CN103062318B - Zero-rigidity vibration isolator with coplace air flotation orthogonal decoupling and two-dimensional flexible hinge angle decoupling - Google Patents
Zero-rigidity vibration isolator with coplace air flotation orthogonal decoupling and two-dimensional flexible hinge angle decoupling Download PDFInfo
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- CN103062318B CN103062318B CN201210577110.5A CN201210577110A CN103062318B CN 103062318 B CN103062318 B CN 103062318B CN 201210577110 A CN201210577110 A CN 201210577110A CN 103062318 B CN103062318 B CN 103062318B
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Abstract
The invention discloses a zero-rigidity vibration isolator with coplace air flotation orthogonal decoupling and two-dimensional flexible hinge angle decoupling and belongs to the technical field of precise vibration isolation. A sleeve of the main body of the vibration isolator and an air flotation plate are lubricated and supported by an air flotation surface, a piston sleeve and the sleeve are lubricated and supported by the air flotation surface, the freedom of the horizontal linear motion between an upper installation plate and a lower installation plate is decoupled through a coplace orthogonal air flotation guide rail, the freedom of angular motion between the upper installation plate and the lower installation plate is decoupled through a two-dimensional flexible hinge, and a voice coil motor, a displacement sensor, a limiting switch and controller and a driver form a position closed-loop feedback control system to accurately control the relative positions of the upper installation plate and the lower installation plate. The zero-rigidity vibration isolator has the advantages of being zero in three-dimensional rigidity, high in positioning accuracy, and capable of performing linear motion freedom decoupling and angular motion freedom decoupling, and can effectively meet the high-performance requirements of ultra-precise measurement instruments and processing equipment, particularly step scanning photoetching machines.
Description
Technical field
The invention belongs to accurate vibration isolation technical field, relate generally to the Zero-rigidity vibration isolator of a kind of coplanar air supporting crossing decoupling and the decoupling zero of two-dimension flexible hinge angle.
Background technique
Along with improving constantly of Ultra-precision Turning and measuring accuracy, ambient vibration becomes the key factor that restriction Ultra-precision Turning equipment improves with surveying instrument precision and performance.Especially step-by-step scanning photo-etching device is the vlsi circuit process unit of representative, technology-intensive degree and complexity high, key technical index all reaches the limit of prior art, represent the highest level of Ultra-precision Turning equipment, precision isolation system becomes the core key technology in this type of equipment; The live width of step-by-step scanning photo-etching device has reached 22nm and following, silicon chip positioning precision and alignment precision all reach a few nanometer, and work stage movement velocity reaches more than 1m/s, work stage acceleration reaches tens times of gravity accleration, and this proposes new challenge to existing vibration isolation technique.First, lithography machine needs for metering system and photoetched object lens provide the working environment of " super quiet ", need again to drive simultaneously work stage at full speed with High acceleration motion, this proposes extremely harsh requirement to the anti-vibration performance of vibrating isolation system, and the natural frequency in its three directions all needs to reach below 1Hz; Secondly, relative position between each parts of lithography machine, the distance of such as photoetched object lens and silicon chip surface, all there is very strict requirement, and under the control being in position closed loop feedback control system, require that the relative positional accuracy between the upper and lower mounting plate of vibration isolator reaches 10 μm of magnitudes, the positioning precision of traditional vibration isolator can not meet the demands far away.
According to theory of vibration isolation, the natural frequency of passive type vibration isolator is directly proportional to rigidity, be inversely proportional to load quality, therefore, under the prerequisite that load quality is certain, the rigidity reducing vibration isolator is the effective way reducing natural frequency, improve low frequency and superlow frequency vibration isolating performance.There are the intrinsic contradictions of static bearing capacity and rigidity in the vibration isolator of the forms such as conventional air bellows, restrict by the factor such as material behavior, structural rigidity simultaneously, will reduce its rigidity, especially level further very difficult to rigidity.For this problem, " pendulum " formula structure is incorporated in air cushion shock absorber by researcher, reaches object (the 1.Nikon Corporation.Vibration Isolator With Low Lateral Stiffness. U.S. Patent Publication No.: US20040065517A1 reducing vibration isolator horizontal rigidity; 2.U.S.Philips Corporation.Positioning Device with a Force Actuator Systemfor Compensating Center-of-gravity Displacements, and Lithographic Device Provided with Such APositioning Device. U.S. Patent number: US005844664A).The method can reduce the horizontal rigidity of air cushion shock absorber to a certain extent, promotes its low frequency vibration isolation performance.The method Problems existing is: 1) restrict by material behavior and structural rigidity, the vertical limited extent reduced to rigidity with level of vibration isolator; 2) the vertical and level of air cushion shock absorber is all very poor to positioning precision, cannot meet the requirement of photoetching process; 3) lower horizontal rigidity to be reached and need larger pendulum length, cause vibration isolator height excessive, easily string membrane resonance occurs, poor stability.
By visible to the analysis of existing air cushion shock absorber technological scheme, existing air cushion shock absorber is difficult to meet the requirement of lithography machine to ultralow rigidity and high position precision.IDE company of Germany proposes a kind of vibration isolator technological scheme (1.Integrated Dynamics Engineering GmbH.Isolatorgeometrie EinesSchwingungsisolationssystem. european patent number: EP1803965A2 of abandoning tradition rubber air spring; 2.Integrated Dynamics EngineeringGmbH.Schwingungsisolationssystem Mit Pneumatischem Tiefpassfilter. european patent number: EP1803970A2; 3.Integrated Dynamics Engineering GmbH.Air Bearing with Consideration ofHigh-Frequency Resonances. U.S. Patent Publication No.: US20080193061A1).Program employing is vertical carries out decoupling zero and vibration isolation to air bearing surface to the vibration of all directions with level, can reach extremely low rigidity and natural frequency.Program Problems existing is: 1) in public technology scheme, vibration isolator cannot realize accurate location; 2), in patent EP1803965A2, there is not the angular motion degrees of freedom around horizontal rotational shaft between upper and lower mounting plate, the angular rigidity in this direction and natural frequency are all very high; Patent EP1803970A2 and US20080193061A1 adopts block rubber to provide angular motion degrees of freedom around horizontal rotational shaft for upper and lower mounting plate, but because block rubber angular rigidity is very large, effectively cannot carry out angular motion freedom decoupling, there is frictional force between angular motion freedom decoupling mechanism part and introduce additional stiffness, restriction anti-vibration performance.
ASML company of Holland it is also proposed similar vibration isolator technological scheme (1.U.S.Philips Corp, ASM LithographyB.V.Pneumatic Support Device with A Controlled Gas Supply, and Lithographic Device Providedwith Such A Support Device. U.S. Patent number: US006144442A; 2.Koninklijke Philips ElectronicsN.V., ASM Lithography B.V.Lithographic Pneumatic Support Device with Controlled Gas Supply. International Patent Publication No.: WO99/22272; 3.ASML Netherlands B.V.Support Device, LithographicApparatus, and Device Manufacturing Method Employing A Supporting Device, and A PositionControl System Arranged for Use in A Supporting Device. U.S. Patent number: US007084956B2; 4.ASML Netherlands B.V.Support Device, Lithographic Apparatus, and Device ManufacturingMethod Employing A Supporting Device and A Position Control System Arranged for Use in ASupporting Device. european patent number: EP1486825A1).In patent US006144442A and WO99/22272, closed-loop feedback control is carried out to bleed pressure, reach and improve the stability of vibration isolator and the object of performance; On upper mounting plate, be provided with vibration transducer in patent US007084956B2 and EP1486825A1, introduce with reference to vibration system simultaneously, promoted the anti-vibration performance of vibration isolator by control algorithm.But propose technological scheme and still do not solve the accurate location of vibration isolator and the angular motion freedom decoupling problem of upper and lower mounting plate.
Summary of the invention
The object of the invention is for ultra precise measurement instrument and process unit, especially the vlsi circuit process unit such as step-by-step scanning photo-etching device is to the low natural frequency of vibration isolator, the an urgent demand of high position precision, the Zero-rigidity vibration isolator of a kind of coplanar air supporting crossing decoupling and the decoupling zero of two-dimension flexible hinge angle is provided, vibration isolator all has approximate zero rigidity and extremely low natural frequency in three-dimensional, on, accurately location and 3 d-line freedom of movement can be carried out between lower installation board, angular motion freedom decoupling, thus effectively solve ultra precise measurement instrument and process unit, especially the accurate vibration isolation problem in step-by-step scanning photo-etching device.
Technical solution of the present invention is:
The Zero-rigidity vibration isolator of a kind of coplanar air supporting crossing decoupling and the decoupling zero of two-dimension flexible hinge angle, by upper mounting plate, lower installation board, clean compressed gas source, tracheae and vibration isolator main body composition, vibration isolator main body is arranged between upper mounting plate and lower installation board, clean compressed gas source is connected with vibration isolator main body by tracheae, in the structure of described vibration isolator main body, the lower surface of sleeve and lower installation board are lubricated by axial carrying plane air bearing surface and support, piston cylinder back-off is arranged in sleeve, and lubricate with sleeve by the radial cylinder air bearing surface that carries and support, two-dimension flexible hinge is arranged between piston cylinder and upper mounting plate, sleeve and X are lubricated and guiding to air-float guide rail by X direction guiding rail air bearing surface, X is lubricated and support to air-float guide rail and lower installation board by Z-direction bearing air-float face, Y-direction air-float guide rail and lower installation board are rigidly connected, X lubricate by Y-direction guide rail air bearing surface to the two ends of air-float guide rail and Y-direction air-float guide rail and leads, Z-direction voice coil motor, Z-direction displacement transducer and Z-direction limit switch are arranged between piston cylinder and sleeve, X is arranged on sleeve and lower installation board between to displacement transducer, X to limit switch and Y-direction voice coil motor, Y-direction displacement transducer, Y-direction limit switch to voice coil motor, X, the driving force direction of Z-direction voice coil motor is vertical direction, X is mutually vertical in horizontal plane to the driving force direction of voice coil motor and Y-direction voice coil motor, and X, Y, Z-direction displacement transducer are consistent with the driving force direction of X, Y, Z-direction voice coil motor with the line of action direction of X, Y, Z-direction limit switch, X, Y, Z-direction displacement transducer are connected with the signal input part of controller respectively with X, Y, Z-direction limit switch, and the signal output part of controller is connected with the signal input part of driver, and the signal output part of driver is connected with X, Y, Z-direction voice coil motor respectively.
Gas pressure sensor is provided with in described piston cylinder, piston cylinder is provided with suction port and solenoid valve, gas pressure sensor is connected with the signal input part of controller, and the signal output part of controller is connected with the signal input part of driver, and the signal output part of driver is connected with solenoid valve.
Described X, Y, Z-direction voice coil motor are cylinder type voice coil motor or plate voice coil motor.
Described X is single rail structure or two guide rail structure to air-float guide rail and Y-direction air-float guide rail.
Described X, Y, Z-direction displacement transducer are grating scale, magnetic railings ruler, appearance grid chi or linear potentiometer.
Described X, Y, Z-direction limit switch are mechanical type limit switch, Hall-type limit switch or photoelectric limit switch.
In described piston cylinder, gas pressure is 0.1MPa ~ 0.8MPa.
The air-film thickness in described axial carrying plane air bearing surface, radial carrying cylinder air bearing surface, X direction guiding rail air bearing surface, Y-direction guide rail air bearing surface and Z-direction bearing air-float face is 10 μm ~ 20 μm.
The diameter of the cylinder air bearing surface throttle orifice on described piston cylinder and the plane air bearing surface throttle orifice 24 on sleeve 6 is φ 0.1mm ~ φ 1mm.
The good result of technological innovation of the present invention and generation is:
(1) the present invention has abandoned the vibration isolator technological scheme of tradition based on elastic element/mechanism, employing axial carrying plane air bearing surface, radial carrying cylinder air bearing surface carry out decoupling zero and vibration isolation to level to vertical vibration respectively, air bearing surface is without friction, rigidity is approximately zero, vibration isolator can be made to obtain approximate zero stiffness characteristic and outstanding superlow frequency vibration isolating performance, solve prior art to limit by structural rigidity, material behavior, rigidity is difficult to further reduction, the problem that rigidity and stability can not be taken into account.This is one of the present invention's innovative point being different from prior art.
(2) the present invention adopts displacement transducer, limit switch, controller, driver and voice coil motor etc. to form the position closed loop feedback control system of vertical direction and substantially horizontal, relative position between upper and lower mounting plate is accurately controlled, positioning precision can reach 10 μm of levels and more than, effectively can solve that prior art positioning precision is low, problem that positioning precision and rigidity, anti-vibration performance can not be taken into account.This is the innovative point two that the present invention is different from prior art.
(3) the present invention adopts coplanar orthogonal air-float guide rail and two-dimension flexible hinge to carry out decoupling zero to the straight line motion degrees of freedom between the upper and lower mounting plate of vibration isolator and angular motion degrees of freedom, air-float guide rail and flexible hinge are without rubbing, without wearing and tearing, introducing additional stiffness can ignore, there is friction and wear, introduces the problems such as additional stiffness in the technological scheme that effectively can solve the decoupling zero of existing employing elastomer.This is the innovative point three that the present invention is different from prior art.
(4) the present invention adopts gas pressure sensor, solenoid valve and controller, driver etc. to form pressure closed loop feedback control system, gas pressure in accurate control sleeve makes it to keep constant, gravitational equilibrium and compensation are carried out to the thrust load of vibration isolator, under the effect of radial direction carrying cylinder air bearing surface, the piston cylinder of carry load gravity freely can slide up and down along sleeve with zero stiffness, thus the gravitational equilibrium of realizing ideal and zero stiffness vibration isolating effect.This is the innovative point four that the present invention is different from prior art.
(5) the present invention adopts active actuators to carry out ACTIVE CONTROL to the relative position between upper and lower mounting plate, vibration isolator parameter can regulate in real time according to being changed by vibration isolation features of the object and working environment, thus adapt to different operating modes, there is good flexibility, adaptability and stability.This is the innovative point five that the present invention is different from prior art.
Accompanying drawing explanation
Fig. 1 is the structural representation of the Zero-rigidity vibration isolator of removing the coplanar air supporting crossing decoupling after upper mounting plate and the decoupling zero of two-dimension flexible hinge angle;
Fig. 2 is the cross-sectional view of the Zero-rigidity vibration isolator of coplanar air supporting crossing decoupling and the decoupling zero of two-dimension flexible hinge angle;
Fig. 3 is the schematic diagram in axial carrying plane air bearing surface, radial carrying cylinder air bearing surface, X direction guiding rail air bearing surface and Z-direction bearing air-float face;
Fig. 4 is the schematic diagram of Y-direction guide rail air bearing surface;
Fig. 5 is tube-in-tube structure schematic diagram;
Fig. 6 is the structural representation that two one-dimensional flexible hinge orthogonal superpositions form a two-dimension flexible hinge;
Fig. 7 is the structural representation of cylindrical two-dimension flexible hinge;
Fig. 8 is the control structure block diagram of the Zero-rigidity vibration isolator of coplanar air supporting crossing decoupling and the decoupling zero of two-dimension flexible hinge angle;
Fig. 9 is the schematic diagram of plane air bearing surface throttle orifice on sleeve;
Figure 10 is the schematic diagram of cylinder air bearing surface throttle orifice on piston cylinder.
In figure, piece number illustrates: 1 upper mounting plate, 2 lower installation boards, 3 clean compressed gas sources, 4 vibration isolator main bodys, 5 piston cylinders, 6 sleeves, 7 two-dimension flexible hinges, 8X is to voice coil motor, 8a X is to motor iron yoke, 8b X is to magnetic steel of motor, 8c X is to motor coil framework, 8d X is to motor coil, 9Y is to voice coil motor, 10Z is to voice coil motor, 10a Z-direction motor iron yoke, 10b Z-direction magnetic steel of motor, 10c Z-direction motor coil framework, 10d Z-direction motor coil, 10e Z-direction motor transitional part, 11X is to displacement transducer, 11a X is to grating reading head transition piece, 11b X is to grating reading head, 11c X is to glass raster chi, 12Y is to displacement transducer, 13Z is to displacement transducer, 13a Z-direction grating reading head transition piece, 13b Z-direction grating reading head, 13c Z-direction glass raster chi, 14X is to limit switch, 14a X is to limiting stopper, 14b X is to Hall switch, 14c X is to limit switch transition piece, 14d X is to limiting stopper transition piece, 15Y is to limit switch, 16Z is to limit switch, 16a Z-direction limiting stopper, 16b Z-direction Hall switch, 16c Z-direction limit switch transition piece, 17 gas pressure sensors, 18 solenoid valves, 19 controllers, 20 drivers, 21 axial carrying plane air bearing surface, 22 radial carrying cylinder air bearing surface, 23 suction ports, 24 plane air bearing surface throttle orifices, 25 cylinder air bearing surface throttle orifices, 26 tracheaes, 29X is to air-float guide rail, 30Y is to air-float guide rail, 31X direction guiding rail air bearing surface, 32Y direction guiding rail air bearing surface, 33Z is to bearing air-float face, 34 cylindrical two-dimension flexible hinges.
Embodiment
Specific embodiments of the invention are provided below in conjunction with accompanying drawing.
The Zero-rigidity vibration isolator of a kind of coplanar air supporting crossing decoupling and the decoupling zero of two-dimension flexible hinge angle, by upper mounting plate 1, lower installation board 2, clean compressed gas source 3, tracheae 26 and vibration isolator main body 4 form, vibration isolator main body 4 is arranged between upper mounting plate 1 and lower installation board 2, clean compressed gas source 3 is connected with vibration isolator main body 4 by tracheae 26, in the structure of described vibration isolator main body 4, the lower surface of sleeve 6 and lower installation board 2 are lubricated by axial carrying plane air bearing surface 21 and support, piston cylinder 5 back-off is arranged in sleeve 6, and lubricate with sleeve 6 by the radial cylinder air bearing surface 22 that carries and support, two-dimension flexible hinge 7 is arranged between piston cylinder 5 and upper mounting plate 1, sleeve 6 is lubricated and guiding by X direction guiding rail air bearing surface 31 to air-float guide rail 29 with X, X is lubricated and support to air-float guide rail 29 and lower installation board 2 by Z-direction bearing air-float face 33, Y-direction air-float guide rail 30 and lower installation board 2 are rigidly connected, X lubricate by Y-direction guide rail air bearing surface 32 to the two ends of air-float guide rail 29 and Y-direction air-float guide rail 30 and leads, Z-direction voice coil motor 10, Z-direction displacement transducer 13 and Z-direction limit switch 16 are arranged between piston cylinder 5 and sleeve 6, X is to voice coil motor 8, X is to displacement transducer 11, X is to limit switch 14 and Y-direction voice coil motor 9, Y-direction displacement transducer 12, Y-direction limit switch 15 is arranged between sleeve 6 and lower installation board 2, the driving force direction of Z-direction voice coil motor 10 is vertical direction, X is mutually vertical in horizontal plane to the driving force direction of voice coil motor 8 and Y-direction voice coil motor 9, X, Y, Z-direction displacement transducer 11, 12, 13 and X, Y, Z-direction limit switch 14, 15, the line of action direction of 16 and X, Y, Z-direction voice coil motor 8, 9, the driving force direction of 10 is consistent, X, Y, Z-direction displacement transducer 11,12,13 are connected with the signal input part of controller 19 respectively with X, Y, Z-direction limit switch 14,15,16, the signal output part of controller 19 is connected with the signal input part of driver 20, and the signal output part of driver 20 is connected with X, Y, Z-direction voice coil motor 8,9,10 respectively.
The displacement that X, Y, Z-direction displacement transducer 11,12,13 couples of X, Y, Z-direction voice coil motor 8,9,10 export is measured, and the stroke that X, Y, Z-direction limit switch 14,15,16 couples of X, Y, Z-direction voice coil motor 8,9,10 move limits; Controller 19 is according to the feedback signal of X, Y, Z-direction displacement transducer 11,12,13 and X, Y, Z-direction limit switch 14,15,16, and control X, Y, Z-direction voice coil motor 8,9,10 accurately control the relative position between upper and lower mounting plate 1,2.
Gas pressure sensor 17 is provided with in described piston cylinder 5, piston cylinder 5 is provided with suction port 23 and solenoid valve 18, gas pressure sensor 17 is connected with the signal input part of controller 19, the signal output part of controller 19 is connected with the signal input part of driver 20, and the signal output part of driver 20 is connected with solenoid valve 18.
Described X, Y, Z-direction voice coil motor 8,9,10 are cylinder type voice coil motor or plate voice coil motor.
Described X is single rail structure or two guide rail structure to air-float guide rail 29 and Y-direction air-float guide rail 30.
Described X, Y, Z-direction displacement transducer 11,12,13 are grating scale, magnetic railings ruler, appearance grid chi or linear potentiometer.
Described X, Y, Z-direction limit switch 14,15,16 are mechanical type limit switch, Hall-type limit switch or photoelectric limit switch.
In described piston cylinder 5, gas pressure is 0.1MPa ~ 0.8MPa.
The air-film thickness in described axial carrying plane air bearing surface 21, radial carrying cylinder air bearing surface 22, X direction guiding rail air bearing surface 31, Y-direction guide rail air bearing surface 32 and Z-direction bearing air-float face 33 is 10 μm ~ 20 μm.
The diameter of the cylinder air bearing surface throttle orifice 25 on described piston cylinder 5 and the plane air bearing surface throttle orifice 24 on sleeve 6 is φ 0.1mm ~ φ 1mm.
One embodiment of the present of invention are provided below in conjunction with Fig. 1 ~ Fig. 5, Fig. 8.In the present embodiment, during vibration isolator work, the pedestal of lower installation board 2 and ground, instrument or basic framework etc. are rigidly connected, and upper mounting plate 1 is rigidly connected with load or platform.X, Y, Z-direction voice coil motor 8,9,10 all adopt cylinder type voice coil motor.For X to voice coil motor 8, its primarily of X to motor iron yoke 8a, X to magnetic steel of motor 8b, X to motor coil framework 8c, X forms to motor coil 8d.X is cylindrical shape to motor iron yoke 8a and X to motor coil framework 8c, and X is cylindrical to magnetic steel of motor 8b, and X is around in X on motor coil framework 8c to motor coil 8d.X forms motor stator to motor iron yoke 8a and X to magnetic steel of motor 8b, and X forms electric mover to motor coil framework 8c and X to motor coil 8d.In Z-direction voice coil motor 10, Z-direction motor transitional part 10e provides the mounting structure of Z-direction motor coil framework 10c.Pass to electric current in coil during machine operation, according to electromagnetic theory, hot-wire coil can be subject to Lorentz force effect in magnetic field, can be controlled the size and Orientation of motor output drive strength by the size and Orientation controlling electric current.
X, Y, Z-direction displacement transducer 11,12,13 adopt grating scale.For Z-direction displacement transducer 13, it mainly comprises the parts such as Z-direction grating reading head transition piece 13a, Z-direction grating reading head 13b and Z-direction glass raster chi 13c.Z-direction grating reading head transition piece 13a provides the mounting structure of Z-direction grating reading head 13b.During grating scale work, the relative displacement of itself and Z-direction glass raster chi 13c can detect by Z-direction grating reading head 13b, and gives controller 19 by signal conductor.
X, Y, Z-direction limit switch 14,15,16 adopt Hall-type limit switch.For Z-direction limit switch 16, it mainly comprises the parts such as Z-direction limiting stopper 16a, Z-direction Hall switch 16b and Z-direction limit switch transition piece 16c.Two Z-direction Hall switch 16b install back-to-back, and two Z-direction limiting stopper 16a are metallic material, are mounted opposite with the sensitivity end of Z-direction Hall switch 16b.Z-direction limit switch transition piece 16c provides the mounting structure of Z-direction Hall switch 16b.During limit switch work, when Z-direction Hall switch 16b is close to Z-direction limiting stopper 16a, Z-direction Hall switch 16b provides limit signal, and gives controller 19 by signal conductor.
In the present embodiment, Z-direction voice coil motor 10, Z-direction displacement transducer 13 and Z-direction limit switch 16 are installed between piston cylinder 5 and sleeve 6, and it is inner to be arranged on piston cylinder 5.
The carrying of vibration isolator to load realizes in the following way: clean compressed gas source 3 by tracheae 26, carry clean compressed air through solenoid valve 18, suction port 23 in piston cylinder 5.Controller 19 is according to the feedback signal of gas pressure sensor 17, the aperture of Controlling solenoid valve 18, regulate the gas flow be input in piston cylinder 5, thus the pressure of clean compressed air in regulating piston cylinder 5, clean compressed air is balanced each other, the gravity compensation of realizing ideal and zero stiffness vibration isolating effect to piston cylinder 5 active force upwards and load, piston cylinder 5 and the gravity of other component that loads on piston cylinder 5.
In the present embodiment, in piston cylinder 5, the pressure of clean compressed air is 0.4MPa, and the effective radius of piston cylinder 5 lower surface is 100mm, then the quality of single vibration isolator carrying is: m=p × π r
2/ g ≈ 1282kg, wherein p is gas pressure, and p=0.4MPa, r are the effective radius of piston cylinder 5 lower surface, and r=100mm, g are gravity accleration, g=9.8m/s
2.
Fig. 6 provides an embodiment of two-dimension flexible hinge.In the present embodiment, two-dimension flexible hinge 7 is that two one-dimensional flexible hinge orthogonal superpositions are formed.
Fig. 7 provides another embodiment of two-dimension flexible hinge.In the present embodiment, cylindrical two-dimension flexible hinge 34 one-tenth is cylindrical, is processed into the form that centre is thin, two ends are thick.
Fig. 9 provides an embodiment of plane air bearing surface throttle orifice on sleeve.In the present embodiment, sleeve 6 lower surface is along the circumferential direction uniform 8 plane air bearing surface throttle orifices 24 around the center of circle, and diameter is φ 0.2mm.
Figure 10 provides an embodiment of cylinder air bearing surface throttle orifice on piston cylinder.In the present embodiment, piston cylinder 5 sidewall along the circumferential direction uniform two arranges cylinder air bearing surface throttle orifices 25, and the quantity of often arranging cylinder air bearing surface throttle orifice 25 is 8, and diameter is φ 0.2mm.
Claims (9)
1. the Zero-rigidity vibration isolator of a coplanar air supporting crossing decoupling and the decoupling zero of two-dimension flexible hinge angle, by upper mounting plate (1), lower installation board (2), clean compressed gas source (3), tracheae (26) and vibration isolator main body (4) composition, vibration isolator main body (4) is arranged between upper mounting plate (1) and lower installation board (2), clean compressed gas source (3) is connected with vibration isolator main body (4) by tracheae (26), it is characterized in that: in the structure of described vibration isolator main body (4), the lower surface of sleeve (6) and lower installation board (2) are lubricated by axial carrying plane air bearing surface (21) and support, piston cylinder (5) back-off is arranged in sleeve (6), and lubricate with sleeve (6) by the radial cylinder air bearing surface (22) that carries and support, two-dimension flexible hinge (7) is arranged between piston cylinder (5) and upper mounting plate (1), sleeve (6) is lubricated and guiding by X direction guiding rail air bearing surface (31) to air-float guide rail (29) with X, X is lubricated and support to air-float guide rail (29) and lower installation board (2) by Z-direction bearing air-float face (33), Y-direction air-float guide rail (30) and lower installation board (2) are rigidly connected, X is lubricated and guiding to the two ends of air-float guide rail (29) and Y-direction air-float guide rail (30) by Y-direction guide rail air bearing surface (32), Z-direction voice coil motor (10), Z-direction displacement transducer (13) and Z-direction limit switch (16) are arranged between piston cylinder (5) and sleeve (6), X is to voice coil motor (8), X is to displacement transducer (11), X is to limit switch (14) and Y-direction voice coil motor (9), Y-direction displacement transducer (12), Y-direction limit switch (15) is arranged between sleeve (6) and lower installation board (2), the driving force direction of Z-direction voice coil motor (10) is vertical direction, X is mutually vertical in horizontal plane to the driving force direction of voice coil motor (8) and Y-direction voice coil motor (9), X, Y, Z-direction displacement transducer (11, 12, 13) and X, Y, Z-direction limit switch (14, 15, 16) line of action direction and X, Y, Z-direction voice coil motor (8, 9, 10) driving force direction is consistent, X, Y, Z-direction displacement transducer (11,12,13) are connected with the signal input part of controller (19) respectively with X, Y, Z-direction limit switch (14,15,16), the signal output part of controller (19) is connected with the signal input part of driver (20), and the signal output part of driver (20) is connected with X, Y, Z-direction voice coil motor (8,9,10) respectively.
2. the Zero-rigidity vibration isolator of coplanar air supporting crossing decoupling according to claim 1 and the decoupling zero of two-dimension flexible hinge angle, it is characterized in that: in described piston cylinder (5), be provided with gas pressure sensor (17), piston cylinder (5) is provided with suction port (23) and solenoid valve (18), gas pressure sensor (17) is connected with the signal input part of controller (19), the signal output part of controller (19) is connected with the signal input part of driver (20), and the signal output part of driver (20) is connected with solenoid valve (18).
3. the Zero-rigidity vibration isolator of coplanar air supporting crossing decoupling according to claim 1 and the decoupling zero of two-dimension flexible hinge angle, is characterized in that: described X, Y, Z-direction voice coil motor (8,9,10) are cylinder type voice coil motor or plate voice coil motor.
4. the Zero-rigidity vibration isolator of coplanar air supporting crossing decoupling according to claim 1 and the decoupling zero of two-dimension flexible hinge angle, is characterized in that: described X is single rail structure or two guide rail structure to air-float guide rail (29) and Y-direction air-float guide rail (30).
5. the Zero-rigidity vibration isolator of coplanar air supporting crossing decoupling according to claim 1 and the decoupling zero of two-dimension flexible hinge angle, is characterized in that: described X, Y, Z-direction displacement transducer (11,12,13) are grating scale, magnetic railings ruler, appearance grid chi or linear potentiometer.
6. the Zero-rigidity vibration isolator of coplanar air supporting crossing decoupling according to claim 1 and the decoupling zero of two-dimension flexible hinge angle, is characterized in that: described X, Y, Z-direction limit switch (14,15,16) are mechanical type limit switch, Hall-type limit switch or photoelectric limit switch.
7. the Zero-rigidity vibration isolator of coplanar air supporting crossing decoupling according to claim 1 and the decoupling zero of two-dimension flexible hinge angle, is characterized in that: described piston cylinder (5) interior gas pressure is 0.1MPa ~ 0.8MPa.
8. the Zero-rigidity vibration isolator of coplanar air supporting crossing decoupling according to claim 1 and the decoupling zero of two-dimension flexible hinge angle, is characterized in that: the air-film thickness in described axial carrying plane air bearing surface (21), radial carrying cylinder air bearing surface (22), X direction guiding rail air bearing surface (31), Y-direction guide rail air bearing surface (32) and Z-direction bearing air-float face (33) is 10 μm ~ 20 μm.
9. the Zero-rigidity vibration isolator of coplanar air supporting crossing decoupling according to claim 1 and the decoupling zero of two-dimension flexible hinge angle, is characterized in that: the diameter of the cylinder air bearing surface throttle orifice (25) on described piston cylinder (5) and the plane air bearing surface throttle orifice (24) on sleeve (6) is φ 0.1mm ~ φ 1mm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210577110.5A CN103062318B (en) | 2012-12-19 | 2012-12-19 | Zero-rigidity vibration isolator with coplace air flotation orthogonal decoupling and two-dimensional flexible hinge angle decoupling |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210577110.5A CN103062318B (en) | 2012-12-19 | 2012-12-19 | Zero-rigidity vibration isolator with coplace air flotation orthogonal decoupling and two-dimensional flexible hinge angle decoupling |
Publications (2)
| Publication Number | Publication Date |
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| CN103062318A CN103062318A (en) | 2013-04-24 |
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| CN1480787A (en) * | 2002-07-26 | 2004-03-10 | 尼康株式会社 | Vibration isolation device, stage device, and exposure device |
| CN101398636A (en) * | 2008-09-17 | 2009-04-01 | 华中科技大学 | Precision vibration damping assembly and vibration damping platform composed of the assembly |
| CN101571675A (en) * | 2009-06-09 | 2009-11-04 | 上海微电子装备有限公司 | Balancing and positioning system for workpiece platform of photoetching machine |
| CN102470716A (en) * | 2009-07-10 | 2012-05-23 | 萱场工业株式会社 | Suspension device |
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| JP3576176B2 (en) * | 1997-07-22 | 2004-10-13 | アーエスエム リソグラフィ ベスローテン フェンノートシャップ | Supporting device with gas bearing |
| CN1320290C (en) * | 2004-10-11 | 2007-06-06 | 北京航空航天大学 | Six freedom super magnetostrictive active vibration control platform |
| CN102543217B (en) * | 2012-01-20 | 2013-10-23 | 澳门大学 | Macro-micro driven bidimensional integrated micro positioning platform |
| CN102734379B (en) * | 2012-06-09 | 2013-12-11 | 哈尔滨工业大学 | Active vibration isolating device based on composite support of electromagnetism and static-pressure air floatation |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1480787A (en) * | 2002-07-26 | 2004-03-10 | 尼康株式会社 | Vibration isolation device, stage device, and exposure device |
| CN101398636A (en) * | 2008-09-17 | 2009-04-01 | 华中科技大学 | Precision vibration damping assembly and vibration damping platform composed of the assembly |
| CN101571675A (en) * | 2009-06-09 | 2009-11-04 | 上海微电子装备有限公司 | Balancing and positioning system for workpiece platform of photoetching machine |
| CN102470716A (en) * | 2009-07-10 | 2012-05-23 | 萱场工业株式会社 | Suspension device |
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