CN101719734B - Attitude adjustment and microstroke nanometer positioning control device for bimodal ultrasonic motor - Google Patents
Attitude adjustment and microstroke nanometer positioning control device for bimodal ultrasonic motor Download PDFInfo
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- CN101719734B CN101719734B CN2009102514780A CN200910251478A CN101719734B CN 101719734 B CN101719734 B CN 101719734B CN 2009102514780 A CN2009102514780 A CN 2009102514780A CN 200910251478 A CN200910251478 A CN 200910251478A CN 101719734 B CN101719734 B CN 101719734B
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- ultrasonic motor
- piezoelectric ceramic
- driving
- supersonic motor
- bimodal
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Abstract
The invention discloses an attitude adjustment and microstroke nanometer positioning control device for a bimodal ultrasonic motor, which comprises an ultrasonic motor, an upper base, a lower base and two pieces of piezoelectric ceramics, wherein the upper base is fixedly connected with the ultrasonic motor and rotatablely connected with the upper ends of the two pieces of piezoelectric ceramics at two sides of the ultrasonic motor; the lower base is fixedly connected with the lower ends of the two pieces of piezoelectric ceramics at the two sides of the ultrasonic motor; the telescoping direction of the piezoelectric ceramics is the same as the axial direction of a driving head of the ultrasonic motor; and each piece of piezoelectric ceramics is respectively externally connected with voltage and independently controlled. The invention can adjust the contact angle and the pretightening force of the driving head of the bimodal ultrasonic motor and a driving surface of a working table, improves the driving characteristics of the working table in a large-stroke driving range, and provides microstroke driving and nanometer positioning control functions, thereby greatly reducing the application difficulty in large-stroke nanometer positioning and driving control of the bimodal ultrasonic motor.
Description
Technical field
The present invention relates to supersonic motor and drive and large-stroke nanometer positioning control field, be specifically related to a kind of bimodal ultrasonic motor attitude and regulate and travel incognito journey nanometer positioning control device
Background technology
Bimodal ultrasonic motor based on the panel internal vibration is the New-type electric machine that development in recent years is got up, and it is quick, efficient, control is flexible, advantage of simple structure constantly enlarges its application; Because its power output is little, environmentally safe, volume are little, Continuous Drive and stepper drive one are accomplished, so more be applicable to instrument and microdevice processing equipment field, often there is very high requirement in these fields to positioning accuracy.
The bimodal ultrasonic motor driving head acts on the workbench drive surface through the initial tension of spring of electric machine built-in, when driving head when elliptic motion trace moves, workbench just produces required rectilinear motion under the effect of driving head friction drive.Here the contact angle of driving head and workbench drive surface directly has influence on the drive characteristic of workbench and drives step pitch with the big young pathbreaker of pretightning force who applies; Thereby bimodal ultrasonic motor is in practical application, to the requirement of table slide linearity and all very high to the requirement of workbench drive surface linearity.Owing to have guide rail foozle, drive surface form error and installation dimension error etc., the variation in whole driving travel range of driving head and workbench drive surface contact angle and pretightning force size is very big.
Therefore need such adjusting device, it is big or small with pretightning force that this device can be regulated the contact angle of driving head and drive surface, and then reach and improve workbench drive characteristic, the such purpose of raising large-stroke nanometer positioning control ability.
Summary of the invention
The technical problem that the present invention will solve provides a kind of bimodal ultrasonic motor attitude and regulates and travel incognito journey nanometer positioning control device; Can regulate the contact angle and the pretightning force size of bimodal ultrasonic motor driving head and workbench drive surface; Improve the big stroke of workbench and drive the drive characteristic in the scope; And provide the travel incognito journey to drive and the nanometer positioning controlled function, reduce the application difficulty of bimodal ultrasonic motor in the drive controlling of large-stroke nanometer location.
For addressing the above problem, technical scheme of the present invention is following:
A kind of bimodal ultrasonic motor attitude is regulated and travel incognito journey nanometer positioning control device, and it is characterized in that: described device is made up of five independent sectors, supersonic motor, upper bed-plate, lower bottom base and two piezoelectric ceramic; Said upper bed-plate is fixedly connected with supersonic motor, is rotationally connected with two piezoelectric ceramic upper end of supersonic motor both sides; Described lower bottom base is fixedly connected with two piezoelectric ceramic lower ends of supersonic motor both sides; The flexible direction of said piezoelectric ceramic is consistent with supersonic motor driving head axial direction; Described each piezoelectric ceramic is external voltage and independent control respectively.
Described supersonic motor, piezoelectric ceramic are installed on the same horizontal plane; Have living space between described upper bed-plate and the lower bottom base at interval; Described supersonic motor driving head stretches out the upper bed-plate outside.
End in contact workbench drive surface on the supersonic motor driving head.
Beneficial effect of the present invention:
(1), respectively to the control of two piezoelectric ceramic of supersonic motor both sides; Can improve the drive characteristic of bimodal ultrasonic motor in whole big stroke driving scope; Avoid in the driving process; Particularly under drive condition at a slow speed, certain regional actuating speed of workbench too fast and occur in certain zone in addition actuating speed cross slow or even satisfied not drive condition;
(2), through control to two piezoelectric ceramic of supersonic motor both sides, can regulate the actuating speed and the retro-speed of workbench;
(3), through control to two piezoelectric ceramic of supersonic motor both sides, can realize that the travel incognito journey drives and the nanometer positioning controlled function, control range can reach thousands of nanometers, and then has reduced the harsh requirement to bimodal ultrasonic motor nanometer driving step pitch;
(4), size that can Control work platform self-lock force.
Description of drawings
Fig. 1 is a structural representation of the present invention.
Fig. 2 is that control device of the present invention is regulated pattern, and wherein (a) regulates sketch map for the left avertence angle; (b) regulate sketch map for the right avertence angle; (c) regulate sketch map for increasing pretightning force; (d) regulate sketch map for reducing pretightning force.
Fig. 3 is the online adjusting sketch map of control device of the present invention.
Fig. 4 is the micro-nano driving sketch map of control device of the present invention, and wherein the driving scope of d is 1 nanometer～thousands of nanometers.
Embodiment
Referring to Fig. 1, a kind of bimodal ultrasonic motor attitude is regulated and travel incognito journey nanometer positioning control device, includes supersonic motor 1, upper bed-plate 2, lower bottom base 3 and piezoelectric ceramic 4.Upper bed-plate 2 is fixedly connected with the housing of supersonic motor 1, is rotationally connected with piezoelectric ceramic 4 upper ends of supersonic motor 1 both sides; Lower bottom base 3 is fixedly connected with piezoelectric ceramic 4 lower ends of supersonic motor 1 both sides; The flexible direction of piezoelectric ceramic 4 is consistent with supersonic motor 1 driving head axial direction; Each piezoelectric ceramic is external voltage and independent control respectively.
Referring to Fig. 2, through the control to two piezoelectric ceramic of supersonic motor both sides, control device has four kinds of different adjusting patterns, and promptly the left avertence angle is regulated, the right avertence angle is regulated, increase pretightning force regulates and reduce pretightning force and regulate.
Referring to Fig. 3, control device can carry out online adjusting according to the workbench driving condition.
Referring to Fig. 4, control device is in travel incognito journey driving process, and the span that drives scope d is 1 nanometer～thousands of nanometers.
Claims (1)
1. a bimodal ultrasonic motor attitude is regulated and travel incognito journey nanometer positioning control device, and it is characterized in that: described device is made up of five independent sectors, supersonic motor, upper bed-plate, lower bottom base and two piezoelectric ceramic; Said upper bed-plate is fixedly connected with supersonic motor, is rotationally connected with two piezoelectric ceramic upper end of supersonic motor both sides; Described lower bottom base is fixedly connected with two piezoelectric ceramic lower ends of supersonic motor both sides; The flexible direction of said piezoelectric ceramic is consistent with supersonic motor driving head axial direction; Described each piezoelectric ceramic is external voltage and independent control respectively; Described supersonic motor, piezoelectric ceramic are installed on the same horizontal plane; Have living space between described upper bed-plate and the lower bottom base at interval; Described supersonic motor driving head stretches out the upper bed-plate outside.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2009102514780A CN101719734B (en) | 2009-12-24 | 2009-12-24 | Attitude adjustment and microstroke nanometer positioning control device for bimodal ultrasonic motor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2009102514780A CN101719734B (en) | 2009-12-24 | 2009-12-24 | Attitude adjustment and microstroke nanometer positioning control device for bimodal ultrasonic motor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101719734A CN101719734A (en) | 2010-06-02 |
| CN101719734B true CN101719734B (en) | 2012-05-09 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2009102514780A Expired - Fee Related CN101719734B (en) | 2009-12-24 | 2009-12-24 | Attitude adjustment and microstroke nanometer positioning control device for bimodal ultrasonic motor |
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| CN (1) | CN101719734B (en) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2012054814A2 (en) * | 2010-10-21 | 2012-04-26 | Thorlabs, Inc. | Parallellism conservation mechanism for nanopositioner |
| CN103516252A (en) * | 2012-06-27 | 2014-01-15 | 森泉(上海)光电科技有限公司 | Dual-mode ultrasonic linear motor with high speed, high resolution ratio and high driving force |
| CN103078554B (en) * | 2012-12-31 | 2015-08-19 | 张南峰 | The control method of thrust and adjusting device thereof between piezoelectric motor rotor |
| CN104022684B (en) * | 2014-06-25 | 2016-03-09 | 哈尔滨工业大学 | Longitudinal vibration composite mode foot formula piezoelectric actuator across yardstick driving method |
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2009
- 2009-12-24 CN CN2009102514780A patent/CN101719734B/en not_active Expired - Fee Related
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| CN101719734A (en) | 2010-06-02 |
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