ATE256874T1 - Optischer wellenleiter mit mehrschichtigem kern und verfahren zu seiner herstellung - Google Patents

Optischer wellenleiter mit mehrschichtigem kern und verfahren zu seiner herstellung

Info

Publication number
ATE256874T1
ATE256874T1 AT00964465T AT00964465T ATE256874T1 AT E256874 T1 ATE256874 T1 AT E256874T1 AT 00964465 T AT00964465 T AT 00964465T AT 00964465 T AT00964465 T AT 00964465T AT E256874 T1 ATE256874 T1 AT E256874T1
Authority
AT
Austria
Prior art keywords
core
layer
optical waveguide
core optical
producing same
Prior art date
Application number
AT00964465T
Other languages
English (en)
Inventor
James Ronald Bonar
Richard Ian Laming
Original Assignee
Alcatel Optronics Uk Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Alcatel Optronics Uk Ltd filed Critical Alcatel Optronics Uk Ltd
Application granted granted Critical
Publication of ATE256874T1 publication Critical patent/ATE256874T1/de

Links

Classifications

    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/122Basic optical elements, e.g. light-guiding paths
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/13Integrated optical circuits characterised by the manufacturing method
    • G02B6/132Integrated optical circuits characterised by the manufacturing method by deposition of thin films
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12166Manufacturing methods
    • G02B2006/12176Etching

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Optical Integrated Circuits (AREA)
AT00964465T 1999-10-07 2000-10-09 Optischer wellenleiter mit mehrschichtigem kern und verfahren zu seiner herstellung ATE256874T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GB9923598A GB2355079A (en) 1999-10-07 1999-10-07 Multi-core waveguide
PCT/GB2000/003766 WO2001025827A2 (en) 1999-10-07 2000-10-09 Optical waveguide with a multi-layer core and method of fabrication thereof

Publications (1)

Publication Number Publication Date
ATE256874T1 true ATE256874T1 (de) 2004-01-15

Family

ID=10862201

Family Applications (1)

Application Number Title Priority Date Filing Date
AT00964465T ATE256874T1 (de) 1999-10-07 2000-10-09 Optischer wellenleiter mit mehrschichtigem kern und verfahren zu seiner herstellung

Country Status (9)

Country Link
US (1) US6718109B1 (de)
EP (1) EP1218782B1 (de)
JP (1) JP2003511714A (de)
CN (1) CN1178077C (de)
AT (1) ATE256874T1 (de)
AU (1) AU7539900A (de)
DE (1) DE60007341D1 (de)
GB (1) GB2355079A (de)
WO (1) WO2001025827A2 (de)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2355079A (en) 1999-10-07 2001-04-11 Kymata Ltd Multi-core waveguide
GB2407394A (en) * 2003-10-23 2005-04-27 Dow Corning Ltd Optical waveguide with two differently dimensioned waveguiding layers on substrate
KR100679229B1 (ko) * 2004-12-09 2007-02-05 한국전자통신연구원 평면형 광도파로 및 그의 제조 방법
WO2008018155A1 (fr) * 2006-08-10 2008-02-14 The Furukawa Electric Co., Ltd. Fibre optique
CN101859001B (zh) * 2010-06-08 2012-06-27 浙江大学 基于硼锗共掺上包层的二氧化硅光波导器件及制备方法
AT512498B1 (de) * 2012-06-06 2013-09-15 Joanneum Res Forschungsgmbh Opto-chemischer Sensor
US9325140B2 (en) * 2013-03-14 2016-04-26 Massachusetts Institute Of Technology Photonic devices and methods of using and making photonic devices
CN108427159B (zh) * 2018-05-16 2020-04-14 德州尧鼎光电科技有限公司 一种深紫外平面光波导
CN108646345B (zh) * 2018-05-16 2020-04-14 德州尧鼎光电科技有限公司 一种深紫外平面光波导制作方法

Family Cites Families (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4425146A (en) 1979-12-17 1984-01-10 Nippon Telegraph & Telephone Public Corporation Method of making glass waveguide for optical circuit
JP2553583B2 (ja) * 1987-09-02 1996-11-13 三菱電機株式会社 光集積回路用折曲り導波路
EP0308602A3 (de) 1987-09-25 1990-01-10 Siemens Aktiengesellschaft Vergrabener doppelbrechender optischer Wellenleiter oder Struktur aus solchen Wellenleitern sowie Verfahren zur Herstellung eines solchen Wellenleiters oder einer solchen Struktur
FR2625333B1 (fr) 1987-12-24 1993-09-10 Commissariat Energie Atomique Procede de fabrication de microguides de lumiere a faibles pertes de propagation optique par depot de multicouches
JP2585332B2 (ja) 1987-12-25 1997-02-26 株式会社日立製作所 導波路型光デバイス
JP2755471B2 (ja) 1990-06-29 1998-05-20 日立電線株式会社 希土類元素添加光導波路及びその製造方法
JPH05100123A (ja) 1991-10-11 1993-04-23 Fujitsu Ltd 光導波路の製造方法
US5299276A (en) 1991-10-11 1994-03-29 Fujitsu Limited Waveguide type optical device and method for manufacturing the same
JP2682919B2 (ja) 1991-11-07 1997-11-26 富士通株式会社 光導波路及びその製造方法
JPH05188231A (ja) 1992-01-13 1993-07-30 Sumitomo Electric Ind Ltd 光導波路の製造方法
GB9202463D0 (en) 1992-02-05 1992-03-18 British Telecomm Silica waveguide structure
US5319727A (en) 1992-12-28 1994-06-07 Honeywell Inc. Ion-beam deposited, gain enhanced ring resonators
US5416884A (en) * 1993-05-25 1995-05-16 Sharp Kabushiki Kaisha Semiconductor waveguide structure of a II-VI group compound
JPH07318734A (ja) 1994-05-27 1995-12-08 Hitachi Cable Ltd 石英系ガラス導波路及びその製造方法
JPH11508699A (ja) 1995-06-28 1999-07-27 アクゾ ノーベル ナムローゼ フェンノートシャップ 少なくとも5層の光デバイス
JP3425734B2 (ja) 1995-07-10 2003-07-14 日本電信電話株式会社 光導波路の製造方法
US5563979A (en) * 1995-08-31 1996-10-08 Lucent Technologies Inc. Erbium-doped planar optical device
US5703989A (en) 1995-12-29 1997-12-30 Lucent Technologies Inc. Single-mode waveguide structure for optoelectronic integrated circuits and method of making same
GB2312525A (en) 1996-04-24 1997-10-29 Northern Telecom Ltd Providing cladding on planar optical waveguide by heating to flow
US6003222A (en) 1997-07-10 1999-12-21 Lucent Technologies Inc. Manufacture of tapered waveguides
GB2355078A (en) 1999-10-07 2001-04-11 Kymata Ltd Waveguide with composite cladding layer
GB2355079A (en) 1999-10-07 2001-04-11 Kymata Ltd Multi-core waveguide

Also Published As

Publication number Publication date
WO2001025827A2 (en) 2001-04-12
EP1218782B1 (de) 2003-12-17
EP1218782A2 (de) 2002-07-03
US6718109B1 (en) 2004-04-06
WO2001025827A3 (en) 2001-08-16
JP2003511714A (ja) 2003-03-25
DE60007341D1 (de) 2004-01-29
GB9923598D0 (en) 1999-12-08
CN1178077C (zh) 2004-12-01
CN1384923A (zh) 2002-12-11
GB2355079A (en) 2001-04-11
AU7539900A (en) 2001-05-10

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Legal Events

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