CA2924123C - Method of forming deposited patterns on a surface - Google Patents
Method of forming deposited patterns on a surface Download PDFInfo
- Publication number
- CA2924123C CA2924123C CA2924123A CA2924123A CA2924123C CA 2924123 C CA2924123 C CA 2924123C CA 2924123 A CA2924123 A CA 2924123A CA 2924123 A CA2924123 A CA 2924123A CA 2924123 C CA2924123 C CA 2924123C
- Authority
- CA
- Canada
- Prior art keywords
- release agent
- wafer
- cavities
- bottom portions
- top surface
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000000034 method Methods 0.000 title claims abstract description 29
- 239000003795 chemical substances by application Substances 0.000 claims abstract description 78
- 238000000576 coating method Methods 0.000 claims abstract description 39
- 239000000463 material Substances 0.000 claims abstract description 38
- 239000011248 coating agent Substances 0.000 claims abstract description 37
- 239000000758 substrate Substances 0.000 claims abstract description 16
- 239000011800 void material Substances 0.000 claims abstract description 12
- 230000003287 optical effect Effects 0.000 claims description 11
- 238000003491 array Methods 0.000 claims description 10
- 230000002093 peripheral effect Effects 0.000 claims description 7
- 239000006117 anti-reflective coating Substances 0.000 description 6
- 239000010410 layer Substances 0.000 description 6
- 238000005498 polishing Methods 0.000 description 5
- 238000004806 packaging method and process Methods 0.000 description 3
- 229920002120 photoresistant polymer Polymers 0.000 description 3
- 239000002904 solvent Substances 0.000 description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 239000010408 film Substances 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 206010001513 AIDS related complex Diseases 0.000 description 1
- 239000004372 Polyvinyl alcohol Substances 0.000 description 1
- 210000002945 adventitial reticular cell Anatomy 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 230000003749 cleanliness Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000010438 granite Substances 0.000 description 1
- 238000007654 immersion Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000002052 molecular layer Substances 0.000 description 1
- 238000012858 packaging process Methods 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 229920002451 polyvinyl alcohol Polymers 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 229910000679 solder Inorganic materials 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/02—Details
- H01L31/0216—Coatings
- H01L31/02161—Coatings for devices characterised by at least one potential jump barrier or surface barrier
- H01L31/02167—Coatings for devices characterised by at least one potential jump barrier or surface barrier for solar cells
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
- B81C1/00349—Creating layers of material on a substrate
- B81C1/00373—Selective deposition, e.g. printing or microcontact printing
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/02—Details
- H01L31/0203—Containers; Encapsulations, e.g. encapsulation of photodiodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/02—Details
- H01L31/0232—Optical elements or arrangements associated with the device
- H01L31/02327—Optical elements or arrangements associated with the device the optical elements being integrated or being directly associated to the device, e.g. back reflectors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/02—Details
- H01L31/0236—Special surface textures
- H01L31/02366—Special surface textures of the substrate or of a layer on the substrate, e.g. textured ITO/glass substrate or superstrate, textured polymer layer on glass substrate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C2201/00—Manufacture or treatment of microstructural devices or systems
- B81C2201/01—Manufacture or treatment of microstructural devices or systems in or on a substrate
- B81C2201/0174—Manufacture or treatment of microstructural devices or systems in or on a substrate for making multi-layered devices, film deposition or growing
- B81C2201/0183—Selective deposition
- B81C2201/0188—Selective deposition techniques not provided for in B81C2201/0184 - B81C2201/0187
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Electromagnetism (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Manufacturing & Machinery (AREA)
- Life Sciences & Earth Sciences (AREA)
- Sustainable Development (AREA)
- Sustainable Energy (AREA)
- Solid State Image Pick-Up Elements (AREA)
- Micromachines (AREA)
- Surface Treatment Of Optical Elements (AREA)
- Physical Vapour Deposition (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Photometry And Measurement Of Optical Pulse Characteristics (AREA)
Abstract
A method for forming a coating of material on selected portions of a surface of a substrate having a plurality of cavities (11) includes: providing a structure (16) having a release agent (18) thereon; contacting a top surface (17) of the wafer (10) with the release agent to transfer portions of the release agent to the top surface of the wafer while bottom portions of the cavities remain spaced from the release agent to produce an intermediate structure (24); the release agent disposed on the top surface of the wafer and with the bottom portions of the cavities void of the release agent; exposing the intermediate structure to the material (27) to blanket coat the material on both the release agent and the bottom portions of the cavities; and selectively removing the release agent together with the coating material while leaving the coating material on the bottom portions of the cavities.
Description
METHOD OF FORMING DEPOSITED PATTERNS ON A SURFACE
TECHNICAL FIELD
[0001] This disclosure relates generally to methods for forming deposited patterns on a surface and more particularly, the methods for forming anti-reflection coatings on selected areas of an optical window wafer used in wafer level packaging of optical elements.
BACKGROUND
TECHNICAL FIELD
[0001] This disclosure relates generally to methods for forming deposited patterns on a surface and more particularly, the methods for forming anti-reflection coatings on selected areas of an optical window wafer used in wafer level packaging of optical elements.
BACKGROUND
[0002] As is known in the art, it is frequently required to forming anti-reflection coatings on selected areas of an optical window wafer used in wafer level packaging of optical elements. In one application, for example, wafer level packaging of Infrared (IR) bolometers, an optical window wafer (sometimes referred to as a cap wafer) has a plurality of cavities or recesses formed in a surface thereof, each recess being formed to provide a cavity (with vertically extending walls) associated with (spaced from and disposed over) a corresponding one of a plurality of IR detector (e.g., bolometers) arrays formed in a second, underlying wafer bonded to the cap wafer. In addition to the recesses, the cap wafer also includes a patterned anti-reflective coating (ARC), thin film getters, if required, and bond structures.
[0003] As is also known in the art, coating a window cap wafer with an anti-reflection coating for wafer level packaged IR bolometer detectors is currently done by coating the optical window through a shadow mask or by coating the whole surface (top surface and cavity surface) and polishing off the upper surface. A photolithographic resist lift-off method may also be used, but expensive capital equipment is required. The shadow mask adds the cost of the mask (often only good for a single use) and alignment tooling. Polishing requires precision polishing equipment and skilled operators. Both require cleaning to a higher level than is typical in the optics industry. Thus, patterning an anti-reflective coating on a surface can be difficult with traditional methods, which are 1.
Shadow mask (limited by alignment tolerance, edge sharpness). 2. Photolithographic lift-off (ARCs are typically too thick for easy photoresist lift-off, and require capital equipment. Lift-off is an undesirable messy process in the semiconductor industry). 3. If over topology where recessed surface is to be coated and upper surface to be removed, polish off of upper surface may be used (requires precision optical polishing equipment). All of these have problematic issues when applied to the semiconductor world, particularly with cleanliness and particle control.
Shadow mask (limited by alignment tolerance, edge sharpness). 2. Photolithographic lift-off (ARCs are typically too thick for easy photoresist lift-off, and require capital equipment. Lift-off is an undesirable messy process in the semiconductor industry). 3. If over topology where recessed surface is to be coated and upper surface to be removed, polish off of upper surface may be used (requires precision optical polishing equipment). All of these have problematic issues when applied to the semiconductor world, particularly with cleanliness and particle control.
[0004] The basic wafer level packaging process may be summarized as: Etch cavities in cap wafer; Deposit an ARC on the bottom of the cavity, Metallize a seal ring pattern on the top surface of the cap wafer surrounding the cavity; Deposit getter material on another portion of the top surface, if required; Apply solder to seal ring area; Bond to IR detector device wafer; and Saw into individual detector arrays.
SUMMARY
SUMMARY
[0005] In accordance with the present disclosure, a method is provided for forming a coating of material on selected portions of a substrate having a plurality of cavities formed in selected portions of a surface of the substrate, each cavity having outer, peripheral sidewalls extending outwardly from a floor of the cavity. The method includes:
providing a structure having a release agent thereon; contacting top surfaces of the sidewalls with the portions of the contacted release agent being transferred to the top surfaces of the substrate while bottom portions of the cavities remain spaced from the release agent to produce an intermediate structure surface comprising: the release agent disposed on the top surfaces of the substrate and with the bottom portions of the cavities void of the release agent; exposing the surface of the intermediate structure to the material to blanket coat the material on both the release agent disposed on the top surface of the substrate and the bottom portions of the cavities; and exposing the intermediate structure having the coated release agent and the bottom portions to a process to selectively remove the release agent together with the coating material thereon from the top surface of the substrate while leaving the coating material on the bottom portions of the cavities.
providing a structure having a release agent thereon; contacting top surfaces of the sidewalls with the portions of the contacted release agent being transferred to the top surfaces of the substrate while bottom portions of the cavities remain spaced from the release agent to produce an intermediate structure surface comprising: the release agent disposed on the top surfaces of the substrate and with the bottom portions of the cavities void of the release agent; exposing the surface of the intermediate structure to the material to blanket coat the material on both the release agent disposed on the top surface of the substrate and the bottom portions of the cavities; and exposing the intermediate structure having the coated release agent and the bottom portions to a process to selectively remove the release agent together with the coating material thereon from the top surface of the substrate while leaving the coating material on the bottom portions of the cavities.
[0006] In one embodiment, a method is provided for forming an anti-reflection coating on selected portions of an optical energy transparent wafer having a plurality of cavities formed in selected portions of a surface of the wafer, each cavity having outer, peripheral sidewalls extending outwardly from the floor of the cavity. The method includes:
providing a structure having a release agent thereon; contacting top surface of the wafer with a portion of the release agent to transfer the release agent to the top surfaces of the wafer while bottom portions of the cavities remain spaced from the release agent to produce an intermediate structure surface comprising: the release agent disposed on the top surface of the wafer and with the bottom portions of the cavities void of the release agent; exposing the surface of the intermediate structure to an anti-reflection coating material to blanket coat the anti-reflection material on both the release agent disposed on the top surface and the bottom portions of the cavities; and exposing the intermediate structure having both the release agent disposed on the top surface of the wafer and the bottom portions of the cavities void of the release agent to a process to selectively remove the release agent together with the anti-reflection coating material thereon while leaving the anti-reflection coating material on the bottom portions of the cavities.
providing a structure having a release agent thereon; contacting top surface of the wafer with a portion of the release agent to transfer the release agent to the top surfaces of the wafer while bottom portions of the cavities remain spaced from the release agent to produce an intermediate structure surface comprising: the release agent disposed on the top surface of the wafer and with the bottom portions of the cavities void of the release agent; exposing the surface of the intermediate structure to an anti-reflection coating material to blanket coat the anti-reflection material on both the release agent disposed on the top surface and the bottom portions of the cavities; and exposing the intermediate structure having both the release agent disposed on the top surface of the wafer and the bottom portions of the cavities void of the release agent to a process to selectively remove the release agent together with the anti-reflection coating material thereon while leaving the anti-reflection coating material on the bottom portions of the cavities.
[0007] In one embodiment, the method includes: providing a second wafer having a plurality of arrays for detectors, each one of the arrays being associated with a corresponding one of the cavities; aligning each one of the array with the corresponding one of the cavities; and bonding the optically transparent wafer to the second wafer, with each one on the cavities having the anti-refection coating thereon displaced from the corresponding array and a second portion of the top surface being bonded to the second wafer.
[0008] With such method, a thin water or solvent soluble layer (the release agent) is applied only to the exposed surface by controlled contact transfer prior to depositing an AR film or coating. The ARC film portions of the release layer are then easily removed when the release layer is removed in water or solvent in an ultrasonic cleaner. If the release agent is only a monolayer or so thick, the ARC adhesion is weakened by this layer, and is easily removed in an ultrasonic cleaner. The method removes the need for a shadow mask, polishing equipment, and capital equipment for these and any traditional alternative, such as a photoresist sprayer, UV exposure and development, and liftoff equipment. The equipment savings for high volume production could be several million dollars.
[0009] The details of one or more embodiments of the disclosure are set forth in the accompanying drawings and the description below. Other features, objects, and advantages of the disclosure will be apparent from the description and drawings, and from the claims.
DESCRIPTION OF DRAWINGS
DESCRIPTION OF DRAWINGS
[0010] FIGS. 1A-1E are simplified cross sectional diagrams of a process for forming an anti-reflection coating on selected portions of an optical energy transparent wafer according to the disclosure.
[0011] Like reference symbols in the various drawings indicate like elements.
DETAILED DESCRIPTION
DETAILED DESCRIPTION
[0012] Referring now to FIG. 1A, a portion of an optically transparent window wafer 10 (a cap wafer), here for example, silicon, is shown. The inside surface of the wafer 10 is formed with a plurality of cavities 11 formed in selected portions of the inside surface, each cavity 11 having outer, peripheral sidewalls 13 extending outwardly from the inner surface, as indicated. The sidewalls 13 have top surfaces 17, as indicated.
The outside surface 12 of the wafer 10 is temporarily attached to a vacuum chuck 14. A
second structure 16, with a very flat surface, here for example, a polished granite surface plate, or another silicon wafer, is coated with a release agent 18, as shown. Here, for example, the release agent 18 is polyvinyl alcohol, or other suitable material, having a thickness of one molecular layer to many layers, up to a fraction of a millimeter thick. The top surface 17 of the wafer is contacted momentarily with a portion of the release agent 18 to transfer portions of the release agent 18 to the top surface 17 of the wafer while bottom portions 20 of the cavities 11 remain spaced from the release agent 18 to produce an intermediate structure 24 (FIG. 1B) having a surface comprising: the release agent 18 disposed on the top surface 17 of the wafer and with the bottom portions 20 of the cavities 11 void of the release agent 18.
The outside surface 12 of the wafer 10 is temporarily attached to a vacuum chuck 14. A
second structure 16, with a very flat surface, here for example, a polished granite surface plate, or another silicon wafer, is coated with a release agent 18, as shown. Here, for example, the release agent 18 is polyvinyl alcohol, or other suitable material, having a thickness of one molecular layer to many layers, up to a fraction of a millimeter thick. The top surface 17 of the wafer is contacted momentarily with a portion of the release agent 18 to transfer portions of the release agent 18 to the top surface 17 of the wafer while bottom portions 20 of the cavities 11 remain spaced from the release agent 18 to produce an intermediate structure 24 (FIG. 1B) having a surface comprising: the release agent 18 disposed on the top surface 17 of the wafer and with the bottom portions 20 of the cavities 11 void of the release agent 18.
[0013] Referring now to FIG. 1C, the intermediate structure 24 is exposed to an anti-reflection coating material 27 to blanket coat the anti-reflection material 27 on both the release agent 18 disposed on the top surface 17 of the wafer and the bottom portions 20 of the cavities 11 to produce the structure 24', as shown in FIG. 1C.
[0014] Referring now to FIG. 1D, the structure 24' (FIG. 1C) having both the release agent 18 disposed on the top surface 17 of the wafer and the bottom portions 20 of the cavities 11 void of the release agent 18 to a process, here for example, immersion in water (or a solvent, for example if the release agent is a photoresist layer) to selectively remove the release agent 18 together with the anti-reflection coating material 27 thereon while leaving the anti-reflection coating material 27 on the bottom portions 20 of the cavities 11, as shown in the upper portion of FIG. 1D.
[0015] Here the wafer 10 is wafer bonded to a second wafer 32 (shown in the bottom portion of FIG. 1D) having plurality of bolometers 34 connected to readout circuitry in wafer 32that comprise wafer level package (WLP) detector devices 36, each one of detector devices 36 being associated with a corresponding one of the cavities 11. Each one of the detector devices 36 is aligned with the corresponding one of the cavities 11. Thus, as shown in FIG. 1E, the optically transparent wafer 10 is bonded to the second wafer 32, with each one on the cavities 11 having the anti-reflection coating 24 on the bottom portion of the cavities 11 displaced from the corresponding array 34 and a second portion of the distal ends 17 of the walls (top surface) being bonded to the second wafer 32. The bonded wafer pair (wafer 10 and wafer 32) as shown in FIG. lE are then singulated into individual completed WLP detector devices.
[0016] It should now be appreciated a method for forming a coating of material on selected portions of a substrate having a plurality of cavities formed in selected portions of a surface of the substrate, each cavity having outer, peripheral sidewalls extending outwardly from the cavity floor, includes: providing a structure having a release agent thereon; contacting a top surface of the wafer with the release agent to transfer portions of the release agent to the top surface of the wafer while bottom portions of the cavities remain spaced from the release agent to produce an intermediate structure with a surface comprising: the release agent disposed on the top surface of the wafer and with the bottom portions of the cavities void of the release agent; exposing the surface of the intermediate structure to the material to blanket coat the material on both the release agent disposed on the top surface of the wafer and the bottom portions of the cavities; exposing the intermediate structure having the coated release agent and the bottom portions to a process to selectively remove the release agent together with the coating material thereon from the top surface of the wafer while leaving the coating material on the bottom portions of the cavities.
[0017] It should now also be appreciated a method for forming an anti-reflection coating on selected portions of an optical energy transparent wafer having a plurality of cavities formed in selected portions of a surface of the wafer, each cavity having outer, peripheral sidewalls extending outwardly from the surface (cavity floor), includes:
providing a structure having a release agent thereon; contacting top surface of the wafer with a portion of the release agent to transfer the release agent to the top surface of the wafer while bottom portions of the cavities remain spaced from the release agent to produce an intermediate structure with a surface comprising: the release agent disposed on the top surfaces of the wafer and with the bottom portions of the cavities void of the release agent;
exposing the surface of the intermediate structure to an anti-reflection coating material to blanket coat the anti-reflection material on both the release agent disposed on the top surface of the wafer and the bottom portions of the cavities; exposing the intermediate structure having both the release agent disposed on the top surface of the wafer and the bottom portions of the cavities void of the release agent to a process to selectively remove the release agent together with the anti-reflection coating material thereon while leaving the anti-reflection coating material on the bottom portions of the cavities.
The method may also include: providing a second wafer having a plurality of arrays for detectors, each one of the arrays being associated with a corresponding one of the cavities; aligning each one of the arrays with the corresponding one of the cavities; and bonding the optically transparent wafer to the second wafer, with each one of the cavities having the anti-reflection coating thereon displaced from the corresponding array and a second portion of the top surfaces of the wafer being bonded to the second wafer.
providing a structure having a release agent thereon; contacting top surface of the wafer with a portion of the release agent to transfer the release agent to the top surface of the wafer while bottom portions of the cavities remain spaced from the release agent to produce an intermediate structure with a surface comprising: the release agent disposed on the top surfaces of the wafer and with the bottom portions of the cavities void of the release agent;
exposing the surface of the intermediate structure to an anti-reflection coating material to blanket coat the anti-reflection material on both the release agent disposed on the top surface of the wafer and the bottom portions of the cavities; exposing the intermediate structure having both the release agent disposed on the top surface of the wafer and the bottom portions of the cavities void of the release agent to a process to selectively remove the release agent together with the anti-reflection coating material thereon while leaving the anti-reflection coating material on the bottom portions of the cavities.
The method may also include: providing a second wafer having a plurality of arrays for detectors, each one of the arrays being associated with a corresponding one of the cavities; aligning each one of the arrays with the corresponding one of the cavities; and bonding the optically transparent wafer to the second wafer, with each one of the cavities having the anti-reflection coating thereon displaced from the corresponding array and a second portion of the top surfaces of the wafer being bonded to the second wafer.
[0018] A number of embodiments of the disclosure have been described.
Nevertheless, it will be understood that various modifications may be made without departing from the spirit and scope of the disclosure. Accordingly, other embodiments are within the scope of the following claims.
Nevertheless, it will be understood that various modifications may be made without departing from the spirit and scope of the disclosure. Accordingly, other embodiments are within the scope of the following claims.
Claims (3)
1 . A method for forming a coating of a material on selected portions of a substrate having a plurality of cavities formed in selected portions of a surface of the substrate, each cavity having outer, peripheral sidewalls extending outwardly from the cavity floor, comprising:
providing a structure having a release agent thereon;
contacting a top surface of the substrate with the release agent to transfer portions of the release agent to the top surface of the substrate while bottom portions of the cavities remain spaced from the release agent to produce an intermediate structure with a surface comprising: the release agent disposed on the top surface of the substrate and with the bottom portions of the cavities void of the release agent;
exposing the surface of the intermediate structure to the material to blanket coat the material on both the release agent disposed on the top surface of the substrate and the bottom portions of the cavities;
exposing the intermediate structure having the coated release agent and the bottom portions to a process to selectively remove the release agent together with the coating material thereon from the top surface of the substrate while leaving the coating material on the bottom portions of the cavities.
providing a structure having a release agent thereon;
contacting a top surface of the substrate with the release agent to transfer portions of the release agent to the top surface of the substrate while bottom portions of the cavities remain spaced from the release agent to produce an intermediate structure with a surface comprising: the release agent disposed on the top surface of the substrate and with the bottom portions of the cavities void of the release agent;
exposing the surface of the intermediate structure to the material to blanket coat the material on both the release agent disposed on the top surface of the substrate and the bottom portions of the cavities;
exposing the intermediate structure having the coated release agent and the bottom portions to a process to selectively remove the release agent together with the coating material thereon from the top surface of the substrate while leaving the coating material on the bottom portions of the cavities.
2. A method for forming an anti-reflection coating on selected portions of an optical energy transparent wafer having a plurality of cavities formed in selected portions of a surface of the wafer, each cavity having outer, peripheral sidewalls extending outwardly from the surface (cavity floor), comprising:
providing a structure having a release agent thereon;
contacting top surface of the wafer with a portion of the release agent to transfer the release agent to the top surface of the wafer while bottom portions of the cavities remain spaced from the release agent to produce an intermediate structure with a surface comprising: the release agent disposed on the top surfaces of the wafer and with the bottom portions of the cavities void of the release agent;
exposing the surface of the intermediate structure to an anti-reflection coating material to blanket coat the anti-reflection material on both the release agent disposed on the top surface of the wafer and the bottom portions of the cavities;
exposing the intermediate structure having both the release agent disposed on the top surface of the wafer and the bottom portions of the cavities void of the release agent to a process to selectively remove the release agent together with the anti-reflection coating material thereon while leaving the anti-reflection coating material on the bottom portions of the cavities.
providing a structure having a release agent thereon;
contacting top surface of the wafer with a portion of the release agent to transfer the release agent to the top surface of the wafer while bottom portions of the cavities remain spaced from the release agent to produce an intermediate structure with a surface comprising: the release agent disposed on the top surfaces of the wafer and with the bottom portions of the cavities void of the release agent;
exposing the surface of the intermediate structure to an anti-reflection coating material to blanket coat the anti-reflection material on both the release agent disposed on the top surface of the wafer and the bottom portions of the cavities;
exposing the intermediate structure having both the release agent disposed on the top surface of the wafer and the bottom portions of the cavities void of the release agent to a process to selectively remove the release agent together with the anti-reflection coating material thereon while leaving the anti-reflection coating material on the bottom portions of the cavities.
3. The method recited in claim 2 including:
providing a second wafer having a plurality of arrays for detectors, each one of the arrays being associated with a corresponding one of the cavities;
aligning each one of the arrays with the corresponding one of the cavities;
bonding the optically transparent wafer to the second wafer, with each one of the cavities having the anti-reflection coating thereon displaced from the corresponding array and a second portion of the top surfaces of the wafer being bonded to the second wafer.
providing a second wafer having a plurality of arrays for detectors, each one of the arrays being associated with a corresponding one of the cavities;
aligning each one of the arrays with the corresponding one of the cavities;
bonding the optically transparent wafer to the second wafer, with each one of the cavities having the anti-reflection coating thereon displaced from the corresponding array and a second portion of the top surfaces of the wafer being bonded to the second wafer.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US14/100,048 | 2013-12-09 | ||
| US14/100,048 US9105800B2 (en) | 2013-12-09 | 2013-12-09 | Method of forming deposited patterns on a surface |
| PCT/US2014/067285 WO2015088771A1 (en) | 2013-12-09 | 2014-11-25 | Method of forming deposited patterns on a surface |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CA2924123A1 CA2924123A1 (en) | 2015-06-18 |
| CA2924123C true CA2924123C (en) | 2018-02-27 |
Family
ID=52302306
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CA2924123A Active CA2924123C (en) | 2013-12-09 | 2014-11-25 | Method of forming deposited patterns on a surface |
Country Status (8)
| Country | Link |
|---|---|
| US (1) | US9105800B2 (en) |
| EP (1) | EP3041784B1 (en) |
| JP (1) | JP6532465B2 (en) |
| KR (1) | KR102047869B1 (en) |
| CN (1) | CN105612119B (en) |
| CA (1) | CA2924123C (en) |
| IL (1) | IL244513B (en) |
| WO (1) | WO2015088771A1 (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9570321B1 (en) | 2015-10-20 | 2017-02-14 | Raytheon Company | Use of an external getter to reduce package pressure |
| FR3088319B1 (en) * | 2018-11-08 | 2020-10-30 | Ulis | HERMETIC CASE INCLUDING A GETTER, OPTOELECTRONIC COMPONENT OR MEMS DEVICE INTEGRATING SUCH A HERMETIC CASE AND ASSOCIATED MANUFACTURING PROCESS |
| CN114210970B (en) * | 2021-12-28 | 2023-09-22 | 北京建工环境修复股份有限公司 | Coated iron-carbon composite material, preparation method, modification method and sewage treatment method |
Family Cites Families (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3161474B2 (en) * | 1991-06-20 | 2001-04-25 | 凸版印刷株式会社 | Phase shift mask and method of manufacturing the same |
| US6252229B1 (en) | 1998-07-10 | 2001-06-26 | Boeing North American, Inc. | Sealed-cavity microstructure and microbolometer and associated fabrication methods |
| CA2485022A1 (en) * | 2002-04-15 | 2003-10-23 | Schott Ag | Method for connecting substrates and composite element |
| FR2846906B1 (en) * | 2002-11-08 | 2005-08-05 | Commissariat Energie Atomique | METHOD FOR PRODUCING A COMPONENT COMPRISING A MICRO-SEAL AND COMPONENT PRODUCED THEREBY |
| KR100885099B1 (en) * | 2003-12-15 | 2009-02-20 | 후루카와 덴키 고교 가부시키가이샤 | Wafer processing tape and method of producing the same |
| US7381583B1 (en) | 2004-05-24 | 2008-06-03 | The United States Of America As Represented By The Secretary Of The Air Force | MEMS RF switch integrated process |
| JP2009130110A (en) | 2007-11-22 | 2009-06-11 | Sumitomo Electric Ind Ltd | Group-iii nitride surface light-emitting element and its manufacturing method |
| US20110014732A1 (en) * | 2009-07-20 | 2011-01-20 | Lee Je-Hsiang | Light-emitting module fabrication method |
| US8696740B2 (en) * | 2010-01-05 | 2014-04-15 | The Johns Hopkins University | Implantable pressure-actuated drug delivery systems and methods of manufacture and use |
| JP2011192868A (en) * | 2010-03-16 | 2011-09-29 | Tokyo Electron Ltd | Method of processing template, program, computer storage medium, and template processing device |
| EP2484629B1 (en) | 2011-02-03 | 2013-06-26 | Nivarox-FAR S.A. | Perforated complex micromechanical part |
| JP5929203B2 (en) | 2012-01-10 | 2016-06-01 | 株式会社リコー | Lens-integrated substrate and optical sensor |
-
2013
- 2013-12-09 US US14/100,048 patent/US9105800B2/en active Active
-
2014
- 2014-11-25 JP JP2016535704A patent/JP6532465B2/en active Active
- 2014-11-25 EP EP14824962.6A patent/EP3041784B1/en active Active
- 2014-11-25 CA CA2924123A patent/CA2924123C/en active Active
- 2014-11-25 WO PCT/US2014/067285 patent/WO2015088771A1/en active Application Filing
- 2014-11-25 KR KR1020167013973A patent/KR102047869B1/en active IP Right Grant
- 2014-11-25 CN CN201480055529.1A patent/CN105612119B/en not_active Expired - Fee Related
-
2016
- 2016-03-09 IL IL24451316A patent/IL244513B/en active IP Right Grant
Also Published As
| Publication number | Publication date |
|---|---|
| CN105612119B (en) | 2018-03-02 |
| JP2017502328A (en) | 2017-01-19 |
| KR102047869B1 (en) | 2019-11-22 |
| CN105612119A (en) | 2016-05-25 |
| US20150162479A1 (en) | 2015-06-11 |
| JP6532465B2 (en) | 2019-06-19 |
| IL244513A0 (en) | 2016-04-21 |
| EP3041784B1 (en) | 2020-02-19 |
| EP3041784A1 (en) | 2016-07-13 |
| KR20160079028A (en) | 2016-07-05 |
| IL244513B (en) | 2019-10-31 |
| US9105800B2 (en) | 2015-08-11 |
| CA2924123A1 (en) | 2015-06-18 |
| WO2015088771A1 (en) | 2015-06-18 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| KR102164880B1 (en) | Integrated bondline spacers for wafer level packaged circuit devices | |
| US9263292B2 (en) | Processing for overcoming extreme topography | |
| US8846499B2 (en) | Composite carrier structure | |
| KR100968160B1 (en) | Optical element and method of manufacturing optical element | |
| CN103107157B (en) | Wafer encapsulation body and forming method thereof | |
| US20130341747A1 (en) | Chip package and method for forming the same | |
| CA2924123C (en) | Method of forming deposited patterns on a surface | |
| KR20130130834A (en) | Method and system for wafer level singulation | |
| CN103229029B (en) | Method for producing spectroscopic sensor | |
| CN112397541B (en) | Method for manufacturing back-illuminated image sensor | |
| JP2015207638A (en) | Photoelectric conversion element and method for manufacturing the same | |
| KR102270457B1 (en) | Wafer dicing method for improving die packaging quality | |
| US20060237810A1 (en) | Bonding interface for micro-device packaging | |
| TWI697034B (en) | Water soluble mask formation by dry film lamination | |
| CN108511473B (en) | Interconnection process for metal layers between wafers | |
| US6995915B2 (en) | Manufacturing method of micro-lens, manufacturing method of solid-state image pickup device and solid-state image pickup device | |
| TWI533369B (en) | Method for fabricating semiconductor device | |
| JPH03297167A (en) | Microlens | |
| La Grappe et al. | A novel integration scheme for wafer singulation and selective processing using temporary dry film resist | |
| KR102360936B1 (en) | Method of manufacturing an optical structure | |
| TWI287830B (en) | Method for preventing pollution of opaque material on the back of glass substrate | |
| CN1992204A (en) | CMOS image sensor and method for manufacturing the same |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EEER | Examination request |
Effective date: 20160310 |