Korte et al., 2004 - Google Patents
Three-dimensional nanostructuring with femtosecond laser pulsesKorte et al., 2004
View PDF- Document ID
- 17690811031772540209
- Author
- Korte F
- Koch J
- Serbin J
- Ovsianikov A
- Chichkov B
- Publication year
- Publication venue
- IEEE transactions on nanotechnology
External Links
Snippet
The development of simple laser-based technologies for the fabrication of complicated three- dimensional (3-D) microstructures with a structure size down to 100 nm is reported. These technologies are based on nonlinear multiphoton laser-matter interaction processes …
- 239000000463 material 0 abstract description 22
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