CA2366971A1 - Capteur de vibration a fibre optique base sur la modulation de frequence d'oscillateurs excites par la lumiere - Google Patents
Capteur de vibration a fibre optique base sur la modulation de frequence d'oscillateurs excites par la lumiere Download PDFInfo
- Publication number
- CA2366971A1 CA2366971A1 CA002366971A CA2366971A CA2366971A1 CA 2366971 A1 CA2366971 A1 CA 2366971A1 CA 002366971 A CA002366971 A CA 002366971A CA 2366971 A CA2366971 A CA 2366971A CA 2366971 A1 CA2366971 A1 CA 2366971A1
- Authority
- CA
- Canada
- Prior art keywords
- frequency modulated
- oscillator
- light
- frequency
- vibration
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Abandoned
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/097—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by vibratory elements
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
- G01P2015/0822—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
- G01P2015/0825—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass
- G01P2015/0828—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass the mass being of the paddle type being suspended at one of its longitudinal ends
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
Abstract
L'invention concerne un capteur destiné à détecter les vibrations. Ce capteur comprend une source lumineuse servant à émettre une lumière laser, une première fibre optique connectée à la source pour émettre la lumière laser, un oscillateur capable de recevoir la lumière laser émise et de réfléchir la lumière comme une lumière à fréquence modulée; une seconde fibre optique placée de manière à capter la lumière à fréquence modulée afin d'émettre ladite lumière; et un détecteur de fréquence modulée destiné à recevoir la lumière à fréquence modulée depuis la seconde fibre optique et à émettre un signal en réponse à la vibration de l'oscillateur. Dans un meilleur mode de réalisation, le détecteur de fréquence modulée comprend aussi un fréquencemètre servant à déterminer la moyenne de cycles par unité de temps afin d'émettre un second signal en réponse à la température de l'oscillateur. Les fibres optiques peuvent former un ensemble de différentes fibres disposées de manière à émettre la lumière laser et la lumière à fréquence modulée. Elles peuvent aussi être constituées d'une même fibre capable d'émettre à la fois la lumière laser et la lumière à fréquence modulée. Le meilleur oscillateur comprend une puce munie d'un microfaisceau montée sur un fin porte-à-faux en silicium de manière à ce que la déviation du faisceau perpendiculairement à la surface de la puce modifie la tension dans le microfaisceau et change sa fréquence de résonnance. Dans un autre mode de réalisation, le microfaisceau comprend une fine couche métallique afin de créer une structure dimorphe.
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US09/281,388 US6246638B1 (en) | 1999-03-30 | 1999-03-30 | Fiber-optic vibration sensor based on frequency modulation of light-excited oscillators |
US09/281,388 | 1999-03-30 | ||
PCT/US2000/004495 WO2000058737A1 (fr) | 1999-03-30 | 2000-02-22 | Capteur de vibration a fibre optique base sur la modulation de frequence d'oscillateurs excites par la lumiere |
Publications (1)
Publication Number | Publication Date |
---|---|
CA2366971A1 true CA2366971A1 (fr) | 2000-10-05 |
Family
ID=23077089
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CA002366971A Abandoned CA2366971A1 (fr) | 1999-03-30 | 2000-02-22 | Capteur de vibration a fibre optique base sur la modulation de frequence d'oscillateurs excites par la lumiere |
Country Status (5)
Country | Link |
---|---|
US (2) | US6246638B1 (fr) |
EP (1) | EP1166128A1 (fr) |
JP (1) | JP2002540430A (fr) |
CA (1) | CA2366971A1 (fr) |
WO (1) | WO2000058737A1 (fr) |
Families Citing this family (44)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6246638B1 (en) * | 1999-03-30 | 2001-06-12 | Honeywell International Inc. | Fiber-optic vibration sensor based on frequency modulation of light-excited oscillators |
US6341259B1 (en) * | 1999-06-04 | 2002-01-22 | Interscience, Inc. | Microsystems integrated testing and characterization system and method |
US7073384B1 (en) * | 1999-08-23 | 2006-07-11 | Stevens Institute Of Technology | Method and apparatus for remote measurement of vibration and properties of objects |
US7157649B2 (en) * | 1999-12-23 | 2007-01-02 | New Transducers Limited | Contact sensitive device |
GB0116310D0 (en) * | 2001-07-04 | 2001-08-29 | New Transducers Ltd | Contact sensitive device |
US6894787B2 (en) * | 2001-12-21 | 2005-05-17 | Honeywell International Inc. | Optical pressure sensor |
US6871149B2 (en) * | 2002-12-06 | 2005-03-22 | New Transducers Limited | Contact sensitive device |
US6873752B2 (en) * | 2003-08-08 | 2005-03-29 | Siemens Westinghouse Power Corporation | Tuneable fiber optic sensor |
TWI233097B (en) * | 2003-09-04 | 2005-05-21 | Lite On It Corp | Device capable of detecting vibration/shock |
WO2006034377A2 (fr) * | 2004-09-22 | 2006-03-30 | The Board Of Trustees Of The University Of Illinois | Microactionneur alimente par la lumiere, distributeur de microfluide et prothese retinienne |
US7605391B2 (en) * | 2004-12-12 | 2009-10-20 | Burns David W | Optically coupled resonator |
US7443509B1 (en) | 2004-12-12 | 2008-10-28 | Burns David W | Optical and electronic interface for optically coupled resonators |
US7499604B1 (en) | 2004-12-12 | 2009-03-03 | Burns David W | Optically coupled resonant pressure sensor and process |
US7176048B1 (en) | 2004-12-12 | 2007-02-13 | Burns David W | Optically coupled sealed-cavity resonator and process |
US7379629B1 (en) | 2004-12-12 | 2008-05-27 | Burns David W | Optically coupled resonant pressure sensor |
KR100755691B1 (ko) * | 2005-06-28 | 2007-09-05 | 삼성전자주식회사 | 이동 노드의 핸드오버 수행 방법 및 이를 위한 네트워크 시스템 |
US8094841B2 (en) * | 2007-01-17 | 2012-01-10 | The Regents Of The University Of California | Apparatus and method using capacitive detection with inherent self-calibration |
US20090062913A1 (en) * | 2007-08-30 | 2009-03-05 | Laxminarayana Saggere | Light powered microactuator, microfluidic dispenser and retinal prosthesis |
US7589329B1 (en) | 2008-04-23 | 2009-09-15 | Honeywell International Inc. | Systems and methods for remote optical sensing |
US8076737B2 (en) * | 2008-05-20 | 2011-12-13 | Honeywell International Inc. | Systems and methods for acoustic sensing |
CN101893475B (zh) * | 2010-03-11 | 2015-11-25 | 上海华魏光纤传感技术有限公司 | 一种基于光纤延时线的分布式光纤振动传感系统 |
US8899115B2 (en) * | 2011-04-20 | 2014-12-02 | United Technologies Corporation | Method and system for locating a laser vibrometer during non-contact scanning |
US9226792B2 (en) | 2012-06-12 | 2016-01-05 | Medtronic Advanced Energy Llc | Debridement device and method |
US9844408B2 (en) | 2012-11-30 | 2017-12-19 | Gyrus Acmi, Inc. | Replacable debrider blade module with latching mechanism |
US9358036B2 (en) | 2013-03-12 | 2016-06-07 | Gyrus Acmi, Inc. | Blade positioning device |
US9404735B2 (en) | 2013-03-15 | 2016-08-02 | United Technologies Corporation | Multiple laser time of arrival probe |
US9599504B2 (en) | 2013-07-30 | 2017-03-21 | Raytheon Company | Fiber optic vibration detection |
US10107839B1 (en) * | 2014-06-12 | 2018-10-23 | Fiber Optic Sensor Systems Technology Corporation | Fiber optic sensor system for detection of electric currents and other phenomena associated with geomagnetic disturbances |
RU2654973C1 (ru) * | 2014-07-17 | 2018-05-23 | Шлюмберже Текнолоджи Б.В. | Оптоволоконный датчик для скважинных сейсмических исследований |
US9387050B2 (en) | 2014-09-15 | 2016-07-12 | Gyrus Acmi Inc. | Surgical system having detachable component and state detection circuit for detection of state of attachment of detachable component |
AU2016219980B2 (en) | 2015-02-18 | 2020-09-03 | Medtronic Xomed, Inc. | RF energy enabled tissue debridement device |
US10188456B2 (en) | 2015-02-18 | 2019-01-29 | Medtronic Xomed, Inc. | Electrode assembly for RF energy enabled tissue debridement device |
US10376302B2 (en) | 2015-02-18 | 2019-08-13 | Medtronic Xomed, Inc. | Rotating electrical connector for RF energy enabled tissue debridement device |
US9820825B2 (en) | 2015-02-20 | 2017-11-21 | Gyrus Acmi Inc. | Surgical system having plurality of detachably attachable components and circuit for detecting target states of detachably attachable components and performing control based on detected target states, and method for providing surgical system |
EP3647795B1 (fr) * | 2018-11-02 | 2021-07-14 | General Electric Company | Accéléromètre mems avec revêtements antiréfléchissants et réfléchissants |
US11119116B2 (en) | 2019-04-01 | 2021-09-14 | Honeywell International Inc. | Accelerometer for determining an acceleration based on modulated optical signals |
US11079227B2 (en) | 2019-04-01 | 2021-08-03 | Honeywell International Inc. | Accelerometer system enclosing gas |
US10705112B1 (en) | 2019-04-22 | 2020-07-07 | Honeywell International Inc. | Noise rejection for optomechanical devices |
US10956768B2 (en) | 2019-04-22 | 2021-03-23 | Honeywell International Inc. | Feedback cooling and detection for optomechanical devices |
US11408911B2 (en) | 2019-07-17 | 2022-08-09 | Honeywell International Inc. | Optomechanical structure with corrugated edge |
US11119114B2 (en) | 2019-07-17 | 2021-09-14 | Honeywell International Inc. | Anchor structure for securing optomechanical structure |
US11150264B2 (en) | 2019-08-13 | 2021-10-19 | Honeywell International Inc. | Feedthrough rejection for optomechanical devices using elements |
US11408912B2 (en) | 2019-08-13 | 2022-08-09 | Honeywell International Inc. | Feedthrough rejection for optomechanical devices |
US11372019B2 (en) | 2019-08-13 | 2022-06-28 | Honeywell International Inc. | Optomechanical resonator stabilization for optomechanical devices |
Family Cites Families (20)
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SE414672B (sv) | 1978-11-16 | 1980-08-11 | Asea Ab | Fiberoptiskt don for metning av fysikaliska storheter sasom kraft, tojning, tryck, acceleration och temperatur |
US4446543A (en) * | 1979-07-02 | 1984-05-01 | The United States Of America As Represented By The Secretary Of The Navy | Optical resonator single-mode fiber hydrophone |
US4743752A (en) * | 1984-05-07 | 1988-05-10 | The Foxboro Company | Fiber optic remote sensor |
GB8530809D0 (en) * | 1985-12-13 | 1986-01-22 | Gen Electric Co Plc | Sensor |
US4892406A (en) * | 1988-01-11 | 1990-01-09 | United Technologies Corporation | Method of and arrangement for measuring vibrations |
US4928527A (en) * | 1988-04-29 | 1990-05-29 | At&T Bell Laboratories | Method and device for nondestructive evaluation |
US4972076A (en) * | 1988-09-29 | 1990-11-20 | Schlumberger Industries Limited | Solid state sensor with dual resonant vibratable members |
GB9105799D0 (en) | 1991-03-19 | 1991-06-12 | Lucas Ind Plc | Vibrating sensor |
FR2680574B1 (fr) * | 1991-08-23 | 1996-04-12 | Schlumberger Ind Sa | Microcapteur a poutre vibrante compense en temperature. |
WO1994011708A1 (fr) * | 1992-11-06 | 1994-05-26 | Martin Marietta Corporation | Systeme de lecture d'un detecteur optique interferometrique |
US5379639A (en) | 1992-12-10 | 1995-01-10 | Alliedsignal Inc. | Combined force transducer and temperature sensor |
US5396798A (en) | 1993-04-15 | 1995-03-14 | Honeywell Inc. | Mechanical resonance, silicon accelerometer |
US5559358A (en) | 1993-05-25 | 1996-09-24 | Honeywell Inc. | Opto-electro-mechanical device or filter, process for making, and sensors made therefrom |
US5581930A (en) | 1993-07-13 | 1996-12-10 | Langer; Alexander G. | Remote activity sensing system |
US5589937A (en) | 1994-10-31 | 1996-12-31 | The United States Of America As Represented By The Secretary Of The Navy | Fiber optic self-multiplexing amplified ring transducer and force transfer sensor with pressure compensation |
DE19514852C2 (de) * | 1995-04-26 | 1997-07-03 | Deutsche Forsch Luft Raumfahrt | Verfahren und Anordnung zur Beschleunigungs- und Vibrationsmessung |
US5808210A (en) | 1996-12-31 | 1998-09-15 | Honeywell Inc. | Thin film resonant microbeam absolute pressure sensor |
US5917226A (en) | 1997-10-24 | 1999-06-29 | Stmicroelectronics, Inc. | Integrated released beam, thermo-mechanical sensor for sensing temperature variations and associated methods |
US6031944A (en) * | 1997-12-30 | 2000-02-29 | Honeywell Inc. | High temperature resonant integrated microstructure sensor |
US6246638B1 (en) * | 1999-03-30 | 2001-06-12 | Honeywell International Inc. | Fiber-optic vibration sensor based on frequency modulation of light-excited oscillators |
-
1999
- 1999-03-30 US US09/281,388 patent/US6246638B1/en not_active Expired - Fee Related
-
2000
- 2000-02-22 CA CA002366971A patent/CA2366971A1/fr not_active Abandoned
- 2000-02-22 WO PCT/US2000/004495 patent/WO2000058737A1/fr active Application Filing
- 2000-02-22 EP EP00915830A patent/EP1166128A1/fr not_active Withdrawn
- 2000-02-22 JP JP2000608184A patent/JP2002540430A/ja not_active Withdrawn
- 2000-10-25 US US09/695,584 patent/US6763723B1/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
JP2002540430A (ja) | 2002-11-26 |
WO2000058737A1 (fr) | 2000-10-05 |
US6246638B1 (en) | 2001-06-12 |
US6763723B1 (en) | 2004-07-20 |
EP1166128A1 (fr) | 2002-01-02 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
FZDE | Discontinued |