CN105652452A - Space beam combination device and system - Google Patents
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Abstract
The invention discloses a space beam combination device and system. The space beam combination device comprises a laser array, a collimator and a reflection mirror array, wherein the laser array comprises N lasers, the reflection mirror array comprises N reflection mirrors corresponding to the N lasers, and N is a positive integer more than 1; laser beams emitted by each laser in the laser array are incident on the corresponding reflection mirror; the collimator is used for collimating each laser beam; each reflection mirror in the reflection mirror array is used for reflecting the incident laser beams and then outputting a laser beam array; the laser beam array comprises N mutually parallel and coplanar laser beams; and the optical distances from a light source to the output position of the laser beams are the same. The scheme has the beneficial effects that the principle is simple, parts are reasonably allocated, the implementability is strong, the adjustment difficulty is low, the flexibility is high, the number of the lasers in the laser array is easily increased, and thus space beam combination requirements are met.
Description
Technical Field
The invention relates to the technical field of laser, in particular to a spatial beam combining device and a spatial beam combining system.
Background
The laser beam combining technology is a process for improving beam quality, increasing output power and improving power density, and a common laser beam combining method comprises spatial beam combining, polarization beam combining and wavelength beam combining, wherein the application scenes of the spatial beam combining are as follows:
the single tube of the semiconductor laser has the advantages of high efficiency, compact structure, low cost and high reliability, but the single light output power of the single semiconductor laser is lower, and the light beams of the single tubes of a plurality of semiconductor lasers are spatially combined to obtain high power. Fig. 1 shows a schematic diagram of a spatial beam combiner in the prior art. As shown in fig. 1, the single tubes of the semiconductor lasers are respectively placed on different orders of the step plate, and the laser beams emitted by each semiconductor laser are output after being collimated by the fast axis collimating lens, in this scheme, in order to obtain mutually parallel and coplanar laser beams, it is necessary to adjust and calibrate the internal components related to each single tube of the semiconductor laser in multiple dimensions, including the adjustment of collimation, the calibration of directivity, etc. of the laser beams emitted by each single tube of the semiconductor laser, the difficulty of adjustment is very large, and because the finally output multiple laser beams inevitably experience different optical paths, the sizes of the corresponding light spots obtained on the same output plane are not consistent, which results in the accuracy, effect, etc. of the spatial beam combination being unsatisfactory.
Disclosure of Invention
In view of the above, the present invention has been developed to provide a spatial beam combining device and system that overcome, or at least partially address, the above-discussed problems.
According to an aspect of the present invention, there is provided a spatial beam combining apparatus, the apparatus comprising: a laser array, a collimator, and a mirror array;
the laser array comprises N lasers, and the reflector array comprises N reflectors corresponding to the N lasers, wherein N is a positive integer greater than 1;
laser beams emitted by each laser in the laser array are incident on the corresponding reflecting mirror;
the collimator collimates each laser beam;
and after each reflector in the reflector array reflects the incident laser beam, outputting a laser beam array, wherein the laser beam array comprises N laser beams which are parallel and coplanar, and each laser beam has the same optical path from a light source to an output position.
Optionally, each laser in the laser array is a single semiconductor laser tube;
the fast axis directions of N laser beams in the laser beam array are consistent, and the slow axis directions are consistent;
the plane where the laser beam array is located is parallel to the fast axis direction; or the plane of the laser beam array is parallel to the slow axis direction.
Optionally, the collimator comprises: n fast axis collimating lenses and N slow axis collimating lenses corresponding to the single tubes of the N semiconductor lasers;
laser beams output by the single tubes of the semiconductor lasers are collimated by the corresponding fast-axis collimating lens and the corresponding slow-axis collimating lens and then are incident on the corresponding reflecting mirrors.
Optionally, when the plane of the laser beam array is parallel to the fast axis direction,
the collimator lens includes: n fast axis collimating lenses and 1 slow axis collimating lens corresponding to the single tube of the N semiconductor lasers;
laser beams output by the single tubes of the semiconductor lasers are collimated by the corresponding fast axis collimating lenses and then are incident on the corresponding reflecting mirrors;
n laser beams which are parallel to each other and coplanar are obtained by reflection of the reflector array and are output after being collimated by 1 slow-axis collimating lens.
Optionally, when the plane of the laser beam array is parallel to the slow axis direction,
the collimator lens includes: n slow axis collimating lenses and 1 fast axis collimating lens corresponding to the single tubes of the N semiconductor lasers;
laser beams output by the single tubes of the semiconductor lasers are collimated by the corresponding slow-axis collimating lenses and then are incident on the corresponding reflectors;
n laser beams which are parallel to each other and coplanar are obtained by reflection of the reflector array and are output after being collimated by 1 fast axis collimating lens.
Optionally, the mirrors of the mirror array comprise: a reflective mirror, and/or a reflective prism.
Optionally, when the plane of the laser beam array is parallel to the slow axis direction, the adjacent distance between N parallel and coplanar laser beams in the laser beam array is greater than or equal to the spot diameter of the laser beam in the fast axis direction at the output position.
Optionally, when the plane of the laser beam array is parallel to the slow axis direction, the adjacent distance between N parallel and coplanar laser beams in the laser beam array is greater than or equal to the spot diameter of the laser beam in the slow axis direction at the output position.
According to another aspect of the present invention, there is provided a spatial beam combining system comprising a plurality of spatial beam combining devices as described in any one of the above;
the planes of the laser beam arrays output by the plurality of spatial beam combining devices are mutually parallel or coplanar.
Optionally, the plane where the laser beam array output by each spatial beam combining device is located is parallel to the fast axis direction;
or,
the plane of the laser beam array output by each spatial beam combining device is parallel to the slow axis direction.
From the foregoing, in summary, in the technical solution provided by the present invention, laser beams emitted by each laser in a laser array are collimated and then incident on a corresponding reflector in a reflector array, and are reflected by the reflector, and the reflector array reflects the laser beams to obtain the laser beam array and outputs the laser beam array, wherein a plurality of laser beams in the output laser beam array are parallel and coplanar, and optical paths of the laser beams from a light source to an output position are the same, so that the spot sizes of the laser beams on a plane where the output position is located are the same and are arranged in a row along a certain direction, thus it is obvious that the present solution implements spatial beam combination of the laser beams emitted by a plurality of lasers in the laser array by mutual cooperation of the laser array, the reflector array and a collimator, obtains a high-power beam combination effect, and further combines a plurality of spatial beam combination devices together, and obtaining a spatial beam combining system and obtaining the laser beam distribution after beam combination in different forms. The laser beam combining device is simple in principle, reasonable in configuration of all parts, strong in implementability, low in adjusting difficulty and high in flexibility, on the basis of guaranteeing the power effect after combining, the adjusting difficulty of carrying out space beam combining on a laser beam is greatly reduced, the number of lasers in a laser array is easily expanded, and the space beam combining requirement is met.
The foregoing description is only an overview of the technical solutions of the present invention, and the embodiments of the present invention are described below in order to make the technical means of the present invention more clearly understood and to make the above and other objects, features, and advantages of the present invention more clearly understandable.
Drawings
Various other advantages and benefits will become apparent to those of ordinary skill in the art upon reading the following detailed description of the preferred embodiments. The drawings are only for purposes of illustrating the preferred embodiments and are not to be construed as limiting the invention. Also, like reference numerals are used to refer to like parts throughout the drawings. In the drawings:
FIG. 1 shows a schematic diagram of a spatial beam combining apparatus in the prior art;
FIG. 2A is a top view of a spatial beam combiner, according to a first embodiment of the present invention;
FIG. 2B is a front view of a spatial beam combiner, according to a first embodiment of the present invention;
FIG. 3A shows a top view of a spatial beam combiner, according to a second embodiment of the present invention;
FIG. 3B shows a front view of a spatial beam combiner, according to a second embodiment of the present invention;
FIG. 4A is a top view of a spatial beam combiner, according to a third embodiment of the present invention;
fig. 4B is a schematic diagram illustrating the light intensity distribution of the laser beam array output by the spatial beam combiner according to the third embodiment of the present invention;
FIG. 5A shows a schematic diagram of a spatial beam combining system according to one embodiment of the invention;
FIG. 5B shows a top view of a spatial beam combining system according to one embodiment of the invention;
FIG. 5C illustrates a front view of a spatial beam combining system according to one embodiment of the present invention;
FIG. 5D is a schematic diagram of the light intensity distribution of the output of the spatial beam combining system according to one embodiment of the present invention;
FIG. 5E is a diagram illustrating an optical intensity distribution of an output of a spatial beam combining system according to another embodiment of the present invention.
Detailed Description
Exemplary embodiments of the present disclosure will be described in more detail below with reference to the accompanying drawings. While exemplary embodiments of the present disclosure are shown in the drawings, it should be understood that the present disclosure may be embodied in various forms and should not be limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the scope of the disclosure to those skilled in the art.
The spatial beam combining device and system provided by the invention are explained according to a right-hand spatial rectangular coordinate system x-y-z which is formed by establishing an x axis, a y axis and a z axis, wherein the x axis is a horizontal axis, the z axis is a vertical axis, and the y axis is a vertical axis.
Fig. 2A shows a top view of a spatial beam combiner, i.e. a distribution diagram of the spatial beam combiner in an x-z plane according to a first embodiment of the present invention. The device includes: a laser array, a collimator, and a mirror array; as shown in fig. 2A, the laser array includes 6 lasers 1, and the mirror array includes 6 mirrors 4 corresponding to the 6 lasers 1; the collimator includes 6 fast axis collimating lenses 2 (collimating the divergence of the laser beam in the fast axis direction) and 6 slow axis collimating lenses 3 (collimating the divergence of the laser beam in the slow axis direction) corresponding to the 6 lasers 1. Wherein, each laser 1 is a single semiconductor laser tube, 6 lasers 1 are distributed in a step shape on an x-z plane, according to the sequence from top right to bottom left in fig. 2A, the coordinates of a first laser 1 on the x-z plane are (x1, z1), the coordinates of a second laser 1 on the x-z plane are (x2, z2), and so on, the coordinates of a sixth laser 1 on the x-z plane are (x6, z6), it can be known that x1> x2> … > x6, z1< z2< … < z 6; let the coordinates of the incident position of the laser beam emitted by the first laser 1 on the corresponding mirror 4 on the x-z plane be (x1 ', z 1'), the coordinates of the incident position of the laser beam emitted by the second laser 1 on the corresponding mirror 4 on the x-z plane be (x2 ', z 2'), and so on, and the coordinates of the incident position of the laser beam emitted by the sixth laser 1 on the corresponding mirror 4 on the x-z plane be (x6 ', z 6'), which means that x1 '═ x 2' ═ … ═ x6 ', z 1' < z2 '< … < z 6'.
Fig. 2B is a front view of a spatial beam combiner, which is a schematic distribution diagram of the spatial beam combiner in an x-y plane according to a first embodiment of the present invention. As can be seen from fig. 2B, assuming that the coordinate of the first laser 1 on the y-axis is y1, the coordinate of the second laser 1 on the y-axis is y2, and so on, and the coordinate of the sixth laser 1 on the y-axis is y6, assuming that the coordinate of the incident position of the laser beam emitted by the first laser 1 on the corresponding mirror 4 on the y-axis is y1 ', the coordinate of the incident position of the laser beam emitted by the second laser 1 on the corresponding mirror 4 on the y-axis is y 2', and so on, the coordinate of the incident position of the laser beam emitted by the sixth laser 1 on the corresponding mirror 4 on the y-axis is y6 ', and it can be from the first laser 1 to the sixth laser 1 in the order from top to bottom in fig. 2B, then y1> y2> … > y6, y 1' > y2 '> … > y 6'; alternatively, from the first laser 1 to the sixth laser 1 in the order from bottom to top in fig. 2B, it can be known that y1< y2< … < y6, y1 ' < y2 ' < … < y6 '.
In the spatial beam combining device shown in fig. 2A and 2B, for each laser 1 in the laser array, the laser beam emitted by the laser 1 is collimated by the fast-axis collimating lens 2 and the slow-axis collimating lens 3 corresponding to the laser 1, then enters the mirror 4 corresponding to the laser 1, and is reflected and output by the mirror 4. By adjusting the position of each laser 1 and the position of each reflector 4, the laser beam reflected and output by each reflector 4 is not blocked by other reflectors 4, 6 laser beams are parallel and coplanar to form a laser beam array, the plane of the laser beam array is parallel to the y-axis direction (fast axis direction), and each laser beam in the laser beam array has the same optical path from the light source to the output position.
After the plane position of the output laser beam array is determined, the fast axis collimating lens 2 and the slow axis collimating lens in the collimator can be flexibly used, and for the condition that the plane of the output laser beam array is parallel to the fast axis direction, the laser beam can be collimated only in the fast axis direction before being reflected, for example: fig. 3A shows a top view of a spatial beam combiner, i.e. a distribution diagram of the spatial beam combiner in the x-z plane according to the second embodiment of the present invention. The device includes: a laser array, a collimator, and a mirror array; as shown in fig. 3A, the laser array includes 6 lasers 1, and the mirror array includes 6 mirrors 4 corresponding to the 6 lasers 1; the collimator comprises 6 fast axis collimating lenses 2 and 1 slow axis collimating lens 3 corresponding to 6 lasers 1, and each laser 1 is a semiconductor laser single tube. Fig. 3B shows a front view of a spatial beam combiner, which is a schematic distribution diagram of the spatial beam combiner in the x-y plane according to the second embodiment of the present invention.
In the spatial beam combining device shown in fig. 3A and 3B, the distribution of the 6 lasers 1 and the distribution of the incident positions of the laser beams output by the lasers on the reflecting mirror 4 are the same as those shown in fig. 2A-2B, and are not described again here. In this embodiment, for each laser 1 in the laser array, the laser beam emitted by the laser 1 is collimated by the fast axis collimating lens 2 corresponding to the laser 1, and then enters the reflecting mirror 4 corresponding to the laser 1, and is reflected and output by the reflecting mirror 4, the plane where 6 mutually parallel and coplanar laser beams are reflected by the reflecting mirror array is parallel to the y axis direction (fast axis direction), and the 6 laser beams are collimated by 1 slow axis collimating lens 3 and then output.
Correspondingly, for the condition that the plane where the output laser beam array is located is parallel to the slow axis direction, the laser beam can be only collimated in the slow axis direction before being reflected, that is, the collimator comprises 1 fast axis collimating lens 2 and 6 slow axis collimating lens 3, the 6 slow axis collimating lenses 3 are respectively placed between the corresponding laser 1 and the reflecting mirror 4, and the 1 fast axis collimating lens 2 is placed in the direction that the 6 reflecting mirrors 4 reflect the output laser beam, so that the 6 laser beams obtained by reflection are collimated together and then output, the specific process corresponds to the above principle, and the details are not repeated herein.
The working principle of the spatial beam combining device provided by the invention is further illustrated by a specific embodiment.
Fig. 4A is a top view of a spatial beam combiner according to a third embodiment of the present invention, as shown in fig. 4A, the spatial beam combiner includes: 5 lasers 1 corresponding to 5 mirrors 4 of the 5 lasers 1; the laser unit 5 comprises 5 fast axis collimating lenses 2 and 5 slow axis collimating lenses 3 corresponding to the 5 lasers 1, each laser 1, and the fast axis collimating lens 2 and the slow axis collimating lens 3 corresponding to the laser 1 are used together as a laser unit 5, and collimated laser beams are output from an outlet of the laser unit 5. Each laser 1 is a semiconductor laser single tube, and outputs a laser beam with the wavelength of 638nm, the light-emitting surface of each laser 1 emits a waist spot of the laser beam, the diameter of the waist spot in the slow axis direction is 36um, and the diameter of the waist spot in the fast axis direction is 2.4 um; the light beam parameter product in the slow axis direction is 2.0011 mm-mrad, and the light beam parameter product in the fast axis direction is 0.62257 mm-mrad; the focal length of each fast axis collimating lens 2 is 1.1mm, and the focal length of each slow axis collimating lens 3 is 15 mm.
The laser beam emitted from each laser 1 is collimated by the fast axis collimating lens 2 and the slow axis collimating lens 3 corresponding to the laser 1, and then incident on the reflecting mirror 4 corresponding to the laser 1, and is reflected and output by the reflecting mirror 4. By adjusting the position of each laser 1 and the position of each reflector 4, the laser beam reflected and output by each reflector 4 is not blocked by other reflectors 4, 5 laser beams reflected by 5 reflectors 4 are parallel and coplanar to form a laser beam array output, each laser beam in the laser beam array propagates in a direction parallel to the z-axis, the plane of the laser beam array is parallel to the y-axis direction (fast-axis direction), and the light spots of each laser beam in the laser beam array on the x-y plane of the output position are arranged in a line along the y-axis direction (fast-axis direction).
Still according to the sequence from the top right to the bottom left in the figure, the coordinates of the first laser 1 on the x-z plane are (x1, z1), the coordinates of the second laser 1 on the x-z plane are (x2, z2), and so on, and the coordinates of the fifth laser 1 on the x-z plane are (x5, z5), so that x1, x2, …, x5 form an arithmetic decreasing series with the tolerance of 12 in mm, and z1, z2, …, z5 form an arithmetic increasing series with the tolerance of 12 in mm; let the coordinates of the incident position of the laser beam emitted by the first laser 1 on the corresponding mirror 4 on the x-z plane be (x1 ', z 1'), the coordinates of the incident position of the laser beam emitted by the second laser 1 on the corresponding mirror 4 on the x-z plane be (x2 ', z 2'), and so on, and the coordinates of the incident position of the laser beam emitted by the fifth laser 1 on the corresponding mirror 4 on the x-z plane be (x5 ', z 5'), it can be known that x1 ═ x2 ═ … ═ x5 ', z 1', z2 ', …, z 5' also form an arithmetic progression, the tolerance is 12, and the unit is mm; the thickness of each fast axis collimating lens 2 in the x axis is 1.1mm, the distance from the light emitting surface of each fast axis collimating lens 2 to the exit of the corresponding laser unit 5 in the x axis is 13.9mm, the distance from the exit of the laser unit 5 corresponding to the first laser to the corresponding mirror 4 in the x axis is 32mm, and the distance from the incident position of the laser beam output by the fifth laser 1 on the corresponding mirror 4 to the output position of the laser beam array in the z axis is 20 mm. Then, as can be seen from the above parameters, the optical path length of the laser beam emitted by each laser 1 from the light source to the output position is 100mm, and the spot sizes of the laser beams on the x-y plane where the output positions are located are consistent.
Further, the adjacent distance between the laser beams in the laser beam array output by the spatial beam combining device of this embodiment is 1.2mm, that is, the height difference of the spots on the x-y plane where the output positions of the adjacent laser beams are located on the y axis is 1.2 mm. Fig. 4B is a schematic diagram illustrating the light intensity distribution of the laser beam array output by the spatial beam combiner according to the third embodiment of the present invention. As shown in fig. 4B, the light intensity of each laser beam in the laser beam array obtained in this embodiment is gaussian distributed, and the spots of each laser beam are aligned in a line along the fast axis direction.
Correspondingly, in other embodiments, the spots of the laser beams in the output laser beam array may also be arranged in a row along the slow axis direction, and may be set according to actual requirements, which is not limited herein.
In an embodiment of the present invention, the mirrors in the mirror array described above include: a reflective mirror, and/or a reflective prism.
In an embodiment of the invention, when the plane of the laser beam array is parallel to the slow axis direction, the adjacent spacing of the multiple mutually parallel and coplanar laser beams in the laser beam array is greater than or equal to the spot diameter of the laser beams in the fast axis direction at the output position. And when the plane of the laser beam array is parallel to the slow axis direction, the adjacent distance of a plurality of mutually parallel and coplanar laser beams in the laser beam array is more than or equal to the spot diameter of the laser beams along the slow axis direction at the output position.
Fig. 5A is a schematic diagram of a spatial beam combining system according to an embodiment of the present invention, as shown in fig. 5A, the system includes: two spatial beam combining devices, each of which is the same as the spatial beam combining device described in the first to third embodiments, are not described herein again. Fig. 5B shows a top view and fig. 5C shows a front view of a spatial beam combining system according to an embodiment of the invention, where the planes of the two laser beam arrays output by the two spatial beam combining devices are parallel to each other, as shown in fig. 5A-5C.
In a specific embodiment, each spatial beam combining device in the spatial beam combining system is as shown in fig. 4A-4B, a plane where a laser beam array output by each spatial beam combining device is located is parallel to the fast axis direction, and spots of each laser beam in the laser beam array are aligned in a line along the fast axis direction. The spatial beam combining system in this embodiment makes the planes where the two laser beam arrays are located parallel to each other, fig. 5D shows a schematic diagram of light intensity distribution output by the spatial beam combining system according to an embodiment of the present invention, as shown in fig. 5D, there are two laser beam arrays in total, the light spots corresponding to each laser beam array are arranged in a line along the y-axis direction (fast-axis direction), the two lines of light spots are parallel to each other, and the distance between the two lines of light spots in the x-axis direction (slow-axis direction) is 3.5 mm. The spatial beam combining system provided by the embodiment is suitable for commonly coupling the laser light emitted by 10 lasers into an optical fiber.
Or, in another specific embodiment, each spatial beam combining device in the spatial beam combining system is as shown in fig. 4A-4B, a plane where the laser beam array output by each spatial beam combining device is located is parallel to the fast axis direction, and spots of the laser beams in the laser beam array are aligned in a line along the fast axis direction. The spatial beam combining system makes the planes of the two laser beam arrays coplanar, and fig. 5E shows a schematic diagram of the light intensity distribution output by the spatial beam combining system according to another embodiment of the present invention, as shown in fig. 5E, there are two laser beam arrays, the corresponding spots of each laser beam array are aligned in a row along the y-axis direction (fast axis direction), and the two rows of spots are collinear in the y-axis direction.
In other embodiments, the laser beam arrays output by the spatial beam combining devices according to the first to third embodiments may be further processed by polarization beam combining or wavelength beam combining, wherein the wavelength beam combining includes dense wavelength division multiplexing, broadband wavelength division multiplexing, and the like.
In summary, in the technical solution provided by the present invention, laser beams emitted by each laser in a laser array are collimated and then incident on a corresponding reflector in a reflector array, and are reflected by the reflector, and the reflector array reflects the laser beams to obtain a laser beam array and outputs the laser beam array, wherein a plurality of laser beams in the output laser beam array are parallel and coplanar, and optical paths of the laser beams from a light source to an output position are the same, so that the spot sizes of the laser beams on a plane where the output position is located are the same and are arranged in a line along a certain direction, it can be seen that the present solution implements spatial beam combining of the laser beams emitted by a plurality of lasers in the laser array by mutual cooperation of the laser array, the reflector array and a collimator, obtains a high-power beam combining effect, further combines a plurality of spatial beam combining devices together, and obtaining a spatial beam combining system and obtaining the laser beam distribution after beam combination in different forms. The laser beam combining device is simple in principle, reasonable in configuration of all parts, strong in implementability, low in adjusting difficulty and high in flexibility, on the basis of guaranteeing the power effect after combining, the adjusting difficulty of carrying out space beam combining on a laser beam is greatly reduced, the number of lasers in a laser array is easily expanded, and the space beam combining requirement is met.
The above description is only for the preferred embodiment of the present invention, and is not intended to limit the scope of the present invention. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention shall fall within the protection scope of the present invention.
Claims (10)
1. A spatial beam combining apparatus, the apparatus comprising: a laser array, a collimator, and a mirror array;
the laser array comprises N lasers, and the reflector array comprises N reflectors corresponding to the N lasers, wherein N is a positive integer greater than 1;
laser beams emitted by each laser in the laser array are incident on the corresponding reflecting mirror;
the collimator collimates each laser beam;
and after each reflector in the reflector array reflects the incident laser beam, outputting a laser beam array, wherein the laser beam array comprises N laser beams which are parallel and coplanar, and each laser beam has the same optical path from a light source to an output position.
2. The apparatus of claim 1,
each laser in the laser array is a semiconductor laser single tube;
the fast axis directions of N laser beams in the laser beam array are consistent, and the slow axis directions are consistent;
the plane where the laser beam array is located is parallel to the fast axis direction; or the plane of the laser beam array is parallel to the slow axis direction.
3. The apparatus of claim 2,
the collimator includes: n fast axis collimating lenses and N slow axis collimating lenses corresponding to the single tubes of the N semiconductor lasers;
laser beams output by the single tubes of the semiconductor lasers are collimated by the corresponding fast-axis collimating lens and the corresponding slow-axis collimating lens and then are incident on the corresponding reflecting mirrors.
4. The apparatus of claim 2,
when the plane of the laser beam array is parallel to the fast axis direction,
the collimator lens includes: n fast axis collimating lenses and 1 slow axis collimating lens corresponding to the single tube of the N semiconductor lasers;
laser beams output by the single tubes of the semiconductor lasers are collimated by the corresponding fast axis collimating lenses and then are incident on the corresponding reflecting mirrors;
n laser beams which are parallel to each other and coplanar are obtained by reflection of the reflector array and are output after being collimated by 1 slow-axis collimating lens.
5. The apparatus of claim 2,
when the plane of the laser beam array is parallel to the slow axis direction,
the collimator lens includes: n slow axis collimating lenses and 1 fast axis collimating lens corresponding to the single tubes of the N semiconductor lasers;
laser beams output by the single tubes of the semiconductor lasers are collimated by the corresponding slow-axis collimating lenses and then are incident on the corresponding reflectors;
n laser beams which are parallel to each other and coplanar are obtained by reflection of the reflector array and are output after being collimated by 1 fast axis collimating lens.
6. The apparatus of any one of claims 1-5,
the mirrors in the mirror array include: a reflective mirror, and/or a reflective prism.
7. The apparatus of any one of claims 2-5,
when the plane of the laser beam array is parallel to the slow axis direction, the adjacent distance between N parallel coplanar laser beams in the laser beam array is larger than or equal to the spot diameter of the laser beams on the output position along the fast axis direction.
8. The apparatus of any one of claims 2-5,
when the plane of the laser beam array is parallel to the slow axis direction, the adjacent distance between N parallel coplanar laser beams in the laser beam array is larger than or equal to the spot diameter of the laser beams along the slow axis direction at the output position.
9. A spatial beam combining system comprising a plurality of spatial beam combining apparatus according to any one of claims 1 to 8;
the planes of the laser beam arrays output by the plurality of spatial beam combining devices are mutually parallel or coplanar.
10. The system of claim 9,
the plane where the laser beam array output by each spatial beam combining device is located is parallel to the fast axis direction;
or,
the plane of the laser beam array output by each spatial beam combining device is parallel to the slow axis direction.
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| CN201610052020.2A CN105652452A (en) | 2016-01-26 | 2016-01-26 | Space beam combination device and system |
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| CN201610052020.2A CN105652452A (en) | 2016-01-26 | 2016-01-26 | Space beam combination device and system |
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Cited By (13)
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| CN105974534A (en) * | 2016-07-14 | 2016-09-28 | 北京凯普林光电科技股份有限公司 | Fiber coupling apparatus |
| CN105977771A (en) * | 2016-07-14 | 2016-09-28 | 北京凯普林光电科技股份有限公司 | Laser beam combining apparatus |
| CN107121738A (en) * | 2017-06-12 | 2017-09-01 | 青岛海信宽带多媒体技术有限公司 | Optical module |
| CN109143572A (en) * | 2018-09-17 | 2019-01-04 | 西北核技术研究所 | Beam laser system and method are closed for the bundling device of pulse laser, pulse |
| CN110265877A (en) * | 2019-06-24 | 2019-09-20 | 淮阴工学院 | A kind of space angle closes beam semiconductor laser and its preparation process and closes Shu Fangfa |
| CN110441200A (en) * | 2018-05-04 | 2019-11-12 | 长沙青波光电科技有限公司 | A kind of laser measuring device for measuring |
| CN111712976A (en) * | 2018-02-14 | 2020-09-25 | 古河电气工业株式会社 | Semiconductor laser module |
| CN111969416A (en) * | 2020-08-28 | 2020-11-20 | 南京镭芯光电有限公司 | Semiconductor laser device |
| CN112103765A (en) * | 2020-11-13 | 2020-12-18 | 深圳市星汉激光科技有限公司 | Semiconductor laser |
| CN112864792A (en) * | 2021-01-08 | 2021-05-28 | 西安炬光科技股份有限公司 | Semiconductor laser module and optical system |
| CN114234131A (en) * | 2021-11-18 | 2022-03-25 | 晶影光学技术(常熟)有限公司 | Beam-combining and light-splitting illumination system |
| CN115509002A (en) * | 2022-11-24 | 2022-12-23 | 苏州镭陌科技有限公司 | Adaptive optical monitoring device and method for array light beam |
| CN117239535A (en) * | 2023-11-10 | 2023-12-15 | 北京镭科光电科技有限公司 | Multi-die coupled semiconductor laser, coupling method and pumping source |
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Cited By (18)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105977771A (en) * | 2016-07-14 | 2016-09-28 | 北京凯普林光电科技股份有限公司 | Laser beam combining apparatus |
| CN105974534B (en) * | 2016-07-14 | 2018-01-12 | 北京凯普林光电科技股份有限公司 | A kind of fiber coupling device |
| CN105974534A (en) * | 2016-07-14 | 2016-09-28 | 北京凯普林光电科技股份有限公司 | Fiber coupling apparatus |
| CN107121738A (en) * | 2017-06-12 | 2017-09-01 | 青岛海信宽带多媒体技术有限公司 | Optical module |
| CN107121738B (en) * | 2017-06-12 | 2020-01-14 | 青岛海信宽带多媒体技术有限公司 | Optical module |
| CN111712976B (en) * | 2018-02-14 | 2023-06-16 | 古河电气工业株式会社 | Semiconductor laser module |
| US11962120B2 (en) | 2018-02-14 | 2024-04-16 | Furukawa Electric Co., Ltd. | Semiconductor laser module |
| CN111712976A (en) * | 2018-02-14 | 2020-09-25 | 古河电气工业株式会社 | Semiconductor laser module |
| CN110441200A (en) * | 2018-05-04 | 2019-11-12 | 长沙青波光电科技有限公司 | A kind of laser measuring device for measuring |
| CN109143572A (en) * | 2018-09-17 | 2019-01-04 | 西北核技术研究所 | Beam laser system and method are closed for the bundling device of pulse laser, pulse |
| CN109143572B (en) * | 2018-09-17 | 2021-05-25 | 西北核技术研究所 | Beam combiner for pulse laser, pulse beam combining laser system and method |
| CN110265877A (en) * | 2019-06-24 | 2019-09-20 | 淮阴工学院 | A kind of space angle closes beam semiconductor laser and its preparation process and closes Shu Fangfa |
| CN111969416A (en) * | 2020-08-28 | 2020-11-20 | 南京镭芯光电有限公司 | Semiconductor laser device |
| CN112103765A (en) * | 2020-11-13 | 2020-12-18 | 深圳市星汉激光科技有限公司 | Semiconductor laser |
| CN112864792A (en) * | 2021-01-08 | 2021-05-28 | 西安炬光科技股份有限公司 | Semiconductor laser module and optical system |
| CN114234131A (en) * | 2021-11-18 | 2022-03-25 | 晶影光学技术(常熟)有限公司 | Beam-combining and light-splitting illumination system |
| CN115509002A (en) * | 2022-11-24 | 2022-12-23 | 苏州镭陌科技有限公司 | Adaptive optical monitoring device and method for array light beam |
| CN117239535A (en) * | 2023-11-10 | 2023-12-15 | 北京镭科光电科技有限公司 | Multi-die coupled semiconductor laser, coupling method and pumping source |
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