CN104155771A - Online monitoring device for micro-optics lens in semiconductor laser to be precisely adjusted and using method of online monitoring device - Google Patents
Online monitoring device for micro-optics lens in semiconductor laser to be precisely adjusted and using method of online monitoring device Download PDFInfo
- Publication number
- CN104155771A CN104155771A CN201410421443.8A CN201410421443A CN104155771A CN 104155771 A CN104155771 A CN 104155771A CN 201410421443 A CN201410421443 A CN 201410421443A CN 104155771 A CN104155771 A CN 104155771A
- Authority
- CN
- China
- Prior art keywords
- near field
- semiconductor laser
- far field
- ccd
- field
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Semiconductor Lasers (AREA)
- Lenses (AREA)
Abstract
The invention provides an online monitoring device for a micro-optics lens in a semiconductor laser to be precisely adjusted and a using method of the online monitoring device. According to the technical scheme, the method comprises the steps that a CCD is adopted as a light spot data collecting component, near-field light spot data and far-field light spot data are monitored online at the same time during adjusting of the micro-optics lens based on the light beam splitting principle, the near-field CCD light spot data change serves as the optimal space position basis of a rotating axis of the micro-optics lens, the far-field CCD light spot data change serves as the optimal space position basis of a displacement axis of the micro-optics lens, and the fast and slow axis light beam divergence angle and directivity of the semiconductor laser can be precisely controlled. The online monitoring device has the advantages of being high in system integrity, precise and reliable in monitored judgment data and the like. The low-divergence-angle and high-directivity semiconductor laser obtained based on the online monitoring device can be applied to various fields such as pumping solid lasers, medical treatment and industrial machining.
Description
Technical field
The present invention relates to laser technology application, in especially a kind of semiconductor laser, micro optical lens is realized accurate on-Line Monitor Device and the using method thereof of debuging.
Background technology
In the prior art, there is the advantages such as electro-optical efficiency is high, good reliability, miniaturization due to semiconductor laser, all developed rapidly and widespread use at aspects such as laser pumping source and direct application, particularly, as the pumping source of solid state laser and fiber laser, promote the fast development of all solid state laser.Semiconductor laser is due to the non-rotational symmetry waveguiding structure of itself, cause two axial angles of divergence larger and asymmetric, have a strong impact on its brightness and beam quality, the precision control of the angle of divergence and directive property is the prerequisite basic condition that semiconductor laser moves towards backend application.
Micro optical lens (FAC lens, SAC lens, BTS lens etc.) has that structure is small and exquisite, lightweight, collimation coupling efficiency advantages of higher, that semiconductor laser beam is realized high pointing accuracy, the low first-selected device of dispersing precise alignment, but such device is because the features such as focal length is little, size is little cause its assembly precision requirement very high, and General Requirements offset axis is to being the sub-milliradian magnitude of sub-micrometer scale, axial rotary.The monitoring system of debuging for semiconductor laser micro optical lens precision both at home and abroad at present cannot realize the on-line monitoring to micro optical lens six axle variable quantities simultaneously, need to debug in process switchable optics monitoring system back and forth at micro optical lens, and accurately influencing each other of displacement monitoring axle and turning axle, cannot reach the precision control requirement of semiconductor laser divergence angle and directive property.
Therefore the in real time accurate on-line monitoring that in semiconductor laser, micro optical lens precision is debug is that semiconductor laser is realized the angle of divergence and the accurate gordian technique of controlling of directive property always.
Summary of the invention
Object of the present invention, be exactly for the existing deficiency of prior art, and provide micro optical lens in a kind of semiconductor laser to realize the accurate on-Line Monitor Device of debuging and the technical scheme of using method thereof, this scheme is fixed to micro optical lens on six axle minute adjustment framves, adopt CCD as hot spot data acquisition element, based on light beam beam splitting principle, debug in process in micro optical lens precision, on-line monitoring near field and far-field spot data simultaneously, utilize the best spatial location criterion of near field CCD hot spot data variation as micro optical lens turning axle, utilize the best spatial location criterion of far field CCD hot spot data variation as micro optical lens offset axis, can realize the precision control of semiconductor laser fast and slow axis beam divergence angle and directive property.
This programme is achieved by the following technical measures:
In semiconductor laser, micro optical lens is realized an accurate on-Line Monitor Device of debuging, and includes semiconductor laser, micro optical lens, six axle minute adjustment framves, near field spectroscope, near field cylindrical lens, near field CCD, near field PC end, far field spectroscope, far field cylindrical lens, far field CCD, far field PC end and absorption cell; The laser beam that semiconductor laser is launched is through being fixed on directive near field spectroscope after micro optical lens on six axle minute adjustment framves; Laser beam after being reflected by near field spectroscope is through directive near field CCD after the cylindrical lens of near field; Near field CCD can hold the data transmission of collecting near field PC; Through spectroscopical laser beam directive far field, near field spectroscope; Laser beam after being reflected by far field spectroscope is through directive far field CCD after the cylindrical lens of far field; Far field CCD can hold the data transmission of collecting to far field PC; Through far field spectroscopical laser beam directive absorption cell.
As this programme preferably: the curvature of near field cylindrical lens distributes along the slow-axis direction of semiconductor laser; The spectroscopical reflectance near field is 1:1, and the incident angle of the spectroscopical laser beam in directive near field is 45 ° ± 1 °.
As this programme preferably: the curvature of far field cylindrical lens distributes along the quick shaft direction of semiconductor laser; The spectroscopical reflectance in far field is 7:3; The incident angle of the spectroscopical laser beam in directive far field is 45 ° ± 1 °.
In a kind of semiconductor laser, micro optical lens is realized the using method of the accurate on-Line Monitor Device of debuging: comprise the following steps:
Step 1: first set coordinate system: directions X is semiconductor laser slow-axis direction, Y-direction is semiconductor laser quick shaft direction, Z direction is semiconductor laser beam exit direction; Then micro optical lens is fixed on six axle adjusting brackets, by near field cylindrical lens, spectroscopical near field folded light beam is collected and entered in the CCD of near field simultaneously;
Step 2: by far field cylindrical lens, spectroscopical far field folded light beam is collected and entered in the CCD of far field, spectroscopical far field transmitted light beam is imported to absorption cell simultaneously;
Step 3: by the hot spot data variation of near field CCD, instruct six axle adjusting brackets that micro optical lens is adjusted to optimum position at three axial rotaries;
Step 4: by the hot spot data variation in the CCD of far field, instruct six axle adjusting brackets micro optical lens at three offset axises to being adjusted to optimum position.
As this programme preferably: in step 1, the curvature of near field cylindrical lens distributes along the slow-axis direction of semiconductor laser, its focal length is 300 ~ 500mm, and the spectroscopical reflectance near field is 1:1, and the incident angle of the spectroscopical laser beam in directive near field is 45 ° ± 1 °; In directions X and Y-direction, the be all not more than ± 0.1mm of geometric center deviation of the spectroscopical folded light beam barycenter near field and near field cylindrical lens, the be not more than ± 1mm of optimal imaging range deviation of near field CCD and near field cylindrical lens.
As this programme preferably: in step 2, the curvature of far field cylindrical lens distributes along the quick shaft direction of semiconductor laser, its focal length is 300 ~ 500mm, and the spectroscopical reflectance in far field is 7:3, and the incident angle of the spectroscopical laser beam in directive far field is 45 ° ± 1 °; In directions X and Y-direction, the be all not more than ± 0.1mm of geometric center deviation of the spectroscopical folded light beam barycenter in far field and far field cylindrical lens, the be not more than ± 1mm of rear focus deviation of far field CCD and far field cylindrical lens.
As this programme preferably: in step 3, the turning axle optimum position of micro optical lens is hot spot shadow-free around in the CCD of near field, leftmost side luminous point and the rightmost side be not more than ± 5 μ m of luminous point barycenter Y-direction deviation, all luminous point strength variances are less than ± and 0.1%.
As this programme preferably: in step 4, in requirement far field, the offset axis optimum position CCD of micro optical lens, reach minimum along Y-direction spot size.
The beneficial effect of this programme can be learnt according to the narration to such scheme, because this scheme is fixed to micro optical lens on six axle minute adjustment framves, adopt CCD as hot spot data acquisition element, based on light beam beam splitting principle, debug in process in micro optical lens precision, on-line monitoring near field and far-field spot data simultaneously, utilize the best spatial location criterion of near field CCD hot spot data variation as micro optical lens turning axle, utilize the best spatial location criterion of far field CCD hot spot data variation as micro optical lens offset axis, can realize the precision control of semiconductor laser fast and slow axis beam divergence angle and directive property.
As can be seen here, the present invention compared with prior art, there is the features such as level of integrated system is high, monitoring criterion is accurate reliable, the low divergence of realizing based on this invention, the semiconductor laser of high directivity can be applicable to the various fields such as light-pumped solid state laser, medical treatment and industrial processes, have outstanding substantive distinguishing features and progressive significantly, the beneficial effect of its enforcement is also apparent.
Brief description of the drawings
Fig. 1 is the structural representation of the specific embodiment of the invention.
In figure, 1 is semiconductor laser, and 2 is micro optical lens, and 3 is six axle minute adjustment framves, and 4 is near field spectroscope, 5 is near field cylindrical lens, and 6 is near field CCD, and 7 is near field PC end, and 8 is far field spectroscope, 9 is far field cylindrical lens, and 10 is far field CCD, and 11 is far field PC end, and 12 is absorption cell.
Embodiment
For clearly demonstrating the technical characterstic of this programme, below by an embodiment, and in conjunction with its accompanying drawing, this programme is set forth.
First set coordinate system: directions X is semiconductor laser slow-axis direction, Y-direction is semiconductor laser quick shaft direction, Z direction is semiconductor laser beam exit direction, micro optical lens is fixed on six axle adjusting brackets, with the bright dipping of direct supply driving semiconductor laser, regulate six axle adjusting brackets, noise spectra of semiconductor lasers is carried out preliminary collimation.
On the semiconductor laser beam transmission path of preliminary collimation, place the near field spectroscope that reflectance is 1:1, the angle of near field spectroscope and incident laser light beam constrains within the scope of (45 ± 1) °.
On the spectroscope folded light beam transmission path of near field, place near field cylindrical lens, the angle of near field cylindrical lens and near field spectroscope folded light beam constrains within the scope of (0 ± 1) °, the distance of semiconductor laser exiting surface and near field cylindrical lens is greater than the twice of near field cylindrical lens focal length simultaneously, in X and Y-direction, the all be not more than ± 0.1mm of geometric center deviation of the spectroscopical folded light beam barycenter near field and near field cylindrical lens, the be not more than ± 1mm of optimal imaging range deviation of near field CCD and near field cylindrical lens.
On the spectroscope transmitted light beam transmission path of near field, place the far field spectroscope that reflectance is 7:3, the angle of far field spectroscope and near field spectroscope transmitted light beam constrains within the scope of (45 ± 1) °.
On the spectroscope folded light beam transmission path of far field, place far field cylindrical lens, the angle of far field cylindrical lens and far field spectroscope folded light beam constrains within the scope of (0 ± 1) °, in X and Y-direction, the all be not more than ± 0.1mm of geometric center deviation of the spectroscopical folded light beam barycenter in far field and far field cylindrical lens, be not more than ± the 1mm of rear focus deviation of far field CCD and far field cylindrical lens imports absorption cell by spectroscopical far field transmitted light beam simultaneously.
Adopt six axle adjusting brackets to carry out minute adjustment to micro optical lens offset axis and turning axle, best spatial location criterion by near field CCD hot spot data variation as micro optical lens turning axle, best spatial location criterion by far field CCD hot spot data variation as micro optical lens offset axis, hot spot shadow-free around in requirement near field, the turning axle optimum position CCD of micro optical lens, leftmost side luminous point and the rightmost side be not more than ± 5 μ m of luminous point barycenter Y-direction deviation, all luminous point strength variances are less than ± and 0.1%; In requirement far field, the offset axis optimum position CCD of micro optical lens, reach minimum along Y-direction spot size.
The present invention is not only confined to above-mentioned embodiment, and persons skilled in the art, according to content disclosed by the invention, can adopt other concrete embodiments to implement the present invention and reach the object that realizes of the present invention.Therefore, every employing project organization of the present invention and thinking, carry out a bit or design that some points simply convert, change, all falls into the scope of protection of the invention.
Claims (8)
1. in semiconductor laser, micro optical lens is realized an accurate on-Line Monitor Device of debuging, and it is characterized in that: include semiconductor laser, micro optical lens, six axle minute adjustment framves, near field spectroscope, near field cylindrical lens, near field CCD, near field PC end, far field spectroscope, far field cylindrical lens, far field CCD, far field PC end and absorption cell; The laser beam that described semiconductor laser is launched is through being fixed on directive near field spectroscope after micro optical lens on six axle minute adjustment framves; Described by the laser beam after near field spectroscope reflection through directive near field CCD after the cylindrical lens of near field; Described near field CCD can hold the data transmission of collecting near field PC; Described through spectroscopical laser beam directive far field, near field spectroscope; Described by the laser beam after far field spectroscope reflection through directive far field CCD after the cylindrical lens of far field; Described far field CCD can hold the data transmission of collecting to far field PC; Described through far field spectroscopical laser beam directive absorption cell.
2. in a kind of semiconductor laser according to claim 1, micro optical lens is realized the accurate on-Line Monitor Device of debuging, and it is characterized in that: the curvature of described near field cylindrical lens distributes along the slow-axis direction of semiconductor laser; The spectroscopical reflectance in described near field is 1:1, and the incident angle of the spectroscopical laser beam in directive near field is 45 ° ± 1 °.
3. in a kind of semiconductor laser according to claim 1, micro optical lens is realized the accurate on-Line Monitor Device of debuging, and it is characterized in that: the curvature of described far field cylindrical lens distributes along the quick shaft direction of semiconductor laser; The spectroscopical reflectance in described far field is 7:3; The incident angle of the spectroscopical laser beam in directive far field is 45 ° ± 1 °.
4. the using method of the accurate on-Line Monitor Device of debuging of micro optical lens realization in a semiconductor laser: it is characterized in that comprising the following steps:
Step 1: first set coordinate system: directions X is semiconductor laser slow-axis direction, Y-direction is semiconductor laser quick shaft direction, Z direction is semiconductor laser beam exit direction; Then micro optical lens is fixed on six axle adjusting brackets, by near field cylindrical lens, spectroscopical near field folded light beam is collected and entered in the CCD of near field simultaneously;
Step 2: by far field cylindrical lens, spectroscopical far field folded light beam is collected and entered in the CCD of far field, spectroscopical far field transmitted light beam is imported to absorption cell simultaneously;
Step 3: by the hot spot data variation of near field CCD, instruct six axle adjusting brackets that micro optical lens is adjusted to optimum position at three axial rotaries;
Step 4: by the hot spot data variation in the CCD of far field, instruct six axle adjusting brackets micro optical lens at three offset axises to being adjusted to optimum position.
5. the using method of the accurate on-Line Monitor Device of debuging of micro optical lens realization in a kind of semiconductor laser according to claim 4, it is characterized in that: in described step 1, the curvature of near field cylindrical lens distributes along the slow-axis direction of semiconductor laser, its focal length is 300 ~ 500mm, the spectroscopical reflectance near field is 1:1, and the incident angle of the spectroscopical laser beam in directive near field is 45 ° ± 1 °; In directions X and Y-direction, the be all not more than ± 0.1mm of geometric center deviation of the spectroscopical folded light beam barycenter near field and near field cylindrical lens, the be not more than ± 1mm of optimal imaging range deviation of near field CCD and near field cylindrical lens.
6. the using method of the accurate on-Line Monitor Device of debuging of micro optical lens realization in a kind of semiconductor laser according to claim 4, it is characterized in that: in described step 2, the curvature of far field cylindrical lens distributes along the quick shaft direction of semiconductor laser, its focal length is 300 ~ 500mm, the spectroscopical reflectance in far field is 7:3, and the incident angle of the spectroscopical laser beam in directive far field is 45 ° ± 1 °; In directions X and Y-direction, the be all not more than ± 0.1mm of geometric center deviation of the spectroscopical folded light beam barycenter in far field and far field cylindrical lens, the be not more than ± 1mm of rear focus deviation of far field CCD and far field cylindrical lens.
7. the using method of the accurate on-Line Monitor Device of debuging of micro optical lens realization in a kind of semiconductor laser according to claim 4, it is characterized in that: in described step 3, the turning axle optimum position of micro optical lens is hot spot shadow-free around in the CCD of near field, leftmost side luminous point and the rightmost side be not more than ± 5 μ m of luminous point barycenter Y-direction deviation, all luminous point strength variances are less than ± and 0.1%.
8. the using method of the accurate on-Line Monitor Device of debuging of micro optical lens realization in a kind of semiconductor laser according to claim 4, it is characterized in that: in described step 4, in requirement far field, the offset axis optimum position CCD of micro optical lens, reach minimum along Y-direction spot size.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410421443.8A CN104155771B (en) | 2014-08-26 | 2014-08-26 | In a kind of semiconductor laser, micro optical lens realizes the using method of the on-Line Monitor Device that precision is debug |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410421443.8A CN104155771B (en) | 2014-08-26 | 2014-08-26 | In a kind of semiconductor laser, micro optical lens realizes the using method of the on-Line Monitor Device that precision is debug |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN104155771A true CN104155771A (en) | 2014-11-19 |
| CN104155771B CN104155771B (en) | 2016-08-24 |
Family
ID=51881311
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201410421443.8A Active CN104155771B (en) | 2014-08-26 | 2014-08-26 | In a kind of semiconductor laser, micro optical lens realizes the using method of the on-Line Monitor Device that precision is debug |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN104155771B (en) |
Cited By (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104865052A (en) * | 2015-06-09 | 2015-08-26 | 西安炬光科技有限公司 | Method and device for testing spatial light beam contour of multi-luminescence unit semiconductor laser |
| CN104897372A (en) * | 2015-06-09 | 2015-09-09 | 西安炬光科技有限公司 | Near-field nonlinear automatic test method for multi-light-emitting-unit semiconductor laser, and device thereof |
| CN105140769A (en) * | 2015-09-28 | 2015-12-09 | 湖北航天技术研究院总体设计所 | Spectral-combined beam overlapping detection and adjustment device |
| CN109802293A (en) * | 2019-03-12 | 2019-05-24 | 西北核技术研究所 | A kind of external instruction light of laser safely introduces system and method |
| CN110161511A (en) * | 2019-04-30 | 2019-08-23 | 探维科技(北京)有限公司 | A kind of laser radar system |
| US10712667B2 (en) | 2016-12-14 | 2020-07-14 | Asml Netherlands B.V. | Optical device and associated system |
| CN112014977A (en) * | 2020-09-21 | 2020-12-01 | 温州泛波激光有限公司 | FAC mirror adjusting device and adjusting method thereof |
| CN112197940A (en) * | 2020-09-15 | 2021-01-08 | 中国科学院上海光学精密机械研究所 | Single-optical-path precise measurement near-far field reference and collimation device |
| CN113376857A (en) * | 2021-06-08 | 2021-09-10 | 福州市纳飞光电科技有限公司 | High-precision optical light path debugging device and debugging method thereof |
| CN113390615A (en) * | 2021-07-13 | 2021-09-14 | 王龙祥 | Device and method for testing comprehensive performance of fast axis lens |
| CN116053934A (en) * | 2023-03-28 | 2023-05-02 | 度亘核芯光电技术(苏州)有限公司 | Laser fast and slow axis collimation method and device |
| US11914166B2 (en) | 2019-01-28 | 2024-02-27 | Panasonic intellectual property Management co., Ltd | Systems and methods for alignment of wavelength beam combining resonators |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2099299U (en) * | 1991-08-30 | 1992-03-18 | 华中理工大学 | Non-contact type ultra-precise surface measuring equipment |
| DE4218988A1 (en) * | 1992-06-10 | 1993-12-16 | Zeiss Carl Jena Gmbh | Centring measuring system for adjustment and testing of lenses or optical systems - has test object rotation angle sensor, laser, exchangeable objectives, half-wave plate for intensity regulation, light valve consisting of polarisation beam divider and quarter wave plate, and CCD line camera. |
| CN204101825U (en) * | 2014-08-26 | 2015-01-14 | 中国工程物理研究院应用电子学研究所 | In a kind of semiconductor laser, micro optical lens realizes the accurate on-Line Monitor Device debug |
-
2014
- 2014-08-26 CN CN201410421443.8A patent/CN104155771B/en active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2099299U (en) * | 1991-08-30 | 1992-03-18 | 华中理工大学 | Non-contact type ultra-precise surface measuring equipment |
| DE4218988A1 (en) * | 1992-06-10 | 1993-12-16 | Zeiss Carl Jena Gmbh | Centring measuring system for adjustment and testing of lenses or optical systems - has test object rotation angle sensor, laser, exchangeable objectives, half-wave plate for intensity regulation, light valve consisting of polarisation beam divider and quarter wave plate, and CCD line camera. |
| CN204101825U (en) * | 2014-08-26 | 2015-01-14 | 中国工程物理研究院应用电子学研究所 | In a kind of semiconductor laser, micro optical lens realizes the accurate on-Line Monitor Device debug |
Non-Patent Citations (1)
| Title |
|---|
| 郭林辉: "二极管激光器垂直阵列光束精密准直", 《强激光与粒子束》, vol. 23, no. 3, 31 March 2011 (2011-03-31) * |
Cited By (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104865052A (en) * | 2015-06-09 | 2015-08-26 | 西安炬光科技有限公司 | Method and device for testing spatial light beam contour of multi-luminescence unit semiconductor laser |
| CN104897372A (en) * | 2015-06-09 | 2015-09-09 | 西安炬光科技有限公司 | Near-field nonlinear automatic test method for multi-light-emitting-unit semiconductor laser, and device thereof |
| CN105140769A (en) * | 2015-09-28 | 2015-12-09 | 湖北航天技术研究院总体设计所 | Spectral-combined beam overlapping detection and adjustment device |
| CN105140769B (en) * | 2015-09-28 | 2018-06-26 | 湖北航天技术研究院总体设计所 | A kind of Spectral beam combining light beam overlapping detection adjusting apparatus |
| US10712667B2 (en) | 2016-12-14 | 2020-07-14 | Asml Netherlands B.V. | Optical device and associated system |
| US11914166B2 (en) | 2019-01-28 | 2024-02-27 | Panasonic intellectual property Management co., Ltd | Systems and methods for alignment of wavelength beam combining resonators |
| CN109802293A (en) * | 2019-03-12 | 2019-05-24 | 西北核技术研究所 | A kind of external instruction light of laser safely introduces system and method |
| CN110161511A (en) * | 2019-04-30 | 2019-08-23 | 探维科技(北京)有限公司 | A kind of laser radar system |
| CN112197940A (en) * | 2020-09-15 | 2021-01-08 | 中国科学院上海光学精密机械研究所 | Single-optical-path precise measurement near-far field reference and collimation device |
| CN112197940B (en) * | 2020-09-15 | 2022-09-02 | 中国科学院上海光学精密机械研究所 | Single-optical-path precise measurement near-far field reference and collimation device |
| CN112014977A (en) * | 2020-09-21 | 2020-12-01 | 温州泛波激光有限公司 | FAC mirror adjusting device and adjusting method thereof |
| CN113376857A (en) * | 2021-06-08 | 2021-09-10 | 福州市纳飞光电科技有限公司 | High-precision optical light path debugging device and debugging method thereof |
| CN113390615A (en) * | 2021-07-13 | 2021-09-14 | 王龙祥 | Device and method for testing comprehensive performance of fast axis lens |
| CN116053934A (en) * | 2023-03-28 | 2023-05-02 | 度亘核芯光电技术(苏州)有限公司 | Laser fast and slow axis collimation method and device |
| CN116053934B (en) * | 2023-03-28 | 2023-08-22 | 度亘核芯光电技术(苏州)有限公司 | Laser fast and slow axis collimation method and device |
Also Published As
| Publication number | Publication date |
|---|---|
| CN104155771B (en) | 2016-08-24 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN104155771A (en) | Online monitoring device for micro-optics lens in semiconductor laser to be precisely adjusted and using method of online monitoring device | |
| CN204101825U (en) | In a kind of semiconductor laser, micro optical lens realizes the accurate on-Line Monitor Device debug | |
| CN104836114B (en) | A kind of fast and slow axis beam quality homogenizer of semiconductor laser | |
| CN103176226A (en) | Dodging special-shaped lens used for shaping semiconductor laser leams, dodging laser source and optical system | |
| CN204044360U (en) | A kind of scanning type laser distance measuring equipment with light splitting piece | |
| US10955618B2 (en) | Fiber coupling device | |
| CN103399413B (en) | Double helix light beam-based sample axial drift detection and compensation method and device | |
| CN1825786A (en) | Composite feedback control vibration compensating system based on CCD | |
| CN205484801U (en) | Laser range finder's optical axis timing system | |
| CN202904126U (en) | Linear light beam shaping optics system | |
| CN103809246B (en) | Optical fiber end cap fusion splicing devices and welding process thereof | |
| CN106680945B (en) | A kind of light collimation coupling operational platform | |
| CN104977665A (en) | Laser and optical fiber coupler and coupling method | |
| CN103252575A (en) | Optical transmission method and system for laser material machining | |
| CN105334587A (en) | Solid laser fiber coupling alignment method and apparatus | |
| CN102721368B (en) | Offline precise calibrator and calibration method for beam target coupling sensor | |
| CN103364897A (en) | Lens system for coupling single mode lasers | |
| CN204565419U (en) | A kind of processing unit (plant) realizing cone of nulls degree and back taper boring | |
| CN206960793U (en) | A kind of optical system for producing multi-thread high-quality laser | |
| CN106767403A (en) | A kind of optical axis position error detection method of many optical axis optical systems | |
| CN203101668U (en) | Dodging lens, dodging laser light source and optical system used for shaping semiconductor laser beam | |
| CN102436066A (en) | Method and device for adjusting internal/external diameters of hollow beams | |
| CN104966986A (en) | Directive test system for assembling laser array | |
| CN104690423A (en) | Machining device and method capable of realizing zero taper and reverse taper drilling | |
| CN105371830A (en) | Laser marking device based on cone off-axis reflection |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20191230 Address after: 330029 10th floor, science and technology building, Lianchuang photoelectric technology park, 168 Jingdong Avenue, Nanchang high tech Industrial Development Zone, Nanchang City, Jiangxi Province Patentee after: Jiangxi ZHONGJIU Laser Technology Co.,Ltd. Address before: 919 box 1013, box 621000, Mianyang City, Sichuan Province Patentee before: INSTITUTE OF APPLIED ELECTRONICS, CAEP |
|
| TR01 | Transfer of patent right | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20230924 Address after: Room 517, 5th Floor, Building 1, Linrui Youth Apartment, No. 955 Rulehu Street, Linkong Economic Zone, Nanchang City, Jiangxi Province, 330117 Patentee after: ZHONGJIU Optoelectronic Industry Co.,Ltd. Address before: 10th Floor, Science and Technology Building, Lianchuang Optoelectronic Technology Park, No. 168 Jingdong Avenue, Nanchang High tech Industrial Development Zone, Nanchang City, Jiangxi Province, 330029 Patentee before: Jiangxi ZHONGJIU Laser Technology Co.,Ltd. |
|
| TR01 | Transfer of patent right |