CN105102680B - 滑动元件,特别是具有耐磨涂层的活塞环 - Google Patents

滑动元件,特别是具有耐磨涂层的活塞环 Download PDF

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CN105102680B
CN105102680B CN201380053237.XA CN201380053237A CN105102680B CN 105102680 B CN105102680 B CN 105102680B CN 201380053237 A CN201380053237 A CN 201380053237A CN 105102680 B CN105102680 B CN 105102680B
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尤里·伊万诺夫
马库斯·肯尼迪
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Abstract

本申请涉及一种滑动元件,特别是一种在基板(12)上具有涂层(10)的活塞环,该涂层(10)形成所述滑动元件的至少一个滑动面。所述涂层(10)从内到外包括,碳化物或氮化物层(16),然后是碳化(尤其是物理气相沉积‑)金刚石状碳层(17),然后是无金属物理气相沉积‑金刚石状碳层(22)及然后是无金属等离子体辅助化学气相沉积‑金刚石状碳层(18)。

Description

滑动元件,特别是具有耐磨涂层的活塞环
技术领域
本发明涉及一种滑动元件,特别是一种活塞环,其基板上具有涂层,该基板形成至少一个工作面。
滑动元件,例如,活塞环,活塞或内燃机的缸套必须在整个寿命期内尽可能长久地工作,即要尽可能少的摩擦和尽量少的磨损。为了减少与内燃机燃料损耗相应的直接摩擦,众所周知的做法是采用这种具有降低摩擦系数涂层的滑动元件。基于这种目的,例如,采用一种DLC(金刚石状碳)涂层对于本领域技术人员来说是公知的做法。
应用DLC(金刚石状碳)涂层有数种可用的方法。最近经常采用的一种方法是PACVD法(等离子体辅助化学气相沉积),因为其具有涂覆速率高且相对较低的成本,例如在德国专利DE19513614C1中描述的那样。
用于基板涂层的另一种基本方法是采用PVD(物理气相沉积)法的DLC(金刚石状碳)涂层,例如德国专利DE10203730B4描述的那样。
DLC(金刚石状碳)涂层沉积的弊端是,特别是通过PACVD(等离子体辅助化学气相沉积)法时,其弊端是,涂层相对较差的电阻而关联产生的较高的机械残余应力,且该涂层不能在滑动元件上毫无困难地使用。
德国专利DE102009028B3公开的一种滑动元件,其涂层包括两层DLC(金刚石状碳)层,其中一个叫做含金属的金刚石状碳层和另一个叫做无金属的金刚石状碳层。该含金属的金刚石状碳层通过物理气相沉积的方法使用,从而在涂层上产生不同的微观结构。所述PACVD-DLC(等离子体辅助化学气相沉积-金刚石状碳)层,例如现有技术中的无金属的金刚石状碳层,具有上述高的机械残余应力。现有技术中假设这些等离子体辅助化学气相沉积-金刚石状碳层的高残余应力能由含金属的物理气相沉积金刚石状碳涂层才补偿。
但是,发明人发现即使如德国专利DE102009028504B3描述的方法,其对于发动机的整个服务寿命中涂层的阻抗还不是最佳的方法。特别是,偶尔可能发生现有技术中描述的滑动元件的涂层在重负载下脱落,且因此滑动元件的相对磨损和摩擦性能恶化。
德国专利DE10018143B4公开的金刚石状碳涂层具有在基板上的粘接剂层,一个过渡层和一个覆盖层,其中粘接剂层采用等离子体辅助涂层,特别是通过一种物理气相沉积的方法或血浆化学气相沉积法,所述金刚石状碳涂层的覆盖层能用于血浆化学气相沉积法。
日本专利号为JP2004-10923的专利涉及一种从内到外包括铬层,铬-碳层,具有渐变的硬度的金刚石状碳层和硬金刚石状碳层。
德国专利DE2008016864B3公开了一种活塞环,其从内到外包括一个粘接剂层,一个含金属无定形碳层,和一个无金属无定形碳层。
德国专利DE102009046281B3涉及一种滑动元件,特别是一种活塞环,其中从内到外含氮化铬层,ME(CxNy)层和一个金刚石状碳层。
最后,美国专利申请US2008/0220257A1公开了一种具有涂层的基板,该涂层从内到外包括,一个杨氏模量大于200GPa的碳中间层和一个杨氏模量小于200GPa的无定形碳层。
发明内容
依据上述现有技术,本发明的目的是进一步提供一种改进摩擦和磨损的组合性能的滑动元件。特别是,改进发动机的所述涂层部分在重载下的潜在电位剥落的磨损性能。
根据本发明的滑动元件,特别是活塞环,基板上具有涂层,其形成至少一个工作面。从内到外涂层包括一个(尤其是物理气相沉积)碳化物或氮化物层,其次还有一个含碳化物(优选的是物理气相沉积)金刚石状碳涂层,再次是一个无金属物理气相沉积-金刚石状碳涂层,和无金属等离子体辅助化学气相沉积-金刚石状碳层。
使用根据本发明的涂层结构,在单个的物理气相沉积层之间实现均质化的过渡,并因此在各层之间创造特别好的附着性是有可能的。此外,由于无金属物理气相沉积-金刚石状碳涂层和等离子体辅助化学气相沉积-金刚石状碳涂层具有亲和力,两个无金属金刚石状碳涂层之间的附着性也可以改进。随着工艺参数的逐渐提高,也可以创建各涂层之间的渐变的过渡。通过这种方式实现各层之间的平滑过渡和亲和力物理气相沉积-金刚石状碳涂层和等离子体辅助化学气相沉积-金刚石状碳涂层之间的亲和力,防止涂层剥落,即使当发动机在重载的情况下亦如此。
根据本发明的涂层,至少部分可用于所述滑动元件的至少一个工作面。但是,将所述涂层延展到整个工作面是可能的而且也能够在与所述工作面相邻的表面全部或部分成型。活塞环的侧面就是所述相邻的表面的一个例子。
所述物理气相沉积-金刚石状碳涂层能用于基板上,或先前沉积在基板上的结合层,特别是利用溅射法或电弧法沉积的结合层。所述等离子体辅助化学气相沉积-金刚石状碳涂层优选的是适用于至少1kHz频率的等离子体发生器。
在一个优选的实施例中,在所述基板和碳化物或氮化物层之间使用一个结合层,其优选由铬或钛构成。所述结合层偶尔也被定义为粘合剂层,并改善基板上整个涂层系统的粘合性,特别是金刚石状碳涂层。铸铁或钢优选能用于基板的基本材料。这些材料在与活塞环连接时特别有利。
有益的是,碳化物或氮化物层包含碳化钨,CrN,Cr2N,氮化钛(TiN)或氮化钛铬(CrTiN)。
含有碳化(优选是物理气相沉积-)金刚石状碳涂层被理解为,一个碳化物被混合的金刚石状碳涂层。因此,包含于sp3-键的显著比例的金刚石状碳涂层中的无定形碳(碳sp3-键)与无长程序列的显著比例为至少20%,优选为至少50%)形成了基材的添加材料。优选的是,含碳化的金刚石状碳涂层还另含有钨或铬。特别优选的是,含碳化的金刚石状碳涂层包含碳化钨,特别是以纳米碳化钨沉淀的形式。该特征也对滑动元件的滑动部分有好处。
有利的是,在等离子体辅助化学气相沉积-金刚石状碳层上形成一个磨合层,该磨合层比等离子体辅助化学气相沉积-金刚石状碳层更软。这样一个柔软的磨合层对滑动元件磨合层的滑动元件特性有利,例如,在新的发动机或发动机零部件运行时。
优选的是,所述物理气相沉积-金刚石状碳层具有数个子层。这些子层能彼此连接,例如,逐步修正工艺参数的渐变过渡层。因此,一方面等离子体辅助化学气相沉积-金刚石状碳层和含有碳化金刚石状碳层的粘结性能实现最佳融合是可能的,且另一方面含有碳化金刚石状碳层(优选等离子体辅助化学气相沉积)碳化物或氮化物层,而层与层间通常与其相对粘合的降低有关,没有明显的不连续性。
在一个优选的实施例中,等离子体辅助化学气相沉积-金刚石状碳层的厚度应该是涂层总厚度的30%-70%之间,优选为35%-65%之间。这一优选的层厚度比率使该涂层参入大量不必要的附加材料,且该涂层具有较好的阻抗,
有利的是,涂层总厚度是2μm到50μm。这一涂层厚度具有特殊的好处,并能平衡滑动元件的摩擦系数和磨损性能,尤其是内燃机的活塞环。
此外,优选的是,物理气相沉积-金刚石状碳层(22)具有700HV0.005-2800HV0.002的硬度,且,替代或附加地,等离子体辅助化学气相沉积-金刚石状碳层的硬度为1200HV0.002-3000HV0.002之间。所述物理气相沉积-金刚石状碳层和等离子体辅助化学气相沉积-金刚石状碳层的硬度范围证明对于摩擦系数和耐磨性能的组合具有特别优势。
在一个优选实施例中,物理气相沉积-金刚石状碳层具有150GPa-350GPa的弹性模量和/或所述等离子体辅助化学气相沉积-金刚石状碳层具有160GPa-400GPa的弹性模量。
基本上,优选的是,滑动元件的工作面,至少在一部分,根据本发明的涂层涂覆。出于经济的原因,优选的是,该涂层也被施加于工作侧面、及工作面和与工作面相邻的工作侧面之间的过渡面。
有利的是,含有碳化的金刚石状碳层和/或物理气相沉积-金刚石状碳层和/或等离子体辅助化学气相沉积-金刚石状碳层含有氢。这也证明有关涂层的强度是有益的。
特别优选的是,具有最大值为1μm的厚度是为了使其效果最大化,同时用尽可能少的基板,且因此使用尽可能少的材料。
附图说明
图1示出具有现有技术中的涂层的滑动元件的侧视图的示意图。
图2示出了根据本发明的一个优选实施例的滑动元件的侧视图。
具体实施方式
图1示出了现有技术中的层状结构。基板12上的滑动元件的涂层10’包括由铬组成的结合层14并用于基板12,该基板也可以选择性地包括钛。碳化物层16用于结合层14,该结合层可选择由氮化物层组成。碳化金刚石状碳层(17)用于碳化物层16。本实施例中,碳化金刚石状碳层含有碳化钨,碳和氢。
等离子体辅助化学气相沉积-金刚石状碳层18具有特别好的摩擦和磨损组合,有时可用于碳化金刚石状碳层17。可选择地,磨合层20用于等离子体辅助化学气相沉积-金刚石状碳层18,例如,如果滑动元件在工作阶段具有特定特质,尤其是较低的表面硬度。
图2示出了本发明的一个优选实施例。与上述图1所示的涂层10’相比,根据图2所示实施例的涂层10与无金属物理气相沉积-金刚石状碳涂层22不同,其应用于含碳金刚石状碳涂层17和无金属等离子体辅助化学气相沉积-金刚石状碳层18之间。所述物理气相沉积-金刚石状碳涂层22因其亲合性而显著改进了无金属等离子体辅助化学气相沉积-金刚石状碳层18和含碳金刚石状碳涂层17之间的粘附性。因此,涂层10的阻抗与现有技术相比的到大大改善,即使在发动机重载的情况下也如此。
此外,等离子体辅助化学气相沉积-金刚石状碳层的厚度如图2所示,其具有涂层总厚度D的40%-60%,优选为40%-50%的比例。

Claims (17)

1.一种滑动元件,其具有基板(12)上的涂层(10),其形成了所述滑动元件的至少一个工作面,其特征在于:涂层(10)从内到外具有,
-一层碳化物或氮化物层(16),
-其次是一层碳化-金刚石状碳层(17),
-其次是一层无金属物理气相沉积-金刚石状碳层(22)和
-其次是一层无金属等离子体辅助化学气相沉积-金刚石状碳层(18),无金属物理气相沉积-金刚石状碳层(22)具有数个子层,这些子层能彼此连接为逐步修正工艺参数的渐变过渡层。
2.如权利要求1所述的滑动元件,其特征在于:滑动元件为活塞环。
3.如权利要求1所述的滑动元件,其特征在于:结合层(14)用于基板(12)和碳化物或氮化物层(16)之间。
4.如权利要求3所述的滑动元件,其特征在于:所述碳化物为碳化硅。
5.如权利要求3所述的滑动元件,其特征在于:结合层(14)包含铬或钛。
6.如权利要求1所述的滑动元件,其特征在于:碳化-金刚石状碳层和/或物理气相沉积-金刚石状碳层和/或等离子体辅助化学气相沉积-金刚石状碳层包含氢。
7.如权利要求3所述的滑动元件,其特征在于:碳化物或氮化物层(16)含有碳化钨或CrN或Cr2N或氮化钛(TiN)或氮化钛铬(CrTiN)。
8.如权利要求6所述的滑动元件,其特征在于:碳化-金刚石状碳层包含钨或铬。
9.如权利要求6所述的滑动元件,其特征在于:磨合层(20)形成于等离子体辅助化学气相沉积-金刚石状碳层(18)外部,其比等离子体辅助化学气相沉积-金刚石状碳层(18)更软。
10.如权利要求9所述的滑动元件,其特征在于:等离子体辅助化学气相沉积-金刚石状碳层(18)的厚度(d)是涂层(10)总厚度(D)的30%-70%。
11.如权利要求10所述的滑动元件,其特征在于:等离子体辅助化学气相沉积-金刚石状碳层(18)的厚度(d)是涂层(10)总厚度(D)的35%-65%。
12.如权利要求11所述的滑动元件,其特征在于:涂层(10)的总厚度(D)为2μm - 50μm。
13.如权利要求6所述的滑动元件,其特征在于:物理气相沉积-金刚石状碳层(22)的硬度为700HV0.002至2800HV0.002
14.如权利要求11所述的滑动元件,其特征在于:等离子体辅助化学气相沉积-金刚石状碳层(18)的硬度为1200HV0.002至3000HV0.002
15.如权利要求13所述的滑动元件,其特征在于:物理气相沉积-金刚石状碳层(22)的杨氏模量是150GPa至350GPa之间。
16.如权利要求14所述的滑动元件,其特征在于:等离子体辅助化学气相沉积-金刚石状碳层(18)的弹性模量为160GPa至400GPa之间。
17.如权利要求1所述的滑动元件,其特征在于:物理气相沉积-金刚石状碳层(22)适用于反应溅射或电弧法,等离子体辅助化学气相沉积-金刚石状碳层(18)适用于至少1kHz频率的等离子体发生器。
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Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5564099B2 (ja) * 2012-12-28 2014-07-30 株式会社リケン シリンダとピストンリングの組合せ
DE102014213822A1 (de) * 2014-07-16 2016-01-21 Federal-Mogul Burscheid Gmbh Gleitelement, insbesondere Kolbenring, und Verfahren zur Herstellung desselben
DE102014217040A1 (de) * 2014-08-27 2016-03-03 Bayerische Motoren Werke Aktiengesellschaft Beschichtung für Metallbauteile, Verfahren zum Beschichten eines Metallbauteils, Kolben für Verbrennungskraftmaschinen und Kfz
US10036472B2 (en) * 2016-03-04 2018-07-31 Kabushiki Kaisha Riken Sliding member and piston ring
DE102016107874A1 (de) * 2016-04-28 2017-11-16 Federal-Mogul Burscheid Gmbh Gleitelement, insbesondere Kolbenring
CN106011855A (zh) * 2016-07-18 2016-10-12 大连维钛克科技股份有限公司 一种应用于滑动部件的碳基涂层
BR102016017735B1 (pt) * 2016-07-29 2021-05-18 Mahle Metal Leve S.A. elemento deslizante para motores de combustão interna
BR102017007599B1 (pt) * 2017-04-12 2022-07-26 Mahle Metal Leve S.A. Anel de pistão para motores de combustão interna
US11162586B2 (en) 2017-06-02 2021-11-02 Mahle International Gmbh Piston ring and method of manufacture
US11047478B2 (en) * 2017-06-02 2021-06-29 Mahle International Gmbh Piston ring and method of manufacture
US20190120291A1 (en) * 2017-10-24 2019-04-25 Hamilton Sundstrand Corporation Air bearing
PL239495B1 (pl) * 2018-03-26 2021-12-06 Politechnika Lodzka Sposób wytwarzania powłoki węglowej domieszkowanej tytanem i tlenem
CN109372651B (zh) * 2018-09-25 2021-06-08 安庆帝伯格茨活塞环有限公司 一种类金刚石涂层活塞环及制备方法
EP3650583A1 (en) * 2018-11-08 2020-05-13 Nanofilm Technologies International Pte Ltd Ta-c based coatings with improved hardness
DE102019206420A1 (de) * 2019-05-03 2020-11-05 Robert Bosch Gmbh Verfahren zum Beschichten einer mechanisch hochbelasteten Oberfläche eines Bauteils sowie beschichtetes Bauteil selbst
DE102019214934A1 (de) * 2019-09-27 2021-04-01 Robert Bosch Gmbh Verschleißschutzbeschichtetes metallisches Bauteil
CN113551034B (zh) * 2021-07-28 2024-07-23 安庆帝伯格茨活塞环有限公司 一种双过渡层类金刚石涂层活塞环
CN114875361A (zh) * 2022-05-27 2022-08-09 重庆中光学建设镀膜科技有限公司 一种高附着力金属涂层及其制备工艺

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101208461A (zh) * 2005-05-26 2008-06-25 贝卡尔特股份有限公司 具有多层硬质涂层的活塞环
EP2083095A2 (en) * 2008-01-21 2009-07-29 Kabushiki Kaisha Kobe Seiko Sho (Kobe Steel, Ltd.) Diamond-like carbon film for sliding parts and method for production thereof
CN101983256A (zh) * 2008-04-02 2011-03-02 菲特尔莫古布尔沙伊德有限公司 活塞环
CN102171383A (zh) * 2008-10-10 2011-08-31 菲特尔莫古布尔沙伊德有限公司 内燃机中的滑动构件特别是一种活塞环

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19513614C1 (de) 1995-04-10 1996-10-02 Fraunhofer Ges Forschung Verfahren zur Abscheidung von Kohlenstoffschichten, Kohlenstoffschichten auf Substraten und deren Verwendung
JP4331292B2 (ja) 1998-10-30 2009-09-16 株式会社リケン 低摩耗性と優れた密着性を有する複合ダイヤモンドライクカーボン皮膜
DE10018143C5 (de) * 2000-04-12 2012-09-06 Oerlikon Trading Ag, Trübbach DLC-Schichtsystem sowie Verfahren und Vorrichtung zur Herstellung eines derartigen Schichtsystems
DE10203730B4 (de) 2002-01-30 2010-09-16 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Verfahren zur Abscheidung von metallfreien Kohlenstoffschichten
JP4085699B2 (ja) * 2002-06-04 2008-05-14 トヨタ自動車株式会社 摺動部材及びその製造方法
DE102004041234A1 (de) * 2004-08-26 2006-03-02 Ina-Schaeffler Kg Verschleißfeste Beschichtung und Verfahren zur Herstellung derselben
JP2006097871A (ja) * 2004-09-30 2006-04-13 Nsk Ltd 転がり摺動部材及び転動装置
JP5503145B2 (ja) * 2005-08-18 2014-05-28 スルザー メタプラス ゲーエムベーハー 四面体炭素層および軟質外層を備える層状構造によって被覆された基板
JP2007070667A (ja) * 2005-09-05 2007-03-22 Kobe Steel Ltd ダイヤモンドライクカーボン硬質多層膜成形体およびその製造方法
EP1767662B1 (de) * 2005-09-10 2009-12-16 Schaeffler KG Verschleißfeste Beschichtung und Verfahren zur Herstellung derselben
JP2007162099A (ja) * 2005-12-15 2007-06-28 Toyota Motor Corp 硬質炭素膜及びその製造方法並びに摺動部材
DE102006029415B4 (de) 2006-06-27 2023-07-06 Schaeffler Technologies AG & Co. KG Verschleißfeste Beschichtung sowie Herstellverfahren hierfür
DE102009028504C5 (de) 2009-08-13 2014-10-30 Federal-Mogul Burscheid Gmbh Kolbenring mit einer Beschichtung
DE102009046281B3 (de) * 2009-11-02 2010-11-25 Federal-Mogul Burscheid Gmbh Gleitelement, insbesondere Kolbenring, und Kombination eines Gleitelements mit einem Laufpartner
JP2012047603A (ja) * 2010-08-26 2012-03-08 Tokai Kiyouhan Kk エアマイクロメータの測定ヘッド

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101208461A (zh) * 2005-05-26 2008-06-25 贝卡尔特股份有限公司 具有多层硬质涂层的活塞环
EP2083095A2 (en) * 2008-01-21 2009-07-29 Kabushiki Kaisha Kobe Seiko Sho (Kobe Steel, Ltd.) Diamond-like carbon film for sliding parts and method for production thereof
CN101983256A (zh) * 2008-04-02 2011-03-02 菲特尔莫古布尔沙伊德有限公司 活塞环
CN102171383A (zh) * 2008-10-10 2011-08-31 菲特尔莫古布尔沙伊德有限公司 内燃机中的滑动构件特别是一种活塞环

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