CN105102680B - 滑动元件,特别是具有耐磨涂层的活塞环 - Google Patents
滑动元件,特别是具有耐磨涂层的活塞环 Download PDFInfo
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- 229910052799 carbon Inorganic materials 0.000 claims abstract description 79
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims abstract description 73
- 229910003460 diamond Inorganic materials 0.000 claims abstract description 50
- 239000010432 diamond Substances 0.000 claims abstract description 50
- 238000005240 physical vapour deposition Methods 0.000 claims abstract description 38
- 239000000758 substrate Substances 0.000 claims abstract description 17
- 229910052751 metal Inorganic materials 0.000 claims abstract description 10
- 239000002184 metal Substances 0.000 claims abstract description 10
- 150000004767 nitrides Chemical class 0.000 claims abstract description 8
- 239000000126 substance Substances 0.000 claims description 28
- 238000000034 method Methods 0.000 claims description 13
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 claims description 7
- 239000011230 binding agent Substances 0.000 claims description 7
- 239000011651 chromium Substances 0.000 claims description 7
- 229910052804 chromium Inorganic materials 0.000 claims description 5
- 230000007704 transition Effects 0.000 claims description 5
- UONOETXJSWQNOL-UHFFFAOYSA-N tungsten carbide Chemical compound [W+]#[C-] UONOETXJSWQNOL-UHFFFAOYSA-N 0.000 claims description 5
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 4
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- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 3
- 229910052739 hydrogen Inorganic materials 0.000 claims description 3
- 239000001257 hydrogen Substances 0.000 claims description 3
- 229910052719 titanium Inorganic materials 0.000 claims description 3
- 239000010936 titanium Substances 0.000 claims description 3
- NRTOMJZYCJJWKI-UHFFFAOYSA-N Titanium nitride Chemical compound [Ti]#N NRTOMJZYCJJWKI-UHFFFAOYSA-N 0.000 claims description 2
- CXOWYMLTGOFURZ-UHFFFAOYSA-N azanylidynechromium Chemical compound [Cr]#N CXOWYMLTGOFURZ-UHFFFAOYSA-N 0.000 claims description 2
- 150000001875 compounds Chemical class 0.000 claims description 2
- 239000007789 gas Substances 0.000 claims description 2
- 229910052757 nitrogen Inorganic materials 0.000 claims description 2
- 230000008569 process Effects 0.000 claims description 2
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 claims description 2
- 229910052721 tungsten Inorganic materials 0.000 claims description 2
- 239000010937 tungsten Substances 0.000 claims description 2
- 238000005546 reactive sputtering Methods 0.000 claims 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical group [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 claims 1
- 229910010271 silicon carbide Inorganic materials 0.000 claims 1
- 238000005229 chemical vapour deposition Methods 0.000 abstract description 5
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- 210000002381 plasma Anatomy 0.000 description 25
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- 238000004544 sputter deposition Methods 0.000 description 1
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Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16J—PISTONS; CYLINDERS; SEALINGS
- F16J9/00—Piston-rings, e.g. non-metallic piston-rings, seats therefor; Ring sealings of similar construction
- F16J9/26—Piston-rings, e.g. non-metallic piston-rings, seats therefor; Ring sealings of similar construction characterised by the use of particular materials
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- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
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- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
- C23C28/04—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material
- C23C28/042—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material including a refractory ceramic layer, e.g. refractory metal oxides, ZrO2, rare earth oxides
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Abstract
本申请涉及一种滑动元件,特别是一种在基板(12)上具有涂层(10)的活塞环,该涂层(10)形成所述滑动元件的至少一个滑动面。所述涂层(10)从内到外包括,碳化物或氮化物层(16),然后是碳化(尤其是物理气相沉积‑)金刚石状碳层(17),然后是无金属物理气相沉积‑金刚石状碳层(22)及然后是无金属等离子体辅助化学气相沉积‑金刚石状碳层(18)。
Description
技术领域
本发明涉及一种滑动元件,特别是一种活塞环,其基板上具有涂层,该基板形成至少一个工作面。
滑动元件,例如,活塞环,活塞或内燃机的缸套必须在整个寿命期内尽可能长久地工作,即要尽可能少的摩擦和尽量少的磨损。为了减少与内燃机燃料损耗相应的直接摩擦,众所周知的做法是采用这种具有降低摩擦系数涂层的滑动元件。基于这种目的,例如,采用一种DLC(金刚石状碳)涂层对于本领域技术人员来说是公知的做法。
应用DLC(金刚石状碳)涂层有数种可用的方法。最近经常采用的一种方法是PACVD法(等离子体辅助化学气相沉积),因为其具有涂覆速率高且相对较低的成本,例如在德国专利DE19513614C1中描述的那样。
用于基板涂层的另一种基本方法是采用PVD(物理气相沉积)法的DLC(金刚石状碳)涂层,例如德国专利DE10203730B4描述的那样。
DLC(金刚石状碳)涂层沉积的弊端是,特别是通过PACVD(等离子体辅助化学气相沉积)法时,其弊端是,涂层相对较差的电阻而关联产生的较高的机械残余应力,且该涂层不能在滑动元件上毫无困难地使用。
德国专利DE102009028B3公开的一种滑动元件,其涂层包括两层DLC(金刚石状碳)层,其中一个叫做含金属的金刚石状碳层和另一个叫做无金属的金刚石状碳层。该含金属的金刚石状碳层通过物理气相沉积的方法使用,从而在涂层上产生不同的微观结构。所述PACVD-DLC(等离子体辅助化学气相沉积-金刚石状碳)层,例如现有技术中的无金属的金刚石状碳层,具有上述高的机械残余应力。现有技术中假设这些等离子体辅助化学气相沉积-金刚石状碳层的高残余应力能由含金属的物理气相沉积金刚石状碳涂层才补偿。
但是,发明人发现即使如德国专利DE102009028504B3描述的方法,其对于发动机的整个服务寿命中涂层的阻抗还不是最佳的方法。特别是,偶尔可能发生现有技术中描述的滑动元件的涂层在重负载下脱落,且因此滑动元件的相对磨损和摩擦性能恶化。
德国专利DE10018143B4公开的金刚石状碳涂层具有在基板上的粘接剂层,一个过渡层和一个覆盖层,其中粘接剂层采用等离子体辅助涂层,特别是通过一种物理气相沉积的方法或血浆化学气相沉积法,所述金刚石状碳涂层的覆盖层能用于血浆化学气相沉积法。
日本专利号为JP2004-10923的专利涉及一种从内到外包括铬层,铬-碳层,具有渐变的硬度的金刚石状碳层和硬金刚石状碳层。
德国专利DE2008016864B3公开了一种活塞环,其从内到外包括一个粘接剂层,一个含金属无定形碳层,和一个无金属无定形碳层。
德国专利DE102009046281B3涉及一种滑动元件,特别是一种活塞环,其中从内到外含氮化铬层,ME(CxNy)层和一个金刚石状碳层。
最后,美国专利申请US2008/0220257A1公开了一种具有涂层的基板,该涂层从内到外包括,一个杨氏模量大于200GPa的碳中间层和一个杨氏模量小于200GPa的无定形碳层。
发明内容
依据上述现有技术,本发明的目的是进一步提供一种改进摩擦和磨损的组合性能的滑动元件。特别是,改进发动机的所述涂层部分在重载下的潜在电位剥落的磨损性能。
根据本发明的滑动元件,特别是活塞环,基板上具有涂层,其形成至少一个工作面。从内到外涂层包括一个(尤其是物理气相沉积)碳化物或氮化物层,其次还有一个含碳化物(优选的是物理气相沉积)金刚石状碳涂层,再次是一个无金属物理气相沉积-金刚石状碳涂层,和无金属等离子体辅助化学气相沉积-金刚石状碳层。
使用根据本发明的涂层结构,在单个的物理气相沉积层之间实现均质化的过渡,并因此在各层之间创造特别好的附着性是有可能的。此外,由于无金属物理气相沉积-金刚石状碳涂层和等离子体辅助化学气相沉积-金刚石状碳涂层具有亲和力,两个无金属金刚石状碳涂层之间的附着性也可以改进。随着工艺参数的逐渐提高,也可以创建各涂层之间的渐变的过渡。通过这种方式实现各层之间的平滑过渡和亲和力物理气相沉积-金刚石状碳涂层和等离子体辅助化学气相沉积-金刚石状碳涂层之间的亲和力,防止涂层剥落,即使当发动机在重载的情况下亦如此。
根据本发明的涂层,至少部分可用于所述滑动元件的至少一个工作面。但是,将所述涂层延展到整个工作面是可能的而且也能够在与所述工作面相邻的表面全部或部分成型。活塞环的侧面就是所述相邻的表面的一个例子。
所述物理气相沉积-金刚石状碳涂层能用于基板上,或先前沉积在基板上的结合层,特别是利用溅射法或电弧法沉积的结合层。所述等离子体辅助化学气相沉积-金刚石状碳涂层优选的是适用于至少1kHz频率的等离子体发生器。
在一个优选的实施例中,在所述基板和碳化物或氮化物层之间使用一个结合层,其优选由铬或钛构成。所述结合层偶尔也被定义为粘合剂层,并改善基板上整个涂层系统的粘合性,特别是金刚石状碳涂层。铸铁或钢优选能用于基板的基本材料。这些材料在与活塞环连接时特别有利。
有益的是,碳化物或氮化物层包含碳化钨,CrN,Cr2N,氮化钛(TiN)或氮化钛铬(CrTiN)。
含有碳化(优选是物理气相沉积-)金刚石状碳涂层被理解为,一个碳化物被混合的金刚石状碳涂层。因此,包含于sp3-键的显著比例的金刚石状碳涂层中的无定形碳(碳sp3-键)与无长程序列的显著比例为至少20%,优选为至少50%)形成了基材的添加材料。优选的是,含碳化的金刚石状碳涂层还另含有钨或铬。特别优选的是,含碳化的金刚石状碳涂层包含碳化钨,特别是以纳米碳化钨沉淀的形式。该特征也对滑动元件的滑动部分有好处。
有利的是,在等离子体辅助化学气相沉积-金刚石状碳层上形成一个磨合层,该磨合层比等离子体辅助化学气相沉积-金刚石状碳层更软。这样一个柔软的磨合层对滑动元件磨合层的滑动元件特性有利,例如,在新的发动机或发动机零部件运行时。
优选的是,所述物理气相沉积-金刚石状碳层具有数个子层。这些子层能彼此连接,例如,逐步修正工艺参数的渐变过渡层。因此,一方面等离子体辅助化学气相沉积-金刚石状碳层和含有碳化金刚石状碳层的粘结性能实现最佳融合是可能的,且另一方面含有碳化金刚石状碳层(优选等离子体辅助化学气相沉积)碳化物或氮化物层,而层与层间通常与其相对粘合的降低有关,没有明显的不连续性。
在一个优选的实施例中,等离子体辅助化学气相沉积-金刚石状碳层的厚度应该是涂层总厚度的30%-70%之间,优选为35%-65%之间。这一优选的层厚度比率使该涂层参入大量不必要的附加材料,且该涂层具有较好的阻抗,
有利的是,涂层总厚度是2μm到50μm。这一涂层厚度具有特殊的好处,并能平衡滑动元件的摩擦系数和磨损性能,尤其是内燃机的活塞环。
此外,优选的是,物理气相沉积-金刚石状碳层(22)具有700HV0.005-2800HV0.002的硬度,且,替代或附加地,等离子体辅助化学气相沉积-金刚石状碳层的硬度为1200HV0.002-3000HV0.002之间。所述物理气相沉积-金刚石状碳层和等离子体辅助化学气相沉积-金刚石状碳层的硬度范围证明对于摩擦系数和耐磨性能的组合具有特别优势。
在一个优选实施例中,物理气相沉积-金刚石状碳层具有150GPa-350GPa的弹性模量和/或所述等离子体辅助化学气相沉积-金刚石状碳层具有160GPa-400GPa的弹性模量。
基本上,优选的是,滑动元件的工作面,至少在一部分,根据本发明的涂层涂覆。出于经济的原因,优选的是,该涂层也被施加于工作侧面、及工作面和与工作面相邻的工作侧面之间的过渡面。
有利的是,含有碳化的金刚石状碳层和/或物理气相沉积-金刚石状碳层和/或等离子体辅助化学气相沉积-金刚石状碳层含有氢。这也证明有关涂层的强度是有益的。
特别优选的是,具有最大值为1μm的厚度是为了使其效果最大化,同时用尽可能少的基板,且因此使用尽可能少的材料。
附图说明
图1示出具有现有技术中的涂层的滑动元件的侧视图的示意图。
图2示出了根据本发明的一个优选实施例的滑动元件的侧视图。
具体实施方式
图1示出了现有技术中的层状结构。基板12上的滑动元件的涂层10’包括由铬组成的结合层14并用于基板12,该基板也可以选择性地包括钛。碳化物层16用于结合层14,该结合层可选择由氮化物层组成。碳化金刚石状碳层(17)用于碳化物层16。本实施例中,碳化金刚石状碳层含有碳化钨,碳和氢。
等离子体辅助化学气相沉积-金刚石状碳层18具有特别好的摩擦和磨损组合,有时可用于碳化金刚石状碳层17。可选择地,磨合层20用于等离子体辅助化学气相沉积-金刚石状碳层18,例如,如果滑动元件在工作阶段具有特定特质,尤其是较低的表面硬度。
图2示出了本发明的一个优选实施例。与上述图1所示的涂层10’相比,根据图2所示实施例的涂层10与无金属物理气相沉积-金刚石状碳涂层22不同,其应用于含碳金刚石状碳涂层17和无金属等离子体辅助化学气相沉积-金刚石状碳层18之间。所述物理气相沉积-金刚石状碳涂层22因其亲合性而显著改进了无金属等离子体辅助化学气相沉积-金刚石状碳层18和含碳金刚石状碳涂层17之间的粘附性。因此,涂层10的阻抗与现有技术相比的到大大改善,即使在发动机重载的情况下也如此。
此外,等离子体辅助化学气相沉积-金刚石状碳层的厚度如图2所示,其具有涂层总厚度D的40%-60%,优选为40%-50%的比例。
Claims (17)
1.一种滑动元件,其具有基板(12)上的涂层(10),其形成了所述滑动元件的至少一个工作面,其特征在于:涂层(10)从内到外具有,
-一层碳化物或氮化物层(16),
-其次是一层碳化-金刚石状碳层(17),
-其次是一层无金属物理气相沉积-金刚石状碳层(22)和
-其次是一层无金属等离子体辅助化学气相沉积-金刚石状碳层(18),无金属物理气相沉积-金刚石状碳层(22)具有数个子层,这些子层能彼此连接为逐步修正工艺参数的渐变过渡层。
2.如权利要求1所述的滑动元件,其特征在于:滑动元件为活塞环。
3.如权利要求1所述的滑动元件,其特征在于:结合层(14)用于基板(12)和碳化物或氮化物层(16)之间。
4.如权利要求3所述的滑动元件,其特征在于:所述碳化物为碳化硅。
5.如权利要求3所述的滑动元件,其特征在于:结合层(14)包含铬或钛。
6.如权利要求1所述的滑动元件,其特征在于:碳化-金刚石状碳层和/或物理气相沉积-金刚石状碳层和/或等离子体辅助化学气相沉积-金刚石状碳层包含氢。
7.如权利要求3所述的滑动元件,其特征在于:碳化物或氮化物层(16)含有碳化钨或CrN或Cr2N或氮化钛(TiN)或氮化钛铬(CrTiN)。
8.如权利要求6所述的滑动元件,其特征在于:碳化-金刚石状碳层包含钨或铬。
9.如权利要求6所述的滑动元件,其特征在于:磨合层(20)形成于等离子体辅助化学气相沉积-金刚石状碳层(18)外部,其比等离子体辅助化学气相沉积-金刚石状碳层(18)更软。
10.如权利要求9所述的滑动元件,其特征在于:等离子体辅助化学气相沉积-金刚石状碳层(18)的厚度(d)是涂层(10)总厚度(D)的30%-70%。
11.如权利要求10所述的滑动元件,其特征在于:等离子体辅助化学气相沉积-金刚石状碳层(18)的厚度(d)是涂层(10)总厚度(D)的35%-65%。
12.如权利要求11所述的滑动元件,其特征在于:涂层(10)的总厚度(D)为2μm - 50μm。
13.如权利要求6所述的滑动元件,其特征在于:物理气相沉积-金刚石状碳层(22)的硬度为700HV0.002至2800HV0.002。
14.如权利要求11所述的滑动元件,其特征在于:等离子体辅助化学气相沉积-金刚石状碳层(18)的硬度为1200HV0.002至3000HV0.002。
15.如权利要求13所述的滑动元件,其特征在于:物理气相沉积-金刚石状碳层(22)的杨氏模量是150GPa至350GPa之间。
16.如权利要求14所述的滑动元件,其特征在于:等离子体辅助化学气相沉积-金刚石状碳层(18)的弹性模量为160GPa至400GPa之间。
17.如权利要求1所述的滑动元件,其特征在于:物理气相沉积-金刚石状碳层(22)适用于反应溅射或电弧法,等离子体辅助化学气相沉积-金刚石状碳层(18)适用于至少1kHz频率的等离子体发生器。
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2012
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BR112015002898A2 (pt) | 2018-05-22 |
DE102012214284B4 (de) | 2014-03-13 |
BR112015002898B1 (pt) | 2021-06-15 |
EP2882886B1 (de) | 2018-03-21 |
KR102093530B1 (ko) | 2020-03-25 |
RU2634811C2 (ru) | 2017-11-03 |
CN105102680A (zh) | 2015-11-25 |
US20150240944A1 (en) | 2015-08-27 |
JP6261582B2 (ja) | 2018-01-17 |
IN2015KN00588A (zh) | 2015-07-17 |
RU2015108068A (ru) | 2016-09-27 |
DE102012214284A1 (de) | 2014-02-13 |
US9476504B2 (en) | 2016-10-25 |
WO2014023615A1 (de) | 2014-02-13 |
EP2882886A1 (de) | 2015-06-17 |
JP2015525861A (ja) | 2015-09-07 |
KR20150060691A (ko) | 2015-06-03 |
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