From Qiskit Metal to pattern generation to real nanofabrication demo. Here, quantum devices on a chip are patterned via direct-write electron-beam lithography in a nanofabrication facility. Written & patterned by Onri Jay Benally, an Indigenous American quantum hardware engineer.

Lithography Equipment Emulator

Generate ASCII Job files for an ASML PAS 5500 Stepper Lithography system, by the UCSB Nanofabrication Facility.

Maskless photolithography system targeting 5um resolution. Open hardware design.

Differentiable Computational Lithogrpahy Framework

MATLAB tools for Raith electron-beam lithography (EBL) and focused ion beam (FIB) systems — Outils MATLAB pour les systèmes Raith de lithographie par faisceau d'électrons et de faisceau d'ions focalisés

Lithography defect prediction for microchip manufacturing optimization with machine learning model

A C# library for reading, editing, and writing Calma GDSII files.

We use MixedWM38, the mixed-type wafer defect pattern dataset for wafer defect pattern regcognition with visual transformers.

Desktop app for lithography learning available for Windows, macOS, and Linux

MCSC - A semiconductor manufacturing mod for Minecraft (Java)

A model that can be plugged into a bigger model by T. Verduin. This model is able to simulate e-beam lithography, and this particular model implements the effect of bondbreaking in PMMA (plastic). This model has been done as part of the Bachelor thesis of Mels Habold for at ImPhys at Delft University of Technology in 2019.

GDSHelpers is an open-source package for automatized pattern generation for nano-structuring.

Github repository to share some insights about lithography simulation.

MATLAB tools for Raith electron-beam lithography (EBL) and focused ion beam (FIB) systems — Outils MATLAB pour les systèmes Raith de lithographie par faisceau d'électrons et de faisceau d'ions focalisés

EE6601 Advanced Wafer Processing

Software for controlling the temperature of a self-heating AFM cantilever

Vector graphics based nanolithography tool for Asylum Research AFMs

Matlab GUI for manually tracing outlines of images