CN101727108A - Low-flow gas control device and using method thereof - Google Patents
Low-flow gas control device and using method thereof Download PDFInfo
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- CN101727108A CN101727108A CN200810225334A CN200810225334A CN101727108A CN 101727108 A CN101727108 A CN 101727108A CN 200810225334 A CN200810225334 A CN 200810225334A CN 200810225334 A CN200810225334 A CN 200810225334A CN 101727108 A CN101727108 A CN 101727108A
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- 238000000034 method Methods 0.000 title claims abstract description 7
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 22
- 239000003638 chemical reducing agent Substances 0.000 claims description 13
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 11
- 229910052802 copper Inorganic materials 0.000 claims description 11
- 239000010949 copper Substances 0.000 claims description 11
- 239000000945 filler Substances 0.000 claims description 9
- 238000005485 electric heating Methods 0.000 claims description 7
- 230000001276 controlling effect Effects 0.000 claims description 5
- 230000001105 regulatory effect Effects 0.000 claims description 5
- 239000007788 liquid Substances 0.000 abstract description 7
- 230000005514 two-phase flow Effects 0.000 abstract description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000011144 upstream manufacturing Methods 0.000 description 2
- 238000004364 calculation method Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 210000001503 joint Anatomy 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 239000003380 propellant Substances 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
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Abstract
The invention discloses a low-flow gas control device, which is characterized in that: a gas cylinder outlet is sequentially connected with a manual valve, a decompressor, a heat exchanger component, a filter, a mass flowmeter, a solenoid valve and a sonic nozzle component through pipelines, wherein the inlet and outlet of the decompressor respectively lead to a branch pipeline connecting a pressure gauge and the manual valve; a temperature sensor and a pressure sensor are connected to the inside of the pipeline in front of the sonic nozzle component; and another pressure sensor is connected to the inside of the pipeline behind the sonic nozzle component. The method can respectively realize flow control in different ranges by adjusting pressure in front of a sonic nozzle or replacing the sonic nozzle with the sonic nozzles with different throat diameters; can realize stable supply of a gas flow by using the performance characteristics of the sonic nozzle and can eliminate two-phase flow influence by gasifying a small amount of liquid contained in an incoming flow with a heat exchanger. The device can realize accurate and stable micro flow control requirements under the condition of a pure gas phase, can meet the requirements on the small flow control under the condition of containing a small amount of liquid drops in the incoming flow, and can work under the condition of relatively high pressure.
Description
[ technical field ] A method for producing a semiconductor device
The invention relates to a small-flow gas control device, in particular to a device capable of accurately controlling the flow of a two-phase flow gas containing a small amount of liquid in a pure gas phase or a gas source under the condition of downstream pressure fluctuation.
[ background of the invention ]
When the ground test of the micro thruster for spaceflight is carried out, the stable supply of the micro mass flow gas propellant is always required to be realized under the condition of downstream pressure fluctuation. The commonly used flow control valve mainly controls the flow by adjusting the throttling area, and the mode is not easy to accurately adjust the micro flow when the throttling area is larger and has the limitation of working pressure when the throttling area is smaller; and the flow control valve can not block the influence of the downstream pressure change, and the fluctuation of the downstream pressure can cause the flow change. Another way of controlling the flow rate by means of an orifice plate can solve the requirement of accurately supplying a small gas flow rate under pure gas phase conditions, such as the flow rate control ways described in patents CN1445630A, CN1461429A and CN2610376Y, but such control devices usually work in a subcritical state, mainly rely on the pressure difference between the front and the back of the orifice plate to control the flow rate, and also cannot block the influence of the downstream pressure change. In patent CN1236449, the throttle orifice works in a supercritical state by controlling the critical pressure ratio, and the flow rate can be adjusted by controlling the inlet pressure, but the design and use of this device do not consider the influence of the downstream pressure fluctuation. In addition, the control precision of the three common gas flow control modes is greatly reduced when the incoming flow gas contains a small amount of liquid drops, so that the three common gas flow control modes cannot meet the flow control requirement when the gas source is liquefied gas.
[ summary of the invention ]
The invention provides a small-flow gas control device, aiming at overcoming the defects of the existing gas flow control mode in flow control under the conditions of micro flow control and little liquid contained in incoming flow and ensuring that stable flow supply can be provided even when downstream pressure fluctuation exists.
The technical scheme adopted by the invention for solving the technical problems is as follows: a small-flow gas control device comprises a gas cylinder, a pipeline, a manual valve, a pressure reducer, a pressure gauge, a heat exchanger assembly, a filter, a mass flow meter, a temperature sensor, a pressure sensor, an electric control valve and a sonic nozzle assembly. The outlet of the gas cylinder is sequentially connected with a manual valve, a pressure reducer, a heat exchanger assembly, a filter, a mass flow meter, an electric control valve and a sonic nozzle assembly through pipelines, the inlet and the outlet of the pressure reducer are respectively connected with a pressure gauge and the manual valve through branch pipelines, an exhaust pipeline is connected behind the two manual valves, a temperature sensor and a pressure sensor are connected in a pipeline in front of the sonic nozzle assembly, and a pressure sensor is connected in a pipeline behind the sonic nozzle assembly.
The heat exchanger component comprises a water storage tank, a tank cover, a detachable spiral copper tube and an electric heating tube, wherein the electric heating tube is positioned at the bottom of the water tank, the spiral copper tube is positioned in the middle of the water tank, the water valve is installed at the low position of the outer wall of the water tank, the spiral copper tube is fixed on the tank cover through a pipeline and leaves an inlet and outlet interface outside the tank cover, and a valve is left on the tank cover.
The sonic nozzle component consists of a filler neck, an outer sleeve nut, a gasket, a sonic nozzle and a connecting sleeve. The sonic nozzle adopts a fixed convergent structure and is clamped in the connecting sleeve. The filler neck and the connecting sleeve are fastened by using the outer sleeve nut, and gaskets are arranged among the sonic nozzle, the filler neck and the connecting sleeve.
The operation steps of regulating the flow of the small-flow airflow by using the control device are as follows:
firstly, ensuring that a heat exchanger is in a normal working state before flow control operation;
the second step is that: determining the size of the initial adjustment pressure;
the third step: determining the size of the throat part of the sonic nozzle according to the control flow requirement, the initial regulating pressure value and the initial gas temperature value;
the fourth step: installing a sonic nozzle;
the fifth step: initially adjusting the pressure;
and a sixth step: the pressure is finely adjusted.
The pressure in front of the sonic nozzle is adjusted through the pressure reducer, and the flow of the sonic nozzle can be adjusted in a small range; the flow control in a large range can be realized by replacing sonic nozzles with different throat diameters; the pressure in front of the sonic nozzle is controlled to enable the sonic nozzle to work in a supercritical state, and the influence of downstream pressure fluctuation can be isolated by utilizing the characteristic that downstream change of sonic flow cannot influence the upstream so as to realize stable supply of flow; the heat exchanger connected in the pipeline can gasify a small amount of liquid contained in the gas, so that the pure gas phase at the inlet of the sonic nozzle is ensured; the sonic nozzle is a fixed convergent structure, can resist high pressure and is easy to process.
The invention has the advantages that the invention not only can realize the accurate control of the micro gas flow under the pure gas phase condition, but also is suitable for the condition that the incoming flow contains a small amount of liquid drops, and can provide stable flow supply under the condition of downstream pressure fluctuation. Compared with the existing gas flow control technology, the device has the advantages of easily understood principle, simple structure and convenient operation, meets the requirement of the ground test of the aerospace micro-thruster, and can be popularized to other industries with similar flow control requirements.
[ description of the drawings ]
The invention is further described below with reference to the accompanying drawings.
FIG. 1 is a schematic diagram of the structure of the present invention.
The reference numbers in the figures represent respectively: (1) the device comprises a gas cylinder, (2) a pipeline, (3) a manual valve, (4) a pressure gauge, (5) a pressure reducer, (6) a heat exchanger assembly, (7) a filter, (8) a mass flow meter, (9) an electromagnetic valve, (10) a pressure sensor, (11) a temperature sensor and (12) a sonic nozzle assembly.
Fig. 2 is a schematic view of a heat exchanger assembly of the present invention.
The reference numbers in the figures represent respectively: 1. the water heater comprises a water storage tank, 2. a water tank cover, 3. a spiral copper tube, 4. water, 5. a water valve and 6. an electric heating tube.
Fig. 3 is an assembly view of the sonic nozzle assembly of the present invention.
The reference numbers in the figures represent respectively: 1. the pipe connecting piece comprises a pipe connecting piece, 2 parts of a sleeve nut, 3 parts of a gasket, 4 parts of a sonic nozzle and 5 parts of a connecting sleeve.
[ detailed description ] embodiments
The invention is further described below with reference to the accompanying drawings.
Fig. 1 shows a small flow gas control device according to the present invention, which includes (1) a gas cylinder, (2) a pipeline, (3) a manual valve, (4) a pressure gauge, (5) a pressure reducer, (6) a heat exchanger assembly, (7) a filter, (8) a mass flow meter, (9) a solenoid valve, (10) a pressure sensor, (11) a temperature sensor, and (12) a sonic nozzle assembly. The outlet of the gas cylinder is sequentially connected with a manual valve, a pressure reducer, a heat exchanger assembly, a filter, a mass flowmeter, an electric control valve and a sonic nozzle assembly through pipelines, the inlet and the outlet of the pressure reducer are respectively connected with a pressure gauge and the manual valve through branch pipelines, a temperature sensor and a pressure sensor are connected into a pipeline in front of the sonic nozzle assembly, and a pressure sensor is connected into a pipeline behind the sonic nozzle assembly. The specific steps for realizing flow control are as follows:
firstly, ensuring that a heat exchanger is in a normal working state before flow control operation;
FIG. 2 is a schematic diagram of the heat exchanger assembly of the present invention, the main body part is a water storage tank with a cover plate and a spiral copper tube in the middle of the water tank, the spiral copper tube is fixed on the tank cover and an inlet and outlet interface is left on the outer side of the tank cover, and an electric heating tube and a drain valve are installed at the bottom of the water storage tank. Before the flow control operation is carried out, hot water can be stored in the storage tank in a mode of heating through the electric heating pipe or directly injecting hot water into the storage tank, the interface reserved outside the tank cover can be in butt joint with an incoming flow pipeline, heat exchange with an external hot water environment can be realized when incoming flow flows through the copper tube immersed in the hot water, and the spiral copper tube can increase the length of the heat exchange pipeline so as to strengthen the heat exchange effect.
The second step is that: determining the size of the initial adjustment pressure;
if the downstream pressure of the sonic nozzle is p and the pressure fluctuation range is delta p, the peak value p of the pressure fluctuationmaxEqual to (p + Δ p). According to the requirement of the supercritical flow state of the convergent nozzle, the pressure ratio between the rear part and the front part of the sonic nozzle is required to be ensured to be lower than the critical pressure ratio, and the calculation formula of the critical pressure ratio is as follows:
wherein, betacrAt the critical pressure ratio, k is the specific heat ratio of the preconditioning gas. Initial pressure p0Determined according to the following formula:
p0＝βcr·pmax
the third step: determining the size of the throat part of the sonic nozzle according to the control flow requirement, the initial regulating pressure value and the initial gas temperature value;
initial pressure p according to mass flow requirement0And the initial temperature value T of the gas measured by the temperature sensor0The sonic nozzle throat size is determined using the following equation:
wherein,
Atis the throat area of the sonic nozzle,
to precondition mass flow, k is the specific heat ratio of the preconditioning gas and R is the gas constant.
The fourth step: installing a sonic nozzle;
FIG. 3 is an assembly drawing of the sonic nozzle assembly of the present invention, the sonic nozzle assembly is composed of a filler neck, a cap nut, a gasket, a sonic nozzle and a connecting sleeve, the sonic nozzle is clamped in the connecting sleeve, the filler neck and the connecting sleeve are fastened by the cap nut, and the gasket is arranged between the sonic nozzle and the filler neck and between the sonic nozzle and the connecting sleeve to ensure sealing. When the device works, the flow is controlled mainly through the throttling action of the sonic nozzle, the flow can be adjusted in a small range by adjusting the pressure in front of the sonic nozzle, the sonic nozzle is controlled to work in a supercritical state, and the influence of downstream pressure fluctuation on the upstream can be isolated when the throat speed of the sonic nozzle reaches the sonic speed. The flow rate can be controlled to vary over a wide range by replacing sonic nozzles of different sizes.
The fifth step: initially adjusting the pressure;
firstly opening a manual valve at the outlet of the gas cylinder and primarily adjusting the pressure of the pressure reducer to the initial design pressure p0And the pressure change condition behind the pressure reducer can be observed through the pressure gauge during pressure regulation. After the pressure is adjusted, the electromagnetic valve is powered on, stable flow can be quickly established in the pipeline due to the existence of the sonic nozzle, the flow can be measured by the mass flow meter, and the front-back pressure ratio of the sonic nozzle can be obtained by the pressure sensors arranged in front of and behind the sonic nozzle, so that whether the sonic nozzle works in a supercritical state or not can be determined.
And a sixth step: the pressure is finely adjusted.
If the actual flow deviates from the designed flow and is small, the flow can be finely adjusted to the required flow value in a pressure regulating mode; if the actual flow deviates from the designed flow greatly, the flow can be adjusted in a large range by replacing the sonic nozzles with different sizes.
The electromagnetic valve, the pressure sensor and the mass flowmeter in the device can be controlled or data can be acquired by a computer, and remote control and monitoring can be realized during flow discharge.
Claims (4)
1. A small-flow gas control apparatus comprising: the device comprises a gas cylinder (1), a pipeline (2), a manual valve (3), a pressure gauge (4), a pressure reducer (5), a filter (7), a mass flow meter (8), an electromagnetic valve (9), a pressure sensor (10) and a temperature sensor (11). The method is characterized in that: also comprises a heat exchanger assembly (6) and an acoustic velocity nozzle assembly (12); the outlet of the gas cylinder (1) is sequentially connected with the manual valve (3) through the pipeline (2), the pressure reducer (5), the heat exchanger assembly (6), the filter (7), the mass flow meter (8), the electromagnetic valve (9) and the sonic nozzle assembly (12), branch pipelines are respectively led out from the inlet and the outlet of the pressure reducer (5) to be connected with the pressure gauge (4) and the manual valve (3), the two manual valves are connected with the gas discharge pipeline, the sonic nozzle assembly (12) is connected with the pressure sensor (10) and the temperature sensor (11) in the pipeline in front of the pressure gauge, and the sonic nozzle assembly (12) is connected with the pressure sensor (10) in the pipeline behind the pressure.
2. A small flow gas control apparatus as defined in claim 1, wherein: the heat exchanger component comprises a water storage tank, a tank cover, a detachable spiral copper tube and an electric heating tube, wherein the electric heating tube is positioned at the bottom of the water tank, the spiral copper tube is positioned in the middle of the water tank, the water valve is installed at the low position of the outer wall of the water tank, the spiral copper tube is fixed on the tank cover through a pipeline and leaves an inlet and outlet interface outside the tank cover, and a valve is left on the tank cover.
3. A small flow gas control apparatus as defined in claim 1, wherein: the sonic nozzle component consists of a filler neck, an outer sleeve nut, a gasket, a sonic nozzle and a connecting sleeve. The sonic nozzle adopts a fixed convergent structure and is clamped in the connecting sleeve. The filler neck and the connecting sleeve are fastened by using the outer sleeve nut, and gaskets are arranged among the sonic nozzle, the filler neck and the connecting sleeve.
4. A method of controlling flow for the apparatus of claim 1, the method operating as follows:
firstly, ensuring that a heat exchanger is in a normal working state before flow control operation;
the second step is that: determining the size of the initial adjustment pressure;
the third step: determining the size of the throat part of the sonic nozzle according to the control flow requirement, the initial regulating pressure value and the initial gas temperature value;
the fourth step: installing a sonic nozzle;
the fifth step: initially adjusting the pressure;
and a sixth step: the pressure is finely adjusted.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN200810225334A CN101727108A (en) | 2008-10-30 | 2008-10-30 | Low-flow gas control device and using method thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN200810225334A CN101727108A (en) | 2008-10-30 | 2008-10-30 | Low-flow gas control device and using method thereof |
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| CN101727108A true CN101727108A (en) | 2010-06-09 |
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| CN200810225334A Pending CN101727108A (en) | 2008-10-30 | 2008-10-30 | Low-flow gas control device and using method thereof |
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Cited By (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102927447A (en) * | 2012-10-31 | 2013-02-13 | 北京控制工程研究所 | Synchronous deflation method for air channel pressure-reducing pipeline system |
| CN102935603A (en) * | 2012-11-19 | 2013-02-20 | 奇瑞汽车股份有限公司 | Blowing device for processing center knife handle and processing center |
| CN103372739A (en) * | 2012-04-23 | 2013-10-30 | 天纳克-埃贝赫（大连）排气系统有限公司 | Welding shield gas flow control device for silencers |
| CN104913201A (en) * | 2015-04-29 | 2015-09-16 | 北京航天发射技术研究所 | Pressure reducer air supply loop adopting redundant design and control method |
| CN105278587A (en) * | 2015-10-26 | 2016-01-27 | 哈尔滨工业大学 | Multi-channel microfluidic pressure source |
| CN105302979A (en) * | 2015-11-09 | 2016-02-03 | 广东电网有限责任公司电力科学研究院 | Modeling method and system of valve groups in two-phase fluid network model |
| CN105402454A (en) * | 2015-08-21 | 2016-03-16 | 中国人民解放军国防科学技术大学 | Gas supply adjustment device based on pressure reducers |
| CN107339092A (en) * | 2017-08-07 | 2017-11-10 | 新疆国利衡清洁能源科技有限公司 | Underground coal gasification(UCG) monitoring system |
| CN112629907A (en) * | 2020-12-25 | 2021-04-09 | 北京动力机械研究所 | Double-circuit open system test bench |
| CN112629906A (en) * | 2020-12-25 | 2021-04-09 | 北京动力机械研究所 | Double-path open system test method |
| CN113110627A (en) * | 2021-04-28 | 2021-07-13 | 北京航空航天大学 | High-precision, high-reliability and quick-response adjustable venturi |
| CN113306746A (en) * | 2021-05-26 | 2021-08-27 | 成都天巡微小卫星科技有限责任公司 | Iodine working medium electric propulsion storage and supply system based on sonic nozzle flow control |
| CN114459742A (en) * | 2022-01-04 | 2022-05-10 | 西安航天动力试验技术研究所 | Pressure reducer performance test system and multi-mode dynamic performance test method |
| CN117963145A (en) * | 2024-03-28 | 2024-05-03 | 北京星辰空间科技有限公司 | Pilot-operated type quick-response multi-nozzle propeller |
| CN118304741A (en) * | 2024-06-07 | 2024-07-09 | 杭州嘉隆气体设备有限公司 | Compressed air decarburization drying device and use method |
-
2008
- 2008-10-30 CN CN200810225334A patent/CN101727108A/en active Pending
Cited By (23)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103372739A (en) * | 2012-04-23 | 2013-10-30 | 天纳克-埃贝赫（大连）排气系统有限公司 | Welding shield gas flow control device for silencers |
| CN102927447B (en) * | 2012-10-31 | 2014-10-08 | 北京控制工程研究所 | Synchronous deflation method for air channel pressure-reducing pipeline system |
| CN102927447A (en) * | 2012-10-31 | 2013-02-13 | 北京控制工程研究所 | Synchronous deflation method for air channel pressure-reducing pipeline system |
| CN102935603A (en) * | 2012-11-19 | 2013-02-20 | 奇瑞汽车股份有限公司 | Blowing device for processing center knife handle and processing center |
| CN104913201A (en) * | 2015-04-29 | 2015-09-16 | 北京航天发射技术研究所 | Pressure reducer air supply loop adopting redundant design and control method |
| CN105402454A (en) * | 2015-08-21 | 2016-03-16 | 中国人民解放军国防科学技术大学 | Gas supply adjustment device based on pressure reducers |
| CN105402454B (en) * | 2015-08-21 | 2019-12-13 | 中国人民解放军国防科学技术大学 | Gas supply adjusting device based on pressure reducer |
| CN105278587A (en) * | 2015-10-26 | 2016-01-27 | 哈尔滨工业大学 | Multi-channel microfluidic pressure source |
| CN105302979B (en) * | 2015-11-09 | 2019-01-15 | 广东电网有限责任公司电力科学研究院 | The modeling method and system of valve group in two-p hase fluid network model |
| CN105302979A (en) * | 2015-11-09 | 2016-02-03 | 广东电网有限责任公司电力科学研究院 | Modeling method and system of valve groups in two-phase fluid network model |
| CN107339092A (en) * | 2017-08-07 | 2017-11-10 | 新疆国利衡清洁能源科技有限公司 | Underground coal gasification(UCG) monitoring system |
| CN112629907A (en) * | 2020-12-25 | 2021-04-09 | 北京动力机械研究所 | Double-circuit open system test bench |
| CN112629906A (en) * | 2020-12-25 | 2021-04-09 | 北京动力机械研究所 | Double-path open system test method |
| CN113110627B (en) * | 2021-04-28 | 2022-05-17 | 北京航空航天大学 | High-precision, high-reliability and quick-response adjustable venturi |
| CN113110627A (en) * | 2021-04-28 | 2021-07-13 | 北京航空航天大学 | High-precision, high-reliability and quick-response adjustable venturi |
| CN113306746A (en) * | 2021-05-26 | 2021-08-27 | 成都天巡微小卫星科技有限责任公司 | Iodine working medium electric propulsion storage and supply system based on sonic nozzle flow control |
| CN113306746B (en) * | 2021-05-26 | 2022-10-14 | 成都天巡微小卫星科技有限责任公司 | Iodine working medium electric propulsion storage and supply system based on sonic nozzle flow control |
| CN114459742A (en) * | 2022-01-04 | 2022-05-10 | 西安航天动力试验技术研究所 | Pressure reducer performance test system and multi-mode dynamic performance test method |
| CN114459742B (en) * | 2022-01-04 | 2024-05-03 | 西安航天动力试验技术研究所 | Pressure reducer performance test system and multi-mode dynamic performance test method |
| CN117963145A (en) * | 2024-03-28 | 2024-05-03 | 北京星辰空间科技有限公司 | Pilot-operated type quick-response multi-nozzle propeller |
| CN117963145B (en) * | 2024-03-28 | 2024-06-07 | 北京星辰空间科技有限公司 | Pilot-operated type quick-response multi-nozzle propeller |
| CN118304741A (en) * | 2024-06-07 | 2024-07-09 | 杭州嘉隆气体设备有限公司 | Compressed air decarburization drying device and use method |
| CN118304741B (en) * | 2024-06-07 | 2024-08-23 | 杭州嘉隆气体设备有限公司 | Compressed air decarburization drying device and use method |
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Open date: 20100609 |