CN105783708B - Optical correction device and optical correction method - Google Patents
Optical correction device and optical correction method Download PDFInfo
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- CN105783708B CN105783708B CN201410804432.8A CN201410804432A CN105783708B CN 105783708 B CN105783708 B CN 105783708B CN 201410804432 A CN201410804432 A CN 201410804432A CN 105783708 B CN105783708 B CN 105783708B
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Abstract
An optical calibration device and an optical calibration method are provided, the optical calibration device includes at least one light emission measurement module and a positioning calibration module. The at least one light-emitting measuring module emits at least one incident light to a positioning correction sheet, wherein the positioning correction sheet reflects the at least one incident light to generate at least one reflected light. The positioning correction module is coupled with the at least one light-emitting measurement module, receives the at least one reflected light to generate at least one correction pattern related to the at least one reflected light, and measures and analyzes the at least one correction pattern to correct the inclination angle deviation and/or the plane dislocation deviation of the at least one light-emitting measurement module.
Description
Technical field
The present invention relates to a kind of optical correction device of optical, and in particular to a kind of luminous measuring equipment of utilization obtains optical image
With corrected optical correction device of optical and optical correction method.
Background technique
In general, measuring object thickness using non-contact optical technology, there are two types of methods.First method be using
One measurement module obtains two groups of reflection signals of object under test upper and lower surfaces to calculate thickness information.But this method
Calculated measurement be easy to be influenced by the medium of object under test, therefore be not suitable for using.Second method be using
Two measurement modules are measured by upper and lower two measurement module measuring targets, then are calculated according to the signal returned
Thickness information.For example, thickness measuring and wafer thickness measurement after polishing for sapphire wafer etc., are all to utilize this side
Method is measured.The benchmark of thickness measuring is that upper and lower two measurement module requirements measure identical location point on object,
Therefore the measurement positioning calibration of two measurement modules is very significant considering that thickness measuring.
However, in order to ensure obtaining accurate thickness value, then must first go through displacement mechanism for second method
To be corrected.General existing adjustment mode is only moved by twin shaft mobile platform merely, and there is no pass through other tools
It is assisted, is unable to ensure the accuracy of two measurement modules contraposition.Therefore, it is necessary to a kind of optical correction device of optical and optical corrections
Method obtains correcting pattern and promotes the accuracy and convenience of the contraposition of measurement module, the accurate luminous point for obtaining measurement module
Position, the accuracy that improving optical measures.
Summary of the invention
In view of this, the main object of the present invention, it is to provide a kind of optical correction device of optical and optical correction method, uses
At least one luminous measurement module and a positioning correcting module correct inclining for Optical devices by acquirement and analysis correction pattern
Rake angle deviation and plane dislocation deviation, to promote the accuracy and convenience of the contraposition of measurement module.
The present invention provides a kind of optical correction device of optical, including at least one luminous measurement module and a positioning correcting module.
At least one luminous measurement module issues an at least incident ray to a positioning correcting piece, and wherein positioning correcting piece reflection at least one enters
It penetrates light and generates an at least reflection light.The luminous measurement module of positioning correcting module couples at least one, and receive at least one
Reflection light measures an at least correcting pattern with generating at least correcting pattern about an at least reflection light
And it analyzes to correct the tilt angle deviation of at least one luminous measurement module and/or plane dislocation deviation.
The present invention provides a kind of optical correction device of optical, including one first luminous measurement module, one second luminous measurement module
An and positioning correcting module.First luminous measurement module is configured at one first side of positioning correcting piece, and second, which shines, measures mould
Block is configured at second side for positioning correcting piece, and wherein second side is different and relative to the first side.When the first luminous measurement module
When being respectively arranged at the first height and the second height, the first luminous measurement module issues the first incident ray respectively and enters with second
Light is penetrated to positioning correcting piece to generate the first correcting pattern and the second correcting pattern respectively, positioning correcting module measures and analysis
Coordinate position on first correcting pattern and the second correcting pattern to correct the tilt angle deviation of the first luminous measurement module,
And when the second luminous measurement module is respectively arranged at a third height and when different from four height of third height,
Two luminous measurement modules issue a third incident ray and one the 4th incident ray to positioning correcting piece to generate one respectively respectively
Third correcting pattern and one the 4th correcting pattern, the first luminous measurement module stop issuing the first incident ray and the second incident light
Line, positioning correcting module are measured with the coordinate position on analysis third correcting pattern and the 4th correcting pattern to correct the second hair
The tilt angle deviation of light measurement module.When the first luminous measurement module is configured at five height, first, which shines, measures mould
Block issues one the 5th incident ray and generates one the 5th correcting pattern to positioning correcting piece, when the second luminous measurement module is configured at
When one six height, the second luminous measurement module issues one the 6th incident ray and generates one the 6th correction chart to positioning correcting piece
Case, the first luminous measurement module stop issuing the 5th incident ray, positioning correcting module measure with the 5th correcting pattern of analysis with
And the 6th coordinate position on correcting pattern is to correct the plane dislocation of the first luminous measurement module and the second luminous measurement module
Deviation.
The present invention provides a kind of optical correction method, including issues an at least incident light by least one luminous measurement module
Line is to a positioning correcting piece；An at least incident ray is reflected by positioning correcting piece and generates an at least reflection light；It receives extremely
A few reflection light is to generate at least correcting pattern about an at least reflection light；And it measures and at least one correction of analysis
Pattern with correct at least one luminous measurement module tilt angle deviation and/or plane dislocation deviation.
The present invention provides a kind of optical correction method, including when the first luminous measurement module be respectively arranged at the first height with
And when the second height, the first incident ray and the second incident ray are issued respectively to positioning correcting by the first luminous measurement module
Piece to generate the first correcting pattern and the second correcting pattern respectively；It is measured by positioning correcting module and analyzes the first correcting pattern
And the second coordinate position on correcting pattern, and correct the tilt angle deviation of the first luminous measurement module；When the second hair
Light measurement module be respectively arranged at third height and different from third height four height when, by second shine measure mould
Block issues third incident ray and the 4th incident ray to positioning correcting piece to generate third correcting pattern and the 4th respectively respectively
Correcting pattern, and the first luminous measurement module stops issuing the first incident ray and the second incident ray；By positioning correcting
Module is measured with the coordinate position on analysis third correcting pattern and the 4th correcting pattern to correct the second luminous measurement module
Tilt angle deviation；When the first luminous measurement module is configured at five height, issued by the first luminous measurement module
One the 5th incident ray generates one the 5th correcting pattern to positioning correcting piece；When the second luminous measurement module is configured at one the 6th
When height, the 6th incident ray is issued by the second luminous measurement module and generates the 6th correcting pattern to positioning correcting piece, and
And first luminous measurement module stop issuing the 5th incident ray；It is measured by positioning correcting module and analyzes the 5th correcting pattern
And the 6th coordinate position on correcting pattern is wrong with the plane for correcting the first luminous measurement module and the second luminous measurement module
Position deviation.
Below in conjunction with the drawings and specific embodiments, the present invention will be described in detail, but not as a limitation of the invention.
Detailed description of the invention
Fig. 1 is the schematic diagram of the optical correction device of optical according to provided by the embodiment of the present invention；
Fig. 2A is the schematic diagram of the positioning correcting module according to provided by the embodiment of the present invention；
Fig. 2 B is the schematic diagram of the another kind optical correction device of optical according to provided by the embodiment of the present invention；
Fig. 3 A is the schematic diagram of the tilt angle deviation of luminous measurement module according to provided by the embodiment of the present invention；
Fig. 3 B is the schematic diagram of the tilt angle deviation according to provided by the embodiment of the present invention；
Fig. 4 A is the schematic diagram of the plane dislocation deviation of the luminous measurement module according to provided by the embodiment of the present invention；
Fig. 4 B is the schematic diagram of the dislocation deviation of the plane according to provided by the embodiment of the present invention；
Fig. 4 C is the signal of the plane dislocation deviation of the luminous measurement module of the another kind according to provided by the embodiment of the present invention
Figure；
Fig. 4 D is the schematic diagram of the dislocation deviation of the another kind plane according to provided by the embodiment of the present invention；
Fig. 5 is the flow chart of the optical correction method according to provided by the embodiment of the present invention；
Fig. 6 is the flow chart of the another kind optical correction method according to provided by the embodiment of the present invention.
Wherein, appended drawing reference
100: optical correction device of optical；
110: shine measurement module；
110A: the first luminous measurement module；
110B: the second luminous measurement module；
120: positioning correcting module；
122: optical module；
122A: spectroscope；
122B: three corner reflectors；
124: inductive component；
126: image-forming assembly；
128: focusing adjustment component；
130: support component；
140: positioning correcting piece；
150: focusing positioning mechanism；
A1, A2, B1, B2: coordinate position.
Specific embodiment
Structural principle and working principle of the invention are described in detail with reference to the accompanying drawing:
The device and application method of various embodiments of the invention discussed more fully below.It is important to note, however, that this hair
Many feasible concept of the invention provided by bright may be implemented in various particular ranges.These specific embodiments are only used for illustrating
Bright the device of the invention and application method, but it is non-for limiting the scope of the invention.
Fig. 1 is the schematic diagram of the optical correction device of optical 100 according to provided by the embodiment of the present invention.In one embodiment, light
Correction devices 100 include at least one luminous measurement module 110, a positioning correcting module 120 and a focusing positioning mechanism
150.Specifically, to 140 (not shown) of a positioning correcting piece, then the measurement module 110 that shines issues an at least incident ray
Positioning correcting piece 140 reflects an at least incident ray and generates an at least reflection light.Positioning correcting module 120 couples luminous quantity
Module 110 is surveyed, and receives an at least reflection light to generate at least correcting pattern about an at least reflection light.This
Outside, to this, at least a correcting pattern is measured and is analyzed positioning correcting module 120, and corrects the measurement module 110 that shines
Tilt angle deviation and/or horizontal position deviation.It is worth noting that, in this embodiment, optical correction device of optical 100 is in addition to tool
Have focusing positioning mechanism 150 to movement, focusing and positioning except, further include the positioning correcting module 120 of an external-added, with
It obtains and analysis correction pattern, the accuracy of the contraposition of improving optical means for correcting 100.In another embodiment, positioning correcting
Module 120 is detachable, therefore facilitates and installed and dismantled, the convenience of the contraposition of improving optical means for correcting 100.
In one embodiment, when at least one luminous measurement module 110 of optical correction device of optical 100 is configured at one first height
When, the measurement module 110 that shines issues one first incident ray and generates one first correcting pattern to positioning correcting piece.Then, when
When the measurement module 110 that shines is configured at the second height different from the first height, it is incident that the measurement module 110 that shines issues one second
Light generates one second correcting pattern to positioning correcting piece.It is worth noting that, the positioning correcting mould of optical correction device of optical 100
Block 120 measures and analyzes the coordinate position on the first correcting pattern and the second correcting pattern, to correct the measurement module 100 that shines
Tilt angle deviation.It follows that can obtain and divide by above-mentioned luminous measurement module 110 and positioning correcting module 120
Correcting pattern is analysed, and the tilt angle deviation of the Optical devices 100 of adjustment correction in real time.
Fig. 2A is the schematic diagram of the positioning correcting module 120 according to provided by the embodiment of the present invention.As shown in Figure 2 A, it positions
Correction module 120 includes optical module 122, inductive component 124, image-forming assembly 126, focusing adjustment component 128 and support group
Part 130.In one embodiment, optical module 122 is to form the coaxial of an at least incident ray and an at least reflection light
Optical path.For example, optical module 122 may include spectroscope, three corner reflectors and/or other lenses or prism etc..It is worth note
Meaning, above-mentioned spectroscope and/or three corner reflectors are the parameters and specification of collocation optical correction device of optical 100, are configured at
Specific position, to form the coaxial optical path of above-mentioned incident ray and reflection light.Inductive component 124 is to incude and receive extremely
A few reflection light.Image-forming assembly 126 couples inductive component 124, to form the correction chart about an at least reflection light
Case.For example, image-forming assembly 126 can be a telecentric lens, the coaxial optical path of arrange in pairs or groups above-mentioned incident ray and reflection light,
To form the correcting pattern of high quality, low distortion.In addition, focusing adjustment component 128 couples inductive component 124 and image-forming assembly
126, and removable positioning correcting module 120 is with an at least reflection light of focusing.The coupling focusing adjustment group of support component 130
Part 128, to fix and support positioning correcting module 120.
Fig. 2 B is the schematic diagram of the another kind optical correction device of optical 100 according to provided by the embodiment of the present invention.Implement herein
In example, optical correction device of optical 100 includes the first luminous measurement module 110A, the second luminous measurement module 110B, optical module
122, inductive component 124, image-forming assembly 126, support component 130 and positioning correcting piece 140.Optical module 122 includes light splitting
Mirror 122A and three corner reflector 122B.As shown in Figure 2 B, the first luminous measurement module 110A is configured at positioning correcting piece 140
First side, the second luminous measurement module 110B are configured at second side of positioning correcting piece 140, wherein second side it is different and relative to
First side.For example, the first luminous measurement module 110A is configured at the upper surface of positioning correcting piece 140, and second, which shines, measures mould
Block 110B is configured at below positioning correcting piece 140.Furthermore it is noted that positioning correcting piece 140 is by a transparent material
It is constituted.For example, positioning correcting piece 140 is made of glass or plastics.
In one embodiment, when the first luminous measurement module 110A is respectively arranged at the first height and the second height,
First luminous measurement module 110A issues the first incident ray and the second incident ray to positioning correcting piece 140 respectively, and point
The first correcting pattern and the second correcting pattern are not generated.Then, positioning correcting module 120 measure with analysis the first correcting pattern with
And the second coordinate position on correcting pattern, and the tilt angle deviation of the first luminous measurement module 110A of correction.In addition, working as
Second luminous measurement module 110B be respectively arranged at a third height and different from third height four height when, second
The measurement module 110B that shines issues a third incident ray and one the 4th incident ray to positioning correcting piece 140 respectively, and divides
A third correcting pattern and one the 4th correcting pattern are not generated.It is worth noting that, when the second luminous measurement module 110B is issued
When third incident ray and the 4th incident ray to positioning correcting piece 140, the first luminous measurement module 110A stops issuing first
Incident ray and the second incident ray, to avoid the third incident ray and the 4th issued to the second luminous measurement module 110B
Incident ray interferes.Then, positioning correcting module 120 is measured and is analyzed on third correcting pattern and the 4th correcting pattern
Coordinate position, and correct the second luminous measurement module 110B tilt angle deviation.
Specifically, when the first luminous measurement module 110A issues the first incident ray, the first incident ray can be passed through first
It crosses spectroscope 122A and is divided.Then, the first a part of incident ray reaches positioning correcting piece 140, is then positioned
Correcting sheet 140 reflects and becomes the first reflection light.Then, the first reflection light reaches spectroscope 122A and is divided, and makes
The first a part of reflection light is obtained to be reflected by three corner reflector 122B and reach inductive component 124 and image-forming assembly 126.It is worth
It is noted that above-mentioned first incident ray and the first reflection light are along a coaxial optical path.In addition, other incident rays with
Other reflection lights are also to be reflected or transmitted along this coaxial optical path, therefore details are not described herein again.
Fig. 3 A is the schematic diagram of the tilt angle deviation of luminous measurement module 110 according to provided by the embodiment of the present invention,
Fig. 3 B is the schematic diagram of the tilt angle deviation according to provided by the embodiment of the present invention.As shown in Figure 3A, the first luminous measurement mould
Block 110A is configured at the top of positioning correcting piece 140.However, the first luminous measurement module 110A has a tilt angle, not
Perpendicular to positioning correcting piece 140.When the first luminous measurement module 110A is configured at the first height and issues the first incident ray
When, positioning correcting module 120 is measured to the first pattern, and the coordinate position A1 of the first pattern is (x1-1,y1-1).When the first hair
When light measurement module 110A is configured at the second height different from the first height and issues the second incident ray, positioning correcting mould
Block 120 is measured to the second pattern, and the coordinate position A2 of the second pattern is (x1-2,y1-2).As shown in Figure 3B, in an embodiment
In, the lateral shift (that is, the direction x) of coordinate position A1 and A2 is △ x, the vertical misalignment of coordinate position A1 and A2 (that is, the side y
To) it is △ y, and the gap between the first height and the second height is △ h.The tilt angle of first luminous measurement module 110A
Deviation (θ x, θ y) are as follows:
θ x=tan-1(Δ h/ Δ x)=tan-1(Δh/x12-x11)
θ y=tan-1(Δ h/ Δ y)=tan-1(Δh/y12-y11)
Wherein θ x and θ y is tilt angle of the first luminous measurement module 110A in the direction x and the direction y respectively.Such one
Come, optical correction device of optical 100 can calculate whether the first luminous measurement module 110A has inclination angle by correcting pattern
Spend deviation.When θ x or θ y are not equal to zero, mean that the first luminous measurement module 110A has tilt angle deviation, and
Positioning correcting module 120 and focusing positioning mechanism 150 can adjust the first luminous measurement mould according further to the numerical value of θ x or θ y
The tilt angle deviation of block 110A.
Fig. 4 A is the schematic diagram of the plane dislocation deviation of the luminous measurement module 110 according to provided by the embodiment of the present invention；
Fig. 4 B is the schematic diagram of the dislocation deviation of the plane according to provided by the embodiment of the present invention.In one embodiment, when the first luminous quantity
When survey module 110A is configured at five height, the first luminous measurement module 110A issues one the 5th incident ray to positioning correcting
Piece 140, and one the 5th correcting pattern is generated, and the coordinate position B1 of the 5th pattern is (x1,y1).When the second luminous measurement
When module 110B is configured at six height, the second luminous measurement module 110B issues one the 6th incident ray to positioning correcting piece
140, and one the 6th correcting pattern is generated, and the coordinate position B2 of the 6th pattern is (x2,y2).It is worth noting that, when the
When two luminous measurement module 110B issue the 6th incident ray to positioning correcting piece 140, the first luminous measurement module stops issuing
5th incident ray interferes to avoid the 6th incident ray issued to the second luminous measurement module 110B.Then, fixed
Bit correction module 120 measures and analyzes the coordinate position B1 and B2 on the 5th correcting pattern and the 6th correcting pattern, and school
The plane dislocation deviation of the positive first luminous luminous measurement module 110B of measurement module 110A and second.
As shown in Figure 4A and 4B, since the first luminous measurement module 110A and the second luminous measurement module 110B have
Plane dislocation deviation, therefore the coordinate position B1 and B2 of the 5th correcting pattern and the 6th correcting pattern does not overlap.
Then, positioning correcting module 120 and focusing positioning mechanism 150 can further adjust the plane mistake of the first luminous measurement module 110A
Position deviation, with the measurement accuracy of improving optical means for correcting 100.In another embodiment, Fig. 4 C is to be implemented according to the present invention
The schematic diagram of the plane dislocation deviation of the luminous measurement module 110 of another kind provided by example；Fig. 4 D is according to the embodiment of the present invention
The schematic diagram of provided another kind plane dislocation deviation.The coordinate position B1 of 5th correcting pattern and the 6th correcting pattern with
B2 overlaps, therefore the first luminous luminous measurement module 110B of measurement module 110A and second does not have plane dislocation deviation.
Compared to only moving and correcting by twin shaft mobile platform merely, positioning correcting module 120 provided by the present invention be can allow
Focusing positioning mechanism 150 is used together, and whether analysis the first luminous measurement module 110A and the second luminous measurement module 110B has
There are tilt angle deviation and plane dislocation deviation.Significantly, since the present invention is analysis correction pattern and its seat
Cursor position, therefore tilt angle deviation and plane dislocation deviation can be analyzed in time and dynamically, improve pair of measurement module
The accuracy and convenience of position.
Fig. 5 is the flow chart of the optical correction method according to provided by the embodiment of the present invention.In step S500, by extremely
A few luminous measurement module 110 issues an at least incident ray to a positioning correcting piece 140.Then in step S502, by
Positioning correcting piece 140 reflects an at least incident ray and generates an at least reflection light.Then it in step S504, receives at least
One reflection light is to generate at least correcting pattern about an at least reflection light.Then it in step S506, measures and divides
An at least correcting pattern is analysed to correct the tilt angle deviation and/or horizontal position deviation of at least one luminous measurement module 110.
Fig. 6 is the flow chart of the another kind optical correction method according to provided by the embodiment of the present invention.In step S600,
When the first luminous measurement module 110A is respectively arranged at the first height and the second height, by the first luminous measurement module
110A issue the first incident ray and the second incident ray respectively to positioning correcting piece 140 with generate respectively the first correcting pattern with
Second correcting pattern.Then it in step S602, is measured by positioning correcting module 120 and analyzes the first correcting pattern and the
Coordinate position on two correcting patterns, and correct the tilt angle deviation of the first luminous measurement module 110A.Then in step
In S604, when the second luminous measurement module 110B is respectively arranged at third height and different from the 4th height of third height
When, third incident ray and the 4th incident ray are issued respectively to positioning correcting piece 140 by the second luminous measurement module 110B
To generate third correcting pattern and the 4th correcting pattern respectively, and the first luminous measurement module 110A stops issuing the first incidence
Light and the second incident ray.In step S606, by positioning correcting module 120 measure with analyze third correcting pattern and
Coordinate position on 4th correcting pattern is to correct the tilt angle deviation of the second luminous measurement module 110B.Then in step
In S608, when the first luminous measurement module 110A is configured at five height, issued by the first luminous measurement module 110A
One the 5th incident ray is to positioning correcting piece 140 to generate one the 5th correcting pattern.Then in step S610, when second shine
When measurement module 110B is configured at six height, the 6th incident ray is issued to positioning by the second luminous measurement module 110B
Correcting sheet is to generate the 6th correcting pattern, and the first luminous measurement module 110A stops issuing the 5th incident ray.Finally exist
In step S612, is measured by positioning correcting module 120 and analyze the coordinate on the 5th correcting pattern and the 6th correcting pattern
Position with correct the first luminous luminous measurement module 110B of measurement module 110A and second plane misplace deviation.
Certainly, the invention may also have other embodiments, without deviating from the spirit and substance of the present invention, ripe
It knows those skilled in the art and makes various corresponding changes and modifications, but these corresponding changes and change in accordance with the present invention
Shape all should fall within the scope of protection of the appended claims of the present invention.
Claims (10)
1. a kind of optical correction device of optical characterized by comprising
At least two luminous measurement modules, each luminous measurement module sending at least incident ray to a positioning correcting piece,
In the positioning correcting piece reflect an at least incident ray and generate an at least reflection light；And
At least two positioning correcting modules, one luminous measurement module of each positioning correcting module couples, and receive this at least
One reflection light to generate at least correcting pattern about an at least reflection light, and to an at least correcting pattern into
Row is measured and is analyzed to correct the tilt angle deviation of each luminous measurement module, wherein when each luminous measurement module is matched
When being placed in first height, which issues one first incident ray and generates one the to the positioning correcting piece
One correcting pattern, and when each luminous measurement module is configured at second height different from first height, this is every
One luminous measurement module issues one second incident ray and generates one second correcting pattern, and the positioning to the positioning correcting piece
Correction module is measured with the coordinate position on analysis first correcting pattern and second correcting pattern to correct each hair
The tilt angle deviation of light measurement module.
2. optical correction device of optical according to claim 1, which is characterized in that at least two luminous measurement module includes one
First luminous measurement module and one second luminous measurement module, and the first luminous measurement module is configured at the positioning correcting
One first side of piece, the second luminous measurement module are configured at second side for the positioning correcting piece, and wherein the second side is different
And relative to first side.
3. optical correction device of optical according to claim 2, which is characterized in that when the first luminous measurement module is configured at this
When the first height, which issues first incident ray to the positioning correcting piece to generate first correction
Pattern, when the first luminous measurement module is configured at second height, which issues second incidence
Light generates second correcting pattern to the positioning correcting piece, which measures and analyze first correcting pattern
And the coordinate position on second correcting pattern to be to correct the tilt angle deviation of the first luminous measurement module, and when should
When second luminous measurement module is configured at a third height, it is fixed to this which issues a third incident ray
Bit correction piece is to generate a third correcting pattern, when the second luminous measurement module is configured at one different from the third height
When four height, which issues one the 4th incident ray and generates one the 4th correction chart to the positioning correcting piece
Case, the first luminous measurement module stop issuing first incident ray and second incident ray, the positioning correcting module amount
It surveys with the coordinate position on the analysis third correcting pattern and the 4th correcting pattern to correct the second luminous measurement module
Tilt angle deviation.
4. optical correction device of optical according to claim 3, which is characterized in that when the first luminous measurement module is configured at one
When five height, which issues one the 5th incident ray and generates one the 5th correction to the positioning correcting piece
Pattern, when the second luminous measurement module is configured at six height, it is incident which issues one the 6th
Light generates one the 6th correcting pattern to the positioning correcting piece, which stops issuing the 5th incident light
Line, the positioning correcting module are measured with the coordinate position on the 5th correcting pattern of analysis and the 6th correcting pattern to correct
One plane of the first luminous measurement module and second luminous measurement module dislocation deviation.
5. optical correction device of optical according to claim 1, which is characterized in that the positioning correcting module further includes:
One optical module, to form the coaxial optical path of an at least incident ray and an at least reflection light；
One inductive component, to receive an at least reflection light；And
One image-forming assembly couples the inductive component, to form the correcting pattern about an at least reflection light.
6. optical correction device of optical according to claim 5, which is characterized in that the positioning correcting module further includes:
One focusing adjustment component, couples the inductive component and the image-forming assembly, to the mobile positioning correcting module to focus this
An at least reflection light；
One support component couples focusing adjustment component, to support the positioning correcting module.
7. optical correction device of optical according to claim 1, which is characterized in that the positioning correcting piece is by a transparent material institute structure
At.
8. a kind of optical correction method characterized by comprising
An at least incident ray is issued to a positioning correcting piece by each of at least two luminous measurement modules；
An at least incident ray is reflected by the positioning correcting piece and generates an at least reflection light；
An at least reflection light is received to generate at least correcting pattern about an at least reflection light；And
It measures and analyzes the tilt angle deviation of at least correcting pattern to correct each luminous measurement module, wherein when this
When each luminous measurement module is configured at first height, one first incident ray is issued extremely by each luminous measurement module
The positioning correcting piece to generate one first correcting pattern, and when each luminous measurement module be configured at it is first high different from this
When one second height of degree, one second incident ray is issued to the positioning correcting piece to generate by each luminous measurement module
One second correcting pattern, and measure by the positioning correcting module and analyze first correcting pattern and second correction chart
Coordinate position in case is to correct the tilt angle deviation of each luminous measurement module.
9. optical correction method according to claim 8, which is characterized in that when the one of at least two luminous measurement module
When first luminous measurement module is configured at first height, first incident ray is issued extremely by the first luminous measurement module
The positioning correcting piece is to generate first correcting pattern, when the first luminous measurement module is configured at second height, by
The first luminous measurement module issues second incident ray to the positioning correcting piece to generate second correcting pattern, by this
Positioning correcting module measure with the coordinate position on first correcting pattern and second correcting pattern is analyzed with correct this
The tilt angle deviation of one luminous measurement module, and work as one second luminous measurement module of at least two luminous measurement module
When being configured at a third height, a third incident ray is issued to the positioning correcting piece to produce by the second luminous measurement module
A raw third correcting pattern, when the second luminous measurement module is configured at four height different from the third height, by
One the 4th incident ray is issued by the second luminous measurement module and generates one the 4th correcting pattern to the positioning correcting piece, by
The first luminous measurement module stops issuing first incident ray and second incident ray, by the positioning correcting module amount
It surveys with the coordinate position on the analysis third correcting pattern and the 4th correcting pattern to correct the second luminous measurement module
Tilt angle deviation.
10. optical correction method according to claim 9, which is characterized in that when the first luminous measurement module is configured at
When one five height, one the 5th incident ray is issued by the first luminous measurement module and generates one the to the positioning correcting piece
Five correcting patterns are issued when the second luminous measurement module is configured at six height by the second luminous measurement module
One the 6th incident ray generates one the 6th correcting pattern to the positioning correcting piece, stops hair by the first luminous measurement module
5th incident ray out measures by the positioning correcting module and analyzes the 5th correcting pattern and the 6th correcting pattern
On coordinate position with correct the first luminous measurement module and the second luminous measurement module a plane misplace deviation.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW103140933A TWI518300B (en) | 2014-11-26 | 2014-11-26 | Optical callibration device and optical callibration method |
| TW103140933 | 2014-11-26 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN105783708A CN105783708A (en) | 2016-07-20 |
| CN105783708B true CN105783708B (en) | 2019-05-28 |
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| TW561241B (en) * | 2002-08-22 | 2003-11-11 | Ind Tech Res Inst | Method and apparatus for calibrating laser three-dimensional digitizing sensor |
| CN102072718A (en) * | 2009-11-25 | 2011-05-25 | 原相科技股份有限公司 | Distance measuring device for measuring distance by utilizing imaging position difference and calibrating method thereof |
| CN102346030A (en) * | 2010-07-30 | 2012-02-08 | 原相科技股份有限公司 | Method and device for correcting distance measured by distance measurement device according to temperature |
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| CN102650691B (en) * | 2011-02-24 | 2014-01-22 | 原相科技股份有限公司 | Distance measuring system and method with correcting function |
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| TW561241B (en) * | 2002-08-22 | 2003-11-11 | Ind Tech Res Inst | Method and apparatus for calibrating laser three-dimensional digitizing sensor |
| US7274469B2 (en) * | 2002-08-22 | 2007-09-25 | Industrial Technology Research Institute | Method and apparatus for calibrating laser 3D digitizing sensor |
| CN102072718A (en) * | 2009-11-25 | 2011-05-25 | 原相科技股份有限公司 | Distance measuring device for measuring distance by utilizing imaging position difference and calibrating method thereof |
| CN102346030A (en) * | 2010-07-30 | 2012-02-08 | 原相科技股份有限公司 | Method and device for correcting distance measured by distance measurement device according to temperature |
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| CN105783708A (en) | 2016-07-20 |
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