US3732426A - X-ray source for generating an x-ray beam having selectable sectional shapes - Google Patents

X-ray source for generating an x-ray beam having selectable sectional shapes Download PDF

Info

Publication number
US3732426A
US3732426A US00167373A US3732426DA US3732426A US 3732426 A US3732426 A US 3732426A US 00167373 A US00167373 A US 00167373A US 3732426D A US3732426D A US 3732426DA US 3732426 A US3732426 A US 3732426A
Authority
US
United States
Prior art keywords
electron beam
ray
astigmator
nozzle
condenser lens
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
US00167373A
Inventor
T Shimizu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NIHONA DENSHI KK
NIHONA DENSHI KK JA
Original Assignee
NIHONA DENSHI KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NIHONA DENSHI KK filed Critical NIHONA DENSHI KK
Application granted granted Critical
Publication of US3732426A publication Critical patent/US3732426A/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Images

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
    • G01N23/223—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material by irradiating the sample with X-rays or gamma-rays and by measuring X-ray fluorescence
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J29/00—Details of cathode-ray tubes or of electron-beam tubes of the types covered by group H01J31/00
    • H01J29/46—Arrangements of electrodes and associated parts for generating or controlling the ray or beam, e.g. electron-optical arrangement
    • H01J29/56—Arrangements for controlling cross-section of ray or beam; Arrangements for correcting aberration of beam, e.g. due to lenses
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • H01J35/14—Arrangements for concentrating, focusing, or directing the cathode ray
    • H01J35/147—Spot size control
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2223/00—Investigating materials by wave or particle radiation
    • G01N2223/07—Investigating materials by wave or particle radiation secondary emission
    • G01N2223/076—X-ray fluorescence

Definitions

  • the X-ray source comprises an electron gun, a condenser lens and a target.
  • the elec trons emanating from the gun are focused on the target by the condenser lens.
  • the resultant impingement causes an X-ray to be generated from the target.
  • a point X-ray source is used.
  • the incorporated filament is of the hairpin type so as to form a very small circular image of the electron beam on the target.
  • a line X-ray source is used.
  • a line filament is incorporated so as to form a long, narrow image of the electron beam on the target.
  • a single X-ray source capable of generating a multiplicity of X-rays. This is effected by placing an electrostatic or electromagnetic astigmator between the electron gun and the electromagnetic condenser lens and by varying the voltage or current applied to said astigmator so as to change the shape of the electron image on the target according to the purpose of analysis.
  • FIG. 1 shows an embodiment of this invention in which an electrostatic astigmator is provided
  • FIG. 2 is a diagram of an electrostatic astigmator showing the cross section of the electron beam after passing through the astigmator;
  • FIG. 3 is a diagram of an electromagnetic astigmator
  • FIG. 4 shows an apparatus for generating an X-ray according to this invention.
  • an electron gun 1 comprises a hairpin filament 2 and an anode 3. Filament heating current and high voltage for energizing the anode are applied to the gun from a power supply source (not shown) via a high tension cable 4.
  • the accelerated electrons pass through an electrostatic astigmator 5 comprising four electrodes 5a, 5b, 5c and 5d, and are focused on a target 6 such as Fe or M by a condenser lens 7 suitably energized by a power supply source 8.
  • a control voltage is supplied to the astigmator from a power supply source 10 (see FIG. 2). Electrodes 5a and 5b are maintained at a positive potential and electrodes 5c and 5d at a negative potential.
  • cross section A becomes orientated as shown by cross section B. Further, when the voltage applied to the four electrodes is zero, the electron beam cross section remains unchanged and the X-ray source functions as a point source.
  • the condenser lens 7 comprises two coils 12 and 13 and three pole pieces l4, l5 and 16.
  • the polarities of pole pieces 14 and 16 are arranged so as to be opposite that of pole piece 15.
  • an electrostatic astigmator is used for adjusting the sectional shape of the electron beam.
  • an electromagnetic astigmator in lieu as shown in FIG. 3.
  • four electromagnets 20a, 20b, 20c and 20d replace the four electrodes 5a, 5b, 5c and 5d shown in FIG. 2.
  • the magnets are energized by a power supply 21 via a switch 22, in order to produce a magnetic field, said field serving to control the shape of the electron beam.
  • an electron beam irradiates a specimen 31 placed in the atmosphere so as to cause the specimen to generate an X-ray.
  • the electron beam is produced by an electron gun 32 positioned in a chamber 33 which is connected to a vacuum pump (notshown) via a tube 34.
  • the beam passes through an electrostatic astigmator 35, a nonrotating electromagnetic condenser lens 36 and a nozzle 37 having a small opening 38.
  • the air entering the nozzle 36 through the opening 38 is exhausted by a vacuum pump 40 via a tube 39.
  • the sectional shape of the beam is adjusted by the astigmator 35 and then focused in the neighborhood of the opening 38 by the condenser lens 36.
  • the electronbeam passed through the opening 38 is irradiated on the specimen 31, the resultant impingement causing an X-ray to be generated from the specimen.
  • the generated X-ray is dispersed according to its wavelength and detected by a monochromator comprising slits 41 and 42, a crystal 43 and a detector 44. As a result, the specimen is quantitatively and qualitatively analyzed.
  • An X-ray source for generating an X-ray pattern having a plurality of selectable sectional shapes com- PI'lSIl'lgZ
  • An electron gun for producing an electron beam
  • C. means including an astigmator lens placed between said gun and condenser lens for shaping the electron beam into at least two distinct shapes;
  • An apparatus for generating an Xray pattern having a plurality of selectable sectional shapes comprising:
  • a condenser lens forfocusing said beam so as to pass through thevopening of said nozzle, comprising two coils, first, second and third pole pieces, the polarity of said first and third pole pieces being arranged opposite that of the second such that the electron beam is not substantially rotated;
  • F. means including an astigmator lens placed between said gun and said lens, for varying the sectional shape of the electron beam passed through the opening of said nozzle, such that said beammay irradiate a specimen to generate an Xray relating to the shape of the electron beam.

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)

Abstract

This specification discloses an X-ray source comprising an electron gun, an astigmator, a condenser lens and a target. The astigmator comprises four electrodes to which a voltage is supplied, said voltage determining the sectional shape of the electron beam passed through the astigmator. The electron beam passed through the astigmator is focused on the target by the condenser lens, the resultant impingement causing an X-ray to be generated from the target.

Description

O United States Patent [191 1111 3,732,426
Shimizu 1 1 May 8, 1973 541 X-RAY SOURCE FOR GENERATING AN 3,028,491 4/1962 Schleich ..250 49.5 D X-RAY BEAM HAVING SELECTABLE 2,919,381 12/1959 Glaser .250/495 0 SECTIONAL SH P S 3,376,449 4/1968 Harrison ..250/49.5 C 2,824,232 2/1958 Steigerwald... ..250/49.5 TE 1 l lm'cmorl Toshiaki ShimlZ", y w 2,866,902 12/1958 Nygard .250 49.5 TE
Tokyo, Japan 173 Assigncc: Nihona Denshi Kabushiki Kaisha, Primary Examiner-James Lawrence T k j a Assistant Examiner-Harold A. Dixon W'11" W bb 'l. Filed: J y 30,1971 Attorney 71 1am H e et a 1211 Appl. No.: 167,373 [57] ABSTRACT Foreign Application i rity Data This specification discloses an X-ray source comprising an electron gun, an astigmator, a condenser lens July Japan v and a target. The astigmator comprises four electrodes to which a voltage is supplied, said voltage determin- [52] US. Cl ..250/90, 250/495 D, 313/57 ing the sectional shape of the electron beam passed [51] Int. Cl. ..H01j 37/20 through the astigmator. The electron beam passed [58] Field of Search ..3l3/DIG. 3, 57, 83; through the astigmator is focused on the target by the 250/90 C, D condenser lens, the resultant impingement causing an X-ray to be generated from the target. [56] References Cited 4 Claims, 4 Drawing Figures UNITED STATES PATENTS 2,944,175 7/1960 Taylor ..313/D1G. 3 2,849,634 8/1958 Crowley-Milling. ..313/57 VOWEQ su m m/ I I I I I I I I I I I I I I I I I I I a PATENTED HA 81915 SHEET 2 [IF 2 VACUUM PUMP DETE CTOIZ MONOCHEOMATOR c lzvsrA L M ONOCH EOMATOR TzlEiL X-RAY SOURCE FOR GENERATING AN X-RAY BEAM HAVING SELECTABLE SECTIONAL SHAPES This invention relates generally to an X-ray source and more particularly to an X-ray source capable of generating X-rays having a plurality of sectional shapes.
In X-ray apparatus for the structural analysis of materials, it is necessary to use various kinds of X-ray source dependent upon the nature of the analysis being carried out. In general, the X-ray source comprises an electron gun, a condenser lens and a target. The elec trons emanating from the gun are focused on the target by the condenser lens. The resultant impingement causes an X-ray to be generated from the target. However, when using an X-ray projection pattern camera, for example, a point X-ray source is used. In this case, the incorporated filament is of the hairpin type so as to form a very small circular image of the electron beam on the target. Again, when using a Laue Camera, a line X-ray source is used. In this case, a line filament is incorporated so as to form a long, narrow image of the electron beam on the target.
It will thus be appreciated that a number of X-ray sources are necessary in order to cover a variety of analyses.
Briefly, according to this invention, there is provided a single X-ray source capable of generating a multiplicity of X-rays. This is effected by placing an electrostatic or electromagnetic astigmator between the electron gun and the electromagnetic condenser lens and by varying the voltage or current applied to said astigmator so as to change the shape of the electron image on the target according to the purpose of analysis.
Various other objects and advantages pertaining to this invention will become more readily apparent from the following detailed description read in conjunction with the accompanying drawings in which:
FIG. 1 shows an embodiment of this invention in which an electrostatic astigmator is provided;
FIG. 2 is a diagram of an electrostatic astigmator showing the cross section of the electron beam after passing through the astigmator;
FIG. 3 is a diagram of an electromagnetic astigmator; and,
FIG. 4 shows an apparatus for generating an X-ray according to this invention.
Referring to FIG. 1, an electron gun 1 comprises a hairpin filament 2 and an anode 3. Filament heating current and high voltage for energizing the anode are applied to the gun from a power supply source (not shown) via a high tension cable 4. The accelerated electrons pass through an electrostatic astigmator 5 comprising four electrodes 5a, 5b, 5c and 5d, and are focused on a target 6 such as Fe or M by a condenser lens 7 suitably energized by a power supply source 8. In this arrangement, a control voltage is supplied to the astigmator from a power supply source 10 (see FIG. 2). Electrodes 5a and 5b are maintained at a positive potential and electrodes 5c and 5d at a negative potential. Thus, the electrons passing through the astigmator are attracted towards electrodes 5a and 5b and repelled from electrodes 50 and 5d, a phenomenon which causes the electron beam to become elongated as shown by the cross section A in FIG. 2. Consequently, an electron beam of similar shape, that is to say, long and narrow, impinges on the target 6 forming a replica image and the resultant generated X-ray passes through an Al or Be window 11.
By reversing the polarity of the astigmator electrodes, cross section A becomes orientated as shown by cross section B. Further, when the voltage applied to the four electrodes is zero, the electron beam cross section remains unchanged and the X-ray source functions as a point source.
In this embodiment, the condenser lens 7 comprises two coils 12 and 13 and three pole pieces l4, l5 and 16. In order to prevent the lens from rotating the electron beam and to facilitate spot size adjustment, the polarities of pole pieces 14 and 16 are arranged so as to be opposite that of pole piece 15.
In the above embodiment, an electrostatic astigmator is used for adjusting the sectional shape of the electron beam. However, it is possible to use an electromagnetic astigmator in lieu as shown in FIG. 3. In this case, four electromagnets 20a, 20b, 20c and 20d replace the four electrodes 5a, 5b, 5c and 5d shown in FIG. 2. The magnets are energized by a power supply 21 via a switch 22, in order to produce a magnetic field, said field serving to control the shape of the electron beam.
In the apparatus shown in FIG. 4, an electron beam irradiates a specimen 31 placed in the atmosphere so as to cause the specimen to generate an X-ray. The electron beam is produced by an electron gun 32 positioned in a chamber 33 which is connected to a vacuum pump (notshown) via a tube 34. The beam passes through an electrostatic astigmator 35, a nonrotating electromagnetic condenser lens 36 and a nozzle 37 having a small opening 38. The air entering the nozzle 36 through the opening 38 is exhausted by a vacuum pump 40 via a tube 39. The sectional shape of the beam is adjusted by the astigmator 35 and then focused in the neighborhood of the opening 38 by the condenser lens 36. By so doing, it is possible to reduce the diameter of the opening to an extent whereby the air entering the nozzle through the opening is decreased. The electronbeam passed through the opening 38 is irradiated on the specimen 31, the resultant impingement causing an X-ray to be generated from the specimen. I The generated X-ray is dispersed according to its wavelength and detected by a monochromator comprising slits 41 and 42, a crystal 43 and a detector 44. As a result, the specimen is quantitatively and qualitatively analyzed.
Having thus described the invention with the detail and particularity as required by the Patent Laws, what is desired protected by Letters Patent is set forth in the following claims.
I claim:
1. An X-ray source for generating an X-ray pattern having a plurality of selectable sectional shapes com- PI'lSIl'lgZ A. an electron gun for producing an electron beam;
B. a condenser lens comprising two coils, first,
second and third pole pieces, the polarities of said first and third pole pieces being arranged opposite that of the second, such that the electron beam is not substantially rotated passing through the lens;
C. means including an astigmator lens placed between said gun and condenser lens for shaping the electron beam into at least two distinct shapes;
D. a target on which said beam is focused by said condenser lens, such that a shaped Xray beam emits therefrom relating to the shape of the electron beam impinging thereon.
2. An Xray source according to claim 1 wherein said astigmator comprises four electrodes connected to a power supply source.
3. An Xray source according to claim 1 wherein said astigmator comprises four electromagnets connected to a power supply source.
4. An apparatus for generating an Xray pattern having a plurality of selectable sectional shapes comprising:
A. a vacuum chamber;
B. a nozzle, having a minute opening, said nozzle being connected to said chamber;
C. a vacuum pump for exhausting the air entering the opening of said nozzle;
D. an electron gun for producing an electron beam;
E. a condenser lens forfocusing said beam so as to pass through thevopening of said nozzle, comprising two coils, first, second and third pole pieces, the polarity of said first and third pole pieces being arranged opposite that of the second such that the electron beam is not substantially rotated; and,
F. means including an astigmator lens placed between said gun and said lens, for varying the sectional shape of the electron beam passed through the opening of said nozzle, such that said beammay irradiate a specimen to generate an Xray relating to the shape of the electron beam.

Claims (4)

1. An X-ray source for generating an X-ray pattern having a plurality of selectable sectional shapes comprising: A. an electron gun for producing an electron beam; B. a condenser lens comprising two coils, first, second and third pole pieces, the polarities of said first and third pole pieces being arranged opposite that of the second, such that the electron beam is not substantially rotated passing through the lens; C. means including an astigmator lens placed between said gun and condenser lens for shaping the electron beam into at least two distinct shapes; D. a target on which said beam is focused by said condenser lens, such that a shaped X-ray beam emits therefrom relating to the shape of the electron beam impinging thereon.
2. An X-Ray source according to claim 1 wherein said astigmator comprises four electrodes connected to a power supply source.
3. An X-ray source according to claim 1 wherein said astigmator comprises four electromagnets connected to a power supply source.
4. An apparatus for generating an X-ray pattern having a plurality of selectable sectional shapes comprising: A. a vacuum chamber; B. a nozzle, having a minute opening, said nozzle being connected to said chamber; C. a vacuum pump for exhausting the air entering the opening of said nozzle; D. an electron gun for producing an electron beam; E. a condenser lens for focusing said beam so as to pass through the opening of said nozzle, comprising two coils, first, second and third pole pieces, the polarity of said first and third pole pieces being arranged opposite that of the second such that the electron beam is not substantially rotated; and, F. means including an astigmator lens placed between said gun and said lens, for varying the sectional shape of the electron beam passed through the opening of said nozzle, such that said beam may irradiate a specimen to generate an X-ray relating to the shape of the electron beam.
US00167373A 1970-07-30 1971-07-30 X-ray source for generating an x-ray beam having selectable sectional shapes Expired - Lifetime US3732426A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6686770A JPS5435078B1 (en) 1970-07-30 1970-07-30

Publications (1)

Publication Number Publication Date
US3732426A true US3732426A (en) 1973-05-08

Family

ID=13328226

Family Applications (1)

Application Number Title Priority Date Filing Date
US00167373A Expired - Lifetime US3732426A (en) 1970-07-30 1971-07-30 X-ray source for generating an x-ray beam having selectable sectional shapes

Country Status (5)

Country Link
US (1) US3732426A (en)
JP (1) JPS5435078B1 (en)
DE (1) DE2136460A1 (en)
FR (1) FR2099373A5 (en)
GB (1) GB1354177A (en)

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3962583A (en) * 1974-12-30 1976-06-08 The Machlett Laboratories, Incorporated X-ray tube focusing means
US4344181A (en) * 1978-06-21 1982-08-10 Baecklund Nils J Method and apparatus for measuring the content or quantity of a given element by means of X-ray radiation
EP0150364A2 (en) * 1984-01-19 1985-08-07 Siemens Aktiengesellschaft X-ray diagnostic installation with an X-ray tube
US4675890A (en) * 1982-10-05 1987-06-23 Thomson-Csf X-ray tube for producing a high-efficiency beam and especially a pencil beam
WO1998013853A1 (en) * 1996-09-27 1998-04-02 Bede Scientific Instruments Limited X-ray generator
DE19639920A1 (en) * 1996-09-27 1998-04-30 Siemens Ag Variable focus X-ray tube for diagnostic imaging appts.
WO2000025342A1 (en) * 1998-10-27 2000-05-04 Litton Systems, Inc. X-ray tube providing variable imaging spot size
US20080043920A1 (en) * 2000-10-06 2008-02-21 The University Of North Carolina At Chapel Hill Micro-focus field emission x-ray sources and related methods
CN102884606A (en) * 2010-04-09 2013-01-16 Ge传感与检测技术有限公司 Cathode element for a microfocus x-ray tube
US9748070B1 (en) 2014-09-17 2017-08-29 Bruker Jv Israel Ltd. X-ray tube anode
US11302508B2 (en) 2018-11-08 2022-04-12 Bruker Technologies Ltd. X-ray tube

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4954525B2 (en) * 2005-10-07 2012-06-20 浜松ホトニクス株式会社 X-ray tube
JP7048396B2 (en) 2018-04-12 2022-04-05 浜松ホトニクス株式会社 X-ray tube

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2824232A (en) * 1955-10-29 1958-02-18 Zeiss Carl Method and device for the transmission of high speed radiation, particularly corpuscular radiation, between spaces of different pressure
US2849634A (en) * 1956-07-09 1958-08-26 Vickers Electrical Co Ltd Linear electron accelerators
US2866902A (en) * 1955-07-05 1958-12-30 High Voltage Engineering Corp Method of and apparatus for irradiating matter with high energy electrons
US2919381A (en) * 1956-07-25 1959-12-29 Farrand Optical Co Inc Electron lens
US2944175A (en) * 1959-03-26 1960-07-05 Motorola Inc Television receiver
US3028491A (en) * 1958-06-20 1962-04-03 Zeiss Carl Apparatus for producing and shaping a beam of charged particles
US3376449A (en) * 1967-01-20 1968-04-02 Ion Physics Corp Electrostatic quadrapole lens assembly with transverse intermediate termination elements of resistive material joining together the quadrapole electrodes for preventing beam aberration

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2866902A (en) * 1955-07-05 1958-12-30 High Voltage Engineering Corp Method of and apparatus for irradiating matter with high energy electrons
US2824232A (en) * 1955-10-29 1958-02-18 Zeiss Carl Method and device for the transmission of high speed radiation, particularly corpuscular radiation, between spaces of different pressure
US2849634A (en) * 1956-07-09 1958-08-26 Vickers Electrical Co Ltd Linear electron accelerators
US2919381A (en) * 1956-07-25 1959-12-29 Farrand Optical Co Inc Electron lens
US3028491A (en) * 1958-06-20 1962-04-03 Zeiss Carl Apparatus for producing and shaping a beam of charged particles
US2944175A (en) * 1959-03-26 1960-07-05 Motorola Inc Television receiver
US3376449A (en) * 1967-01-20 1968-04-02 Ion Physics Corp Electrostatic quadrapole lens assembly with transverse intermediate termination elements of resistive material joining together the quadrapole electrodes for preventing beam aberration

Cited By (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3962583A (en) * 1974-12-30 1976-06-08 The Machlett Laboratories, Incorporated X-ray tube focusing means
US4344181A (en) * 1978-06-21 1982-08-10 Baecklund Nils J Method and apparatus for measuring the content or quantity of a given element by means of X-ray radiation
US4675890A (en) * 1982-10-05 1987-06-23 Thomson-Csf X-ray tube for producing a high-efficiency beam and especially a pencil beam
EP0150364A2 (en) * 1984-01-19 1985-08-07 Siemens Aktiengesellschaft X-ray diagnostic installation with an X-ray tube
EP0150364A3 (en) * 1984-01-19 1985-09-04 Siemens Aktiengesellschaft X-ray diagnostic installation with an x-ray tube
DE19639920C2 (en) * 1996-09-27 1999-08-26 Siemens Ag X-ray tube with variable focus
DE19639920A1 (en) * 1996-09-27 1998-04-30 Siemens Ag Variable focus X-ray tube for diagnostic imaging appts.
US5812632A (en) * 1996-09-27 1998-09-22 Siemens Aktiengesellschaft X-ray tube with variable focus
WO1998013853A1 (en) * 1996-09-27 1998-04-02 Bede Scientific Instruments Limited X-ray generator
US6282263B1 (en) 1996-09-27 2001-08-28 Bede Scientific Instruments Limited X-ray generator
WO2000025342A1 (en) * 1998-10-27 2000-05-04 Litton Systems, Inc. X-ray tube providing variable imaging spot size
US6236713B1 (en) 1998-10-27 2001-05-22 Litton Systems, Inc. X-ray tube providing variable imaging spot size
US20080043920A1 (en) * 2000-10-06 2008-02-21 The University Of North Carolina At Chapel Hill Micro-focus field emission x-ray sources and related methods
US7826595B2 (en) * 2000-10-06 2010-11-02 The University Of North Carolina Micro-focus field emission x-ray sources and related methods
CN102884606A (en) * 2010-04-09 2013-01-16 Ge传感与检测技术有限公司 Cathode element for a microfocus x-ray tube
US20130039475A1 (en) * 2010-04-09 2013-02-14 Ge Sensing & Inspection Technologies Gmbh Cathode element for a microfocus x-ray tube
US9601300B2 (en) * 2010-04-09 2017-03-21 Ge Sensing And Inspection Technologies Gmbh Cathode element for a microfocus x-ray tube
US9748070B1 (en) 2014-09-17 2017-08-29 Bruker Jv Israel Ltd. X-ray tube anode
US11302508B2 (en) 2018-11-08 2022-04-12 Bruker Technologies Ltd. X-ray tube

Also Published As

Publication number Publication date
DE2136460A1 (en) 1972-03-09
GB1354177A (en) 1974-06-05
FR2099373A5 (en) 1972-03-10
JPS5435078B1 (en) 1979-10-31

Similar Documents

Publication Publication Date Title
US6259765B1 (en) X-ray tube comprising an electron source with microtips and magnetic guiding means
US3732426A (en) X-ray source for generating an x-ray beam having selectable sectional shapes
US3118050A (en) Electron beam devices and processes
US3517191A (en) Scanning ion microscope with magnetic sector lens to purify the primary ion beam
US2418029A (en) Electron probe analysis employing X-ray spectrography
JP2810797B2 (en) Reflection electron microscope
US3822382A (en) Apparatus for analyzing electron energy
US5045705A (en) Charged particle beam apparatus with charge-up compensation
US3567983A (en) X-ray tube with magnetic focusing means
US3351731A (en) Method and apparatus for treating material with a charged beam
US5286974A (en) Charged particle energy analyzers
US4922097A (en) Potential measurement device
DE69913985D1 (en) X-RAY TUBE WITH VARIABLE PICTURE SIZE
US3219817A (en) Electron emission microscope with means to expose the specimen to ion and electron beams
US3221133A (en) Electron microscope with means for treating and observing specimens
US3534385A (en) Process and apparatus for micro-machining and treatment of materials
US3946268A (en) Field emission gun improvement
US3733483A (en) Electron spectroscopy
US4713833A (en) X-ray source apparatus
US2405306A (en) Electronic microanalyzer monitoring
GB918297A (en) Improvements in electron microscopes
JPS63216256A (en) Charged particle beam device
US3120610A (en) Apparatus for producing a high intensity electron stream used to excite characteristic radiation of elements
JPS6415604A (en) Measuring apparatus for length by electron beam
US3385949A (en) Ion gun apparatus for treatment of surfaces with beams of very small size