CN101452228B - Automatic aligner - Google Patents
Automatic aligner Download PDFInfo
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- CN101452228B CN101452228B CN2007102027668A CN200710202766A CN101452228B CN 101452228 B CN101452228 B CN 101452228B CN 2007102027668 A CN2007102027668 A CN 2007102027668A CN 200710202766 A CN200710202766 A CN 200710202766A CN 101452228 B CN101452228 B CN 101452228B
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- contraposition
- detent
- plummer
- automatic
- base station
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Abstract
The invention provides an automatic aligning device which comprises a base platform, a bearing platform, an elevating device and a support member connecting the base platform and the bearing platform. The bearing platform is provided with at least one aligning through hole. The elevating device comprises a brake part and an elevating platform connected with the brake part. The elevating device has at least one brake part which is fixed on the base platform and is used for controlling the elevating platform to rise and fall between the base platform and the bearing platform. The elevating platform has an aligning member which is matched with the aligning through hole. The elevating platform is used for matching the aligning through hole corresponding to an object to be aligned to carry outthe alignment. The automatic aligning device can improve the alignment efficiency, avoid manmade visual alignment errors and improve the alignment accuracy.
Description
Technical field
The present invention relates to a kind of automatic contraposition device, particularly be applied to the automatic contraposition device of the exposure location of circuit substrate.
Background technology
The making of the conducting wire of printed circuit board (PCB) is earlier by the exposure imaging process, and the circuit image that is preset on the photomask is transferred on the photosensitive materials such as dry film on the substrate, forms required circuit by etch process on substrate more afterwards.See also document, Moon-Youn Jung, Won Ick Jang, Chang Auck Choi, Myung Rae Lee, Chi Hoon Jun, Youn Tae Kim; Novel lithography process for extreme deep trench by usinglaminated negative dry film resist; 2004:685-688; 2004.17th IEEE InternationalConference on Micro Electro Mechanical Systems.In exposure process, photomask must be aimed at substrate, could guarantee the accuracy of the position of exposure image, and the quality of the successive process (as development, etching or striping line etc.) of the circuit of making printed circuit board (PCB).
At present, the exposure of substrate location is adopted traditional artificial visual contraposition usually.At photomask and substrate the target that the corresponding contraposition in position is used is set at first, in advance.Secondly, the target on the photomask is aimed at corresponding target on the substrate, carried out the contraposition of photomask and substrate by manual observation.Once more, photomask is fixed on the substrate, uses to treat exposure device with glue.But above-mentioned artificial visual is to method for position, and the bit errors that may exist in the contraposition process can't satisfy the strict demand of fine-line printed circuit board (PCB).In addition, if substrate is a double-sided wiring board, promptly need double-sided exposure, then above contraposition action need is respectively to the relative two sides of printed circuit board (PCB), and is so both consuming time with pairing photomask contraposition, increased production cost again.
Summary of the invention
Therefore, be necessary to provide a kind of automatic contraposition device, to improve the accuracy and the contraposition efficient of printed circuit board (PCB) exposure aligning.
Below will a kind of automatic contraposition device be described with embodiment.
Described automatic contraposition device, it comprises base station, plummer, support member and jacking gear.Described support member is fixed in base station, supports described plummer.Described plummer is used for placing treats that the contraposition object carries out contraposition, and is provided with at least one contraposition through hole.Described jacking gear comprises at least one detent and the lifting table that links to each other with described at least one detent, and described detent is fixed in base station, is used to control lifting table lifting repeatedly between base station and plummer; Described lifting table is provided with the contraposition part that matches with described at least one contraposition through hole, is used for the registration holes corresponding with treating the contraposition object and matches, and carries out contraposition.
Compared with prior art, the lifting table of described automatic contraposition device is in lifting between base station and plummer under the drive of detent, stretch out from the corresponding contraposition through hole of plummer so that be arranged on the contraposition part of lifting table, and pass and treat the corresponding registration holes of contraposition object, carry out contraposition.Particularly, can disposablely finish the relative two sides of circuit substrate and the contraposition of corresponding light mask, both improve contraposition efficient, can avoid the error of artificial visual contraposition again, satisfy the strict demand of fine-line printed circuit board (PCB) for the circuit substrate that needs double-sided exposure.
Description of drawings
Fig. 1 is the three-dimensional exploded view of the automatic contraposition device that provides of the technical program embodiment.
Fig. 2 is the stereographic map of the automatic contraposition device that provides of the technical program embodiment.
Fig. 3 is the structural representation that the technical program is treated contraposition circuit substrate and photomask.
Fig. 4 is the view of the automatic contraposition device that provides of the technical program embodiment to circuit substrate among Fig. 3 and photomask contraposition.
Embodiment
The automatic contraposition device that the technical program embodiment is provided below in conjunction with drawings and Examples and being described further.
See also Fig. 1 and Fig. 2, be the automatic contraposition device 10 that the technical program embodiment provides, it comprises base station 11, plummer 12, support member 13 and jacking gear 14.Described support member 13 and described jacking gear 14 are between base station 11 and plummer 12.
Described base station 11 has base station face 111.This base station face 111 is relative with plummer 12, is used to be provided with plummer 12, support member 13 and jacking gear 14.In the present embodiment, the base station face 111 of base station 11 offers first fixed orifice 112, is used for fixing support member 13.This first fixed orifice 112 is positioned at four top corner regions of base station face 111, for cooperating with support member 13.Certainly, base station 11 is not limit with the affixed mode of support member 13, and can one-body molded realization affixed as base station 11 and support member 13, its affixed mode can adopt different designs according to the needs of automatic contraposition device 10.
Described plummer 12 treats that in order to setting the contraposition object carries out contraposition.The second surface 122 that described plummer 12 has first surface 121 and is oppositely arranged with first surface 121.This first surface 121 is and the facing surfaces of the base station face 111 of base station 11, and this second surface 122 is used for placing treats the contraposition object, as: photomask and circuit substrate (scheming not show).Treat the contraposition object according to difference, plummer 12 can be provided with the different contraposition through hole 125 in a plurality of sizes, shape and aperture.This contraposition through hole 125 connects first surface 121 and second surface 122.In addition, in the present embodiment, for cooperating securing supports 13 with substrate 11, four top corner regions of first surface 121 are offered first fixed orifice, 112 corresponding second fixed orifices 123 with substrate 11.This second fixed orifice 123 and the 112 relative coaxial settings of first fixed orifice.
Described support member 13 is used for support bearing platform 12, one ends and is fixed in base station 11, and the other end is fixed in plummer 12, makes base station 11 and plummer 12 form the space that can accommodate jacking gear 14.In the present embodiment, support member 13 1 ends are fixed in first fixed orifice 112 of base station 11, and the other end is fixed in second fixed orifice 123 of plummer 12 by screw 124, makes between base station 11 and the plummer 12 to have certain distance, for accommodating jacking gear 14.Be appreciated that this support member 13 also can be affixed by gluing or other modes and plummer 12.Treat the contraposition object for what satisfy different-thickness, support member 13 can be the design of adjustable in length formula, or be fixed in plummer 12 slidably, for example can make support member 13 1 ends be arranged in second fixed orifice 123, it is fixing that support member 13 is slided in second fixed orifice 123, with the convenient fixed position of regulating plummer 12, that is: distance between plummer 12 and the base station 11 is with assurance jacking gear 14 operate as normal.
Described jacking gear 14 comprises detent 141 and the lifting table 142 that links to each other with detent 141.
Described detent 141 is fixed in the base station face 111 of base station 11, and it comprises lifting unit 1411, detent 1412 and control part 1413.Described lifting unit 1,411 one ends are located at detent 1412, can be under the driving of detent 1412 free lifting.These lifting unit 1411 other ends and lifting table 142 are affixed, make the lifting table 142 can lifting repeatedly between base station 11 and plummer 12 under lifting unit 1411 drives.
Described detent 1412 is used for providing lifting power to lifting unit 1411.In the present embodiment, detent 1412 is the pressure liftable device, promptly is provided with air pressure valve (figure does not show) in the detent 1412.This air pressure valve sucks and discharges gas, so that lifting table 142 rise and fall.Certainly, detent 1412 also can be realized the device of lifting for hydraulic lift, Motorized lift device, oil pressure jacking gear or other.
Described control part 1413 links to each other with detent 1412, with 1412 starts of control brake device.In the present embodiment, for cooperating with the pressure liftable device of detent 1412, control part 1413 is designed to floor sheet controller, promptly jam on air pressure valve suction gas and release gas that pedal makes detent 1412, so that the lifting table 142 of jacking gear 14 is done elevating movement repeatedly between base station 11 and plummer 12.Be appreciated that control part 1413 also can be manual controller, self-actuated controller or other forms of controller, making things convenient for control brake device 1412 so that lifting table 142 repeatedly lifting be advisable.
In the present embodiment, a plurality of threaded holes 1424 are offered on second plane 1422 of lifting table 142, contraposition part 1,423 one ends correspondingly are provided with screw thread, make contraposition part 1423 in threaded hole 1424, can regulate from second plane 1422 height as required to plummer 12 direction extensions, and, contraposition part 1423 is fixed in lifting table 142 by cooperating with nut.Wherein, the quantity of the threaded hole 1424 that this lifting table 142 is offered equals the quantity of the contraposition through hole 125 of plummer 12, and greater than the quantity of contraposition part 1423, so that contraposition part 1423 according to the design for the treatment of the registration holes of contraposition object, selectively is fixed on and carries out contraposition on the lifting table 142.Certainly, the quantity of threaded hole 1424 also can equal the quantity of contraposition part 1423.In addition, a plurality of sliding trays with certain-length also can be offered in second plane 1422 of lifting table 142, and contraposition part 1423 is slided in sliding tray, to regulate the fixed position.
During the contraposition object, this contraposition part 1423 passes contraposition through hole 125 registration holes (figure do not show) corresponding with treating the contraposition object of plummer 12, makes the object contraposition.Therefore these contraposition part 1423 length are equal to or greater than and contraposition part 1423 corresponding contraposition through holes 125 and the axial length sum for the treatment of corresponding registration holes on the contraposition object.In addition, parameters such as the quantity of the contraposition part 1423 of the contraposition through hole 125 of plummer 12 and jacking gear 14, length, size also need according to treating that the contraposition object adopts different designs.For example, when contraposition photomask and circuit substrate, this contraposition part 1423 can be pin.According to different circuit substrates and photomask specification, these contraposition through hole 125 diameters are 1.95mm ~ 2.00mm, contraposition part 1423 diameters that match with contraposition through hole 125 are less than or equal to 1.95mm ~ 2.00mm, and length is 0.1cm ~ 5cm, to be advisable with circuit substrate and the default registration holes coupling of photomask.
Consider the aperture and the registration holes quantity of size dimension, thickness and the default registration holes for the treatment of the contraposition object, the design of jacking gear 14 also needs correspondingly to change.For example, when treating that the contraposition object has than large tracts of land, lifting table 142 needs correspondingly enlarged-area, and this moment, lifting unit 1411 possibilities of single detent 141 can't supporting elevation platform 142 lifting normally.Therefore, a plurality of detent 141 can be set in base station 11 operations simultaneously, so that lifting table 142 liftings.In addition, also can set up auxiliary supports 16,, reduce lifting table 142 repeatedly in the lifting process,, avoid automatic contraposition device 10 impaired the impulsive force of the lifting unit 1411 of detent 141 with supplemental support lifting table 142 at base station 11.This auxiliary supports 16 can be rubber-like supporting member or other telescopic supporting members, does not influence lifting table 142 liftings and is advisable to satisfy.In the present embodiment, base station 11 is fixed two auxiliary supports 16, to alleviate the pressure of 142 pairs of detent 141 of lifting table.
See also Fig. 2 to Fig. 4, so that 20 double-sided exposure contrapositions are example to circuit substrate, describe the use of the automatic contraposition device 10 that embodiment provided in detail, it may further comprise the steps:
The first step: circuit substrate 20, first photomask 30 and second photomask 40 are provided.
As shown in Figure 3, described circuit substrate 20 is the double-sided circuit substrate of dry film of fitting, and comprises the outer peripheral areas 22 of a plurality of wiring board units 21 and wiring board unit 21, and has the first dry film face 24 and the second dry film face 25.Zone that dotted line surrounds in these wiring board unit 21 correspondences and Fig. 3 circuit substrate 20.This first dry film face 24 and the second dry film face 25 are used for forming default line pattern in the accurate position of corresponding each wiring board unit 21 after exposure.Described outer peripheral areas 22 offers substrate registration holes 23, passes contraposition for the contraposition part 1423 of automatic contraposition device 10.This substrate registration holes 23 can be one or more.
Described first photomask 30 is offered substrate registration holes 23 corresponding first registration holes 31 with circuit substrate 20, passes contraposition for contraposition part 1423.Similarly, second photomask 40 is offered substrate registration holes 23 corresponding second registration holes 41 with circuit substrate 20, passes contraposition for contraposition part 1423.When contraposition part 1423 passes the first corresponding registration holes 31, substrate registration holes 23 and second registration holes 41, the circuit substrate 20 and first photomask 30 and second photomask 40 get final product accurate contraposition, behind the first dry film face 24 and 25 exposures of the second dry film face that satisfy circuit substrate 20, accurate position at corresponding each wiring board unit 21 forms default line pattern, forms required conducting wire in order to operations such as follow-up development and etchings at conductive layer.
Second step: the contraposition part 1423 of adjusting automatic contraposition device 10.
Position and axial length according to the registration holes separately of circuit substrate 20, first photomask 30 and second photomask 40, select suitable dimension and contraposition part 1423 highly, the contraposition part 1423 of adjusting jacking gear 14 from second plane 1422 of lifting table 142 to the height of plummer 12 direction extensions, and in the position on second plane 1422 of lifting table 142, corresponding with substrate registration holes 23, and fixedly contraposition part 1423 in lifting table 142.Start detents 1412 by control part 1413, lifting table 142 is risen, thereby make the contraposition part 1423 that is fixed in lifting table 142 pass the contraposition through hole 125 of plummer 12, and stretch out, as shown in Figure 2 by second surface 122.Because control part 1413 is a floor sheet controller in the present embodiment, detent 1412 is the pressure liftable device, therefore by stepping on the pedal of control part 1413, makes detent 1412 air-breathing, so that lifting table 142 rises.
The 3rd step: first photomask 30, circuit substrate 20 and second photomask 40 are positioned over plummer 12 successively carry out contraposition.
At first, place first photomask 30, first registration holes 31 that makes the contraposition part 1423 of automatic contraposition device 10 pass corresponding first photomask 30 in plummer 12.Secondly, with the first dry film face 24 of circuit substrate 20 towards first photomask 30, contraposition part 1423 passes corresponding substrate registration holes 23 on the circuit substrate 20, finish the contraposition of first photomask 30 and circuit substrate 20, and fit in first photomask 30 by the bonding agent that is coated on circuit substrate 20 outer peripheral areas 22, the first dry film face 24 and first photomask 30 are fitted tightly.Once more, place the second dry film face 25 of second photomask 40, make contraposition part 1423 pass corresponding second registration holes 41 on second photomask 40, finish the contraposition of second photomask 40 and first photomask 30 and circuit substrate 20 in circuit substrate 20.Fit by the bonding agent and second photomask 40 that are coated on circuit substrate 20 outer peripheral areas 22, so that the second dry film face 25 and second photomask 40 fit tightly.As shown in Figure 4, first photomask 30, circuit substrate 20 and second photomask 40 that obtains accurately contraposition thus and fit successively.
The 4th step: the circuit substrate 20, first photomask 30 and second photomask 40 that take off contraposition.
Utilize control part 1413, the detent 1412 control lifting tables 142 of jacking gear 14 are descended, and take off contraposition and fit all-in-one-piece first photomask 30, circuit substrate 20 and second photomask 40 from the plummer 12 of automatic contraposition device 10, can expose, subsequent operation such as development and etching.Detent 1412 is identical with starting, and in the present embodiment, by unclamping the pedal of control part 1413, makes detent 1412 venting of jacking gear 14, so that lifting table 142 descends.
Be understandable that, for the person of ordinary skill of the art, can make other various corresponding changes and distortion by technical conceive according to the present invention, and all these change the protection domain that all should belong to claim of the present invention with distortion.
Claims (11)
1. an automatic contraposition device is characterized in that, it comprises base station, plummer, support member and jacking gear; Described support member is fixed in base station, supports described plummer; Described plummer is used for placing treats that the contraposition object carries out contraposition, and is provided with at least one contraposition through hole; Described jacking gear comprises at least one detent and the lifting table that links to each other with described at least one detent, and described detent is fixed in base station, is used to control lifting table lifting repeatedly between base station and plummer; Described lifting table is provided with the contraposition part that matches with described at least one contraposition through hole, and the contraposition through hole that is used to pass described plummer matches with treating the corresponding registration holes of contraposition object, carries out contraposition.
2. automatic contraposition device as claimed in claim 1 is characterized in that described detent comprises lifting unit, detent and control part; Described lifting unit one end is located at detent, and the other end and lifting table are affixed, so that detent is by the lifting repeatedly between base station and plummer of lifting unit control lifting table; Described control part links to each other with detent, with the control brake device.
3. automatic contraposition device as claimed in claim 2 is characterized in that, described detent is the pressure liftable device, hydraulic lift, Motorized lift device or oil pressure jacking gear.
4. automatic contraposition device as claimed in claim 1, it is characterized in that described base station is offered first fixed orifice, described plummer is offered second fixed orifice with the coaxial setting of first fixed orifice, described support member one end is fixed in first fixed orifice, and the other end is fixed in second fixed orifice.
5. automatic contraposition device as claimed in claim 1 is characterized in that described lifting table is offered a plurality of threaded holes, and contraposition part one end correspondingly is provided with screw thread, by cooperating with nut, the contraposition part is fixed in lifting table.
6. automatic contraposition device as claimed in claim 5 is characterized in that, the quantity of described threaded hole equals the quantity of the contraposition through hole of plummer, is equal to or greater than the quantity of contraposition part.
7. automatic contraposition device as claimed in claim 1 is characterized in that, described contraposition through-hole diameter is 1.95mm～2.00mm, and the contraposition part diameter that matches with it is less than or equal to 1.95mm～2.00mm.
8. automatic contraposition device as claimed in claim 1 is characterized in that described lifting table is offered a plurality of sliding trays, and it is fixing that the contraposition part is slided in sliding tray, to regulate the position of contraposition part.
9. automatic contraposition device as claimed in claim 1 is characterized in that, described contraposition part length is equal to or greater than contraposition through hole and the corresponding axial length sum for the treatment of the registration holes of contraposition object with the corresponding plummer of contraposition part.
10. automatic contraposition device as claimed in claim 1 is characterized in that described automatic contraposition device further comprises auxiliary supports, and described auxiliary supports is fixed in base station, in order to alleviate the pressure of lifting table to the lifting unit of detent.
11. automatic contraposition device as claimed in claim 10 is characterized in that, described auxiliary supports is the telescopic supporting member of rubber-like.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2007102027668A CN101452228B (en) | 2007-11-29 | 2007-11-29 | Automatic aligner |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2007102027668A CN101452228B (en) | 2007-11-29 | 2007-11-29 | Automatic aligner |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101452228A CN101452228A (en) | 2009-06-10 |
| CN101452228B true CN101452228B (en) | 2010-11-17 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2007102027668A Expired - Fee Related CN101452228B (en) | 2007-11-29 | 2007-11-29 | Automatic aligner |
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| CN (1) | CN101452228B (en) |
Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103165503B (en) * | 2011-12-14 | 2016-09-28 | 上海微电子装备有限公司 | Warpage sheet frock, using method and handing-over sheet devices thereof |
| CN103205681B (en) * | 2012-01-16 | 2017-02-08 | 昆山允升吉光电科技有限公司 | Alignment auxiliary plate |
| CN103327744A (en) * | 2012-03-21 | 2013-09-25 | 深圳市万泰电路有限公司 | Production method for improving resistance welding counterpoint accuracy of circuit boards |
| CN103327743A (en) * | 2012-03-21 | 2013-09-25 | 深圳市万泰电路有限公司 | Para-position production method with accuracy within 2Mil for circuit board resistance welding windowing |
| CN102881623A (en) * | 2012-09-27 | 2013-01-16 | 上海宏力半导体制造有限公司 | Bearing platform |
| CN104211294B (en) * | 2014-08-20 | 2018-03-27 | 深圳市华星光电技术有限公司 | Glass substrate cuts bogey and diced system |
| CN106813815B (en) * | 2015-11-27 | 2019-03-01 | 苏州市亿利华电子有限公司 | A kind of pcb board contraposition automatic detection device |
| CN109605423A (en) * | 2019-01-30 | 2019-04-12 | 上海钛米机器人科技有限公司 | Lifting device and robot |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0298642A2 (en) * | 1987-07-06 | 1989-01-11 | AT&T Corp. | Method for aligning photomasks |
| CN2260386Y (en) * | 1995-11-16 | 1997-08-20 | 中国科学院高能物理研究所 | alignment device for semiconductor processing |
| JP2000089484A (en) * | 1998-09-14 | 2000-03-31 | Orc Mfg Co Ltd | Aligning mechanism for work and mask |
-
2007
- 2007-11-29 CN CN2007102027668A patent/CN101452228B/en not_active Expired - Fee Related
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0298642A2 (en) * | 1987-07-06 | 1989-01-11 | AT&T Corp. | Method for aligning photomasks |
| CN2260386Y (en) * | 1995-11-16 | 1997-08-20 | 中国科学院高能物理研究所 | alignment device for semiconductor processing |
| JP2000089484A (en) * | 1998-09-14 | 2000-03-31 | Orc Mfg Co Ltd | Aligning mechanism for work and mask |
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| Publication number | Publication date |
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| CN101452228A (en) | 2009-06-10 |
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Address after: 518103 Shenzhen Province, Baoan District Town, Fuyong Tong tail Industrial Zone, factory building, building 5, floor, 1 Co-patentee after: Zhending Technology Co., Ltd. Patentee after: Fuku Precision Components (Shenzhen) Co., Ltd. Address before: 518103 Shenzhen Province, Baoan District Town, Fuyong Tong tail Industrial Zone, factory building, building 5, floor, 1 Co-patentee before: Honsentech Co., Ltd. Patentee before: Fuku Precision Components (Shenzhen) Co., Ltd. |
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Granted publication date: 20101117 Termination date: 20151129 |