AU2001271389A1 - Optical system - Google Patents

Optical system

Info

Publication number
AU2001271389A1
AU2001271389A1 AU2001271389A AU7138901A AU2001271389A1 AU 2001271389 A1 AU2001271389 A1 AU 2001271389A1 AU 2001271389 A AU2001271389 A AU 2001271389A AU 7138901 A AU7138901 A AU 7138901A AU 2001271389 A1 AU2001271389 A1 AU 2001271389A1
Authority
AU
Australia
Prior art keywords
optical system
optical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2001271389A
Inventor
John C. Bowman
Pamela R. Lipson
Peter E. Schmidt
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Teradyne Inc
Original Assignee
Teradyne Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Teradyne Inc filed Critical Teradyne Inc
Publication of AU2001271389A1 publication Critical patent/AU2001271389A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8806—Specially adapted optical and illumination features
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956—Inspecting patterns on the surface of objects
    • G01N21/95684—Patterns showing highly reflecting parts, e.g. metallic elements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8806—Specially adapted optical and illumination features
    • G01N2021/8812—Diffuse illumination, e.g. "sky"
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8806—Specially adapted optical and illumination features
    • G01N2021/8812—Diffuse illumination, e.g. "sky"
    • G01N2021/8816—Diffuse illumination, e.g. "sky" by using multiple sources, e.g. LEDs
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8806—Specially adapted optical and illumination features
    • G01N2021/8822—Dark field detection
    • G01N2021/8825—Separate detection of dark field and bright field
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8806—Specially adapted optical and illumination features
    • G01N2021/8838—Stroboscopic illumination; synchronised illumination
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8806—Specially adapted optical and illumination features
    • G01N2021/8845—Multiple wavelengths of illumination or detection
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956—Inspecting patterns on the surface of objects
    • G01N2021/95638—Inspecting patterns on the surface of objects for PCB's
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956—Inspecting patterns on the surface of objects
    • G01N2021/95638—Inspecting patterns on the surface of objects for PCB's
    • G01N2021/95661—Inspecting patterns on the surface of objects for PCB's for leads, e.g. position, curvature
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956—Inspecting patterns on the surface of objects
    • G01N2021/95638—Inspecting patterns on the surface of objects for PCB's
    • G01N2021/95661—Inspecting patterns on the surface of objects for PCB's for leads, e.g. position, curvature
    • G01N2021/95669—Inspecting patterns on the surface of objects for PCB's for leads, e.g. position, curvature for solder coating, coverage
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2201/00—Features of devices classified in G01N21/00
    • G01N2201/06—Illumination; Optics
    • G01N2201/062—LED's

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Spectrometry And Color Measurement (AREA)
AU2001271389A 2000-06-28 2001-06-22 Optical system Abandoned AU2001271389A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US09605613 2000-06-28
US09/605,613 US6552783B1 (en) 2000-06-28 2000-06-28 Optical system
PCT/US2001/019987 WO2002001193A2 (en) 2000-06-28 2001-06-22 Optical system

Publications (1)

Publication Number Publication Date
AU2001271389A1 true AU2001271389A1 (en) 2002-01-08

Family

ID=24424442

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2001271389A Abandoned AU2001271389A1 (en) 2000-06-28 2001-06-22 Optical system

Country Status (8)

Country Link
US (1) US6552783B1 (en)
EP (1) EP1297326A2 (en)
JP (1) JP2004502166A (en)
KR (1) KR20030015297A (en)
CN (1) CN1434919A (en)
AU (1) AU2001271389A1 (en)
TW (1) TW552413B (en)
WO (1) WO2002001193A2 (en)

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IL132817A (en) * 1999-11-08 2003-11-23 Orbotech Schuh Gmbh & Co Illumination and image acquisition system
US20030123055A1 (en) * 2001-12-31 2003-07-03 Stephen Jaeschke Image digitizer having single optical path
DE10234084B4 (en) * 2002-07-26 2006-06-14 Koenig & Bauer Ag Device for inspection of sheet material
DE10239548A1 (en) 2002-08-23 2004-03-04 Leica Microsystems Semiconductor Gmbh Device and method for inspecting an object
WO2004023072A1 (en) * 2002-09-05 2004-03-18 Solvision, Inc. Shadow-free 3d and 2d measurement system and method
EP1400802A1 (en) * 2002-09-23 2004-03-24 Ford Global Technologies, Inc. Method and arrangement for detecting and evaluating surface irregularities
US6781687B2 (en) * 2002-09-26 2004-08-24 Orbotech Ltd. Illumination and image acquisition system
KR20040034003A (en) * 2002-10-16 2004-04-28 주식회사 고영테크놀러지 Inspecting apparatus of protection circuit module
TWI298097B (en) * 2003-01-09 2008-06-21 Orbotech Ltd Method and apparatus for simultaneous 2-d and topographical inspection
JP4166585B2 (en) * 2003-01-20 2008-10-15 株式会社サキコーポレーション Appearance inspection apparatus and appearance inspection method
JP4166587B2 (en) * 2003-01-24 2008-10-15 株式会社サキコーポレーション Appearance inspection apparatus and volume inspection method
US7019826B2 (en) * 2003-03-20 2006-03-28 Agilent Technologies, Inc. Optical inspection system, apparatus and method for reconstructing three-dimensional images for printed circuit board and electronics manufacturing inspection
DE102005033061A1 (en) * 2005-07-15 2007-01-25 Asentics Gmbh & Co. Kg Method and device for testing a hollow fiber bundle
US7372556B2 (en) * 2005-10-31 2008-05-13 The Boeing Company Apparatus and methods for inspecting a composite structure for inconsistencies
US7978970B2 (en) * 2006-09-29 2011-07-12 Microscan Systems, Inc. Systems and/or devices for providing diffuse light
US8374498B2 (en) 2006-09-29 2013-02-12 Microscan Systems, Inc. Systems and/or devices for camera-based inspections
US8032017B2 (en) * 2006-09-29 2011-10-04 Microscan Systems, Inc. Methods for providing diffuse light
JP5132982B2 (en) * 2007-05-02 2013-01-30 株式会社日立ハイテクノロジーズ Pattern defect inspection apparatus and method
US7877003B2 (en) * 2007-06-20 2011-01-25 Microscan Systems, Inc. Devices, systems, and methods regarding images
US7698098B2 (en) * 2008-02-18 2010-04-13 Thermo Electron Scientific Instruments Llc Efficient spectral matching, particularly for multicomponent spectra
TWI382176B (en) * 2008-02-19 2013-01-11 Utechzone Co Ltd Optical detection device
JP5362368B2 (en) * 2009-01-09 2013-12-11 株式会社日立情報通信エンジニアリング Appearance inspection apparatus and appearance inspection method
US8000594B2 (en) * 2009-07-02 2011-08-16 Microscan Systems, Inc. Diffuse reflective illuminator
US9091725B2 (en) * 2009-07-03 2015-07-28 Koh Young Technology Inc. Board inspection apparatus and method
US8768159B2 (en) 2009-07-10 2014-07-01 Microscan Systems, Inc. Combination dark field and bright field illuminator
US8107808B2 (en) * 2009-07-10 2012-01-31 Microscan Systems, Inc. Combination dark field and bright field illuminator
ES2670333T3 (en) * 2009-11-14 2018-05-30 Vmt Vision Machine Technic Bildverarbeitungssysteme Gmbh Procedure for detecting the front edge surfaces of hollow fibers and procedure for detecting the interior spaces of hollow, unobstructed fibers of a bundle of hollow fibers
US9212900B2 (en) * 2012-08-11 2015-12-15 Seagate Technology Llc Surface features characterization
US20140076956A1 (en) * 2012-09-20 2014-03-20 Tyco Electronics Corporation Soldering machine and method of soldering
TWI504886B (en) * 2013-12-26 2015-10-21 Machvision Inc Inspection method of crack defects and heterochromatic of printed circuit board and inspection apparatus of the same
JP6280429B2 (en) * 2014-04-21 2018-02-14 キヤノン株式会社 Color measuring apparatus and method
TWI495867B (en) * 2014-07-22 2015-08-11 Machvision Inc Application of repeated exposure to multiple exposure image blending detection method
CN104897693A (en) * 2015-06-12 2015-09-09 武汉中导光电设备有限公司 Glass surface defect enhancement device and detection method thereof
CN106680298A (en) * 2016-12-16 2017-05-17 南京协辰电子科技有限公司 Printed circuit board (PCB) detection device and PCB detection method
KR102084563B1 (en) 2017-01-03 2020-03-04 주식회사 엘지화학 Welding Method Capable of Improving Welding-Reliability through Accurate Definition about Welding Portion of Electrode Tabs
CN108333187A (en) * 2018-04-10 2018-07-27 湖南科创信息技术股份有限公司 Plate-shaped material two sides otherness vision identification system
CN108896559A (en) * 2018-06-29 2018-11-27 佛山市坦斯盯科技有限公司 A kind of AOI light source
CN108896560A (en) * 2018-06-29 2018-11-27 佛山市坦斯盯科技有限公司 A kind of AOI light source complete machine
CN109142375A (en) * 2018-08-20 2019-01-04 宁波市智能制造产业研究院 A kind of high accuracy vision detection system and method for target
WO2020241598A1 (en) * 2019-05-28 2020-12-03 京セラ株式会社 Spectrum determination device, spectrum determination method, spectrum determination program, illumination system, illumination device, and inspection device
CN110108720A (en) * 2019-05-30 2019-08-09 苏州精濑光电有限公司 Optical detection apparatus
CN110687134B (en) * 2019-09-29 2021-03-16 武汉大学 Online detection device and method in production of banded FPC
CN111256826B (en) * 2020-05-01 2020-08-04 武汉精立电子技术有限公司 Display screen chrominance measuring method and device and terminal equipment
TWI764179B (en) * 2020-06-19 2022-05-11 財團法人紡織產業綜合研究所 Textile detecting system and textile detecting method
CN114184138B (en) * 2020-08-24 2024-06-04 深圳中科飞测科技股份有限公司 Detection device and detection method

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Also Published As

Publication number Publication date
US6552783B1 (en) 2003-04-22
KR20030015297A (en) 2003-02-20
JP2004502166A (en) 2004-01-22
TW552413B (en) 2003-09-11
EP1297326A2 (en) 2003-04-02
WO2002001193A2 (en) 2002-01-03
CN1434919A (en) 2003-08-06
WO2002001193A3 (en) 2002-06-27

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