Yang et al., 2015 - Google Patents
Probing contact-mode characteristics of silicon nanowire electromechanical systems with embedded piezoresistive transducersYang et al., 2015
View PDF- Document ID
- 14920116800553918084
- Author
- Yang R
- He T
- Tupta M
- Marcoux C
- Andreucci P
- Duraffourg L
- Feng P
- Publication year
- Publication venue
- Journal of Micromechanics and Microengineering
External Links
Snippet
This article reports on a new method of monitoring nanoscale contacts in switches based on nanoelectromechanical systems, where the contact-mode switching characteristics can be recorded with the sensitive embedded piezoresistive (PZR) strain transducers. The devices …
- 239000002070 nanowire 0 title abstract description 23
Classifications
-
- H—ELECTRICITY
- H01—BASIC ELECTRIC ELEMENTS
- H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
- H01H59/00—Electrostatic relays; Electro-adhesion relays
- H01H59/0009—Electrostatic relays; Electro-adhesion relays making use of micromechanics
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