Ionescu, 2012 - Google Patents
Nanoelectromechanical Systems (NEMS)Ionescu, 2012
- Document ID
- 14537587454624725383
- Author
- Ionescu A
- Publication year
- Publication venue
- MEMS-based Circuits and Systems for Wireless Communication
External Links
Snippet
This chapter focuses on NEM devices and their technologies and applications for information processing with special emphasis on NEM switches and resonators. Top-down and bottom-up fabrication of NEMS are presented. Then NEM switches for ultralow-standby …
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANO-TECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANO-STRUCTURES; MEASUREMENT OR ANALYSIS OF NANO-STRUCTURES; MANUFACTURE OR TREATMENT OF NANO-STRUCTURES
- B82Y10/00—Nano-technology for information processing, storage or transmission, e.g. quantum computing or single electron logic
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