CN101776454B - Plane verticality detection method and device by right-angle reflecting prism method - Google Patents
Plane verticality detection method and device by right-angle reflecting prism method Download PDFInfo
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Abstract
A method for detecting the plane verticality of rectangular reflecting prism includes creating coordinate system OXYZ, collimating the rectangular reflecting prism by autocollimator, and recording the collimation indication value beta1(ii) a When in the second state, the autocollimator aims the right-angle reflecting prism and records an aiming indication beta2When the lens is in the second state to the third state, the autocollimator aims the right-angle reflecting prism again and records an aiming indication value beta3And beta for 3 measurements1、β 2And beta3And processing according to the vector relation. The invention can control the measuring precision within 8' and has the advantages of simple measuring principle, easy operation, etc. The method can be used for detecting normal plane verticality in the process of assembling and adjusting the right-angle reflecting prism.
Description
Technical field
The present invention relates to a kind of normal plane verticality detection method and device thereof, be specifically related to a kind of right-angle reflecting prism normal plane verticality detection method and device thereof.
Background technology
In the precision measurement field of measuring techniques, the application of right-angle reflecting prism is very extensive, yet in application process, because the not vertical of its normal plane produces material impact to measuring error, thereby influenced measuring accuracy.
At present, right-angle reflecting prism is in installation process, and its normal plane verticality is an important parameter, and present stage mainly uses autocollimation theodolite that its normal plane verticality is measured.The realization of this method a kind ofly is to use an autocollimation theodolite, successively through flat take aim at and face upward take aim at twice and measure measurement result; Another kind is to use two autocollimation theodolites, puts down simultaneously respectively to take aim at and face upward and takes aim at measurement.But all there is measurement in above two kinds of methods often, and measuring process is loaded down with trivial details, and there is azimuthal error in twice measurement, and the measuring error of autocollimation theodolite self, make measuring error strengthen, and greatly reduce measuring accuracy.Therefore, there are not desirable method or measurement mechanism to realize the accurate measurement of normal plane verticality at present.
Summary of the invention
The object of the present invention is to provide a kind of right-angle reflecting prism normal plane verticality detection method and device thereof, it has solved the technical matters that can't realize in the background technology that the normal plane verticality is accurately measured.
Technical solution of the present invention is:
A kind of right-angle reflecting prism normal plane verticality detection method, its special character is that this method may further comprise the steps:
1) center with rhombic prism 2 is a true origin, sets up coordinate system OXYZ;
When 2) rhombic prism 2 was positioned at vertical state (first state), 1 pair of right-angle reflecting prism 3 of autocollimator aimed at, record aiming indicating value β
1
3) rhombic prism 2 around Z axle folk prescription to the rotation 22.5 °; When being positioned at second state 4, its front surface portion 6 has constituted the wedge shape mirror with bottom surface section 7, and light is through refracting to right-angle reflecting prism 3; 1 pair of right-angle reflecting prism 3 of autocollimator aims at, and record aiming indicating value β
2
4) rhombic prism 2 is around vertical pivot and code-disc 10 Rotate 180 ° in surface level, and during to the third state 5, autocollimator 1 aims at right-angle reflecting prism 3 again, and record aiming indicating value β by second state 4
3
5) β to measuring for 3 times
1, β
2And β
3Handle according to its vector correlation, promptly obtain the normal plane verticality of right-angle reflecting prism 3.
Above-mentioned rhombic prism 2 is in installation process; Be in horizontality if its front surface portion 6 intersects crest line with lower surface 7, when then rhombic prism 2 was positioned at second state 4 with the third state 5, light path was identical in the pick-up unit; Only need second state 4 is measured, obtain measurement data β
2, in conjunction with measurement data β under the vertical state
1, just can obtain measurement result.
Above-mentioned rhombic prism 2 is in installation process, and its front surface portion 6 intersects crest line with lower surface 7 and generally is not in horizontality, when then rhombic prism 2 is positioned at second state 4 with the third state 5, and gained aiming indicating value β
2With β
3Deviation is arranged, it is averaged to eliminate the out-of-level errors caused of crest line, improve measuring accuracy.
Above-mentioned rhombic prism 2 is positioned at the concrete implementation of vertical state: regulate bubble 12 before detecting, 1 pair of rhombic prism of autocollimator, 2 front surface portion 6 aim at, and make rhombic prism 2 be in the vertical state, accomplish autocollimatic.
A kind of right-angle reflecting prism normal plane verticality pick-up unit; Comprise base 11 and be arranged at vertical pivot and the code-disc 10 on the base 11; Said vertical pivot and code-disc 10 are connected with U type frame 9, and said U type frame 9 can rotate in surface level around vertical pivot and code-disc 10, and the upper end of said U type frame 9 connects a transverse axis 8.
Its special character is: also comprise the rhombic prism 2 that is arranged on the transverse axis 8; Center with rhombic prism 2 is a true origin; Set up coordinate system OXYZ, the Z axle concentric of said transverse axis 8 and rhombic prism 2, and can drive rhombic prism 2 around Z axle folk prescription to 22.5 ° of rotations; The both sides of said rhombic prism 2 are provided with autocollimator 1 and right-angle reflecting prism 3 respectively, and autocollimator 1 emits beam after rhombic prism 2 and right-angle reflecting prism 3, can get back to autocollimation theodolite 1 again; The bottom of said support 9 also is provided with the bubble 12 of realizing rhombic prism 2 horizontal adjustment.
Above-mentioned rhombic prism 2 comprises front surface portion 6 that is coated with reflectance coating above that and the lower surface 7 that is coated with anti-reflection film.
The bottom of above-mentioned support 9 is positioned at vertical pivot and code-disc 10 1 sides are provided with the bubble 12 of realizing rhombic prism 2 horizontal adjustment.
The reflectance coating reflectivity of front surface portion 6 platings of above-mentioned rhombic prism 2 is 5%～50%.
The reflectance coating reflectivity of front surface portion 6 platings of above-mentioned rhombic prism 2 is good with 10% or 20%.
Above-mentioned rhombic prism 2 is the rhombic prism of superfine K9 glass.
The right-angle reflecting prism normal plane verticality detector that provides among the present invention; Because it adopts the single measurement method, the azimuthal error of having avoided twice measurement to introduce, its measuring accuracy can be controlled at 8 " in; it is simple to have measuring principle simultaneously, advantages such as processing ease.The present invention can be used for the detection that right-angle reflecting prism is debug normal plane verticality in the process.
Description of drawings
Fig. 1 is a device synoptic diagram of the present invention;
Fig. 2 is a principle schematic of the present invention.
Drawing reference numeral explanation: 1-autocollimator; The 2-rhombic prism; The 3-right-angle reflecting prism; 4-second state; The 5-third state; The 6-front surface portion; The 7-lower surface; The 8-transverse axis; 9-U type frame; 10-vertical pivot and code-disc; The 11-base; The 12-bubble.
Embodiment
Like Fig. 1 and Fig. 2, a kind of right-angle reflecting prism normal plane verticality detection method, this method may further comprise the steps:
1) center with rhombic prism 2 is a true origin, sets up coordinate system OXYZ;
When 2) rhombic prism 2 was positioned at the vertical state, at first 1 pair of right-angle reflecting prism 3 of autocollimator aimed at, record aiming indicating value β
1
3) the Z axle concentric of transverse axis 8 and rhombic prism 2; The lower surface 7 of rhombic prism 2 is coated with anti-reflection film, transverse axis 8 drive down rhombic prism 2 around Z axle folk prescription to rotating 22.5 °, when being positioned at second state 4; Its front surface portion 6 has constituted the wedge shape mirror with bottom surface section 7; Light is through refracting to right- angle reflecting prism 3, and 1 pair of right-angle reflecting prism 3 of autocollimator aims at, and record aiming indicating value β
2
4) rhombic prism 2 is around vertical pivot and code-disc 10 Rotate 180 ° in surface level, and during to the third state 5, autocollimator 1 aims at right-angle reflecting prism 3 again, and record aiming indicating value β by second state 4
3
5) β to measuring for 3 times
1, β
2And β
3Handle according to its vector correlation, promptly obtain the normal plane verticality of right-angle reflecting prism 3.
A kind of right-angle reflecting prism normal plane verticality pick-up unit; Comprise base 11 and be arranged at vertical pivot and the code-disc 10 on the base 11, vertical pivot and code-disc 10 are connected with U type frame 9, and said U type frame can rotate in surface level around vertical pivot and code-disc 10; The upper end of U type frame connects a transverse axis 8; Also comprising the rhombic prism 2 that is arranged on the transverse axis 8, is true origin with the center of rhombic prism 2, sets up coordinate system OXYZ; The Z axle concentric of said transverse axis 8 and rhombic prism 2, and can drive rhombic prism 2 around Z axle folk prescription to 22.5 ° of rotations; The both sides of rhombic prism 2 are provided with autocollimator 1 and right-angle reflecting prism 3 respectively, and autocollimator 1 emits beam after rhombic prism 2 and right-angle reflecting prism 3, can get back to autocollimator 1 again; The bottom of U type frame 9 is positioned at vertical pivot and code-disc 10 1 sides are provided with the bubble 12 of realizing rhombic prism 2 horizontal adjustment; Wherein rhombic prism 2 comprises that being coated with reflectivity above that is the front surface portion 6 of 5%～50% reflectance coating and the lower surface 7 that is coated with anti-reflection film.Wherein the reflectivity of reflectance coating is good with 10% or 20%.
As shown in Figure 2, include autocollimator 1, rhombic prism 2 and right-angle reflecting prism 3.The measuring error of autocollimator 1 is 0.2 ", rhombic prism 2 adopts the manufacturing of superfine K9 glass.Set up coordinate system O
0X
0Y
0Z
0, OXYZ and O ' X ' Y ' Z ' are respectively autocollimator 1, the coordinate system of rhombic prism 2 and right-angle reflecting prism 3.Bubble 12 in the leveling U type frame before detecting, the front surface portion 6 that is coated with 5%～50% reflectance coating on 1 pair of rhombic prism 2 of autocollimator aims at, and rhombic prism 2 is in the vertical state, accomplishes autocollimatic; Begin to detect, 1 pair of right-angle reflecting prism 3 of autocollimator aims at, record aiming indicating value β
1 Rhombic prism 2 around Z axle folk prescription to 22.5 ° of rotations during to second state 4; Because the lower surface 7 of rhombic prism 2 is coated with anti-reflection film; Its front surface portion 6 has constituted the wedge shape mirror with bottom surface section 7, and light is through refracting to right-angle reflecting prism 3, aiming and record aiming indicating value β
2Rotate 180 ° is by second state 4 during to the third state 5 in surface level around vertical pivot 10 for rhombic prism 2, and aiming is record aiming indicating value β also
3, three measurement data are handled by its vector correlation, can obtain the normal plane verticality of right-angle reflecting prism 3.
The utilization optical matrix is theoretical, and detector is carried out optical path analysis.
Right-angle reflecting prism 3 is around Z ' axle rotation one angle [alpha], and promptly its normal plane has a deflection angle α, establishes the incident light vector to be:
λ
in＝[1?0?0]
T (i)
λ
out1＝[-1?0?0]
T (ii)
Be that emergent ray closely returns along former road, light does not deflect.
When rhombic prism 2 was in second state 4, the emergent light vector was:
λ
out2＝[2sin
2csin
2α -sin2csin
2α sincsin2α]
T (iii)
Wherein c is an incident ray and angle through the emergent ray of rhombic prism 2, and its size is:
Wherein n is the refractive index of rhombic prism 2.
When rhombic prism 2 was in the third state 5, the emergent light vector was λ
Out3
Relatively (2) formula and (3) formula are calculated by its Z component, and then right-angle reflecting prism 3 normal plane deflection angles are:
Promptly
Use T at present
3A model autocollimation theodolite is measured right-angle reflecting prism normal plane verticality; Measuring accuracy is the highest can to reach 15 ", and adopt the right-angle reflecting prism normal plane verticality detector that provides among the present invention, because it adopts the single measurement method; the azimuthal error of having avoided twice measurement to introduce; its measuring accuracy can be controlled at 8 " in, it is simple to have measuring principle simultaneously, advantages such as processing ease.The present invention can be used for the detection that right-angle reflecting prism is debug normal plane verticality in the process.
Claims (9)
1. right-angle reflecting prism normal plane verticality detection method is characterized in that this method may further comprise the steps:
1) center with rhombic prism (2) is a true origin, sets up coordinate system OXYZ;
When 2) rhombic prism (2) was positioned at the vertical state, at first autocollimator (1) aimed at right-angle reflecting prism (3), record aiming indicating value β
1
3) the Z axle concentric of transverse axis (8) and rhombic prism (2); The lower surface (7) of rhombic prism (2) is coated with anti-reflection film, transverse axis (8) drive down rhombic prism (2) around Z axle folk prescription to rotating 22.5 °, when being positioned at second state (4); Its front surface portion (6) has constituted the wedge shape mirror with bottom surface section (7); Light is through refracting to right-angle reflecting prism (3), and autocollimator (1) aims at right-angle reflecting prism (3), and record aiming indicating value β
2
4) rhombic prism (2) is around vertical pivot and code-disc (10) Rotate 180 ° in surface level, and during by second state (4) to the third state (5), autocollimator (1) aims at right-angle reflecting prism (3) again, and record aiming indicating value β
3
5) β to measuring for 3 times
1, β
2And β
3, by formula
α is right-angle reflecting prism (a 3) normal plane deflection angle, and c is an incident ray and angle through the emergent ray of rhombic prism; Promptly obtain the normal plane verticality of right-angle reflecting prism (3).
2. according to the said right-angle reflecting prism normal plane of claim 1 verticality detection method; It is characterized in that: said rhombic prism (2) is in installation process; Be in horizontality if its front surface portion (6) intersects crest line with lower surface (7), when then rhombic prism (2) was positioned at second state (4) with the third state (5), light path was identical in the pick-up unit; Only need second state (4) is measured, obtain measurement data β
2, in conjunction with measurement data β under the vertical state
1, just can obtain measurement result.
3. according to the said right-angle reflecting prism normal plane of claim 1 verticality detection method; It is characterized in that: said rhombic prism (2) is in installation process; Its front surface portion (6) intersects crest line with lower surface (7) and generally is not in horizontality; When then rhombic prism (2) is positioned at second state (4) with the third state (5), gained aiming indicating value β
2With β
3Deviation is arranged, it is averaged to eliminate the out-of-level errors caused of crest line, improve measuring accuracy.
4. according to the arbitrary said right-angle reflecting prism normal plane verticality detection method of claim 1～3; It is characterized in that; Said rhombic prism (2) is positioned at the concrete implementation of vertical state: regulate bubble (12) before detecting; Autocollimator (1) aims at rhombic prism (2) front surface portion (6), makes rhombic prism (2) be in the vertical state, accomplishes autocollimatic.
5. right-angle reflecting prism normal plane verticality pick-up unit of realizing the said detection method of claim 1; Comprise base (11) and be arranged at vertical pivot and the code-disc (10) on the base (11); Said vertical pivot and code-disc (10) are connected with U type frame (9); Said U type frame (9) can rotate in surface level around vertical pivot and code-disc (10), and the upper end of said U type frame (9) connects a transverse axis (8);
It is characterized in that: also comprise the rhombic prism (2) that is arranged on the transverse axis (8), said rhombic prism (2) comprises front surface portion (6) that is coated with reflectance coating above that and the lower surface (7) that is coated with anti-reflection film; Center with rhombic prism (2) is a true origin, sets up coordinate system OXYZ, the Z axle concentric of said transverse axis (8) and rhombic prism (2), and can drive rhombic prism (2) around Z axle folk prescription to rotation 22.5 degree; The both sides of said rhombic prism (2) are provided with autocollimator (1) and right-angle reflecting prism (3) respectively, and autocollimator (1) emits beam after rhombic prism (2) and right-angle reflecting prism (3), can get back to autocollimation theodolite (1) again; The bottom of said support (9) also is provided with the bubble (12) of realizing rhombic prism (2) horizontal adjustment.
6. according to the said right-angle reflecting prism normal plane of claim 5 verticality pick-up unit, it is characterized in that: the bottom of said support (9) is positioned at vertical pivot and code-disc (10) one sides are provided with the bubble (12) of realizing rhombic prism (2) horizontal adjustment.
7. according to the said right-angle reflecting prism normal plane of claim 6 verticality pick-up unit, it is characterized in that: the reflectance coating reflectivity of front surface portion (6) plating of said rhombic prism (2) is 5%～50%.
8. according to the said right-angle reflecting prism normal plane of claim 7 verticality pick-up unit, it is characterized in that: the reflectance coating reflectivity of front surface portion (6) plating of said rhombic prism (2) is 10% or 20%.
9. said according to Claim 8 right-angle reflecting prism normal plane verticality pick-up unit, it is characterized in that: said rhombic prism (2) is the rhombic prism of superfine K9 glass.
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102183359B (en) * | 2011-02-23 | 2012-07-04 | 浙江大学 | Method and device for detecting collimation of light beams |
| CN102607472B (en) * | 2012-03-06 | 2014-03-12 | 中国科学院西安光学精密机械研究所 | Measuring device and measuring method for large-range flatness |
| CN103197400B (en) * | 2013-02-06 | 2015-07-15 | 中国科学院西安光学精密机械研究所 | Method for high-precision leveling of ridge of right-angle reflecting prism by adopting leveling device |
| CN106405816A (en) * | 2015-07-31 | 2017-02-15 | 北京航天计量测试技术研究所 | Novel aiming prism apparatus |
| CN109959350B (en) * | 2017-12-25 | 2021-09-28 | 长春长光华大智造测序设备有限公司 | Method and device for detecting perpendicularity of right-angle working surface of prism |
| CN112747204B (en) * | 2019-10-31 | 2023-06-13 | 比亚迪股份有限公司 | Surface measuring device |
| CN111207746B (en) * | 2020-03-03 | 2021-08-24 | 北京航空航天大学 | Azimuth leading-out device of inertial positioning and orienting equipment and calibration method thereof |
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Patent Citations (4)
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| CN2494974Y (en) * | 2001-03-14 | 2002-06-12 | 杨红林 | Geodetic instrument with laser centring device |
| CN1417556A (en) * | 2001-11-02 | 2003-05-14 | 清华大学 | Transverse double-frequency zeeman laser linearity/coaxality measuring mechanism |
| WO2004109266A1 (en) * | 2003-06-10 | 2004-12-16 | Digital Bio Technology | Dna detector |
| CN201408007Y (en) * | 2009-01-08 | 2010-02-17 | 中国科学院西安光学精密机械研究所 | Plane verticality detection device based on right-angle reflecting prism method |
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Denomination of invention: Method for measuring normal plane verticality of right-angle reflecting prism and device thereof Effective date of registration: 20170706 Granted publication date: 20120111 Pledgee: Xi'an innovation financing Company limited by guarantee Pledgor: XI'AN ZHONGKE PHOTOELECTRIC PRECISION ENGINEERING Co.,Ltd. Registration number: 2017990000600 |
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Date of cancellation: 20180601 Granted publication date: 20120111 Pledgee: Xi'an innovation financing Company limited by guarantee Pledgor: XI'AN ZHONGKE PHOTOELECTRIC PRECISION ENGINEERING Co.,Ltd. Registration number: 2017990000600 |
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