WO2023017591A1

WO2023017591A1 - Substrate storage container

Info

Publication number: WO2023017591A1
Application number: PCT/JP2021/029679
Authority: WO
Inventors: 貴立小山; 雄大金森
Original assignee: ミライアル株式会社
Priority date: 2021-08-11
Filing date: 2021-08-11
Publication date: 2023-02-16

Abstract

A substrate storage container in which: a rotating cam 31 is connected to an engaging latch-raising/lowering cam 35; the rotating cam 31 and the engaging latch-raising/lowering cam 35 are formed from different materials in the connecting sections thereof; the engaging latch-raising/lowering cam 35 is connected to an engaging latch 32; the engaging latch-raising/lowering cam 35 and the engaging latch 32 are formed from different materials in the connecting sections thereof; the rotating cam 31 is formed from a material which has better sliding properties than does that of the engaging latch 32; and the engaging latch-raising/lowering cam 35 is also formed from a material which has better sliding properties than does that of the engaging latch 32.

Description

Substrate storage container

The present invention relates to a substrate storage container used for storing, storing, transporting, and transporting substrates made of semiconductor wafers and the like.

As a substrate storage container for storing and transporting a substrate made of a semiconductor wafer, a container having a container body and a lid is conventionally known (see, for example, Patent Documents 1 and 2). .

One end of the container body has an opening peripheral edge formed with a container body opening. The other end of the container body has a closed cylindrical wall. A substrate storage space is formed in the container body. The substrate storage space is formed by being surrounded by walls, and can store a plurality of substrates. The lid is attachable to and detachable from the opening rim and can close the opening of the container body. The lateral substrate support portions are provided on the wall portion so as to form a pair within the substrate storage space. When the opening of the container body is not closed by the lid, the side substrate supporting portion can support the edge portions of the plurality of substrates in a state in which adjacent substrates are spaced apart from each other by a predetermined distance and arranged in parallel. be.

A front retainer is provided in a portion of the lid that faces the substrate storage space when the opening of the container body is closed. The front retainer can support the edges of the plurality of substrates when the opening of the container body is closed by the lid. Further, a back side substrate supporting portion is provided on the wall portion so as to form a pair with the front retainer. The far side substrate supporting portion can support the edges of a plurality of substrates. When the opening of the container body is closed by the lid, the back side substrate supporting portion supports the plurality of substrates in cooperation with the front retainer, thereby separating the adjacent substrates by a predetermined distance. A plurality of substrates are held in parallel.

International Publication No. 2019/239495 pamphlet International Publication No. 2015/033411 Pamphlet

A conventional lid is provided with a latch mechanism. The latch mechanism is provided near both left and right ends of the lid, and includes two upper latch portions that can protrude upward from the upper side of the lid and two lower latch portions that can protrude downward from the lower side of the lid. and a latch portion. The upper latch and the lower latch are engaged with latch engagement recesses formed in the container body, thereby fixing the lid body to the opening peripheral edge of the container body.

An operation part is provided on the outer surface of the lid. The operation part has a latch rotation member. By rotating the latch rotating member, the latch arm that abuts on the cam portion provided on the latch rotating member is advanced and retracted with respect to the latch rotating member, and the upper latch and the lower latch that are tip portions of the latch arm are moved. However, it may be in a state of protruding from the upper and lower sides of the lid, or may be in a state of not protruding from the upper and lower sides.

For the parts that make up the conventional latch mechanism, emphasis is placed on the strength of the latch mechanism, and plastics such as PEEK that have high bending strength, which is mechanical strength, are used. After about 100,000 times, the parts that make up the latch mechanism slide against each other, causing wear and dust generation. Also, as a countermeasure against wear, there are cases where resin with excellent slidability is used for the parts that make up the latch mechanism. Since the strength is inferior to that of PEEK, etc., it has been confirmed that if a strong load is applied to the latch mechanism for a long period of time, deformation due to creep will occur. In addition, if the substrate is left in the substrate storage container for a long time, the substrate pushes the substrate from the inside of the substrate storage container toward the outside of the container for a long period of time. However, when the lid is opened, the parts constituting the latch mechanism tend to remain deformed even when the force pushing the container outward is removed.

SUMMARY OF THE INVENTION It is an object of the present invention to provide a substrate storage container in which abrasion and generation of dust due to sliding of parts constituting a latch mechanism can be suppressed, and deformation of the parts constituting the latch mechanism can be suppressed. do.

The present invention comprises: a container body having an opening peripheral edge formed therein with a substrate storage space capable of accommodating a plurality of substrates, and a container body opening communicating with the substrate storage space at one end thereof; and the opening peripheral edge. a lid detachable from the part and capable of closing the opening of the container body in a positional relationship surrounded by the opening peripheral part, wherein the opening peripheral parts have a positional relationship facing each other. The lid has at least a pair of engaging recesses formed to face the lid, and the lid includes a lid body and the at least one pair of engagement recesses when the container body opening is closed by the lid. and an engagement position where the lid main body is fixed to the container body by engaging with the engagement recesses of the respective engagement recesses, and an engagement position where the engagement with the engagement recesses is released and the fixation of the lid body to the container body is released. and at least a pair of latch mechanisms movable with respect to the lid body between a disengaged position and a position where the latch mechanism is engaged/retracted by moving forward and backward with respect to the engagement recess. The engaging latch is disengaged and approaches/separates from the one end of the container body in the engaging recess and moves away from the other end of the container body, and the engaging latch advances and retreats in the direction in which the engaging latch advances and retreats. an engaging latch elevating cam that advances and retreats with respect to the mating recess to move the engaging latch toward/separate from the other end portion of the container body in the engaging recess; and a rotating cam that advances and retreats in the direction in which the engaging latch advances and retreats, the rotating cam is connected to the engaging latch elevating cam, and the rotating cam and the engaging latch elevating cam are connected at the connected portion. The cam is made of a different material, the engaging latch elevating cam is connected to the engaging latch, and the engaging latch elevating cam and the engaging latch are made of different materials in the connected portion. The rotating cam is made of a material with higher slidability than the engaging latch, and the engaging latch elevating cam is made of a material with higher slidability than the engaging latch. . Regarding.

Also, the rotating cam is preferably made of polyacetal. Moreover, it is preferable that the rotating cam is made of a resin material to which an additive is added to improve slidability. At least one of fluororesin, polyolefin resin, graphite, and molybdenum disulfide is preferably used as the additive for improving the slidability.

Further, it is preferable that the engaging latch is made of a material having higher mechanical strength than the engaging latch elevating cam. Moreover, it is preferable that the engaging latch is made of a material having a mechanical strength higher than that of the rotating cam. Moreover, it is preferable that the engaging latch is made of a resin selected from polyetheretherketone, polyphenylene sulfide, and polycarbonate.

Further, it is preferable that the engaging latch is made of a resin material to which an additive that enhances mechanical strength is added. At least one of GF and CF is preferably used as an additive for increasing the mechanical strength. Moreover, it is preferable that a bearing member is provided between the rotating cam and the lid body. Further, the engagement latch elevating cam engages the engagement latch with the engagement recess by moving the engagement latch in a direction approaching the engagement recess, and then moves the engagement latch to the engagement recess. It preferably has an engaging latch connection for access to the other end of the container body.

The engaging latch elevating cam includes an engaging latch elevating cam main body portion and a rotating cam engaging sliding portion provided in the engaging latch elevating cam main body portion and engaged with and sliding on the rotating cam. and , wherein the rotary cam engaging sliding portion is preferably made of a material different from the material of the engaging latch elevating cam body portion.

Further, it is preferable that the engaging latch elevating cam body portion and the rotating cam are made of the same material.

ADVANTAGE OF THE INVENTION According to the present invention, it is possible to provide a substrate storage container in which it is possible to suppress the generation of dust due to wear caused by the sliding of the parts constituting the latch mechanism, and to suppress the deformation of the parts constituting the latch mechanism. can.

FIG. 2 is an exploded perspective view showing a state in which a plurality of substrates W are stored in the substrate storage container 1 according to the first embodiment of the present invention; Fig. 2 is an upper perspective view showing a container body 2 of the substrate storage container 1 according to the first embodiment of the present invention; Fig. 2 is a bottom perspective view showing a container body 2 of the substrate storage container 1 according to the first embodiment of the present invention; 1 is a side sectional view showing a container body 2 of a substrate storage container 1 according to a first embodiment of the present invention; FIG. 3 is a perspective view showing a latch rotation member 31, a latch arm 32, and a latch elevation cam member 35 of the latch structure of the lid 3 of the substrate storage container 1 according to the first embodiment of the present invention; FIG. FIG. 4 is an enlarged front view showing a state in which the latch rotating member 31 is rotated to a position where the latch arm 32 of the latch structure of the lid 3 of the substrate storage container 1 according to the first embodiment of the present invention is at the disengaged position; is. FIG. 4 is an enlarged cross-sectional view showing a latch arm 32 of the latch structure of the lid body 3 of the substrate storage container 1 according to the first embodiment of the present invention at the disengaged position; FIG. 4 is an enlarged front view showing a state in which a latch rotation member 31 is rotated to a position where a latch arm 32 of the latch structure of the lid body 3 of the substrate storage container 1 according to the first embodiment of the present invention becomes an insertion position. . FIG. 4 is an enlarged cross-sectional view showing a state in which the latch arm 32 of the latch structure of the lid body 3 of the substrate storage container 1 according to the first embodiment of the present invention has moved to the insertion position; FIG. 4 is an enlarged front view showing a state in which a latch rotation member 31 is rotated to a position where a latch arm 32 of the latch structure of the lid body 3 of the substrate storage container 1 according to the first embodiment of the present invention is pushed in; . FIG. 4 is an enlarged cross-sectional view showing a state in which the latch arm 32 of the latch structure of the lid body 3 of the substrate storage container 1 according to the first embodiment of the present invention has moved to the pushed-in position;

Hereinafter, the substrate storage container 1 according to this embodiment will be described with reference to the drawings.
FIG. 1 is an exploded perspective view showing a state in which a plurality of substrates W are stored in a substrate storage container 1. FIG. FIG. 2 is an upper perspective view showing the container body 2 of the substrate storage container 1. FIG. FIG. 3 is a bottom perspective view showing the container body 2 of the substrate storage container 1. FIG. FIG. 4 is a side sectional view showing the container body 2 of the substrate storage container 1. As shown in FIG.

Here, for convenience of explanation, the direction from the container body 2 to the lid body 3 described later (the direction from the upper right to the lower left in FIG. 1) is defined as the forward direction D11, and the opposite direction is defined as the rearward direction D12, These are collectively defined as the front-rear direction D1. The direction from the lower wall 24 to the upper wall 23 (upward direction in FIG. 1) is defined as an upward direction D21, and the opposite direction is defined as a downward direction D22. Define. Further, the direction from the second side wall 26 to the first side wall 25 described later (the direction from the lower right to the upper left in FIG. 1) is defined as the left direction D31, and the opposite direction is defined as the right direction D32. are collectively defined as a left-right direction D3. Arrows indicating these directions are illustrated in the main drawings.

Also, the substrates W (see FIG. 1) stored in the substrate storage container 1 are disk-shaped silicon wafers, glass wafers, sapphire wafers, etc., and are thin for industrial use. The substrate W in this embodiment is a silicon wafer with a diameter of 300 mm.

As shown in FIG. 1, the substrate storage container 1 stores substrates W made of silicon wafers as described above, and is used as a process container for transporting in a process in a factory. It is used as a shipping container for transporting substrates by transportation means such as transportation means, and is composed of a container body 2 and a lid 3 . The container body 2 includes a substrate support plate-like portion 5 as a side substrate support portion and a back side substrate support portion 6 (see FIG. 2, etc.). It has a front retainer (not shown).

The container body 2 has a cylindrical wall 20 with a container body opening 21 formed at one end and a closed other end. A substrate storage space 27 is formed in the container body 2 . The substrate storage space 27 is formed by being surrounded by the wall portion 20 . A substrate support plate-like portion 5 is arranged in a portion of the wall portion 20 that forms the substrate storage space 27 . A plurality of substrates W can be stored in the substrate storage space 27 as shown in FIG.

The substrate support plate-like portions 5 are provided on the wall portion 20 so as to form a pair within the substrate storage space 27 . When the container main body opening 21 is not closed by the lid 3, the substrate supporting plate portion 5 abuts on the edges of the plurality of substrates W, thereby separating the adjacent substrates W at a predetermined interval. The edge portions of a plurality of substrates W can be supported while being arranged side by side. On the far side of the substrate support plate-shaped portion 5, a rear substrate support portion 6 is formed integrally with the substrate support plate-shaped portion 5 and provided.

The back side substrate support portion 6 (see FIG. 2, etc.) is provided in the wall portion 20 so as to form a pair with a front retainer (not shown) described later in the substrate storage space 27 . The back side substrate supporting portion 6 can support the rear portion of the edge portions of the plurality of substrates W by coming into contact with the edge portions of the plurality of substrates W when the container main body opening portion 21 is closed by the lid 3. is.

The lid 3 is attachable to and detachable from an opening peripheral portion 28 (FIG. 1, etc.) that forms the container body opening 21 and can close the container body opening 21 . A front retainer (not shown) is provided at a portion of the lid 3 that faces the substrate storage space 27 when the container main body opening 21 is closed by the lid 3 . A front retainer (not shown) is arranged inside the substrate storage space 27 so as to form a pair with the back side substrate support portion 6 .

The front retainer (not shown) can support the front portions of the edges of the plurality of substrates W by coming into contact with the edges of the plurality of substrates W when the container main body opening 21 is closed by the lid 3. . The front retainer (not shown) supports a plurality of substrates W in cooperation with the inner substrate support portion 6 when the container main body opening 21 is closed by the lid 3, thereby holding the adjacent substrates W together. They are held in a state of being spaced apart at a predetermined interval and arranged side by side.

The substrate storage container 1 is made of a resin such as a plastic material. Unless otherwise specified, examples of the resin material include polycarbonate, cycloolefin polymer, polyetherimide, polyetherketone, and polybutylene. Thermoplastic resins such as terephthalate, polyetheretherketone, and liquid crystal polymers, and alloys thereof can be mentioned. When imparting conductivity to the resins of these molding materials, conductive substances such as carbon fibers, carbon powders, carbon nanotubes, and conductive polymers are selectively added. Further, it is also possible to add glass fiber, carbon fiber, or the like in order to increase rigidity.

Each unit will be described in detail below.
FIG. 5 is a perspective view showing the latch rotation member 31, the latch arm 32, and the latch elevation cam member 35 of the latch structure of the lid 3 of the substrate storage container 1 according to the first embodiment of the present invention. FIG. 6 shows a state in which the latch rotating member 31 is rotated to a position where the latch arm 32 of the latch structure of the lid 3 of the substrate storage container 1 according to the first embodiment of the present invention is at the disengaged position. It is an enlarged front view showing. FIG. 7 is an enlarged cross-sectional view showing a latch arm 32 of the latch structure of the lid 3 of the substrate storage container 1 according to the first embodiment of the present invention at the disengaged position. FIG. 8 is an enlarged view showing how the latch rotating member 31 is rotated to a position where the latch arm 32 of the latch structure of the lid 3 of the substrate storage container 1 according to the first embodiment of the present invention becomes the insertion position. It is a front view. FIG. 9 is an enlarged cross-sectional view showing how the latch arm 32 of the latch structure of the lid 3 of the substrate storage container 1 according to the first embodiment of the present invention has moved to the insertion position. FIG. 10 is an enlarged view showing a state in which the latch rotating member 31 is rotated to a position where the latch arm 32 of the latch structure of the lid 3 of the substrate storage container 1 according to the first embodiment of the present invention is pushed in. It is a front view. FIG. 11 is an enlarged cross-sectional view showing how the latch arm 32 of the latch structure of the lid 3 of the substrate storage container 1 according to the first embodiment of the present invention has moved to the pushed position.

As shown in FIG. 1, the wall portion 20 of the container body 2 has a back wall 22, an upper wall 23, a lower wall 24, a first side wall 25 and a second side wall 26. The inner wall 22, the upper wall 23, the lower wall 24, the first side wall 25, and the second side wall 26 are made of the material described above and are integrally formed.

The first side wall 25 and the second side wall 26 face each other, and the upper wall 23 and the lower wall 24 face each other. A rear end of the upper wall 23 , a rear end of the lower wall 24 , a rear end of the first side wall 25 , and a rear end of the second side wall 26 are all connected to the inner wall 22 . The front end of the upper wall 23, the front end of the lower wall 24, the front end of the first side wall 25, and the front end of the second side wall 26 form an opening peripheral edge 28 that forms the container body opening 21 having a substantially rectangular shape.

The opening peripheral edge 28 is provided at one end of the container body 2 , and the inner wall 22 is located at the other end of the container body 2 . The outer shape of the container body 2 formed by the outer surface of the wall portion 20 is box-shaped. The inner surface of the wall portion 20, that is, the inner surface of the back wall 22, the inner surface of the upper wall 23, the inner surface of the lower wall 24, the inner surface of the first side wall 25, and the inner surface of the second side wall 26, is a substrate storage space surrounded by these. 27 is formed. A container main body opening 21 formed in an opening peripheral portion 28 communicates with a substrate storage space 27 that is surrounded by a wall portion 20 and formed inside the container main body 2 . A maximum of 25 substrates W can be stored in the substrate storage space 27 .

As shown in FIG. 1,

latch engaging recesses

231A and 231B recessed outward of the substrate storage space 27 are provided in the upper wall 23 and the lower wall 24 and in the vicinity of the opening peripheral edge 28. , 241A and 241B are formed. A total of four latch engagement recesses 231A, 231B, 241A, and 241B are formed near the left and right ends of the upper wall 23 and the lower wall 24, respectively.

As shown in FIG. 1, ribs 235 are integrally formed with the upper wall 23 on the outer surface of the upper wall 23 . Ribs 235 increase the rigidity of container body 2 . A top flange 236 is fixed to the central portion of the upper wall 23 . The top flange 236 is a member that is hung and suspended in the substrate storage container 1 when suspending the substrate storage container 1 in an AMHS (automatic wafer transfer system), a PGV (wafer substrate carrier), or the like.

A bottom plate 244 is fixed to the lower wall 24 as shown in FIG. The bottom plate 244 has a substantially rectangular plate shape arranged to face substantially the entire bottom surface that constitutes the outer surface of the bottom wall 24 , and is fixed to the bottom wall 24 .

As shown in FIG. 3, at the four corners of the lower wall 24, two types of through holes, namely, air supply holes 242 and exhaust holes 243 are formed. In this embodiment, the two through-holes in the front part of the lower wall 24 are exhaust holes 243 for discharging the gas inside the container body 2 , and the two through-holes in the rear part are the container body 2 . is an air supply hole 242 for supplying gas to the inside of the .

An air supply filter portion 90 as an additional component is arranged in the through hole as the air supply hole 242 , and an exhaust filter portion 91 is arranged in the through hole as the exhaust hole 243 . That is, the gas flow paths inside the air supply filter portion 90 and the air exhaust filter portion 91 form part of an air passage that allows communication between the substrate storage space 27 and the space outside the container body 2 . The air supply filter portion 90 and the exhaust filter portion 91 are arranged on the wall portion 20 , and the air supply filter portion 90 and the exhaust filter portion 91 are separated from the space outside the container body 2 . Gas can pass between it and the substrate storage space 27 . The air supply filter unit 90 communicates with the internal space of the gas ejection nozzle unit 8 , and the purge gas supplied to the air supply filter unit 90 through the internal space of the gas ejection nozzle unit 8 flows into the substrate storage space 27 . configured to be supplied.

As shown in FIG. 2 and the like, the substrate support plate-shaped portions 5 are provided on the first side wall 25 and the second side wall 26 respectively, and are arranged in the container main body in the substrate storage space 27 so as to form a pair in the left-right direction D3. 2. Specifically, as shown in FIG.

The plate portion 51 has a plate-like substantially arc shape. A total of 50 plate portions 51 are provided on each of the first side wall 25 and the

second side wall

26, 25 each in the vertical direction D2. Adjacent plate portions 51 are arranged in a parallel positional relationship with an interval of 10 mm to 12 mm in the vertical direction D2.

In addition, the 25 plate portions 51 provided on the first side wall 25 and the 25 plate portions 51 provided on the second side wall 26 have a positional relationship in which they face each other in the left-right direction D3.

Protrusions

511 and 512 are provided on the upper surface of the plate portion 51 . The substrate W supported by the plate portion 51 contacts only the projecting ends of the

protrusions

511 and 512 and does not contact the plate portion 51 on its surface.

The substrate support plate-like portion 5 having such a configuration allows the substrates W adjacent to each other among the plurality of substrates W to be separated from each other by a predetermined interval and in a parallel positional relationship. can support the edge of the

As shown in FIG. 4 , the back side substrate support portion 6 has a back side edge support portion 60 . The back side edge support portion 60 is integrally formed with the container body 2 at the rear end portion of the plate portion 51 of the substrate support plate portion 5 .

The back side edge support portions 60 are provided in a number corresponding to each substrate W that can be stored in the substrate storage space 27, specifically 25 pieces. The rear edge support portions 60 arranged on the first side wall 25 and the second side wall 26 have a positional relationship in which they form a pair with a front retainer (not shown) in the front-rear direction D1. When the substrate W is accommodated in the substrate accommodation space 27 and the cover 3 is closed, the inner edge support part 60 supports the edge of the substrate W by pinching it.

As shown in FIG. 1, the lid 3 has a substantially rectangular shape that substantially matches the shape of the opening peripheral portion 28 of the container body 2 . The lid 3 is attachable to and detachable from the opening rim 28 of the container body 2 . When the lid 3 is attached to the opening rim 28 , the lid 3 is surrounded by the opening rim 28 . , the opening 21 of the container body can be closed. The lid 3 has a lid body 30 as shown in FIG. 8 and the like.

As shown in FIGS. 1 and 7, the lid body 30 includes an inner plate-shaped portion 301 having a substantially rectangular plate shape, an outer plate-shaped portion 302 having a substantially rectangular plate shape, and a peripheral wall portion 303. and The surface of the inner plate-shaped portion 301 on the rearward direction D12 side constitutes the inner surface of the lid, and forms the substrate storage space 27 together with the inner surface of the container main body when the container main body opening 21 is closed by the lid 3. . A peripheral wall portion extending in a forward direction D11, which is a direction perpendicular to the inner surface of the lid of the inner plate-shaped portion 301, is provided along the peripheral edge so as to encircle the peripheral edge of the inner plate-shaped portion 301. 303 is provided. The inner plate-like portion 301 and the peripheral wall portion 303 are integrally molded from polycarbonate, for example, and connected. The inner plate-like portion 301 and the peripheral wall portion 303 are not limited to being made of polycarbonate.

As shown in FIG. 1 and the like, the outer plate-like portion 302 is arranged at the extending end portion of the peripheral wall portion 303 in the forward direction D11. The outer plate-like portion 302 is fixed to the inner plate-like portion 301 with the peripheral edge of the outer plate-like portion 302 surrounded by the peripheral wall portion 303 . With this configuration, the inner plate-shaped portion 301, the peripheral wall portion 303, and the outer plate-shaped portion 302 form a box-like structure, and the inner plate-shaped portion 301, the peripheral wall portion 303, and the outer plate-shaped portion 302 form a box-like structure. An enclosed lid interior space 304 (see FIG. 7) is formed. Further, the surface of the outer plate-shaped portion 302 on the front direction D11 side constitutes the outer surface of the lid body. Accordingly, the lid 3 has a substantially rectangular plate shape (thin rectangular parallelepiped shape) that has an outer lid surface and an inner lid inner surface as a whole and substantially matches the shape of the opening peripheral portion 28 of the container body 2 . The lid 3 is attachable to and detachable from the opening rim 28 of the container body 2 , and the lid 3 is attached to the opening rim 28 so that the lid 3 can close the container body opening 21 . .

on the inner surface of the lid 3 (the surface on the back side of the lid 3 shown in FIG. 1) and at a position immediately behind the opening peripheral edge 28 when the lid 3 closes the container main body opening 21 in the direction D12. On the surface facing the surface of the formed stepped portion (seal surface 281), that is, on the periphery of the inner plate-shaped portion 301 constituting the lid body 30, so as to encircle the outer periphery of the lid 3, An annular sealing member 4 is attached. The sealing member 4 is arranged so as to encircle the peripheral wall portion 303 of the lid body 30 . The sealing member 4 is made of various thermoplastic elastomers such as elastically deformable polyester-based and polyolefin-based elastomers, fluororubber, silicone rubber, and the like.

When the lid 3 is attached to the opening peripheral portion 28, the sealing member 4 is sandwiched between the sealing surface 281 (see FIG. 1) of the container body 2 and the inner surface of the lid body 30 and is elastically deformed. That is, by interposing the sealing member 4 between the lid body 3 and the container body 2, the lid body 3 is separated from the opening peripheral edge portion 28 without contacting each other. The body opening 21 can be closed. By removing the lid 3 from the opening peripheral portion 28 , the substrate W can be taken in and out of the substrate storage space 27 inside the container body 2 .

As shown in FIG. 7 and the like, the lid body inner space 304 of the lid body 30 includes a latch rotating member 31 as a latch driving portion, a latch arm 32 as an engaging latch, and a latch rotating member 31 as a rotating cam. A latch mechanism having a latch elevating cam member 35 as an engaging latch elevating cam for connecting the latch arm 32 with the latch arm 32 is provided. The latch mechanism is arranged at a position closer to the left direction D31 and a position closer to the right direction D32 in the lid internal space 304 . A total of two pairs of latch arms 32 are arranged in pairs in the vertical direction D2. As shown in FIG. 5, base ends 321 (see FIG. 7) of the pair of latch arms 32 are engaged with tip ends 352 of the latch elevation cam member 35, respectively. The base portions 351 of the latch elevation cam members 35 are engaged with the latch rotation members 31 as latch driving portions. The latch elevating cam member 35 and the latch arm 32 extend upward D21 and downward D22 from the base end of the latch elevating cam member 35 that engages with the latch rotation member 31, respectively.

More specifically, the latch rotating member 31 is integrally molded with resin whose main component is POM (polyacetal). Therefore, when the latch arm 32 moves between the disengagement position, the insertion position, and the push-in position as described later, the latch rotation member 31 receives a reaction force and the like from the latch elevation cam member 35 and the latch arm 32 . In some cases, it is composed of a rigid body that hardly deforms elastically. The latch rotation member 31 is not limited to being made of POM (polyacetal) resin as a main component. For example, the latch rotating member 31 may be made of a resin to which additives such as PTFE (polytetrafluoroethylene) and PE (polyethylene) are added to improve slidability. At least one of polyolefin resin, graphite, and molybdenum disulfide may be used. The latch rotating member 31 has a circular portion 311, and a bearing member 37 is rotatably mounted on the inner plate portion 301 (see FIG. 8, etc.) of the lid body 30 around the center of the circular portion 311 as the rotation axis. supported through The bearing member 37 is made of a resin whose main component is PBT (polybutylene terephthalate) and has a thin plate shape. As shown in FIG. and a vertical extension 372 extending in the vertical direction D2. The bearing member 37 is not limited to being made of PBT (polybutylene terephthalate) resin as a main component. Although the latch rotating member 31 is rotatable in this manner, it is supported by the inner plate-like portion 301 so as not to move in the vertical direction D2 and the horizontal direction D3. A pair of elongated holes 312 having an arc shape of approximately 90° at the center angle of the circular portion 311 are formed along the approximately peripheral edge in a point-symmetric positional relationship near the periphery of the circular portion 311 .

As shown in FIG. 5 and the like, in the long hole 312, the linear distance from the center of the circular portion 311 to the long hole 312 varies depending on the location of the long hole 312. For example, the linear distance from the center of the circular portion 311 shown in FIG. 6 to the end of the elongated hole 312 in the clockwise direction takes the maximum value. Also, the linear distance from the center of the circular portion 311 to the end portion of the elongated hole 312 in the counterclockwise direction takes the minimum value.

A straight protrusion 313 is formed in the central portion of the latch rotating member 31 so as to protrude in a straight line. The linear convex portion 313 has a wall projecting from the circular portion 311 at its circumference, and an arm of a device (not shown) for opening and closing the lid 3 is provided in the space surrounded by the wall. A linear projection provided at the tip of the can be engaged. Rotation of the arm (not shown) with the linear projection (not shown) engaged with the space of the linear projection 313 allows the latch rotating member 31 to rotate. As the latch rotating member 31 rotates, the difference in linear distance from the center of the circular portion 311 to the elongated hole 312 causes the latch rotating member 31 to move the latch arm 32 to the engagement position and the engagement position, as will be described later. It can be moved to and from the unlocked position.

In addition, an elastic projecting portion 314 is provided on the peripheral portion of the latch rotating member 31 . The elastic projecting portion 314 is composed of a member extending in the circumferential direction of the latch rotating member 31 and formed so as to partially cover a notch formed in the peripheral portion of the latch rotating member 31. protrudes radially outward from the latch rotating member 31 . The elastic projecting portion 314 engages the engaging portion formed on the outer plate-like portion 302 when the cylindrical projecting portion 355 is positioned at the clockwise or counterclockwise end of the elongated hole 312 shown in FIG. (not shown), and this engagement makes the latch rotating member 31 temporarily difficult to rotate. When the latch arm 32 is in the pushed position described later, or when it is in the disengaged position and the cylindrical projection 355 is positioned at the end of the slot 312 in the counterclockwise direction, the elastic projection is The portion 314 is not particularly engaged with a portion of the outer plate-like portion 302, and the latch rotating member 31 is in a state of being easily rotatable. That is, the latch elevating cam member 35 includes a front plate portion 3501 constituting an engaging latch elevating cam main body portion, and a rotating cam engaging member 31 provided on the front plate portion 3501 that engages and slides with the latch rotating member 31. and a convex portion 355 as a sliding portion.

The two pairs of latch arms 32 are positioned between an engagement position and an engagement position where engagement with the latch engagement recesses 231A, 231B, 241A and 241B is released and the lid body 30 is released from the container body 2. It is movable with respect to the lid body 30 between. The engaging position is composed of an insertion position and a pushing position. At the engagement position, the two pairs of latch arms 32 engage two pairs of

latch engagement recesses

231A and 231B forming a pair in the vertical direction D2 when the container body opening 21 is closed by the lid 3. , 241A, and 241B, and the leading end fitting portion 324 moves forward D11 in the latch engagement recesses 231A, 231B, 241A, and 241B from the insertion position, and the latch engagement recesses 231A , 231B, 241A, and 241B are pushed in the forward direction D11 to relatively push the lid 3 in the rearward direction D12, which is the direction of the container body 2; It is movable with respect to the lid body 30 between them.

Specifically, the pair of latch arms 32 has a symmetrical shape with respect to a plane passing through the rotation axis of the latch rotating member 31 and parallel to the left-right direction D3 and the front-rear direction D1. Therefore, only one latch arm 32 will be described, and the description of the other latch arm 32 will be omitted unless particularly necessary.

The main component of the latch arm 32 is integrally formed of PEEK (polyetheretherketone) resin, and as shown in FIG. 7, has a substantially rectangular shape when viewed from the front. The latch arm 32 has a connecting shaft 325, a fulcrum portion 323, and a tip fitting portion 324, as shown in FIG. The main component of the latch arm 32 is not limited to PEEK (polyetheretherketone) resin. For example, the latch arm 32 may be made of either PPS (polyphenylene sulfide) or PC (polycarbonate) resin, or may be made of GF (graphite) or CF (graphite) that enhances bending strength, which is mechanical strength. It may be made of a resin to which at least one of carbon fiber and the like is added as an additive.

When the latch arm 32 is at the disengaged position, which will be described later, the base of the latch arm 32 is supported by a base supporting portion 306 (see FIG. 7, etc.) projecting from the inner plate-shaped portion 301 in the forward direction D11. When the latch arm 32 is moved from an insertion position (to be described later) to a pushed-in position, the base of the latch arm 32 is no longer supported by the base support portion 306 as will be described later, as shown in FIG. The base is supported by the latch lifting cam member 35 supporting the connecting shaft 325 passing through the elongated hole 357 .

The connecting shaft 325 is a member that fits into an elongated hole 357 of the latch elevating cam member 35 to be described later to connect the latch elevating cam member 35 and the latch arm 32 to each other. The connecting shaft 325 is formed in the shape of a round bar, and is provided at the base end of the latch arm 32 toward the left-right direction D3.

The fulcrum portion 323 is a portion that supports the tip portion of the latch arm 32 and becomes the center of rotation. The fulcrum portion 323 is a portion that serves as a fulcrum in the principle of leverage. The fulcrum portion 323 protrudes in the rearward direction D<b>12 in the vicinity of the tip of the latch arm 32 . The protruding end portion of the fulcrum portion 323 is a portion for slidingly contacting the flat surface 305A (see FIG. 7, etc.) of the tip side cam 305 to move the tip fitting portion 324 of the latch arm 32 up and down. After the latch arm 32 is extended while the fulcrum portion 323 is in sliding contact with the flat surface 305A of the distal cam 305, the base portion of the latch arm 32 provided with the connecting shaft 325 is pushed in the rearward direction D12 as will be described later. As a result, the tip fitting portion 324 of the latch arm 32 is pushed forward D11. On the other hand, the tip of the latch arm 32 is returned in the rearward direction D12 by pushing the base of the latch arm 32 in the forward direction D11.

The tip fitting portion 324 as a latch member extends outside from the through

holes

303A and 303B of the lid inner space 304 and fits directly into the latch engagement recesses 231A, 231B, 241A and 241B of the opening peripheral edge portion 28. do. The tip fitting 324 is configured at the point of action of the principle of leverage. The tip fitting portion 324 is provided at a short distance from the fulcrum portion 323 so that it can exhibit sufficient force when fitted into the latch engagement recesses 231A, 231B, 241A, and 241B of the opening peripheral portion 28. ing.

A tip fitting portion 324 forming an edge of the tip portion 322 of the latch arm 32 has a linear shape extending in the left-right direction D3, as shown in FIG. 5 and the like. As shown in FIG. 10, the latch arm 32 is positioned in the longitudinal direction (vertical direction D2) when the cylindrical projection 355 is located at the end of the elongated hole 312 in the clockwise direction. are at the insertion position and the push-in position, the tips 322 of the pair of latch arms 32 are inserted into the latch engagement recesses 231A, 231B, 241A and 241B, and the bottoms of the latch engagement recesses 231A, 231B, 241A and 241B. 240A and the like (hereinafter referred to as “bottom portion forming portion 232A”). When the latch arm 32 is in the insertion position, as shown in FIG. 11, the distal end 322 of the latch arm 32 contacts the opening peripheral edge 28 of the container body 2 forming the

latch engaging recesses

231A, 231B, 241A, 241B. Do not touch the part of

The latch raising/lowering cam member 35 moves the latch arm 32 forward and backward with respect to the engaging

recesses

231A, 231B, 241A, and 241B by advancing and retreating in the direction in which the latch arm 32 advances and retreats. Inside, the latch arm 32 is moved towards/separated from the inner wall 22 as the other end of the container body 2 .

Specifically, as shown in FIG. 5, the latch elevation cam member 35 includes a front plate portion 3501, a pair of side plate portions 3502, and a convex portion 355 made of PBT (polybutylene terephthalate) resin as a main component. It is integrally molded. Thus, the portion where the latch rotation member 31 and the latch elevation cam member 35 are connected is made of a material different from that of the latch rotation member 31 and the latch elevation cam member 35 . Also, the portion where the latch arm 32 and the latch elevation cam member 35 are connected is made of a material different from that of the latch arm 32 and the latch elevation cam member 35 . Four rectangular through holes 353 are formed in the central portion of the front plate portion 3501 in an arrangement of two rows and two columns. Between the two through holes 353 near the base 351 and the two through holes 353 near the tip 352, as shown in FIG. A protruding support protrusion 356 is provided. The protruding end portion of the support protrusion 356 slides in contact with the inner plate-shaped portion 301 to support the front plate portion 3501 and the like of the latch elevation cam member 35 when the latch elevation cam member 35 moves. The front plate portion 3501, the pair of side plate portions 3502, and the convex portion 355 are not limited to being made of PBT (polybutylene terephthalate) resin as a main component.

As shown in FIG. 5, the front end portion 352 of the front plate portion 3501 has a forward protruding plate portion 3521 that protrudes one step in the forward direction D11. A base portion 351 of the front plate portion 3501 is provided with a columnar convex portion 355 extending in the forward direction D11, as shown in FIG. 5 and the like. The cylindrical protrusions 355 are engaged with the pair of elongated holes 312 of the latch rotating member 31 one by one, and are movable within the elongated holes 312 relative to the elongated holes 312 .

When the cylindrical projection 355 is positioned at the end of the elongated hole 312 in the counterclockwise direction in FIG. 6, the latch arm 32 is in the disengaged position. At this time, the distal end portion 322 of the latch arm 32 extends upward D21 and downward D22 from through

holes

303A and 303B (see FIG. 1) formed in the peripheral wall portion 303 forming the upper side and the lower side of the lid 3, respectively. It will be in a non-protruding state. As shown in FIG. 5, when the cylindrical protrusion 355 is located at the end of the slot 312 in the clockwise direction, the latch arm 32 is in the pushed position. At this time, the tip portion 322 of the latch arm 32 protrudes upward D21 and downward D22 from the through

holes

303A and 303B formed in the peripheral wall portion 303 of the lid 3 .

As shown in FIG. 5 and the like, a long hole 357 is formed in the portion of the side plate portion 3052 of the distal end portion 352 . The elongated hole 357 is formed in the latch elevation cam member 35 so as to obliquely and linearly extend in the forward direction D11 from the base portion 351 toward the distal end portion 352 (as it separates from the latch rotation member 31). A connecting shaft 325 of the latch arm 32 passes through the elongated hole 357 , and the connecting shaft 325 is movable in the elongated hole 357 in the direction in which the elongated hole 357 extends. The portion of the latch elevating cam member 35 in which the elongated hole 357 is formed constitutes an engaging latch connecting portion.

An inner plate-shaped portion 301 forming the inner surface of the lid 3 is formed with a concave portion (not shown) recessed outward (forward direction D11) of the substrate storage space 27 . A front retainer (not shown) is fixed to the recess (not shown).

A front retainer (not shown) has a front retainer board receiving portion (not shown). The front retainer board receiving portions are arranged two by two so as to form a pair at a predetermined interval in the left-right direction D3. Twenty-five pairs of the front retainer board receiving portions, which are arranged in pairs in this way, are arranged in parallel in the vertical direction D2. When the substrate W is stored in the substrate storage space 27 and the cover 3 is closed, the front retainer substrate receiving portion holds and supports the edge of the substrate W. As shown in FIG.

The latch driving portion of the lid 3 of the substrate storage container having the above structure operates as follows.
First, as shown in FIG. 6, when the cylindrical protrusion 355 is positioned at the counterclockwise end of the elongated hole 312, the latch arm 32 is at the disengaged position. At this time, the tip portion 322 of the latch arm 32 protrudes upward D21 and downward D22 from the through

holes

303A and 303B (see FIG. 1 etc.) formed in the peripheral wall portion 303 forming the upper side of the lid 3, respectively. It is in a state where there is no Further, as shown in FIG. 7, the base of the latch arm 32 is supported by a base supporting portion 306 projecting from the inner plate-shaped portion 301 in the forward direction D11.

Next, as shown in FIG. 8, when the cylindrical projection 355 moves from the counterclockwise end of the elongated hole 312 to a position closer to the clockwise end, the latch arm 32 in the insertion position. At this time, the tip portion 322 of the latch arm 32 protrudes upward D21 and downward D22 from the through

holes

303A and 303B formed in the peripheral wall portion 303 of the lid 3 . Also, as shown in FIG. 9, the base of latch arm 32 is supported by base support 306 in the same manner as when latch arm 32 is in the disengaged position. Therefore, the front end fitting portion 324 of the latch arm 32 is not yet moved in the forward direction D11, and the front end fitting portion 324 forms the latch engagement recesses 231A, 231B, 241A, 241B. It is not in contact with the portion of the opening peripheral portion 28 of the main body 2 .

Next, when the cylindrical protrusion 355 approaches the end of the elongated hole 312 in the clockwise direction, the latch arm 32 approaches the pushed position. At this time, the base of the latch arm 32 is moved to a position where it does not face the front surface of the base support 306, as shown in FIG. At this time, the base of the latch arm 32 is supported by the latch lifting cam member 35 supporting the connecting shaft 325 passing through the elongated hole 357 . Further, when the cylindrical protrusion 355 approaches the end of the elongated hole 312 in the clockwise direction, the connecting shaft 325 is moved in the rearward direction D12 along the elongated hole 357 extending obliquely. . Then, as shown in FIG. 10, when the cylindrical projection 355 is positioned at the end of the elongated hole 312 in the clockwise direction, as shown in FIG. It will fall. That is, the latch arm 32 rotates around the fulcrum portion 323, the base portion of the latch arm 32 moves in the rearward direction D12, and the tip end fitting portion 324 of the tip end portion 322 of the latch arm 32 moves into the latch engagement concave portion. In 231A, 231B, 241A, and 241B, it moves in the forward direction D11 and abuts on the portion of the opening peripheral edge portion 28 of the container body 2 forming the

latch engaging recesses

231A, 231B, 241A, and 241B. , this portion is pushed in the forward direction D11 relative to the lid 3. As shown in FIG. As a result, the lid 3 is relatively pushed in the rearward direction D<b>12 with respect to the container body 2 , and the container body opening 21 is closed by the lid 3 .

According to the substrate storage container 1 according to the present embodiment having the above configuration, the following effects can be obtained.
As described above, the latch mechanism of the substrate storage container 1 engages/disengages by moving forward and backward with respect to the latch engagement recesses 231A, 231B, 241A, and 241B as the engagement recesses, and the latch engagement recesses 231A, 231B. , 241A and 241B, the latch arm 32 functions as an engagement latch that approaches/separates from one end of the container body 2 to/from the other end. As an engagement latch elevating cam that advances and retreats with respect to the mating recesses 231A, 231B, 241A, and 241B to move the latch arm 32 closer to/separate from the other end of the container body 2 in the latch engagement recesses 231A, 231B, 241A, and 241B and a latch rotation member 31 as a rotating cam that advances and retreats the latch elevation cam member 35 in the direction in which the latch arm 32 advances and retreats when rotated.
The latch rotating member 31 is connected to the latch elevating cam member 35 , and the latch rotating member 31 and the latch elevating cam member 35 are made of different materials in the connected portion. The latch elevating cam member 35 and the latch arm 32 are made of different materials in the connected and connected portions.
The latch rotation member 31 is made of a material with higher slidability than the latch arm 32 , and the latch elevation cam member 35 is made of a material with higher slidability than the latch arm 32 .

With the above configuration, the resistance between the latch rotating member 31 and the latch elevating cam member 35 can be reduced, the resistance between the latch elevating cam member 35 and the latch arm 32 can be reduced, and the opening/closing operation resistance of the latch mechanism can be reduced. can be reduced, and the rotational torque of the latch rotating member 31 can be reduced. In addition, it is possible to reduce the abrasion caused by the resin rubbing against each other due to the opening and closing operation of the latch mechanism, thereby reducing the generation of dust. In addition, it is possible to increase the bending strength, which is the mechanical strength, and it is possible to provide a substrate storage container in which deformation of parts constituting the latch mechanism is suppressed.

The latch rotating member 31 is made of polyacetal, or is made of a resin material to which an additive for improving slidability is added. At least one of molybdenum is used. Thereby, the resistance between the latch rotating member 31 and the latch lifting cam member 35 can be easily reduced.

Also, the latch arm 32 is made of a material having higher mechanical strength than the latch lifting cam member 35, and the latch arm 32 is made of a material having higher mechanical strength than the latch rotation member 31. As a result, it is possible to provide a circuit board storage container in which deformation of the parts constituting the latch mechanism can be easily suppressed.

In addition, the latch arm 32 is made of a resin selected from polyetheretherketone, polyphenylene sulfide, and polycarbonate, or is made of a resin material to which an additive is added to increase mechanical strength. At least one of GF or CF is used as an enhancing additive. As a result, it is possible to provide a substrate storage container in which the deformation of the parts constituting the latch mechanism can be reliably suppressed.

A bearing member 37 is provided between the latch rotating member 31 and the lid body 30 . This makes it possible to further improve the slidability between the latch rotation member 31 and the lid body 30 .

In addition, the latch lifting cam member 35 moves the latch arm 32 to the latch engagement recesses 231A, 231B, 241A, 241B by moving the latch arms 32 in the direction approaching the latch engagement recesses 231A, 231B, 241A, 241B. It has an elongated hole 357 as an engaging latch connection for engaging and then allowing the latch arm 32 to approach the other end of the container body 2 .

With the above configuration, the portions where the latch arm 32, the latch lifting cam member 35, the latch rotating member 31, and the lid body 30 slide against each other can be reduced. After the latch arms 32 are engaged with the latch engagement recesses 231A, 231B, 241A and 241B, the latch arms 32 are moved forward D11 to form the latch engagement recesses 231A, 231B, 241A and 241B. In order to push the portion of the opening peripheral edge portion 28 of the container body 2 that is in contact with the lid 3 in the forward direction D11, it is possible to use the principle of leverage when the latch arm 32 rotates as the pushing force. can. For these reasons, it is possible to rotate the latch rotation member 31 of the operation portion 33 of the lid 3 with less torque.

Moreover, since the parts that slide against each other can be reduced, it is possible to suppress the generation of particles, and it is possible to suppress the entry of particles into the substrate storage space 27 .

The present invention is not limited to the above-described embodiments, and can be modified within the technical scope described in the claims.

For example, as shown in FIG. 5, the latch raising/lowering cam member 35 includes a front plate portion 3501, a pair of side plate portions 3502, and a convex portion 355 integrally formed of PBT (polybutylene terephthalate) resin as a main component. However, it is not limited to this configuration. For example, the convex portion 355 as the rotary cam engaging sliding portion may be made of a material different from the material of the front plate portion 3501 as the engaging latch elevating cam body portion. In this case, the front plate portion 3501 as the engaging latch elevating cam body portion and the latch rotating member 31 may be made of the same material. With this configuration, in the portion where the latch rotating member 31 and the latch lifting cam member 35 are connected, the projecting portion 355 and the latch rotating member 31 can be made of different materials. Also, although the bearing member 37 is provided, the present invention is not limited to this configuration, and for example, the bearing member 37 may not be provided.

Further, the shape of the container main body and the lid, the number and dimensions of the substrates that can be accommodated in the container main body are the shapes of the container main body 2 and the lid 3 in this embodiment, and the number and dimensions of the substrates W that can be accommodated in the container main body 2. is not limited to Further, although the substrate W in this embodiment is a silicon wafer with a diameter of 300 mm, it is not limited to this value.

In this embodiment, the back side substrate support portion has a back side edge support portion 60 formed integrally with the container body 2 at the rear end portion of the plate portion 51 of the substrate support plate portion 5 . but not limited to this configuration. For example, the back side substrate supporting portion may not be formed integrally with the container body, but may be formed separately.

Further, in this embodiment, the two through-holes in the front part of the lower wall 24 are the exhaust holes 243 for discharging the gas inside the container body 2, and the two through-holes in the rear part are the container body. 2 is the air supply hole 242 for supplying gas to the inside of the device 2, the configuration is not limited to this. For example, at least one of the two through holes in the front portion of the lower wall may be an air supply hole for supplying gas to the inside of the container body.

1 Substrate storage container 2 Container main body 3 Lid 21 Container main body opening 27 Substrate storage space 28 Opening peripheral edge 30 Lid main body 31 Latch rotating member (rotating cam, latch mechanism)
32 latch arm (engagement latch, latch mechanism)
35 latch elevation cam member (engagement latch elevation cam, latch mechanism)
37

Bearing members

231A, 231B, 241A, 241B Latch engaging concave portion 327B Locking roller 355 Protruding portion 357 Long hole (engaging latch connecting portion)
3501 front plate W substrate

Claims

a container body having an opening peripheral edge formed therein with a substrate storage space capable of storing a plurality of substrates and a container body opening communicating with the substrate storage space at one end;
a lid that is detachable from the opening peripheral edge and can close the container body opening in a positional relationship surrounded by the opening peripheral edge,
The opening peripheral edge portion has at least a pair of engaging recesses formed facing the lid body with a positional relationship facing each other,
The lid is
a lid body;
an engagement position where the lid body is fixed to the container body by engaging with the at least one pair of engagement recesses when the container body opening is closed by the lid body; at least a pair of latch mechanisms movable with respect to the lid body between an engagement release position where the engagement with the joint recess is released and the fixation of the lid body to the container body is released; ,
The latch mechanism is
an engaging latch that engages/disengages by moving forward and backward with respect to the engaging recess and approaches/separates from one end of the container body to/from the other end of the container body in the engaging recess;
By advancing and retreating the engaging latch in the advancing and retreating direction, the engaging latch advances and retreats with respect to the engaging recess, and the engaging latch approaches/approaches the other end portion of the container body in the engaging recess. an engagement latch elevating cam for separating,
a rotating cam that advances and retreats the engaging latch elevating cam in a direction in which the engaging latch advances and retreats by being rotated;
The rotating cam is connected to the engaging latch elevating cam, and the rotating cam and the engaging latch elevating cam are made of different materials in the connected portion,
The engaging latch elevating cam is connected to the engaging latch, and the engaging latch elevating cam and the engaging latch are made of different materials in the connected portion,
The rotating cam is made of a material with higher slidability than the engaging latch,
The substrate storage container, wherein the engaging latch elevating cam is made of a material having higher sliding properties than the engaging latch.
The substrate storage container according to claim 1, wherein the rotating cam is made of polyacetal.
2. The substrate storage container according to claim 1, wherein said rotating cam is made of a resin material to which an additive is added to improve slidability.
The substrate storage container according to claim 3, wherein at least one of fluororesin, polyolefin resin, graphite, and molybdenum disulfide is used as the additive for improving the slidability.
The substrate storage container according to any one of claims 1 to 4, wherein the engaging latch is made of a material having higher mechanical strength than the engaging latch lifting cam.
The substrate storage container according to any one of claims 1 to 5, wherein the engaging latch is made of a material having higher mechanical strength than the rotating cam.
The substrate storage container according to claim 5 or 6, wherein the engaging latch is made of resin selected from polyetheretherketone, polyphenylene sulfide, and polycarbonate.
The substrate storage container according to claim 5 or 6, wherein the engaging latch is made of a resin material to which an additive for enhancing mechanical strength is added.
The substrate storage container according to claim 8, wherein at least one of GF and CF is used as the additive for increasing the mechanical strength.
The substrate storage container according to any one of claims 1 to 9, wherein a bearing member is provided between the rotating cam and the lid body.
The engagement latch elevating cam engages the engagement latch with the engagement recess by moving the engagement latch in a direction approaching the engagement recess, and then moves the engagement latch to the container body. 11. The substrate storage container according to any one of claims 1 to 10, which has an engagement latch connecting portion for approaching the other end of the substrate storage container.
The engaging latch elevating cam includes an engaging latch elevating cam main body portion, a rotating cam engaging sliding portion provided in the engaging latch elevating cam main body portion and engaged with and sliding on the rotating cam, has
12. The substrate storage container according to any one of claims 1 to 11, wherein the rotating cam engaging sliding portion is made of a material different from that of the engaging latch elevating cam body portion.
13. The substrate storage container according to claim 12, wherein the engaging latch elevating cam main body and the rotating cam are made of the same material.