Salimi et al., 2023 - Google Patents

Silicon heterojunction solar cell efficiency improvement with wide optical band gap amorphous silicon carbide emitter

Salimi et al., 2023

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Document ID
14463262493379038505
Author
Salimi A
Dönerçark E
Koç M
Turan R
Publication year
Publication venue
AIP Conference Proceedings

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Boron doped hydrogenated amorphous silicon carbide (a-SiC: H) thin films are deposited by using 13.56 MHz plasma enhanced chemical vapor deposition as an emitter layer for SHJ solar cells. By changing different deposition parameters such as precursors gas flow rate …
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