capacitance.
Impedance analyzer is the current instrument for measuring capacitance and generally using, and can be obtained accordingly according to the impedance value measured
Parallel equivalent capacitance, and then obtain actual capacitance value, can be intuitive with the self-contained Labview programmings of impedance analyzer
Reading actual capacitance value.
First detecting electrode 93 of the present invention, the second detecting electrode 94,95 and the 4th detecting electrode of third detecting electrode
96 may be used copper electrode；The substrate element 1 is made of PMMA (polymethyl methacrylate) material, i.e. organic glass,
Material transparent degree is excellent, has good insulating properties and mechanical strength, proportion is less than the half of simple glass, and shatter-resistant ability is but
It is higher by several times of simple glass；The chip body 2 is made of PDMS (dimethyl silicone polymer) material, PDMS material and PMMA
Between material there is good adhesiveness, there is good chemical inertness；It is thick using the PDMS of hundreds of microns thickness under normal circumstances
Film can not only meet the requirement in terms of intensity, and can generate the deformation quantity of bigger；In addition PDMS material has good
Extensibility；By the first partition member 75 with inclined-plane 77, the second partition member 76 with inclined-plane 77, help to prevent non-
Ferromagnetic particle is entered in the first microchannel 71, not the fluid containing particle by micro-injection pump from the first inlet opening 3 into
Enter the first microchannel 71, the fluid containing particle enters the second microchannel 72 by micro-injection pump from the second inlet opening 4；It is described
Display device uses display；The magnetic part 10 uses permanent magnet, and shape comparison rule is easy to coordinate with chip body 2；
Device of the present invention, which further includes, is placed in the first inlet opening 3 and the second inlet opening 4, and the fluid between particle separated region 7 is defeated
Send region；The fluid conveyor zones include the microchannel of the first inlet opening 3 of connection and 71 beginning of the first microchannel and connect
The microchannel at 72 beginning of the second inlet opening 4 and the second microchannel；It is ferromagnetic in fluid when fluid reaches particle separated region 7
Property particle due to the sucking action by magnetic field, be connected by the second microchannel 72 by the first microchannel 71 with the second microchannel 72
Logical region enters the first microchannel 71, and is delivered to third microchannel 91 along the first microchannel 71, into particle Disengagement zone
The effects that non-ferromagnetic debris in domain 7 is due to by self inertia and fluid viscous force, continues to flow along the second microchannel 72,
In addition the inclined design of the first partition member 75 and the second partition member 76 so that there is the second microchannel 72 in the first microchannel 71
One downward impact force prevents non-ferromagnetic debris to flow into the first microchannel 71；Therefore the ferromagnetic particle that separates and
Non-ferromagnetic debris respectively enters 91 and the 4th microchannel 92 of third microchannel.The present invention is in use, by the micro-fluidic chip
It is horizontal positioned.
The present invention is based on the capacitance detecting principles in electricity monitoring technology, can realize ferromagnetic particle and non-ferric in fluid
The differentiation of magnetic-particle and on-line continuous count, and are analyzed suitable for fluid on-line checking, the fluid inspection particularly on navigating ship
Survey analysis；The present invention can realize the real-time measurement of metallic particles in fluid, can obtain respectively ferromagnetic particle with it is non-ferromagnetic
The quantity of property particle, suitable for the on-line checking of fluid, completes the more careful detection and differentiation to particle in fluid.
The foregoing is only a preferred embodiment of the present invention, but protection scope of the present invention be not limited thereto,
Any one skilled in the art in the technical scope disclosed by the present invention, according to the technique and scheme of the present invention and its
Inventive concept is subject to equivalent substitution or change, should be covered by the protection scope of the present invention.
Claims (8)
1. a kind of particle on-line measuring device based on micro-fluidic chip, it is characterised in that described device include micro-fluidic chip,
First impedance analyzer and the second impedance analyzer；The micro-fluidic chip includes substrate element and is arranged on substrate element
Chip body；The chip body includes：
The first inlet opening, the second inlet opening, the first fluid hole and the second fluid hole being arranged on substrate element；
For the particle Disengagement zone under the influence of a magnetic field detaching the ferromagnetic particle in fluid and non-ferromagnetic debris
Domain；The particle separated region includes the first microchannel and the second microchannel that are distributed on substrate element；Not containing particle
Fluid enters the first microchannel by the first inlet opening；Fluid containing particle enters the second microchannel by the second inlet opening；
The first opening is offered in the middle part of first microchannel, is offered and first opening in communication in the middle part of second microchannel
Second opening；The ferromagnetic particle obtained after separating treatment enters particle detection zone via the first microchannel, passes through
The non-ferromagnetic debris obtained after separating treatment enters particle detection zone via the second microchannel；
It is arranged on the magnetic part on substrate element and positioned at first microchannel side and places region；
It is placed on the magnetic part to place on region, for providing the magnetic part in magnetic field；
Particle detection zone；The particle detection zone include third microchannel, the 4th microchannel, be arranged on substrate element and
Respectively positioned at third microchannel both sides the first detecting electrode and the second detecting electrode and be arranged on substrate element and respectively
Third detecting electrode and the 4th detecting electrode positioned at the 4th microchannel both sides；Third microchannel beginning and the first microchannel
End is connected, and third microchannel end is connected with the first fluid hole；The 4th microchannel beginning and second micro- logical
Road is connected, and the 4th microchannel end is connected with the second fluid hole；
When ferromagnetic particle is passed through in the third microchannel, the capacitance between first detecting electrode, the second detecting electrode
Value changes；First impedance analyzer is connected with first detecting electrode, the second detecting electrode, obtains the first inspection
Survey the capacitance variation situation between electrode, the second detecting electrode；According to the electricity between the first detecting electrode, the second detecting electrode
Capacitance situation of change knows the quantity of the ferromagnetic particle by third microchannel；
When non-ferromagnetic debris is passed through in the 4th microchannel, the electricity between the third detecting electrode, the 4th detecting electrode
Capacitance changes；Second impedance analyzer is connected with the third detecting electrode, the 4th detecting electrode, obtains third
Capacitance variation situation between detecting electrode, the 4th detecting electrode；According between third detecting electrode, the 4th detecting electrode
Capacitance variation situation knows the quantity of the non-ferromagnetic debris by the 4th microchannel.
2. the particle on-line measuring device according to claim 1 based on micro-fluidic chip, it is characterised in that the particle
Separated region further includes：
The first partition member and the second partition member being arranged between the first microchannel and the second microchannel；Described first separates
The one end part of component has inclined-plane in the beginning of the particle separated region, the other end；The one of second partition member
End is located at the end of the particle separated region, and the other end has inclined-plane；The inclined-plane that first partition member has
Inclined direction and the inclined direction on inclined-plane that second partition member has are symmetrical；Pass through the first partition member and second
The setting of partition member so that the first opening of the first microchannel is more than the second opening of second microchannel.
3. the particle on-line measuring device according to claim 1 based on micro-fluidic chip, it is characterised in that described device
The display device being connected with the first impedance analyzer, the second impedance analyzer is further included, which is used for knowing
The quantity of ferromagnetic particle, the quantity of non-ferromagnetic debris are shown.
4. the particle on-line measuring device according to claim 2 based on micro-fluidic chip, it is characterised in that described first
Partition member with inclined-plane angle of inclination and second partition member with the angle of inclination on inclined-plane be 45 degree.
5. the particle on-line measuring device according to claim 1 based on micro-fluidic chip, it is characterised in that the substrate
Component is made of PMMA materials；The chip body is made of PDMS material.
6. the particle on-line measuring device according to claim 1 based on micro-fluidic chip, it is characterised in that according to first
Capacitance variation situation between detecting electrode, the second detecting electrode knows the grain size of the ferromagnetic particle by third microchannel
State；Known according to the capacitance variation situation between third detecting electrode, the 4th detecting electrode by the non-of the 4th microchannel
The grain size state of ferromagnetic particle.
7. a kind of particle online test method based on micro-fluidic chip, it is characterised in that the detection method utilizes claim
The particle on-line measuring device based on micro-fluidic chip described in 2 is realized, and include the following steps：
Step 1：Fluid not containing particle is delivered to the first microchannel by the first inlet opening, the fluid containing particle is led to
It crosses the second inlet opening and is delivered to the second microchannel；
Step 2：Into the ferromagnetic particle in particle separated region under the influence of a magnetic field, it is micro- by first by the second microchannel
Channel enters the first microchannel, and be delivered to third microchannel along the first microchannel with the region that the second microchannel is connected,
It is flowed into the non-ferromagnetic debris continuation in particle separated region along the second microchannel and enters the 4th microchannel；
Step 3：When ferromagnetic particle is passed through in the third microchannel, first impedance analyzer obtains the first detection electricity
Capacitance variation situation between pole, the second detecting electrode；According to the capacitance between the first detecting electrode, the second detecting electrode
Situation of change knows the quantity of the ferromagnetic particle by third microchannel；When non-ferromagnetic debris is passed through in the 4th microchannel
When, second impedance analyzer obtains the capacitance variation situation between third detecting electrode, the 4th detecting electrode；According to
Capacitance variation situation between three detecting electrodes, the 4th detecting electrode knows the non-ferromagnetic debris by the 4th microchannel
Quantity.
8. the particle online test method according to claim 7 based on micro-fluidic chip, it is characterised in that the detection
Method further includes following steps：
Known according to the capacitance variation situation between the first detecting electrode, the second detecting electrode by the ferromagnetic of third microchannel
The grain size state of property particle；Known according to the capacitance variation situation between third detecting electrode, the 4th detecting electrode by
The grain size state of the non-ferromagnetic debris of four microchannels.
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| CN106383146B (en) * | 2016-08-29 | 2019-02-12 | 大连海事大学 | A kind of induction reactance formula oil liquid detection system and preparation method thereof |
| CN106323727B (en) * | 2016-11-21 | 2023-07-14 | 大连海事大学 | Particle separation device and method based on liquid tension effect in micro-channel |
| CN106769361A (en) * | 2017-01-16 | 2017-05-31 | 大连海事大学 | The device and method that particle is separate in a kind of lubricating oil based on microflow control technique |
| CN107314954B (en) * | 2017-06-07 | 2021-11-19 | 华东师范大学 | Device and method for measuring tiny magnetic particles in fluid |
| CN107213930B (en) * | 2017-07-27 | 2022-12-20 | 深圳中科芯海智能科技有限公司 | Microfluidic chip for particle analysis and particle analysis method |
| CN107462512B (en) * | 2017-08-18 | 2019-11-01 | 中国科学院电子学研究所 | Unicellular intrinsic electrology characteristic detection device and method |
| CN108008453A (en) * | 2017-11-23 | 2018-05-08 | 中国航发沈阳黎明航空发动机有限责任公司 | A kind of turbine oil system metal filings on-line monitoring system |
| CN109253963A (en) * | 2017-12-19 | 2019-01-22 | 北京纳米能源与系统研究所 | From driving grain count instrument and its method of counting |
| CN110108623A (en) * | 2019-04-30 | 2019-08-09 | 武汉纺织大学 | A kind of greasy dirt grain testing apparatus and method based on micro-fluidic chip |
| CN110553956B (en) * | 2019-09-27 | 2021-11-12 | 东莞东阳光医疗智能器件研发有限公司 | Impedance pulse particle detection device, detection system and detection method |
| CN112697663A (en) * | 2020-11-16 | 2021-04-23 | 中国石油天然气股份有限公司 | Liquid purity monitoring device and method |
| CN113405955B (en) * | 2021-06-15 | 2024-02-02 | 中国航发沈阳发动机研究所 | Oil abrasive particle monitoring device and monitoring method |
| CN113680524A (en) * | 2021-09-23 | 2021-11-23 | 大连海事大学 | Fe-PDMS composite material-based oil abrasive particle separation device and manufacturing method thereof |
| CN114471757B (en) * | 2022-01-24 | 2023-05-12 | 扬州大学 | Multistage magnetic control triple detection micro-fluidic chip and detection method thereof |
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| GB201102037D0 (en) * | 2011-02-07 | 2011-03-23 | Multi Sense Technologies Ltd | Microfluidics based assay device |
| CN103471981B (en) * | 2013-08-30 | 2016-06-01 | 大连海事大学 | A kind of high-throughput grain count device and method based on micro-fluidic chip |
| CN105352862B (en) * | 2015-12-24 | 2018-07-31 | 大连海事大学 | A method of metal worn particle in fluid is detected under DC electric field based on microchannel |
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