CN101509771A - Decoupling micromechanical gyroscope - Google Patents
Decoupling micromechanical gyroscope Download PDFInfo
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- CN101509771A CN101509771A CNA2008100577418A CN200810057741A CN101509771A CN 101509771 A CN101509771 A CN 101509771A CN A2008100577418 A CNA2008100577418 A CN A2008100577418A CN 200810057741 A CN200810057741 A CN 200810057741A CN 101509771 A CN101509771 A CN 101509771A
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Abstract
The invention provides a decoupling micro-machine gyro, which comprises a glass substrate (1), a metal electrode (8) that covers the surface of the glass substrate (1), a movable central mass block (2) that is connected with a drive comb tooth structure (3) by an inside detection supporting beam (13) and with a detection comb tooth structure (4) by an inside drive supporting beam (14). The gyro is characterized in that the central mass block (2) and the metal electrode (8) are in a grate shape and therefore, when a capacitor with the detection comb tooth structure changes, a capacitor between the central mass block (2) and the metal electrode (8) also changes, thus causing the gyro to be capable of detecting the increased capacitance quantity at work and improving the sensitivity of the gyro.
Description
Technical field
The present invention relates to a kind of angular-rate sensor, relate in particular to decoupling micromechanical gyroscope.
Background technology
Micromechanical gyro is a kind of angular-rate sensor that grows up on the silicon micromachining technology basis, and it utilizes Coriolis force to come the angular velocity of rotation of Measuring Object.Compare with traditional angular-rate sensor, the volume of micromechanical gyro is less, weight is light, cost is lower, also have simultaneously reliability height, anti-vibrating and impact ability strong, can be mass-produced, plurality of advantages such as low price, thereby very application prospects is arranged in fields such as the control automatically of Aero-Space, robot, inertial navigation, weapon guidance, automobile, consumer electronics products.
During micromechanical gyro work, the mechanical couplings that drives and detect two mode can have a strong impact on the performance of gyro, and solution is to increase structure complexity, makes drive part and test section self-movement, realizes so-called decoupling-structure.In application number is 200610010099.9 Chinese patent application a kind of symmetrical structure double-grade decoupling single-crystal-silicon micro mechanical gyroscope is disclosed for example, it adopts the device architecture of complete symmetry, tangentially drive and the tangential motion detection mode reduces system damping and obtains higher quality factor, drives mode and detects coupling between the mode thereby reduce.Document " A Single-CrystalSilicon Symmetrical and Decoupled MEMS Gyroscope on an InsulatingSubstrate.Journal of Microelectromechanical Systems.Vol.14; No.4; AUGUST2005 " has also been described a kind of decoupling micromechanical gyroscope of complete symmetry, the natural frequency of its driving mode and detection mode is mated fully, thereby has improved the decoupling of gyro.
Yet all there is following defective in the micromechanical gyro of above introduction: because the restriction of etching depth-to-width ratio in the micromechanics manufacturing process, the thinner thickness of silicon chip makes the detection electric capacity of comb structure less, and the changes in capacitance amount is also very little, it is bigger to measure difficulty, thereby has limited the sensitivity of gyro.In addition, the amplitude of driving mode can not be kept constant, therefore is difficult to angular velocity is accurately measured.
Summary of the invention
The objective of the invention is to overcome the defective that exists in the prior art, a kind of micromechanical gyro with higher sensitivity is provided.
According to an aspect of the present invention, provide a kind of decoupling micromechanical gyroscope, comprising: glass substrate; Metal electrode, it covers described glass substrate surface; Central mass movably, it detects brace summer by the inboard and is connected with the driving comb structure, and be connected with the detection comb structure by interior side drive brace summer, wherein, described central mass and metal electrode are palisade, and when the electric capacity of detection comb structure changed, the electric capacity between described central mass and the metal electrode also changed.
According to another aspect of the present invention, all the driving direction with gyro is vertical for the grid direction of described central mass and metal electrode.
Wherein, described central mass is symmetrical grating structure, and described metal electrode is interdigital grating structure.
According to a further aspect of the invention, also comprise:
The driving comb structure, it is symmetrically distributed in the left and right sides of described central mass, detect brace summer by the inboard and be connected with the both sides up and down of described central mass, and by outer side drive brace summer be positioned at described driving comb structure about the anchor point at two ends be connected;
The detection comb structure, it is symmetrically distributed in the both sides up and down of described central mass, be connected with the right and left of described central mass by interior side drive brace summer, and be connected with the anchor point that is positioned at two ends, the described detection comb structure left and right sides by outside detection brace summer;
Drive electrode is the broach shape, and it is symmetrically distributed in the left and right sides of described driving comb structure, and with described driving comb respective outer side edges, be fixed on the described glass substrate by oneself anchor point;
Detecting electrode is the broach shape, and it is symmetrically distributed in the both sides up and down of described detection comb structure, and with described detection comb respective outer side edges, be fixed on the described glass substrate by oneself anchor point;
It is identical that brace summer is detected in the wherein said outer side drive brace summer and the outside, and described anchor point is arranged on the intersection of described outer side drive brace summer and outside detection brace summer.
According to a further aspect of the invention, also comprise:
The drive feedback electrode, be the broach shape, it is positioned at a side of the contiguous described central mass of described driving comb structure or away from a side of described central mass, with described driving comb respective outer side edges, and the anchor point by oneself is fixed on the described glass substrate, is used to measure the amplitude that drives mode and feed back to described drive electrode.
Compared with prior art, the present invention has the following advantages:
1. except that the detection electric capacity of comb structure, the detection electric capacity of another group grating structure also is provided, thereby can have increased by detected capacitance change when making gyro work, improve the sensitivity of gyro;
2. can make full use of the space, save the manufacturing cost of gyro.
Description of drawings
Fig. 1 is the silicon structure synoptic diagram of the embodiment of the invention;
Fig. 2 is the metal electrode of the grating synoptic diagram on the glass substrate of the embodiment of the invention;
Fig. 3 has illustrated the anchor point of the silicon structure that is connected with glass substrate in the preferred embodiments of the present invention.
The Reference numeral complete list
1-glass substrate; 2-movably central mass; 3-driving comb structure; 4-detection comb structure; 5-drive electrode; 6-drive feedback electrode; 7-detecting electrode; 8-metal electrode; 9-anchor point; 10-outer side drive brace summer; Brace summer is detected in 11-outside; 12-silicon structure; 13-inboard the brace summer that detects; 14-interior side drive brace summer.
Embodiment
Below, by a preferred embodiment of the present invention advantage of the present invention is described.
Fig. 1 is the silicon structure synoptic diagram of the micromechanical gyro of the preferred embodiment of the present invention.This silicon structure 12 comprises:
Movably symmetrical palisade central mass 2, it has the grid of arranging along the y direction of principal axis, wherein said y axle be the detection side to, vertical with it x axle is a driving direction; The both sides up and down of described central mass are detected brace summer 13 by the inboard and are connected with driving comb structure 3, and its right and left is connected with detection comb structure 4 by interior side drive brace summer 14;
Detection comb structure 4, it is symmetrically distributed in the both sides up and down of described central mass, detects brace summer 11 by the outside and is connected with the anchor point 9 that is positioned at two ends, the described detection comb structure left and right sides;
Detecting electrode 7 is the broach shape, its be symmetrically distributed in described detection comb structure both sides up and down and with described detection comb respective outer side edges, be fixed on the described glass substrate by oneself anchor point;
Because described driving brace summer is identical with the detection brace summer, the natural frequency of two mode of oscillations can be mated fully.
Alternatively, can also use drive feedback electrode 6.Described drive feedback electrode be the broach shape and with described driving comb respective outer side edges, it can be positioned at a side (as shown in Figure 1) of the contiguous described central mass of described driving comb structure, also can be positioned at a side (not shown), and be fixed on the described glass substrate by oneself anchor point away from described central mass.It is used to measure the amplitude that drives mode and feed back to described drive electrode, keeps the purpose that drives the mode amplitude constant thereby reach.
Fig. 2 is the metal electrode of the grating synoptic diagram on the glass substrate of the preferred embodiment of the present invention.Metal electrode 8 is interdigital grating structure, and it utilizes methods such as sputter well known in the art to cover on the described glass substrate usually.The grid of described metal electrode of the grating is arranged along the y direction of principal axis equally, in order to when gyro work and described central mass generation capacitance variations.
Fig. 3 has illustrated the anchor point of the silicon structure that is connected with glass substrate in the preferred embodiments of the present invention.As shown in Figure 3, because anchor point 9 is arranged on the intersection that brace summer and described outer side drive brace summer are detected in the described outside, make that driving mode is relatively independent with the vibration that detects mode, system has the good decoupling characteristic.
For a person skilled in the art, should be appreciated that, the grating structure of described central mass and metal electrode is not limited to the symmetrical grating structure and the interdigital grating structure of present embodiment, and only is exemplary such as the length of side, quantity and the arrangement etc. of its grid.The purpose of this structure is when gyro produces comb structure detection electric capacity, can also form grating structure by described central mass and metal electrode and detect electric capacity.Preferably, all the driving direction with gyro is vertical for the grid direction of described central mass and metal electrode.
When this micromechanical gyro work, on described drive electrode, apply v respectively
d± v
AcSin ω t, and with described central mass ground connection, central mass can be subjected to the electrostatic forcing of alternation and the axial vibration of x takes place, electric capacity between described drive feedback electrode and the driving comb structure changes, by measuring this capacitance variations and it being fed back to described drive electrode, make described central mass with stable amplitude vibration.When the z direction had the angular velocity input, central mass produced vibration at the y direction of principal axis under the effect of coriolis force.Therefore the axial vibration of y makes the electric capacity of described detection comb structure change, electric capacity between the metal electrode on described central mass and the glass substrate also can change simultaneously, measure this two groups of capacitance variations simultaneously, superpose, just can obtain the value of input angular velocity.The electric capacity of described detection comb structure refers to the electric capacity between the detecting electrode of detection comb structure and its both sides.
Present embodiment adopts the device architecture of complete symmetry, makes the natural frequency that drives mode and detection mode mate fully, and is stronger to the tolerance of fabrication error.By the annexation of design driven comb structure, detection comb structure and anchor point, make that described driving comb structure can only be in the vibration of x direction of principal axis, described detection comb structure can only be vibrated at the y direction of principal axis, thereby has realized the decoupling zero of system.The vibration that drives mode and detect mode all with the glass substrate plane parallel, the damping of system is less, and higher quality factor is under atmospheric pressure also arranged.In addition, central mass ground connection has been isolated the electromagnetic interference (EMI) that drives between mode and the detection mode effectively.
Though the present invention is described by embodiment, yet the present invention is not limited to embodiment described herein, is also comprising various changes and the variation of having done without departing from the spirit and scope of the present invention.
Claims (5)
1. a decoupling micromechanical gyroscope comprises: glass substrate (1); Metal electrode (8), it covers described glass substrate (1) surface; Central mass (2) movably, it is connected with driving comb structure (3) by the inboard brace summer (13) that detects, and be connected with detection comb structure (4) by interior side drive brace summer (14), it is characterized in that, described central mass (2) and metal electrode (8) are palisade, and when the electric capacity of detection comb structure (4) changed, the electric capacity between described central mass (2) and the metal electrode (8) also changed.
2. micromechanical gyro according to claim 1 is characterized in that, all the driving direction with gyro is vertical for the grid direction of described central mass (2) and metal electrode (8).
3. micromechanical gyro according to claim 2 is characterized in that, described central mass (2) is symmetrical grating structure, and described metal electrode (8) is interdigital grating structure.
4. micromechanical gyro according to claim 3 also comprises:
Driving comb structure (3), it is symmetrically distributed in the left and right sides of described central mass (2), detect brace summer (13) by the inboard and be connected with the both sides up and down of described central mass (2), and by outer side drive brace summer (10) be positioned at described driving comb structure (3) up and down the anchor point at two ends (9) be connected;
Detection comb structure (4), it is symmetrically distributed in the both sides up and down of described central mass (2), be connected by interior side drive brace summer (14) the right and left, and be connected with the anchor point (9) that is positioned at described detection comb structure (3) two ends, the left and right sides by outside detection brace summer (11) with described central mass (2);
Drive electrode (5) is the broach shape, and it is symmetrically distributed in the left and right sides of described driving comb structure (3), and cooperates with described driving comb structure (3), is fixed on the described glass substrate (1) by oneself anchor point;
Detecting electrode (7) is the broach shape, and it is symmetrically distributed in the both sides up and down of described detection comb structure (4), and cooperates with described detection comb structure (4), is fixed on the described glass substrate (1) by oneself anchor point;
It is identical that brace summer (11) is detected in the wherein said outer side drive brace summer (10) and the outside, and described anchor point (9) is arranged on the intersection of described outer side drive brace summer (10) and outside detection brace summer (11).
5. micromechanical gyro according to claim 4 also comprises:
Drive feedback electrode (6), be the broach shape, it is positioned at a side of the contiguous described central mass of described driving comb structure (3) (2) or away from a side of described central mass (2), cooperate with described driving comb structure (3), and the anchor point by oneself is fixed on the described glass substrate (1), is used to measure the amplitude that drives mode and feed back to described drive electrode (5).
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| CNA2008100577418A CN101509771A (en) | 2008-02-14 | 2008-02-14 | Decoupling micromechanical gyroscope |
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|---|---|---|---|---|
| CN101876547B (en) * | 2009-12-08 | 2011-11-02 | 北京大学 | Horizontal shaft micro-mechanical tuning fork gyroscope adopting electrostatic balance comb tooth driver |
| CN102288172A (en) * | 2011-07-07 | 2011-12-21 | 西北工业大学 | Capacitor type micro-machined gyroscope for amplifying movement speed of mass block |
| CN102305626A (en) * | 2011-07-07 | 2012-01-04 | 西北工业大学 | Novel MEMS (micro electro mechanical system) centrifugal-type gyroscope |
| CN102313545A (en) * | 2011-07-21 | 2012-01-11 | 西北工业大学 | Completely-symmetric lever-amplification capacitive micromechanical gyro |
| CN102435185A (en) * | 2011-09-01 | 2012-05-02 | 中国航空工业第六一八研究所 | Internal and external truss type three-frame micro-mechanical gyro structure |
| CN102506843A (en) * | 2011-11-09 | 2012-06-20 | 上海工程技术大学 | Indirectly-connected micromechanical gyroscope with tuning fork vibration |
| CN102042829B (en) * | 2009-10-10 | 2012-06-20 | 北京理工大学 | All-forward capacitance type micro-machined gyroscope |
| CN102607546A (en) * | 2012-03-06 | 2012-07-25 | 中国人民解放军国防科学技术大学 | Orthogonal error processing method for micromechanical gyroscope and device |
| CN102064021B (en) * | 2009-11-17 | 2013-03-20 | 北京大学 | Comb tooth capacitor of micromachine |
| CN108020220A (en) * | 2017-12-07 | 2018-05-11 | 中国人民解放军国防科技大学 | Tangential driving double-differential butterfly wing type silicon micro gyroscope and application method thereof |
| CN108204807A (en) * | 2016-12-19 | 2018-06-26 | 美国亚德诺半导体公司 | For the bending connector of MEMS (MEMS) device |
| CN108955663A (en) * | 2017-05-23 | 2018-12-07 | 北京大学 | A kind of wheeled gyro of resonant mode twin shaft micromechanics |
| CN110207685A (en) * | 2019-06-13 | 2019-09-06 | 华中科技大学 | A kind of MEMS gyroscope |
| CN112710292A (en) * | 2020-12-10 | 2021-04-27 | 中北大学南通智能光机电研究院 | Frequency-tunable micromechanical gyroscope structure based on tunnel magnetic resistance detection |
| WO2021093008A1 (en) * | 2019-11-12 | 2021-05-20 | 瑞声声学科技(深圳)有限公司 | High-precision gyroscope |
| CN115164861A (en) * | 2022-08-26 | 2022-10-11 | 南京高华科技股份有限公司 | MEMS gyroscope and preparation method thereof |
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2008
- 2008-02-14 CN CNA2008100577418A patent/CN101509771A/en active Pending
Cited By (23)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102042829B (en) * | 2009-10-10 | 2012-06-20 | 北京理工大学 | All-forward capacitance type micro-machined gyroscope |
| CN102064021B (en) * | 2009-11-17 | 2013-03-20 | 北京大学 | Comb tooth capacitor of micromachine |
| CN101876547B (en) * | 2009-12-08 | 2011-11-02 | 北京大学 | Horizontal shaft micro-mechanical tuning fork gyroscope adopting electrostatic balance comb tooth driver |
| CN102288172A (en) * | 2011-07-07 | 2011-12-21 | 西北工业大学 | Capacitor type micro-machined gyroscope for amplifying movement speed of mass block |
| CN102305626A (en) * | 2011-07-07 | 2012-01-04 | 西北工业大学 | Novel MEMS (micro electro mechanical system) centrifugal-type gyroscope |
| CN102313545A (en) * | 2011-07-21 | 2012-01-11 | 西北工业大学 | Completely-symmetric lever-amplification capacitive micromechanical gyro |
| CN102435185A (en) * | 2011-09-01 | 2012-05-02 | 中国航空工业第六一八研究所 | Internal and external truss type three-frame micro-mechanical gyro structure |
| CN102435185B (en) * | 2011-09-01 | 2014-03-19 | 中国航空工业第六一八研究所 | Internal and external truss type three-frame micro-mechanical gyro structure |
| CN102506843B (en) * | 2011-11-09 | 2014-08-13 | 上海工程技术大学 | Indirectly-connected micromechanical gyroscope with tuning fork vibration |
| CN102506843A (en) * | 2011-11-09 | 2012-06-20 | 上海工程技术大学 | Indirectly-connected micromechanical gyroscope with tuning fork vibration |
| CN102607546B (en) * | 2012-03-06 | 2014-09-17 | 中国人民解放军国防科学技术大学 | Orthogonal error processing method for micromechanical gyroscope and device |
| CN102607546A (en) * | 2012-03-06 | 2012-07-25 | 中国人民解放军国防科学技术大学 | Orthogonal error processing method for micromechanical gyroscope and device |
| CN108204807A (en) * | 2016-12-19 | 2018-06-26 | 美国亚德诺半导体公司 | For the bending connector of MEMS (MEMS) device |
| CN108955663B (en) * | 2017-05-23 | 2022-03-25 | 北京大学 | Resonant double-shaft micro-mechanical wheel type gyroscope |
| CN108955663A (en) * | 2017-05-23 | 2018-12-07 | 北京大学 | A kind of wheeled gyro of resonant mode twin shaft micromechanics |
| CN108020220A (en) * | 2017-12-07 | 2018-05-11 | 中国人民解放军国防科技大学 | Tangential driving double-differential butterfly wing type silicon micro gyroscope and application method thereof |
| CN108020220B (en) * | 2017-12-07 | 2020-07-10 | 中国人民解放军国防科技大学 | Tangential driving double-differential butterfly wing type silicon micro gyroscope and application method thereof |
| CN110207685A (en) * | 2019-06-13 | 2019-09-06 | 华中科技大学 | A kind of MEMS gyroscope |
| CN110207685B (en) * | 2019-06-13 | 2024-06-04 | 华中科技大学 | MEMS gyroscope |
| WO2021093008A1 (en) * | 2019-11-12 | 2021-05-20 | 瑞声声学科技(深圳)有限公司 | High-precision gyroscope |
| CN112710292A (en) * | 2020-12-10 | 2021-04-27 | 中北大学南通智能光机电研究院 | Frequency-tunable micromechanical gyroscope structure based on tunnel magnetic resistance detection |
| CN115164861A (en) * | 2022-08-26 | 2022-10-11 | 南京高华科技股份有限公司 | MEMS gyroscope and preparation method thereof |
| CN115164861B (en) * | 2022-08-26 | 2024-03-08 | 南京高华科技股份有限公司 | MEMS gyroscope and preparation method thereof |
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