CN104715990B - A kind of SEM comprehensive auxiliary imaging system and method - Google Patents
A kind of SEM comprehensive auxiliary imaging system and method Download PDFInfo
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- CN104715990B CN104715990B CN201510053462.4A CN201510053462A CN104715990B CN 104715990 B CN104715990 B CN 104715990B CN 201510053462 A CN201510053462 A CN 201510053462A CN 104715990 B CN104715990 B CN 104715990B
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- 238000003384 imaging method Methods 0.000 title claims abstract description 53
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- 238000013519 translation Methods 0.000 claims abstract description 355
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- 230000014616 translation Effects 0.000 claims description 354
- 230000001360 synchronised effect Effects 0.000 claims description 25
- 230000033001 locomotion Effects 0.000 claims description 22
- 238000006073 displacement reaction Methods 0.000 claims description 20
- 238000011897 real-time detection Methods 0.000 claims description 9
- 238000001514 detection method Methods 0.000 claims description 3
- 230000008450 motivation Effects 0.000 claims description 2
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- 238000004626 scanning electron microscopy Methods 0.000 claims 1
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- 238000010894 electron beam technology Methods 0.000 description 4
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- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 230000003321 amplification Effects 0.000 description 1
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Abstract
The invention discloses a kind of SEM comprehensive auxiliary imaging system and method, the sample stage that the auxiliary imaging system includes the rotation centralising device on the pedestal of SEM and places for scanned sample；Rotation centralising device includes translating device and rotating mechanism, and sample stage is fixed on translating device；Sample is in parallel laying with horizontal rotating shaft；Its associated image method includes step：First, sample is fixed；2nd, rotary sample and image space determine that process is as follows：Sample initial imaging position determine, rotate clockwise for the first time and sample image space determine, rotate counterclockwise and sample image space determine and rotate clockwise for the second time；3rd, image space contrast；4th, sample translation；5th, 360 ° of sample is rotated and omnibearing imaging.The present invention is reasonable in design, realize that convenient and using effect is good, can solve the problems, such as that the range of observation that existing SEM is present is limited, can not carry out comprehensive observation to sample.
Description
Technical field
The invention belongs to SEM applied technical field, more particularly, to a kind of SEM with entirely
Orientation auxiliary imaging system and method.
Background technology
ESEM, full name SEM (scanning electron microscope, english abbreviation
SEM), be a kind of utilization electron beam scanning sample surfaces so as to obtain the electron microscope of sample message, mainly by vacuum system,
The three parts such as electron beam system and imaging system are constituted.The superfine electron beam of SEM (SEM) is in sample
Surface scan, and the secondary electron for producing is collected with special detector, form electric signal and be transported to kinescope, in fluorescent screen
Upper display object, its resolution ratio up to 0.2 nanometer, far above the resolution ratio of light microscope.Therefore, Scanning Electron microscope is wide
It is general to be applied to scientific research and engineering practice field.However, due to the restriction of SEM image-forming principle, electron beam is only
The upper surface of sample can be scanned.Thus, SEM can only obtain the two dimensional image of sample upper surface.
The limitation of SEM range of observation, have become limit one of Development of Nano-technology it is crucial because
Element.In order to understand the surface characteristics of sample in more detail, there is the business-like pendulum sample platform for electron microscope at present.It is logical
Cross sample to be placed on oscillating table and swing, can be with the surface of observing samples.But, it is right that above-mentioned pendulum sample platform cannot be realized
The larger range of observation of sample, the back side of such as sample.Due to the sample yardstick under microscope it is very little, it is difficult to carry out to sample
Accurate positioning and reversion.Thus, nowadays cannot also realize the comprehensive observation to sample.
The content of the invention
The technical problem to be solved is for above-mentioned deficiency of the prior art, there is provided a kind of scanning electron
The comprehensive auxiliary imaging system of microscope, its simple structure, it is reasonable in design, install lay it is convenient and using it is easy to operate, make
With the effect comprehensive auxiliary imaging system of good SEM, the sight that existing SEM is present can be solved
Examine the problem of the comprehensive observation that is limited in scope, can not carry out to sample.
To solve above-mentioned technical problem, the technical solution used in the present invention is：A kind of SEM is with comprehensive
Auxiliary imaging system, it is characterised in that：Including the rotation centralising device on the pedestal of SEM and supply institute
The sample stage that scanning sample is placed, the sample stage are arranged on the rotation centralising device；The rotation centralising device includes
The translating device and the drive sample stage translated to the sample stage is synchronous with the translating device around horizontal rotating shaft rotation
The rotating mechanism for turning, the rotating mechanism are arranged on pedestal, and the translating device is arranged on the rotating mechanism and its position
On the inside of the rotating mechanism, the sample stage is fixed on the translating device and which is located on the inside of the translating device；Institute
Sample is stated on the inside of the sample stage and which is in horizontal layout, the sample is in parallel laying with horizontal rotating shaft.
A kind of above-mentioned comprehensive auxiliary imaging system of SEM, is characterized in that：The sample is cone,
The bottom surface of the cone is fixed on the sample stage.
A kind of above-mentioned comprehensive auxiliary imaging system of SEM, is characterized in that：The sample stage is in perpendicular
The straight vertical platform to laying；The pedestal be in horizontal layout, the rotating mechanism, the vertical translation mechanism and the level
Translation mechanism is in vertically to laying；
The translating device includes the horizontal translation mechanism for driving the sample stage to carry out anterior-posterior translation in the horizontal direction
The vertical translation mechanism of upper and lower translation is carried out with drive sample stage in the vertical direction synchronous with the horizontal translation mechanism,
The sample stage is arranged in the horizontal translation mechanism, and the horizontal translation mechanism is arranged in the vertical translation mechanism,
And the vertical translation mechanism is arranged on the rotating mechanism；The rotating mechanism, the vertical translation mechanism, the level
Translation mechanism and the sample stage are laid from outside to inside.
A kind of above-mentioned comprehensive auxiliary imaging system of SEM, is characterized in that：The rotating mechanism includes
The vertical fixed seat that is fixedly mounted on pedestal and on the inside of vertical fixed seat and the rotation that can be rotated on vertical plane
Seat, the horizontal rotating shaft is laid on the outside of rotating seat and which is arranged in vertical fixed seat, is provided with and supplies level in vertical fixed seat
What rotating shaft was installed is horizontally mounted hole.
A kind of above-mentioned comprehensive auxiliary imaging system of SEM, is characterized in that：The vertical translation mechanism
Including the first fixed plate being fixedly mounted on rotating seat and be arranged on the first fixed plate on the inside of and can in the vertical direction carry out
The vertical translation plate of upper and lower translation, the vertical translation plate are located on the inside of the first fixed plate；The horizontal translation mechanism includes solid
The second fixed plate that Dingan County is mounted on vertical translation plate and before being arranged on the inside of the second fixed plate and carrying out in the horizontal direction
The horizontal translation plate for translating afterwards, second fixed plate are located on the inside of vertical translation plate.
A kind of above-mentioned comprehensive auxiliary imaging system of SEM, is characterized in that：Also include controller and
The anglec of rotation and direction of rotation to rotating seat carries out the rotation angle detecting unit and direction of rotation detector unit of real-time detection；
The rotating seat is cylindrical pedestal, and the rotating seat is laid in coaxial with horizontal rotating shaft；The rotating mechanism also includes driving
The rotary drive mechanism rotated on vertical plane by rotating seat, the rotary drive mechanism carry out transmission company with horizontal rotating shaft
Connect；The vertical translation mechanism also includes the vertical translation drive mechanism for driving vertical translation plate to carry out upper and lower translation, described perpendicular
It is connected to translational drive mechanism with vertical translation plate；The horizontal translation mechanism also includes driving horizontal translation plate to enter
The horizontal translation drive mechanism of row anterior-posterior translation, the horizontal translation drive mechanism are connected with horizontal translation plate；Institute
State rotary drive mechanism, vertical translation drive mechanism and horizontal translation drive mechanism and be electric driving mechanism, the rotation is driven
Motivation structure, vertical translation drive mechanism and horizontal translation drive mechanism be controlled by controller and three with controller phase
Connect；
Equipped with the vertical displacement detector unit that real-time detection is carried out to its upper and lower translational displacement on the vertical translation plate, and
Equipped with the horizontal displacement detector unit that real-time detection is carried out to its anterior-posterior translation displacement on horizontal translation plate, the anglec of rotation inspection
Survey unit, direction of rotation detector unit, vertical displacement detector unit and horizontal displacement detector unit to connect with controller.
Meanwhile, the invention also discloses a kind of method and step is simple, reasonable in design and realizes that convenient, using effect is good and sweeps
Electron microscope is retouched with comprehensive associated image method, it is characterised in that the method is comprised the following steps：
Step one, sample are fixed：Sample is fixed on the inside of the sample stage；
Step 2, rotary sample and image space determine that process is as follows：
Step 201, sample initial imaging position determine：Sample is observed using the SEM, and to described
In SEM, the image space of sample is determined, and now the image space of sample is position P0；
Step 202, rotate clockwise for the first time and sample image space determine：By the rotating mechanism, by the sample
Sample platform edge synchronous with the translating device rotates clockwise, and rotational angle is α；After the completion of rotating clockwise, swept using described
Electron microscope observation sample is retouched, and the image space to sample in the SEM is determined, now sample
Image space be position P1；
Step 203, rotate counterclockwise and sample image space determine：By the rotating mechanism, by the sample stage with
The translating device is synchronously rotated counterclockwise, and rotational angle is 2 α；After the completion of rotating counterclockwise, using the scanning electron
Micro- sem observation sample, and the image space to sample in the SEM is determined, the now imaging of sample
Position is position P2；
Step 204, rotate clockwise for the second time：By the rotating mechanism, by the sample stage and the translating device
Synchronous edge rotates clockwise, and rotational angle is α；After the completion of rotating clockwise, the image space of sample is position P0；
Step 3, image space contrast：By the position P described in step 2032With the position P described in step 2021, point
Not with the position P described in step 2010Contrasted：As position P2, position P1With position P0For same position when, illustrate sample
Lay in coaxial with horizontal rotating shaft, into step 5；Otherwise, sample need to be translated, into step 4；
Step 4, sample translation, process are as follows：
Step 401, translational movement are calculated：According to formulaWith
Horizontal translation amount y of sample is calculated respectively0With vertical translation amount z0, in public formula (I) and (II), Δ y1For position P1And position
Put P0Between spacing, Δ y2For position P2With position P0Between spacing；N is the multiplication factor of the SEM；
Step 402, level and vertical translation：According to horizontal translation amount y calculated in step 4010And vertical translation
Amount z0, drive the sample stage to be translated in the horizontal direction by the horizontal translation mechanism, while by described vertical
Translation mechanism drives sample stage in the vertical direction synchronous with the horizontal translation mechanism to be translated, and sample is moved to
Lay in coaxial with horizontal rotating shaft；Afterwards, into step 5；
Step 5,360 ° of sample are rotated and omnibearing imaging：By the rotating mechanism, drive the sample stage with it is described
The synchronous edge of translating device rotates clockwise or counterclockwise 360 °, and in rotation process, is observed using the SEM
Sample, and complete the omnibearing imaging process of sample.
Said method, is characterized in that：Before level and vertical translation are carried out in step 402, first turned with level according to sample
The relative position of axle, is determined respectively to the horizontal translation direction and vertical translation direction of sample；
Wherein, when being determined to the horizontal translation direction of sample, judgement sample is located at the front side of horizontal rotating shaft or rear side：
When judging to show that sample is located at the front side of horizontal rotating shaft, illustrate the horizontal translation direction of sample to translate backward；Otherwise, when sentencing
It is disconnected when showing that sample is located at the rear side of horizontal rotating shaft, illustrate that the horizontal translation direction of sample is to translate forward；
When being determined to the vertical translation direction of sample, judgement sample is located above or below horizontal rotating shaft：When sentencing
It is disconnected when showing that sample is located at the top of horizontal rotating shaft, illustrate the vertical translation direction of sample to translate downwards；Otherwise, when judging
Go out sample positioned at horizontal rotating shaft lower section when, illustrate sample vertical translation direction be translate up；
When driving the sample stage to be translated in the horizontal direction by the horizontal translation mechanism in step 402, root
According to determined by, horizontal translation direction is translated, and translational movement is y0；The sample stage is driven by the vertical translation mechanism
When in the vertical direction synchronous with the horizontal translation mechanism is translated, according to determined by, vertical translation direction is put down
Move, translational movement is z0。
Said method, is characterized in that：When level is carried out in step 402 with vertical translation, process is as follows：
Step 4021, first translation：The sample stage is driven in the horizontal direction forward by the horizontal translation mechanism
Or backward translation and translational movement be y0, while driving the sample stage and the horizontal translation machine by the vertical translation mechanism
Structure synchronization in the vertical direction is translated up or down and translational movement is z0；
Step 4022, translation judge in place：After the completion of first translation, first according to the method described in step 2, to sample
Carry out rotary sample and image space determines；Afterwards, according to the method described in step 401, calculate the horizontal translation of sample
Measure and vertical translation amount, now the horizontal translation amount and vertical translation amount of sample is denoted as y respectively0' and z0’；Then, according to calculating
The y for drawing0' and z0', whether judgement sample translates in place：Work as y0'=0 and z0During '=0, illustrate sample translate in place, it is laggard
Enter step 5；Otherwise, into step 4023；
Step 4023, secondary translation, process are as follows：
Step I, translation direction and translational movement determine：According to the y calculated in step 40220', to during secondary translation
Horizontal translation direction is determined with horizontal translation amount：Work as y0During '=0, illustrate that sample has been translated in place in the horizontal direction, this
The horizontal translation amount of Shi Erci translations is 0；Work as y0'=2y0When, in illustrating horizontal translation direction and the step 4021 of secondary translation
Horizontal translation during first translation is in opposite direction, and the horizontal translation amount of secondary translation is 2y0；
Meanwhile, according to the z calculated in step 40220', to vertical translation direction during secondary translation and vertical translation
Amount is determined：Work as z0During '=0, illustrate that sample in the vertical direction has been translated in place, the vertical translation amount of now secondary translation
For 0；Work as z0'=2z0When, illustrate the vertical translation direction and the vertical translation side in step 4021 during first translation of secondary translation
To conversely, and secondary translation vertical translation amount be 2z0；
Step II, secondary translation：Translation direction and translational movement according to determined by step I, by the horizontal translation
Mechanism drives the sample stage to be translated in the horizontal direction, while driving the sample stage by the vertical translation mechanism
In the vertical direction synchronous with the horizontal translation mechanism is translated, and after the completion of translation, the sample is with horizontal rotating shaft in same
Axle is laid.
Said method, is characterized in that：Before rotary sample and image space determination are carried out in step 2, first to the scanning
The multiplication factor of electron microscope is adjusted, and the multiplication factor of the SEM is adjusted to 1；Step 401
Middle N=1；Before 360 ° of rotations of sample and omnibearing imaging are carried out in step 5, the first amplification to the SEM
Multiple is adjusted.
The present invention has advantages below compared with prior art：
1st, convenient, input is laid in auxiliary imaging system simple structure, reasonable in design and processing and fabricating and the installation for being adopted
Cost is relatively low.
2nd, the auxiliary imaging system for being adopted mainly includes the rotation centering on the pedestal of SEM
Device and the sample stage placed for scanned sample, sample stage are arranged on rotation centralising device, by rotating centralising device energy
Simplicity is carried out to sample, centering is quickly rotated, and sample is moved on the central axis of rotating mechanism.
3rd, the rotation centralising device simple structure that adopted, reasonable in design and small volume, take up room it is little, and using behaviour
Make easy, using effect good, and can work under high vacuum environment, rotary sample and translation motion control are simple, and sample
Product rotate and the control accuracy of translation motion is higher, and energy simplicity, quick and high-quality complete the rotation centering process of sample.
4th, the auxiliary imaging system for being adopted is good using easy to operate and using effect, with existing SEM
It is used in combination, the rotation centralising device for being adopted is directly anchored on the pedestal of SEM, and is loaded with sample
Sample stage is fixed on rotation centralising device, is controlled to rotating centralising device by controller, and sample is moved to by simplicity
On the central axis of rotating mechanism, 360 ° of rotations are carried out by rotating mechanism to sample subsequently；And in rotary course, pass through
Continuously to sample, each surface is imaged SEM, after 360 ° of rotary sample, finally gives the full side of sample
Bit image.Thus, there is auxiliary imaging system of the present invention simple structure, reasonable in design, installation to lay convenience, use
The advantages of easy to operate, using effect is good, can solve the range of observation that existing SEM is present it is limited, can not be to sample
Product carry out the problem of comprehensive observation.
5th, the imaging method step that adopted is simple, reasonable in design and realizes that convenient, using effect is good, can be easy, quick
The omnibearing imaging process of sample is completed, the purpose being imaged to each surface of sample is realized.
6th, the rotation centering method step that adopted is simple, reasonable in design and realizes that convenient, using effect is good, can not have
In the case of sample particular location coordinate, by " reciprocating rotation-image space detection " method, sample is moved to rotating mechanism
Center line axis on, realize comprehensive observation to sample by 360 ° of rotary samples and by SEM afterwards,
The deficiency that existing SEM can only be imaged to sample upper surface is overcome effectively.Treat that sample moves to whirler
After on the center line axis of structure, when 360 ° of rotations are carried out to sample, the observation visual field that sample can all the time in SEM
It is interior.In rotary course, constantly to sample, each surface is imaged SEM；And after 360 ° of rotary sample,
Omnibearing imaging of the SEM to sample can be realized.
7th, using effect is good and practical value is high, can work under vacuum conditions, and can sit in no sample particular location
In the case of target, realization carries out centering, rotation and omnibearing observation to sample.
Below by drawings and Examples, technical scheme is described in further detail.
Description of the drawings
Fig. 1 is by the present invention using the use state of comprehensive auxiliary imaging system with reference to figure.
Fig. 2 is adopted the structural representation of comprehensive auxiliary imaging system by the present invention.
Fig. 3 is adopted the schematic block circuit diagram of comprehensive auxiliary imaging system by the present invention.
Fig. 4 is the rotation centering schematic diagram when present invention carries out rotation centering using rotation centralising device to sample.
Fig. 5 is that observed sample in SEM is carried out during rotation centering to sample using the present invention
Picture position change schematic diagram.
Fig. 6 is method flow block diagram when carrying out omnibearing imaging using the present invention to sample.
Description of reference numerals:
1-pedestal；21-vertical fixed seat；22-rotating seat；
23-horizontal rotating shaft；24-rotary drive mechanism；25-rotation angle detecting unit；
26-direction of rotation detector unit；31-the first fixed plate；32-vertical translation plate；
33-vertical translation drive mechanism；34-vertical displacement detector unit；
41-the second fixed plate；42-horizontal translation plate；43-horizontal translation drive mechanism；
44-horizontal displacement detector unit；5-vertical platform；6-sample；
7-electron gun；81-the first connection cable；82-the second connection cable；
83-the three connection cable；9-controller.
Specific embodiment
The comprehensive auxiliary imaging system of a kind of SEM as shown in Figure 1 and Figure 2, including installed in scanning
Rotation centralising device and the sample stage placed for scanned sample 6 on the pedestal 1 of electron microscope, the sample stage are arranged on
On the rotation centralising device.The rotation centralising device includes the translating device translated to the sample stage and drives institute
The sample stage rotating mechanism around the rotation of horizontal rotating shaft 23 synchronous with the translating device is stated, the rotating mechanism is arranged on pedestal 1
On, the translating device is arranged on the rotating mechanism and which is located on the inside of the rotating mechanism, and the sample stage is fixed on
On the translating device and which is located on the inside of the translating device.The sample 6 is located on the inside of the sample stage and which is in level
Lay, the sample 6 is in parallel laying with horizontal rotating shaft 23.
In the present embodiment, the sample 6 is cone, and the bottom surface of the cone is fixed on the sample stage.
In the present embodiment, the sample stage is to the vertical platform 5 laid in vertically.
Also, the vertical platform 5 is square platform.During reality processing, can according to specific needs, to the sample stage
Structure and size are adjusted accordingly.
In the present embodiment, the pedestal 1 be in horizontal layout, the rotating mechanism, the vertical translation mechanism and the water
Flat translation mechanism is in vertically to laying.
The translating device includes the horizontal translation mechanism for driving the sample stage to carry out anterior-posterior translation in the horizontal direction
The vertical translation mechanism of upper and lower translation is carried out with drive sample stage in the vertical direction synchronous with the horizontal translation mechanism,
The sample stage is arranged in the horizontal translation mechanism, and the horizontal translation mechanism is arranged in the vertical translation mechanism,
And the vertical translation mechanism is arranged on the rotating mechanism；The rotating mechanism, the vertical translation mechanism, the level
Translation mechanism and the sample stage are laid from outside to inside.
In the present embodiment, the sample 6 is in horizontal layout.The rotating mechanism includes being fixedly mounted on erecting on pedestal 1
To fixed seat 21 and on the inside of vertical fixed seat 21 and the rotating seat 22 that can be rotated on vertical plane, the horizontal rotating shaft
23 are laid on the outside of rotating seat 22 and which is arranged in vertical fixed seat 21, be provided with and pacify for horizontal rotating shaft 23 in vertical fixed seat 21
What is filled is horizontally mounted hole.
The vertical translation mechanism includes the first fixed plate 31 being fixedly mounted on rotating seat 22 and consolidates installed in first
On the inside of fixed board 31 and can in the vertical direction carry out the vertical translation plate 32 of upper and lower translation, the vertical translation plate 32 is located at first
On the inside of fixed plate 31；The horizontal translation mechanism includes the second fixed plate 41 being fixedly mounted on vertical translation plate 32 and installs
The horizontal translation plate 42 of anterior-posterior translation, second fixed plate 41 can be carried out on the inside of the second fixed plate 41 and in the horizontal direction
On the inside of vertical translation plate 32.
As shown in figure 3, the comprehensive auxiliary imaging system of a kind of SEM of the present invention, also including control
Device processed 9.The rotating seat 22 is cylindrical pedestal, and the rotating seat 22 is laid in coaxial with horizontal rotating shaft 23.The whirler
Structure also includes the rotary drive mechanism 24 rotated on vertical plane by seat 22, the rotary drive mechanism 24 and water is rotated
Flat turn axle 23 is connected.The vertical translation mechanism also includes driving vertical translation plate 32 to carry out the vertical of upper and lower translation
Translational drive mechanism 33, the vertical translation drive mechanism 33 are connected with vertical translation plate 32.The horizontal translation
Mechanism also includes the horizontal translation drive mechanism 43 for driving horizontal translation plate 42 to carry out anterior-posterior translation, the horizontal translation driving machine
Structure 43 is connected with horizontal translation plate 42.The rotary drive mechanism 24, vertical translation drive mechanism 33 and level are put down
Move drive mechanism 43 and be electric driving mechanism, the rotary drive mechanism 24, vertical translation drive mechanism 33 and horizontal translation
Drive mechanism 43 is controlled by controller 9 and three is connected with controller 9.
In the present embodiment, the rotary drive mechanism 24 is arranged in vertical fixed seat 21, the vertical translation driving machine
Structure 33 is arranged in the first fixed plate 31, and horizontal translation drive mechanism 43 is arranged in the second fixed plate 41.
Also, the rotary drive mechanism 24, vertical translation drive mechanism 33 and horizontal translation drive mechanism 43 are drive
Dynamic motor.
During physical cabling, the rotary drive mechanism 24, vertical translation drive mechanism 33 and horizontal translation drive mechanism 43
It is attached with controller 9 by the first connection cable 81, the second connection cable 82 and the 3rd connection cable 83 respectively.
Meanwhile, the comprehensive auxiliary imaging system of a kind of SEM of the present invention is also included to rotation
The anglec of rotation of seat 22 and direction of rotation carry out the rotation angle detecting unit 25 and direction of rotation detector unit 26 of real-time detection,
Equipped with the vertical displacement detector unit 34 that real-time detection is carried out to its upper and lower translational displacement on the vertical translation plate 32, and level
Equipped with the horizontal displacement detector unit 44 that real-time detection is carried out to its anterior-posterior translation displacement in translation plates 42, the anglec of rotation inspection
Survey unit 25, direction of rotation detector unit 26, vertical displacement detector unit 34 and horizontal displacement detector unit 44 with controller 9
Connect.
During actual installation, the rotation angle detecting unit 25 and direction of rotation detector unit 26 are installed in rotating seat 22
Or on horizontal rotating shaft 23.
In the present embodiment, first fixed plate 31, vertical translation plate 32, the second fixed plate 41 and horizontal translation plate 42 are equal
Vertical chute is provided with the madial wall of first fixed plate 31 for vertically to the flat board laid, and vertical translation plate 32 is outer
The vertical boss along the upper and lower sliding of the vertical chute is provided with the wall of side, the vertical boss is plugged in the vertical chute
It is interior, it is provided with the madial wall of second fixed plate 41 on horizontal concrete chute, and the lateral wall of horizontal translation plate 42 and is provided with along institute
State the horizontal ledge of sliding before and after horizontal concrete chute, the horizontal ledge is plugged in the horizontal concrete chute, the horizontal concrete chute with
23 perpendicular laying of horizontal rotating shaft.
Also, first fixed plate 31, vertical translation plate 32, the second fixed plate 41 and horizontal translation plate 42 are rectangle
Flat board.
In the present embodiment, the quantity of the vertical chute is together and which is laid in the madial wall of the first fixed plate 31
Portion, the quantity of the horizontal concrete chute is together and which is laid in the middle part of the madial wall of the second fixed plate 41.
In the present embodiment, equipped with the mounting seat installed for vertical fixed seat 21 on the pedestal 1, the mounting seat is located at perpendicular
To the rear side of fixed seat 21, and vertical fixed seat 21 is fixedly mounted in the mounting seat by fastening bolt.
Also, between first fixed plate 31 and rotating seat 22 and between the second fixed plate 41 and vertical translation plate 32
It is fixedly connected by multiple connecting bolts.
When actually used, the electron gun 7 of the SEM being scanned to sample 6 is located above sample 6,
And electron gun 7 is connected with controller 9.The pedestal 1 is the horizontal base in the SEM for sample stage installation.
During actually used, sample 6 is scanned by electron gun 7, is realized by the SEM
The purpose observed to sample 6, the image observed by the SEM are sent to controller 9.
In the present embodiment, the sample 6 is fixed on the sample stage by conductive tape.
To sum up, a kind of SEM of the present invention is loaded with sample 6 with comprehensive auxiliary imaging system
Sample stage is fixed on the rotation centralising device, is controlled by 9 pairs of rotation centralising devices of controller.It is actually used
When, it is also possible to the position of the horizontal translation mechanism and the vertical translation mechanism is interchangeable, now, the sample stage peace
It is mounted in the vertical translation mechanism, the vertical translation mechanism is arranged in the horizontal translation mechanism, and the level is flat
Telephone-moving structure is arranged on the rotating mechanism.
A kind of SEM as shown in Figure 6 is comprised the following steps with comprehensive associated image method：
Step one, sample are fixed：Sample 6 is fixed on the inside of the sample stage.
Step 2, rotary sample and image space determine that process is as follows：
Step 201, sample initial imaging position determine：Sample 6 is observed using the SEM, and to described
In SEM, the image space of sample 6 is determined, and now the image space of sample 6 is position P0。
Step 202, rotate clockwise for the first time and sample image space determine：By the rotating mechanism, by the sample
Sample platform edge synchronous with the translating device rotates clockwise, and rotational angle is α；After the completion of rotating clockwise, swept using described
Electron microscope observation sample 6 is retouched, and the image space to sample 6 in the SEM is determined, now sample
The image space of product 6 is position P1。
Step 203, rotate counterclockwise and sample image space determine：By the rotating mechanism, by the sample stage with
The translating device is synchronously rotated counterclockwise, and rotational angle is 2 α；After the completion of rotating counterclockwise, using the scanning electron
Micro- sem observation sample 6, and the image space to sample 6 in the SEM is determined, now sample 6 into
Image position is set to position P2。
Step 204, rotate clockwise for the second time：By the rotating mechanism, by the sample stage and the translating device
Synchronous edge rotates clockwise, and rotational angle is α；After the completion of rotating clockwise, the image space of sample 6 is position P0。
Step 3, image space contrast：By the position P described in step 2032With the position P described in step 2021, point
Not with the position P described in step 2010Contrasted：As position P2, position P1With position P0For same position when, illustrate sample
6 are laid in coaxial with horizontal rotating shaft 23, into step 5；Otherwise, sample 6 need to be translated, into step 4.
Step 4, sample translation, process are as follows：
Step 401, translational movement are calculated：According to formulaWith
Horizontal translation amount y of sample 6 is calculated respectively0With vertical translation amount z0, in public formula (I) and (II), Δ y1For position P1And position
Put P0Between spacing, Δ y2For position P2With position P0Between spacing；N is the multiplication factor of the SEM.
Wherein, horizontal translation amount y0For sample 6 and the spacing in the horizontal direction of horizontal rotating shaft 23, vertical translation amount z0For
The spacing of sample 6 and 23 in the vertical direction of horizontal rotating shaft.
Step 402, level and vertical translation：According to horizontal translation amount y calculated in step 4010And vertical translation
Amount z0, drive the sample stage to be translated in the horizontal direction by the horizontal translation mechanism, while by described vertical
Translation mechanism drives sample stage in the vertical direction synchronous with the horizontal translation mechanism to be translated, and sample 6 is translated
Extremely lay in coaxial with horizontal rotating shaft 23；Afterwards, into step 5.
Step 5,360 ° of sample are rotated and omnibearing imaging：By the rotating mechanism, drive the sample stage with it is described
The synchronous edge of translating device rotates clockwise or counterclockwise 360 °, and in rotation process, is observed using the SEM
Sample 6, and complete the omnibearing imaging process of sample 6.
To sum up, above-mentioned steps two are to the rotation centering process that step 4 is sample 6.Also, the rotation centering of the sample 6
Principle refers to Fig. 4；Rotation centering during, by SEM it was observed that sample 6 image space situation of change,
Refer to Fig. 5.
When actually used, to α=5 °～30 ° described in step 204 in step 201.In the present embodiment, in step 201
To α=10 ° described in step 204, when specifically used, according to specific needs the value size of α can be adjusted accordingly.
During actually used, sample 6 is carried out after rotation centering, particular by described by step 2 to step 4
Horizontal translation mechanism and the vertical translation mechanism are translated (horizontal translation amount y to sample 60With vertical translation amount z0)；Wait to put down
After moving on to position, the sample 6 is moved to be laid in coaxial with horizontal rotating shaft 23.So, driven by rotating mechanism in step 5
The sample stage is synchronous with the translating device along when rotating clockwise or counterclockwise 360 °, and the sample 6 is synchronous around its center
Axis carries out 360 ° of rotations；Also, in 360 ° of rotation processes, the sample 6 is observed in the SEM all the time
The visual field within.As sample 6 is laid in coaxial with horizontal rotating shaft 23, in such 360 ° of rotation processes, electron gun 7 arrives sample 6
The distance of central axis keep constant, and the SEM also keeps constant to the viewing distance of sample 6, leads to
360 ° of rotation samples 6 are crossed, the image on 6 each surface of sample can be obtained, and accordingly completed in SEM to enter sample 6
The process of row omnibearing imaging.
In the present embodiment, as shown in figure 5, the image space of the sample 6 be specially the sample 6 the inner into image position
Put, the inner of the sample 6 is the top of the cone.Also, in step 201 into step 203 to sample 6 into image position
Put when being determined, only need to export image of the sample 6 in SEM, and in sample 6 in institute's output image
The location of pixels at end is determined.Image of the sample 6 in SEM is two dimensional image.
In the present embodiment, before level and vertical translation are carried out in step 402, first according to sample 6 and horizontal rotating shaft 23
Relative position, is determined respectively to the horizontal translation direction and vertical translation direction of sample 6.
Wherein, when being determined to the horizontal translation direction of sample 6, judgement sample 6 be located at horizontal rotating shaft 23 front side or
Rear side：When judging to show that sample 6 is located at the front side of horizontal rotating shaft 23, illustrate the horizontal translation direction of sample 6 to translate backward；
Otherwise, when judging to show that sample 6 is located at the rear side of horizontal rotating shaft 23, illustrate the horizontal translation direction of sample 6 to translate forward；
When being determined to the vertical translation direction of sample 6, judgement sample 6 is located above or below horizontal rotating shaft 23：
When judging to show that sample 6 is located at the top of horizontal rotating shaft 23, illustrate that the vertical translation direction of sample 6 is translation downwards；Otherwise,
When judging to show that sample 6 is located at the lower section of horizontal rotating shaft 23, illustrate the vertical translation direction of sample 6 to translate up.
When driving the sample stage to be translated in the horizontal direction by the horizontal translation mechanism in step 402, root
According to determined by, horizontal translation direction is translated, and translational movement is y0；The sample stage is driven by the vertical translation mechanism
When in the vertical direction synchronous with the horizontal translation mechanism is translated, according to determined by, vertical translation direction is put down
Move, translational movement is z0。
It is when actually used, before level and vertical translation are carried out in step 402, relative with horizontal rotating shaft 23 to sample 6
When position is determined, the line on the basis of the central axis of horizontal rotating shaft 23 is tentatively judged to the position of sample 6.This reality
Apply in example, the sample 6 is located at the upper right side of horizontal rotating shaft 23.Thus, the horizontal translation direction of sample 6 is to translate forward and which
Vertical translation direction is translation downwards.
In the present embodiment, when level is carried out in step 402 with vertical translation, process is as follows：
Step 4021, first translation：The sample stage is driven in the horizontal direction forward by the horizontal translation mechanism
Or backward translation and translational movement be y0, while driving the sample stage and the horizontal translation machine by the vertical translation mechanism
Structure synchronization in the vertical direction is translated up or down and translational movement is z0；
Step 4022, translation judge in place：After the completion of first translation, first according to the method described in step 2, to sample 6
Carry out rotary sample and image space determines；Afterwards, according to the method described in step 401, calculate the horizontal translation of sample 6
Measure and vertical translation amount, now the horizontal translation amount and vertical translation amount of sample 6 is denoted as y respectively0' and z0’；Then, according to calculating
The y for drawing0' and z0', whether judgement sample 6 translates in place：Work as y0'=0 and z0During '=0, illustrate that sample 6 is translated in place, afterwards
Into step 5；Otherwise, into step 4023；
Step 4023, secondary translation, process are as follows：
Step I, translation direction and translational movement determine：According to the y calculated in step 40220', to during secondary translation
Horizontal translation direction is determined with horizontal translation amount：Work as y0During '=0, illustrate that sample 6 has been translated in place in the horizontal direction,
The horizontal translation amount of now secondary translation is 0；Work as y0'=2y0When, illustrate horizontal translation direction and the step 4021 of secondary translation
In first horizontal translation when translating it is in opposite direction, and the horizontal translation amount of secondary translation is 2y0；
Meanwhile, according to the z calculated in step 40220', to vertical translation direction during secondary translation and vertical translation
Amount is determined：Work as z0During '=0, illustrate that 6 in the vertical direction of sample has been translated in place, now the vertical translation of secondary translation
Measure as 0；Work as z0'=2z0When, illustrate the vertical translation direction of secondary translation and the vertical translation in step 4021 during first translation
It is in opposite direction, and the vertical translation amount of secondary translation is 2z0；
Step II, secondary translation：Translation direction and translational movement according to determined by step I, by the horizontal translation
Mechanism drives the sample stage to be translated in the horizontal direction, while driving the sample stage by the vertical translation mechanism
In the vertical direction synchronous with the horizontal translation mechanism is translated, and after the completion of translation, the sample 6 with horizontal rotating shaft 23 is in
It is coaxial to lay.
It is in the present embodiment, before rotary sample and image space determination are carried out in step 2, first aobvious to the scanning electron
The multiplication factor of micro mirror is adjusted, and the multiplication factor of the SEM is adjusted to 1；N=1 in step 401；
Carry out 360 ° of sample to rotate with before omnibearing imaging in step 5, first the multiplication factor of the SEM is carried out
Adjustment.
Before 360 ° of rotations of sample and omnibearing imaging are carried out in step 5, the times magnification to the SEM
Number is when being adjusted, specifically the actual observation needs according to sample 6, and the multiplication factor of the SEM is carried out
Adjustment.
As shown in figure 4, when carrying out rotation centering to sample 6, first setting up a space three-dimensional rectangular coordinate system, the three-dimensional straight
Angular coordinate system is with the central axis of the horizontal rotating shaft 23 as X-axis and with vertical direction as Z axis.Rotation centering is carried out to sample 6
When, method " reciprocating rotation-image space detection " method for being adopted.When rotating to sample 6 in step 2, operation is very
Simplicity, first obtains image space P of the sample 6 in SEM0, then rotate clockwise the rotating mechanism and rotation
Angle is α and records image space P of the sample 6 in SEM1, rotate counterclockwise afterwards the rotating mechanism and
Rotational angle is 2 α and records image space P of the sample 6 in SEM2, then rotate clockwise the rotation
Mechanism and rotational angle are α, and now sample is turned back to original position, and image space of the sample 6 in SEM
P0.So, by carrying out to sample 6 in step 2 during three rotations, and obtain image space P1, image space P2With into image position
Put P3, according to image space P1, image space P2With image space P3And rotational angle α, just can calculate 6 distance of sample
The distance of pivot (i.e. the central axis of horizontal rotating shaft 23), including horizontal translation amount y0With vertical translation amount z0；Then, lead to
The rotation centralising device is crossed, level and vertical translation is carried out to sample 6, and the sample 6 is moved to and horizontal rotating shaft 23
Central axis on.In the present embodiment, in step 2 to step 5, the SEM is observed simultaneously to sample 6
During imaging, imaging direction is for straight down.
During actually used, the rotary drive mechanism 24, vertical translation drive mechanism 33 and horizontal translation driving machine
Structure 43 is controlled by controller 9, thus actual manipulation is very easy.
In the present embodiment, rotary sample is carried out in step 2 and when image space determines, it is also possible to first pass through the rotation
Mechanism, the sample stage is synchronously rotated counterclockwise, and rotational angle is α with the translating device；Again by the rotation
Mechanism, the edge sample stage synchronous with the translating device is rotated clockwise, and rotational angle is 2 α；Afterwards, by described
Rotating mechanism, the sample stage and the translating device are synchronously rotated counterclockwise, and rotational angle is α, now sample 6 times
Go to initial position.
The above, is only presently preferred embodiments of the present invention, not the present invention is imposed any restrictions, every according to the present invention
Any simple modification, change and equivalent structure change that technical spirit is made to above example, still fall within skill of the present invention
In the protection domain of art scheme.
Claims (8)
1. the comprehensive auxiliary imaging system of a kind of SEM, it is characterised in that：Including aobvious installed in scanning electron
Rotation centralising device and the sample stage placed for scanned sample (6) on the pedestal (1) of micro mirror, the sample stage are arranged on institute
State on rotation centralising device；The rotation centralising device includes the translating device translated to the sample stage and drives described
The sample stage rotating mechanism rotated around horizontal rotating shaft (23) synchronous with the translating device, the rotating mechanism are arranged on pedestal
(1), on, the translating device is arranged on the rotating mechanism and which is located on the inside of the rotating mechanism, and the sample stage is fixed
On the translating device and which is located on the inside of the translating device；The sample (6) is on the inside of the sample stage and which is in
Horizontal layout, the sample (6) is with horizontal rotating shaft (23) in parallel laying；
The sample stage is to the vertical platform (5) laid in vertically；
The translating device includes the horizontal translation mechanism for driving the sample stage to carry out anterior-posterior translation in the horizontal direction and band
Dynamic sample stage in the vertical direction synchronous with the horizontal translation mechanism carries out the vertical translation mechanism of upper and lower translation, described
Sample stage is arranged in the horizontal translation mechanism, and the horizontal translation mechanism is arranged in the vertical translation mechanism, and institute
State vertical translation mechanism to be arranged on the rotating mechanism；The rotating mechanism, the vertical translation mechanism, the horizontal translation
Mechanism and the sample stage are laid from outside to inside；The pedestal (1) is in horizontal layout, the rotating mechanism, described vertical
Translation mechanism and the horizontal translation mechanism are in vertically to laying；
The rotating mechanism includes the vertical fixed seat (21) being fixedly mounted on pedestal (1) and is located in vertical fixed seat (21)
Side and the rotating seat (22) that can be rotated on vertical plane, the horizontal rotating shaft (23) are laid on the outside of rotating seat (22) and which
In vertical fixed seat (21), be provided with vertical fixed seat (21) and hole be horizontally mounted for what horizontal rotating shaft (23) was installed.
2. according to the comprehensive auxiliary imaging system of a kind of SEM described in claim 1, it is characterised in that：Institute
It is cone to state sample (6), and the bottom surface of the cone is fixed on the sample stage.
3., according to the comprehensive auxiliary imaging system of a kind of SEM described in claim 1 or 2, its feature exists
In：The vertical translation mechanism includes the first fixed plate (31) being fixedly mounted on rotating seat (22) and fixes installed in first
On the inside of plate (31) and can in the vertical direction carry out the vertical translation plate (32) of upper and lower translation, the vertical translation plate (32) is located at
On the inside of first fixed plate (31)；The horizontal translation mechanism includes the second fixed plate being fixedly mounted on vertical translation plate (32)
(41) and it is arranged on the inside of the second fixed plate (41) and can carry out in the horizontal direction the horizontal translation plate (42) of anterior-posterior translation, institute
The second fixed plate (41) is stated on the inside of vertical translation plate (32).
4. according to the comprehensive auxiliary imaging system of a kind of SEM described in claim 3, it is characterised in that：Also
The anglec of rotation detection that real-time detection is carried out including controller (9) and the anglec of rotation to rotating seat (22) and direction of rotation is single
First (25) and direction of rotation detector unit (26)；The rotating seat (22) is cylindrical pedestal, the rotating seat (22) and level
Rotating shaft (23) is in coaxial laying；The rotating mechanism also includes the rotation drive rotated on vertical plane by seat (22) is rotated
Motivation structure (24), the rotary drive mechanism (24) are connected with horizontal rotating shaft (23)；The vertical translation mechanism is also
Including the vertical translation drive mechanism (33) for driving vertical translation plate (32) to carry out upper and lower translation, the vertical translation drive mechanism
(33) it is connected with vertical translation plate (32)；The horizontal translation mechanism also includes driving horizontal translation plate (42) to carry out
The horizontal translation drive mechanism (43) of anterior-posterior translation, the horizontal translation drive mechanism (43) are passed with horizontal translation plate (42)
Dynamic connection；The rotary drive mechanism (24), vertical translation drive mechanism (33) and horizontal translation drive mechanism (43) are electricity
Dynamic drive mechanism, the rotary drive mechanism (24), vertical translation drive mechanism (33) and horizontal translation drive mechanism (43) are
It is controlled by controller (9) and three is connected with controller (9)；
Equipped with the vertical displacement detector unit that real-time detection is carried out to its upper and lower translational displacement on the vertical translation plate (32)
(34) equipped with the horizontal displacement detector unit that real-time detection is carried out to its anterior-posterior translation displacement, and on horizontal translation plate (42)
(44), the rotation angle detecting unit (25), direction of rotation detector unit (26), vertical displacement detector unit (34) and level
Displacement detecting unit (44) is connected with controller (9).
5. a kind of using the method that comprehensive auxiliary imaging system carries out comprehensive associated image as claimed in claim 1, which is special
Levy is that the method is comprised the following steps：
Step one, sample are fixed：Sample (6) is fixed on the inside of the sample stage；
Step 2, rotary sample and image space determine that process is as follows：
Step 201, sample initial imaging position determine：Using SEM observation sample (6), and sweep to described
The image space for retouching sample (6) in electron microscope is determined, and now the image space of sample (6) is position P0；
Step 202, rotate clockwise for the first time and sample image space determine：By the rotating mechanism, by the sample stage
Edge synchronous with the translating device rotates clockwise, and rotational angle is α；After the completion of rotating clockwise, using the scanning electricity
The micro- sem observation sample (6) of son, and the image space to sample (6) in the SEM is determined, now sample
The image space of product (6) is position P1；
Step 203, rotate counterclockwise and sample image space determine：By the rotating mechanism, by the sample stage with it is described
Translating device is synchronously rotated counterclockwise, and rotational angle is 2 α；After the completion of rotating counterclockwise, using the scanning electron microscopy
Sem observation sample (6), and the image space to sample (6) in the SEM is determined, now sample (6)
Image space is position P2；
Step 204, rotate clockwise for the second time：It is by the rotating mechanism, the sample stage is synchronous with the translating device
Edge rotates clockwise, and rotational angle is α；After the completion of rotating clockwise, the image space of sample (6) is position P0；
Step 3, image space contrast：By the position P described in step 2032With the position P described in step 2021, respectively with
Position P described in step 2010Contrasted：As position P2, position P1With position P0For same position when, illustrate sample (6)
Lay in coaxial with horizontal rotating shaft (23), into step 5；Otherwise, sample (6) need to be translated, into step 4；
Step 4, sample translation, process are as follows：
Step 401, translational movement are calculated：According to formulaWith
Horizontal translation amount y of sample (6) is calculated respectively0With vertical translation amount z0, in public formula (I) and (II), Δ y1For position P1With
Position P0Between spacing, Δ y2For position P2With position P0Between spacing；N is the times magnification of the SEM
Number；
Step 402, level and vertical translation：According to horizontal translation amount y calculated in step 4010With vertical translation amount z0,
The sample stage is driven to be translated in the horizontal direction by the horizontal translation mechanism, while passing through the vertical translation machine
Structure drives sample stage in the vertical direction synchronous with the horizontal translation mechanism to be translated, by sample (6) move to
Horizontal rotating shaft (23) is in coaxial laying；Afterwards, into step 5；
Step 5,360 ° of sample are rotated and omnibearing imaging：By the rotating mechanism, the sample stage and the translation are driven
The synchronous edge of device rotates clockwise or counterclockwise 360 °, and in rotation process, observes sample using the SEM
(6), and complete the omnibearing imaging process of sample (6).
6. in accordance with the method for claim 5, it is characterised in that：Before level and vertical translation are carried out in step 402, first root
According to sample (6) and the relative position of horizontal rotating shaft (23), the horizontal translation direction and vertical translation direction of sample (6) are entered respectively
Row determines；
Wherein, when being determined to the horizontal translation direction of sample (6), front side of the judgement sample (6) positioned at horizontal rotating shaft (23)
Or rear side：When judging sample (6) to be drawn positioned at the front side of horizontal rotating shaft (23), illustrate that the horizontal translation direction of sample (6) is
Translate backward；Otherwise, when judging sample (6) to be drawn positioned at the rear side of horizontal rotating shaft (23), illustrate the horizontal translation of sample (6)
Direction is to translate forward；
When being determined to the vertical translation direction of sample (6), judgement sample (6) positioned at the top of horizontal rotating shaft (23) or under
Side：When judging sample (6) to be drawn positioned at the top of horizontal rotating shaft (23), illustrate that the vertical translation direction of sample (6) is downward
Translation；Otherwise, when judging sample (6) to be drawn positioned at the lower section of horizontal rotating shaft (23), illustrate the vertical translation direction of sample (6)
To translate up；
When driving the sample stage to be translated in the horizontal direction by the horizontal translation mechanism in step 402, according to institute
It is determined that horizontal translation direction translated, translational movement is y0；The sample stage and institute are driven by the vertical translation mechanism
Horizontal translation mechanism synchronization in the vertical direction is stated when being translated, vertical translation direction is translated according to determined by, is put down
Shifting amount is z0。
7. in accordance with the method for claim 5, it is characterised in that：When level is carried out in step 402 with vertical translation, process is such as
Under：
Step 4021, first translation：By the horizontal translation mechanism drive the sample stage in the horizontal direction forward or to
Translate afterwards and translational movement is y0, while driving the sample stage same with the horizontal translation mechanism by the vertical translation mechanism
Step in the vertical direction is translated up or down and translational movement is z0；
Step 4022, translation judge in place：After the completion of first translation, first according to the method described in step 2, sample (6) is entered
Row rotary sample and image space determine；Afterwards, according to the method described in step 401, calculate the horizontal translation of sample (6)
Measure and vertical translation amount, now the horizontal translation amount and vertical translation amount of sample (6) is denoted as y respectively0' and z0’；Then, according to meter
The y for drawing0' and z0', whether judgement sample (6) translates in place：Work as y0'=0 and z0During '=0, illustrate that sample (6) is moved to
Position, afterwards into step 5；Otherwise, into step 4023；
Step 4023, secondary translation, process are as follows：
Step I, translation direction and translational movement determine：According to the y calculated in step 40220', to level during secondary translation
Translation direction is determined with horizontal translation amount：Work as y0During '=0, illustrate that sample (6) has been translated in place in the horizontal direction, this
The horizontal translation amount of Shi Erci translations is 0；Work as y0'=2y0When, in illustrating horizontal translation direction and the step 4021 of secondary translation
Horizontal translation during first translation is in opposite direction, and the horizontal translation amount of secondary translation is 2y0；
Meanwhile, according to the z calculated in step 40220', vertical translation direction during secondary translation and vertical translation amount are entered
Row determines：Work as z0During '=0, illustrate that sample (6) in the vertical direction has been translated in place, the vertical translation amount of now secondary translation
For 0；Work as z0'=2z0When, illustrate the vertical translation direction and the vertical translation side in step 4021 during first translation of secondary translation
To conversely, and secondary translation vertical translation amount be 2z0；
Step II, secondary translation：Translation direction and translational movement according to determined by step I, by the horizontal translation mechanism
The sample stage is driven to be translated in the horizontal direction, while driving the sample stage and institute by the vertical translation mechanism
State horizontal translation mechanism synchronization in the vertical direction to be translated, after the completion of translation, the sample (6) with horizontal rotating shaft (23) is in
It is coaxial to lay.
8. according to the method described in claim 5,6 or 7, it is characterised in that：Rotary sample and image space are carried out in step 2
It is determined that before, first the multiplication factor of the SEM is adjusted, and putting the SEM
Big multiple is adjusted to 1；N=1 in step 401；Before 360 ° of rotations of sample and omnibearing imaging are carried out in step 5, first to described
The multiplication factor of SEM is adjusted.
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| CN106199076B (en) * | 2016-07-26 | 2023-05-12 | 苏州衡微仪器科技有限公司 | Scanning tunnel microscope |
| CN106291854B (en) * | 2016-08-30 | 2018-11-30 | 中国科学院嘉兴微电子仪器与设备工程中心 | A kind of motion platform and the device and method of optical path installation and adjustment |
| CN112397365B (en) * | 2019-08-14 | 2022-06-14 | 中国科学院上海硅酸盐研究所 | Sample table suitable for TIC3X three-ion-beam cutting instrument |
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Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001229869A (en) * | 2000-02-16 | 2001-08-24 | Mitsubishi Electric Corp | Observation method and system |
| CN2828847Y (en) * | 2005-11-14 | 2006-10-18 | 广州和创电子科技有限公司 | Three-D rotation observation video microscope |
| CN1959416A (en) * | 2005-11-01 | 2007-05-09 | Fei公司 | Stage assembly, particle-optical apparatus comprising such a stage assembly, and method of treating sample |
| CN101436506A (en) * | 2007-10-17 | 2009-05-20 | 加州大学评议会 | Motorized manipulator for positioning a tem specimen |
| CN102027562A (en) * | 2008-03-15 | 2011-04-20 | 谢菲尔德大学 | Specimen holder assembly |
-
2015
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001229869A (en) * | 2000-02-16 | 2001-08-24 | Mitsubishi Electric Corp | Observation method and system |
| CN1959416A (en) * | 2005-11-01 | 2007-05-09 | Fei公司 | Stage assembly, particle-optical apparatus comprising such a stage assembly, and method of treating sample |
| CN2828847Y (en) * | 2005-11-14 | 2006-10-18 | 广州和创电子科技有限公司 | Three-D rotation observation video microscope |
| CN101436506A (en) * | 2007-10-17 | 2009-05-20 | 加州大学评议会 | Motorized manipulator for positioning a tem specimen |
| CN102027562A (en) * | 2008-03-15 | 2011-04-20 | 谢菲尔德大学 | Specimen holder assembly |
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