Yang et al., 2015 - Google Patents

Probing contact-mode characteristics of silicon nanowire electromechanical systems with embedded piezoresistive transducers

Yang et al., 2015

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Document ID
14920116800553918084
Author
Yang R
He T
Tupta M
Marcoux C
Andreucci P
Duraffourg L
Feng P
Publication year
Publication venue
Journal of Micromechanics and Microengineering

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Snippet

This article reports on a new method of monitoring nanoscale contacts in switches based on nanoelectromechanical systems, where the contact-mode switching characteristics can be recorded with the sensitive embedded piezoresistive (PZR) strain transducers. The devices …
Continue reading at iopscience.iop.org (PDF) (other versions)

Classifications

    • HELECTRICITY
    • H01BASIC ELECTRIC ELEMENTS
    • H01HELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H59/00Electrostatic relays; Electro-adhesion relays
    • H01H59/0009Electrostatic relays; Electro-adhesion relays making use of micromechanics

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