US20150306598A1 - DEP Force Control And Electrowetting Control In Different Sections Of The Same Microfluidic Apparatus - Google Patents
DEP Force Control And Electrowetting Control In Different Sections Of The Same Microfluidic Apparatus Download PDFInfo
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- US20150306598A1 US20150306598A1 US14/262,140 US201414262140A US2015306598A1 US 20150306598 A1 US20150306598 A1 US 20150306598A1 US 201414262140 A US201414262140 A US 201414262140A US 2015306598 A1 US2015306598 A1 US 2015306598A1
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Definitions
- Micro-objects such as biological cells
- micro-objects suspended in a liquid in a microfluidic apparatus can be sorted, selected, and moved in the microfluidic apparatus.
- the liquid can also be manipulated in the device.
- Embodiments of the present invention are directed to improvements in selectively generating net DEP forces in a first section of a microfluidic apparatus and changing wetting properties of an electrowetting surface in another section of the microfluidic apparatus.
- an apparatus can include an enclosure, a dielectrophoresis (DEP) configuration, and an electrowetting (EW) configuration.
- the enclosure can comprise a first surface and an electrowetting surface.
- the DEP configuration can be configured to selectively induce net DEP forces in a first liquid medium disposed on the first surface, and the EW configuration can be configured to selectively change a wetting property of the electrowetting surface.
- a process of operating a fluidic apparatus can include inducing a net DEP force on a micro-object in a first liquid medium on a first surface in a first section of the apparatus.
- the process can also include changing a wetting property of a region of an electrowetting surface on which a second liquid medium is disposed in a second section of the apparatus.
- an apparatus can comprise an enclosure and a boundary.
- the enclosure can be configured to hold a first liquid medium disposed on a first surface in a first section of the enclosure and a second liquid medium disposed on an electrowetting surface in a second section of the enclosure, and the boundary can be between the first section and the second section of the enclosure.
- the first section of the enclosure can comprise a DEP configuration configured to induce selectively net DEP forces in the first liquid medium sufficiently to capture and move, relative to the first surface, micro-objects in the first liquid medium in the first section of the enclosure while connected to a biasing device.
- the second section of the enclosure can comprise an EW configuration configured to change selectively a wetting characteristic of regions of the electrowetting surface sufficiently to move a liquid droplet within the second medium in the second section of the enclosure while connected to a biasing device.
- a process of operating a fluidic apparatus can include drawing a droplet of a first liquid medium disposed on a first surface in a first section of an enclosure into a second medium disposed on an electrowetting surface in a second section of the enclosure.
- the foregoing drawing can include changing an electrowetting characteristic of a region of the electrowetting surface at a boundary with the first surface to induce a force at the region on the droplet to draw the droplet across the boundary and into the second liquid medium.
- FIG. 1A is a perspective view of a microfluidic apparatus comprising sections for holding different liquid medium, inducing net dielectrophoresis (DEP) forces in one section and controlling an electrowetting property of a surface of another of the sections according to some embodiments of the invention.
- DEP dielectrophoresis
- FIG. 1B is a cross-sectional side view of the microfluidic apparatus of FIG. 1A .
- FIG. 1C is a top view of the microfluidic apparatus of FIG. 1A with the cover removed.
- FIG. 2 is a cross-sectional side view of the micro-fluidic device of FIG. 1A with liquid media in its sections and connected to biasing devices according to some embodiments of the invention.
- FIG. 3 illustrates an example of a DEP configuration and a controllable electrowetting (EW) configuration of the enclosure of the device of FIG. 1A according to some embodiments of the invention.
- EW electrowetting
- FIG. 4 is an example of the electrode activation substrate of FIG. 3 configured as photoconductive material according to some embodiments of the invention.
- FIG. 5 is another example of the electrode activation substrate of FIG. 3 configured as a circuit substrate according to some embodiments of the invention.
- FIG. 6 illustrates another example of a DEP configuration and an EW configuration of the enclosure of the device of FIG. 1A according to some embodiments of the invention.
- FIG. 7 is yet another example of a DEP configuration and an EW configuration of the enclosure of the device of FIG. 1A according to some embodiments of the invention.
- FIG. 8 is a cross-sectional side view of a microfluidic apparatus with multiple stacked sections according to some embodiments of the invention.
- FIG. 9 illustrates another example of an embodiment of a microfluidic apparatus with multiple stacked sections according to some embodiments of the invention.
- FIG. 10A is a perspective view of an example of a microfluidic apparatus comprising a DEP configuration for manipulating micro-objects in a first section of the device and an EW configuration for manipulating droplets of a liquid medium on an electrowetting surface in a second section of the device according to some embodiments of the invention.
- FIG. 10B is a side cross-sectional view of the microfluidic apparatus of FIG. 10A .
- FIG. 10C is a top view of the microfluidic apparatus of FIG. 10A with the cover removed.
- FIG. 11 is an example of a process for moving a micro-object from a first liquid medium in a first section of a microfluidic apparatus into a second liquid medium in a second section of the microfluidic apparatus according to some embodiments of the invention.
- FIGS. 12A-21 show examples of performance of the process of FIG. 11 according to some embodiments of the invention.
- FIG. 22 is an example of a process for culturing biological micro-objects in a microfluidic apparatus configured to hold multiple different liquid media according to some embodiments of the invention.
- FIGS. 23-26 illustrate an example of performance of the process of FIG. 22 according to some embodiments of the invention.
- FIG. 27 shows an example of a process that can be performed on the microfluidic apparatus of FIGS. 1A-1C or the microfluidic apparatus of FIGS. 10A-10C according to some embodiments of the invention.
- directions e.g., above, below, top, bottom, side, up, down, under, over, upper, lower, horizontal, vertical, “x,” “y,” “z,” etc.
- directions are relative and provided solely by way of example and for ease of illustration and discussion and not by way of limitation.
- elements e.g., elements a, b, c
- such reference is intended to include any one of the listed elements by itself, any combination of less than all of the listed elements, and/or a combination of all of the listed elements.
- substantially means sufficient to work for the intended purpose.
- the term “substantially” thus allows for minor, insignificant variations from an absolute or perfect state, dimension, measurement, result, or the like such as would be expected by a person of ordinary skill in the field but that do not appreciably affect overall performance.
- “substantially” means within ten percent.
- the term “ones” means more than one.
- micro-object can encompass one or more of the following: inanimate micro-objects such as micro-particles, micro-beads, micro-wires, and the like; biological micro-objects such as cells (e.g., proteins, embryos, plasmids, oocytes, sperms, hydridomas, and the like); and/or a combination of inanimate micro-objects and biological micro-objects (e.g., micro-beads attached to cells).
- inanimate micro-objects such as micro-particles, micro-beads, micro-wires, and the like
- biological micro-objects such as cells (e.g., proteins, embryos, plasmids, oocytes, sperms, hydridomas, and the like)
- cells e.g., proteins, embryos, plasmids, oocytes, sperms, hydridomas, and the like
- a “fluidic circuit” means one or more fluidic structures (e.g., chambers, channels, holding pens, reservoirs, or the like), which can be interconnected.
- a “fluidic circuit frame” means one or more walls that define all or part of a fluidic circuit.
- a microfluidic apparatus can comprise a dielectrophoresis (DEP) configured section for holding a liquid medium and selectively inducing net DEP forces in the liquid medium.
- the microfluidic apparatus can also comprise an electrowetting (EW) configured section for holding another liquid medium on an electrowetting surface and selectively changing a wetting property of the electrowetting surface.
- FIGS. 1A-1C illustrate an example of such a microfluidic apparatus 100 .
- FIG. 1A also illustrates examples of control equipment 132 for controlling operation of the apparatus 100 .
- the apparatus 100 can comprise an enclosure 102 , which can comprise a plurality (two are shown but there can be more) of sections 122 , 124 each configured to hold a liquid medium (not shown in FIGS. 1A-1C but depicted as 212 , 214 in FIG. 2 ).
- the first section 122 can comprise a first surface 182 and be further configured to selectively generate net DEP forces on micro-objects (not shown) in a liquid medium on the first surface 182 .
- the first section 122 is thus referred to hereinafter as a DEP configured section or a DEP configuration 122 of the enclosure 102 .
- the second section 124 can comprise an electrowetting surface 184 and can further be configured to selectively change a wetting property of the electrowetting surface 184 .
- the second section 124 is thus referred to hereinafter as an electrowetting (EW) configured section or an EW configuration 124 of the enclosure 102 .
- the enclosure 102 is depicted as comprising a structure 104 (e.g., a base), a fluidic circuit frame 108 , and a cover 110 .
- the fluidic circuit frame 108 can be disposed on an inner surface 106 of the structure 104
- the cover 110 can be disposed over the fluidic circuit frame 108 .
- the fluidic circuit frame 108 can define a fluidic circuit comprising, for example, interconnected fluidic chambers, channels, pens, reservoirs, and the like.
- the structure 104 is shown in FIGS. 1A and 1B as comprising the bottom of the apparatus 100 and the cover 110 is illustrated as the top, the structure 104 can be the top and the cover 110 can be the bottom of the apparatus 100 .
- the fluidic circuit frame 108 defines a chamber 112 .
- a first section 172 of the chamber 112 corresponding to a DEP configured section 122 is hereinafter referred to as the first chamber section 172
- a second section of the chamber 112 corresponding to an EW section 124 of the enclosure 102 is hereinafter referred to as the second chamber section 174 .
- the chamber 112 can include one or more inlets 114 and one or more outlets 116 .
- the enclosure 102 can comprise a physical barrier 128 between the first chamber section 172 and the second chamber section 174 , and such a physical barrier 128 can comprise one or more passages 130 from the first chamber section 172 of the enclosure 102 to the second chamber section 174 .
- a physical barrier 128 is shown along only a portion of a boundary 126 between the first chamber section 172 and the second chamber section 174 .
- the physical barrier 128 can extend the entirety of the boundary 126 or be located on a different portion of the boundary 126 .
- the physical barrier 128 can be part of the fluidic circuit frame 108 (as shown), or the physical barrier 128 can be structurally distinct from the fluidic circuit frame 108 . Although one physical barrier 128 is shown, there can be more than one such physical barrier 128 disposed on the boundary 126 .
- the structure 104 can comprise, for example, a substrate or a plurality of interconnected substrates.
- the fluidic circuit frame 108 can comprise a flexible material (e.g. rubber, plastic, an elastomer, silicone, polydimethylsioxane (“PDMS”), or the like), which can be gas permeable.
- the cover 110 can be an integral part of the fluidic circuit frame 108 , or the cover 110 can be a structurally distinct element (as illustrated in FIGS. 1A-1C ).
- the cover 110 can comprise the same or different materials than the fluidic circuit frame 108 . Regardless, the cover 110 and/or the structure 104 can be transparent to light.
- the DEP configuration 122 of the enclosure 102 can comprise a biasing electrode 156 , a DEP section 152 of the structure 104 , and the first surface 182 , all of which can be part of the structure 104 .
- the DEP configuration 122 can also include a biasing electrode 166 , which can be part of the cover 110 .
- the foregoing can be located with respect to each other as illustrated in FIG. 1B .
- the first surface 182 can be an outer surface of the DEP section 152 or an outer surface of one or more materials (e.g., one or more coatings) (not shown) disposed on the DEP section 152 .
- the EW configuration 124 of the enclosure 102 can comprise a biasing electrode 158 , an EW section 154 of the structure 104 , a dielectric layer 160 , and the electrowetting surface 184 , all of which can be part of the structure 104 .
- the EW configuration 124 can also include a hydrophobic surface 165 , a layer 160 (e.g., a dielectric material), and a biasing electrode 168 , all of which can be part of the cover 110 .
- the foregoing can be located with respect to each other as shown in FIG. 1B .
- the electrowetting surface 184 which can be hydrophobic, can be an outer surface of the dielectric layer 160 or an outer surface of one or more materials (not shown) disposed on the dielectric layer 160 .
- the hydrophobic surface 165 can be an outer surface of the layer 164 or an outer surface of one or more materials (not shown) disposed on the layer 164 .
- an electrical biasing device 118 can be connected to the apparatus 100 .
- the electrical biasing device 118 can, for example, comprise one or more voltage or current sources.
- examples of the control equipment include a master controller 134 , a DEP module 142 for controlling the DEP configuration 122 of the enclosure 102 , and an EW module 144 for controlling the EW configuration 124 of the enclosure 102 .
- the control equipment 132 can also include other modules 140 for controlling, monitoring, or performing other functions with respect to the apparatus 100 .
- the master controller 134 can comprise a control module 136 and a digital memory 138 .
- the control module 136 can comprise, for example, a digital processor configured to operate in accordance with machine executable instructions (e.g., software, firmware, microcode, or the like) stored in the memory 138 .
- the control module 136 can comprise hardwired digital circuitry and/or analog circuitry.
- the DEP module 142 , EW module 144 , and/or the other modules 140 can be similarly configured.
- functions, processes, acts, actions, or steps of a process discussed herein as being performed with respect to the apparatus 100 or any other microfluidic apparatus can be performed by one or more of the master controller 134 , DEP module 142 , EW module 144 , or other modules 140 configured as discussed above.
- FIG. 2 illustrates an example configuration of the apparatus 100 .
- a first liquid medium 212 can be disposed on the first surface 182 in the first chamber section 172
- a second liquid medium 214 can be disposed on the electrowetting surface 184 in the second chamber section 174 .
- the first liquid medium 212 and the second liquid medium 214 can be different mediums.
- the second liquid medium 214 can be immiscible with respect to the first liquid medium 212 .
- the first liquid medium 212 can be, for example, an aqueous medium (e.g., water), and the second liquid medium 214 can be immiscible in an aqueous medium.
- the second liquid medium 214 can include oil based media.
- suitable oils include gas permeable oils such as fluorinated oils. Fluorocarbon based oils are also examples of suitable oils.
- a first biasing device 202 can be connected to the biasing electrodes 156 , 166 of the DEP configuration 122 of the enclosure 102 , and a second biasing device 204 can be connected to the biasing electrodes 158 , 168 of the EW configuration 124 of the enclosure 102 .
- the first biasing device 202 can be, for example, an alternating current (AC) voltage or current source, and the second biasing device 204 can similarly be an AC voltage or current source.
- a switch 206 can selectively connect the first biasing device 202 to and disconnect the first biasing device 202 from the DEP configuration 122 .
- Another switch 208 can similarly connect the second biasing device 204 to and disconnect the second biasing device 204 from the EW configuration 124 .
- the biasing devices 202 , 204 and switches 206 , 208 can be part of the biasing device 118 of FIG. 1A .
- the DEP section 152 of the structure 104 can be configured to have a relatively high electrical impedance (i.e., low electrical conductivity) between the first medium 212 and the biasing electrode 156 except when an electrode 222 at the first surface 182 is activated.
- the DEP section 152 can be an example of an electrode activation substrate.
- Activating the electrode 222 can create a relatively low impedance (i.e., high conductivity) path 252 from the electrode 222 to the biasing electrode 156 . While the electrode 222 is deactivated, the majority of the voltage drop due to the first biasing device 202 from the DEP biasing electrode 166 to the DEP biasing electrode 156 can be across the DEP section 152 .
- the electrode 222 is activated creating the relatively low impedance path 252 , however, the majority of the voltage drop in the vicinity of the path 252 can be across the first medium 222 , which can create a net DEP force F in the first medium 212 in the vicinity of the activated electrode 222 .
- the DEP force F can attract or repeal a nearby micro-object 228 in the first medium 212 .
- Many electrodes like electrode 222 can be selectively activated and deactivated over some, most, or the entirety of the first surface 182 .
- one or more micro-objects 228 in the first medium 212 of the DEP section 152 of the enclosure 102 can be selected (e.g., captured) and moved in the medium 212 .
- Equipment 132 can control activation and deactivation of such electrodes (e.g., 222 ).
- such electrodes can be fixed or virtual.
- the EW section of the structure 104 can similarly be configured to have a relatively high electrical impedance (i.e., low electrical conductivity) except when an electrode 232 at the electrowetting surface 184 is activated.
- the EW section 154 can also be an example of an electrode activation substrate.
- Activating such an electrode 232 can create a relatively low impedance (i.e., high conductivity) path 254 from the dielectric layer 232 to the EW biasing electrode 158 .
- the voltage drop due to the second biasing device 204 from the EW biasing electrode 168 to the EW biasing electrode 158 can be greater across the EW section 154 than across the dielectric layer 160 .
- the electrode 232 is activated creating the relatively low impedance path 254 , however, the voltage drop across the EW section 154 can become less than the voltage drop across the dielectric layer 160 , which can change a wetting property of the electrowetting surface 184 in the vicinity of the activated electrode 232 .
- the electrowetting surface 184 can be hydrophobic.
- the change in the wetting property can be to reduce the hydrophobic level of electrowetting surface 184 in the vicinity of the activated electrode 232 .
- a region of the electrowetting surface 184 in the vicinity of the activated electrode 232 can be changed from a first level of hydrophobicity to second level of hydrophobicity, which can be less than the first level.
- a region of the electrowetting surface 184 in the vicinity of the activated electrode 232 can be changed from hydrophobic to hydrophilic.
- Electrodes like electrode 232 can be selectively activated and deactivated over some, most, or the entirety of the electrowetting surface 184 .
- Equipment 132 (see FIG. 1A ) can control activation and deactivation of such electrodes (e.g., 232 ).
- such electrodes (like 232 ) can be fixed or virtual.
- FIGS. 3-7 illustrate examples of the DEP configuration 122 and the EW configuration 124 of the enclosure 102 .
- the structure 104 of the enclosure 102 can comprise a layer 352 of dielectric material, an electrode activation substrate 362 , and a biasing electrode 372 .
- the first surface 182 can be a surface of the electrode activation substrate 362
- the electrowetting surface 184 can be an outer surface of the dielectric layer 352 , which can be hydrophobic.
- the cover 110 can comprise a DEP biasing electrode 312 and an EW biasing electrode 314 .
- the cover 110 can also include a layer 322 of electrically insulating material, which can extend across the DEP section 122 and the EW section 124 as illustrated.
- layer 322 is disposed in the EW section 124 but does not extend into the DEP section 122 , and of course, the layer 322 need not be present in some embodiments.
- the hydrophobic surface 165 can be an outer surface of the layer 322 , which can be hydrophobic.
- the DEP biasing device 202 can be connected to the DEP biasing electrode 312 and the biasing electrode 372
- the EW biasing device 204 can be connected to the EW biasing electrode 314 and the biasing electrode 372 .
- each of the dielectric layer 352 , the electrode activation substrate 362 , and the biasing electrode 372 can be a continuous layer or substrate that extends across both the DEP section 172 and the EW section 174 of the chamber 112 .
- each of the dielectric layer 352 , the electrode activation substrate 362 , and the biasing electrode 372 can be a continuous layer or substrate that extends substantially the entirety of the structure 104 .
- the electrically insulating layer 322 of the cover 110 can also be a continuous layer that extends through both the DEP section 172 and the EW section 174 of the chamber 112 .
- the DEP biasing electrode 312 and the EW biasing electrode 314 of the cover 110 can alternatively be a continuous biasing electrode like the biasing electrode 372 .
- any of the insulating layer 322 , the dielectric layer 352 , the electrode activation substrate 362 , and/or the biasing electrode 372 can be two distinct structures each corresponding to one but not the other of the DEP section 172 or the EW section 174 as the DEP biasing electrode 312 and EW biasing electrode 314 are depicted in FIG. 3 .
- the insulating layer 322 can be disposed only on the biasing electrode 314 in the EW section 124 but not on the biasing electrode 312 in the DEP section 122 .
- the DEP biasing electrode 312 is an example of the electrode 166 in FIG. 2 .
- the portion of the electrode 372 to the left of the boundary 126 in FIG. 3 is an example of the electrode 156 in FIG. 2
- the portion of the electrode activation substrate 362 to the left of the boundary 126 is an example of the DEP section 152 in FIG. 2 .
- the EW biasing electrode 314 in FIG. 3 is an example of the electrode 168 in FIG. 2 .
- the portion of the electrode activation substrate 362 to the right of the boundary 126 in FIG. 3 is an example of the EW section 154 in FIG. 2 ;
- the portion of the dielectric layer 352 in FIG. 3 to the right of the boundary 126 is an example of layer 160 in FIG. 2 ;
- the portion of the insulating layer 322 in FIG. 3 to the right of the boundary 126 is an example of the layer 164 in FIG. 2 .
- the EW section 154 but not the DEP section 152 of the structure 104 is illustrated as comprising a dielectric layer 160
- the example shown in FIG. 3 shows the dielectric layer 352 extending across both the DEP configuration 122 and the EW configuration 124 of the enclosure 102
- the thickness t of the dielectric layer 352 can be sufficiently thin that a DEP electrode like 222 (see FIG. 2 ) activated at an outer surface 380 of the electrode activation substrate 362 (e.g., at the region 412 in FIG. 4 or the region 512 in FIG. 5 ) can effectively form an electrical connection through the dielectric layer 352 with the first medium 212 in the first chamber section 172 of the enclosure 104 .
- the DEP biasing device 202 can be operated such that the capacitive effect of the portion of the dielectric layer 352 to the left of the boundary 126 in FIG. 3 is effectively shorted, and the EW biasing device 204 can be operated such that the capacitive effect of the portion of the dielectric layer 352 to the right of the boundary 126 is not shorted.
- the portion of the dielectric layer 352 to the left of the boundary 126 in FIG. 3 can form a first effective capacitor (not shown) between the liquid medium 212 in the first chamber section 172 and any relatively high conductivity region (e.g., like an electrode 222 in FIG. 2 ) formed at the outer surface 380 of the electrode activation substrate 362 .
- the portion of the dielectric layer 352 to the right of the boundary 126 in FIG. 3 can form a second effective capacitor (not shown) between the liquid medium 214 in the second chamber section 174 and any relatively high conductivity region (e.g., like an electrode 232 ) formed at the outer surface 380 of the electrode activation substrate 362 .
- the DEP biasing device 202 can be operated at a frequency f PM that is sufficiently high to effectively short the first effective capacitor (not shown) and thus effectively eliminate the capacitive effect of the portion of the dielectric layer 352 to the left of the boundary 126 in FIG. 3 .
- the EW biasing device 204 can be operated at a lower frequency f DM , which can be a frequency at which the capacitive effect of the second effective capacitor (not shown) is significant.
- the apparatus 100 can be operated in a DEP mode in which, for example, the switch 206 is closed connecting the DEP biasing device 202 to the biasing electrodes 312 , 372 but the switch 208 is open disconnecting the EW biasing device 204 from the biasing electrodes 314 , 372 .
- the apparatus 100 can similarly be operated in an EW mode in which the switch 206 is open but the switch 208 is closed.
- the equipment 132 (see FIG. 1A ) can control the switches 206 , 208 .
- the electrode activation substrate 362 can be configured such that the electrodes 222 , 232 (see FIG. 2 ) are virtual electrodes and/or fixed electrodes.
- FIG. 4 illustrates an example in which the electrode activation substrate 362 comprises photoconductive material 462 , and the electrodes 222 , 232 are virtual.
- FIG. 5 shows an example in which the electrode activation substrate 362 comprises a circuit substrate 562 , and the electrodes 222 , 232 are fixed.
- the electrode activation substrate 362 can comprise photoconductive material 462 , which can be a material that has a relatively high electrical impedance except when exposed directly to light.
- photoconductive material 462 can be a material that has a relatively high electrical impedance except when exposed directly to light.
- a relatively high electrically conductive path 402 is formed at the region 412 through the photoconductive material 462 to the electrode 372 .
- the conductive path 402 corresponds to the path 252 in FIG. 2 , and the light 410 thus activates an electrode 222 at the region 412 .
- light 420 directed onto a relatively small region 414 of the EW section 154 of the structure 104 can similarly create a relatively high electrically conductive path 404 at the region 414 through the photoconductive material 462 to the electrode 372 .
- the conductive path 404 corresponds to the path 254 in FIG. 2 , and the light 420 thus activates an electrode 232 at the region 412 .
- Electrodes like electrode 222 can be activated in any desired pattern anywhere on the photoconductive material 462 by directing light 410 in the desired pattern onto the photoconductive material 462 . Such electrodes 222 can be deactivated by removing the light 410 . Electrodes like electrodes 232 can similarly be activated and deactivated in any desired pattern anywhere on the photoconductive material 462 in accordance with a pattern of the light 414 . The electrodes 222 , 232 are thus virtual electrodes.
- the DEP module 142 and/or the master controller 134 can control the light source to direct changing patterns of light into the apparatus 100 to selectively activate and deactivate such electrodes 222 , 232 anywhere on the photoconductive material 462 .
- the electrode activation substrate 362 can comprise a circuit substrate 562 , which can comprise a base material that has a relatively high electrical impedance but includes circuits for making relatively high conductive electrical connections through the substrate.
- a DEP electrode circuit 502 in the DEP section 152 of the structure 104 can comprise a switch 522 that provides a high conductivity electrical connection (corresponding to the path 252 in FIG. 2 ) from a relatively small fixed region 512 through the substrate 562 to the biasing electrode 372 .
- the switch 522 can be selectively opened and closed to thereby selectively create a high impedance path from the region 512 to the biasing electrode 372 or a high conductively path.
- FIG. 1 the example shown in FIG.
- the switch 522 is controlled by a photo element 532 , which can open and close the switch 522 in response to a directed light beam 410 .
- the switch 522 can be controlled by an external control module (e.g., the DEP module 142 of FIG. 1A ) by a control input (not shown).
- DEP electrode circuits like circuit 502 can be provided throughout the DEP section 152 of the structure 104 , and a pattern of fixed electrodes like 222 can thus be provided through the DEP section 152 .
- Such fixed electrodes 222 can be activated and deactivated with light 410 or through external control.
- the DEP module 142 of FIG. 1A can comprise a light source (not shown), and the DEP module 142 and/or the master controller 134 can control the light source to direct changing patterns of light 410 into the apparatus 100 to selectively activate and deactivate such electrodes 222 .
- the DEP module 142 and/or the master controller 134 can selectively control activation and deactivation of such electrodes 222 in changing patterns.
- the EW section 154 of the structure 104 can include similar EW electrode circuits 504 .
- an EW electrode circuit 504 in the EW section 154 of the structure 104 can comprise a switch 524 that provides a high conductivity electrical connection (corresponding to the path 254 in FIG. 2 ) from a relatively small fixed region 514 through the substrate 562 to the biasing electrode 372 .
- the switch 524 can be selectively opened and closed to thereby selectively create a high impedance path from the region 514 to the biasing electrode 372 or a high conductively path.
- the switch 524 is controlled by a photo element 524 , which can open and close the switch 524 in response to a directed light beam 420 .
- the switch 524 can be controlled by an external control module (e.g., the EW module 144 of FIG. 1A ) by a control input (not shown).
- EW electrode circuits like circuit 504 can be provided throughout the EW section 154 of the structure 104 , and a pattern of fixed electrodes like 232 can thus be provided throughout the EW section 154 .
- Such electrodes 232 can be activated and deactivated with light 412 or through external control.
- the EW module 144 of FIG. 1A can comprise a light source (not shown), and the EW module 144 and/or the master controller 134 can control the light source to direct changing patterns of light 420 into the apparatus 100 to selectively activate and deactivate such electrodes 232 .
- the EW module 144 and/or the master controller 134 can selectively control activation and deactivation of such electrodes 232 in changing patterns.
- FIGS. 6 and 7 like FIG. 3 , illustrate example configurations of the DEP configuration 122 and EW configuration 124 of the enclosure 102 .
- the configuration illustrated in FIG. 6 is similar to FIG. 3 except that a dielectric layer 652 replaces the dielectric layer 352 .
- the dielectric layer 652 can form the electrowetting surface 184 of the second chamber section 174 but not the first surface 182 of the first chamber section 172 . (See FIGS. 1A-2 .)
- the dielectric layer 652 is part of the EW configuration 124 of the enclosure 104 but not the DEP configuration 122 . Because the dielectric layer 652 does not extend across the first surface 182 of the DEP configuration 122 , the thickness t of the dielectric layer 652 can be greater than the thickness t of the dielectric layer 352 in FIG. 2 . Otherwise, the dielectric layer 652 can be like and can comprise the same materials as the dielectric layer 352 .
- FIG. 7 The configuration of FIG. 7 is similar to FIG. 6 except the configuration of FIG. 7 includes an additional dielectric layer 752 between the dielectric layer 652 and the electrode activation substrate 362 .
- the dielectric layer 652 and the dielectric layer 752 can be part of the EW configuration 124 of the enclosure 104 , but those layers are not part of the DEP configuration 122 .
- a biasing electrode (not shown) can be located in the EW section 124 between the additional dielectric layer 752 and the portion of the electrode activation substrate 362 that is in the EW section 124 .
- the biasing device 204 (see FIG. 2 ) can be connected to the portion of the biasing electrode 312 (which can be bifurcated and thus comprise a portion in the DEP section 122 and a separate electrically isolated portion in the EW section 124 ) that is to the right of the boundary 126 in FIG. 7 and the biasing electrode (not shown) between the additional dielectric layer 752 and the portion of the electrode activation substrate 362 in the EW section 124 rather than to the biasing electrode 372 rather than the electrode 372 .
- FIGS. 1A-1C show the first chamber section 172 and the second section 172 of the enclosure 104 side-by-side (e.g., substantially in a same plane).
- the foregoing, however, is merely an example, and other configurations are possible.
- FIG. 8 illustrates an example in which such sections are stacked.
- FIG. 8 illustrates a microfluidic apparatus 800 that can comprise a first sub-enclosure 822 stacked on a second sub-enclosure 824 .
- each sub-enclosure 822 , 824 can comprise a structure 804 , a fluidic circuit frame 808 , and a cover 810 each of which can be the same as or similar to the structure 104 , fluidic circuit frame 108 , and cover 110 of FIGS. 1A-1C .
- two stacked sub-enclosures 822 , 824 are shown in FIG. 8 , there can be more such stacked sub-enclosures.
- Either or all of the sub-enclosures 822 , 824 can be configured as a DEP configured device and/or an EW configured device. That is, although the first sub-enclosure 822 is illustrated as comprising a DEP configuration 122 and the second sub-enclosure 824 is shown as comprising an EW configuration 124 , both sub-enclosures 822 , 824 can comprise a DEP configuration (e.g., like 122 ) or an EW configuration (e.g., like 124 ).
- one or both of the sub-enclosures 822 , 824 can be configured in part as a DEP configuration and in part as an EW configuration (e.g., one or both of the sub-enclosures 822 , 824 can be configured like the apparatus 100 shown in FIGS. 1A-2 ).
- the first enclosure 822 can comprise a DEP configuration 122
- the second enclosure 824 can comprise an EW configuration 124 as discussed above.
- the structure 804 a of the first enclosure 822 can comprise the DEP section 152 including the first surface 182 and the cover 810 a can comprise the biasing electrode 166 as discussed above.
- the structure 804 b of the second enclosure 822 can comprise the EW section 154 , the dielectric layer 160 , and the electrowetting surface 184
- the cover 810 b can comprise the hydrophobic surface 165 , the layer 164 , and the biasing electrode 168 as discussed above.
- the first sub-enclosure 822 can define a first section 872 for holding a liquid medium (e.g., the first liquid medium 212 shown in FIG. 2 ), and the DEP configuration 122 can select and manipulate micro-objects (e.g., like 228 in FIG. 2 ) in such a liquid medium in the first section 872 .
- the second sub-enclosure 824 can similarly define a second section 874 for holding a liquid medium (e.g., the second liquid medium 214 shown in FIG. 2 ), and the EW configuration 124 can manipulate a liquid medium on the electrowetting surface 184 , as discussed above, in the second section 874 .
- passages 830 there can be one or more passages 830 (one is shown but there can be more) from the first section 872 to the second section 874 .
- the sidewalls of such a passage 830 can be hydrophilic in which case an aqueous medium in the first section 872 can naturally enter and fill the passage 830 .
- the sidewalls of the passage 830 can be hydrophobic.
- FIG. 9 illustrates another example of a microfluidic apparatus 900 that can be generally similar to the device 800 except that the positions of the biasing electrode 168 , layer 164 , and hydrophobic surface 165 , on one hand, and the electrowetting surface 184 , dielectric layer 160 , EW section 154 , and biasing electrode 158 are different (e.g., opposite) than the positions shown in FIG. 8 .
- FIGS. 10A-10C illustrate an example of a microfluidic apparatus 1000 comprising multiple fluidic channels 1012 , 1014 (two are shown but there can be more) and multiple holding pens 1016 (three are shown but there can be fewer or more) each of which can be connected to one or more of the channels 1012 , 1014 .
- the apparatus 1000 can be generally similar to the apparatus 100 , and like numbered elements in FIGS. 10A-10C can be the same as in FIGS. 1A-1C .
- the fluidic circuit frame 1008 of the apparatus 1000 can define, with the structure 104 and the cover 110 , a first channel 1012 , a second channel 1014 , and holding pens 1016 , which as shown, can be connected to the channels 1012 , 1014 . Otherwise, the fluidic circuit frame 1008 can be the same as or similar to the fluidic circuit frame 108 .
- the first channel 1012 and the pens 1016 can be configured to hold a first liquid medium (not shown but can be the first liquid medium 212 of FIG. 2 ), and the structure 104 and cover 110 can include the DEP configuration 122 for selecting and manipulating micro-objects in the first liquid medium.
- the structure 104 can comprise the biasing electrode 156 , DEP section 152 , and first surface 182
- the cover 110 can comprise the biasing electrode 166 , all of which can be as discussed above.
- the structure 104 can also comprise the biasing electrode 158 , EW section 154 , dielectric layer 160 , and electrowetting surface 184
- the cover 110 can also comprise the hydrophobic surface 165 , layer 164 , and biasing electrode 168 , all of which can be as discussed above.
- the DEP configuration 122 can be for selecting and manipulating micro-objects (e.g., 228 ) in a first liquid medium (e.g., 212 ) on the first surface 182 in the first channel 1012 and pens 1016
- the EW configuration 124 can be for manipulating a liquid medium (not shown) on the electrowetting surface 184 in the second channel 1014 .
- the boundary 1026 can be the same as the boundary 126 in FIGS. 1A-1C : the boundary 1026 is the boundary between the first surface 182 and the electrowetting surface 184 , which can be the boundary between a first section (comparable to the first chamber section 172 of FIGS. 1A-1C ) comprising the first channel 1012 and the pens 1016 and a second section (comparable to the second chamber section 174 of FIGS. 1A-1C ) comprising the second channel 1014 .
- a first section comprising the first chamber section 172 of FIGS. 1A-1C
- the second section comprising the second channel 1014 .
- the equipment 132 and biasing device 118 (e.g., comprising the biasing devices 202 , 204 and switches 206 , 208 of FIG. 2 ) of FIGS. 1A-1C can bias, control, and provide miscellaneous functions to the devices 800 , 900 , and 1000 of FIGS. 8-10C .
- FIG. 11 is an example of a process 1100 for moving a micro-object from a first liquid medium in a microfluidic apparatus to a second liquid medium.
- the process 1100 is discussed below with respect to the apparatus 100 of FIGS. 1A-1C and the device 800 of FIG. 8 .
- the process 1100 is not so limited, however, but can be performed on other microfluidic apparatuses such as the device 900 of FIG. 9 , the apparatus 1000 of FIGS. 10A-10C , or other such devices.
- the process 1100 can select a micro-object in a DEP configured portion of a microfluidic apparatus.
- FIGS. 12A-15 illustrates examples.
- FIG. 12A shows a top view with the cover 110 removed and FIG. 12B is a across-sectional side view of the apparatus 100 corresponding to FIGS. 1C and 1B but with the first liquid medium 212 in the first chamber section 172 of the enclosure 102 and the second liquid medium 214 in the second chamber section 174 (as illustrated in FIG. 2 ).
- micro-objects 1202 (which can be like the micro-object 218 of FIG. 2 ) can be suspended in the first liquid medium 212 in the first chamber section 172 .
- FIG. 13 shows the device 800 of FIG. 8 with the first liquid medium 212 in the first section 872 of the first sub-enclosure 822 and the second liquid medium 214 in the second section 874 of the second sub-enclosure 824 .
- Micro-objects 1202 are also shown in the first medium 212 in the first section 872 .
- the equipment 132 and biasing device 118 e.g., comprising the biasing devices 202 , 204 and switches 206 , 208 of FIG. 2
- the master controller 134 can be configured to perform one, some, or all of the steps of the process 1100 .
- one or more of the micro-objects 1202 in the first liquid medium 212 can be selected and captured with a DEP trap 1402 .
- the DEP traps 1402 can be created by activating one or more electrodes 222 (not shown in FIGS. 14A and 14B ) at the first surface 182 of the DEP section 152 (as discussed above with respect to FIG. 2 ) around a selected micro-object 1202 to capture the micro-object 1202 .
- a specific one or more of the micro-objects 1202 can be identified and selected from a group of micro-objects 1202 in the first chamber section 172 based on any of a number of characteristics.
- one or more specific micro-objects 1202 can be identified and selected with a DEP trap 1402 in the first section 872 of the device 800 .
- the process 1100 can move the one or more micro-objects selected at step 1102 to an interface with the second liquid medium in the device.
- FIGS. 16A-17 illustrate examples.
- a selected micro-object 1202 can be moved in the apparatus 100 to the passage 130 through the physical barrier 128 .
- a selected micro-object 1202 can also be moved to a portion of the boundary 126 that does not have a physical barrier.
- the selected micro-objects 1202 can be moved in the first liquid medium 212 in the first chamber section 172 in the apparatus 100 by moving the traps 1402 , which can be accomplished by activating and deactivating electrodes 222 (not shown in FIGS. 16A and 16B ) on the first surface 182 of the DEP section 152 as discussed above.
- a selected micro-object 1202 in the first section 872 of the device 800 can be moved to the passage 830 , where the selected micro-object 1202 can be released into the passage 830 .
- the selected micro-objects 1202 can be moved to the passage 830 by moving the trap 1402 to the passage, which can be accomplished by activating and deactivating electrodes 222 (not shown in FIG. 17 on the first surface 182 of the DEP section 152 as discussed above with respect to FIG. 2 .
- the selected micro-object 1202 can be released by deactivating electrodes 222 of the trap 1402 .
- the force of gravity G can move the released micro-object 1202 to the bottom of the passage 830 at the interface with the second liquid medium 214 in the second section 874 .
- the released micro-object 1202 can be moved down the passage 830 by forces other than gravity G.
- a flow of the first liquid medium 212 in the passage 830 can move the released micro-object 1202 down the passage 830 .
- the micro-object 1202 can be moved down the passage 830 by the DEP trap 1402 .
- the process 1100 can pull a droplet of the first liquid medium containing the micro-object from the first liquid medium 212 into the second medium.
- FIGS. 18A-19 illustrate examples.
- a droplet 1802 of the first liquid medium 212 with a micro-object 1202 can be pulled from the first chamber section 172 through the passage 130 in the physical barrier 128 of the apparatus 100 into the second liquid medium 214 in the second chamber section 174 of the apparatus 100 .
- a droplet 1802 can be pulled into the second medium 214 from the first medium 212 across a portion of the boundary 126 where there is no physical barrier 128 .
- a droplet 1802 of the first liquid medium 212 can be pulled from the first chamber section 172 into the second liquid medium 214 in the second chamber section 174 by activating electrodes 232 (not shown in FIGS.
- FIG. 19 shows an example of drawing a droplet 1802 of the first medium 212 from the passage 830 into the second medium 214 in the second section 874 .
- Additional actions can be taken to aid in pulling a droplet 1802 from the first chamber section 172 into the second chamber section 174 .
- a pressure differential can be created that tends to draw a droplet 1802 from the first chamber section 172 into the second chamber section 174 .
- Such a pressure differential can aid in pulling the droplet 1802 into the second chamber section 874 and can thus be utilized in conjunction with activating electrodes 232 as discussed above.
- Such a pressure differential can be induced hydrodynamically, by a piezo device, utilizing air pressure, utilizing liquid pressure, or the like.
- inducing a pressure differential can be utilized to pull the droplet 1802 into the second chamber section 174 without activating electrodes 232 .
- Pressure and/or other techniques can thus be utilized to aid in pulling a droplet 1802 into the second chamber section 174 , or such techniques can be utilized to pull a droplet 1802 into the second chamber section 174 without activating electrodes 232 .
- a moveable cutting tool e.g., comprising a knife blade
- a moveable cutting tool can be provided in the chamber 112 and configured to separate a droplet 1802 in the second chamber section 174 from the medium 212 in the first chamber section 172 .
- the droplets 1802 of the first liquid medium 212 pulled into the second medium 214 can be moved about with the micro-objects 1202 in the droplets 1802 in the second chamber section 174 , which can be done by selectively activating and deactivating electrodes 232 (not shown in FIGS. 20A and 20B ) at a region of the electrowetting surface 184 that is immediately adjacent (e.g., in front of) the droplet 1802 generally as discussed above with respect to FIG. 2 .
- the droplets 1802 can similarly be moved about in the second liquid medium 214 in the second section 874 .
- FIG. 22 is an example of a process 2200 for culturing biological micro-objects in a microfluidic apparatus.
- the process 2200 is discussed below with respect to the apparatus 1000 of FIGS. 10A-10C .
- the process 2200 is not so limited, however, but can be performed with other microfluidic apparatuses.
- the equipment 132 and biasing device 118 (e.g., comprising the biasing devices 202 , 204 and switches 206 , 208 of FIG. 2 ) of FIGS. 1A-1C can bias, control, and provide miscellaneous functions to the apparatus 1000 illustrated in FIGS. 23-25 .
- the master controller 134 can be configured to perform one, some, or all of the steps of the process 2200 .
- the process 2200 can load biological micro-objects into holding pens in a micro-fluidic device. Examples are illustrated in FIGS. 23 and 24 , which show top views of the apparatus 1000 of FIGS. 10A-10C with the cover 110 removed corresponding to FIG. 10C .
- the first channel 1012 and the pens 1016 contain the first liquid medium 212 and the second channel 1014 contains the second liquid medium 214 .
- biological micro-objects 2302 can be selected in the first channel 1012 and moved into the pens 1016 .
- a particular biological micro-object 2302 can be selected and moved by trapping the particular micro-object 2302 with a DEP trap 1402 and moving the DEP trap 1402 as discussed above with respect to FIG. 11 .
- biological micro-objects 2302 can be introduced (e.g., through an inlet 114 ) into the second channel 1014 .
- one or more of the micro-objects 2302 can be inside droplets 2402 of a medium (e.g., the first medium 212 ) in the second channel 1014 .
- Those droplets 2402 can be moved to openings of the pens 1016 generally as shown.
- the droplets 2402 can be moved in the second medium 214 generally as discussed above.
- the one or more biological micro-objects 2302 can be moved from the droplet 2402 in the second medium 214 into the first medium 212 in the pen 1016 .
- a particular biological micro-object 2302 in a droplet 2402 at the interface between the first medium 212 and the second medium 214 can be selected and moved by trapping the particular micro-object 2302 with a DEP trap 1402 and moving the DEP trap 1402 (as discussed above with respect to FIG. 11 ) into the pen 1016 .
- DEP traps 1402 that attract a micro-object 2402 can be generated in the DEP section 1052 , which can thus attract a micro-object 2402 sufficiently to pull the micro-object 2402 across the interface between the first medium 212 and the second medium 214 .
- the process 2200 can culture the micro-objects 2302 in the pens 1016 .
- the micro-objects can be left for a time to grow, produce biological material, or the like.
- Nutrients can be provided to the micro-objects 2302 in the pens in a flow (not shown) of the first medium 212 in the first channel 1012 .
- the first liquid medium 212 can be replaced in the first channel 1012 with the second liquid medium 214 .
- Nutrients can be provided to the micro-objects 2302 in the pens 1016 by moving droplets 2502 of the first liquid medium 212 through the second liquid medium 214 in the second channel 1014 into the pens 1016 .
- Such droplets 2502 can contain nutrients for the micro-objects 2302 in the pens 1016 .
- the droplets 2502 can be moved in the second channel 1014 in the same way that droplets 1802 are moved as discussed above with respect to FIGS. 18A-21 .
- the process 2200 can pull droplets of the first liquid medium from the pens into the second channel.
- an aliquot in the form of one or more droplets 2602 of the first liquid medium 212 can be pulled from a pen 1016 into the second liquid medium 214 in the second channel 1014 .
- Such a droplet 2602 can then be moved in the second channel 1014 to a location where the droplet 2602 can be analyzed to determine the chemical or material content of the droplet 2602 .
- the content of the first liquid medium 212 in any of the pens 1016 can thus be analyzed by removing one or more droplets 2602 form the pen 1016 .
- the droplet 2602 can be pulled from a pen 1016 into the second channel 1014 and moved in the second liquid medium 214 in the second channel 1014 as discussed above with respect to 20 A- 21 .
- a droplet 2604 containing a biological micro-object 2302 can be pulled from a pen 1016 into the second channel 1014 . This can be accomplished in accordance with the process 1100 performed in a pen 1016 and the second channel 1014 .
- FIG. 27 illustrates an example of a process 2700 that can be performed on a microfluidic apparatus comprising at least one DEP section and at least one EW section.
- the process 2700 can be performed on the microfluidic apparatus 100 of FIGS. 1A-1C or the apparatus 1000 of FIGS. 10A-10C .
- a net DEP force can be induced on a micro-object in a DEP section of a microfluidic apparatus.
- the net DEP force F can be induced on the micro-object 228 as illustrated in FIG. 2 and discussed above.
- the net DEP force F can be sufficiently strong to move the micro-object 228 on the first surface 182 .
- the step 2702 can be repeated for different electrodes 222 at the first surface 182 to move the micro-object 228 along any of a variety of possible paths across the surface 182 .
- a wetting property of a region of an electrowetting surface in an EW section of the microfluidic apparatus can be changed.
- a wetting property of the electrowetting surface 184 at an electrode 232 can be changed as illustrated in FIG. 2 and discussed above. The change can be sufficient to move liquid medium (e.g., a droplet of liquid medium) on the electrowetting surface 184 .
- the step 2704 can be repeated for different electrodes 232 at the electrowetting surface 184 to move the liquid medium (e.g., a droplet) along any of a variety of possible paths across the electrowetting surface 184 .
- the steps 2702 and 2704 can alternatively be performed in any manner discussed herein for inducing a net DEP force on a micro-object or changing a wetting property of an electrowetting surface. Moreover, the steps 2702 and 2704 can be performed simultaneously.
- the DEP configurations (e.g., 122 ) illustrated in the drawings or described herein are examples.
- the DEP configurations (e.g., 122 ) can be any type of optoelectronic tweezers (OET) devices examples of which are disclosed in U.S. Pat. No. 7,612,355 or U.S. patent application Ser. No. 14/051,004.
- Other examples of the DEP configurations (e.g., 122 ) include any kind of electronically controlled electronic tweezers.
- the EW configurations (e.g., 124 ) shown in the drawings or discussed herein are examples.
- the EW configurations can be any type of optoelectronic wetting (OEW) devices examples of which are disclosed in U.S. Pat. No. 6,958,132.
- Other examples of the DEP configurations include electrowetting on dielectric (EWOD) devices, which can be electronically controlled.
- EWOD electrowetting on dielectric
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Abstract
Description
- This application is related to the U.S. patent application Ser. No. ______ entitled “Providing DEP Manipulation Devices And Controllable Electrowetting Devices In The Same Microfluidic Apparatus” (attorney docket no. BL45-US) filed Apr. 25, 2014, which is incorporated herein by reference in its entirety.
- Micro-objects, such as biological cells, can be processed in microfluidic apparatuses. For example, micro-objects suspended in a liquid in a microfluidic apparatus can be sorted, selected, and moved in the microfluidic apparatus. The liquid can also be manipulated in the device. Embodiments of the present invention are directed to improvements in selectively generating net DEP forces in a first section of a microfluidic apparatus and changing wetting properties of an electrowetting surface in another section of the microfluidic apparatus.
- In some embodiments, an apparatus can include an enclosure, a dielectrophoresis (DEP) configuration, and an electrowetting (EW) configuration. The enclosure can comprise a first surface and an electrowetting surface. The DEP configuration can be configured to selectively induce net DEP forces in a first liquid medium disposed on the first surface, and the EW configuration can be configured to selectively change a wetting property of the electrowetting surface.
- In some embodiments, a process of operating a fluidic apparatus can include inducing a net DEP force on a micro-object in a first liquid medium on a first surface in a first section of the apparatus. The process can also include changing a wetting property of a region of an electrowetting surface on which a second liquid medium is disposed in a second section of the apparatus.
- In some embodiments, an apparatus can comprise an enclosure and a boundary. The enclosure can be configured to hold a first liquid medium disposed on a first surface in a first section of the enclosure and a second liquid medium disposed on an electrowetting surface in a second section of the enclosure, and the boundary can be between the first section and the second section of the enclosure. The first section of the enclosure can comprise a DEP configuration configured to induce selectively net DEP forces in the first liquid medium sufficiently to capture and move, relative to the first surface, micro-objects in the first liquid medium in the first section of the enclosure while connected to a biasing device. The second section of the enclosure can comprise an EW configuration configured to change selectively a wetting characteristic of regions of the electrowetting surface sufficiently to move a liquid droplet within the second medium in the second section of the enclosure while connected to a biasing device.
- In some embodiments, a process of operating a fluidic apparatus can include drawing a droplet of a first liquid medium disposed on a first surface in a first section of an enclosure into a second medium disposed on an electrowetting surface in a second section of the enclosure. The foregoing drawing can include changing an electrowetting characteristic of a region of the electrowetting surface at a boundary with the first surface to induce a force at the region on the droplet to draw the droplet across the boundary and into the second liquid medium.
-
FIG. 1A is a perspective view of a microfluidic apparatus comprising sections for holding different liquid medium, inducing net dielectrophoresis (DEP) forces in one section and controlling an electrowetting property of a surface of another of the sections according to some embodiments of the invention. -
FIG. 1B is a cross-sectional side view of the microfluidic apparatus ofFIG. 1A . -
FIG. 1C is a top view of the microfluidic apparatus ofFIG. 1A with the cover removed. -
FIG. 2 is a cross-sectional side view of the micro-fluidic device ofFIG. 1A with liquid media in its sections and connected to biasing devices according to some embodiments of the invention. -
FIG. 3 illustrates an example of a DEP configuration and a controllable electrowetting (EW) configuration of the enclosure of the device ofFIG. 1A according to some embodiments of the invention. -
FIG. 4 is an example of the electrode activation substrate ofFIG. 3 configured as photoconductive material according to some embodiments of the invention. -
FIG. 5 is another example of the electrode activation substrate ofFIG. 3 configured as a circuit substrate according to some embodiments of the invention. -
FIG. 6 illustrates another example of a DEP configuration and an EW configuration of the enclosure of the device ofFIG. 1A according to some embodiments of the invention. -
FIG. 7 is yet another example of a DEP configuration and an EW configuration of the enclosure of the device ofFIG. 1A according to some embodiments of the invention. -
FIG. 8 is a cross-sectional side view of a microfluidic apparatus with multiple stacked sections according to some embodiments of the invention. -
FIG. 9 illustrates another example of an embodiment of a microfluidic apparatus with multiple stacked sections according to some embodiments of the invention. -
FIG. 10A is a perspective view of an example of a microfluidic apparatus comprising a DEP configuration for manipulating micro-objects in a first section of the device and an EW configuration for manipulating droplets of a liquid medium on an electrowetting surface in a second section of the device according to some embodiments of the invention. -
FIG. 10B is a side cross-sectional view of the microfluidic apparatus ofFIG. 10A . -
FIG. 10C is a top view of the microfluidic apparatus ofFIG. 10A with the cover removed. -
FIG. 11 is an example of a process for moving a micro-object from a first liquid medium in a first section of a microfluidic apparatus into a second liquid medium in a second section of the microfluidic apparatus according to some embodiments of the invention. -
FIGS. 12A-21 show examples of performance of the process ofFIG. 11 according to some embodiments of the invention. -
FIG. 22 is an example of a process for culturing biological micro-objects in a microfluidic apparatus configured to hold multiple different liquid media according to some embodiments of the invention. -
FIGS. 23-26 illustrate an example of performance of the process ofFIG. 22 according to some embodiments of the invention. -
FIG. 27 shows an example of a process that can be performed on the microfluidic apparatus ofFIGS. 1A-1C or the microfluidic apparatus ofFIGS. 10A-10C according to some embodiments of the invention. - This specification describes exemplary embodiments and applications of the invention. The invention, however, is not limited to these exemplary embodiments and applications or to the manner in which the exemplary embodiments and applications operate or are described herein. Moreover, the figures may show simplified or partial views, and the dimensions of elements in the figures may be exaggerated or otherwise not in proportion. In addition, as the terms “on,” “attached to,” or “coupled to” are used herein, one element (e.g., a material, a layer, a substrate, etc.) can be “on,” “attached to,” or “coupled to” another element regardless of whether the one element is directly on, attached to, or coupled to the other element or there are one or more intervening elements between the one element and the other element. Also, directions (e.g., above, below, top, bottom, side, up, down, under, over, upper, lower, horizontal, vertical, “x,” “y,” “z,” etc.), if provided, are relative and provided solely by way of example and for ease of illustration and discussion and not by way of limitation. In addition, where reference is made to a list of elements (e.g., elements a, b, c), such reference is intended to include any one of the listed elements by itself, any combination of less than all of the listed elements, and/or a combination of all of the listed elements.
- As used herein, “substantially” means sufficient to work for the intended purpose. The term “substantially” thus allows for minor, insignificant variations from an absolute or perfect state, dimension, measurement, result, or the like such as would be expected by a person of ordinary skill in the field but that do not appreciably affect overall performance. When used with respect to numerical values or parameters or characteristics that can be expressed as numerical values, “substantially” means within ten percent. The term “ones” means more than one.
- As used herein, the term “micro-object” can encompass one or more of the following: inanimate micro-objects such as micro-particles, micro-beads, micro-wires, and the like; biological micro-objects such as cells (e.g., proteins, embryos, plasmids, oocytes, sperms, hydridomas, and the like); and/or a combination of inanimate micro-objects and biological micro-objects (e.g., micro-beads attached to cells).
- The phrase “relatively high electrical conductivity” is used herein synonymously with the phrase “relatively low electrical impedance,” and the foregoing phrases are interchangeable. Similarly, the phrase “relatively low electrical conductivity” is used synonymously with the phrase “relatively high electrical impedance,” and the foregoing phrases are interchangeable.
- A “fluidic circuit” means one or more fluidic structures (e.g., chambers, channels, holding pens, reservoirs, or the like), which can be interconnected. A “fluidic circuit frame” means one or more walls that define all or part of a fluidic circuit.
- In some embodiments, a microfluidic apparatus can comprise a dielectrophoresis (DEP) configured section for holding a liquid medium and selectively inducing net DEP forces in the liquid medium. The microfluidic apparatus can also comprise an electrowetting (EW) configured section for holding another liquid medium on an electrowetting surface and selectively changing a wetting property of the electrowetting surface.
FIGS. 1A-1C illustrate an example of such amicrofluidic apparatus 100.FIG. 1A also illustrates examples ofcontrol equipment 132 for controlling operation of theapparatus 100. - As shown, the
apparatus 100 can comprise anenclosure 102, which can comprise a plurality (two are shown but there can be more) ofsections FIGS. 1A-1C but depicted as 212, 214 inFIG. 2 ). Thefirst section 122 can comprise afirst surface 182 and be further configured to selectively generate net DEP forces on micro-objects (not shown) in a liquid medium on thefirst surface 182. Thefirst section 122 is thus referred to hereinafter as a DEP configured section or aDEP configuration 122 of theenclosure 102. Thesecond section 124 can comprise anelectrowetting surface 184 and can further be configured to selectively change a wetting property of theelectrowetting surface 184. Thesecond section 124 is thus referred to hereinafter as an electrowetting (EW) configured section or anEW configuration 124 of theenclosure 102. - Although the
apparatus 100 can be physically structured in many different ways, in the example shown inFIGS. 1A-1C , theenclosure 102 is depicted as comprising a structure 104 (e.g., a base), afluidic circuit frame 108, and acover 110. As shown, thefluidic circuit frame 108 can be disposed on aninner surface 106 of thestructure 104, and thecover 110 can be disposed over thefluidic circuit frame 108. With thestructure 104 as the bottom and the cover as the top 110, thefluidic circuit frame 108 can define a fluidic circuit comprising, for example, interconnected fluidic chambers, channels, pens, reservoirs, and the like. Although thestructure 104 is shown inFIGS. 1A and 1B as comprising the bottom of theapparatus 100 and thecover 110 is illustrated as the top, thestructure 104 can be the top and thecover 110 can be the bottom of theapparatus 100. - In the example illustrated in
FIGS. 1A-1C , thefluidic circuit frame 108 defines achamber 112. Afirst section 172 of thechamber 112 corresponding to a DEP configuredsection 122 is hereinafter referred to as thefirst chamber section 172, and a second section of thechamber 112 corresponding to anEW section 124 of theenclosure 102 is hereinafter referred to as thesecond chamber section 174. As also shown, thechamber 112 can include one ormore inlets 114 and one ormore outlets 116. - In some embodiments, the
enclosure 102 can comprise aphysical barrier 128 between thefirst chamber section 172 and thesecond chamber section 174, and such aphysical barrier 128 can comprise one ormore passages 130 from thefirst chamber section 172 of theenclosure 102 to thesecond chamber section 174. In the example illustrated inFIGS. 1A-1C , such aphysical barrier 128 is shown along only a portion of aboundary 126 between thefirst chamber section 172 and thesecond chamber section 174. Alternatively, thephysical barrier 128 can extend the entirety of theboundary 126 or be located on a different portion of theboundary 126. Regardless, thephysical barrier 128 can be part of the fluidic circuit frame 108 (as shown), or thephysical barrier 128 can be structurally distinct from thefluidic circuit frame 108. Although onephysical barrier 128 is shown, there can be more than one suchphysical barrier 128 disposed on theboundary 126. - The
structure 104 can comprise, for example, a substrate or a plurality of interconnected substrates. Thefluidic circuit frame 108 can comprise a flexible material (e.g. rubber, plastic, an elastomer, silicone, polydimethylsioxane (“PDMS”), or the like), which can be gas permeable. Thecover 110 can be an integral part of thefluidic circuit frame 108, or thecover 110 can be a structurally distinct element (as illustrated inFIGS. 1A-1C ). Thecover 110 can comprise the same or different materials than thefluidic circuit frame 108. Regardless, thecover 110 and/or thestructure 104 can be transparent to light. - As shown in
FIG. 1B , in some embodiments, theDEP configuration 122 of theenclosure 102 can comprise a biasingelectrode 156, aDEP section 152 of thestructure 104, and thefirst surface 182, all of which can be part of thestructure 104. TheDEP configuration 122 can also include a biasingelectrode 166, which can be part of thecover 110. The foregoing can be located with respect to each other as illustrated inFIG. 1B . Thefirst surface 182 can be an outer surface of theDEP section 152 or an outer surface of one or more materials (e.g., one or more coatings) (not shown) disposed on theDEP section 152. - Similarly, the
EW configuration 124 of theenclosure 102 can comprise a biasingelectrode 158, anEW section 154 of thestructure 104, adielectric layer 160, and theelectrowetting surface 184, all of which can be part of thestructure 104. TheEW configuration 124 can also include ahydrophobic surface 165, a layer 160 (e.g., a dielectric material), and a biasingelectrode 168, all of which can be part of thecover 110. The foregoing can be located with respect to each other as shown inFIG. 1B . Theelectrowetting surface 184, which can be hydrophobic, can be an outer surface of thedielectric layer 160 or an outer surface of one or more materials (not shown) disposed on thedielectric layer 160. Similarly, thehydrophobic surface 165 can be an outer surface of thelayer 164 or an outer surface of one or more materials (not shown) disposed on thelayer 164. - As shown in
FIG. 1A , anelectrical biasing device 118 can be connected to theapparatus 100. Theelectrical biasing device 118 can, for example, comprise one or more voltage or current sources. As also shown inFIG. 1A , examples of the control equipment include amaster controller 134, aDEP module 142 for controlling theDEP configuration 122 of theenclosure 102, and anEW module 144 for controlling theEW configuration 124 of theenclosure 102. Thecontrol equipment 132 can also includeother modules 140 for controlling, monitoring, or performing other functions with respect to theapparatus 100. - The
master controller 134 can comprise acontrol module 136 and adigital memory 138. Thecontrol module 136 can comprise, for example, a digital processor configured to operate in accordance with machine executable instructions (e.g., software, firmware, microcode, or the like) stored in thememory 138. Alternatively or in addition, thecontrol module 136 can comprise hardwired digital circuitry and/or analog circuitry. TheDEP module 142,EW module 144, and/or theother modules 140 can be similarly configured. Thus, functions, processes, acts, actions, or steps of a process discussed herein as being performed with respect to theapparatus 100 or any other microfluidic apparatus can be performed by one or more of themaster controller 134,DEP module 142,EW module 144, orother modules 140 configured as discussed above. -
FIG. 2 illustrates an example configuration of theapparatus 100. As shown, a firstliquid medium 212 can be disposed on thefirst surface 182 in thefirst chamber section 172, and a secondliquid medium 214 can be disposed on theelectrowetting surface 184 in thesecond chamber section 174. The firstliquid medium 212 and the secondliquid medium 214 can be different mediums. For example, the secondliquid medium 214 can be immiscible with respect to the firstliquid medium 212. The firstliquid medium 212 can be, for example, an aqueous medium (e.g., water), and the secondliquid medium 214 can be immiscible in an aqueous medium. Examples of the secondliquid medium 214 can include oil based media. Examples of suitable oils include gas permeable oils such as fluorinated oils. Fluorocarbon based oils are also examples of suitable oils. - As also shown in
FIG. 2 , afirst biasing device 202 can be connected to the biasingelectrodes DEP configuration 122 of theenclosure 102, and asecond biasing device 204 can be connected to the biasingelectrodes EW configuration 124 of theenclosure 102. Thefirst biasing device 202 can be, for example, an alternating current (AC) voltage or current source, and thesecond biasing device 204 can similarly be an AC voltage or current source. Aswitch 206 can selectively connect thefirst biasing device 202 to and disconnect thefirst biasing device 202 from theDEP configuration 122. Anotherswitch 208 can similarly connect thesecond biasing device 204 to and disconnect thesecond biasing device 204 from theEW configuration 124. The biasingdevices biasing device 118 ofFIG. 1A . - The
DEP section 152 of thestructure 104 can be configured to have a relatively high electrical impedance (i.e., low electrical conductivity) between thefirst medium 212 and the biasingelectrode 156 except when anelectrode 222 at thefirst surface 182 is activated. (TheDEP section 152 can be an example of an electrode activation substrate.) Activating theelectrode 222 can create a relatively low impedance (i.e., high conductivity)path 252 from theelectrode 222 to the biasingelectrode 156. While theelectrode 222 is deactivated, the majority of the voltage drop due to thefirst biasing device 202 from theDEP biasing electrode 166 to theDEP biasing electrode 156 can be across theDEP section 152. While theelectrode 222 is activated creating the relativelylow impedance path 252, however, the majority of the voltage drop in the vicinity of thepath 252 can be across thefirst medium 222, which can create a net DEP force F in thefirst medium 212 in the vicinity of the activatedelectrode 222. Depending on such characteristics as the frequency of thebiasing device 202 and the dielectric properties of thefirst medium 212 and/ormicro-objects 228 in the medium 212, the DEP force F can attract or repeal anearby micro-object 228 in thefirst medium 212. Many electrodes likeelectrode 222 can be selectively activated and deactivated over some, most, or the entirety of thefirst surface 182. By selectively activating and deactivating such electrodes (like 222), one or more micro-objects 228 in thefirst medium 212 of theDEP section 152 of theenclosure 102 can be selected (e.g., captured) and moved in the medium 212. Equipment 132 (seeFIG. 1A ) can control activation and deactivation of such electrodes (e.g., 222). As will be seen, such electrodes (like 222) can be fixed or virtual. - The EW section of the
structure 104 can similarly be configured to have a relatively high electrical impedance (i.e., low electrical conductivity) except when anelectrode 232 at theelectrowetting surface 184 is activated. (TheEW section 154 can also be an example of an electrode activation substrate.) Activating such anelectrode 232 can create a relatively low impedance (i.e., high conductivity)path 254 from thedielectric layer 232 to theEW biasing electrode 158. While theelectrode 232 is deactivated (and theEW section 154 has a relatively high impedance), the voltage drop due to thesecond biasing device 204 from theEW biasing electrode 168 to theEW biasing electrode 158 can be greater across theEW section 154 than across thedielectric layer 160. While theelectrode 232 is activated creating the relativelylow impedance path 254, however, the voltage drop across theEW section 154 can become less than the voltage drop across thedielectric layer 160, which can change a wetting property of theelectrowetting surface 184 in the vicinity of the activatedelectrode 232. As noted, theelectrowetting surface 184 can be hydrophobic. The change in the wetting property can be to reduce the hydrophobic level ofelectrowetting surface 184 in the vicinity of the activatedelectrode 232. For example, a region of theelectrowetting surface 184 in the vicinity of the activatedelectrode 232 can be changed from a first level of hydrophobicity to second level of hydrophobicity, which can be less than the first level. As another example, a region of theelectrowetting surface 184 in the vicinity of the activatedelectrode 232 can be changed from hydrophobic to hydrophilic. - Many electrodes like
electrode 232 can be selectively activated and deactivated over some, most, or the entirety of theelectrowetting surface 184. By selectively activating and deactivating such electrodes (like 232), droplets of liquid medium 214 or another liquid (not shown) in the secondliquid medium 214 can be moved M along theelectrowetting surface 184. Equipment 132 (seeFIG. 1A ) can control activation and deactivation of such electrodes (e.g., 232). As will be seen, such electrodes (like 232) can be fixed or virtual. -
FIGS. 3-7 illustrate examples of theDEP configuration 122 and theEW configuration 124 of theenclosure 102. - In the examples shown in
FIG. 3 , thestructure 104 of theenclosure 102 can comprise alayer 352 of dielectric material, anelectrode activation substrate 362, and a biasingelectrode 372. Thefirst surface 182 can be a surface of theelectrode activation substrate 362, and theelectrowetting surface 184 can be an outer surface of thedielectric layer 352, which can be hydrophobic. As also shown, thecover 110 can comprise aDEP biasing electrode 312 and anEW biasing electrode 314. Thecover 110 can also include alayer 322 of electrically insulating material, which can extend across theDEP section 122 and theEW section 124 as illustrated. Alternatively,layer 322 is disposed in theEW section 124 but does not extend into theDEP section 122, and of course, thelayer 322 need not be present in some embodiments. Thehydrophobic surface 165 can be an outer surface of thelayer 322, which can be hydrophobic. TheDEP biasing device 202 can be connected to theDEP biasing electrode 312 and the biasingelectrode 372, and theEW biasing device 204 can be connected to theEW biasing electrode 314 and the biasingelectrode 372. - Generally as shown in
FIG. 3 , each of thedielectric layer 352, theelectrode activation substrate 362, and the biasingelectrode 372 can be a continuous layer or substrate that extends across both theDEP section 172 and theEW section 174 of thechamber 112. For example, each of thedielectric layer 352, theelectrode activation substrate 362, and the biasingelectrode 372 can be a continuous layer or substrate that extends substantially the entirety of thestructure 104. As also shown, the electrically insulatinglayer 322 of thecover 110 can also be a continuous layer that extends through both theDEP section 172 and theEW section 174 of thechamber 112.FIG. 3 depicts theDEP biasing electrode 312 and theEW biasing electrode 314 of thecover 110 as two different unconnected electrodes each corresponding to one but not the other of theDEP section 172 or theEW section 174. TheDEP biasing electrode 312 and theEW biasing electrode 314 can alternatively be a continuous biasing electrode like the biasingelectrode 372. Similarly, any of the insulatinglayer 322, thedielectric layer 352, theelectrode activation substrate 362, and/or the biasingelectrode 372 can be two distinct structures each corresponding to one but not the other of theDEP section 172 or theEW section 174 as theDEP biasing electrode 312 andEW biasing electrode 314 are depicted inFIG. 3 . For example, the insulatinglayer 322 can be disposed only on the biasingelectrode 314 in theEW section 124 but not on the biasingelectrode 312 in theDEP section 122. - In the example shown in
FIG. 3 , theDEP biasing electrode 312 is an example of theelectrode 166 inFIG. 2 . Similarly, the portion of theelectrode 372 to the left of theboundary 126 inFIG. 3 is an example of theelectrode 156 inFIG. 2 , and the portion of theelectrode activation substrate 362 to the left of theboundary 126 is an example of theDEP section 152 inFIG. 2 . Likewise, theEW biasing electrode 314 inFIG. 3 is an example of theelectrode 168 inFIG. 2 . The portion of theelectrode activation substrate 362 to the right of theboundary 126 inFIG. 3 is an example of theEW section 154 inFIG. 2 ; the portion of thedielectric layer 352 inFIG. 3 to the right of theboundary 126 is an example oflayer 160 inFIG. 2 ; and the portion of the insulatinglayer 322 inFIG. 3 to the right of theboundary 126 is an example of thelayer 164 inFIG. 2 . - In the example shown in
FIG. 2 , theEW section 154 but not theDEP section 152 of thestructure 104 is illustrated as comprising adielectric layer 160, yet the example shown inFIG. 3 shows thedielectric layer 352 extending across both theDEP configuration 122 and theEW configuration 124 of theenclosure 102. In some embodiments, the thickness t of thedielectric layer 352 can be sufficiently thin that a DEP electrode like 222 (seeFIG. 2 ) activated at anouter surface 380 of the electrode activation substrate 362 (e.g., at theregion 412 inFIG. 4 or theregion 512 inFIG. 5 ) can effectively form an electrical connection through thedielectric layer 352 with thefirst medium 212 in thefirst chamber section 172 of theenclosure 104. Alternatively or in addition, theDEP biasing device 202 can be operated such that the capacitive effect of the portion of thedielectric layer 352 to the left of theboundary 126 inFIG. 3 is effectively shorted, and theEW biasing device 204 can be operated such that the capacitive effect of the portion of thedielectric layer 352 to the right of theboundary 126 is not shorted. - For example, the portion of the
dielectric layer 352 to the left of theboundary 126 inFIG. 3 can form a first effective capacitor (not shown) between theliquid medium 212 in thefirst chamber section 172 and any relatively high conductivity region (e.g., like anelectrode 222 inFIG. 2 ) formed at theouter surface 380 of theelectrode activation substrate 362. Similarly, the portion of thedielectric layer 352 to the right of theboundary 126 inFIG. 3 can form a second effective capacitor (not shown) between theliquid medium 214 in thesecond chamber section 174 and any relatively high conductivity region (e.g., like an electrode 232) formed at theouter surface 380 of theelectrode activation substrate 362. TheDEP biasing device 202 can be operated at a frequency fPM that is sufficiently high to effectively short the first effective capacitor (not shown) and thus effectively eliminate the capacitive effect of the portion of thedielectric layer 352 to the left of theboundary 126 inFIG. 3 . TheEW biasing device 204, however, can be operated at a lower frequency fDM, which can be a frequency at which the capacitive effect of the second effective capacitor (not shown) is significant. - The
apparatus 100 can be operated in a DEP mode in which, for example, theswitch 206 is closed connecting theDEP biasing device 202 to the biasingelectrodes switch 208 is open disconnecting theEW biasing device 204 from the biasingelectrodes apparatus 100 can similarly be operated in an EW mode in which theswitch 206 is open but theswitch 208 is closed. The equipment 132 (seeFIG. 1A ) can control theswitches - The
electrode activation substrate 362 can be configured such that theelectrodes 222, 232 (seeFIG. 2 ) are virtual electrodes and/or fixed electrodes.FIG. 4 illustrates an example in which theelectrode activation substrate 362 comprisesphotoconductive material 462, and theelectrodes FIG. 5 shows an example in which theelectrode activation substrate 362 comprises acircuit substrate 562, and theelectrodes - As noted, in the example shown in
FIG. 4 , theelectrode activation substrate 362 can comprisephotoconductive material 462, which can be a material that has a relatively high electrical impedance except when exposed directly to light. As shown, when light 410 is directed onto a relativelysmall region 412 of thephotoconductive material 462 of theDEP section 152 of thestructure 104, a relatively high electricallyconductive path 402 is formed at theregion 412 through thephotoconductive material 462 to theelectrode 372. Theconductive path 402 corresponds to thepath 252 inFIG. 2 , and the light 410 thus activates anelectrode 222 at theregion 412. - As also shown in
FIG. 4 , light 420 directed onto a relativelysmall region 414 of theEW section 154 of thestructure 104 can similarly create a relatively high electrically conductive path 404 at theregion 414 through thephotoconductive material 462 to theelectrode 372. The conductive path 404 corresponds to thepath 254 inFIG. 2 , and the light 420 thus activates anelectrode 232 at theregion 412. - Electrodes like
electrode 222 can be activated in any desired pattern anywhere on thephotoconductive material 462 by directing light 410 in the desired pattern onto thephotoconductive material 462.Such electrodes 222 can be deactivated by removing the light 410. Electrodes likeelectrodes 232 can similarly be activated and deactivated in any desired pattern anywhere on thephotoconductive material 462 in accordance with a pattern of the light 414. Theelectrodes DEP module 142 ofFIG. 1A can comprise a light source (not shown), and theDEP module 142 and/or themaster controller 134 can control the light source to direct changing patterns of light into theapparatus 100 to selectively activate and deactivatesuch electrodes photoconductive material 462. - In the example shown in
FIG. 5 , theelectrode activation substrate 362 can comprise acircuit substrate 562, which can comprise a base material that has a relatively high electrical impedance but includes circuits for making relatively high conductive electrical connections through the substrate. For example, aDEP electrode circuit 502 in theDEP section 152 of thestructure 104 can comprise aswitch 522 that provides a high conductivity electrical connection (corresponding to thepath 252 inFIG. 2 ) from a relatively smallfixed region 512 through thesubstrate 562 to the biasingelectrode 372. Theswitch 522 can be selectively opened and closed to thereby selectively create a high impedance path from theregion 512 to the biasingelectrode 372 or a high conductively path. In the example shown inFIG. 5 , theswitch 522 is controlled by aphoto element 532, which can open and close theswitch 522 in response to a directedlight beam 410. Alternatively, theswitch 522 can be controlled by an external control module (e.g., theDEP module 142 ofFIG. 1A ) by a control input (not shown). DEP electrode circuits likecircuit 502 can be provided throughout theDEP section 152 of thestructure 104, and a pattern of fixed electrodes like 222 can thus be provided through theDEP section 152. Suchfixed electrodes 222 can be activated and deactivated with light 410 or through external control. - The
DEP module 142 ofFIG. 1A can comprise a light source (not shown), and theDEP module 142 and/or themaster controller 134 can control the light source to direct changing patterns of light 410 into theapparatus 100 to selectively activate and deactivatesuch electrodes 222. Alternatively, if some or all ofsuch electrodes 222 are hardwired, theDEP module 142 and/or themaster controller 134 can selectively control activation and deactivation ofsuch electrodes 222 in changing patterns. - The
EW section 154 of thestructure 104 can include similarEW electrode circuits 504. For example, anEW electrode circuit 504 in theEW section 154 of thestructure 104 can comprise a switch 524 that provides a high conductivity electrical connection (corresponding to thepath 254 inFIG. 2 ) from a relatively smallfixed region 514 through thesubstrate 562 to the biasingelectrode 372. The switch 524 can be selectively opened and closed to thereby selectively create a high impedance path from theregion 514 to the biasingelectrode 372 or a high conductively path. In the example shown inFIG. 5 , the switch 524 is controlled by a photo element 524, which can open and close the switch 524 in response to a directedlight beam 420. Alternatively, the switch 524 can be controlled by an external control module (e.g., theEW module 144 ofFIG. 1A ) by a control input (not shown). EW electrode circuits likecircuit 504 can be provided throughout theEW section 154 of thestructure 104, and a pattern of fixed electrodes like 232 can thus be provided throughout theEW section 154.Such electrodes 232 can be activated and deactivated with light 412 or through external control. - The
EW module 144 ofFIG. 1A can comprise a light source (not shown), and theEW module 144 and/or themaster controller 134 can control the light source to direct changing patterns of light 420 into theapparatus 100 to selectively activate and deactivatesuch electrodes 232. Alternatively, if some or all ofsuch electrodes 232 are hardwired, theEW module 144 and/or themaster controller 134 can selectively control activation and deactivation ofsuch electrodes 232 in changing patterns. - As noted,
FIGS. 6 and 7 , likeFIG. 3 , illustrate example configurations of theDEP configuration 122 andEW configuration 124 of theenclosure 102. - The configuration illustrated in
FIG. 6 is similar toFIG. 3 except that adielectric layer 652 replaces thedielectric layer 352. Thedielectric layer 652 can form theelectrowetting surface 184 of thesecond chamber section 174 but not thefirst surface 182 of thefirst chamber section 172. (SeeFIGS. 1A-2 .) Thus, thedielectric layer 652 is part of theEW configuration 124 of theenclosure 104 but not theDEP configuration 122. Because thedielectric layer 652 does not extend across thefirst surface 182 of theDEP configuration 122, the thickness t of thedielectric layer 652 can be greater than the thickness t of thedielectric layer 352 inFIG. 2 . Otherwise, thedielectric layer 652 can be like and can comprise the same materials as thedielectric layer 352. - The configuration of
FIG. 7 is similar toFIG. 6 except the configuration ofFIG. 7 includes an additionaldielectric layer 752 between thedielectric layer 652 and theelectrode activation substrate 362. Thedielectric layer 652 and thedielectric layer 752 can be part of theEW configuration 124 of theenclosure 104, but those layers are not part of theDEP configuration 122. - Although not shown in
FIG. 7 , a biasing electrode (not shown) can be located in theEW section 124 between the additionaldielectric layer 752 and the portion of theelectrode activation substrate 362 that is in theEW section 124. The biasing device 204 (seeFIG. 2 ) can be connected to the portion of the biasing electrode 312 (which can be bifurcated and thus comprise a portion in theDEP section 122 and a separate electrically isolated portion in the EW section 124) that is to the right of theboundary 126 inFIG. 7 and the biasing electrode (not shown) between the additionaldielectric layer 752 and the portion of theelectrode activation substrate 362 in theEW section 124 rather than to the biasingelectrode 372 rather than theelectrode 372. -
FIGS. 1A-1C show thefirst chamber section 172 and thesecond section 172 of theenclosure 104 side-by-side (e.g., substantially in a same plane). The foregoing, however, is merely an example, and other configurations are possible.FIG. 8 illustrates an example in which such sections are stacked. -
FIG. 8 illustrates amicrofluidic apparatus 800 that can comprise a first sub-enclosure 822 stacked on asecond sub-enclosure 824. For example, each sub-enclosure 822, 824 can comprise a structure 804, afluidic circuit frame 808, and a cover 810 each of which can be the same as or similar to thestructure 104,fluidic circuit frame 108, and cover 110 ofFIGS. 1A-1C . Although twostacked sub-enclosures FIG. 8 , there can be more such stacked sub-enclosures. - Either or all of the sub-enclosures 822, 824 can be configured as a DEP configured device and/or an EW configured device. That is, although the
first sub-enclosure 822 is illustrated as comprising aDEP configuration 122 and thesecond sub-enclosure 824 is shown as comprising anEW configuration 124, bothsub-enclosures apparatus 100 shown inFIGS. 1A-2 ). - As noted, in the example illustrated in
FIG. 8 , thefirst enclosure 822 can comprise aDEP configuration 122, and thesecond enclosure 824 can comprise anEW configuration 124 as discussed above. For example, thestructure 804 a of thefirst enclosure 822 can comprise theDEP section 152 including thefirst surface 182 and thecover 810 a can comprise the biasingelectrode 166 as discussed above. Similarly, thestructure 804 b of thesecond enclosure 822 can comprise theEW section 154, thedielectric layer 160, and theelectrowetting surface 184, and thecover 810 b can comprise thehydrophobic surface 165, thelayer 164, and the biasingelectrode 168 as discussed above. - The first sub-enclosure 822 can define a
first section 872 for holding a liquid medium (e.g., the firstliquid medium 212 shown inFIG. 2 ), and theDEP configuration 122 can select and manipulate micro-objects (e.g., like 228 inFIG. 2 ) in such a liquid medium in thefirst section 872. The second sub-enclosure 824 can similarly define asecond section 874 for holding a liquid medium (e.g., the secondliquid medium 214 shown inFIG. 2 ), and theEW configuration 124 can manipulate a liquid medium on theelectrowetting surface 184, as discussed above, in thesecond section 874. As also shown, there can be one or more passages 830 (one is shown but there can be more) from thefirst section 872 to thesecond section 874. The sidewalls of such apassage 830 can be hydrophilic in which case an aqueous medium in thefirst section 872 can naturally enter and fill thepassage 830. Alternatively, the sidewalls of thepassage 830 can be hydrophobic. -
FIG. 9 illustrates another example of amicrofluidic apparatus 900 that can be generally similar to thedevice 800 except that the positions of the biasingelectrode 168,layer 164, andhydrophobic surface 165, on one hand, and theelectrowetting surface 184,dielectric layer 160,EW section 154, and biasingelectrode 158 are different (e.g., opposite) than the positions shown inFIG. 8 . - As mentioned, the configuration of the
apparatus 100 shown inFIGS. 1A-1C as comprising achamber 112 divided into afirst chamber section 172 and asecond chamber section 174 is an example, and many other configurations are possible.FIGS. 10A-10C illustrate an example of amicrofluidic apparatus 1000 comprising multiplefluidic channels 1012, 1014 (two are shown but there can be more) and multiple holding pens 1016 (three are shown but there can be fewer or more) each of which can be connected to one or more of thechannels - The
apparatus 1000 can be generally similar to theapparatus 100, and like numbered elements inFIGS. 10A-10C can be the same as inFIGS. 1A-1C . Thefluidic circuit frame 1008 of theapparatus 1000, however, can define, with thestructure 104 and thecover 110, afirst channel 1012, asecond channel 1014, and holdingpens 1016, which as shown, can be connected to thechannels fluidic circuit frame 1008 can be the same as or similar to thefluidic circuit frame 108. - In the example shown in
FIGS. 10A-10C , thefirst channel 1012 and thepens 1016 can be configured to hold a first liquid medium (not shown but can be the firstliquid medium 212 ofFIG. 2 ), and thestructure 104 and cover 110 can include theDEP configuration 122 for selecting and manipulating micro-objects in the first liquid medium. For example, thestructure 104 can comprise the biasingelectrode 156,DEP section 152, andfirst surface 182, and thecover 110 can comprise the biasingelectrode 166, all of which can be as discussed above. Similarly, thestructure 104 can also comprise the biasingelectrode 158,EW section 154,dielectric layer 160, andelectrowetting surface 184, and thecover 110 can also comprise thehydrophobic surface 165,layer 164, and biasingelectrode 168, all of which can be as discussed above. As discussed above, theDEP configuration 122 can be for selecting and manipulating micro-objects (e.g., 228) in a first liquid medium (e.g., 212) on thefirst surface 182 in thefirst channel 1012 and pens 1016, and theEW configuration 124 can be for manipulating a liquid medium (not shown) on theelectrowetting surface 184 in thesecond channel 1014. - In
FIGS. 10A-10C , theboundary 1026 can be the same as theboundary 126 inFIGS. 1A-1C : theboundary 1026 is the boundary between thefirst surface 182 and theelectrowetting surface 184, which can be the boundary between a first section (comparable to thefirst chamber section 172 ofFIGS. 1A-1C ) comprising thefirst channel 1012 and thepens 1016 and a second section (comparable to thesecond chamber section 174 ofFIGS. 1A-1C ) comprising thesecond channel 1014. Although not shown inFIGS. 10A-10C or inFIGS. 8 and 9 , theequipment 132 and biasing device 118 (e.g., comprising the biasingdevices FIG. 2 ) ofFIGS. 1A-1C can bias, control, and provide miscellaneous functions to thedevices FIGS. 8-10C . -
FIG. 11 is an example of aprocess 1100 for moving a micro-object from a first liquid medium in a microfluidic apparatus to a second liquid medium. For ease of illustration and discussion, theprocess 1100 is discussed below with respect to theapparatus 100 ofFIGS. 1A-1C and thedevice 800 ofFIG. 8 . Theprocess 1100 is not so limited, however, but can be performed on other microfluidic apparatuses such as thedevice 900 ofFIG. 9 , theapparatus 1000 ofFIGS. 10A-10C , or other such devices. - As shown, at
step 1102, theprocess 1100 can select a micro-object in a DEP configured portion of a microfluidic apparatus.FIGS. 12A-15 illustrates examples. -
FIG. 12A shows a top view with thecover 110 removed andFIG. 12B is a across-sectional side view of theapparatus 100 corresponding toFIGS. 1C and 1B but with the firstliquid medium 212 in thefirst chamber section 172 of theenclosure 102 and the secondliquid medium 214 in the second chamber section 174 (as illustrated inFIG. 2 ). In addition, micro-objects 1202 (which can be like the micro-object 218 ofFIG. 2 ) can be suspended in the firstliquid medium 212 in thefirst chamber section 172.FIG. 13 shows thedevice 800 ofFIG. 8 with the firstliquid medium 212 in thefirst section 872 of thefirst sub-enclosure 822 and the secondliquid medium 214 in thesecond section 874 of thesecond sub-enclosure 824. Micro-objects 1202 are also shown in thefirst medium 212 in thefirst section 872. Although not shown inFIGS. 12A-21 , theequipment 132 and biasing device 118 (e.g., comprising the biasingdevices FIG. 2 ) ofFIGS. 1A-1C can bias, control, and provide miscellaneous functions to thedevices FIGS. 12A-21 . Indeed, themaster controller 134 can be configured to perform one, some, or all of the steps of theprocess 1100. - As shown in
FIGS. 14A and 14B , one or more of the micro-objects 1202 in the firstliquid medium 212 can be selected and captured with aDEP trap 1402. The DEP traps 1402 can be created by activating one or more electrodes 222 (not shown inFIGS. 14A and 14B ) at thefirst surface 182 of the DEP section 152 (as discussed above with respect toFIG. 2 ) around a selected micro-object 1202 to capture the micro-object 1202. A specific one or more of the micro-objects 1202 can be identified and selected from a group of micro-objects 1202 in thefirst chamber section 172 based on any of a number of characteristics. Similarly, as shown inFIG. 15 , one or morespecific micro-objects 1202 can be identified and selected with aDEP trap 1402 in thefirst section 872 of thedevice 800. - Returning again to
FIG. 11 , atstep 1104, theprocess 1100 can move the one or more micro-objects selected atstep 1102 to an interface with the second liquid medium in the device.FIGS. 16A-17 illustrate examples. - As shown in
FIG. 16A , a selected micro-object 1202 can be moved in theapparatus 100 to thepassage 130 through thephysical barrier 128. As another example and as shown inFIGS. 16A-16B , a selected micro-object 1202 can also be moved to a portion of theboundary 126 that does not have a physical barrier. The selected micro-objects 1202 can be moved in the firstliquid medium 212 in thefirst chamber section 172 in theapparatus 100 by moving thetraps 1402, which can be accomplished by activating and deactivating electrodes 222 (not shown inFIGS. 16A and 16B ) on thefirst surface 182 of theDEP section 152 as discussed above. - As still another example illustrated in
FIG. 17 , a selected micro-object 1202 in thefirst section 872 of thedevice 800 can be moved to thepassage 830, where the selected micro-object 1202 can be released into thepassage 830. The selected micro-objects 1202 can be moved to thepassage 830 by moving thetrap 1402 to the passage, which can be accomplished by activating and deactivating electrodes 222 (not shown inFIG. 17 on thefirst surface 182 of theDEP section 152 as discussed above with respect toFIG. 2 . The selected micro-object 1202 can be released by deactivatingelectrodes 222 of thetrap 1402. - The force of gravity G can move the released micro-object 1202 to the bottom of the
passage 830 at the interface with the secondliquid medium 214 in thesecond section 874. Alternatively, the released micro-object 1202 can be moved down thepassage 830 by forces other than gravity G. For example, a flow of the firstliquid medium 212 in thepassage 830 can move the released micro-object 1202 down thepassage 830. As another example, the micro-object 1202 can be moved down thepassage 830 by theDEP trap 1402. - Referring again to
FIG. 11 , atstep 1106, theprocess 1100 can pull a droplet of the first liquid medium containing the micro-object from the firstliquid medium 212 into the second medium.FIGS. 18A-19 illustrate examples. - As shown in
FIG. 18A , adroplet 1802 of the firstliquid medium 212 with a micro-object 1202 can be pulled from thefirst chamber section 172 through thepassage 130 in thephysical barrier 128 of theapparatus 100 into the secondliquid medium 214 in thesecond chamber section 174 of theapparatus 100. As another example illustrated inFIGS. 18A and 18B , such adroplet 1802 can be pulled into the second medium 214 from thefirst medium 212 across a portion of theboundary 126 where there is nophysical barrier 128. Regardless, adroplet 1802 of the firstliquid medium 212 can be pulled from thefirst chamber section 172 into the secondliquid medium 214 in thesecond chamber section 174 by activating electrodes 232 (not shown inFIGS. 18A and 18B ) on theelectrowetting surface 184 in a region 814 adjacent theboundary 126 between the first and secondliquid media FIG. 2 . As noted in the discussion ofFIG. 2 above,active electrodes 232 on theelectrowetting surface 184 can attract the firstliquid medium 212 and thereby move a droplet of the firstliquid medium 212 along theelectrowetting surface 184. Another example is shown inFIG. 19 , which shows an example of drawing adroplet 1802 of the first medium 212 from thepassage 830 into thesecond medium 214 in thesecond section 874. - Additional actions can be taken to aid in pulling a
droplet 1802 from thefirst chamber section 172 into thesecond chamber section 174. For example, a pressure differential can be created that tends to draw adroplet 1802 from thefirst chamber section 172 into thesecond chamber section 174. Such a pressure differential can aid in pulling thedroplet 1802 into thesecond chamber section 874 and can thus be utilized in conjunction with activatingelectrodes 232 as discussed above. Such a pressure differential can be induced hydrodynamically, by a piezo device, utilizing air pressure, utilizing liquid pressure, or the like. Rather than aiding in pulling adroplet 1802 into thesecond chamber section 174, inducing a pressure differential can be utilized to pull thedroplet 1802 into thesecond chamber section 174 without activatingelectrodes 232. Pressure and/or other techniques can thus be utilized to aid in pulling adroplet 1802 into thesecond chamber section 174, or such techniques can be utilized to pull adroplet 1802 into thesecond chamber section 174 without activatingelectrodes 232. - Although not shown in
FIGS. 18A and 18B , additional elements can be included. For example, a moveable cutting tool (e.g., comprising a knife blade) can be provided in thechamber 112 and configured to separate adroplet 1802 in thesecond chamber section 174 from the medium 212 in thefirst chamber section 172. - As shown in
FIGS. 20A and 20B , thedroplets 1802 of the firstliquid medium 212 pulled into thesecond medium 214 can be moved about with the micro-objects 1202 in thedroplets 1802 in thesecond chamber section 174, which can be done by selectively activating and deactivating electrodes 232 (not shown inFIGS. 20A and 20B ) at a region of theelectrowetting surface 184 that is immediately adjacent (e.g., in front of) thedroplet 1802 generally as discussed above with respect toFIG. 2 . As shown inFIG. 21 , thedroplets 1802 can similarly be moved about in the secondliquid medium 214 in thesecond section 874. -
FIG. 22 is an example of aprocess 2200 for culturing biological micro-objects in a microfluidic apparatus. For ease of illustration and discussion, theprocess 2200 is discussed below with respect to theapparatus 1000 ofFIGS. 10A-10C . Theprocess 2200 is not so limited, however, but can be performed with other microfluidic apparatuses. - Although not shown in
FIGS. 23-25 , theequipment 132 and biasing device 118 (e.g., comprising the biasingdevices FIG. 2 ) ofFIGS. 1A-1C can bias, control, and provide miscellaneous functions to theapparatus 1000 illustrated inFIGS. 23-25 . Themaster controller 134 can be configured to perform one, some, or all of the steps of theprocess 2200. - As shown, at
step 2202, theprocess 2200 can load biological micro-objects into holding pens in a micro-fluidic device. Examples are illustrated inFIGS. 23 and 24 , which show top views of theapparatus 1000 ofFIGS. 10A-10C with thecover 110 removed corresponding toFIG. 10C . InFIGS. 23 and 24 , thefirst channel 1012 and thepens 1016 contain the firstliquid medium 212 and thesecond channel 1014 contains the secondliquid medium 214. - As shown in the example of
FIG. 23 ,biological micro-objects 2302 can be selected in thefirst channel 1012 and moved into thepens 1016. As also shown, a particular biological micro-object 2302 can be selected and moved by trapping the particular micro-object 2302 with aDEP trap 1402 and moving theDEP trap 1402 as discussed above with respect toFIG. 11 . - In the example shown in
FIG. 24 ,biological micro-objects 2302 can be introduced (e.g., through an inlet 114) into thesecond channel 1014. As shown, one or more of the micro-objects 2302 can beinside droplets 2402 of a medium (e.g., the first medium 212) in thesecond channel 1014. Thosedroplets 2402 can be moved to openings of thepens 1016 generally as shown. Thedroplets 2402 can be moved in thesecond medium 214 generally as discussed above. Once adroplet 2402 is moved to an interface between thefirst medium 212 and thesecond medium 214 at an opening to apen 1016, the one or morebiological micro-objects 2302 can be moved from thedroplet 2402 in thesecond medium 214 into thefirst medium 212 in thepen 1016. For example, a particular biological micro-object 2302 in adroplet 2402 at the interface between thefirst medium 212 and thesecond medium 214 can be selected and moved by trapping the particular micro-object 2302 with aDEP trap 1402 and moving the DEP trap 1402 (as discussed above with respect toFIG. 11 ) into thepen 1016. As noted, DEP traps 1402 that attract a micro-object 2402 can be generated in theDEP section 1052, which can thus attract a micro-object 2402 sufficiently to pull the micro-object 2402 across the interface between thefirst medium 212 and thesecond medium 214. - Regardless of how the
biological objects 2302 are loaded intopens 1016 atstep 2202, atstep 2204, theprocess 2200 can culture the micro-objects 2302 in thepens 1016. For example, once one or more micro-objects 2302 are placed into eachpen 1016, the micro-objects can be left for a time to grow, produce biological material, or the like. Nutrients can be provided to the micro-objects 2302 in the pens in a flow (not shown) of thefirst medium 212 in thefirst channel 1012. As another example, as shown inFIG. 25 , once micro-objects 2302 are in thepens 1016, the firstliquid medium 212 can be replaced in thefirst channel 1012 with the secondliquid medium 214. This can keep the micro-objects 2302 from escaping thepens 1016 into thefirst channel 1012. Nutrients can be provided to the micro-objects 2302 in thepens 1016 by movingdroplets 2502 of the firstliquid medium 212 through the secondliquid medium 214 in thesecond channel 1014 into thepens 1016.Such droplets 2502 can contain nutrients for the micro-objects 2302 in thepens 1016. Thedroplets 2502 can be moved in thesecond channel 1014 in the same way thatdroplets 1802 are moved as discussed above with respect toFIGS. 18A-21 . - At
step 2206, theprocess 2200 can pull droplets of the first liquid medium from the pens into the second channel. For example, as shown inFIG. 26 , an aliquot in the form of one ormore droplets 2602 of the firstliquid medium 212 can be pulled from apen 1016 into the secondliquid medium 214 in thesecond channel 1014. Such adroplet 2602 can then be moved in thesecond channel 1014 to a location where thedroplet 2602 can be analyzed to determine the chemical or material content of thedroplet 2602. The content of the firstliquid medium 212 in any of thepens 1016 can thus be analyzed by removing one ormore droplets 2602 form thepen 1016. Thedroplet 2602 can be pulled from apen 1016 into thesecond channel 1014 and moved in the secondliquid medium 214 in thesecond channel 1014 as discussed above with respect to 20A-21. - As another example, a
droplet 2604 containing a biological micro-object 2302 can be pulled from apen 1016 into thesecond channel 1014. This can be accomplished in accordance with theprocess 1100 performed in apen 1016 and thesecond channel 1014. -
FIG. 27 illustrates an example of aprocess 2700 that can be performed on a microfluidic apparatus comprising at least one DEP section and at least one EW section. For example, theprocess 2700 can be performed on themicrofluidic apparatus 100 ofFIGS. 1A-1C or theapparatus 1000 ofFIGS. 10A-10C . - As shown, at
step 2702, a net DEP force can be induced on a micro-object in a DEP section of a microfluidic apparatus. For example, the net DEP force F can be induced on the micro-object 228 as illustrated inFIG. 2 and discussed above. The net DEP force F can be sufficiently strong to move the micro-object 228 on thefirst surface 182. Generally as discussed above, thestep 2702 can be repeated fordifferent electrodes 222 at thefirst surface 182 to move the micro-object 228 along any of a variety of possible paths across thesurface 182. - At
step 2704, a wetting property of a region of an electrowetting surface in an EW section of the microfluidic apparatus can be changed. For example, a wetting property of theelectrowetting surface 184 at anelectrode 232 can be changed as illustrated inFIG. 2 and discussed above. The change can be sufficient to move liquid medium (e.g., a droplet of liquid medium) on theelectrowetting surface 184. Generally as discussed above, thestep 2704 can be repeated fordifferent electrodes 232 at theelectrowetting surface 184 to move the liquid medium (e.g., a droplet) along any of a variety of possible paths across theelectrowetting surface 184. - The
steps steps - Although specific embodiments and applications of the invention have been described in this specification, these embodiments and applications are exemplary only, and many variations are possible. For example, the DEP configurations (e.g., 122) illustrated in the drawings or described herein are examples. Generally speaking, the DEP configurations (e.g., 122) can be any type of optoelectronic tweezers (OET) devices examples of which are disclosed in U.S. Pat. No. 7,612,355 or U.S. patent application Ser. No. 14/051,004. Other examples of the DEP configurations (e.g., 122) include any kind of electronically controlled electronic tweezers. As another example, the EW configurations (e.g., 124) shown in the drawings or discussed herein are examples. Generally speaking, the EW configurations (e.g., 124) can be any type of optoelectronic wetting (OEW) devices examples of which are disclosed in U.S. Pat. No. 6,958,132. Other examples of the DEP configurations (e.g., 122) include electrowetting on dielectric (EWOD) devices, which can be electronically controlled.
Claims (52)
Priority Applications (21)
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US14/262,140 US20150306598A1 (en) | 2014-04-25 | 2014-04-25 | DEP Force Control And Electrowetting Control In Different Sections Of The Same Microfluidic Apparatus |
EP15783086.0A EP3134739B1 (en) | 2014-04-25 | 2015-04-25 | Providing dep manipulation devices and controllable electrowetting devices in the same microfluidic apparatus |
PCT/US2015/027679 WO2015164846A1 (en) | 2014-04-25 | 2015-04-25 | Dep force control and electrowetting control in different sections of the same microfluidic apparatus |
CA2945395A CA2945395C (en) | 2014-04-25 | 2015-04-25 | Dep force control and electrowetting control in different sections of the same microfluidic apparatus |
KR1020167032930A KR102237846B1 (en) | 2014-04-25 | 2015-04-25 | Dep force control and electrowetting control in different sections of the same microfluidic apparatus |
AU2015249293A AU2015249293B2 (en) | 2014-04-25 | 2015-04-25 | DEP force control and electrowetting control in different sections of the same microfluidic apparatus |
SG11201608499XA SG11201608499XA (en) | 2014-04-25 | 2015-04-25 | Providing dep manipulation devices and controllable electrowetting devices in the same microfluidic apparatus |
JP2016562024A JP2017519620A (en) | 2014-04-25 | 2015-04-25 | Control of DEP force and control of electrowetting in different sections of the same microfluidic device |
US15/306,355 US11192107B2 (en) | 2014-04-25 | 2015-04-25 | DEP force control and electrowetting control in different sections of the same microfluidic apparatus |
CA2945177A CA2945177C (en) | 2014-04-25 | 2015-04-25 | Providing dep manipulation devices and controllable electrowetting devices in the same microfluidic apparatus |
AU2015249294A AU2015249294B2 (en) | 2014-04-25 | 2015-04-25 | Providing DEP manipulation devices and controllable electrowetting devices in the same microfluidic apparatus |
CN201580022118.7A CN106255888B (en) | 2014-04-25 | 2015-04-25 | DEP force control and electrowetting control in different sections of the same microfluidic device |
SG11201608500XA SG11201608500XA (en) | 2014-04-25 | 2015-04-25 | Dep force control and electrowetting control in different sections of the same microfluidic apparatus |
CN201580022529.6A CN106461696B (en) | 2014-04-25 | 2015-04-25 | DEP controlling equipment and controllable electrowetting device are provided in same microfluidic device |
EP15782624.9A EP3134738B1 (en) | 2014-04-25 | 2015-04-25 | Dep force control and electrowetting control in different sections of the same microfluidic apparatus |
JP2016561772A JP6802709B2 (en) | 2014-04-25 | 2015-04-25 | Providing DEP operating devices and controllable electrowetting devices in the same microfluidic device |
KR1020167032929A KR102232094B1 (en) | 2014-04-25 | 2015-04-25 | Providing dep manipulation devices and controllable electrowetting devices in the same microfluidic apparatus |
PCT/US2015/027680 WO2015164847A1 (en) | 2014-04-25 | 2015-04-25 | Providing dep manipulation devices and controllable electrowetting devices in the same microfluidic apparatus |
IL248365A IL248365B (en) | 2014-04-25 | 2016-10-13 | Providing dep manipulation devices and controllable electrowetting devices in the same microfluidic apparatus |
IL248364A IL248364B (en) | 2014-04-25 | 2016-10-13 | Dep force control and electrowetting control in different sections of the same microfluidic apparatus |
JP2020115194A JP6854376B2 (en) | 2014-04-25 | 2020-07-02 | Control of DEP force and control of electrowetting in different compartments of the same microfluidic device |
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US14/262,140 US20150306598A1 (en) | 2014-04-25 | 2014-04-25 | DEP Force Control And Electrowetting Control In Different Sections Of The Same Microfluidic Apparatus |
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CN106255888B (en) | 2019-12-10 |
SG11201608500XA (en) | 2016-11-29 |
KR20160146975A (en) | 2016-12-21 |
WO2015164846A1 (en) | 2015-10-29 |
KR102237846B1 (en) | 2021-04-08 |
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AU2015249293A1 (en) | 2016-11-17 |
EP3134738A4 (en) | 2017-12-27 |
EP3134738B1 (en) | 2019-07-24 |
AU2015249293B2 (en) | 2020-06-25 |
JP2020179396A (en) | 2020-11-05 |
CA2945395A1 (en) | 2015-10-29 |
JP2017519620A (en) | 2017-07-20 |
JP6854376B2 (en) | 2021-04-07 |
EP3134738A1 (en) | 2017-03-01 |
CN106255888A (en) | 2016-12-21 |
IL248364B (en) | 2021-04-29 |
CA2945395C (en) | 2022-04-12 |
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