Oppenheim et al., 2003 - Google Patents

MEMS ultrasonic transducers for the testing of solids

Oppenheim et al., 2003

View PDF
Document ID
14211717902259051367
Author
Oppenheim I
Jain A
Greve D
Publication year
Publication venue
IEEE transactions on ultrasonics, ferroelectrics, and frequency control

External Links

Snippet

Arrays of capacitive diaphragm ultrasonic transducers could potentially be used for non- destructive ultrasonic testing and structural monitoring. In this paper, we consider the efficiency of coupling of these transducers to solid media. We show that efficient coupling …
Continue reading at users.ece.cmu.edu (PDF) (other versions)

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/22—Details, e.g. general constructional or apparatus details
    • G01N29/24—Probes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/02—Indexing codes associated with the analysed material
    • G01N2291/028—Material parameters
    • G01N2291/02818—Density, viscosity
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/02—Indexing codes associated with the analysed material
    • G01N2291/028—Material parameters
    • G01N2291/02827—Elastic parameters, strength or force
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/10—Number of transducers
    • G01N2291/106—Number of transducers one or more transducer arrays
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/22—Details, e.g. general constructional or apparatus details
    • G01N29/221—Arrangements for directing or focusing the acoustical waves
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/04—Wave modes and trajectories
    • G01N2291/042—Wave modes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/04—Wave modes and trajectories
    • G01N2291/044—Internal reflections (echoes), e.g. on walls or defects
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/01—Indexing codes associated with the measuring variable
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/02—Analysing fluids
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/44—Processing the detected response signal, e.g. electronic circuits specially adapted therefor
    • G01N29/46—Processing the detected response signal, e.g. electronic circuits specially adapted therefor by spectral analysis, e.g. Fourier analysis or wavelet analysis
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/04—Analysing solids
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01H—MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
    • G01H11/00—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by detecting changes in electric or magnetic properties, e.g. capacitance or reluctance
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezo-electric effect or with electrostriction
    • B06B1/0607—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezo-electric effect or with electrostriction using multiple elements
    • B06B1/0622—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezo-electric effect or with electrostriction using multiple elements on one surface

Similar Documents

Publication Publication Date Title
Fromme et al. On the development and testing of a guided ultrasonic wave array for structural integrity monitoring
Joseph et al. Applications of capacitive micromachined ultrasonic transducers: A comprehensive review
Demirci et al. Forward-viewing CMUT arrays for medical imaging
Jin et al. Characterization of one-dimensional capacitive micromachined ultrasonic immersion transducer arrays
US20100192693A1 (en) Acoustic transducer assembly
Caliano et al. Design, fabrication and characterization of a capacitive micromachined ultrasonic probe for medical imaging
Huang et al. Comparison of conventional and collapsed region operation of capacitive micromachined ultrasonic transducers
Oppenheim et al. MEMS ultrasonic transducers for the testing of solids
Doody et al. Modeling and characterization of CMOS-fabricated capacitive micromachined ultrasound transducers
Sadeghpour et al. Novel phased array piezoelectric micromachined ultrasound transducers (PMUTs) for medical imaging
Li et al. Bandwidth and sensitivity enhancement of piezoelectric MEMS acoustic emission sensor using multi-cantilevers
Platte PVDF ultrasonic transducers
Liu et al. Airborne Rangefinding With pMUTs Array Using Differential Structure
Hsu et al. A 200-nm-gap titanium nitride composite CMOS-MEMS CMUT for biomedical ultrasounds
Li et al. Improved piezoelectric MEMS acoustic emission sensors
JP2009244235A (en) Ultrasonic array sensor for underwater use
Boubenia et al. Acoustic emission sensing using MEMS for structural health monitoring: Demonstration of a newly designed capacitive micro machined ultrasonic transducer
US6584848B1 (en) Non-destructive evaluation method employing dielectric electrostatic ultrasonic transducers
Huang et al. Collapsed regime operation of capacitive micromachined ultrasonic transducers based on wafer-bonding technique
Greve et al. Coupling of MEMS ultrasonic transducers
Pickwell et al. Thick-film acoustic emission sensors for use in structurally integrated condition-monitoring applications
Jain et al. A MEMS phased array transducer for ultrasonic flaw detection
Greve et al. MEMS phased array detection in contact with solids
Abdalla et al. An Experimental and Numerical Study of Crosstalk Effects in PMUT Arrays
Wang et al. Development of air-coupled ultrasound transducers for nondestructive evaluation