CN101975991B - Method and device for expanding focal depth based on combination of amplitude modulation, polarization and phase - Google Patents
Method and device for expanding focal depth based on combination of amplitude modulation, polarization and phase Download PDFInfo
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- CN101975991B CN101975991B CN2010102981206A CN201010298120A CN101975991B CN 101975991 B CN101975991 B CN 101975991B CN 2010102981206 A CN2010102981206 A CN 2010102981206A CN 201010298120 A CN201010298120 A CN 201010298120A CN 101975991 B CN101975991 B CN 101975991B
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Abstract
The invention discloses a focal depth expanding method, which comprises the following steps: the Bessel-Gauss radial polarized light is subjected to amplitude modulation through an annular diaphragm and split into two beams; after one beam is subjected to 0-pi phase coding, the other beam after optical deflection enters the same optical beam combiner to form a combined coaxial beam, and the combined coaxial beam is focused by a lens to obtain an expanded focal depth light spot. The invention also discloses a device for expanding the focal depth, which comprises: the device comprises a light source for generating Bessel-Gauss radial polarized light, an annular diaphragm, a beam splitter, a 0/pi phase plate, an optical folding device, an optical beam combining device and a apochromatic aberration focusing lens. In the method and the device, Bessel-Gauss laser is used as a working light beam, the focal depth of the expanded focused spot reaches more than 8 lambda, the focused spot can reach below the diffraction limit of the system, the expanded light intensity is more uniform in distribution, and the method and the device are more beneficial to practical application.
Description
Technical field
The present invention relates to photoetching, optical storage and tomography field, be specifically related to a kind of focus method and device of extended focal depth.
Background technology
Extended focal depth launches in the research of applications such as optical disc storage, microscope imaging, optical correction and tomography in succession; Wherein based on wavefront coding technology (Wavefront Coding; WFC) be the new technology of the expansion optical system depth of focus that just grows up the nineties, propose in nineteen ninety-five by Dowski and Cathey.The research that obtained extended focal depth through polarization effect in recent years also receives publicity, and report utilizes radial vector light beam, accurate bifocal birefringent lens and glueds joint double lens and wait the research that realizes extended focal depth in succession recently.More than these methods research has extensively and profoundly been carried out in optical shaft orientation extended focal depth aspect, but be to be cost above most methods extended focal depth the time to sacrifice lateral resolution.
Summary of the invention
The invention provides a kind ofly based on selecting the special light pattern for use, the method and apparatus that Modulation and Amplitude Modulation, position modulation mutually, polarization technology and coherence combine comes the expanding system depth of focus, and Application of B essel-Gauss laser is as the working beam of system; In air dielectric; Focused spot after the expansion not only depth of focus can reach more than 8 λ, and beam quality also increases, and focal beam spot can reach below the diffraction limit of system itself; And the light distribution after the expansion is more even, more helps practical application.
A kind of depth of focus extended method that combines with polarization technology and phase board based on Modulation and Amplitude Modulation may further comprise the steps:
(1) working beam Bessel-Gauss radial polarisation light is passed through the lighttight annular diaphragm in centre, light beam is converted into the hollow radial polarized light beam;
(2) the hollow radial polarized light beam described in the step (1) is divided into two bundles through optical splitter, i.e. the first beam split light beam and the second beam split light beam;
(3) the described first beam split light beam is carried out 0/ π phase coding through one 0/ π phase board after, incide an optics bundling device spare;
(4) the described second beam split light beam being carried out inciding the optics bundling device spare described in the step (3) after light path turns back through the optics device of turning back, is the coaxial beam of closing bundle from the light of described optics bundling device spare outgoing;
(5) coaxial beam of closing bundle that obtains in the step (4) is focused on through the secondary color difference condenser lens that disappears, near the focal plane of lens, obtain an extended focal depth hot spot.
Wherein, described annular diaphragm can realize that the preferred 0.8 times of entrance pupil radius of its lightproof part and the marginal radius of full impregnated part aperture obtains the hollow radial polarized light beam with the mode of photoetching.
Wherein, the ratio of the described first beam split light beam and the second beam split light beam light intensity is 0.53: 0.47.
Wherein, 0/ π phase board can be realized through lithography process or spatial light modulator.0/ π phase board carries out phase coding, the preferred 0.955 times of entrance pupil radius of the interregional marginal radius of its 0/ π bit phase delay to polarized light radially.
The entrance pupil radius is generally the radii size of the incident beam circular section that gets into optical system.
Wherein, the described secondary color aplanat that disappears is preferably the secondary color aplanat that disappears of high-NA, and described high-NA is preferably NA=0.95.
The described optics device of turning back is a plane mirror, as required a plurality of plane mirrors can be set.
The present invention also provide a kind of be used to realize above-mentioned based on the special light pattern, Modulation and Amplitude Modulation, the device that the depth of focus that position modulation mutually, polarization combine with coherent technique is expanded comprises:
Be used to produce the light source of Bessel-Gauss radial polarisation light;
Be used for said Bessel-Gauss radial polarisation light is converted into the annular diaphragm of hollow light beam;
The optical splitter that to be used for described hollow light beam beam split be the first beam split light beam and the second beam split light beam;
Be used for the first beam split light beam is carried out 0/ π round and in position phase-plate of 0/ π phase coding;
Be used for the second beam split light beam is carried out optics that light beam the turns back device of turning back, constitute by first catoptron and second catoptron;
Be used for to close through the second beam split light beam after the first beam split light beam behind the 0/ π phase coding and light beam are turned back the optics bundling device spare of bundle;
Be used to carry out the secondary color difference condenser lens that disappears of the high-NA that light beam focuses on.
In apparatus of the present invention, described first catoptron and second scintilloscope are preferably the metal film catoptron, to keep incident light consistent with the reflected light polarization state.
In apparatus of the present invention, the described secondary color aplanat that disappears is preferably the secondary color aplanat that disappears of high-NA, and described high-NA is preferably NA=0.95.
In apparatus of the present invention, in the described annular diaphragm, the marginal radius of aperture of lightproof part and full impregnated part is preferably 0.8 times of entrance pupil radius.
In apparatus of the present invention, in the described 0/ π round and in position phase-plate, the interregional marginal radius of 0/ π bit phase delay is preferably 0.955 times of entrance pupil radius.
Principle of work of the present invention is following:
Bessel-Gauss radial polarisation light working beam is through an annular diaphragm; Because the Bessel-Gauss zlasing mode is that the center section energy is low; The outer portion of energy is high, so block after intermediate beam only stays the peripheral annular part, can better be focused to small light spot and long depth of focus; Afterwards, light beam will further be divided into two bundles, and the two-beam light intensity is a special ratios, wherein a branch of carry out phase coding through 0/ π round and in position phase-plate after, merge into coaxial parallel light beam with another Shu Chongxin.According to the Theory of Electromagnetic Field of light field, the light beam after converging will no longer be common radial polarisation light, and the radial section of light beam will present the complicated Electric Field Distribution situation that has time factor.Such light beam is through behind the secondary color difference condenser lens that disappears of high-NA; To produce focusing effect at the rear focus place of lens; According to the interference of light diffraction theory, the electric-field intensity distribution in the focal beam spot for the radial polarisation light that carries out phase coding through 0/ π phase board through the focousing field behind the same lens with not through the radial polarisation light of phase coding vector addition through the focousing field internal electric field intensity distributions behind the same lens.The focousing field internal electric field distributes and can calculate through the Debye integral formula, and then addition draws the interior electric field intensity of focal beam spot of the excitation beam after converging.According to the electric field intensity of light and the relation of light intensity, the focal beam spot that can calculate this moment will be the solid focal beam spot of overlength depth of focus.
With respect to prior art, the present invention has following beneficial technical effects:
(1) focal beam spot that adopts the inventive method and device to obtain reaches the depth of focus of wavelength more than 8 times in the vertical, and trans D can be compressed to below the diffraction limit of system itself, is much better than prior art focusing level.
(2) focal beam spot longitudinal component (Z is to the component) purity that produces has reached more than 85%, is much better than most of prior art, can be used in fields such as scanning near-field microscope, photoetching and optical storage easily.
(3) coherent light of the inventive method use single wavelength has reduced quantity of light source as working beam, has saved system cost, has increased practicality.
(4) the focal beam spot light intensity that adopts the inventive method and device to obtain has plateau effect, and intensity is more even in the vertical, helps practical application.
Description of drawings
Fig. 1 is the device synoptic diagram that is used to realize the depth of focus expansion of the present invention.
Fig. 2 is the synoptic diagram of employed annular diaphragm among the present invention.
Fig. 3 is the synoptic diagram of employed 0/ π phase board among the present invention.
Fig. 4 is the light intensity section comparison diagram when only using Bessel-Gauss radial polarisation light to add the ring light Modulation and Amplitude Modulation; Wherein, (a) being the surface of intensity distribution of xz section upper edge optical axis direction, (b) is the surface of intensity distribution on the optical axis direction of yz section upper edge, (c) is the surface of intensity distribution on the xy section.
Fig. 5 is the focal beam spot section light intensity comparison diagram when using native system (Fig. 1 device); Wherein, (a) being the surface of intensity distribution of xz section upper edge optical axis direction, (b) is the surface of intensity distribution on the optical axis direction of yz section upper edge, (c) is the surface of intensity distribution on the xy section.
Among the figure:
Embodiment
Specify the present invention below in conjunction with accompanying drawing and embodiment, but the present invention is not limited to this.
A kind of device that is used to realize the depth of focus expansion as shown in Figure 1 comprises: produce light source, the annular diaphragm 1 of working beam 10, spectroscope 2; 0/ π phase board 3; Light combination mirror 4, the first catoptrons 5, the second catoptrons 6; The secondary color difference that disappears condenser lens 7, the extended focal depth hot spot that obtains after the focusing appear near the working face 8 of the secondary color difference condenser lens 7 that disappears.
The polarization direction that radial polarisation light is every all is along radial direction, and all polarization directions constitute an angular-spread beam.Wherein the light polarization direction of the every bit in the light beam (at the light polarization direction Px of x axle, at the light polarization direction Py of y axle, at the light polarization direction Pz of z axle) can be represented by following unit matrix:
In the formula,
is the angle of interior position polar coordinates vector of light beam vertical Z axle section and X axle.
The light beam (light beam 20) that will pass through behind the annular diaphragm 1 is divided into two bundles through beam splitter 2, and the ratio of two-beam (first light beam 30 and second light beam 50) light intensity is 0.53: 0.47.
Wherein stronger a branch of (first light beam 30) carries out phase coding through 0/ π round and in position phase-plate 3, and the light that obtains (light beam 40) reenters and is mapped to light combination mirror 4.
The cardinal principle of 0/ π round and in position phase-plate, 3 phase codings is to make the light beam through it produce the different phase delay to reach the purpose of phase coding at diverse location.
As shown in Figure 3 is the horizontal synoptic diagram of 0/ π round and in position phase-plate 3, and the interregional marginal radius of its 0/ π bit phase delay is 0.955 times of entrance pupil radius.The bit phase delay amount Δ α of 3 pairs of incident lights of 0/ π round and in position phase-plate is determined by following formula:
In the formula, R
InnerBe the interregional marginal radius of 0/ π bit phase delay on the phase board plane, r is the distance of the interior arbitrfary point of beam cross section apart from the light beam axis.
Through after the turning back of first catoptron 5 (light that obtains is light beam 60) and second catoptron 6, the light that obtains (light beam 70) reenters and is mapped to light combination mirror 4 the more weak light (second light beam 50) of another bundle successively.First catoptron 5 and second catoptron 6 are for can keep the incident light metal film catoptron consistent with the reflected light polarization characteristic.
From the light (light beam 80) of light combination mirror 4 outgoing is the coaxial collimate in parallel light that closes bundle again.Light beam after this converges (light beam 80) will no longer be common hollow polarized light, and the radial section of light beam will present the complicated Electric Field Distribution situation that has time factor.
After light beam after this converges (light beam 80) passes through the secondary color difference condenser lens 7 that disappears, will be that place, working face 8 positions focuses on the formation focal beam spot at lens focal plane.The secondary color difference that here disappears condenser lens 7 is selected the high-NA secondary color aplanat that disappears for use, adopts the high-NA microcobjective that 100 of NA=0.95 * the secondary color difference that disappears has flat field correction that disappears.
Near this focal beam spot light beam Electric Field Distribution can be calculated by following formula:
In the formula,
Be to be the cylindrical coordinate of initial point with desirable focal position, C is a normaliztion constant, A
1Be the light distribution parameter of light beam, A
2Be the structural parameters of the secondary color aplanat 7 that disappears, θ is a beam angle, and i is an imaginary unit,
Angle for position polar coordinates vector and X axle in the light beam vertical Z axle section.Adopt above-mentioned formula can calculate the size of the focal beam spot on the focal plane.Since working beam be the Bessel-Gauss hollow drive to polarized light, therefore calculate and can get focal beam spot vertically being that length can reach more than 8 λ on the z direction of principal axis, can accomplish 9.5 λ in the test, the depth of focus of system has obtained effective expansion.
It is thus clear that working beam Bessel-Gauss radial polarisation light (light beam 10) can obtain the solid focal beam spot of overlength depth of focus after through above-mentioned depth of focus expanding unit on working face.
Fig. 4 is the light intensity section comparison diagram that (just among Fig. 1, blocks light path 40, when only letting light path 70 focus on) when only using Bessel-Gauss radial polarisation light to add the ring light Modulation and Amplitude Modulation; Wherein, (a) being the surface of intensity distribution of xz section upper edge optical axis direction, (b) is the surface of intensity distribution on the optical axis direction of yz section upper edge, (c) is the surface of intensity distribution on the xy section.Can find out that from Fig. 4 focal beam spot is that the full width at half maximum length on the z axle is 3.95 λ in the vertical, horizontal full width at half maximum 0.43 λ.
And Fig. 5 is after letting light beam 40 and light beam 70 close bundle, improves depth of focus and the horizontal spot size of compression through the twin-beam coherence effect.Wherein, (a) being the surface of intensity distribution of xz section upper edge optical axis direction, (b) is the surface of intensity distribution on the optical axis direction of yz section upper edge, (c) is the surface of intensity distribution on the xy section.Can find out that from Fig. 5 focal beam spot is that the full width at half maximum length on the z axle is the overlength depth of focus of＞8 λ (actual can reach 9.5 λ) in the vertical, horizontal full width at half maximum further is compressed to 0.4 λ.Except above-mentioned advantage; It can also be seen that by Fig. 5; The hot spot light intensity presents the flat-top distribution behind extended focal depth; Intensity is more even in the vertical, and the solid focal beam spot of this overlength depth of focus is highly suitable for semiconductor and microelectronic applications field, can be used as litho machine laser ablation device, CD burning and reads the light path design scheme of laser head.Be indifferent under the situation of longitudinal frame, can be used as the design proposal of computed tomography scanning imaging.
Claims (7)
1. a depth of focus extended method is characterized in that, may further comprise the steps:
(1) working beam Bessel-Gauss radial polarisation light is passed through the lighttight annular diaphragm in centre, light beam is converted into the hollow radial polarized light beam; In the described annular diaphragm, the marginal radius of aperture of lightproof part and full impregnated part is 0.8 times of entrance pupil radius;
(2) the hollow radial polarized light beam described in the step (1) is divided into two bundles through optical splitter, i.e. the first beam split light beam and the second beam split light beam, the ratio of the described first beam split light beam and the second beam split light beam light intensity is 0.53: 0.47;
(3) the described first beam split light beam is carried out 0/ π phase coding through one 0/ π phase board after, incide an optics bundling device spare;
(4) the described second beam split light beam being carried out inciding the optics bundling device spare described in the step (3) after light path turns back through the optics device of turning back, is the coaxial beam of closing bundle from the light of described optics bundling device spare outgoing;
(5) the disappear secondary color difference condenser lens of the coaxial beam of closing bundle that obtains in the step (4) through high-NA focused on, near the focal plane of lens, obtain an extended focal depth hot spot.
2. depth of focus extended method as claimed in claim 1 is characterized in that, in the described 0/ π phase board, the interregional marginal radius of 0/ π bit phase delay is 0.955 times of entrance pupil radius.
3. depth of focus extended method as claimed in claim 1 is characterized in that, described high-NA is NA=0.95.
4. a device that is used to realize the depth of focus expansion is characterized in that, comprising:
Be used to produce the light source of Bessel-Gauss radial polarisation light;
Be used for said Bessel-Gauss radial polarisation light is converted into the annular diaphragm of hollow light beam, in the described annular diaphragm, the marginal radius of aperture of lightproof part and full impregnated part is 0.8 times of entrance pupil radius;
The optical splitter that to be used for described hollow light beam beam split be the first beam split light beam and the second beam split light beam, the ratio of the described first beam split light beam and the second beam split light beam light intensity is 0.53: 0.47;
Be used for the first beam split light beam is carried out 0/ π round and in position phase-plate of 0/ π phase coding;
Be used for the second beam split light beam is carried out optics that light beam the turns back device of turning back, constitute by first catoptron and second catoptron;
Be used for will be behind 0/ π phase coding the first beam split light beam and the second beam split light beam after light beam is turned back close the optics bundling device spare of bundle;
Be used to carry out the secondary color difference condenser lens that disappears of the high-NA that light beam focuses on.
5. device as claimed in claim 4 is characterized in that, described first catoptron and second scintilloscope are the metal film catoptron.
6. device as claimed in claim 4 is characterized in that, described high-NA is NA=0.95.
7. device as claimed in claim 4 is characterized in that, in the described 0/ π round and in position phase-plate, the interregional marginal radius of 0/ π bit phase delay is 0.955 times of entrance pupil radius.
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| JP5341286B1 (en) * | 2011-12-16 | 2013-11-13 | オリンパスメディカルシステムズ株式会社 | Depth expansion device |
| CN102830102B (en) * | 2012-08-21 | 2015-03-18 | 浙江大学 | Method and device for hollow focused light spot excitation-based confocal microscopy |
| CN106991249B (en) * | 2017-04-25 | 2020-06-02 | 中国民航大学 | Method for evaluating transverse light intensity distribution of high-order vector mode of optical fiber |
| CN108594444B (en) * | 2018-03-28 | 2020-12-04 | 浙江师范大学 | Method for generating Mathieu light beam based on film amplitude modulation and cone mirror phase modulation |
| CN111307067A (en) * | 2020-03-30 | 2020-06-19 | 深圳大学 | Optical measuring system |
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| DE102006026204A1 (en) * | 2006-05-31 | 2007-12-06 | Carl Zeiss Microimaging Gmbh | Microscope with increased resolution |
| CN101178485A (en) * | 2007-12-07 | 2008-05-14 | 南京航空航天大学 | Electric-controlled focal shift ultra-resolved iris filter |
| CN101469972B (en) * | 2008-09-08 | 2010-08-25 | 哈尔滨工业大学 | Long-focus depth super-resolution secondary confocal measuring apparatus |
| CN101769821A (en) * | 2010-02-04 | 2010-07-07 | 北京理工大学 | Lens refractive index and thickness measuring method and device based on differential confocal technology |
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