AU2075699A - Method and apparatus for detecting wafer - Google Patents

Method and apparatus for detecting wafer

Info

Publication number
AU2075699A
AU2075699A AU20756/99A AU2075699A AU2075699A AU 2075699 A AU2075699 A AU 2075699A AU 20756/99 A AU20756/99 A AU 20756/99A AU 2075699 A AU2075699 A AU 2075699A AU 2075699 A AU2075699 A AU 2075699A
Authority
AU
Australia
Prior art keywords
detecting wafer
wafer
detecting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU20756/99A
Inventor
Ken Hattori
Kiyoaki Kumazaki
Souichi Ueta
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nikon Corp
Original Assignee
Nikon Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP10014582A external-priority patent/JPH11214484A/en
Application filed by Nikon Corp filed Critical Nikon Corp
Publication of AU2075699A publication Critical patent/AU2075699A/en
Abandoned legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67242—Apparatus for monitoring, sorting or marking
    • H01L21/67259—Position monitoring, e.g. misposition detection or presence detection
    • H01L21/67265—Position monitoring, e.g. misposition detection or presence detection of substrates stored in a container, a magazine, a carrier, a boat or the like

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
AU20756/99A 1998-01-27 1999-01-27 Method and apparatus for detecting wafer Abandoned AU2075699A (en)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
JP10-14582 1998-01-27
JP10014582A JPH11214484A (en) 1998-01-27 1998-01-27 Substrate detector
JP10-160586 1998-06-09
JP16058698 1998-06-09
PCT/JP1999/000322 WO1999038207A1 (en) 1998-01-27 1999-01-27 Method and apparatus for detecting wafer

Publications (1)

Publication Number Publication Date
AU2075699A true AU2075699A (en) 1999-08-09

Family

ID=26350548

Family Applications (1)

Application Number Title Priority Date Filing Date
AU20756/99A Abandoned AU2075699A (en) 1998-01-27 1999-01-27 Method and apparatus for detecting wafer

Country Status (2)

Country Link
AU (1) AU2075699A (en)
WO (1) WO1999038207A1 (en)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4750161B2 (en) * 2008-08-12 2011-08-17 株式会社コンタクト Hoop cleaning equipment
KR20120103565A (en) * 2009-11-17 2012-09-19 신포니아 테크놀로지 가부시끼가이샤 Wafer detecting apparatus
JP5901978B2 (en) * 2011-04-11 2016-04-13 株式会社日立国際電気 Substrate processing apparatus, substrate processing apparatus control program, and semiconductor device manufacturing method
JP7195080B2 (en) * 2018-07-31 2022-12-23 日本電産サンキョー株式会社 Conveyor system
JP7389695B2 (en) * 2020-03-27 2023-11-30 株式会社日立ハイテク Wafer transfer device
KR102563297B1 (en) * 2021-04-12 2023-08-03 주식회사 유진테크 Substrate transfer device and substrate processing apparatus having the same

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04345049A (en) * 1991-05-22 1992-12-01 Mitsubishi Electric Corp Wafer arrangement pattern detection equipment and its detection method
ES2229247T3 (en) * 1995-03-28 2005-04-16 Brooks Automation Gmbh CHARGING AND DISCHARGE STATION FOR SEMICONDUCTOR TREATMENT FACILITIES.
DE19535871C2 (en) * 1995-09-27 2000-02-10 Jenoptik Jena Gmbh Indexer for magazine compartments of a magazine and disc-shaped objects contained therein

Also Published As

Publication number Publication date
WO1999038207A1 (en) 1999-07-29

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Legal Events

Date Code Title Description
MK6 Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase