CN103913479B - A kind of device for detecting grating scale thermal coefficient of expansion - Google Patents
A kind of device for detecting grating scale thermal coefficient of expansion Download PDFInfo
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- CN103913479B CN103913479B CN201410116780.6A CN201410116780A CN103913479B CN 103913479 B CN103913479 B CN 103913479B CN 201410116780 A CN201410116780 A CN 201410116780A CN 103913479 B CN103913479 B CN 103913479B
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- 238000005259 measurement Methods 0.000 claims description 10
- 239000000463 material Substances 0.000 claims description 9
- 239000003550 marker Substances 0.000 claims description 2
- 238000005516 engineering process Methods 0.000 abstract description 4
- 238000000034 method Methods 0.000 description 8
- 239000011521 glass Substances 0.000 description 7
- 238000001514 detection method Methods 0.000 description 4
- 238000006073 displacement reaction Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 241000886545 Leptodea leptodon Species 0.000 description 1
- 229910000831 Steel Inorganic materials 0.000 description 1
- 239000004411 aluminium Substances 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000007572 expansion measurement Methods 0.000 description 1
- 230000001788 irregular Effects 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 210000000707 wrist Anatomy 0.000 description 1
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- Length Measuring Devices By Optical Means (AREA)
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Abstract
A kind of device for detecting grating scale thermal coefficient of expansion, relate to a kind of device for detecting grating scale thermal coefficient of expansion, the problem solving the thermal expansion occurred in existing grating measuring technology, including thermostat, measuring motion, grating scale fixed mount and signal processing circuit, wherein, thermostat includes temperature-measuring element, a temperature control component.Measuring motion is for measuring the positional value through temperature adjustmemt of grating ruler reading head, grating scale fixed mount is used for fixing grating scale to be measured, grating scale to be measured is the grating scale that can provide the position readings without temperature-compensating, signal processing circuit is for processing from grating scale and the length signals of measuring motion, from the temperature signal of temperature sensor, and then obtain the thermal coefficient of expansion of this grating scale to be measured.
Description
Technical field
The present invention relates to a kind of device for detecting grating scale thermal coefficient of expansion, for accurately measuring grating scale
Thermal coefficient of expansion.
Background technology
Grating scale (also referred to as optical grid line displacement sensor) is the position reading that modern displacement measurement system is commonly used
Device, is divided into open type and closed from structure, point includes steel belt grating chi and glass raster from material
Chi, functionally comes to divide to include increment type grating scale and absolute grating scale, the grating scale of these types is extensive
Use in machine tool industry and other processing, handle and in pilot system, owing to processing environment complexity is various, temperature
Degree difference is big, adds that to produce the local of temperature man-hour uneven etc., all there is thermal expansion effects, without right
Thermal expansion compensates, and machining accuracy will be by large effect.
Thermal expansion is compensated, first has to know the thermal coefficient of expansion of grating scale, by thermal coefficient of expansion just
Grating scale reading can be modified.
The measurement of typical thermal coefficient of expansion includes that optical lever surveys expansion coefficients of metal wire, and present Application comparison is wide
General is that in calorstat, interferometric method measures thermal coefficient of expansion.But these measuring methods are mainly both for spy
Fixed material, and often it is directed to a kind of material, grating scale is often then the complex of many kinds of substance,
Such as closed glass grating scale is the glass bonding complex to metal scale shell, and its thermal coefficient of expansion is no longer
Unification studies the thermal coefficient of expansion of timesharing, but the interactional result of multiple material, secondly, grating scale
Global shape is irregular, and glass main scale is inside chi shell, and in grating scale to be detected, the thermal coefficient of expansion of glass is used
Usual way has bigger difficulty, the most applicable.If the feature of grating scale own and reading can be utilized, knot
Close laser interferometer detection thermal coefficient of expansion, then be not only simple in structure, easy to operate, and reliable results.
Summary of the invention
The problem that the present invention solves the thermal expansion occurred in existing grating measuring technology, it is provided that heat is swollen reliably
Swollen penalty coefficient, it is provided that a kind of device for detecting grating scale thermal coefficient of expansion based on grating scale product.
A kind of device for detecting grating scale thermal coefficient of expansion, including enclosed housing, for constant casing
The thermostat of interior air themperature, for measuring the standard measuring motion of grating ruler reading head position to be measured, uses
In the second temperature-measuring element of main scale material temperature and the signal processing apparatus of measuring grating scale to be measured；Its
Feature is, by the same tested point of different temperatures on point location main scale identical for grating scale reading to be measured；Standard
Measuring motion measures the distance on grating scale to be measured between different tested points, and described signal processing apparatus is not according to
On same temperature spot, the distance measured between point that standard measuring motion is measured is with this distance at different temperatures
Variable quantity calculate these two and measure the thermal coefficient of expansion of grating scale section between point.
Beneficial effects of the present invention: structure and the measuring method of device of the present invention are specifically designed for grating scale
The feature of composite, utilizes the positioning function of grating scale reading itself, effectively solves thermal expansion measurement
Two ends orientation problem crucial in technology, matching standard measuring motion, utilize multimetering, can not only measure
The thermal coefficient of expansion of grating scale, and thermal coefficient of expansion change on grating scale can be obtained.
Accompanying drawing explanation
Fig. 1 is the structural representation of a kind of device for detecting grating scale thermal coefficient of expansion of the present invention；
Fig. 2 is that in a kind of device for detecting grating scale thermal coefficient of expansion of the present invention, signal connection is shown
It is intended to；
Fig. 3 is the operation stream using a kind of device for detecting grating scale thermal coefficient of expansion of the present invention
Journey block diagram.
Detailed description of the invention
Detailed description of the invention one, combine Fig. 1 to Fig. 3 and illustrate that present embodiment, one are used for detecting grating skin between medial elbow and wrist being hot
The device of the coefficient of expansion, including, a detection device box 1, as the closed box of whole device；One constant temperature
Device 2, for the air themperature within constant detection device box 1, this thermostat farther includes first
Temperature-measuring element 2-2, for measuring the air themperature of this measurement box house, a temperature control component 2-1,
According to the reading of the first temperature-measuring element, this detection device box is heated or freezed；One standard
Measuring motion 3, measures grating scale 5 read head position to be measured；One grating scale fixing device 6, is used for fixing to be checked
Survey grating scale 5；Fix on the table 7；One second temperature-measuring element, is used for measuring grating scale master to be measured
The material temperature of chi；One signal processing apparatus, for processing from grating scale 5 to be detected, standard side growth device
3, the signal of temperature-measuring element obtain Coefficient of Thermal Expansion value；Point identical for grating scale 5 reading to be detected
Positioning the same tested point under different temperatures on grating scale main scale 5-1 to be detected, standard measuring motion 3 is measured to be measured
Distance between different tested points on grating scale 5, the second temperature-measuring element 4 measures grating scale main scale 5-1's to be measured
Material temperature, signal processing apparatus 9 according on different temperature spots, the measurement that standard measuring motion 3 is measured
Distance and this distance variable quantity at different temperatures between point calculate these two and measure grating section between point
Thermal coefficient of expansion.
Grating scale to be measured described in present embodiment is absolute grating scale, or is the increment of band reference marker
Formula grating scale.Described standard measuring motion 3 can be have temperature compensation function laser interferometer or
Grating scale.Described grating scale to be measured can be reflective or transmission-type.
In present embodiment, near same temperature point, for two of a grating scale section to be detected treat
Measuring point, two different temperatures, measure the distance between these two temperature values and this two tested points respectively, make
It is one group of measurement data, and calculates the thermal coefficient of expansion of correspondence, repeat this process n time altogether (n is more than or equal to 2),
The arithmetic mean of instantaneous value of the thermal coefficient of expansion that n time is obtained is as the thermal coefficient of expansion between these two tested points.Same
Near temperature, grating scale to be measured arranges m tested point (m is more than or equal to 3), to adjacent tested point
Measure thermal coefficient of expansion, the thermal coefficient of expansion of different sections at a temperature of being somebody's turn to do.
In conjunction with Fig. 2 present embodiment is described, described signal processing apparatus 9, for process from grating scale to be measured,
The signal of standard side growth device the 3, second temperature-measuring element 4 also obtains Coefficient of Thermal Expansion value；Grating to be measured
Same tested point under different temperatures on the point location grating scale to be measured main scale 5 that chi reading is identical, in this enforcement
In the middle of the practical operation of mode, reading difference can be approximately same much smaller than two different readings of swell increment
One point, such as, for aluminium, the coefficient of expansion is about 2.3 × 10-5℃-1, for measuring the grating scale of 1m,
1℃-1Swell increment be 23 microns, described criterion can be set as less than or equal to 0.1 micron, i.e. phase
The difference absolute value point less than or equal to 0.1 micron is approximately same point.Standard measuring motion 3 measures grating to be measured
Distance between two different tested points on chi 5, the second temperature-measuring element 4 measures glass in grating scale 5 to be measured
The material temperature of glass main scale, signal processing apparatus 9 is according on the temperature spot different at two, and standard surveys long dress
The variable quantity between the two different temperature points of the distance measured between point and this distance of putting 3 measurements calculates
Measure the thermal coefficient of expansion of grating section between point for these two.Operating process combines Fig. 3,
In the present embodiment, it is assumed that in measuring for the first time, by whole measurement system constant temperature to 20 degrees Celsius,
It is T1 (changing measured temperature very close to 20 degrees Celsius) that second temperature-measuring element 4 records temperature, to be measured
Grating scale section, standard measuring equipment 3 records this section of two ends reading and is respectively S1_1, S1_2, and grating scale to be measured
5 record this section of two ends reading is respectively D1_1, D1_2.Changing temperature, in the present embodiment, temperature changes
Relative value should be more than or equal to 2 degrees Celsius, such as temperature raises about 5 degrees Celsius, and now the second temperature is surveyed
It is T2 that amount element 4 records temperature, and in grating scale section to be measured, standard measuring equipment 3 records this section of two ends reading
It is respectively S2_1, S2_2, and grating scale to be measured 5 records this section of two ends reading and is respectively D2_1 (with D1_1
Differ less than 0.1 micron), D2_2 (differs less than 0.1 micron with D2_1).Then this is measured,
To realize calculated below in signal processing apparatus 9, the thermal coefficient of expansion lt obtaining this grating scale section is:
In the middle of present embodiment, grating scale 5 to be measured has absolute measurement function, i.e. on grating scale to be measured
The reading of every bit is all unique, can be absolute grating scale, can obtain current exhausted at any time
To position readings, or the increment type grating scale of band reference bit, current location can be obtained in the middle of reading process
Absolute location information.So measuring the thermal coefficient of expansion obtained can be corresponding with a certain section of determination of grating scale.
The invention is not restricted to above-mentioned embodiment, as utilized above-mentioned ultimate principle, this standard measuring motion is permissible
It is the high accuracy grating scale with temperature compensation function, so can be substantially reduced the cost of device, and more hold
Easily install.This grating scale to be measured is possible not only to be transmission-type grating chi, and can be reflective gratings chi,
So substantially increase the range of application of this device.Near same temperature point, for a grating to be detected
The tested point at the two ends of chi section, two different temperatures, measure these two temperature values and these two tested points respectively
Between distance, as one group of measurement data, and calculate the thermal coefficient of expansion of correspondence, repeat this process n altogether
Secondary (n is more than or equal to 2), the arithmetic mean of instantaneous value of the thermal coefficient of expansion that n time is obtained is as these two tested points
Between thermal coefficient of expansion, so measure the thermal coefficient of expansion that obtains and there is higher stability.At same temperature
Near, grating scale to be measured arranges m tested point (m is more than or equal to 3), adjacent tested point is measured
Thermal coefficient of expansion, at a temperature of being somebody's turn to do, the thermal coefficient of expansion of different sections, is so possible not only to obtain each grating scale section
The different coefficients of expansion, compares the uniformity of the grating scale coefficient of expansion, grating scale can be made to obtain more accurate simultaneously
Temperature-compensating.
Claims (7)
1. for detecting a device for grating scale thermal coefficient of expansion, including enclosed housing (1), for perseverance
Determine the thermostat (2) of casing (1) interior air themperature, for measuring the mark of grating ruler reading head position to be measured
Quasi-measuring motion (3), for measuring the second temperature survey of main scale (5-1) material temperature of grating scale to be measured
Element (4) and signal processing apparatus；It is characterized in that, by point location main scale identical for grating scale reading to be measured
(5-1) the same tested point of upper different temperatures；Standard measuring motion measures different tested points on grating scale to be measured
Between distance, described signal processing apparatus (9) according on different temperature spots, standard measuring motion (3)
The distance measured between point measured and this distance variable quantity at different temperatures calculate these two and measure point
Between the thermal coefficient of expansion of grating scale section；Near same temperature, grating scale to be detected (5) arranges m
Tested point, m is more than or equal to 3；Adjacent tested point is measured thermal coefficient of expansion, it is thus achieved that not same district at a temperature of Gai
The thermal coefficient of expansion of section.
A kind of device for detecting grating scale thermal coefficient of expansion the most according to claim 1, its feature
Being, described thermostat (2) includes the first temperature-measuring element (2-2), is used for measuring this measurement casing
Internal air themperature, temperature control component (2-1), according to the reading of the first temperature-measuring element (2-2),
Casing (1) is heated or freezed.
A kind of device for detecting grating scale thermal coefficient of expansion the most according to claim 1, its feature
It is, also includes grating scale fixing device (6), be used for fixing grating scale to be detected.
A kind of device for detecting grating scale thermal coefficient of expansion the most according to claim 1, its feature
Being, grating scale to be measured is absolute grating scale, or is the increment type grating scale of band reference marker.
A kind of device for detecting grating scale thermal coefficient of expansion the most according to claim 1, its feature
Being, described standard measuring motion (3) is laser interferometer or the grating scale with temperature compensation function.
A kind of device for detecting grating scale thermal coefficient of expansion the most according to claim 1, its feature
Being, described grating scale to be detected (5) is reflective or transmission-type.
A kind of device for detecting grating scale thermal coefficient of expansion the most according to claim 1, its feature
It is, near same temperature point, for the tested point of two of grating scale (5) to be detected, with two
Different temperatures, measures two distances between temperature value and the tested point at two ends respectively, measures number as one group
According to, and calculating corresponding thermal coefficient of expansion, repeated measure n time, n is more than or equal to 2, the heat obtained n time
The arithmetic mean of instantaneous value of the coefficient of expansion is as the thermal coefficient of expansion between these two tested points.
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| CN201410116780.6A CN103913479B (en) | 2014-03-26 | 2014-03-26 | A kind of device for detecting grating scale thermal coefficient of expansion |
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| CN201410116780.6A CN103913479B (en) | 2014-03-26 | 2014-03-26 | A kind of device for detecting grating scale thermal coefficient of expansion |
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| JP6931574B2 (en) * | 2017-08-31 | 2021-09-08 | 株式会社ミツトヨ | Thermal expansion coefficient measuring device and thermal expansion coefficient measuring method |
| CN111692976B (en) * | 2020-06-08 | 2022-09-09 | 中国科学院合肥物质科学研究院 | Digital display length reference device with temperature deformation self-compensation function |
| CN113701658B (en) * | 2021-09-01 | 2022-08-09 | 中国科学院长春光学精密机械与物理研究所 | Thermal deformation detection device and method for absolute grating ruler in non-uniform temperature field |
| CN114353435A (en) * | 2022-01-12 | 2022-04-15 | 重庆国际复合材料股份有限公司 | Method for guiding glass fiber drying process and drying device |
| CN117783199B (en) * | 2024-02-27 | 2024-05-14 | 中国科学院长春光学精密机械与物理研究所 | Device and method for detecting linear expansion coefficient |
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| CN101140249A (en) * | 2007-10-23 | 2008-03-12 | 北京科技大学 | Double light beam laser interferometry method of material thermal expansion coefficient |
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| CN101140249A (en) * | 2007-10-23 | 2008-03-12 | 北京科技大学 | Double light beam laser interferometry method of material thermal expansion coefficient |
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