CN103901228A - Accelerometer - Google Patents
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- CN103901228A CN103901228A CN201410138619.9A CN201410138619A CN103901228A CN 103901228 A CN103901228 A CN 103901228A CN 201410138619 A CN201410138619 A CN 201410138619A CN 103901228 A CN103901228 A CN 103901228A
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Abstract
The invention discloses an accelerometer which comprises a substrate and an accelerometer body fixed to the substrate. The accelerometer body comprises a plurality of parallel-connection sensing units, wherein each sensing unit comprises a mass block, a first fixed base and a tooth set, two longitudinal ends of the mass blocks are fixedly connected with the substrate through elastic pieces, the elastic pieces are arranged at two longitudinal ends of the mass blocks, the first ends of the mass blocks are fixedly connected with the substrate, the first fixed bases are arranged on transverse side faces of the mass blocks and are fixedly connected with the substrate, the tooth sets are arranged between the first fixed bases and the mass blocks, and each tooth set comprises a plurality of fixed teeth which are fixed to the first fixed bases, extend in the transverse direction and are spaced from one another in the longitudinal direction, and a plurality of movable teeth which are staggered between the fixed teeth and fixed to the mass blocks. Through the parallel connection of the sensing units, the sensitivity and resolution are improved, and the nonlinearity of acceleration full range is improved through capacitance changes of a variable area.
Description
Technical field
The present invention relates to Micromechanical Inertial Instruments technical field, specifically, relate to a kind of accelerometer.
Background technology
High range micro-mechanical accelerometer in fields such as blast, shock-testings all tool have been widely used.In these application scenarios, the amplitude of instantaneous strike acceleration may exceed 100000g, and shock duration very short (conventionally in hundreds of microsecond), therefore needs accelerometer to have higher range and resonance frequency.
Capacitance silicon micromechanical accelerometer has technical maturity, frequency response is high, low in energy consumption, temperature drift is little and anti-overload ability unique advantage such as strong, the requirement that it can meet high range and high resonance frequency is the accelerometer with high g values type that a kind of development potentiality is larger.
The version of condenser type high range silicon micromechanical accelerometer mainly contains two kinds at present: the structure with reference capacitance of the torsional pendulum type structure in U.S. Draper laboratory and Sandia National Laboratory of the U.S..A kind of high range micro-mechanical accelerometer that is applied to shell has been developed in nineteen ninety in Draper laboratory, and it adopts torsion bar to support the seesaw type structure of pendulum, and range reaches 100000g, and 15h offset drift is 44g, and nonlinearity is 3.1%.The arrangements of accelerometers unit of Sandia lab design comprises reference capacitance, Detection capacitance and brace summer, and transducer range reaches 50000g, and resolution is 50g, and resonance frequency is 151kHz, and second-order modal separates than being 1.59.But these two kinds of accelerometers are and become the outer sensitive form of clearance plane, and anti-overload ability still can not meet some specific (special) requirements.
Existing high range micro-mechanical accelerometer is generally operational in open loop situations, and when high amplitude acceleration input, the distortion of sensor sensing quality is larger, and the responsive mode of variable condenser of above-mentioned two kinds of accelerometers can cause gamut linearity variation.Be subject to the restriction of range and resonance frequency, the sensitivity of existing high range micro-mechanical accelerometer is less.These problems have all restricted the further raising of condenser type high range micro-mechanical accelerometer performance.
Based on above-mentioned situation, need the High-g accelerometer that a kind of linearity is good, highly sensitive badly.
Summary of the invention
For addressing the above problem, the invention provides a kind of accelerometer, comprise substrate and be fixed on described on-chip accelerometer main body, described acceleration main body comprises the sensing unit of some parallel connections,
Wherein, described sensing unit comprises:
Mass, its longitudinal two ends are affixed by elastic component and described substrate, and described elastic component is arranged on longitudinal two ends of described mass, and its first end and described substrate are affixed;
Be arranged on first holder transverse side, affixed with described substrate of described mass;
Be arranged on the tooth group between described the first holder and mass, it comprises: be fixed on some teeth of determining described the first holder, that extend transversely, longitudinally each interval; Crisscross described some some moving teeth between tooth, that be fixed on described mass of determining;
In the time that accelerometer has acceleration, described elastic component produces deformation along the direction contrary with acceleration, make described moving tooth and determine that right opposite between tooth is long-pending correspondingly to be increased or reduce, the electric capacity that causes described moving tooth and determine between tooth correspondingly increases thereupon or reduces, thereby obtains acceleration according to described capacitance variations.
According to one embodiment of present invention, described sensing unit also comprises the second holder another transverse side, affixed with described substrate that is arranged on described mass,
Between described the second holder and mass, be provided with tooth group, it comprises: be fixed on some teeth of determining described the second holder, that extend transversely and longitudinally each interval; Crisscross some some moving teeth between tooth, that be fixed on described mass of determining.
According to one embodiment of present invention, adjacent moving tooth equates with the gap of determining between tooth.
According to one embodiment of present invention, described mass is H shape structure, and the middle part of the second end of described elastic component and H shape structure is affixed.
According to one embodiment of present invention, described mass is provided with damping hole, to regulate the quality of described mass.
According to one embodiment of present invention, described elastic component comprises some flexure strips of arranging side by side along horizontal direction.
According to one embodiment of present invention,
Between the first end of the elastic component in different sensing units, connect by described on-chip metal routing;
Between the first holder in different sensing units, connect by described on-chip metal routing;
Between the second holder in different sensing units, connect by described on-chip metal routing.
According to one embodiment of present invention, described substrate material is glass or silicon.
Accelerometer provided by the invention has improved basic electric capacity by multiple sensitive segment unit mode in parallel, and this is conducive to improve sensitivity and the resolution of accelerometer, improves the measuring accuracy of accelerometer.Meanwhile, the present invention adopts the capacitance variations mode of variable area, and compared to the capacitance variations mode in existing change gap, this mode not only can be eliminated unintentional nonlinearity factor, can also improve the license mobility scale of moving tooth, is conducive to improve the range of sensor.
Meanwhile, the mode that the elastic component in accelerometer provided by the invention adopts multiple flexure strips to connect side by side.Like this, the in the situation that of same support stiffness, compared to existing accelerometer, which has higher modal separation ratio, the intersecting axle coupling influence of consistent accelerometer better, thus reduce the transversal effect of accelerometer.Contribute to like this to reduce the measuring error of accelerometer, improve the accuracy of accelerometer.And adopt the mode that multiple flexure strips connect side by side can also make the parameter area of the flexure strip that meets performance requirement increase, the adjustment while being conducive to structural design.
Accelerometer provided by the invention adopts the responsive mode of variable area, the compatible existing scheme of processing technology.This accelerometer can be by combined with existing high range silicon micromechanical accelerometer structure, realize three axle high range silicon micromechanical accelerometers integrated of single-chip, for further improving accelerometer performance, reduce accelerometer cost and volume has improved feasibility.
Other features and advantages of the present invention will be set forth in the following description, and, partly from instructions, become apparent, or understand by implementing the present invention.Object of the present invention and other advantages can be realized and be obtained by specifically noted structure in instructions, claims and accompanying drawing.
Accompanying drawing explanation
In order to be illustrated more clearly in the embodiment of the present invention or technical scheme of the prior art, will do simple introduction to needed accompanying drawing in embodiment or description of the Prior Art below:
Fig. 1 is the structural drawing of accelerometer according to an embodiment of the invention;
Fig. 2 is the structural drawing of sensing unit in accelerometer provided by the invention;
Fig. 3 a is the tooth group structural representation in existing accelerometer;
Fig. 3 b is the tooth group structural representation in accelerometer provided by the invention;
Fig. 4 is elastic component parameter-relation chart according to an embodiment of the invention.
Embodiment
Describe embodiments of the present invention in detail below with reference to drawings and Examples, to the present invention, how application technology means solve technical matters whereby, and the implementation procedure of reaching technique effect can fully understand and implement according to this.It should be noted that, only otherwise form conflict, each feature in each embodiment and each embodiment in the present invention can mutually combine, and the technical scheme forming is all within protection scope of the present invention.
The structural drawing of the accelerometer providing according to the present embodiment is provided Fig. 1.
As shown in Figure 1, in the present embodiment, accelerometer comprises substrate 101 and is fixed on the accelerometer main body 102 on substrate 101.Wherein, accelerometer main body 102 comprises the sensing unit 103 of some parallel connections.Multiple sensing unit 103 parallel connections can effectively improve the basic electric capacity of accelerometer, thereby contribute to improve sensitivity and the resolution of accelerometer, also contribute to improve the measuring accuracy of accelerometer.
Fig. 2 shows the structural drawing of the sensing unit 103 of the accelerometer that the present embodiment provides.
As shown in Figure 2, in the present embodiment, sensing unit 103 comprises mass 201, elastic component 202 and the first holder 203.In order further to form the differential version of electric capacity, eliminate common mode interference, the sensing unit that the present embodiment provides also comprises the second holder 204, but the invention is not restricted to this.
Longitudinal (along y direction of principal axis) two ends of mass 201 are affixed by elastic component 202 and substrate 101.And elastic component 202 is arranged on longitudinal both sides of mass 201, its first end 202a is with to be fixed on fixed pedestal 205 on substrate 101 affixed, and the second end 202b and mass 201 are affixed.As can be seen from Figure 2, in the present embodiment, mass 201 has adopted H shape structure, and the second end 202b of elastic component 202 and the middle part of H shape structure are affixed.
When accelerometer is inputted at high range, non-sensitive direction (being y axle and the z direction of principal axis in the present embodiment) response can increase, and the increase that the party upwards responds can produce larger measuring error.In order to reduce the response in the non-sensitive direction of accelerometer, namely reduce the transversal effect of accelerometer, in the present embodiment, elastic component 202 is made up of some flexure strips 209 of arranging side by side along horizontal direction (being x direction of principal axis).This structure of elastic component 202 can effectively improve the modal separation ratio of accelerometer, thereby can effectively reduce the transversal effect of accelerometer, contributes to reduce the measuring error of accelerometer, improves the degree of accuracy of accelerometer.
In the time that accelerometer has an acceleration, elastic component 202 can produce deformation along the direction contrary with this acceleration, thereby makes the distance between mass 201 and the first holder 203 and the second holder 204 correspondingly increase respectively or reduce.And variation that accelerometer is the distance based between mass 201 and the first holder 203 and the second holder 204 realizes the measurement of acceleration.
Again as shown in Figure 2, in the present embodiment, on mass 201, be also provided with some damping holes 206.Under different situations, the quality requirement difference of mass 201.So by damping hole 206 is set on mass 201, quality that can quality of regulation piece 201.The quantity of damping hole 206 is fewer, and the quality of mass 201 is larger; The quantity of damping hole 206 is more, and the quality of mass 201 is just less.Within the specific limits, the quality of mass 201 is larger, and accelerometer is also just sensitiveer.So by adjusting the quality of mass 201, can adjust the sensitivity of accelerometer.
In addition, from Fig. 2, it can also be seen that, the first holder 203 and the second holder 204 are separately positioned on the both sides of mass 201 horizontal (being x direction of principal axis) sides, and they are fixed in respectively on substrate 101.Meanwhile, between the first holder 203 and mass 201, be provided with tooth group between the second holder 204 and mass 201.This tooth group comprises: be fixed on the first holder and the second holder, longitudinally (being y direction of principal axis) each interval some determine tooth 208; Be fixed on mass 201, crisscross the some moving tooth 207 of determining between tooth 208.
Fig. 3 a shows the tooth group structural drawing in existing accelerometer, and Fig. 3 b shows the tooth group structural drawing in the accelerometer that the present embodiment provides.
From Fig. 3 a, can find out, existing accelerometer adopts the responsive mode that becomes gap.In the time that accelerometer has an acceleration along y axle, moving tooth 301 can be along producing displacement with the direction of this acceleration opposite direction, thereby the distance that makes moving tooth 301 and determine between tooth 302 correspondingly increases or reduces, thereby cause moving tooth 301 and determine the electric capacity respective change between tooth 302.Can reflect the acceleration of accelerometer by the variation of this electric capacity.
But the mode in this change gap can cause the gamut linearity variation of open loop accelerometer, thereby cause the measuring error of accelerometer to become large.In order to address this problem, in the present embodiment, accelerometer adopts the mode of variable area as shown in Figure 3 b.
As shown in Figure 3 b, in the present embodiment, when accelerometer has one during along the axial acceleration of x, moving tooth 207 can produce displacement along the direction contrary with this acceleration, thereby make moving tooth 207 correspondingly increase or reduce with the corresponding area of determining between tooth 208, thereby cause moving tooth 207 and determine the electric capacity respective change between tooth 208.Variation by this electric capacity can reflect the acceleration that now accelerometer has.The responsive mode of variable area that the present embodiment adopts not only can improve the moving range of moving tooth 207, thereby the range of increased acceleration meter can also improve the non-linear of accelerometer gamut, and this contributes to improve the degree of accuracy of accelerometer.
In order further to improve the non-linear of accelerometer gamut, in the present embodiment, adjacent moving tooth 207 equates with the gap of determining between tooth 208.
Meanwhile, the responsive mode of variable area that the accelerometer that the present embodiment provides adopts, the processing technology of the compatible existing accelerometer of its processing technology.This mode can be by combined with existing high range silicon micromechanical accelerometer structure, realize three axle high range silicon micromechanical accelerometers integrated of single-chip, this may for further improving that performance of accelerometer, the volume that reduces accelerometer and cost provide.
Again as shown in Figure 1, for the elastic component in the different sensing units of accelerometer provided by the present invention, between their first ends, connect by the metal routing 103 on substrate 101, between the first holder, also connect by the metal routing 103 on substrate 101, between the second holder, connect by the metal routing 103 on substrate 101 equally, so just realized the parallel connection of multiple sensing units.
From Fig. 1, it can also be seen that, in order further to optimize the structure of accelerometer, reduce volume and the cost of accelerometer, in the present embodiment, two adjacent fixed pedestals 205 can be reduced to a fixed pedestal, but the invention is not restricted to this.
According to the application characteristic of high range micro-mechanical accelerometer, when specific design, need to consider the resonance frequency of accelerometer microstructure, the impact that second-order modal separates the performance index such as ratio, anti-overload ability and sensitivity.Below by designing an accelerometer that meets preset requirement, so that the performance of the accelerometer obtaining by design comes advantage provided by the invention to do to set forth further.
In the present embodiment, the preset requirement of accelerometer is:
Range a
max>=20e4g, resonance frequency f
0>=200kHz, second-order modal separates and compares ψ
0>=2, the acceleration of microstructure is to the sensitivity S of electric capacity conversion
ca0>=1e-6pF/g.
By to the researching and analysing of preset requirement and flexure strip, the present embodiment has obtained, under the quantity of difference flexure strip in parallel, meeting the parameter area of the flexure strip of designing requirement, and this parameter area as shown in Figure 4.
Fig. 4 shows in the time being connected with side by side 6 flexure strips and 2 flexure strips simultaneously, for meeting above-mentioned designing requirement, and the desirable scope of the physical dimension of flexure strip.As can be seen from Figure 4,, in the time that the quantity of the flexure strip connecting is side by side different, in order to meet design requirement, the physical dimension of flexure strip also needs to change accordingly.Under certain limit, in the time that the quantity of the flexure strip connecting side by side increases, the physical dimension scope that meets the flexure strip of design objective requirement also increases, and while being conducive to design, adjusts flexibly.
In the present embodiment, elastic component is set as being connected and composed side by side by 6 flexure strips, the width of flexure strip is set as 9.5 μ m, by the graph of a relation shown in Fig. 4, is 190 μ m by the length setting of flexure strip.
In the present embodiment, the length (along the axial length of x) of determining tooth and moving tooth is all made as to 50 μ m, the width (along z direction of principal axis) of determining tooth and moving tooth is all made as 5 μ m, determine the long 45 μ m of lap of tooth and moving tooth, the long 5 μ m of non-overlapped part, adjacent gap of determining tooth and moving tooth is 4 μ m, and tooth group logarithm is 17 × 2, and the equivalent mass of single sensing unit is 1.03e-9kg.
In addition, in the present embodiment, sensing unit adopts 6 × 6 parallel form, and the one-sided basic electric capacity of accelerometer is 4.88pF like this, and chip area is 3.4mm × 3.9mm.
According to above-mentioned parameter, the basic mechanical design feature index of the related accelerometer obtaining of the present embodiment is as follows:
Range 200000g, resonance frequency 266.2kHz, second-order modal separates than 2.5, microstructure sensitivity 8.37e-6pF/g.
This shows, compared to existing accelerometer, the accelerometer that the present embodiment provides has higher range, resonance frequency and sensitivity.This accelerometer also has higher second-order modal separation ratio simultaneously, and this can effectively reduce the response of the non-sensitive direction of accelerometer, thereby improves accuracy and the reliability of acceleration.
Although the disclosed embodiment of the present invention as above, the embodiment that described content just adopts for the ease of understanding the present invention, not in order to limit the present invention.Technician in any the technical field of the invention; do not departing under the prerequisite of the disclosed spirit and scope of the present invention; can do any modification and variation what implement in form and in details; but scope of patent protection of the present invention, still must be as the criterion with the scope that appending claims was defined.
Claims (8)
1. an accelerometer, comprises substrate and is fixed on described on-chip accelerometer main body, it is characterized in that, described acceleration main body comprises the sensing unit of some parallel connections,
Wherein, described sensing unit comprises:
Mass, its longitudinal two ends are affixed by elastic component and described substrate, and described elastic component is arranged on longitudinal two ends of described mass, and its first end and described substrate are affixed;
Be arranged on first holder transverse side, affixed with described substrate of described mass;
Be arranged on the tooth group between described the first holder and mass, it comprises: be fixed on some teeth of determining described the first holder, that extend transversely, longitudinally each interval; Crisscross described some some moving teeth between tooth, that be fixed on described mass of determining;
In the time that accelerometer has acceleration, described elastic component produces deformation along the direction contrary with acceleration, make described moving tooth and determine that right opposite between tooth is long-pending correspondingly to be increased or reduce, the electric capacity that causes described moving tooth and determine between tooth correspondingly increases thereupon or reduces, thereby obtains acceleration according to described capacitance variations.
2. accelerometer as claimed in claim 1, is characterized in that, described sensing unit also comprises the second holder another transverse side, affixed with described substrate that is arranged on described mass,
Between described the second holder and mass, be provided with tooth group, it comprises: be fixed on some teeth of determining described the second holder, that extend transversely and longitudinally each interval; Crisscross some some moving teeth between tooth, that be fixed on described mass of determining.
3. accelerometer as claimed in claim 2, is characterized in that, adjacent moving tooth equates with the gap of determining between tooth.
4. accelerometer as claimed in claim 2 or claim 3, is characterized in that, described mass is H shape structure, and the middle part of the second end of described elastic component and H shape structure is affixed.
5. the accelerometer as described in any one in claim 1～4, is characterized in that, described mass is provided with damping hole, to regulate the quality of described mass.
6. the accelerometer as described in any one in claim 1～5, is characterized in that, described elastic component comprises some flexure strips of arranging side by side along horizontal direction.
7. accelerometer as claimed in claim 2, is characterized in that,
Between the first end of the elastic component in different sensing units, connect by described on-chip metal routing;
Between the first holder in different sensing units, connect by described on-chip metal routing;
Between the second holder in different sensing units, connect by described on-chip metal routing.
8. the accelerometer as described in any one in claim 1～7, is characterized in that, the material of described substrate is glass or silicon.
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| CN201410138619.9A CN103901228B (en) | 2014-04-08 | 2014-04-08 | A kind of accelerometer |
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| CN201410138619.9A CN103901228B (en) | 2014-04-08 | 2014-04-08 | A kind of accelerometer |
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Cited By (1)
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| CN114487482A (en) * | 2022-01-14 | 2022-05-13 | 瑞声开泰科技(武汉)有限公司 | Acceleration sensor |
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