Matei et al., 2017 - Google Patents

Towards printing as an electronics manufacturing method: Micro-scale chiplet position control

Matei et al., 2017

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Document ID
1438482434502722520
Author
Matei I
Nelaturi S
Lu J
Bert J
Crawford L
Chow E
Publication year
Publication venue
2017 American Control Conference (ACC)

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We address the problem of position control of micro-chips (chiplets) immersed in dielectric fluid. An electric field, shaped by controlling the voltages of spiral shaped electrodes, is used to reliably and accurately transport and position chiplets using dielectrophoretic forces. A …
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