CN104883134B - A kind of gyroscope pre-amplification circuit and electronic device - Google Patents
A kind of gyroscope pre-amplification circuit and electronic device Download PDFInfo
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- CN104883134B CN104883134B CN201410069311.3A CN201410069311A CN104883134B CN 104883134 B CN104883134 B CN 104883134B CN 201410069311 A CN201410069311 A CN 201410069311A CN 104883134 B CN104883134 B CN 104883134B
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Abstract
The present invention provides a kind of gyroscope pre-amplification circuit, the gyroscope pre-amplification circuit includes realizing the first circuit of the conversion of charge signal to voltage signal and realizing that the tertiary circuit effectively filtered out to low-frequency noise, the output end of first circuit are connected with the input terminal of the tertiary circuit.The present invention also provides a kind of electronic devices comprising the gyroscope pre-amplification circuit.According to the present invention, so that the pre-amplification circuit of gyroscope still can satisfy the requirement of system noise, significantly reduce the design difficulty of gyroscope pre-amplification circuit in the case where not using low-noise preamplifier.
Description
Technical field
The present invention relates to semiconductor fabrication process, fill in particular to a kind of gyroscope pre-amplification circuit and electronics
It sets.
Background technique
Gyroscope is also known as angular-rate sensor, the rotational angular velocity when physical quantity of measurement is deflection and inclination.?
On mobile phone, complete 3D movement is unable to measure or reconstructed using only acceleration transducer, for no other reason than that acceleration transducer is only
Axial line movement can be detected, the movement of rotation is not detected.Gyroscope can then do very well the movement of rotation and deflection
Measurement, the actual act of user can be thus judged with Accurate Analysis, and then do accordingly to mobile phone according to these movements
Operation.Currently, gyroscope, on consumer product, most successful application surely belongs to somatic sensation television game handle.As long as player is hand-held
The handle, so that it may by the game video on oneself action control display screen, carry out the movement class trip such as table tennis, tennis
Play or rotational handle, so that it may play the video-game for class of driving.
In the existing pre-amplification circuit of gyroscope as shown in Figure 1, microelectromechanical systems（MEMS）100 generations
Charge signal be separately input to by the first preamplifier 101a and the first analog-digital converter 102a driving circuit constituted and
The measure loop being made of the second preamplifier 101b and the second analog-digital converter 102b（Usually Coriolis detection is returned
Road）, wherein the charge signal received is converted to voltage by the first preamplifier 101a and the second preamplifier 101b to be believed
Number, the voltage analog that the first analog-digital converter 102a and the second analog-digital converter 102b will be exported received from above-mentioned preamplifier
Signal is converted to digital signal and is exported.Since the angular velocity signal that the microelectromechanical systems 100 of gyroscope generates compares
Faint, i.e., charge signal is fC rank, thus, it is micro- by the voltage signal that above-mentioned preamplifier Q=C*V is converted to
Lie prostrate rank.If not to the output signal of above-mentioned preamplifier（That is voltage signal）Any processing is carried out just to be conveyed directly to
Above-mentioned analog-digital converter then requires above-mentioned preamplifier to have very low noise, in turn results in setting for above-mentioned preamplifier
Meter difficulty dramatically increases.
In the prior art, using low-noise amplifier as above-mentioned preamplifier, to meet the requirement of low noise.It is low
The design difficulty of noise amplifier is relatively high, it usually needs using complicated structure or the size by increasing input device come
Reduce influence of certain noises to system.The structural example of the complexity is as double sampled in routine（CDS）Auto zero circuit structure
And chopped wave stabilizing（CHS）Auto zero circuit structure：In double sampled auto zero circuit structure as shown in Figure 2 A, including one
A difference amplifier A, two capacitors, two groups of switch Φ 1 and Φ 2；In chopped wave stabilizing auto zero circuit knot as shown in Figure 2 B
In structure, including a fully-differential amplifier A, it is separately positioned on the input terminal of fully-differential amplifier A and the chopper circuit of output end
201a and 201b.Preamplifier can reduce the influence of flicker noise using above-mentioned auto zero circuit structure, but need
System clock is provided, will increase the risk of digital circuit interference simulation circuit, meanwhile, circuit structure is complicated, also increases domain
Design difficulty.And increasing the size of input device, area will increase, and parasitic capacitance also will increase；For gyroscope, angle
The corresponding charge of speed signal is inherently fainter, and when being converted by above-mentioned preamplifier Q=C*V, parasitic capacitance is too
If the big voltage signal application condition being converted into that will lead to is big, and domain processing is bad, digital big signal interference mould is had
The problem of intending small signal.
Therefore, it is necessary to design a kind of completely new gyroscope pre-amplification circuit, to solve the above problems.
Summary of the invention
In view of the deficiencies of the prior art, the present invention provides a kind of gyroscope pre-amplification circuit, which is characterized in that including reality
Show the first circuit of the conversion of charge signal to voltage signal and realizes the tertiary circuit effectively filtered out to low-frequency noise, it is described
The output end of first circuit is connected with the input terminal of the tertiary circuit.
Further, first circuit includes preamplifier, and the preamplifier is fully-differential amplifier.
Further, it is made of there are two being formed between the input terminal and output end of the fully-differential amplifier the first RC network
Feedback loop, first RC network is real while the input terminal for the fully-differential amplifier provides dc point
The function of conversion of the existing charge signal to voltage signal.
Further, described two first RC networks are by the resistance R1 and capacitor C1 that are formed in parallel and the electricity being formed in parallel
Resistance R2 and capacitor C2 is respectively constituted.
Further, the tertiary circuit is made of high-pass filter.
Further, the high-pass filter is single order mimic high pass filter.
Further, the high-pass filter includes difference amplifier, the input terminal and output end of the difference amplifier it
Between form that there are two the feedback loop that is made of the second RC network, the first input end of the difference amplifier and the second input terminals
Be connected separately with the first cascaded structure and the second cascaded structure, first cascaded structure by resistance R3 and capacitor C3 series connection and
At second cascaded structure is connected in series by resistance R4 and capacitor C4.
Further, described two second RC networks by the resistance R5 and compensating electric capacity C5 that are formed in parallel and are formed in parallel
Resistance R6 and compensating electric capacity C6 are respectively constituted.
Further, it is connected to the resistance R5 and R6 of the output end of the difference amplifier by setting and is connected to the difference
Divide the ratio of the resistance R3 and R4 of the input terminal of amplifier to realize the gain of the desired high-pass filter.
Further, the cutoff frequency of the high-pass filter is set according to the resonant frequency of the gyroscope, to realize
It is described that low-frequency noise is effectively filtered out.
Further, realization is also connected between first circuit and the tertiary circuit to first circuit output
Voltage signal carries out the second circuit of operation, and the second circuit is by signal operation module composition.
Further, the operation includes the amplification to the voltage signal, plus-minus or balance.
Further, the low-frequency noise comes from first circuit, the second circuit or ambient enviroment.
The present invention also provides a kind of electronic device, the electronic device includes the preposition amplification electricity of gyroscope as described above
Road.
According to the present invention, so that the pre-amplification circuit of gyroscope is not the case where using low-noise preamplifier
Under, it still can satisfy the requirement of system noise, significantly reduce the design difficulty of gyroscope pre-amplification circuit.
Detailed description of the invention
Following drawings of the invention is incorporated herein as part of the present invention for the purpose of understanding the present invention.Shown in the drawings of this hair
Bright embodiment and its description, principle used to explain the present invention.
In attached drawing：
Fig. 1 is the schematic block diagram of existing gyroscope pre-amplification circuit；
Fig. 2A is the circuit diagram of existing double sampled auto zero circuit structure；
Fig. 2 B is the circuit diagram of existing chopped wave stabilizing auto zero circuit structure；
Fig. 3 A is the schematic block diagram of gyroscope pre-amplification circuit proposed by the present invention；
Fig. 3 B is the circuit diagram of gyroscope pre-amplification circuit proposed by the present invention；
Fig. 3 C is the circuit diagram of the preamplifier in gyroscope pre-amplification circuit proposed by the present invention；
Fig. 3 D is the circuit diagram of the high-pass filter in gyroscope pre-amplification circuit proposed by the present invention.
Specific embodiment
In the following description, a large amount of concrete details are given so as to provide a more thorough understanding of the present invention.So
And it is obvious to the skilled person that the present invention may not need one or more of these details and be able to
Implement.In other examples, in order to avoid confusion with the present invention, for some technical characteristics well known in the art not into
Row description.
In order to thoroughly understand the present invention, detailed step will be proposed in following description, to illustrate proposition of the present invention
Gyroscope pre-amplification circuit and electronic device.Obviously, execution of the invention is not limited to the technology people of semiconductor field
The specific details that member is familiar with.Presently preferred embodiments of the present invention is described in detail as follows, however other than these detailed descriptions, this hair
It is bright to have other embodiments.
It should be understood that when the term " comprising " and/or " including " is used in this specification, indicating described in presence
Feature, entirety, step, operation, element and/or component, but do not preclude the presence or addition of other one or more features, entirety,
Step, operation, element, component and/or their combination.
[exemplary embodiment]
In order to which the circuit structure for solving the low-noise preamplifier used in existing gyroscope pre-amplification circuit is multiple
Miscellaneous, the big problem of layout design difficulty, the present invention proposes a kind of novel gyroscope pre-amplification circuit.
As shown in Figure 3A, novel gyroscope pre-amplification circuit proposed by the present invention includes three-level circuit：First order circuit
301 realize the conversion of charge signal to voltage signal；Second level circuit 302, which is realized, believes the voltage that first order circuit 301 exports
Number operation, such as the amplification of signal, the plus-minus of signal and the balance of signal etc.；Tertiary circuit 303 is high-pass filter, right
Low-frequency noise（Noise lower than 7KHz）It is effective filtered out.
As shown in figs. 3 b and 3 c, the preamplifier 304 in first order circuit 301 is not needed using by clock signal
Special construction is formed anti-there are two being made of RC network between the input terminal and output end of conventional fully-differential amplifier A
It is fed back to road, the RC network realizes Q=C*V while the input terminal for fully-differential amplifier A provides dc point（It is i.e. electric
Conversion of the lotus signal to voltage signal）Function, wherein the resistance R1 and capacitor C1 that are formed in parallel and the resistance being formed in parallel
R2 and capacitor C2 respectively constitutes two RC networks.Since capacitor C1 and C2 usually have the magnitude of tens pF, thus, fully differential is put
The influence of big device A input parasitic capacitance can be ignored substantially.
Although the angular velocity signal of capacitive gyroscope is very faint, its resonant frequency and angular speed frequency usually exist
Near 30KHz.Increase the high-pass filter 306 as tertiary circuit 303 after first order circuit 301, by according to top
The resonant frequency of spiral shell instrument rationally to be arranged the cutoff frequency of high-pass filter 306, while not losing signal energy, Ke Yiyou
Effect filters out low-frequency noise.No matter these low-frequency noises are to come from environment, or come from first order circuit 301, or come from conduct
The signal operation module 305 of second level circuit 302 can be high-pass filtered device 306 and effectively filter out.Therefore, although the first order
The noiseproof feature of preamplifier 304 in circuit 301 is not brilliant, entire preposition after increasing high-pass filter 306
The noiseproof feature of amplifying circuit can relatively easily meet system requirements.
As shown in Figure 3D, high-pass filter 306 is conventional single order mimic high pass filter, in the input terminal of difference amplifier
Two feedback loops being made of RC network are formed between output end, wherein the resistance R5 and compensating electric capacity C5 being formed in parallel
And the resistance R6 and compensating electric capacity C6 being formed in parallel respectively constitute two RC networks；The first input end of difference amplifier and
Two input terminals are connected separately with the first cascaded structure and the second cascaded structure, and the first cascaded structure is connected by resistance R3 and capacitor C3
It forms, the second cascaded structure is connected in series by resistance R4 and capacitor C4.
When R3, R4, R5 are identical with the resistance value of R6, the gain of high-pass filter 306 is 0dB.It should be noted that high
The gain of bandpass filter 306 can not be 0dB, can reasonably be set according to the power and system requirements of signal.Only
Change the ratio for being connected to the resistance of difference amplifier output end Yu being connected to the resistance of differential amplifier inputs, so that it may
To realize other gain values.Due to it is desirable that signal frequency in 30KHz or so, here by high-pass filter-
3dB cutoff frequency is set in 7KHz, i.e. time constant RC will meet following formula：1/2 π * R*C=7*103。
Compensating electric capacity C5 and C6 can make frequency response of the high-pass filter 306 in high frequency more meet system requirements, be
One extremely important component part of high-pass filter 306.
The voltage letter exported to preamplifier 304 may be implemented in signal operation module 305 as second level circuit 302
Number the functions such as amplification, plus-minus and balance, the circuit that those skilled in the art can be selected according to actual needs to be familiar with realizes
Above-mentioned function.If you do not need to the voltage signal exported to preamplifier 304 makes above-mentioned operation, it can be by signal operation mould
It is deleted in the gyroscope pre-amplification circuit as shown in Figure 3 C of block 305, at this point, the voltage signal exported from preamplifier 304
Directly input the input terminal of high-pass filter 306.
Through the invention, increase high-pass filter after the preamplifier 304 in gyroscope pre-amplification circuit
306, it, can be to from preamplifier 304 and from other places by the way that the cutoff frequency of high-pass filter 306 is rationally arranged
Low-frequency noise effectively filtered out.The pre-amplification circuit of gyroscope is made not use low noise through this structure
In the case where sound preamplifier, the requirement of system noise still can satisfy, significantly reduce the preposition amplification electricity of gyroscope
The design difficulty on road.Meanwhile the structure of high-pass filter 306 is common single order high-pass filter, design difficulty is not high.
The present invention also provides a kind of electronic device, gyroscope wherein included is used to be shown according to the above exemplary embodiments
Gyroscope pre-amplification circuit out.Above-mentioned gyroscope pre-amplification circuit reduces layout design hardly possible compared with the existing technology
Degree can reduce manufacturing cost, improve the precision of processing signal.Therefore, which can have better performance.
The electronic device, can be mobile phone, tablet computer, laptop, net book, game machine, television set, VCD,
Any electronic product such as DVD, navigator, camera, video camera, recording pen, MP3, MP4, PSP or equipment.
The present invention has been explained by the above embodiments, but it is to be understood that, above-described embodiment is only intended to
The purpose of citing and explanation, is not intended to limit the invention to the scope of the described embodiments.Furthermore those skilled in the art
It is understood that the present invention is not limited to the above embodiments, introduction according to the present invention can also be made more kinds of member
Variants and modifications, all fall within the scope of the claimed invention for these variants and modifications.Protection scope of the present invention by
The appended claims and its equivalent scope are defined.
Claims (9)
1. a kind of gyroscope pre-amplification circuit, which is characterized in that the including realizing the conversion of charge signal to voltage signal
The tertiary circuit effectively filtered out of one circuit and realization to low-frequency noise, the output end and the tertiary circuit of first circuit
Input terminal be connected, wherein first circuit includes preamplifier, the preamplifier be fully-differential amplifier, institute
It states tertiary circuit to be made of high-pass filter, the cut-off of the high-pass filter is set according to the resonant frequency of the gyroscope
Frequency described effectively filters out low-frequency noise with realizing；It is formed between the input terminal and output end of the fully-differential amplifier
There are two the feedback loop being made of the first RC network, first RC network is mentioned in the input terminal for the fully-differential amplifier
While for dc point, the function of the conversion of the charge signal to voltage signal is realized；The high-pass filter includes
Difference amplifier, there are two the feedbacks being made of the second RC network for formation between the input terminal and output end of the difference amplifier
Circuit, the first input end of the difference amplifier and the second input terminal are connected separately with the first cascaded structure and the second tandem junction
Structure, first cascaded structure are connected in series by resistance R3 and capacitor C3, and second cascaded structure is by resistance R4 and capacitor C4
It is connected in series.
2. gyroscope pre-amplification circuit according to claim 1, which is characterized in that described two first RC networks are by simultaneously
Resistance R1 and capacitor C1 made of connection and the resistance R2 being formed in parallel and capacitor C2 are respectively constituted.
3. gyroscope pre-amplification circuit according to claim 1, which is characterized in that the high-pass filter is First-Order Mode
Quasi- high-pass filter.
4. gyroscope pre-amplification circuit according to claim 1, which is characterized in that described two by the second RC network structure
At feedback loop by the resistance R5 and compensating electric capacity C5 that are formed in parallel and the resistance R6 and compensating electric capacity C6 that are formed in parallel points
It does not constitute.
5. gyroscope pre-amplification circuit according to claim 1, which is characterized in that be connected to the difference by setting
The resistance R5 and R6 of the output end of amplifier and the ratio of the resistance R3 and R4 of the input terminal for being connected to the difference amplifier are come
Realize the gain of the desired high-pass filter.
6. gyroscope pre-amplification circuit according to claim 1, which is characterized in that first circuit and the third
The second circuit realized and carry out operation to the voltage signal of first circuit output, second electricity are also connected between circuit
Route signal computing module is constituted.
7. gyroscope pre-amplification circuit according to claim 6, which is characterized in that the operation includes to the voltage
Amplification, plus-minus or the balance of signal.
8. gyroscope pre-amplification circuit according to claim 6, which is characterized in that the low-frequency noise is from described the
One circuit, the second circuit or ambient enviroment.
9. a kind of electronic device, which is characterized in that including being put before gyroscope according to any one of claims 1 to 8
Big circuit.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201410069311.3A CN104883134B (en) | 2014-02-27 | 2014-02-27 | A kind of gyroscope pre-amplification circuit and electronic device |
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| CN201410069311.3A CN104883134B (en) | 2014-02-27 | 2014-02-27 | A kind of gyroscope pre-amplification circuit and electronic device |
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| CN104883134A CN104883134A (en) | 2015-09-02 |
| CN104883134B true CN104883134B (en) | 2018-11-27 |
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| CN111699402A (en) * | 2019-04-24 | 2020-09-22 | 深圳市大疆创新科技有限公司 | Intermediate frequency analog circuit of continuous wave radar, continuous wave radar and movable platform |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6714070B1 (en) * | 2002-02-07 | 2004-03-30 | Bei Technologies, Inc. | Differential charge amplifier with built-in testing for rotation rate sensor |
| CN103368503A (en) * | 2012-04-05 | 2013-10-23 | 快捷半导体(苏州)有限公司 | MEMS device front-end charge amplifier and related method |
| CN103424570A (en) * | 2013-07-12 | 2013-12-04 | 西北工业大学 | Sigma-delta closed-loop control circuit in multi-stage noise shaping (MASH) structure for micro-machined accelerometer |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4224993B2 (en) * | 2002-07-11 | 2009-02-18 | 株式会社デンソー | Physical quantity detection device |
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Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6714070B1 (en) * | 2002-02-07 | 2004-03-30 | Bei Technologies, Inc. | Differential charge amplifier with built-in testing for rotation rate sensor |
| CN103368503A (en) * | 2012-04-05 | 2013-10-23 | 快捷半导体(苏州)有限公司 | MEMS device front-end charge amplifier and related method |
| CN103424570A (en) * | 2013-07-12 | 2013-12-04 | 西北工业大学 | Sigma-delta closed-loop control circuit in multi-stage noise shaping (MASH) structure for micro-machined accelerometer |
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