CN105742145B - A kind of integral structure of integrated TEM fluorescent screens and STEM detectors - Google Patents
A kind of integral structure of integrated TEM fluorescent screens and STEM detectors Download PDFInfo
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- CN105742145B CN105742145B CN201610187670.8A CN201610187670A CN105742145B CN 105742145 B CN105742145 B CN 105742145B CN 201610187670 A CN201610187670 A CN 201610187670A CN 105742145 B CN105742145 B CN 105742145B
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- lens barrel
- fluorescent screens
- stem
- detectors
- tem
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- 241000826860 Trapezium Species 0.000 claims description 2
- 230000005540 biological transmission Effects 0.000 abstract description 32
- 238000010894 electron beam technology Methods 0.000 abstract description 14
- 238000009434 installation Methods 0.000 abstract description 7
- 230000003287 optical effect Effects 0.000 description 5
- 230000005611 electricity Effects 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 230000010354 integration Effects 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000011065 in-situ storage Methods 0.000 description 1
- 230000035515 penetration Effects 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/22—Optical, image processing or photographic arrangements associated with the tube
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/244—Detectors; Associated components or circuits therefor
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
- H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
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- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Electron Sources, Ion Sources (AREA)
- Microscoopes, Condenser (AREA)
Abstract
The invention discloses a kind of integral structure of integrated TEM fluorescent screens and STEM detectors, belong to the accessory structure design field of transmission electron microscope, the integral structure of integrated the TEM fluorescent screens and STEM detectors passes through the mounting and adjusting part on the sidepiece interface of lens barrel, and on the adjustment part inside lens barrel integrated installation TEM fluorescent screens and STEM detectors, so that only needing to change position of the adjustment part in transmission electron microscope lens barrel, just TEM fluorescent screens or STEM detectors can be realized to receive electron beam, so as to meet a sidepiece interface of lens barrel while installing the purpose of CCD camera fluorescent screen (TEM fluorescent screens) and STEM detectors, and then meet function maximized demand of the user for transmission electron microscope, realize the cost performance overflowed.
Description
The application is application number 201410345490.9,18 days July 2014 applying date, a kind of denomination of invention " integrated TEM
The divisional application of the integral structure of fluorescent screen and STEM detectors ".
Technical field
The present invention relates to transmission electron microscope accessory structure design, more particularly to a kind of integrated TEM fluorescent screens and
The integral structure of STEM detectors.
Background technology
Transmission electron microscope Transmission Electron Microscope, abbreviation TEM, transmission electron microscope
It is a kind of high-resolution for being imaged with electromagnetism transmission focusing, high-amplification-factor using the extremely short electron beam of wavelength as light source
Electronic optical instrument.
For shooting high-resolution electronic micro-image during transmission electron microscope use, electronic diffraction is shot and right
Sample carries out the different application purposes such as in-situ study and make it that used CCD camera type is different, so, in a transmission electricity
Single CCD camera configuration is equipped with sub- microscope to be difficult to meet needs.To solve the above problems, currently existing scheme is in transmission electricity
Bottom is installed on sub- microscope and inserts formula CCD camera and side-plug-in CCD camera, formula CCD camera is inserted at bottom and side-plug-in CCD camera is pacified respectively
Mounted in the egative film room bottom of transmission electron microscope and lens barrel sidepiece.
Scanning transmission electron microscope Scanning Transmission Electron Microscope, abbreviation STEM,
It is quickly to be scanned Electron Beam Focusing to sample surfaces and in sample surfaces using magnetic lenses, by penetration of electrons sample into
Picture.In scanning-mode it, electron source launches electronics, by before sample magnetic lenses by electron-beam convergence into small yardstick beam
Spot, beam spot is focused on after specimen surface, and a region of point by point scanning sample is controlled by coil.A bit is scanned every
Meanwhile, the STEM detectors below sample synchronously receive electronics.The signal received corresponding to the detector of each scan position
Current strength is converted into be shown on fluorescent screen or computer display.Use STEM light fields detector or STEM dark field detectors
STEM bright field images and STEM darkfield images can be then obtained respectively.STEM light fields detector and STEM dark field detectors need peace
Mounted in transmission electron microscope lens barrel sidepiece interface.
The expense of one transmission electron microscope generally reaches millions of RMB, therefore, aobvious for a transmitted electron
Micro mirror, people usually require to install various annexes additional, so that function is maximized, under prior art conditions, transmission electron microscope
Sidepiece interface quantity is restricted in installation place, after STEM light fields detector and dark field detector is mounted with, it is impossible to pacify
Fill side-plug-in CCD camera；It is mounted with after side-plug-in CCD camera, then the light/dark field detectors of STEM can only choose to install one, and then
Transmission electron microscope is caused to reach the maximized demand of function.
The content of the invention
There is provided a kind of integrated TEM fluorescent screens and STEM detectors for above-mentioned problem for the purpose of the present invention
Integral structure, to overcome transmission electron microscope sidepiece interface of the prior art to be restricted in installation place, causes not
The problem of function maximized demand can be realized, so that side-plug-in CCD camera can either be installed, can install the spy of STEM light and shades again
Device is surveyed, while CCD camera fluorescent screen also is installed in sidepiece, and then it is maximum for the function of transmission electron microscope to meet user
The demand of change, realizes the cost performance overflowed.
To achieve these goals, the technical scheme taken of the present invention is：.
A kind of integral structure of integrated TEM fluorescent screens and STEM detectors, it is characterised in that including：Connect with sidepiece
Mouthful lens barrel and by the sidepiece interface be arranged on the lens barrel on adjustment part, the adjustment part be sliding equipment or
Switching mechanism, the face of facing of the adjustment part is shaped as right-angled trapezium, and a part for the adjustment part is located at the lens barrel
It is internal；The upper bottom for facing face of the adjustment part and the waist for facing face of the adjustment part inside the lens barrel it
Between angle be 135 °；TEM fluorescent screens and STEM detectors are integrated with the adjustment part inside the lens barrel；It is described
TEM fluorescent screens are installed on the central plane for facing face of the adjustment part inside the lens barrel, the STEM detectors
On the upper bottom surface up or down bottom surface for facing face for the adjustment part structure being installed on inside the lens barrel.
In one embodiment of the invention, the adjustment part is sliding equipment.
In one embodiment of the invention, one end that face is right angle of facing of the sliding equipment is located at the outer of the lens barrel
Portion.
In one embodiment of the invention, the TEM fluorescent screens are installed on the sliding equipment inside the lens barrel
The central plane for facing face on, the STEM detectors are installed on the face of facing of the sliding equipment inside the lens barrel
On upper bottom surface.
In one embodiment of the invention, the adjustment part is switching mechanism.
In one embodiment of the invention, one end that face is right angle of facing of the switching mechanism is located at the outer of the lens barrel
Portion.
In one embodiment of the invention, the TEM fluorescent screens are installed on the switching mechanism inside the lens barrel
The central plane for facing face on, the STEM detectors are installed on the face of facing of the switching mechanism inside the lens barrel
On bottom surface.
Compared with prior art, the beneficial effect of the technical program is：
The integral structure of a kind of integrated TEM fluorescent screens and STEM detectors that the present invention is provided, by the side of lens barrel
Mounting and adjusting part on portion's interface, and integrated installation TEM fluorescent screens and STEM detections on the adjustment part inside lens barrel
Device so that only need to change position of the adjustment part in transmission electron microscope lens barrel, just can realize TEM fluorescent screens or
STEM detectors receive electron beam, so as to meet sidepiece interface of lens barrel while installing CCD camera fluorescent screen (TEM
Fluorescent screen) and STEM detectors purpose, and then meet function maximized demand of the user for transmission electron microscope, it is real
The cost performance now overflowed.
Brief description of the drawings
By reading the detailed description made with reference to the following drawings to non-limiting example, the present invention and its feature, outside
Shape and advantage will become more apparent.Identical mark indicates identical part in whole accompanying drawings.Not deliberately according to than
Example draws accompanying drawing, it is preferred that emphasis is show the purport of the present invention.
Fig. 1 be the embodiment of the present invention 1 provide integrated TEM fluorescent screens and STEM detectors integral structure it is standby when
Structural representation.
Fig. 2 is that the integrated TEM fluorescent screens of the offer of the embodiment of the present invention 1 and the integral structure of STEM detectors are in position
Structural representation during A.
Fig. 3 is that the integrated TEM fluorescent screens of the offer of the embodiment of the present invention 1 and the integral structure of STEM detectors are in position
Structural representation during B.
Fig. 4 be the embodiment of the present invention 2 provide integrated TEM fluorescent screens and STEM detectors integral structure it is standby when
Structural representation.
Fig. 5 is that the integrated TEM fluorescent screens of the offer of the embodiment of the present invention 2 and the integral structure of STEM detectors are in position
Structural representation during A.
Fig. 6 is that the integrated TEM fluorescent screens of the offer of the embodiment of the present invention 2 and the integral structure of STEM detectors are in position
Structural representation during B.
Embodiment
The present invention is further illustrated with specific embodiment below in conjunction with the accompanying drawings, but not as the limit of the present invention
It is fixed.
Embodiment 1：
Fig. 1 be the embodiment of the present invention 1 provide integrated TEM fluorescent screens and STEM detectors integral structure it is standby when
Structural representation；Fig. 2 is that the integrated TEM fluorescent screens of the offer of the embodiment of the present invention 1 and the integral structure of STEM detectors are in
The structural representation during A of position；Fig. 3 is the integration of integrated TEM fluorescent screens and STEM detectors that the embodiment of the present invention 1 is provided
Structure is in the structural representation during B of position；As illustrated, integrated TEM fluorescent screens and STEM that the embodiment of the present invention 1 is provided are visited
Surveying the integral structure of device includes：Lens barrel 101 with sidepiece interface and the adjustment by sidepiece interface on lens barrel 101
Part, in the embodiment of the present invention 1, the adjustment part is sliding equipment 102, and the face of facing of sliding equipment 102 is shaped as always
Angle is trapezoidal, and a part for sliding equipment 102 is located inside lens barrel 101, and another part of sliding equipment 102 is located at lens barrel 101
Outside, and sliding equipment 102 face face be right angle one end be located at lens barrel 101 outside, the other end of sliding equipment 102
Positioned at the inside of lens barrel 101, meanwhile, it is integrated with TEM fluorescent screens 104 and STEM on the sliding equipment 102 inside lens barrel 101
Detector 103, specifically, TEM fluorescent screens 104 are mounted on the central plane for facing face of the sliding equipment 102 inside lens barrel 101
On, STEM detectors 103 are mounted on the upper bottom surface for facing face of the sliding equipment 102 inside lens barrel 101.
In the integrated TEM fluorescent screens and the integral structure of STEM detectors that the embodiment of the present invention 1 is provided, sliding equipment
Angle between the 102 upper bottom for facing face and the waist for facing face of the sliding equipment 102 inside lens barrel 101 is 135 °,
Angle between the bottom for facing face of sliding equipment 102 and the waist for facing face of the sliding equipment 102 inside lens barrel 101
For 45 °, the sliding equipment 102 of the angle is set, ensure that the image of TEM fluorescent screens 104 is protected after being reflected by reflecting prism
Hold original scale.
In the integrated TEM fluorescent screens and the integral structure of STEM detectors that the embodiment of the present invention 1 is provided, in addition to one
CCD camera 105, CCD camera 105 is arranged on the other side interface of lens barrel 101, and position and the slip of CCD camera 105
The position of mechanism 102 is just corresponding.
It is standby in the integral structure of the integrated TEM fluorescent screens and STEM detectors that are provided using the embodiment of the present invention 1
In the case of, electron beam 11 reflects without any part, so that image will not be formed；When sliding equipment 102 is pushed into position A,
Electron beam 11 is reflexed in CCD camera 105 by TEM fluorescent screens 104, so as to realize the function of transmission electron microscope；
Further, when sliding equipment 102 being pushed into position B, electron beam 11 is irradiated on STEM detectors 103, so as to be converted into electricity
Intensity of flow is shown on fluorescent screen or computer display, completes the function of scanning transmission electron microscope.
So, the embodiment of the present invention 1 provide integrated TEM fluorescent screens and STEM detectors integral structure, by
Sliding equipment is installed on the sidepiece interface of lens barrel, and on the sliding equipment inside lens barrel integrated installation TEM fluorescent screens and
STEM detectors so that only need to change position of the sliding equipment in transmission electron microscope lens barrel, just can realize that TEM is glimmering
Optical screen or STEM detectors receive electron beam, so as to meet a sidepiece interface of lens barrel while installing CCD camera with glimmering
The purpose of optical screen (TEM fluorescent screens) and STEM detectors, and then meet function maximization of the user for transmission electron microscope
Demand, realize the cost performance that overflows.
Embodiment 2：
Fig. 4 be the embodiment of the present invention 2 provide integrated TEM fluorescent screens and STEM detectors integral structure it is standby when
Structural representation；Fig. 5 is that the integrated TEM fluorescent screens of the offer of the embodiment of the present invention 2 and the integral structure of STEM detectors are in
The structural representation during A of position；Fig. 6 is the integration of integrated TEM fluorescent screens and STEM detectors that the embodiment of the present invention 2 is provided
Structure is in the structural representation during B of position；As illustrated, integrated TEM fluorescent screens and STEM that the embodiment of the present invention 2 is provided are visited
Surveying the integral structure of device includes：Lens barrel 201 with sidepiece interface and the adjustment by sidepiece interface on lens barrel 201
Part, in the embodiment of the present invention 2, the adjustment part is switching mechanism 202, and the face of facing of switching mechanism 202 is shaped as always
Angle is trapezoidal, and a part for switching mechanism 202 is located inside lens barrel 201, and another part of switching mechanism 202 is located at lens barrel 201
Outside, and switching mechanism 202 face face be right angle one end be located at lens barrel 201 outside, the other end of switching mechanism 202
Positioned at the inside of lens barrel 201, meanwhile, it is integrated with TEM fluorescent screens 204 and STEM on the switching mechanism 202 inside lens barrel 201
Detector 203, specifically, TEM fluorescent screens 204 are mounted on the central plane for facing face of the switching mechanism 202 inside lens barrel 201
On, STEM detectors 203 are mounted on the bottom surface for facing face of the switching mechanism 202 inside lens barrel 201.
In the integrated TEM fluorescent screens and the integral structure of STEM detectors that the embodiment of the present invention 2 is provided, switching mechanism
Angle between the 202 upper bottom for facing face and the waist for facing face of the switching mechanism 202 inside lens barrel 201 is 135 °,
Angle between the bottom for facing face of switching mechanism 202 and the waist for facing face of the switching mechanism 202 inside lens barrel 201
For 45 °, the switching mechanism 202 of the angle is set, ensure that the image of TEM fluorescent screens 204 is protected after being reflected by reflecting prism
Hold original scale.
In the integrated TEM fluorescent screens and the integral structure of STEM detectors that the embodiment of the present invention 2 is provided, in addition to one
CCD camera 205, CCD camera 205 is arranged on the other side interface of lens barrel 201, and position and the upset of CCD camera 205
The position of mechanism 202 is just corresponding.
It is standby in the integral structure of the integrated TEM fluorescent screens and STEM detectors that are provided using the embodiment of the present invention 2
In the case of, electron beam 22 reflects without any part, so that image will not be formed；When switching mechanism 202 is pushed into position A,
Electron beam 22 is reflexed in CCD camera 205 by TEM fluorescent screens 204, so as to realize the function of transmission electron microscope；
Further, when switching mechanism 202 is overturn to position B, electron beam 22 is irradiated on STEM detectors 203, so as to be converted into
Current strength is shown on fluorescent screen or computer display, completes the function of scanning transmission electron microscope.
So, the embodiment of the present invention 2 provide integrated TEM fluorescent screens and STEM detectors integral structure, by
Switching mechanism is installed on the sidepiece interface of lens barrel, and on the switching mechanism inside lens barrel integrated installation TEM fluorescent screens and
STEM detectors so that only need to change position of the switching mechanism in transmission electron microscope lens barrel, just can realize that TEM is glimmering
Optical screen or STEM detectors receive electron beam, so as to meet a sidepiece interface of lens barrel while installing CCD camera with glimmering
The purpose of optical screen (TEM fluorescent screens) and STEM detectors, and then meet function maximization of the user for transmission electron microscope
Demand, realize the cost performance that overflows.
In summary, the integral structure of integrated TEM fluorescent screens and STEM detectors provided in an embodiment of the present invention, passes through
The mounting and adjusting part on the sidepiece interface of lens barrel, and the integrated installation TEM fluorescent screens on the adjustment part inside lens barrel
With STEM detectors so that only need to change position of the adjustment part in transmission electron microscope lens barrel, just can realize TEM
Fluorescent screen or STEM detectors receive electron beam, are used while installing CCD camera so as to meet a sidepiece interface of lens barrel
The purpose of fluorescent screen (TEM fluorescent screens) and STEM detectors, and then it is maximum for the function of transmission electron microscope to meet user
The demand of change, realizes the cost performance overflowed.
It should be appreciated by those skilled in the art that those skilled in the art combine prior art and above-described embodiment can be real
The existing change case, will not be described here.Such change case has no effect on the substantive content of the present invention, will not be described here.
Presently preferred embodiments of the present invention is described above.It is to be appreciated that the invention is not limited in above-mentioned
Particular implementation, wherein the equipment and structure be not described in detail to the greatest extent are construed as giving reality with the common mode in this area
Apply；Any those skilled in the art, many possible variations and modification are made not departing from technical solution of the present invention, or
The equivalent embodiment of equivalent variations is revised as, this has no effect on the substantive content of the present invention.Therefore, it is every without departing from skill of the present invention
The content of art scheme, according to the present invention technical spirit to it is made for any of the above embodiments it is any it is simple modification, equivalent variations and
Modification, still fall within technical solution of the present invention protection in the range of.
Claims (3)
1. the integral structure of a kind of integrated TEM fluorescent screens and STEM detectors, it is characterised in that including：Connect with sidepiece
Mouthful lens barrel and by the sidepiece interface be arranged on the lens barrel on adjustment part, the adjustment part be sliding equipment or
Switching mechanism, the face of facing of the adjustment part is shaped as right-angled trapezium, and a part for the adjustment part is located at the lens barrel
It is internal；The upper bottom for facing face of the adjustment part and the waist for facing face of the adjustment part inside the lens barrel it
Between angle be 135 °；
TEM fluorescent screens and STEM detectors are integrated with the adjustment part inside the lens barrel；The TEM fluorescent screens
On the central plane for facing face for the adjustment part being installed on inside the lens barrel, the STEM detectors are installed on position
On the upper bottom surface up or down bottom surface for facing face of the adjustment part inside the lens barrel.
2. the integral structure of the integrated TEM fluorescent screens and STEM detectors as described in claim 1, it is characterised in that institute
The outside that one end that face is right angle is located at the lens barrel of facing of sliding equipment is stated, the TEM fluorescent screens are installed on positioned at described
On the central plane for facing face of the sliding equipment inside lens barrel, the STEM detectors are installed on inside the lens barrel
The sliding equipment the upper bottom surface for facing face on.
3. the integral structure of the integrated TEM fluorescent screens and STEM detectors as described in claim 1, it is characterised in that institute
The outside that one end that face is right angle is located at the lens barrel of facing of switching mechanism is stated, the TEM fluorescent screens are installed on positioned at described
On the central plane for facing face of the switching mechanism inside lens barrel, the STEM detectors are installed on inside the lens barrel
The switching mechanism the bottom surface for facing face on.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610187670.8A CN105742145B (en) | 2014-07-18 | 2014-07-18 | A kind of integral structure of integrated TEM fluorescent screens and STEM detectors |
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410345490.9A CN104091745B (en) | 2014-07-18 | 2014-07-18 | The integrated structure of a kind of integrated TEM window of tube and STEM detector |
| CN201610187670.8A CN105742145B (en) | 2014-07-18 | 2014-07-18 | A kind of integral structure of integrated TEM fluorescent screens and STEM detectors |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201410345490.9A Division CN104091745B (en) | 2014-07-18 | 2014-07-18 | The integrated structure of a kind of integrated TEM window of tube and STEM detector |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN105742145A CN105742145A (en) | 2016-07-06 |
| CN105742145B true CN105742145B (en) | 2017-10-13 |
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| CN201610187670.8A Active CN105742145B (en) | 2014-07-18 | 2014-07-18 | A kind of integral structure of integrated TEM fluorescent screens and STEM detectors |
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Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4206349A (en) * | 1977-12-01 | 1980-06-03 | Hitachi, Ltd. | Electron microscope |
| US5517033A (en) * | 1994-07-25 | 1996-05-14 | Gatan, Inc. | Apparatus for improved image resolution in electron microscopy |
| CN1959416A (en) * | 2005-11-01 | 2007-05-09 | Fei公司 | Stage assembly, particle-optical apparatus comprising such a stage assembly, and method of treating sample |
| CN202749334U (en) * | 2012-04-10 | 2013-02-20 | 中国人民解放军南京军区福州总医院 | Side-installed lens-coupling transmission electron microscope digital imaging apparatus |
| CN104091745B (en) * | 2014-07-18 | 2016-06-01 | 镇江乐华电子科技有限公司 | The integrated structure of a kind of integrated TEM window of tube and STEM detector |
-
2014
- 2014-07-18 CN CN201610187670.8A patent/CN105742145B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4206349A (en) * | 1977-12-01 | 1980-06-03 | Hitachi, Ltd. | Electron microscope |
| US5517033A (en) * | 1994-07-25 | 1996-05-14 | Gatan, Inc. | Apparatus for improved image resolution in electron microscopy |
| CN1959416A (en) * | 2005-11-01 | 2007-05-09 | Fei公司 | Stage assembly, particle-optical apparatus comprising such a stage assembly, and method of treating sample |
| CN202749334U (en) * | 2012-04-10 | 2013-02-20 | 中国人民解放军南京军区福州总医院 | Side-installed lens-coupling transmission electron microscope digital imaging apparatus |
| CN104091745B (en) * | 2014-07-18 | 2016-06-01 | 镇江乐华电子科技有限公司 | The integrated structure of a kind of integrated TEM window of tube and STEM detector |
Also Published As
| Publication number | Publication date |
|---|---|
| CN105742145A (en) | 2016-07-06 |
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