CN102655068A - Manufacturing method of double-row rectangular comb-like slow wave structure - Google Patents
Manufacturing method of double-row rectangular comb-like slow wave structure Download PDFInfo
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- CN102655068A CN102655068A CN2011100500422A CN201110050042A CN102655068A CN 102655068 A CN102655068 A CN 102655068A CN 2011100500422 A CN2011100500422 A CN 2011100500422A CN 201110050042 A CN201110050042 A CN 201110050042A CN 102655068 A CN102655068 A CN 102655068A
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Abstract
The invention discloses a manufacturing method of a double-row rectangular comb-like slow wave structure, relating to a vacuum electronic device technology. The manufacturing method comprises the following steps of: (A) manufacturing an upper rectangular comb structure, a lower rectangular comb structure and a tube shell for later use as required; (B) squeezing the lower rectangular comb structure into the tube shell from an upper opening; (C) squeezing the upper rectangular comb structure into the tube shell from the upper opening; (D) connecting the upper rectangular comb structure and the lower rectangular comb structure with the inner wall of the tube shell tightly; and (E) fixedly connecting the upper end surfaces and the lower end surfaces of the upper rectangular comb structure and the lower rectangular comb structure with the upper end surface and the lower end surface of the tube shell to obtain the required double-row rectangular comb-like slow wave structure. The double-row rectangular comb-like slow wave structure manufactured by the invention can be used for microwave, millimeter wave, submillimeter wave and even THz travelling wave tubes, backward wave tubes, extended interaction klystrons (EIK) and the like.
Description
Technical field
The present invention relates to the vacuum electron device technical field, is a kind of manufacturing approach of double rectangle comb-type slow wave structure.
Background technology
The microwave vacuum device has experienced 60 years of development courses since the invention forties in 20th century, in technology such as radar, communication, electronic countermeasures, guidance and aviation, important use is arranged at present.Although since the seventies in 20th century; Semiconductor device has progressively replaced low power microwave vacuum device; But vacuum device still occupies absolute advantage under high-power, high-frequency situation; Even employing power synthetic technique, semiconductor device its power output in quite long period also can't be competed with vacuum device mutually.And the Technology Need of modern military war requires power device to develop to the direction of high-power, broadband, high efficiency and reliability especially, and this demand is that vacuum device provides good development environment.Just because of vacuum device high-power, the advantage of aspects such as broadband, the signal source that is used at present communication and electronic countermeasures in the military affairs has adopted this type device mostly.Microwave tube (comprising travelling wave tube, klystron, magnetron and gyrotron etc.) still occupies absolute advantage in high-power, high-frequency application.
In recent years, vacuum electron device continues to develop with the high band direction to high-power, has succeeded in developing the following millimeter wave traveling wave tube of W wave band at present, and has carried out the research based on the THz travelling wave tube of folded waveguide abroad.In addition, developed backward wave tube at present, but power is less, the research that is launching to improve backward wave tube power both at home and abroad at present up to 1THz.These researchs show that vacuum electron device still is one of the strong competitor in THz field.And people have caused high enthusiasm at home and abroad to the research in THz field.2004, when American technology comment (Technology Review) competition " changes future world ten big technology ", with the THz technology as one of wherein urgent technology.In January, 2005, Japanese government is asserted 10 years from now on to the THz correlation technique first of " country column technology ten great strategy targets ", and the 2006-2010 third phase science and technology basic plan of listing Japanese government in is supported.In the China's Mainland, held " Fragrance Hill science meeting " specially, the development of China THz technology was discussed in 2005.After this once listd in the works 973 and given support.At present, there be more than 100 research organization to carry out the research of THz electromagnetic wave association area in the world, related to the U.S., Japan, Germany, Australia, Korea S, TaiWan, China and China's Mainland etc.
Travelling wave tube and backward wave tube are two kinds of traditional vacuum electron devices, have developed at present millimeter wave traveling wave tube and submillimeter wave travelling wave tube, and have developed the backward wave tube up to 1THz.The core component of travelling wave tube and backward wave tube all is a slow wave structure.For this point is described, can describe with the typical structure of travelling wave tube.Mainly form on the travelling wave tube structure by five parts, as shown in Figure 5.
(1) electron gun.Its main effect is that generation parameter shape and electric current satisfy the electronics notes that homogeneous tube requires, and accelerates to the electronics notes than the electromagnetic phase velocity of on slow wave structure, carrying out a little soon, so that and electromagnetic field positive energy exchange realization amplification.
(2) slow wave structure.Make the electromagnetic phase velocity in space movement velocity slack-off and that electronics is annotated synchronous by specific slow wave structure, electronics is annotated and the abundant positive energy exchange of electromagnetic wave, thereby electromagnetic wave energy strengthens amplifying signal.
(3) magnetic focusing system.Its effect is to come about beam electrons to annotate the horizontal proliferation that produces because of space-charge force with adding electromagnetic force, annotates to obtain a stable electronics of function admirable transmission, realizes and the effective interaction and the energy exchange of electromagnetic field of high frequency, reaches the purpose of amplifying signal.
(4) collector.It is used for collecting with the electromagnetic wave positive energy exchange after useless electronics.Improving electronic efficiency and heat dissipation problems is the problem that will solve in the collector design.
(5) input and output coupling device.This is the entrance and exit of travelling wave tube signal.It mainly acts on is to realize that the areflexia transition between external feeder line and the slow wave line connects.Calculating the input/output port impedance matching and reducing the loss problem is the problem that this part will solve.
What be in core status in the above-mentioned parts is exactly slow wave structure.The slow wave structure of being used widely at present has helix line slow-wave system and distressed structure thereof; Comb teeth shape slow wave system and distressed structure thereof; The linear slow wave system of bar; Coupling cavity shape slow wave system or the like.These slow wave circuits respectively have its pluses and minuses in different working frequency range and application scenario.
The dispersion characteristics of helix are smooth, and working band is wide, and circuit structure is simple, make easily, in travelling wave tube, obtained extensive use.But the power output of helix TWT is restricted, and particularly when travelling wave tube worked in millimere-wave band, because the helix lateral dimension is minimum, heat radiation was difficult, and power capacity is little.
Coupling cavity is the slow wave structure of using at most in the present high power travelling wave tube, and basic characteristics are perfect heat-dissipatings, and power capacity is big.But because the chromatic dispersion of coupling cavity circuit is very strong, and side frequency place coupling impedance is very high, is prone to produce the band edge vibration, so working band is narrower, generally has only 10%.Millimeter wave coupled-cavity TWT accessory size is very little, and processing, assembly precision require high, and rate of finished products is low, and cost is high.
Ring bar structure is a kind of slow wave structure that is derived from by the back-roll bifilar helix; Its maximum characteristics are that the first-harmonic coupling impedance is high; The harmonic wave coupling impedance is low, and therefore encircling bar structured lin wave pipe can work in higher voltage (about 20kv), has improved the level of pulse output power greatly.But the chromatic dispersion of ring bar structure is more much better than than helix, and requiring at working band is not very wide and pulse power requires often still to adopt ring bar structure when big.
Toroidal ring structure is by the structural evolution of ring bar, and it is to replace the bar in the ring bar structure with arc or π shape circle, and increases the width on the ring cross section.Because circle has the energy storage effect, the longitudinal field of ring is stronger than helix, and coupling impedance is high, so the gain of ring-loop TWT and efficient are higher; Secondly, when ring was operated in symmetric mode, harmonic component was significantly less than helix, and-1 subharmonic is almost nil, can not produce backward wave oscillation; The size of ring-loop TWT can be done lessly in addition, and phase characteristic is good, and power output is big, and requiring at working band is not very wide occasion, and ring-loop TWT is quite favored.
Ladder track is a kind of slow wave circuit that is suitable for the short millimeter band high power travelling wave tube, structurally can regard the not coupling cavity structure of outstanding joint as, though coupling impedance is not high; Interaction efficiency is not so good as coupling cavity with gain; But its distinctive process structure makes it be specially adapted to the work of W wave band, the Millitron of Varian company development; Operating frequency is 80-100GHz, continuous wave power 100W.
Can find out that from above discussion short centimetre and millimere-wave band, helix can satisfy the requirement in broadband, but power capacity is not enough.Coupling cavity is well suited for high-power applications, but can not satisfy the requirement in broadband.Other slow wave structures can not satisfy the powerful requirement in broadband, solve the high-power problem in broadband of millimeter wave traveling wave tube.Various generally structures respectively have quality.
Though comb line slow wave structure coupling impedance is not too high, to compare size bigger with other slow wave structures, and structure is simple relatively; The machining accuracy ratio is easier to reach; Perfect heat-dissipating, and this structure and distressed structure thereof can be used for whole millimere-wave band, even in the submillimeter region travelling wave tube.Therefore, comb line has important application prospects in millimere-wave band.But do not utilize the comb line slow wave structure to succeed in developing the relevant report of travelling wave tube or backward wave tube at present.
Summary of the invention
The objective of the invention is to disclose a kind of manufacturing approach of double rectangle comb-type slow wave structure, the comb-type slow wave structure of manufacturing can be used for travelling wave tube or backward wave tube.
For achieving the above object, technical solution of the present invention is:
A kind of manufacturing approach of double rectangle comb-type slow wave structure, it comprises step:
A) according to requiring to make rectangle comb structure, following rectangle comb structure and shell, subsequent use;
B) comb structure to following rectangle by in the jammed entering shell of under shed;
C) comb structure to last rectangle by in the jammed entering shell of upper shed again;
D) upper and lower rectangle comb structure and inner wall of tube shell being close to connects;
E) upper and lower end face of upper and lower rectangle comb structure is affixed with the upper and lower side of shell, must required double rectangle comb-type slow wave structure.
The manufacturing approach of described double rectangle comb-type slow wave structure; Its said rectangle comb structure that goes up is identical with the space width of following rectangle comb structure, but broach thickness is different, the staggered or alignment in broach position; Be provided with a plurality of rectangle broach in rectangular slab one side perpendicular to the plate face; A plurality of rectangle broach are parallel each other, and there are half circumferential notch, the concyclic in the axial direction heart of a plurality of semicircle breach in each middle part, rectangle broach outer end;
Respectively there is a distance at two ends on each rectangle broach length direction apart from the rectangular slab lateral margin, and this distance is the gulde edge edge.
The manufacturing approach of described double rectangle comb-type slow wave structure; Its said shell; Be the pipe of upper and lower opening, its central through hole cross section is I shape, and the I shape that constitutes when being oppositely arranged with upper and lower rectangle comb structure rectangle broach is suitable; Wherein, be location notch with gulde edge along four suitable axial grooves.
The manufacturing approach of described double rectangle comb-type slow wave structure, its said A) step is to make upper and lower rectangle comb structure with the electric processing method of wire at a slow speed.
The manufacturing approach of described double rectangle comb-type slow wave structure, its said B) step, be that following rectangle is combed two location notchs of the two gulde edges edge of structure by shell central through hole left side or right side, axially to clamp-on in the shell, its a plurality of rectangle broach are towards the center of circle.
The manufacturing approach of described double rectangle comb-type slow wave structure, its said C) step, be that last rectangle is combed two location notchs of two gulde edges of structure along a side of being left by the shell central through hole, axially to clamp-on in the shell, its a plurality of rectangle broach are towards the center of circle;
At this moment, a plurality of semicircle breach of upper and lower rectangle comb structure axially constitutes a circular channel at home position; The rectangle comb shaft of upper and lower rectangle comb structure is arranged in a crossed manner to relatively, or alignment is provided with.
The manufacturing approach of described double rectangle comb-type slow wave structure, its said D) step, be that upper and lower rectangle comb structure and inner wall of tube shell are close to when connecting, upper and lower rectangle comb structure upper and lower side is concordant with the shell upper and lower side.
The manufacturing approach of described double rectangle comb-type slow wave structure, its said E) step is affixed with method for laser welding.
Agreeing with mutually between the manufacturing approach of described double rectangle comb-type slow wave structure, the gulde edge edge of its said upper and lower rectangle comb structure and the location notch of shell, is sliding joining or tightly sliding joining.
The manufacturing approach of described double rectangle comb-type slow wave structure, the rectangle comb-type slow wave structure of its manufacturing are used for microwave, millimeter wave, submillimeter wave and even THz travelling wave tube, backward wave tube and extended interaction klystron (EIK).
The manufacturing approach of a kind of double rectangle comb-type slow wave structure of the present invention, the travelling wave tube of manufacturing or backward wave tube especially are suitable for developing the needs of submillimeter wave, THz travelling wave tube or backward wave tube with double rectangle comb-type slow wave structure.
Description of drawings
Fig. 1 is the last rectangle comb structural representation in the manufacturing approach of a kind of double rectangle comb-type slow wave structure of the present invention; Wherein:
Fig. 1 a is last rectangle comb section of structure;
Fig. 1 b is last rectangle comb structure front elevation;
Fig. 1 c is last rectangle comb structure end view drawing;
Fig. 2 is the following rectangle comb structural representation in the manufacturing approach of a kind of double rectangle comb-type slow wave structure of the present invention; Wherein:
Fig. 2 a is that rectangle is combed section of structure down;
Fig. 2 b is that rectangle is combed the structure front elevation down;
Fig. 2 c is that rectangle is combed the structure end view drawing down;
Fig. 3 is the shell structural representation in the manufacturing approach of a kind of double rectangle comb-type slow wave structure of the present invention; Wherein:
Fig. 3 a is the shell section of structure;
Fig. 3 b is a shell structure end view drawing;
A kind of double rectangle comb-type slow wave structure sketch map that Fig. 4 makes for manufacturing approach of the present invention; Wherein:
Fig. 4 a is made double rectangle comb-type slow wave structure profile;
Fig. 4 b is made double rectangle comb-type slow wave structure end view drawing.
Label among the figure:
1-rectangle broach 2-annotates the semicircle breach of passage as electronics
The 3-gulde edge is along 4-rectangle broach
5-annotates the semicircle breach 6-of passage gulde edge edge as electronics;
7-shell wall 8-goes up rectangle comb location notch
Rectangle comb location notch 10-shell under the 9-
Rectangle comb structure under the last rectangle comb of the 11-structure 12-
The 13-electronics is annotated passage;
Embodiment
(1) selects metal materials such as Monel for use, comb structure with last rectangle comb structure and following rectangle shown in Figure 2 that traditional processes of wire electricity cutting at a slow speed is as shown in Figure 1 with excellent machinability.The last rectangle comb structure of being processed is reserved with like " 3 " among Fig. 1 indicated gulde edge edge, and the following rectangle comb structure of being processed is reserved with like " 6 " among Fig. 2 indicated gulde edge edge.Also can use methods such as little mould electrocasting of photoetching (LIGA) and the little mould electrocasting of deep reaction ion etching (DRIE) to make said structure.After machine work or the little process finishing, can carry out necessary chemical cleaning.Whether each dimensional parameters that detects the structure that obtains meets design requirement.To obtain the electric conductivity of structure in order improving, can further to carry out gold-plated or copper plating treatment.
(2) adopt metal materials such as Monel, with rectangle comb structure on traditional processes of wire electricity cutting at a slow speed shell as shown in Figure 3 and following rectangle comb structure shown in Figure 1 with excellent machinability and good air-tightness.Subsequently, necessary chemical cleaning can be carried out, also gold-plated or copper plating treatment can be further carried out.The shell structure of being processed is reserved with like " 7 " among Fig. 3 indicated last rectangle and combs location notch and comb location notch like " 8 " among Fig. 3 indicated following rectangle.
(3), go in the shell that shows like Fig. 3 last rectangle comb structure as shown in Figure 1 and following rectangle comb structural member shown in Figure 2 are jammed, thereby form double rectangle comb-type slow wave structure as shown in Figure 4 by suitable die clamper.When carrying out jammed operation, last rectangle comb structure and following rectangle comb structure gulde edge separately be along agreeing with the corresponding location notch of shell respectively mutually, and complete jammed in shell along location notch quilt separately.It can be to slide to join or tightly slide to join that size between the location notch of said gulde edge edge of going up rectangle comb structure and following rectangle comb structure and shell cooperates.In the jammed operation, can be heated to 700 ℃-900 ℃ to shell, promptly adopt so-called " hot extrusion " technology, can make operation comparatively smooth like this with suitable equipment.
(5) after jammed operation is accomplished, can further weld last rectangle comb structure, following rectangle comb structure and shell with method for laser welding at two end faces (like Fig. 4 (b)) of formed slow wave structure.
Claims (10)
1. the manufacturing approach of a double rectangle comb-type slow wave structure is characterized in that, comprises step:
A) according to requiring to make rectangle comb structure, following rectangle comb structure and shell, subsequent use;
B) comb structure to following rectangle by in the jammed entering shell of under shed;
C) comb structure to last rectangle by in the jammed entering shell of upper shed again;
D) upper and lower rectangle comb structure and inner wall of tube shell being close to connects;
E) upper and lower end face of upper and lower rectangle comb structure is affixed with the upper and lower side of shell, must required double rectangle comb-type slow wave structure.
2. the manufacturing approach of double rectangle comb-type slow wave structure as claimed in claim 1 is characterized in that, the said rectangle comb structure that goes up is identical with the space width of following rectangle comb structure; But broach thickness is different; Staggered or the alignment in broach position is provided with a plurality of rectangle broach perpendicular to the plate face in rectangular slab one side, and a plurality of rectangle broach are parallel each other; There are half circumferential notch, the concyclic in the axial direction heart of a plurality of semicircle breach in each middle part, rectangle broach outer end;
Respectively there is a distance at two ends on each rectangle broach length direction apart from the rectangular slab lateral margin, and this distance is the gulde edge edge.
3. the manufacturing approach of double rectangle comb-type slow wave structure as claimed in claim 1; It is characterized in that said shell is the pipe of upper and lower opening; Its central through hole cross section is I shape; The I shape that constitutes when being oppositely arranged with upper and lower rectangle comb structure rectangle broach is suitable, wherein, with gulde edge be location notch along four suitable axial grooves.
4. according to claim 1 or claim 2 the manufacturing approach of double rectangle comb-type slow wave structure is characterized in that said A) step is to make upper and lower rectangle comb structure with the electric processing method of wire at a slow speed.
5. the manufacturing approach of double rectangle comb-type slow wave structure as claimed in claim 1; It is characterized in that said B) step is that following rectangle is combed two location notchs of the two gulde edges edge of structure by shell central through hole left side or right side; Axially clamp-on in the shell, its a plurality of rectangle broach are towards the center of circle.
6. the manufacturing approach of double rectangle comb-type slow wave structure as claimed in claim 1; It is characterized in that said C) step is that last rectangle is combed two location notchs of two gulde edges of structure along a side of being left by the shell central through hole; Axially clamp-on in the shell, its a plurality of rectangle broach are towards the center of circle;
At this moment, a plurality of semicircle breach of upper and lower rectangle comb structure axially constitutes a circular channel at home position; The rectangle comb shaft of upper and lower rectangle comb structure is arranged in a crossed manner to relatively, or alignment is provided with.
7. the manufacturing approach of double rectangle comb-type slow wave structure as claimed in claim 1 is characterized in that, said D) step, be that upper and lower rectangle comb structure and inner wall of tube shell are close to when connecting, upper and lower rectangle comb structure upper and lower side is concordant with the shell upper and lower side.
8. the manufacturing approach of double rectangle comb-type slow wave structure as claimed in claim 1 is characterized in that, said E) step is affixed with method for laser welding.
9. like the manufacturing approach of claim 2 or 3 described double rectangle comb-type slow wave structures, it is characterized in that, agree with mutually between the gulde edge edge of said upper and lower rectangle comb structure and the location notch of shell, is sliding joining or tightly sliding joining.
10. the manufacturing approach of double rectangle comb-type slow wave structure as claimed in claim 1 is characterized in that, the rectangle comb-type slow wave structure of manufacturing is used for microwave, millimeter wave, submillimeter wave and even THz travelling wave tube, backward wave tube and extended interaction klystron.
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| CN2011100500422A CN102655068A (en) | 2011-03-02 | 2011-03-02 | Manufacturing method of double-row rectangular comb-like slow wave structure |
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| CN2011100500422A CN102655068A (en) | 2011-03-02 | 2011-03-02 | Manufacturing method of double-row rectangular comb-like slow wave structure |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103854936A (en) * | 2012-12-07 | 2014-06-11 | 中国科学院电子学研究所 | Method for manufacturing rectangular comb-shaped slow wave structure |
| CN107993911A (en) * | 2017-11-24 | 2018-05-04 | 电子科技大学 | A kind of Terahertz Zigzag type octamonic amplifier |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE1011004B (en) * | 1952-12-23 | 1957-06-27 | Western Electric Co | Waveguide for traveling wave tubes |
| DE3302791A1 (en) * | 1983-01-28 | 1984-08-02 | Licentia Patent-Verwaltungs-Gmbh, 6000 Frankfurt | Travelling-wave tube and a method for its production |
| US4951380A (en) * | 1988-06-30 | 1990-08-28 | Raytheon Company | Waveguide structures and methods of manufacture for traveling wave tubes |
-
2011
- 2011-03-02 CN CN2011100500422A patent/CN102655068A/en active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE1011004B (en) * | 1952-12-23 | 1957-06-27 | Western Electric Co | Waveguide for traveling wave tubes |
| DE3302791A1 (en) * | 1983-01-28 | 1984-08-02 | Licentia Patent-Verwaltungs-Gmbh, 6000 Frankfurt | Travelling-wave tube and a method for its production |
| US4951380A (en) * | 1988-06-30 | 1990-08-28 | Raytheon Company | Waveguide structures and methods of manufacture for traveling wave tubes |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103854936A (en) * | 2012-12-07 | 2014-06-11 | 中国科学院电子学研究所 | Method for manufacturing rectangular comb-shaped slow wave structure |
| CN103854936B (en) * | 2012-12-07 | 2017-08-25 | 中国科学院电子学研究所 | A kind of manufacture method of rectangle comb-type slow wave structure |
| CN107993911A (en) * | 2017-11-24 | 2018-05-04 | 电子科技大学 | A kind of Terahertz Zigzag type octamonic amplifier |
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Application publication date: 20120905 |