CN101825745B - Tunable-wavelength two-dimensional photonic crystal demultiplexer based on microfluid injection technology - Google Patents

Tunable-wavelength two-dimensional photonic crystal demultiplexer based on microfluid injection technology Download PDF

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CN101825745B
CN101825745B CN2010101382289A CN201010138228A CN101825745B CN 101825745 B CN101825745 B CN 101825745B CN 2010101382289 A CN2010101382289 A CN 2010101382289A CN 201010138228 A CN201010138228 A CN 201010138228A CN 101825745 B CN101825745 B CN 101825745B
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microfluid
photonic crystal
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CN101825745A (en
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田慧平
翟羿
纪越峰
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Beijing University of Posts and Telecommunications
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Abstract

The invention relates to a tunable-wavelength two-dimensional photonic crystal de-multiplexer based on microfluid injection technology. In the invention, the microfluid injection technology is introduced into structure of a two-dimensional photonic crystal de-multiplexer, namely, microfluids with different refractive indexes are injected at different positions of the de-multiplexer to change cut-off frequency of guided mode of the photonic crystal so as to enable cut-off frequencies of the guided mode to differ at different positions, thereby realizing wavelength de-multiplex effect. The photonic crystal in the invention is characterized by triangular lattice medium background ventage structure, which is fit for widely-used SOI-based photonic crystal production technology and has better realizability. In addition, thanks to withdrawability of the microfluid injection technology, microfluids with different refractive indexes can be injected according to requirements to realize tunable wavelength, thereby improving adjustability of photonic crystal energy band property of finished de-multiplexers. The invention provides a realizable mini tunable-wavelength de-multiplexer for all-optical communication network, optical computer and other fields in future.

Description

Utilize the two-dimensional photonic crystal demultiplexer of microfluid implantttion technique and wavelength-tunable
Technical field
The present invention relates to a kind of implementation method of utilizing microfluid implantttion technique and the tunable 2 D photon crystal Wave decomposing multiplexer of output wavelength, belong to the Wave decomposing multiplexer field.
Background technology
Follow the practicability of Erbium-Doped Fiber Amplifier (EDFA) (EDFA), wavelength-division multiplex (WDM) technology has obtained developing rapidly in recent years.And wavelength division multiplexer also becomes the focus of current domestic and international research as the Primary Component of wdm system.Present research about Wave decomposing multiplexer mainly contains and utilizes semiconductor (document 1.Nasu, Y.; Watanabe, K.; Itoh, M.; Yamazaki, H.; Kamei, S.; Kasahara, R.; Ogawa, I.; Kaneko, A.; Inoue, Y.; " Ultrasmall 100GHz 40-Channel VMUX/DEMUXBased on Single-Chip 2.5%-Δ PLC; " Journal of Lightwave Technology, v 27, n 12, p 2087-2094, June 15,2009) or photonic crystal fiber (document 2.Ming-Yang Chen; Jun Zhou; Pun, E. " A Novel WDMComponent Based on a Three-Core Photonic Crystal Fiber, " Journal of Lightwave Technology, v27, n 13, p 2343-2347, July 1,2009) or grating (document 3.Mu, Jianwei; Xu, Chenglin; Huang, Wei-Ping, " An optical power combiner/wavelength demultiplexing module for hybrid WDM FTTX, " OpticsExpress, v 17, and n 6, p 4791-4797, March 16,2009, document 4.Gamage, Prasanna; Nirmalathas, Ampalavanapillai; Lim, Christinal; Novak, Dalma; Waterhouse, Rodney, " Optical tandemsingle-sideband-based WDM interface for millimeter-wave fiber-radio multisector antenna basestation; " IEEE Transactions on Microwave Theory and Techniques, v 57, and n 3, p 725-732, March2009, document 5Pei, Li; Zhao, Ruifeng; Ning, Tigang; Dong, Xiaowei; Wei, Yanl; Qi, Chunhui; Ruan, Yi, " Wavelength-division demultiplexer based on FBG coupler ", Guangxue Xuebao/Acta OpticaSinica, v 29, n 2, p 308-311, February 2009) also have photonic crystal.Utilize photonic crystal can form photon band gap, and the introducing defective can form guided mode in forbidden photon band in perfect photonic crystal, light wave can be propagated with defect mode in defective, also to have potential bandwidth big for photonic crystal in addition, structural design is flexible, photon crystal structure material devices volume is little, can realize storing on a large scale and is convenient to existing optic communication device integratedly, is highly suitable for the manufacturing of photonic device.(document 6 Lu, H; Tian, HP; Li, CH, et al. " Research on new type of slow light structure based on 2D photonic crystalcoupled cavity waveguide; " ACTA PHYSICA SINICA v:58 n 3 p 2049-20552009) also there are a lot of groups to utilize photonic crystal to reach effect (document 7.Florous, the Nikolaos J. of wavelength-division demultiplexing; Saitoh, Kunimasa; Koshiba, Masanori. " Three-color photonic crystal demultiplexer based on ultralow-refractive-indexmetamaterial technology; " Optics Letters, v 30, n 20, p 2736-2738, and October 15,2005, document 8.F.S.-S.Chien; Y.-J.Hsu, W.-F.Hsieh; S.-C.Cheng, " Dual wavelength demultiplexing by couplingand decoupling of photonic crystal waveguides; " OPTICS EXPRESS, Vol.12, No.6, p 1119-1125,2004), but these systems are the photonic crystals at air background media column material, and make the method that photonic crystal mainly adopts at present is that SOI (Silicon On Insulator) material is carved glue, exposure, processing such as corrosion, formation is the airport photonic crystal of background with silicon, for actual fabrication document 7, still there is certain difficulty in the photonic crystal of the medium column material in 8.In addition, the group that has is by changing radius (document 9.Tapio Niemi, Lars Hagedorn Frandsen, KristianKnak Hede, the Anders of airport
Figure GSA00000071947600021
Peter Ingo Borel, and Martin Kristensen, " Wavelength DivisionDemultiplexing Using Photonic Crystal Waveguides; " IEEE PHOTONICS TECHNOLOGYLETTERS, VOL.18, NO.1, JANUARY 1,2006) or along grating constant (document 10 Marrocco, the V. of the direction of propagation; Grande, M.; De Sario, M.; Petruzzelli, V.; Prudenzano, F.; D ' Orazio, A. " PBG chirped waveguidefor efficient signal routing, " ICTON-MW ' 072007) change the band structure of photonic crystal, thus realize the effect of demultiplexing.But this method needs very high manufacture craft precision, generally will reach the precision of nanometer scale, and the technology of actual fabrication photonic crystal is difficult to reach at present.
And pass through photonic crystal and micro-fluidic technologies (document 11D.Psaltis, S.R.Quake and C.H.Yang, " Developingoptofluidic technology through the fusion of microfluidicsand optics; " Nature 442,381-386 (2006). document 12C.Monat, P.Domachuk, and B.J.Eggleton, " Integrated optofluidics:A new river of light; " Nature Photonics 1,106-114 (2007) .) in conjunction with changing the many features of photonic crystal, if can moving with curve, (the document 13.M.Ebnali-Heidari such as adjustment of slower rays bandwidth, C.Grillet, C.Monat, B.J.Eggleton " Dispersionengineering of slow light photonic crystal waveguides using microfluidic infiltration " OPTICSEXPRESS, Vol.17, No.3, p 1628-1635,2009, document 14.D.Erickson, T.Rockwood, T.Emery, A.Scherer and D.Psaltis, " Nanofluidic tuning of photonic crystalcircuits, " Opt.Lett.31,59-612006).In addition, because the intrinsic permeable character of airport photonic crystal self, the selectable different liquids of injection refractive index that photonic crystal can be stabilized, experiment show can be stable liquid is injected (document 15F.Intonti in certain single airport, S.Vignolini, V.Turck, M.Colocci, P.Bettotti, L.Pavesi, S.L.Schweizer, R.Wehrspohn andD.Wiersma, " Rewritable photonic circuits, " Appl.Phys.Lett.89,2111171-21111732006), mean that people can be as required, inject the microfluid of different refractivity in the zones of different of photonic crystal, bring more useful properties, enlarged the scope that the microfluid implantttion technique is used in the photonic crystal field to photonic crystal.In addition, the microfluid implantttion technique has good rewriting, just can release the liquid that is injected in the photonic crystal airport, refill other liquid (document 15 as required again, document 16C.L.Smith, U.Bog, S.Tomljenovic-Hanic, M.W.Lee, D.K.Wu, L.O ' Faolain, C.Monat, C.Grillet, T.F.Krauss, C.Karnutsch, R.C.McPhedran, and B.J.Eggleton, " Reconfigurable microfluidic photonic crystal slabcavities, " Opt.Express 16,15887-158962008), can well readjust the optical characteristics of photonic crystal like this, increase the remoldability and the tunability of photonic crystal.In a word, utilize the microfluid implantttion technique, a kind of mode of new, more feasible adjustment photon crystal structure is provided to people, it is difficult to fabrication and processing unlike changing the photonic crystal geometry, just stably, controllably simply change the liquid refractive index that is injected in the airport and just can realize.
Summary of the invention
When the object of the invention is to solve change photonic crystal air sky existing as traditional in the design photonic crystal Wave decomposing multiplexer or medium column radius realization demodulation multiplexer, need higher manufacture craft precision, and present production technique is difficult to reach, and the demodulation multiplexer of producing is difficult to realize the tunable problem of output wavelength, thereby proposed to utilize the two-dimentional airport photonic crystal demultiplexer of microfluid implantttion technique, the present invention adopts the photonic crystal based on the background media airport material of SOI material in addition, with respect to the photonic crystal of making air background media post better realizability and ripe processing technology is arranged.This demodulation multiplexer can be by making mask, be coated with electron beam adhesive, ion etching, dry etching at mask at SOI top material layer Si, remove steps such as mask and finish the making of airport photonic crystal, utilize the microfluid implantttion technique at two row of the most close waveguide with draw the microfluid that specific refractive index is injected in the waveguide both sides again, thereby adjust the cutoff frequency of waveguide, realize the effect of demodulation multiplexer.
On the basis of the principle of utilizing microfluid change photonic crystal guided mode cutoff frequency realization demodulation multiplexer, extraction technique by microfluid, can extract the microfluid that has been injected into photonic crystal out, refill the microfluid of other different refractivities more as required, thereby change the guided mode cutoff frequency, reach the purpose of other wavelength light waves of output, realize the tunability of output wavelength.
Purpose of the present invention can realize by following measure:
A kind of microfluid implantttion technique and the tunable 2 D photon crystal Wave decomposing multiplexer of output wavelength implementation method utilized, wherein:
This demodulation multiplexer is to utilize the microfluid implantttion technique to realize in two-dimentional triangular crystal lattice airport photonic crystal, this 2 D photon crystal inlead defective wherein, form the waveguide of W0.9 molded lines, the inlead defective forms and derives passage below waveguide again, can make the demodulation multiplexer structure of air pass by traditional SOI method for making; Then at two row of the most close waveguide with derive the microfluid that different refractivity is injected in the passage both sides, can realize by the microfluid implantttion technique, and can take out liquid, refill the liquid of other refractive indexes as required, adjust the cutoff frequency of guided mode, to reach the purpose of other wavelength light waves of output, promptly output wavelength is tunable.
Described two-dimentional triangular crystal lattice airport photonic crystal demultiplexer structure is to be formed by four W0.9 molded lines waveguide cascades, all is provided with the derivation waveguide at the afterbody of each line waveguide, and purpose is to draw the light wave that will download.
In the described 2 D photon crystal, background media is a silicon, is air in the airport.
Described 2 D photon crystal, grating constant are a=341nm, and the radius of airport is 0.3a.
The refractive index of described background media silicon is 3.52, and the refractive index of airport is 1.
The waveguide of described four W0.9 molded lines, first waveguide is long to be 5a, other three waveguide lengths are 7a, use the microfluid implantttion technique to inject the microfluid of different refractivity in each waveguide near two row of waveguide, employing n 1=1.65, n 2=1.60, n 3=1.55, n 4=1.50.
Described n 1, n 2, n 3, n 4The refractive index that refers to the injection microfluid of four W0.9 waveguide both sides, two row respectively.
It is described that to draw waveguide be tail place in each W0.9 waveguide, below smoke that an emptying pore forms, injecting refractive index equally respectively in the both sides of drawing waveguide is n 1=1.65, n 2=1.60, n 3=1.55, n 4=1.50 microfluid, n iThe refractive index of drawing the microfluid that injects in the airport of waveguide both sides of representing i W0.9 waveguide.
Described photonic crystal demultiplexer structure can realize that the different cylinders of refractive index can inject airport by the microfluid implantttion technique to be realized with the S0I manufacturing technology.
Described output wavelength is tunable, can the Liquid extracting that is injected in the airport be come out by the extraction technique of microfluid, and the liquid that refills other refractive indexes is again realized.
Compare the present invention with classic method following advantage arranged:
Tradition is utilized the cutoff frequency of photonic crystal defect mould and the demodulation multiplexer that forms mainly is by changing the geometry of crystal, the for example radius or the grating constant of airport or medium post, but this demodulation multiplexer requires manufacture craft very high, general all in the magnitude of nano-precision, this brings very big difficulty to actual fabrication, but utilize the implantttion technique of microfluid, the simple microfluid that selectively injects different refractivity that can be stable, can reach the purpose that changes the guided mode cutoff frequency equally, and the present invention adopts the photonic crystal based on the background media airport material of SOI material, with respect to the photonic crystal of making air background media post better realizability and ripe processing technology is arranged; In addition, traditional photonic crystal demultiplexer is difficult to change its output wavelength after making moulding, and the demodulation multiplexer that utilizes the microfluid implantttion technique to realize can be extracted out by the liquid that extraction technique will inject, refill the liquid of other refractive indexes, the guided mode cutoff frequency can readjust, and arrives the tunable purpose of output wavelength.
Principle of the present invention is as follows:
This demodulation multiplexer by W0.9 type triangular crystal lattice medium background airport photonic crystal as basic system, utilizing micro-fluidic technologies to inject the liquid of different refractivity respectively along wave guide direction again, form four little W0.9 type waveguides, four waveguides are arranged with cascade system, first waveguide is 5a, remaining three waveguides are long to be at each waveguide afterbody the derivation waveguide to be set again by 7a, derives that the waveguide both sides are also injected respectively and the microfluid of the identical refractive index of its place waveguide.
For common triangular crystal lattice airport W0.9 type photon crystal wave-guide, in forbidden photon band, can form two guided modes, article one, be even mould (basic mode) another be strange mould (First-Order Mode), generally, have only even mould in photon crystal wave-guide, to propagate, thus only need be concerned about even mould can be with curve.There is cutoff frequency in the even mould of different waveguides; frequency is lower than the light wave of cutoff frequency and can't propagates in waveguide; and when in two airports of going near waveguide, injecting the microfluid of different refractivity; chirp phenomenon can take place in the even mould of waveguide; whole moving can take place in frequency; when the refractive index of injecting microfluid increased, guided mode can move toward the low frequency place, and the cutoff frequency of guided mode also red shift can take place.
When the actual design drop multiplexer architecture, the microfluid of high more refractive index is injected in order in the airport of the part of waveguide inlet, the refractive index of the microfluid that the waveguide of each part is injected reduces successively, when containing first waveguide of light wave process of different wave length, this moment, only the light wave more than the cutoff frequency of first waveguide could be by waveguide, when light wave runs into second waveguide, because the cutoff frequency of waveguide this moment changes, the light wave that frequency is between the cutoff frequency of first waveguide and second waveguide can not be propagated in second waveguide, to form evanescent wave, the light wave of this part frequency can be reflected, at this moment can this part light wave be derived the light wave of output channel 1 by drawing waveguide.But still need inject microfluid at the airport of drawing the waveguide both sides this moment, could guarantee that like this light of output can be derived.Light wave all can be downloaded one road light wave at the intersection of each waveguide like this, forms the demodulation multiplexer of four passages, and the frequency of the light wave of four passage outgoing increases successively, and wavelength reduces successively.
When using the extraction technique of microfluid; can take out the microfluid of original injection; the microfluid of other refractive indexes of reinjecting, new frequency displacement can take place in the guided mode of waveguide like this, according to above-mentioned principle; can export the light wave of four wavelength equally; but the wavelength of output this moment changes before to some extent, and promptly the wavelength of being exported will change, can be according to the wavelength that will export; select to inject the microfluid of corresponding refractive index, thereby reach the tunable purpose of output wavelength.
Description of drawings
Below each photonic crystal of being got of figure structural parameters all with embodiment in identical.
Fig. 1. be the structure of this demodulation multiplexer, basic structure is the photonic crystal of triangular crystal lattice medium background airport, four W0.9 molded lines waveguide cascades form, first waveguide is long to be 5a, remaining three waveguide lengths are 7a, use the microfluid implantttion technique to inject the microfluid of different refractivity in each waveguide near two row of waveguide, adopt n 1=1.65, n 2=1.60, n 3=1.55, n 4=1.50.
Fig. 2. be the W0.9 type waveguide of basic triangular crystal lattice medium background airport
Fig. 3. be basic triangular crystal lattice medium background airport the waveguide of W0.9 type can be with curve
Fig. 4. be the structural drawing that in the W0.9 type waveguide of basic triangular crystal lattice medium background airport, injects microfluid in the preceding two row holes.
Fig. 5. be to inject refractive index not simultaneously, photon crystal wave-guide can be with the situation of change of curve.
Fig. 6. adopt n 1=1.65, n 2=1.60, n 3=1.55, n 4=1.50 o'clock, the power transmission spectrum of each passage output light-wave.
Fig. 7. adopting the refractive index of injecting microfluid is n 1=2.00, n 2=1.95, n 3=1.90, n 4=1.85 o'clock, the power transmission spectrum of each passage output light-wave.
Embodiment
The structure of demodulation multiplexer is to be formed by four W0.9 molded lines waveguide cascades, as Fig. 1. shown in.Triangular crystal lattice medium background airport photonic crystal is as basic system, utilizing micro-fluidic technologies to inject the liquid of different refractivity respectively along wave guide direction again, form four little W0.9 type waveguides, four waveguides are arranged with cascade system, first waveguide is long to be 5a, other three waveguides are long to be at each waveguide afterbody the derivation waveguide to be set again by 7a, derives that the waveguide both sides are also injected respectively and the microfluid of the identical refractive index of its place waveguide.
At first have a look the structure of basic W0.9 type waveguide, as Fig. 2. shown in, a is a grating constant among the figure, a=341nm, duct width
Figure GSA00000071947600071
The radius of airport is 0.3a, and refractive index is 1, and the medium background adopts pure silicon, and refractive index is 3.52.Utilize plane wave expansion method (PWE), this structure is carried out numerical simulation, calculating belongs to the eigenvalue of the frequency of different wave vectors, what obtain normalization wave vector-normalized frequency can be with curve, as Fig. 3. shown in, by seeing among the figure, in forbidden photon band, can form two guided modes, article one, be even mould (basic mode, blue line mark among the figure), another is strange mould (First-Order Mode, a red line mark among the figure), and corresponding respectively Electric Field Distribution has the pattern of even symmetry and odd symmetry with respect to waveguide core, ridge waveguide is used for importing and the derivation light wave because all will introduce in the photonic crystal two sides in the actual fabrication, and even mould in the forbidden band and the pattern in the ridge waveguide have more multiple folded place, and also being that even mould is easier propagates in photon crystal wave-guide, thus only consider even mould can be with curve.There is cutoff frequency in the even mould of waveguide as can also be seen from Figure, and promptly the frequency light wave that is lower than cutoff frequency can't be propagated in waveguide.
(1) realization of demodulation multiplexer
Utilize the microfluid implantttion technique can in the photonic crystal of medium background airport structure, in airport, inject the microfluid of different refractivity, as shown in Figure 4, the two line space pores of choosing among the figure near the W0.9 waveguide core inject microfluid, inject liquid refractive index from 1.35 to 2, refractive index is spaced apart 0.05.Carry out numerical evaluation by plane wave expansion method equally, obtain injecting respective indices of refraction microfluid the W0.9 waveguide can be with curve, as shown in Figure 5.Among the figure, the highest curve of cutoff frequency is corresponding to basic W0.9 waveguiding structure, and promptly corresponding do not have a situation of injecting microfluid.As we can see from the figure, by introduce microfluid in airport, chirp phenomenon can take place in the even mould of waveguide, and promptly frequency can take place by whole moving to the low frequency place; Simultaneously, when injecting different refractivity, the frequency displacement of guided mode is different, and the refractive index of injecting microfluid is high more, and is big more to the frequency displacement at low frequency place, that is to say, and high more injection refractive index, the cutoff frequency of guided mode is low more.
Utilize the optical characteristics of above photonic crystal, can design different and the effect realization wavelength (de) multiplexing based on the guided mode cutoff frequency.When the wavelength demultiplexer structure of utilizing as shown in Figure 1, because the refractive index that the waveguide of each part is injected reduces successively, the cutoff frequency of waveguide just can raise successively, the intersection of every different waveguide, the light wave that frequency is between the cutoff frequency of two waveguides can't transmit, to form evanescent wave, the light wave of this part frequency can be reflected, and at this moment can this part light wave be collected and be derived by the waveguide of drawing of the next-door neighbour, suitable placement.But still need inject microfluid at the airport of drawing the waveguide both sides this moment, because if do not inject microfluid, the cutoff frequency of the waveguide of airport structure is the highest, can't derive the light wave of anticipation wavelength like this, and need to inject and the microfluid that is close to the identical refractive index of waveguide, could guarantee that like this light of anticipation output can be derived.Light wave all can be downloaded one road light wave at the intersection of each waveguide like this, forms the demodulation multiplexer of four passages, and the frequency of the light wave of four passages increases successively, and wavelength reduces successively.Utilize Finite-Difference Time-Domain Method (FDTD) to carry out numerical simulation, can obtain the transmission spectrum of four passages, as Fig. 6. shown in.As can be seen from Figure, the wavelength of four passage outputs is respectively λ 1=1569nm, λ 2=1550nm, λ 3=1536nm, λ 4=1519nm, light source is set to Gauss pulse in the emulation, and the live width of light source covers the cutoff frequency of each waveguide of being concerned about.As can be seen from the figure the centre wavelength of transmission peaks reduces successively, and is consistent with analysis before.
(2) realization of tunable output wavelength
When using the extraction technique of microfluid; can take out the microfluid of original injection; the microfluid of other refractive indexes of reinjecting, the frequency displacement different with former waveguide can take place in the guided mode of waveguide like this, according to above-mentioned principle; can export the light wave of four wavelength equally; but the wavelength of output this moment changes before to some extent, and promptly the wavelength of being exported will change, can be according to the wavelength that will export; select to inject the microfluid of corresponding refractive index, thereby reach the tunable purpose of output wavelength.
In force, utilize the microfluid extraction technique to take out microfluid in the original injection airport, change the original microfluid index distribution that is provided with, i.e. n 1=1.65, n 2=1.60, n 3=1.55, n 4=1.50, redistribute and be n 1=2.00, n 2=1.95, n 3=1.90, n 4=1.85, can carry out same Finite-Difference Time-Domain Method numerical simulation, the transmission spectrum of each passage of the new demodulation multiplexer that obtains, as shown in Figure 7, the output wavelength of four passages is respectively λ 1=1599nm, λ 2=1576nm, λ 3=1561nm, λ 4=1540nm can realize specific wavelength is carried out the purpose of demultiplexing thus, and the realization of this method only need get final product by the microfluid that injects respective indices of refraction, realizes tunable output wavelength.

Claims (2)

1. one kind is utilized microfluid implantttion technique and the tunable 2 D photon crystal Wave decomposing multiplexer of output wavelength, wherein:
This demodulation multiplexer is in the waveguide of triangular crystal lattice silicon medium background airport photonic crystal W0.9 type, in two line space pores of the most close waveguide, inject the different microfluid of refractive index, waveguide is formed by four part cascades, each part is injected the microfluid of different refractivity, be provided with at the end of each part and draw waveguide, it is characterized in that when when photon crystal wave-guide injects the liquid of different refractivity in the two line space pores of close waveguide, guided mode in the forbidden band will be moved, the cutoff frequency of waveguide is changed, frequency is in the following light wave of cutoff frequency in the photon band gap and can not transmits in main waveguide, and by drawing the light wave derivation of waveguide with want wavelength, four cutoff frequencys that inject the waveguide of different refractivity microfluid part are different in the waveguide, can derive the light wave of four different wave lengths, reach the purpose of demultiplexing.
2. microfluid implantttion technique and the tunable 2 D photon crystal Wave decomposing multiplexer of output wavelength of utilizing as claimed in claim 1, it is characterized in that the microfluid that can will inject airport by the extraction technique of microfluid extracts, and refill the liquid of other different refractivity as required again, the guided mode cutoff frequency of photon crystal wave-guide delimited again, the light wave of other wavelength can be derived like this, reaches the tunable purpose of output wavelength.
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