CN105314576A - Solvent supply system - Google Patents
Solvent supply system Download PDFInfo
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- CN105314576A CN105314576A CN201410366352.9A CN201410366352A CN105314576A CN 105314576 A CN105314576 A CN 105314576A CN 201410366352 A CN201410366352 A CN 201410366352A CN 105314576 A CN105314576 A CN 105314576A
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- solvent
- bottle
- pipeline
- switch valve
- supply system
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- Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
Abstract
The invention discloses a solvent supply system which is simple in structure, low in cost and free of noise and rapidly supplies liquid. According to the technical scheme, a gas supply pipeline, a vacuumizing pipeline and a solvent conveying pipeline are installed on a solvent bottle; the first end of the solvent conveying pipeline extends into the position, close to the bottle bottom, of the solvent bottle; a solvent supply opening is connected with the second end of the solvent conveying pipeline through a first switch valve and a first one-way valve; the second end of the solvent conveying pipeline is connected with a solvent outlet end through a second one-way valve and a second switch valve; a high level sensor and a low level sensor for detecting the level of solvent liquid are arranged inside the solvent bottle.
Description
Technical field
The present invention relates to a kind of solution supply equipment, particularly relate to simple, the with low cost and uniform solution supply equipment of liquid supply pressure of a kind of structure.
Background technology
In semiconductor process flow, need the liquid supply equipment using chemical solvent, traditional chemical solvent supply equipment conveying chemical solvent is realized by chemical pumping.Chemical pumping is applicable to extract corrosive liquid in bottle, bucket, cylinder, pond or other containers, and its product mainly contains: various glass fibre chemical industry pump, corrosion-resistant plastic pump, high temperature chemical pump, standard chemical flow-process pump, magnetic force driving pump etc.The principle of work of chemical pump is: before turn on pump, must be full of liquid in induction pipe and pump.After turn on pump, impeller High Rotation Speed, liquid wherein rotates together along with blade, under the influence of centrifugal force, flies away from impeller and outwards penetrates, and liquid speed in pump case diffuser chamber of injection is slack-off gradually, and pressure increases gradually, and then from pump discharge, exhaust tube flows out.Now, blade center place due to liquid be thrown toward around and formed both do not had air there is no the vacuum low-pressure district of liquid, liquid in liquid pool is under the atmospheric effect in face, pond, in induction pipe inflow pump, liquid is continuously pumped up and continuously flows out from exhaust tube so exactly from liquid pool.
But in chemical solvent supply equipment, adopt chemical pump structure, also there is following deficiency:
1) complex structure, high cost.Because chemical industry pump structure is comparatively complicated, and in order to realize the technique effects such as anticorrosive, special process also being carried out to its material, has caused the raising of the cost of whole scheme.
2) noise is excessive, and chemical pump can produce fitfull noise at work, and this noise is different from the domestic noise contacted in daily life, belong to low-frequency noise and decay slowly, sound wave is longer, for a long time can to healthy generation adverse influence.
Summary of the invention
Below provide the brief overview of one or more aspect to provide the basic comprehension to these aspects.Detailed the combining of this not all aspect contemplated of general introduction is look at, and both not intended to be pointed out out the scope of key or decisive any or all aspect of elements nor delineate of all aspects.Its unique object is the sequence that some concepts that will provide one or more aspect in simplified form think the more detailed description provided after a while.
The object of the invention is to solve the problem, provide a kind of solvent supply system, structure is simple, cost is lower, fluid infusion is rapid and noiselessness produces.
Technical scheme of the present invention is: present invention is disclosed a kind of solvent supply system, comprise solvent bottle, the gas supply pipeline that solvent bottle is installed, vacuum-pumping pipeline, solvent delivery pipeline, wherein the first end of solvent delivery pipeline stretch into solvent bottle close to position at the bottom of bottle, solvent supply mouth is by the first switch valve, first check valve connects the second end of solvent delivery pipeline, second end of solvent delivery pipeline is by the second check valve, second switch valve connects solvent outlet end, the high-order inductor for detecting solvent liquid level height and low level inductor is provided with in solvent bottle.
According to an embodiment of solvent supply system of the present invention, setting pressure table between the second check valve and second switch valve.
According to an embodiment of solvent supply system of the present invention, gas supply pipeline provides the input of nitrogen.
According to an embodiment of solvent supply system of the present invention, in fluid infusion operation, close second switch valve and gas supply pipeline, solvent supply mouth is connected solvent supply unit, open vacuum-pumping pipeline to vacuumize, flowed in solvent bottle by solvent supply mouth to make the solvent in solvent supply unit.
According to an embodiment of solvent supply system of the present invention, flow in the process in solvent bottle at solvent, close vacuum-pumping pipeline and the first switch valve when high-order inductor detects that solvent liquid level arrives and presets most high liquid level (HLL), solvent flows into process to be stopped.
According to an embodiment of solvent supply system of the present invention, in feed flow operation, open second switch valve and gas supply pipeline, extraneous gas is entered outwards to be extruded by solvent delivery pipeline by the solvent in solvent bottle in solvent bottle, and the pipeline eventually through the second check valve, second switch valve flows out from solvent outlet end.
According to an embodiment of solvent supply system of the present invention, in the process that solvent flows out outside solvent bottle, close gas supply pipeline and second switch valve when low level inductor detects that solvent liquid level arrives and presets minimum level, solvent flows out process to be stopped.
The present invention contrasts prior art following beneficial effect: the stoste of outside is added in solvent bottle by the mode vacuumized by solvent supply system of the present invention, by the mode being blown into gas (such as nitrogen), the solvent in solvent bottle is forced into outside bottle, preferably, a high-order inductor and a low level inductor are set in solvent bottle, whether whether the liquid level being used for respectively detecting in solvent bottle too high or too low, and according to the process that the valve in the results operation supply system detected flows into control solvent or flows out.
Accompanying drawing explanation
Fig. 1 shows the structure of the preferred embodiment of solvent supply system of the present invention.
Detailed description of the invention
After the detailed description of reading embodiment of the present disclosure in conjunction with the following drawings, above-mentioned feature and advantage of the present invention can be understood better.In the accompanying drawings, each assembly is not necessarily drawn in proportion, and the assembly with similar correlation properties or feature may have identical or close Reference numeral.
Fig. 1 shows the structure of the preferred embodiment of solvent supply system of the present invention, refers to Fig. 1, and the solvent supply system of the present embodiment formed primarily of the pipeline of solvent bottle and solvent bottle outside.In solvent bottle 1, close to position of bottleneck, high-order inductor 20 is installed, close to position at the bottom of bottle, low level inductor 21 is installed.Stretch into and have three pipelines in body, respectively: gas supply pipeline 3, vacuum-pumping pipeline 4 and solvent delivery pipeline 6.
In the present embodiment, gas supply pipeline 3 be fed to gas in body mainly can not with the gas of solvent attack, such as unreactable gas, general employing nitrogen, because nitrogen on the one hand can not with solvent generation chemical reaction, more common, with low cost on the other hand.
One end of solvent delivery pipeline 6 extends to close to the position at the bottom of bottle in body, and the other end is reaching outside solvent bottle, is designated as N point in FIG.Solvent supply mouth I is used for providing solvent stoste, this road provides the pipeline of stoste to be for initial point with solvent supply mouth I, under the connection of pipeline is through, connects one end N of solvent delivery pipeline 6 respectively by switch valve 51, check valve 61, and flow in solvent bottle 1 through solvent delivery pipeline 6.The N end of solvent delivery pipeline 6 is communicated to solvent outlet end O by check valve 62, switch valve 52.Preferably, compression indicator 7 is set between check valve 62 and switch valve 52.Compression indicator 7 can detect the flow velocity outside solvent outflow bottle, and in general along with the rising of the force value of compression indicator 7 display, solvent flow rate can be accelerated.In order to keep uniform flow velocity, can numerical value on reference pressure table 7, controlled the force value in bottle by the speed controlling insufflation gas, make it maintain in a desirable scope, thus ensure that solvent flow rate is in normal range always.
Flow into the operation of solvent bottle (referred to as fluid infusion) at solvent from original liquid box, user's closing switch valve 52, closedown gas supply pipeline 3 make it not to supplying nitrogen in solvent bottle 1, solvent supply mouth I is communicated with original liquid box, then opens vacuum-pumping pipeline 4.Air in solvent bottle is pumped, and causes pressure of the inside of a bottle lower, thus poor with outside mineralization pressure.Under the effect of difference of pressure, the solvent in original liquid box enters pipeline from solvent supply mouth I automatically, and enters in bottle after flowing through switch valve 51, check valve 61 and solvent delivery pipeline 6.
In whole process, sensor is working always.Solvent constantly enters in bottle and causes liquid level to rise, when high-order inductor 20 detects liquid level in bottle higher than the most high liquid level (HLL) numerical value preset, automatically will close vacuum-pumping pipeline to stop continuing to extract out outside bottle by air from solvent bottle, automatic cut-off switch valve 51 is with in the pipeline preventing solution from continuing to flow into after switch valve 51 simultaneously.
When the solvent in solvent bottle needs outwards to provide, user opens switch valve 52, opens gas supply pipeline 3 simultaneously, and nitrogen enters in solvent bottle via gas supply pipeline 3.Cause air pressure higher than outside bottle owing to being filled with nitrogen always in solvent bottle.Due to the effect of difference of pressure, the solvent in solvent bottle is outside solvent delivery pipeline 6 extruding bottle.
In whole process, sensor is working always.Solvent continues to flow outside bottle outlet and causes liquid level to decline, when low sensors 21 detects that in bottle, liquid level is lower than the minimum level numerical value preset, will be filled with nitrogen to stop continuation in solvent bottle by automatic closing gas supply line, automatic cut-off switch valve 52 flows to solvent outlet O from the position of switch valve 52 to stop solution simultaneously.
Compared to conventional art, can find out that chemical solvent supply system of the present invention exists following advantage:
1) owing to having abandoned traditional chemical pump structure, have employed above-mentioned brand-new structure design, significantly can reduce production and use cost;
2) structure design of this supply fluid infusion, compares the structure design of traditional chemical pumping, and fluid infusion process is more simple, and does not have noise to produce;
3) no matter be all controlled owing to vacuumizing with the speed of inflated with nitrogen, be therefore that solvent is filled with in body, or the speed that solvent flows out body feed flow is all controlled, can make liquid supply pressure evenly and feed flow is steady.
Thering is provided previous description of the present disclosure is for making any person skilled in the art all can make or use the disclosure.To be all apparent for a person skilled in the art to various amendment of the present disclosure, and generic principles as defined herein can be applied to other variants and can not depart from spirit or scope of the present disclosure.Thus, the disclosure not intended to be is defined to example described herein and design, but the widest scope consistent with principle disclosed herein and novel features should be awarded.
Claims (7)
1. a solvent supply system, it is characterized in that, comprise solvent bottle, the gas supply pipeline that solvent bottle is installed, vacuum-pumping pipeline, solvent delivery pipeline, wherein the first end of solvent delivery pipeline stretch into solvent bottle close to position at the bottom of bottle, solvent supply mouth connects the second end of solvent delivery pipeline by the first switch valve, the first check valve, second end of solvent delivery pipeline connects solvent outlet end by the second check valve, second switch valve, is provided with the high-order inductor for detecting solvent liquid level height and low level inductor in solvent bottle.
2. solvent supply system according to claim 1, is characterized in that, setting pressure table between the second check valve and second switch valve.
3. solvent supply system according to claim 1, is characterized in that, gas supply pipeline provides the input of nitrogen.
4. solvent supply system according to claim 1, it is characterized in that, in fluid infusion operation, close second switch valve and gas supply pipeline, solvent supply mouth is connected solvent supply unit, open vacuum-pumping pipeline to vacuumize, flowed in solvent bottle by solvent supply mouth to make the solvent in solvent supply unit.
5. solvent supply system according to claim 4, it is characterized in that, flow in the process in solvent bottle at solvent, close vacuum-pumping pipeline and the first switch valve when high-order inductor detects that solvent liquid level arrives and presets most high liquid level (HLL), solvent flows into process to be stopped.
6. solvent supply system according to claim 1, it is characterized in that, in feed flow operation, open second switch valve and gas supply pipeline, extraneous gas is entered outwards to be extruded by solvent delivery pipeline by the solvent in solvent bottle in solvent bottle, and the pipeline eventually through the second check valve, second switch valve flows out from solvent outlet end.
7. solvent supply system according to claim 6, it is characterized in that, in the process that solvent flows out outside solvent bottle, close gas supply pipeline and second switch valve when low level inductor detects that solvent liquid level arrives and presets minimum level, solvent flows out process to be stopped.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410366352.9A CN105314576A (en) | 2014-07-29 | 2014-07-29 | Solvent supply system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410366352.9A CN105314576A (en) | 2014-07-29 | 2014-07-29 | Solvent supply system |
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| Publication Number | Publication Date |
|---|---|
| CN105314576A true CN105314576A (en) | 2016-02-10 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201410366352.9A Pending CN105314576A (en) | 2014-07-29 | 2014-07-29 | Solvent supply system |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106362605A (en) * | 2016-10-28 | 2017-02-01 | 通用生物系统（安徽）有限公司 | Device used for preparing nucleotide monomer solution |
| CN106768152A (en) * | 2016-12-07 | 2017-05-31 | 苏州阿洛斯环境发生器有限公司 | A kind of dangerous liquid metering system and metering transportation method |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH08337296A (en) * | 1995-06-09 | 1996-12-24 | Dainippon Screen Mfg Co Ltd | Chemical-feeding device |
| JP2000352375A (en) * | 1999-06-10 | 2000-12-19 | Taisei Corp | Method of fluid pressure feed |
| CN101102940A (en) * | 2004-11-15 | 2008-01-09 | 先科材料有限公司 | Liquid dispensing system |
| CN102319656A (en) * | 2011-09-21 | 2012-01-18 | 上海先进半导体制造股份有限公司 | HMDS automatic supply system and automatic supply method thereof |
-
2014
- 2014-07-29 CN CN201410366352.9A patent/CN105314576A/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH08337296A (en) * | 1995-06-09 | 1996-12-24 | Dainippon Screen Mfg Co Ltd | Chemical-feeding device |
| JP2000352375A (en) * | 1999-06-10 | 2000-12-19 | Taisei Corp | Method of fluid pressure feed |
| CN101102940A (en) * | 2004-11-15 | 2008-01-09 | 先科材料有限公司 | Liquid dispensing system |
| CN102319656A (en) * | 2011-09-21 | 2012-01-18 | 上海先进半导体制造股份有限公司 | HMDS automatic supply system and automatic supply method thereof |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106362605A (en) * | 2016-10-28 | 2017-02-01 | 通用生物系统（安徽）有限公司 | Device used for preparing nucleotide monomer solution |
| CN106768152A (en) * | 2016-12-07 | 2017-05-31 | 苏州阿洛斯环境发生器有限公司 | A kind of dangerous liquid metering system and metering transportation method |
| CN106768152B (en) * | 2016-12-07 | 2024-01-05 | 苏州阿洛斯环境发生器有限公司 | Dangerous liquid metering system and metering conveying method |
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Application publication date: 20160210 |