CN103062284B - Zero-rigidity vibration isolator of double-layer air-flotation orthogonal decoupling and flexible film angle decoupling - Google Patents
Zero-rigidity vibration isolator of double-layer air-flotation orthogonal decoupling and flexible film angle decoupling Download PDFInfo
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Abstract
A zero-rigidity vibration isolator of double-layer air-flotation orthogonal decoupling and flexible film angle decoupling belongs to the technical field of precise vibration isolation. An air-flotation face is respectively used for lubricating and supporting between a sleeve of a vibration isolator main body and an air-flotation plate and between the air-flotation plate and a lower installing plate. A horizontal linear motion freedom degree between an upper installing plate and the lower installing plate is decoupled through a double-layer orthogonal air-flotation guide track, and an angle motion freedom degree between the upper installing plate and the lower installing plate is decoupled through a flexible film. A voice coil motor, a displacement sensor, a limit switch, a controller and a driver form a position closed loop feedback control system so as to conduct precise control for relative positions of the upper installing plate and the lower installing plate. The zero-rigidity vibration isolator has the advantage of being free of rigidity in three dimensions, high in location precision and capable of fully decoupling the linear motion freedom degree and the angle motion freedom degree and can effectively achieve high-performance vibration isolation in ultra precise measurement instruments and machining devices, especially stepping scanning photoetching machines.
Description
Technical field
The invention belongs to accurate vibration isolation technical field, relate generally to the Zero-rigidity vibration isolator of a kind of double-layer air flotation crossing decoupling and the decoupling zero of flexible membrane angle.
Background technique
Along with improving constantly of Ultra-precision Turning and measuring accuracy, ambient vibration becomes the key factor that restriction Ultra-precision Turning equipment improves with surveying instrument precision and performance.Especially step-by-step scanning photo-etching device is the vlsi circuit process unit of representative, technology-intensive degree and complexity high, key technical index all reaches the limit of prior art, represent the highest level of Ultra-precision Turning equipment, precision isolation system becomes the core key technology in this type of equipment; The live width of step-by-step scanning photo-etching device has reached 22nm and following, silicon chip positioning precision and alignment precision all reach a few nanometer, and work stage movement velocity reaches more than 1m/s, work stage acceleration reaches tens times of gravity accleration, and this proposes new challenge to existing vibration isolation technique.First, lithography machine needs for metering system and photoetched object lens provide the working environment of " super quiet ", need again to drive simultaneously work stage at full speed with High acceleration motion, this proposes extremely harsh requirement to the anti-vibration performance of vibrating isolation system, and the natural frequency in its three directions all needs to reach below 1Hz; Secondly, relative position between each parts of lithography machine, the distance of such as photoetched object lens and silicon chip surface, all there is very strict requirement, and under the control being in position closed loop feedback control system, require that the relative positional accuracy between the upper and lower mounting plate of vibration isolator reaches 10 μm of magnitudes, the positioning precision of traditional vibration isolator can not meet the demands far away.
According to theory of vibration isolation, the natural frequency of passive type vibration isolator is directly proportional to rigidity, be inversely proportional to load quality, therefore, under the prerequisite that load quality is certain, the rigidity reducing vibration isolator is the effective way reducing natural frequency, improve low frequency and superlow frequency vibration isolating performance.There are the intrinsic contradictions of static bearing capacity and rigidity in the vibration isolator of the forms such as conventional air bellows, restrict by the factor such as material behavior, structural rigidity simultaneously, will reduce its rigidity, especially level further very difficult to rigidity.For this problem, " pendulum " formula structure is incorporated in air cushion shock absorber by researcher, reaches object (the 1.Nikon Corporation.Vibration Isolator With Low Lateral Stiffness. U.S. Patent Publication No.: US20040065517A1 reducing vibration isolator horizontal rigidity; 2.U.S.Philips Corporation.Positioning Device with a Force Actuator System for Compensating Center-of-gravity Displacements, and Lithographic Device Provided with Such A Positioning Device. U.S. Patent number: US005844664A).The method can reduce the horizontal rigidity of air cushion shock absorber to a certain extent, promotes its low frequency vibration isolation performance.The method Problems existing is: 1) restrict by material behavior and structural rigidity, the vertical limited extent reduced to rigidity with level of vibration isolator; 2) the vertical and level of air cushion shock absorber is all very poor to positioning precision, cannot meet the requirement of photoetching process; 3) lower horizontal rigidity to be reached and need larger pendulum length, cause vibration isolator height excessive, easily string membrane resonance occurs, poor stability.
By visible to the analysis of existing air cushion shock absorber technological scheme, existing air cushion shock absorber is difficult to meet the requirement of lithography machine to ultralow rigidity and high position precision.IDE company of Germany proposes a kind of vibration isolator technological scheme (1.Integrated Dynamics Engineering GmbH.Isolatorgeometrie Eines Schwingungsisolationssystem. european patent number: EP1803965A2 of abandoning tradition rubber air spring; 2.Integrated Dynamics Engineering GmbH.Schwingungsisolationssystem Mit Pneumatischem Tiefpassfilter. european patent number: EP1803970A2; 3.Integrated Dynamics Engineering GmbH.Air Bearing with Consideration of High-Frequency Resonances. U.S. Patent Publication No.: US20080193061A1).Program employing is vertical carries out decoupling zero and vibration isolation to air bearing surface to the vibration of all directions with level, can reach extremely low rigidity and natural frequency.Program Problems existing is: 1) in public technology scheme, vibration isolator cannot realize accurate location; 2), in patent EP1803965A2, there is not the angular motion degrees of freedom around horizontal rotational shaft between upper and lower mounting plate, the angular rigidity in this direction and natural frequency are all very high; Patent EP1803970A2 and US20080193061A1 adopts block rubber to provide angular motion degrees of freedom around horizontal rotational shaft for upper and lower mounting plate, but because block rubber angular rigidity is very large, effectively cannot carry out angular motion freedom decoupling, there is frictional force between angular motion freedom decoupling mechanism part and introduce additional stiffness, restriction anti-vibration performance.
ASML company of Holland it is also proposed similar vibration isolator technological scheme (1.U.S.Philips Corp, ASM Lithography B.V. Pneumatic Support Device with A Controlled Gas Supply, and Lithographic Device Provided with Such A Support Device. U.S. Patent number: US006144442A; 2.Koninklijke Philips Electronics N.V., ASM Lithography B.V.Lithographic Pneumatic Support Device with Controlled Gas Supply. International Patent Publication No.: WO99/22272; 3.ASML Netherlands B.V.Support Device, Lithographic Apparatus, and Device Manufacturing MethodEmploying A Supporting Device, and A Position Control System Arranged for Use in A Supporting Device. U.S. Patent number: US007084956B2; 4.ASML Netherlands B.V.Support Device, Lithographic Apparatus, and Device Manufacturing Method Employing A Supporting Device and A Position Control System Arranged for Use in A Supporting Device. european patent number: EP1486825A1).In patent US006144442A and WO99/22272, closed-loop feedback control is carried out to bleed pressure, reach and improve the stability of vibration isolator and the object of performance; On upper mounting plate, be provided with vibration transducer in patent US007084956B2 and EP1486825A1, introduce with reference to vibration system simultaneously, promoted the anti-vibration performance of vibration isolator by control algorithm.But propose technological scheme and still do not solve the accurate location of vibration isolator and the angular motion freedom decoupling problem of upper and lower mounting plate.
Summary of the invention
The object of the invention is for ultra precise measurement instrument and process unit, especially the vlsi circuit process unit such as step-by-step scanning photo-etching device is to the low natural frequency of vibration isolator, the an urgent demand of high position precision, the Zero-rigidity vibration isolator of a kind of double-layer air flotation crossing decoupling and the decoupling zero of flexible membrane angle is provided, vibration isolator has three-dimensional ultralow rigidity, ultralow natural frequency, on, can accurately locate and 3 d-line freedom of movement between lower installation board, the abundant decoupling zero of angular motion degrees of freedom, can effectively solve ultra precise measurement instrument and process unit, especially the accurate vibration isolation problem in step-by-step scanning photo-etching device.
Technical solution of the present invention is:
The Zero-rigidity vibration isolator of a kind of double-layer air flotation crossing decoupling and the decoupling zero of flexible membrane angle, by upper mounting plate, lower installation board, clean compressed gas source, tracheae and vibration isolator main body composition, vibration isolator main body is arranged between upper mounting plate and lower installation board, clean compressed gas source is connected with vibration isolator main body by tracheae, in the structure of described vibration isolator main body, the lower surface of sleeve and air supporting plate are lubricated by axial carrying plane air bearing surface and support, flexible membrane is arranged on the upper end of sleeve, and compressed and sealing by trim ring, the top board of pressing plate assembly and press table are coaxially arranged on the upper of flexible membrane, lower surface, and clamp flexible membrane, upper surface and the upper mounting plate of top board are rigidly connected, X is rigidly connected to the lower surface of air-float guide rail and air supporting plate, sleeve and X are lubricated and guiding to air-float guide rail by X direction guiding rail air bearing surface, lower surface and the lower installation board of Y-direction air-float guide rail are rigidly connected, air supporting plate and lower installation board are lubricated by Z-direction bearing air-float face and support, air supporting plate and Y-direction air-float guide rail are lubricated and guiding by Y-direction guide rail air bearing surface, Z-direction voice coil motor, Z-direction displacement transducer and Z-direction limit switch are arranged between pressing plate assembly and sleeve, X is to voice coil motor, X is to displacement transducer, X is arranged between sleeve and air supporting plate to limit switch, Y-direction voice coil motor, Y-direction displacement transducer, Y-direction limit switch is arranged between air supporting plate and lower installation board, the driving force direction of Z-direction voice coil motor is vertical direction, X is mutually vertical in horizontal plane to the driving force direction of voice coil motor and Y-direction voice coil motor, X, Y, Z-direction displacement transducer and X, Y, the line of action direction of Z-direction limit switch and X, Y, the driving force direction of Z-direction voice coil motor is consistent, X, Y, Z-direction displacement transducer are connected with the signal input part of controller respectively with X, Y, Z-direction limit switch, and the signal output part of controller is connected with the signal input part of driver, and the signal output part of driver is connected with X, Y, Z-direction voice coil motor respectively.
Gas pressure sensor is provided with in described sleeve, sleeve is provided with suction port and solenoid valve, gas pressure sensor is connected with the signal input part of controller, and the signal output part of controller is connected with the signal input part of driver, and the signal output part of driver is connected with solenoid valve.
Described X, Y, Z-direction voice coil motor are cylinder type voice coil motor or plate voice coil motor.
Described X is single rail structure or two guide rail structure to air-float guide rail and Y-direction air-float guide rail.
Described X, Y, Z-direction displacement transducer are grating scale, magnetic railings ruler, appearance grid chi or linear potentiometer.
Described X, Y, Z-direction limit switch are mechanical type limit switch, Hall-type limit switch or photoelectric limit switch.
Described flexible membrane is rubber membrane.
In described sleeve, gas pressure is 0.1MPa ~ 0.8MPa.
The air-film thickness in described axial carrying plane air bearing surface, X direction guiding rail air bearing surface, Y-direction guide rail air bearing surface and Z-direction bearing air-float face is 10 μm ~ 20 μm.
The diameter of the plane air bearing surface throttle orifice on described sleeve is φ 0.1mm ~ φ 1mm.
The good result of technological innovation of the present invention and generation is:
(1) the present invention adopts axial carrying plane air bearing surface to isolate Horizontal Vibration, air bearing surface is approximately zero without friction, rigidity, vibration isolator can be made to obtain substantially horizontal approximate zero stiffness characteristics and outstanding superlow frequency vibration isolating performance, solve prior art to limit by structural rigidity, material behavior, vibration isolator horizontal rigidity is difficult to further reduction, the problem that rigidity and stability can not be taken into account.This is one of the present invention's innovative point being different from prior art.
(2) the present invention adopts displacement transducer, limit switch, controller, driver and voice coil motor etc. to form the position closed loop feedback control system of vertical direction and substantially horizontal, relative position between upper and lower mounting plate is accurately controlled, positioning precision can reach 10 μm of levels and more than, effectively can solve that prior art positioning precision is low, problem that positioning precision and rigidity, anti-vibration performance can not be taken into account.This is the innovative point two that the present invention is different from prior art.
(3) the present invention adopts Orthogonal Double-layer air-float guide rail to carry out decoupling zero to the horizontal rectilinear motion degrees of freedom between the upper and lower mounting plate of vibration isolator, air-float guide rail is without friction and wear, do not introduce additional stiffness, decoupling effect is good, and vibration isolator can be made to obtain high position precision and substantially horizontal zero stiffness characteristic; Adopt flexible membrane diagonal motion degrees of freedom to carry out decoupling zero, introduce additional angular rigidity less, the technological scheme that effectively can solve the decoupling zero of existing employing elastomer introduces the problem of larger additional stiffness.This is the innovative point three that the present invention is different from prior art.
(4) the present invention adopts gas pressure sensor, solenoid valve and controller, driver forms pressure closed loop feedback control system, gas pressure in accurate control sleeve makes it to keep constant, gravitational equilibrium and compensation are carried out to the thrust load of vibration isolator, flexible membrane rigidity near equilibrium position is approximately zero, the upper and lower pressing plate of carry load gravity and upper mounting plate can ultralow rigidity slide up and down, thus the gravity compensation of realizing ideal and zero stiffness vibration isolating effect.This is the innovative point four that the present invention is different from prior art.
(5) the present invention adopts active actuators to carry out ACTIVE CONTROL to the relative position between upper and lower mounting plate, vibration isolator parameter can regulate in real time according to being changed by vibration isolation features of the object and working environment, thus adapt to different operating modes, there is good flexibility, adaptability and stability.This is the innovative point five that the present invention is different from prior art.
Accompanying drawing explanation
Fig. 1 is the structural representation of the Zero-rigidity vibration isolator of removing the double-layer air flotation crossing decoupling after upper mounting plate and the decoupling zero of flexible membrane angle;
Fig. 2 is the cross-sectional view of the Zero-rigidity vibration isolator of double-layer air flotation crossing decoupling and the decoupling zero of flexible membrane angle;
Fig. 3 is the schematic diagram of axial carrying plane air bearing surface, X direction guiding rail air bearing surface;
Fig. 4 is the schematic diagram in Y-direction guide rail air bearing surface and Z-direction bearing air-float face;
Fig. 5 is tube-in-tube structure schematic diagram;
Fig. 6 is the control structure block diagram of the Zero-rigidity vibration isolator of double-layer air flotation crossing decoupling and the decoupling zero of flexible membrane angle;
Fig. 7 is the schematic diagram of plane air bearing surface throttle orifice on sleeve.
In figure, piece number illustrates: 1 upper mounting plate, 2 lower installation boards, 3 clean compressed gas sources, 4 vibration isolator main bodys, 5 flexible membranes, 6 sleeves, 7 pressing plate assemblies, 7a top board, 7b press table, 8X is to voice coil motor, 8a X is to motor iron yoke, 8b X is to magnetic steel of motor, 8c X is to motor coil framework, 8d X is to motor coil, 9Y is to voice coil motor, 10Z is to voice coil motor, 10a Z-direction motor iron yoke, 10bZ is to magnetic steel of motor, 10cZ is to motor coil framework, 10dZ is to motor coil, 10eZ is to motor transitional part, 11X is to displacement transducer, 11a X is to grating reading head transition piece, 11b X is to grating reading head, 11c X is to glass raster chi, 12Y is to displacement transducer, 13Z is to displacement transducer, 13a Z-direction grating reading head transition piece, 13b Z-direction grating reading head, 13c Z-direction glass raster chi, 14X is to limit switch, 14a X is to limiting stopper, 14b X is to Hall switch, 14c X is to limit switch transition piece, 14dX is to limiting stopper transition piece, 15Y is to limit switch, 16Z is to limit switch, 16aZ is to limiting stopper, 16b Z-direction Hall switch, 16c Z-direction limit switch transition piece, 17 gas pressure sensors, 18 solenoid valves, 19 controllers, 20 drivers, 21 axial carrying plane air bearing surface, 22 trim rings, 23 suction ports, 24 plane air bearing surface throttle orifices, 26 tracheaes, 29X is to air-float guide rail, 30Y is to air-float guide rail, 31X direction guiding rail air bearing surface, 32Y direction guiding rail air bearing surface, 33Z is to bearing air-float face, 34 air supporting plates.
Embodiment
Specific embodiments of the invention are provided below in conjunction with accompanying drawing.
The Zero-rigidity vibration isolator of a kind of double-layer air flotation crossing decoupling and the decoupling zero of flexible membrane angle, by upper mounting plate 1, lower installation board 2, clean compressed gas source 3, tracheae 26 and vibration isolator main body 4 form, vibration isolator main body 4 is arranged between upper mounting plate 1 and lower installation board 2, clean compressed gas source 3 is connected with vibration isolator main body 4 by tracheae 26, in the structure of described vibration isolator main body 4, the lower surface of sleeve 6 and air supporting plate 34 are lubricated by axial carrying plane air bearing surface 21 and support, flexible membrane 5 is arranged on the upper end of sleeve 6, and compressed and sealing by trim ring 22, top board 7a and the press table 7b of pressing plate assembly 7 are coaxially arranged on the upper of flexible membrane 5, lower surface, and clamp flexible membrane 5, upper surface and the upper mounting plate 1 of top board 7a are rigidly connected, X is rigidly connected to the lower surface of air-float guide rail 29 and air supporting plate 34, sleeve 6 is lubricated and guiding by X direction guiding rail air bearing surface 31 to air-float guide rail 29 with X, lower surface and the lower installation board 2 of Y-direction air-float guide rail 30 are rigidly connected, air supporting plate 34 and lower installation board 2 are lubricated by Z-direction bearing air-float face 33 and support, air supporting plate 34 is lubricated and guiding by Y-direction guide rail air bearing surface 32 with Y-direction air-float guide rail 30, Z-direction voice coil motor 10, Z-direction displacement transducer 13 and Z-direction limit switch 16 are arranged between pressing plate assembly 7 and sleeve 6, X is to voice coil motor 8, X is to displacement transducer 11, X is arranged between sleeve 6 and air supporting plate 34 to limit switch 14, Y-direction voice coil motor 9, Y-direction displacement transducer 12, Y-direction limit switch 15 is arranged between air supporting plate 34 and lower installation board 2, the driving force direction of Z-direction voice coil motor 10 is vertical direction, X is mutually vertical in horizontal plane to the driving force direction of voice coil motor 8 and Y-direction voice coil motor 9, X, Y, Z-direction displacement transducer 11, 12, 13 and X, Y, Z-direction limit switch 14, 15, the line of action direction of 16 and X, Y, Z-direction voice coil motor 8, 9, the driving force direction of 10 is consistent, X, Y, Z-direction displacement transducer 11,12,13 are connected with the signal input part of controller 19 respectively with X, Y, Z-direction limit switch 14,15,16, the signal output part of controller 19 is connected with the signal input part of driver 20, and the signal output part of driver 20 is connected with X, Y, Z-direction voice coil motor 8,9,10 respectively.
The displacement that X, Y, Z-direction displacement transducer 11,12,13 couples of X, Y, Z-direction voice coil motor 8,9,10 export is measured, and the stroke that X, Y, Z-direction limit switch 14,15,16 couples of X, Y, Z-direction voice coil motor 8,9,10 move limits; Controller 19 is according to the feedback signal of X, Y, Z-direction displacement transducer 11,12,13 and X, Y, Z-direction limit switch 14,15,16, and control X, Y, Z-direction voice coil motor 8,9,10 accurately control the relative position between upper and lower mounting plate 1,2.
Gas pressure sensor 17 is provided with in described sleeve 6, sleeve 6 is provided with suction port 23 and solenoid valve 18, gas pressure sensor 17 is connected with the signal input part of controller 19, the signal output part of controller 19 is connected with the signal input part of driver 20, and the signal output part of driver 20 is connected with solenoid valve 18.
Described X, Y, Z-direction voice coil motor 8,9,10 are cylinder type voice coil motor or plate voice coil motor.
Described X is single rail structure or two guide rail structure to air-float guide rail 29 and Y-direction air-float guide rail 30.
Described X, Y, Z-direction displacement transducer 11,12,13 are grating scale, magnetic railings ruler, appearance grid chi or linear potentiometer.
Described X, Y, Z-direction limit switch 14,15,16 are mechanical type limit switch, Hall-type limit switch or photoelectric limit switch.
Described flexible membrane 5 is rubber membrane.
In described sleeve 6, gas pressure is 0.1MPa ~ 0.8MPa.
The air-film thickness in described axial carrying plane air bearing surface 21, X direction guiding rail air bearing surface 31, Y-direction guide rail air bearing surface 32 and Z-direction bearing air-float face 33 is 10 μm ~ 20 μm.
The diameter of the plane air bearing surface throttle orifice 24 on described sleeve 6 is φ 0.1mm ~ φ 1mm.
One embodiment of the present of invention are provided below in conjunction with Fig. 1 ~ Fig. 6.In the present embodiment, during vibration isolator work, lower installation board 2 is arranged on ground, the pedestal of instrument or basic framework, and upper mounting plate 1 is connected with by the load of vibration isolation.X, Y, Z-direction voice coil motor 8,9,10 all adopt cylinder type voice coil motor.For X to voice coil motor 8, its mainly comprise X to motor iron yoke 8a, X to magnetic steel of motor 8b, X to motor coil framework 8c, X is to motor coil 8d.X is cylindrical shape to motor iron yoke 8a and X to motor coil framework 8c, and X is cylindrical to magnetic steel of motor 8b, and X is around on coil rack 8c to motor coil 8d.X forms the stator of motor to motor iron yoke 8a and X to magnetic steel of motor 8b, X forms the mover of motor to motor coil framework 8c and X to motor coil 8d.In Z-direction voice coil motor 10, Z-direction motor transitional part 10e provides the mounting structure of Z-direction motor coil framework 10c.Pass to electric current in coil during machine operation, according to electromagnetic theory, hot-wire coil can be subject to the effect of voice coil loudspeaker voice coil power in magnetic field, can be controlled the size and Orientation of motor output drive strength by the size and Orientation controlling electric current.
In the present embodiment, flexible membrane 5, trim ring 22 with the mounting type of sleeve 6 are: along the circumferential direction thread mill drilling on sleeve 6, trim ring 22, flexible membrane 5 along the circumferential direction process through hole, adopt screw that trim ring 22 is compressed flexible membrane 5 to be assemblied on sleeve 6, utilize the elasticity of flexible membrane 5 material to play the effect of sealing.The mounting type of top board 7a, press table 7b and flexible membrane 5 is similar with it.
X, Y, Z-direction displacement transducer 11,12,13 adopt grating scale.For Z-direction displacement transducer 13, it mainly comprises the parts such as Z-direction grating reading head transition piece 13a, Z-direction grating reading head 13b and Z-direction glass raster chi 13c, and Z-direction grating reading head transition piece 13a provides the mounting structure of Z-direction grating reading head 13b.During grating scale work, the relative displacement of itself and Z-direction glass raster chi 13c can detect by Z-direction grating reading head 13b, and gives controller 19 by signal conductor.
X, Y, Z-direction limit switch 14,15,16 adopt Hall-type limit switch.For Z-direction limit switch 16, it mainly comprises the parts such as Z-direction limiting stopper 16a, Z-direction Hall switch 16b and Z-direction limit switch transition piece 16c.Two Z-direction Hall switch 16b install back-to-back, and two Z-direction limiting stopper 16a are metallic material, are mounted opposite with the sensitivity end of Z-direction Hall switch 16b.Z-direction limit switch transition piece 16c provides the mounting structure of Z-direction Hall switch 16b.During limit switch work, when Z-direction Hall switch 16b is close to Z-direction limiting stopper 16a, Z-direction Hall switch 16b provides limit signal, and gives controller 19 by signal conductor.
In the present embodiment, Z-direction voice coil motor 10, Z-direction displacement transducer 13 and Z-direction limit switch 16 are installed in the inside of sleeve 6.
The carrying of vibration isolator to load realizes in the following way: clean compressed gas source 3 by tracheae 26, carry clean compressed air through solenoid valve 18, suction port 23 in sleeve 6.Controller 19 is according to the feedback signal of gas pressure sensor 17, the aperture of Controlling solenoid valve 18, regulate the gas flow be input in sleeve 6, thus the pressure of clean compressed air in regulating sleeve 6, clean compressed air is balanced each other to the gravity of pressing plate assembly 7 and flexible membrane 5 active force upwards and load and pressing plate assembly 7, the gravity of other component that loads on pressing plate assembly 7.In the equilibrium position of flexible membrane 5, the vertical stiffness of flexible membrane 5 is approximately zero, and lateral stiffness is then very large relative to the lateral stiffness of axial carrying air bearing surface 21.Therefore, sleeve 6 vertically can move up and down with approximate zero rigidity near the equilibrium position of flexible membrane 5, thus has outstanding superlow frequency vibration isolating performance.
In the present embodiment, in sleeve 6, the pressure of clean compressed air is 0.4MPa, and the effective radius of press table 7b and flexible membrane 5 lower surface is 100mm, then the quality of single vibration isolator carrying is: m=p × π r
2/ g ≈ 1282kg, wherein p is gas pressure intensity, and p=0.4MPa, r are the effective radius of press table 7b and flexible membrane 5 lower surface, and r=100mm, g are gravity accleration, g=9.8m/s
2.
Fig. 7 provides an embodiment of plane air bearing surface throttle orifice on sleeve.In the present embodiment, sleeve 6 lower surface is along the circumferential direction uniform 8 plane air bearing surface throttle orifices 24 around the center of circle, and diameter is φ 0.2mm.
Claims (10)
1. the Zero-rigidity vibration isolator of a double-layer air flotation crossing decoupling and the decoupling zero of flexible membrane angle, by upper mounting plate (1), lower installation board (2), clean compressed gas source (3), tracheae (26) and vibration isolator main body (4) composition, vibration isolator main body (4) is arranged between upper mounting plate (1) and lower installation board (2), clean compressed gas source (3) is connected with vibration isolator main body (4) by tracheae (26), it is characterized in that: in the structure of described vibration isolator main body (4), the lower surface of sleeve (6) and air supporting plate (34) are lubricated by axial carrying plane air bearing surface (21) and support, flexible membrane (5) is arranged on the upper end of sleeve (6), and compressed and sealing by trim ring (22), top board (7a) and the press table (7b) of pressing plate assembly (7) are coaxially arranged on the upper of flexible membrane (5), lower surface, and clamp flexible membrane (5), upper surface and the upper mounting plate (1) of top board (7a) are rigidly connected, X is rigidly connected to the lower surface of air-float guide rail (29) and air supporting plate (34), sleeve (6) is lubricated and guiding by X direction guiding rail air bearing surface (31) to air-float guide rail (29) with X, lower surface and the lower installation board (2) of Y-direction air-float guide rail (30) are rigidly connected, air supporting plate (34) and lower installation board (2) are lubricated by Z-direction bearing air-float face (33) and support, air supporting plate (34) is lubricated and guiding by Y-direction guide rail air bearing surface (32) with Y-direction air-float guide rail (30), Z-direction voice coil motor (10), Z-direction displacement transducer (13) and Z-direction limit switch (16) are arranged between pressing plate assembly (7) and sleeve (6), X is to voice coil motor (8), X is to displacement transducer (11), X is arranged between sleeve (6) and air supporting plate (34) to limit switch (14), Y-direction voice coil motor (9), Y-direction displacement transducer (12), Y-direction limit switch (15) is arranged between air supporting plate (34) and lower installation board (2), the driving force direction of Z-direction voice coil motor (10) is vertical direction, X is mutually vertical in horizontal plane to the driving force direction of voice coil motor (8) and Y-direction voice coil motor (9), X, Y, Z-direction displacement transducer (11, 12, 13) and X, Y, Z-direction limit switch (14, 15, 16) line of action direction and X, Y, Z-direction voice coil motor (8, 9, 10) driving force direction is consistent, X, Y, Z-direction displacement transducer (11,12,13) are connected with the signal input part of controller (19) respectively with X, Y, Z-direction limit switch (14,15,16), the signal output part of controller (19) is connected with the signal input part of driver (20), and the signal output part of driver (20) is connected with X, Y, Z-direction voice coil motor (8,9,10) respectively.
2. the Zero-rigidity vibration isolator of double-layer air flotation crossing decoupling according to claim 1 and the decoupling zero of flexible membrane angle, it is characterized in that: in described sleeve (6), be provided with gas pressure sensor (17), sleeve (6) is provided with suction port (23) and solenoid valve (18), gas pressure sensor (17) is connected with the signal input part of controller (19), the signal output part of controller (19) is connected with the signal input part of driver (20), and the signal output part of driver (20) is connected with solenoid valve (18).
3. the Zero-rigidity vibration isolator of double-layer air flotation crossing decoupling according to claim 1 and the decoupling zero of flexible membrane angle, is characterized in that: described X, Y, Z-direction voice coil motor (8,9,10) are cylinder type voice coil motor or plate voice coil motor.
4. the Zero-rigidity vibration isolator of double-layer air flotation crossing decoupling according to claim 1 and the decoupling zero of flexible membrane angle, is characterized in that: described X is single rail structure or two guide rail structure to air-float guide rail (29) and Y-direction air-float guide rail (30).
5. the Zero-rigidity vibration isolator of double-layer air flotation crossing decoupling according to claim 1 and the decoupling zero of flexible membrane angle, is characterized in that: described X, Y, Z-direction displacement transducer (11,12,13) are grating scale, magnetic railings ruler, appearance grid chi or linear potentiometer.
6. the Zero-rigidity vibration isolator of double-layer air flotation crossing decoupling according to claim 1 and the decoupling zero of flexible membrane angle, is characterized in that: described X, Y, Z-direction limit switch (14,15,16) are mechanical type limit switch, Hall-type limit switch or photoelectric limit switch.
7. the Zero-rigidity vibration isolator of double-layer air flotation crossing decoupling according to claim 1 and the decoupling zero of flexible membrane angle, is characterized in that: described flexible membrane (5) is rubber membrane.
8. the Zero-rigidity vibration isolator of double-layer air flotation crossing decoupling according to claim 1 and the decoupling zero of flexible membrane angle, is characterized in that: described sleeve (6) interior gas pressure is 0.1MPa ~ 0.8MPa.
9. the Zero-rigidity vibration isolator of double-layer air flotation crossing decoupling according to claim 1 and the decoupling zero of flexible membrane angle, is characterized in that: the air-film thickness in described axial carrying plane air bearing surface (21), X direction guiding rail air bearing surface (31), Y-direction guide rail air bearing surface (32) and Z-direction bearing air-float face (33) is 10 μm ~ 20 μm.
10. the Zero-rigidity vibration isolator of double-layer air flotation crossing decoupling according to claim 1 and the decoupling zero of flexible membrane angle, is characterized in that: the diameter of the plane air bearing surface throttle orifice (24) on described sleeve (6) is φ 0.1mm ~ φ 1mm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210571703.0A CN103062284B (en) | 2012-12-19 | 2012-12-19 | Zero-rigidity vibration isolator of double-layer air-flotation orthogonal decoupling and flexible film angle decoupling |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210571703.0A CN103062284B (en) | 2012-12-19 | 2012-12-19 | Zero-rigidity vibration isolator of double-layer air-flotation orthogonal decoupling and flexible film angle decoupling |
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| CN104596720B (en) * | 2015-01-15 | 2017-08-08 | 浙江大学 | Three-component standard vibration machine based on reed-type decoupling device |
| CN107165937B (en) * | 2017-04-21 | 2018-12-07 | 燕山大学 | A kind of transverse bearing of the dual bearing of electromagnetism-static pressure |
| CN108594603B (en) * | 2018-05-09 | 2019-03-29 | 哈尔滨工业大学 | Cantilevered linear movement reference device based on double-layer air flotation |
| CN112362225A (en) * | 2020-11-03 | 2021-02-12 | 安徽安广电气有限公司 | Monocrystalline silicon pressure transmitter with shock-absorbing function |
| CN113917796A (en) * | 2021-09-22 | 2022-01-11 | 哈尔滨工业大学 | Multi-degree-of-freedom macro-micro hybrid precision motion platform |
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| CN1480787A (en) * | 2002-07-26 | 2004-03-10 | 尼康株式会社 | Vibration isolation device, stage device, and exposure device |
| CN102543217A (en) * | 2012-01-20 | 2012-07-04 | 澳门大学 | Macro-micro driven bidimensional integrated micro positioning platform |
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