ATE88435T1 - WAFER TRANSFER DEVICE. - Google Patents

WAFER TRANSFER DEVICE.

Info

Publication number: ATE88435T1
Authority: AT; Austria
Prior art keywords: transfer device; wafer transfer; wafer; transfer
Prior art date: 1982-05-24

Application number

AT83902069T

Other languages

German (de)

Inventor

Richard F Foulke

Steven M Lord

Original Assignee

Proconics Int

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1982-05-24

Filing date

1983-05-18

Publication date

1993-05-15

1982-05-24 Priority claimed from US06/381,292 external-priority patent/US4493606A/en

1983-05-18 Application filed by Proconics Int filed Critical Proconics Int

1993-05-15 Application granted granted Critical

1993-05-15 Publication of ATE88435T1 publication Critical patent/ATE88435T1/en

Links

AT83902069T 1982-05-24 1983-05-18 WAFER TRANSFER DEVICE. ATE88435T1 (en)

Applications Claiming Priority (3)

Application Number	Priority Date	Filing Date	Title
US06/381,292 US4493606A (en)	1982-05-24	1982-05-24	Wafer transfer apparatus
PCT/US1983/000783 WO1983004240A1 (en)	1982-05-24	1983-05-18	Wafer transfer apparatus
EP83902069A EP0108807B1 (en)	1982-05-24	1983-05-18	Wafer transfer apparatus

Publications (1)

Publication Number	Publication Date
ATE88435T1 true ATE88435T1 (en)	1993-05-15

Family

ID=27226707

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
AT83902069T ATE88435T1 (en)	1982-05-24	1983-05-18	WAFER TRANSFER DEVICE.

Country Status (1)

Country	Link
AT (1)	ATE88435T1 (en)

1983
- 1983-05-18 AT AT83902069T patent/ATE88435T1/en not_active IP Right Cessation

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Legal Events

Date	Code	Title	Description
1993-10-15	RER	Ceased as to paragraph 5 lit. 3 law introducing patent treaties