Conformal deposition and gap-filling of copper into ultranarrow patterns by supercritical fluid deposition

T Momose, M Sugiyama, E Kondoh… - Applied physics …, 2008 - iopscience.iop.org
Supercritical fluid deposition (SCFD) of Cu onto ultranarrow vias (50 to 220 nmφ and 1 µm
depth) was studied with using angled polishing for future ultralarge scale integration …
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Conformal Deposition and Gap-Filling of Copper into Ultranarrow Patterns by Supercritical Fluid Deposition

T Momose, M Sugiyama, E Kondoh… - Applied Physics …, 2008 - ui.adsabs.harvard.edu
Supercritical fluid deposition (SCFD) of Cu onto ultranarrow vias (50 to 220 nmφ and 1 µm
depth) was studied with using angled polishing for future ultralarge scale integration …
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[CITATION][C] Conformal deposition and gap-filling of copper into ultranarrow patterns by supercritical fluid deposition

T Momose, M Sugiyama, E Kondoh - Applied physics express: APEX, 2008 - cir.nii.ac.jp
Conformal deposition and gap-filling of copper into ultranarrow patterns by supercritical fluid
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[CITATION][C] Conformal Deposition and Gap-Filling of Copper into Ultranarrow Patterns by Supercritical Fluid Deposition

T Momose, M Sugiyama, E Kondoh… - Applied Physics …, 2008 - cir.nii.ac.jp
Conformal Deposition and Gap-Filling of Copper into Ultranarrow Patterns by Supercritical
Fluid Deposition | CiNii Research CiNii 国立情報学研究所 学術情報ナビゲータ[サイニィ] 詳細へ …
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[CITATION][C] Conformal Deposition and Gap-Filling of Copper into Ultranarrow Patterns by Supercritical Fluid Deposition

T MOMOSE, M SUGIYAMA… - Applied …, 2008 - Japan Society of Applied Physics
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