TWI657524B - Substrate transport apparatus - Google Patents

Abstract

The present invention provides a transfer apparatus comprising: a frame; a plurality of arms coupled to the frame, each arm having an end effector and an independent drive shaft for extension and contraction of the respective arms relative to the other of the plurality of arms; a linear track defining a degree of freedom of the independent drive shaft for at least one arm extension and contraction; and a common drive shaft shared by each arm and configured to pivot the plurality of arms about a common pivot axis; At least one of the plurality of arms has another drive shaft defining an independent degree of freedom with respect to the other of the plurality of arms.

Description

Substrate handling equipment

The exemplary embodiments are generally related to robotic systems and in particular to robotic handling equipment.

In, for example, the semiconductor manufacturing industry, a workpiece or semiconductor substrate can be processed in a linear tool system and/or a group tool system having a parallel substrate holding station. Generally, in these systems with parallel substrate holding stations, semiconductor manufacturers require independent radial robots that are capable of transferring substrates to and from a parallel substrate holding station at substantially the same time or independently. Typically, this has been accomplished by providing two transfer arms having a spacing between the transfer arms that are substantially the same as the spacing between the parallel substrate holding stations. These transfer arms can be mounted on a bottom arm or linear rail. These transfer arms can also use linear actuators for extending and retracting the arms to and from the substrate holding station.

It would be advantageous to provide a single robot configured with two parallel independent arms, each configured to operate on a common rotating shaft while having independent rotary motor actuation along respective radial axes. It would also be advantageous, A single robot is provided that is configured with two separate arms, each configured to operate on a common rotating shaft while having independent rotary motor actuation along respective radial axes.

102E‧‧‧Load lock

100E1‧‧‧

100E2‧‧‧

R1‧‧‧Flex

R2‧‧‧Flex

210E‧‧‧End Actuator

211E‧‧‧End Actuator

212E‧‧‧End Actuator

213E‧‧‧End Actuator

GM1‧‧‧rail components

GM2‧‧‧ rail components

GM3‧‧‧rail components

GM4‧‧‧rail components

510E‧‧‧Encoder

520E‧‧‧Encoder

BE1‧‧‧ end

BE2‧‧‧ opposite end

BE3‧‧‧ end

BE4‧‧‧ opposite end

810EM‧‧‧End effector extension member

811EM‧‧‧End effector extension member

812EM‧‧‧End effector extension member

813EM‧‧‧End effector extension member

810E‧‧‧End Actuator

813E‧‧‧End Actuator

811E‧‧‧End Actuator

812E‧‧‧End Actuator

SP‧‧‧End effector with seat plane

100A‧‧‧Processing equipment

100B‧‧‧Processing equipment

100C‧‧‧Processing equipment

100D‧‧‧Processing equipment

100F1‧‧‧ facets

100S1‧‧‧ side

100S2‧‧‧ side

100F8‧‧‧ facets

100F2‧‧‧ facets

100F3‧‧‧ facets

101‧‧‧ atmosphere front end

102‧‧‧Vacuum load lock

102A‧‧‧Vacuum load lock

102B‧‧‧Vacuum load lock

102C‧‧‧Vacuum load lock

102D‧‧‧Vacuum load lock

103‧‧‧vacuum backend

104‧‧‧Transfer unit module

104’‧‧‧Transport unit module

104”‧‧‧Transfer unit module

104’’’‧‧‧Transfer unit module

105‧‧‧Load 埠 Module

106‧‧‧Mini environment

107‧‧‧Load埠

108‧‧‧Robot

110‧‧‧ Controller

110A‧‧‧ controller

110B‧‧‧ Controller

123A‧‧‧Sensor

123B‧‧‧Sensor

125A‧‧・Transportation room

125B‧‧・Transportation room

125C‧‧·Transportation room

125D‧‧‧Transportation room

125‧‧‧Transportation room

130‧‧‧Processing station

130T1‧‧‧ parallel processing station

130T2‧‧‧ parallel processing station

130S‧‧‧ single processing station

143‧‧‧Boom

144‧‧‧linear bracket

200‧‧‧ Drive Department

200F‧‧‧ framework

200FI‧‧‧ internal

201‧‧‧ Drive Department

201’‧‧‧ Drive Department

210‧‧‧Transfer arm

210B‧‧‧ bottom member

210R‧‧‧Rotor

210S‧‧‧ Stator

211‧‧‧Transfer arm

211B‧‧‧ bottom member

212‧‧‧Transfer arm

213‧‧‧Transfer arm

214‧‧‧Linear sliding arm

215‧‧‧SCARA arm

216‧‧‧frog legs

217‧‧‧frog frog arm

218‧‧‧Doubly symmetric arms

220R‧‧‧Rotor

220S‧‧‧ Stator

250‧‧‧ bottom member

250P‧‧‧Internal room

250C‧‧‧ Cover

251‧‧‧ Drive Department

251F‧‧‧Frame

251F2‧‧‧Second frame member

251F1‧‧‧ first frame member

251M‧‧‧ openings

251’‧‧‧ Drive Department

251F’‧‧‧Frame

252‧‧‧ Drive Department

252F‧‧‧Frame

252’‧‧‧ Drive Department

270‧‧‧Z-axis drive

270C‧‧‧ bracket

275‧‧‧Flexible seal

276‧‧‧Magnetic fluid seal

277‧‧‧Magnetic fluid seal

280‧‧‧harmonic drive motor

280S‧‧‧ drive shaft

281‧‧‧ Shell

282‧‧‧Rotary drive department

290‧‧‧ lead

296‧‧‧Encoder

300P‧‧‧Internal room

310‧‧‧Linear rails or rails

310A‧‧‧First linear rail or rail

310B‧‧‧Second linear rail or rail

311A‧‧‧First linear rail or rail

311‧‧‧Linear rails or rails

311B‧‧‧Second linear rail or rail

320‧‧‧First drive motor

320S‧‧‧ Seal

321‧‧‧Second drive motor

321S‧‧‧ Seal

330A‧‧‧带

330B‧‧‧带

331A‧‧‧带

332B‧‧‧ drive pulley

332A‧‧‧ driven pulley

333A‧‧‧ drive pulley

333B‧‧‧driven pulley

331B‧‧‧带

370‧‧‧ drive shaft

371‧‧‧Encoder

400‧‧‧Bridge components

410A‧‧‧linear rail or rail

410B‧‧‧Linear rail or rail

410‧‧‧ pulley

411‧‧‧ pulley

412‧‧‧Transmission components

420‧‧‧ pulley

421‧‧‧ pulley

422‧‧‧Transmission components

510S‧‧·ball screw

510M‧‧‧ motor

510C‧‧• Ball Nut Adapter or Coupler

510‧‧‧Drive motor

520S‧‧·ball screw

520M‧‧ motor

520C‧‧‧Ballnut nut adapter or coupler

520‧‧‧Linear motor

550‧‧‧ bottom member

550F‧‧‧Frame

550C‧‧‧Removable cover

550CS‧‧‧ Sealing components

551‧‧‧Internal room

560‧‧‧ Telescopic or sealed support members

560M‧‧‧Installation components

560S‧‧‧ gap components

560B‧‧‧Flexible seal

560SP‧‧‧Axis

561‧‧‧ Telescopic or sealed support members

561M‧‧‧Installation components

561S‧‧‧ gap components

561B‧‧‧Flexible seal

561SP‧‧‧Axis

565A‧‧‧ Sealing member

565B‧‧‧ Sealing member

566A‧‧ interface

566B‧‧ interface

566S‧‧‧ Sealing member

575A‧‧ hole or opening

575B‧‧ hole or opening

588A‧‧‧linear track

588B‧‧‧linear track

597‧‧‧Impact or retaining members

599‧‧‧ arrow

600‧‧‧Rotary Drive Department

600F‧‧‧ frame or enclosure

601‧‧‧Rotary Drive Department

601F‧‧‧Frame or casing

605‧‧‧Transfer arm

606‧‧‧Transfer arm

610‧‧‧First drive motor

610S‧‧‧ Stator

610R‧‧‧Rotor

620‧‧‧Second drive motor

620S‧‧‧ Stator

620R‧‧‧Rotor

640‧‧‧Outer drive shaft

645‧‧‧ coaxial drive shaft assembly

650‧‧‧ inner drive shaft

660‧‧‧ Seal

733A‧‧‧ drive pulley

733B‧‧‧ drive pulley

734A‧‧‧ Idler

734B‧‧‧ Idler

735A‧‧‧ Idler

735B‧‧‧ Idler

740‧‧‧Belt or belt

741‧‧‧ Belt or belt

800‧‧‧ Drive Department

801‧‧‧ Drive Department

801’‧‧‧ Drive Department

810‧‧‧ single-order linear sliding arm

811‧‧‧ single-order linear sliding arm

812‧‧‧Single-order linear sliding arm

813‧‧‧ single-order linear sliding arm

850‧‧‧ Drive Department

851‧‧‧Frame

851C1‧‧‧Shell or cover

851M‧‧ hole or opening

851C3‧‧‧ Cover

851C2‧‧‧ Cover

851C1’‧‧‧ Shell

852‧‧‧Frame

853‧‧‧Transmission Department

860‧‧‧Seal Motor Division

860S‧‧‧ Sealing member

861‧‧‧Support members

901‧‧‧ Space or opening

910A‧‧‧ Idler

910B‧‧‧ Idler

920‧‧‧ pulley

921‧‧‧ drive pulley

930‧‧‧Linear rail or guide member

931‧‧‧Linear rail or guide member

940‧‧‧ bracket or arm support

940M‧‧‧ Arm Installation Department

940B1‧‧‧ belt or belt

940B2‧‧‧ belt or belt

941‧‧‧ bracket or arm support

941M‧‧‧ Arm Installation Department

941B1‧‧‧ belt or belt

941B2‧‧‧ belt or belt

973‧‧‧ openings

974‧‧‧ openings

997‧‧‧ Sealing Department

998‧‧‧ Sealing Department

1000‧‧‧Fixed support members

1100‧‧‧ drive

1100D‧‧‧ drive shaft

1104‧‧‧Transfer unit module

1110‧‧‧Linear drive motor

1130‧‧‧ pivot housing

1150‧‧‧ bottom member

1150'‧‧‧ bottom member

1200‧‧‧ drive

1200S‧‧‧ drive shaft

1200B‧‧‧ bearing

1220‧‧‧ pivot housing

1250‧‧‧Sealed drive housing

1251‧‧‧Sealed drive housing

The above aspects and other features of the present disclosure are described in the following description with reference to the accompanying drawings in which: FIG. 1A-1D is a schematic diagram of a substrate processing apparatus according to an embodiment of the present disclosure; FIGS. 1E and 1F are based on 2A-2D are schematic views of a portion of a substrate processing apparatus according to an embodiment of the present disclosure; and FIG. 2E is a schematic view of a substrate handling apparatus according to an embodiment of the present disclosure; FIG. 2E is a schematic diagram of a substrate handling apparatus according to an embodiment of the present disclosure; 2F-2J is a schematic view of a carrier arm according to an embodiment of the present disclosure; FIGS. 3A-3E are diagrams of the substrate shown in FIGS. 2A-2D according to an embodiment of the present disclosure. FIG. 3F and FIG. 3G are schematic diagrams showing a driving profile according to an embodiment of the present disclosure; FIGS. 4A-4B are substrate handling shown in FIGS. 2A-2D according to an embodiment of the present disclosure. Schematic diagram of a portion of the device; FIGS. 5A-5C are substrates in accordance with an embodiment of the present disclosure 5D and 5E are schematic views of a portion of the substrate handling apparatus shown in FIGS. 5A-5C according to an embodiment of the present disclosure; FIGS. 6A-6B are diagrams of a substrate according to an embodiment of the present disclosure. FIG. 7A-7B are schematic views of a substrate carrying device according to an embodiment of the present disclosure; FIG. 7C is a schematic view of a substrate carrying device according to an embodiment of the present disclosure; FIGS. 8A-8B are based on the present invention; FIG. 9A-9F are schematic views of a portion of the substrate handling apparatus shown in FIGS. 8A-8B according to an embodiment of the present disclosure; FIGS. 10A-10B are based on the present invention; FIG. 11A-11D are schematic views of a substrate carrying apparatus according to an embodiment of the present disclosure; and FIGS. 12A-12C are diagrams of substrate handling according to an embodiment of the present disclosure. Schematic diagram of the device.

SUMMARY OF THE INVENTION AND EMBODIMENT

1A-1D are schematic views of a substrate processing apparatus in accordance with an embodiment of the present disclosure. Although the aspects of the disclosed embodiments will be described with reference to the drawings, it should be understood that the aspects of the disclosed embodiments may be in many forms. Shi. Moreover, any suitable size, shape or type of elements or materials can be used.

Processing devices 100A, 100B, 100C, 100D, such as, for example, semiconductor tool stations, are shown in accordance with aspects of the disclosed embodiments. Although the semiconductor tool station is shown in the drawings, the aspects of the disclosed embodiments described herein can be applied to any tool station or application using a robotic arm. In one aspect, the processing devices 100A, 100B, 100C, 100D are shown as having a group tool configuration (eg, having a substrate holding station connected to a central chamber) while in other aspects the processing device can be a linear configuration tool, However, aspects of the disclosed embodiments can be applied to any suitable tool station. Apparatus 100A, 100B, 100C, 100D typically includes an ambience front end 101, at least one vacuum load lock 102, 102A, 102B, and a vacuum back end 103. The at least one vacuum load lock 102, 102A, 102B can be coupled to any suitable port or opening of the front end 101 and/or the rear end 103 in any suitable configuration. For example, in one aspect, the at least one load lock 102, 102A, 102B can be arranged side by side in a common horizontal plane as seen in Figures 1B-1C. In another aspect, the at least one load lock can be configured in a grid format such that at least two load locks 102A, 102B, 102C, 102D are in columns (eg, with spaced horizontal planes) and rows (eg, separated) The vertical plane is configured as shown in Figure 1E. In other aspects, the at least one load lock can be a single row load lock 102 as shown in Figure 1A. In another aspect, the at least one load lock 102, 102E can be stacked in a row arrangement as shown in FIG. 1F. It should be understood that although the load lock is illustrated on the end 100E1 or facet 100F1 of the transfer chambers 125A, 125B, 125C, 125D, In one aspect, one or more load locks can be disposed on any number of sides 100S1, 100S2, end 100E1, 100E2, or facets 100F1-100F8 of the transfer chambers 125A, 125B, 125C, 125D. Each of the at least one load locks may also include one or more wafer/substrate retention planes WRP (Fig. 1F) with the substrates held in suitable supports within the respective load locks. In other aspects, the tool station can have any suitable configuration. The components of the front end 101, each of the at least one load lock 102, 102A, 102B, and the back end 103 can be coupled to the controller 110, which can be part of any suitable control architecture such as, for example, group architecture control. The control system can be a closed-loop controller having a master controller, a group controller, and an autonomous remote controller, such as disclosed in U.S. Patent No. 7,904,182, issued to Mar. , the entire contents of which is incorporated herein by reference. In other aspects, any suitable controller and/or control system can be used.

In one aspect, the front end 101 typically includes a load port module 105 and a mini environment 106 such as, for example, an equipment front end module (EFEM). The load port module 105 can be a box opener/loader tool standard (BOLTS) interface that complies with SEMI standards E15.1, E47.1, E62, E19.5, or E1.9 for 300mm load ports, front openings, or Bottom open box/container and bowl. In other aspects, the load port module can be configured as a 200 mm wafer/substrate interface, a 450 mm wafer/substrate interface, or any other suitable substrate interface such as, for example, a larger or smaller semiconductor wafer/substrate, flat panel display Flat panel, solar panel, reticle or any other suitable item. Although the three load port modules 105 are shown in FIGS. 1A-1D, in any other aspect, any suitable amount of load port modules can be incorporated into the front end 101. Load The module 105 can be configured to receive a substrate carrier or cassette C from an overhead handling system, an automated guided vehicle, a personal truck, a rail vehicle, or in any other suitable handling method. The load port module 105 can be coupled to the mini environment 106 via the load port 107. The load port 107 can permit passage of the substrate between the substrate cassette and the mini environment 106. The mini environment 106 generally includes any suitable transfer robot 108 that can incorporate one or more aspects of the disclosed embodiments described herein. In one aspect, the robot 108 can be a rail-mounted robot, for example, U.S. Patent No. 6,002,840 issued on December 14, 1999; U.S. Patent No. 8,419,341 issued on April 16, 2013, issued on January 19, 2010 The disclosure of U.S. Patent No. 7,648,327, the entire disclosure of which is incorporated herein by reference. In other aspects, the bot 108 can be substantially similar to that described with respect to the back end 103 herein. The mini environment 106 can provide control of the cleaning zone for substrate transfer between multiple load modules.

At least one vacuum load lock 102, 102A, 102B can be positioned and coupled between the mini environment 106 and the back end 103. In other aspects, the load port 105 can be substantially directly coupled to at least one of the load locks 102, 102A, 102B or the transfer chambers 125A, 125B, 125C, 125D, wherein the substrate carrier C is pumped back to the transfer chamber 125A, The vacuum and substrate of 125B, 125C, 125D are transferred directly between the substrate carrier C and the load lock or transfer chamber. In this aspect, the substrate holder C can act as a load lock so that the processing vacuum of the transfer chamber projects into the substrate holder C. As can be appreciated, if the substrate carrier C is directly coupled to the load lock by a suitable load lock, any suitable transfer device can be placed within the load lock or otherwise enter the carrier C for transferring the substrate to and from the substrate. Bracket C. It is noted that the term "vacuum" as used herein may mean a high vacuum such as 10 ^-5 Torr or less, in which the substrate is processed. At least one load lock 102, 102A, 102B typically includes an atmosphere and a vacuum slotted valve. The slotted valve of the load locks 102, 102A, 102B (and for the processing station 130) can provide environmental isolation for use to evacuate the load lock after loading the substrate from the front end of the atmosphere and to vent the lock with an inert gas such as nitrogen. Keep the vacuum in the chamber. As described herein, the slotted valves of the processing apparatus 100A, 100B, 100C, 100D can be positioned in the same plane, in different vertical stacking planes, or in a combination of slotted valves positioned in the same plane and slotted valves positioned in different vertical stacking planes. (As described above with respect to load )) to regulate substrate transfer to and from at least processing station 130 and load locks 102, 102A, 102B coupled to transfer chambers 125A, 125B, 125C, 125D. The at least one load lock 102, 102A, 102B (and/or the front end 101) may also include an aligner for aligning the reference point of the substrate to a desired location for processing or any other suitable substrate measuring device. In other aspects, the vacuum load lock can be positioned at any suitable location of the processing device and have any suitable configuration.

The vacuum back end 103 typically includes a transfer chamber 125A, 125B, 125C, 125D, one or more processing stations 130, and any suitable number of transfer unit modules 104, including one or more states that may include the disclosed embodiments described herein. One or several transfer robots. The transfer chambers 125A, 125B, 125C, 125D can have any suitable shape and size, for example, in compliance with the SEMI standard E72 rules. The transfer unit module 104 and one or more transfer robots will be described below and can be at least partially positioned within the transfer chambers 125A, 125B, 125C, 125D to transfer the substrate to the load lock 102, 102A, 102B (or between 匣C of the load )) and the different processing stations 130. In one aspect, the transfer unit module 104 can be removed from the transfer chambers 125A, 125B, 125C, 125D as modular units such that the transfer unit module 104 complies with the SEMI standard E72 rules.

Processing station 130 can be operated on a substrate through various deposition, etching or other types of processes to form circuits or other desired structures on the substrate. Standard processes include, but are not limited to, thin film processes that use vacuum such as plasma etching or other etching processes, chemical vapor deposition (CVD), plasma vapor deposition (PVD), implantation such as ion implantation, measurement, Rapid thermal processing (RTP), dry bar atomic layer deposition (ALD), oxidation/diffusion, nitride formation, vacuum lithography, epitaxy (EPI), wire bonding machines and vaporization or other thin film processing using vacuum pressure. The processing station 130 is communicably coupled to the handling chambers 125A, 125B, 125C, 125D in any suitable manner, such as through the slotting valve SV, to permit the substrate to pass from the handling chamber 125 to the processing station 130 and vice versa. The slotted valve SV of the handler 125 can be configured to allow dual (eg, more than one substrate processing station located within a common housing) or parallel processing stations 130T1, 130T2, single processing station 130S, and/or stacked processing modules/loads Lock (Figures 1E and 1F).

It is noted that when one or more arms of the transfer unit module 104 are aligned with the predetermined processing station 130, the substrate to and from the processing station 130, the load locks 102, 102A coupled to the transfer chambers 125A, 125B, 125C, 125D, A transfer of 102B (or 匣C) may occur. In accordance with aspects of the disclosed embodiments, one or more substrates may be transferred separately or substantially synchronously to respective predetermined processing stations 130 (eg, such as when substrate substrates are selected/placed from juxtaposition or string) The processing stations of the columns are shown in Figures 1B, 1C and 1D). In one aspect, the transfer unit module 104 can be mounted on the boom 143 (see, for example, FIG. 1D) or the linear bracket 144, as described in the following document, filed on October 18, 2013, entitled "Processing Equipment" U.S. Provisional Patent Application No. 61/892,849, filed on November 15, 2013, the U.S. Provisional Patent Application No. 61/904,908, filed on November 15, 2013, and filed on February 11, 2013. International Patent Application No. PCT/US13/25513, the entire disclosure of which is incorporated herein by reference.

Referring now to Figures 2A-2D, in one aspect, the transfer unit module 104 includes one or more drive units 200, 201 and at least one transfer arm 210, 211, 212, 213. The at least one drive portion 200, 201 can include a common drive portion 200 that includes a frame 200F that houses one or more Z-axis drives 270 and a rotary drive portion 282. The interior 200FI of the frame 200F can be sealed in any suitable manner as will be described below. In one aspect, the Z-axis drive can be any suitable drive configured to move at least one of the transfer arms 210, 211, 212, 213 along the Z-axis. The Z-axis drive train is explained as a helical drive in Figure 2E but in other aspects the drive may be any suitable linear drive such as a linear actuator, a piezo motor or the like. The rotary drive portion 282 can be configured as any suitable drive portion such as, for example, a simple harmonic drive. For example, the rotary drive 282 can include any suitable amount of simple harmonic drive motor 280. In one aspect, the rotary drive portion 282 shown in FIG. 2E includes a simple harmonic drive motor 280 for driving the shaft 280S. However, in other aspects, the drive portion can include any suitable amount of simple harmonic drive motor corresponding to, for example, Any suitable drive shaft in the coaxial drive system. The simple harmonic drive motor 280 can have a high capacity input The bearings are such that the component sheets of the magnetic fluid seals 276, 277 are coaxially coupled through the harmonic drive motor 280 having sufficient stability and clearance and are supported at least partially during the desired rotation T and extension R movement of the transfer unit module 104. . It is noted that the magnetic fluid seals 276, 277 can include several components that form a substantially concentric coaxial seal as will be described below. In this example, the rotary drive 282 includes a housing 281 that houses the drive motor 280 in a manner substantially similar to that described in the following patents, such as U.S. Patent Nos. 6,845,250, 5, 899, 658, 5, 813, 823, and 5, 720, 590, incorporated herein by reference. The magnetic fluid seals 276, 277 can be tolerated to seal the drive shaft 280S in the drive shaft assembly. It is noted that the drive shaft 280S can also have a hollow architecture (eg, having a bore that runs longitudinally along the center of the drive shaft) to allow the lead 290 or any suitable item to be used by the drive assembly for connection to, for example, another drive to the drive 200. A drive portion (eg, such as drive portion 201) and/or at least one transfer arm 210, 211, 212, 213.

In one aspect, the outer casing 281 can be mounted to a bracket 270C coupled to the Z-axis drive 270 such that the Z-axis drives the carriage (and the outer casing 281 positioned thereon) along the Z-axis. As can be appreciated, in order to seal a controlled atmosphere wherein at least one of the transfer arms 210, 211, 212, 213 operates from the interior of the drive 200 (which is operable in an atmospheric pressure ATM environment) may include one or more of the magnetic fluid seals described above 276, 277 and telescopic seal 275. The telescoping seal 275 can have one end coupled to the bracket 270C and the other end coupled to any suitable portion of the frame 200F1 such that the interior 200FI of the frame 200F and the operation of at least one of the transfer arms 210, 211, 212, 213 therein are subject to operation Control atmosphere isolation.

In this aspect, the driving shaft 280S can be coupled to the driving portion 201 for rotating the driving portion 201 around the common axis CAX common to each of the at least one transfer arm 210, 211, 212, 213 to the arrow T. direction. Here, the driving portion 201 may include a bottom member 250 and at least one driving portion 251, 252. In this aspect, there are two driving portions 251, 252, but in any other aspect, any suitable amount of driving portions can be provided. The bottom member 250 includes a frame that forms an interior chamber 250P. Each drive portion 251, 252 also includes a frame 251F, 252F that forms an interior chamber 300P that is in sealing communication with the interior chamber 250P of the bottom member 250. As can be appreciated, each drive portion 251, 252 can include any suitable access opening that can be sealed by, for example, any suitable outer cover 250C. As seen in Figure 2B, the bottom member 250 can include first and second ends such that the drive portions 251, 252 are sealingly coupled to each of the ends. The drive portions can be configured at any suitable angle β relative to each other such that the extension/retraction axes of the arms mounted thereon can extend through the turns of the transfer chambers 125A, 125B, 125C, 125D in which the arms are located. For example, in one aspect, the angle β (which may correspond to the angle between the extension/contraction axes of the driving portions 251, 252) may be substantially the same as or equal to the angle α of the facets 100F1 - 100F8 of the transfer chamber 125A (Fig. 1A). In other aspects, the angle β may be about 0 such that the extension/retraction axes of the drive portion (and the arms mounted thereon) are substantially parallel to each other for extending through, for example, the transfer chamber 125B (Fig. 1B), 125C ( The parallel portions of Figures 1C) and 125D (Figure 1D). In still other aspects the angle β may be adjustable (manually or by automation, as will be described below) such that the extension/contraction axes of the drive portions 251, 252 may have any suitable angle β with respect to each other. For example, the angle β can be adjusted between the angles of 0 and θ for The crucible extending through the transfer chamber 125C (Fig. 1C) and/or used for automatic workpiece centering will be described below. In still other aspects, the angles β and/or spacing between the drive portions may be fixed such that the arms of the transfer unit module 104 are permeable to rotation of the common drive shaft CAX and independent extension or operation of each of the drive portions 251, 252 And extending through the raft of the transfer module having the beveled end faces. The bottom member 250 can have any suitable length L1 to separate the shafting fixed distances of the extensions/retractions R1, R2 of each of the drive portions 251, 252, which can meet or match the matching requirements imposed by the system tool configuration ( For example, the distance between the turns of the module in which the transfer unit module 104 is located).

3A to 3G, the drive units 251 and 252 will be described with respect to the drive unit 251. It should be appreciated that the drive portion 252 can be substantially similar to the drive portion 251. As indicated above, the drive portion 251 includes a frame 251F that may be a first frame member 251F1 and a second frame member 251F2 that are sealingly coupled to each other in any suitable manner. In other aspects, the frame can have any suitable configuration and consist of any suitable amount of frame members. The frame 251F can include a hole or opening 251M configured to mount the frame 251F to the bottom member 250 in any suitable manner such that the interior chamber 300P of the drive portion 251 is in sealing communication with the interior chamber 250P of the bottom member 250 to share a common atmosphere environment The internal chambers 250P, 300P are located between the interior of the outer casing 281 of the drive unit 200. In this aspect, the drive portion 251 can be configured to support and drive the two transfer arms 212, 213. In other aspects, the drive portion 251 can be configured to support and drive any suitable amount of transfer arms. The drive portion 251 can include a first linear rail or slide rail 310A, 310B (typically a linear rail or slide rail 310) and a second linear rail or slide rail 311A, 311B (typically The linear rail or slide rail 311) is configured to define the degree of freedom of the independent drive shaft for each of the respective transfer arms 212, 213. In this aspect, the drive portion includes a first drive motor 320 and a second drive motor 321 for driving the respective arms 212, 213 through, for example, a pulley drive drive. Although the motor is illustrated as a rotary motor, in other aspects any suitable motor and/or suitable drive drive can be used, such as, for example, a direct linear motor, a linear piezoelectric electric motor, a linear induction motor, a linear synchronous motor, a brush. Or brushless linear motors, linear stepping motors, linear servo motors, reluctance motors, etc. Examples of suitable linear motors are described in the following patents, for example, U.S. Patent Application Serial No. 13/286,186, filed on Jan. 31, 2011, entitled &quot U.S. Patent Application No. 13/159,034, entitled "Substrate Processing Equipment", and U.S. Patent No. 7,901,539, 2012, entitled "Equipment and Method for Handling and Handling Substrates", issued on March 8, 2011 U.S. Patent No. 8,293,066, entitled "Equipment and Method for Handling and Handling Substrates", issued on October 23, 2013, issued the title of "Linear Vacuum Robot with Z Motion and Articulating Arms" on April 16, 2013 U.S. Patent No. 7,575,406, entitled "Substrate Processing Equipment", and U.S. Patent No. 7,959,395, entitled "Substrate Processing Equipment", issued on June 14, 2011, issued on Aug. 18, 2009, the entire contents of which are incorporated herein by reference. It is incorporated herein by reference.

The first and second drive motors 320, 321 may be substantially similar to the simple drive of the drive motor 280. In other aspects, the drive motors 320, 321 may be any suitable drive motor. Each drive motor 320, The 321 may have respective seals 320S, 321S, such as magnetic fluid seals for sealing the holes in the frame 251, the drive shafts 370 of the motors 320, 321 extending through the frame 251 for coupling to the respective drive pulleys 332B in any suitable manner. , 333A. Drive pulleys 332B, 333A can be coupled to respective driven pulleys 332A, 333B in any suitable manner, such as by one or more straps. For example, drive pulley 332B can be coupled to driven pulley 332A via straps 330A, 330B. The drive pulley 333A is coupled to the driven pulley 333B through the belts 331A, 331B. The belts 330A, 330B, 331A, 331B may be, for example, any suitable belts described below, for example, U.S. Provisional Patent Application No. 61/869,870, filed on Jan. The entire contents are incorporated herein by reference. As can be appreciated, the drive shafts described herein can have any suitable encoder, such as encoders 371, 296, 371 for detecting the position of the respective drive motors and transmitting one or more signals to any suitable controller, such as for example The controller 110 is configured to control the transfer unit module 104. As can also be appreciated, the sealed interior of the drive portions 251, 252 and the bottom member 250 allows the drive motors 320, 321 of each of the drive portions 251, 252 to be located in an atmosphere separate from the environment in which the transfer arms 210-213 operate or otherwise sealed . The sealed interior of the driving portions 251, 252 and the bottom member 250 may also allow a line or tube route from the driving portion 200 to the driving portion 201.

Referring again to Figures 2A-2D and 4A-4B, transfer arms 210-213 will be described with respect to drive portion 252 in accordance with aspects of the disclosed embodiments. In this aspect, the transfer arms 210-213 have a telescoping configuration but in other aspects the transfer arms 210-213 can have any suitable configuration. And in each of these ways The drive portions 251, 252 include two telescoping arms 210-213 but in any other aspect any suitable amount of transfer arms can be provided on each of the drive portions 251, 252. In this aspect, each of the transfer arms 210-213 includes a bottom member 210B, 211B and end effectors 210E, 211E that are movably coupled to the respective bottom members 210B, 211B. Each of the bottom members 210B, 211B can have any suitable drive configurable for driving the interior of the end effector along the extension/contraction axis. The interior of the bottom member may be exposed to an environment in which the transfer arm operates but may include any suitable seal, such as a gas seal, for preventing any particles from entering the environment or contacting the workpiece being carried within the environment. It is noted that each of the end effectors described herein includes an end effector seating plane SP (Fig. 2D) in which the substrate is held by the end effector. The bottom member 210B may be movably coupled to the drive portion 252 through the linear rails 310A, 310B so as to be movable relative to the drive portion 252. The bottom member 211B may be movably coupled to the driving portion 252 through the linear rails 311A, 311B so as to be movable relative to the driving portion 252. Each arm 210, 211 has a degree of freedom defined by the respective rails such that the linear trajectories are parallel to each other to define the degree of freedom of each of the transfer arms 210 and 211 (eg, the end effector's transfer plane is one set in the other Above). As can be appreciated, the transfer arms 212, 213 have similar degrees of freedom. As can also be appreciated, the degree of freedom defined by the linear track for the arm 211 can be the same as the degree of freedom defined by the linear track for the transfer arm 212 (eg, the end effector of each transfer arm 211, 212 is in the same plane) And the degree of freedom defined by the linear rail for the arm 210 may be the same plane as the degree of freedom defined by the linear rail for the transfer arm 213 (eg, the end effector position of each transfer arm 210, 213) In the same plane).

The bottom members 210B, 211B may be juxtaposed on the drive portion 252 to couple the bottom member 210B to at least one of the straps 330A, 330B such that when the motor 320 drives the straps 330A, 330B, the bottom member 210B and the straps 330A, 330B At least one of them is driven together in the direction of the extension/retraction R. The bottom member 211B is coupled to at least one of the belts 331A, 331B such that when the motor 321 drives the belts 331A, 331B, the bottom member 211B is driven together with at least one of the belts 331A, 331B in the direction of the extension/retraction R. In other aspects, the bottom members can have any suitable spatial configuration relative to each other.

The bottom member 210B can include linear rails or rails 410A, 410B that are at least partially disposed within the interior of the bottom member in which the end effector 210E is movably mounted for relative rotation of the bottom member 210B and the drive portion 252. The pulleys 410, 411, 420, 421 are rotatably mounted at the ends or at any other suitable location within the interior of the respective bottom members 210B, 211B. One or more belts (similar to the above), a single continuous belt/belt or any other suitable transmission member 412, 422 may be coupled to each other of the pulleys 410, 411, 420, 421. In one aspect, each of the transmission members 412, 422 can be grounded to the frame 252F of the drive portion 252 to drive the respective transmission members 412, 422 by relative movement between the bottom members 210B, 211B and the frame 252F. The end effector 211E can be coupled to the transmission member 412 such that when the bottom member 211B is moved in the direction of the arrow R, the end effector is also moved relative to the bottom member 211B by any suitable gear ratio defined by, for example, the pulleys 410, 411. The direction of the arrow R. Similarly, the end effector 210E may be coupled to the transmission member 412 such that when the bottom member 210B is moved in the direction of the arrow R, the end effector is also moved to the arrow R relative to the bottom member 210B by any suitable gear ratio defined by, for example, the pulleys 420, 421. direction. As can be appreciated, the bridging member 400 can be disposed on one of the end effectors, such as the end effectors 211E, 212E, such that the end effectors 211E, 212E can be positioned at the other end effector of the respective drive portions 251, 252. Above 210E, 213E, the end effectors are allowed to pass each other up and down.

As indicated above, the transfer arm described herein is illustrated as a telescopic arm (or a sliding arm as described below) for exemplary purposes only. However, in other aspects, the transfer arm can be any suitable transfer arm such as for the linear slide arm 214 as shown in Figure 2G. In other aspects, the arms can be SCARA arms 215 (Fig. 2H) or other suitable arms having any suitable arm linkage. Suitable examples of arm linkages are found in, for example, U.S. Patent No. 7,578,649 issued on August 25, 2009, U.S. Patent No. 5,794,487 issued on August 18, 1998, issued May 24, 2011 U.S. Patent No. 7,946,800, U.S. Patent No. 6,485,250 issued on November 26, 2002, U.S. Patent No. 7,891,935 issued on Feb. 22, 2011, U.S. Patent No. 8,419,341 issued on April 16, 2013, and November 10, 2011 U.S. Patent Application Serial No. 13/293, the entire disclosure of which is incorporated herein by reference to U.S.S. , the entire contents of which is incorporated herein by reference. In the aspect of the disclosed embodiment, at least one transfer arm can be used from the conventional SCARA (Selected compliant articulated robot arm) type design, including upper arm, with driven forearm and with forced end effector, or from telescopic arm or any other suitable arm design. A suitable example of a transfer arm can be found in the following patents, for example, U.S. Patent Application Serial No. 12/117,415, filed on May 8, 2008, entitled <RTIgt; U.S. Patent No. 7,648,327, issued Jan. 19, the entire disclosure of which is incorporated herein by reference. The operation of the transfer arms can be independent of each other (eg, the extension/retraction of each arm is independent of the other arms), can be operated through a misalignment switch, or can be operatively coupled in any suitable manner such that the arms share at least A common drive shaft. In other aspects, the transfer arm can have any other desired configuration, such as a frog leg arm 216 (Fig. 2F) configuration, a frog arm 217 (Fig. 2J) configuration, and a dual symmetrical arm 218 (Fig. 2I) set. State and so on. Suitable examples of transfer arms are found in U.S. Patent No. 6,231,297 issued May 15, 2001, U.S. Patent No. 5,180,276 issued Jan. 19, 1993, and U.S. Patent No. 6,464,448 issued on October 15, 2002. US Patent No. 6,224,319 issued May 1, 2001, U.S. Patent No. 5,447,409 issued on September 5, 1995, U.S. Patent No. 7,578,649 issued on August 25, 2009, and U.S. Patent No. 5,794,487, US Patent No. 7,946,800 issued on May 24, 2011, US Patent No. 6,485,250 issued on November 26, 2002, US Patent No. 7,891,935 issued on February 22, 2011, and November 10, 2011 U.S. Patent Application Nos. 13/293, 717 and October 11, 2011 for "two-arm robots" U.S. Patent Application Serial No. 13/270,844, the entire disclosure of which is incorporated herein by reference.

Referring now to Figures 5A-5E, the handling unit module 104' is illustrated in accordance with aspects of the present disclosure. The transport unit module 104' is substantially similar to the transport unit module 104 described above and includes drive units 200, 201'. Here, the driving portion 201' includes a bottom member 550 having a frame 550F forming an inner chamber 551. In one aspect, the interior chamber 551 can include a removable cover 550C and any suitable sealing member 550CS for sealing the interface between the outer cover 550C and the frame 550F when the outer cover 550C is mated with the frame 550F. The internal chamber may be in communication with the interior of the drive unit 200 in a manner substantially similar to that described above. In this aspect, the drive portions 251, 252 can be movably mounted to the bottom member 550 of the drive portion 201' in any suitable manner to provide arms of the drive portions 251, 252 having extension/retraction R relative to the arms. The axis has a degree of freedom in beveling.

In one aspect, the drive portion can include a telescoping or sealing support member 560, 561 for movably supporting each of the drive portions 251, 252. Each of the telescoping members 560, 561 can include gap members 560S, 561S that are movably coupled to the mounting members 560M, 561M in any suitable manner, such as through telescoping seals 560B, 561B. Mounting members 560M, 561M are configured for coupling to frame 550F in any suitable manner such that gap members 560S, 561S are at least partially inserted into interior chamber 551 through respective apertures or openings 575A, 575B. In any aspect, any suitable sealing member 565A, 565B can be a sealed environment disposed between the mounting members 560M, 561M and the frame 550F for retaining the interior chamber 551. One state The sample telescoping seals 560B, 561B can be constructed of any suitable material and have any suitable configuration to provide axial support in the X and Z directions of, for example, the gap members 560S, 561S. In other aspects, the gap members 560S, 561S can be axially supported, such as through any suitable means that are at least partially positioned within the interior chamber 551 and that are sealed with an arm operated ambient linear rail, sleeve, bearing, or the like. For example, frame 550F can include one or more linear rails 588A, 588B (FIG. 5E) disposed within interior chamber 551. Each gap member 560S, 561S may be fixedly mounted to or include one or more rail members GM1, GM2, GM3, GM4 configured such that the gap members 560S, 561S linearly move along the linear rail in the direction of arrow 599 and are linear Rails 588A, 588B are supported in the X and Z directions.

Each of the gap members 560S, 561S includes interfaces 566A, 566B disposed in any suitable manner to couple the gap members 560S, 561S with the respective drive portions 251, 252 such that the internal passages IP of the gap members 560S, 561S promote the interior chamber 551 and The atmosphere between the internal chambers 300P of the respective driving units 251 and 252 communicates with each other, and allows, for example, passages between the bottom member 550 and the respective driving portions 251 and 252, such as wires and pipelines. As can be appreciated, any suitable tidal or retaining member 597 can be disposed within the interior chamber 551 for holding or otherwise securing the moving side of any of the lines, lines, etc., through the internal passages IP of the gap members 560S, 561S. In any aspect, any suitable sealing member 566S can be disposed between the interfaces 566A, 566B and the respective frames 251F, 252F such that the internal atmosphere of the interior chambers 551, 300P can be sealed in an environment in which the transfer arm operates.

Each gap member 560S, 561S may include a shaft portion 560SP, 561SP, which form an internal passage IP and at least partially extend through the holes 575A, 575B into the interior chamber 551 of the bottom member 550. One or more drivers 510, 520 can be disposed within the bottom member 550 in any suitable manner for imparting linear motion (eg, along the Y-axis along the Y-axis) to the at least one gap member 560S, 561S and to the The drive units 251 and 252 thereof. As can be appreciated, the movement of the drive portions 251, 252 in the direction of arrow 599 also provides for movement of the transfer arms 210-213 mounted to the drive portions 251, 252. In one aspect, the drivers 510, 520 can be any suitable ball drive for a linear actuator such as a ball screw 510S, 520S having the motor 510M, 520M, the motor being driven, and a ball nut transported along the ball screw. The ball nut can be integrated or otherwise coupled to the ball nut adapter or coupler 510C, 520C. Couplers 510C, 520C are fixedly coupled to respective gap members 560S, 561S and include ball nuts for engaging ball screws to couple gap members 560S, 561S to respective drivers 510, 520. In one aspect, the couplers 510C, 520C are coupled to, for example, one or more of the rail members GM1, GM2, GM3, GM4 of the respective gap members 560S, 561S. In other aspects, the couplers 510C, 520C may be substantially Directly coupled to or integrated with the shaft portions 560SP, 561SP of the respective gap members 560S, 561S. Here, the drive shafts of the respective drivers 510, 520 are disposed substantially along the Y-axis (eg, substantially parallel to the direction of movement 599 of the gap members 560S, 561S) such that when the ball screw rotates, the couplers 510C, 520C The ball screw is moved in the direction of arrow 599 to move the respective gap members 560S, 561S in the direction of arrow 599. Although the drivers 510, 520 are illustrated as linear balls Screw drives, in other aspects, the drives can be direct drive linear motors, linear piezoelectric electric motors, linear induction motors, linear synchronous motors, brush or brushless linear motors, linear stepper motors, linear servo motors, Reluctance motor or any other suitable linear drive. In other aspects, the rotary motor can be configured to drive the gap members 560S, 561S (and the arms positioned thereon) in the direction of arrow 599 through any suitable transmission member.

Although the drive portion 201' is illustrated as having two linear actuators 510, 520 in FIGS. 5A-5E for moving the transfer arms 210-213 along the Y axis relative to each other and/or the bottom member 550 in the direction of arrow 599, In other aspects, the drive portion 201' can be configured with a linear actuator such that only one of the drive portions 251, 252 can move along the Y-axis relative to the bottom member 550 and/or other drive portions 251, 252. As can be appreciated, the movement of one or more of the drive sections 251, 252 provides for varying the distance D between the axes of the extensions/contractions R1, R2 of the drive sections 251, 252 or the respective axes and rotations of the extensions/retractions R1, R2. The distance D1, D2 between the common axes of CAX. The displacement of one or more axes of the extension/retraction R1, R2 may permit when the transfer arms 210-213 are picked or placed to the processing station 130, such as between the facets of the handling modules 125A, 125B, 125C, 125D Automatic workpiece-to-center and/or independent workpiece configuration adjustments for workpiece retention station position changes. For example, referring to FIG. 1B, the drive portion 200 can rotate the bottom member 550 such that the axes of the extension/retractions R1, R2 face the processing stations 130T1, 130T2. One or more axes of the extension/retraction R1, R2 may be moved along the Y-axis in the direction of arrow 599 for holding the workpiece in accordance with any axis suitable for automatic workpiece-to-center procedure or calculation of the extension/contraction axis or Several processes Stations 130T1, 130T2. For example, one or more of the sensors 123A, 123B can be configured to abut one of the processing stations 130T1, 130T2 for detecting one or more characteristics of the workpiece being transported by the arms 210-213. The one or more sensors 123A, 123B can transmit any suitable signal to, for example, any suitable controller, such as controller 110, for determining the center of the workpiece S. The controller 110 can control one or more actuators of the transfer unit module 104' such that the respective shafting configurations of the extension/retraction R1, R2 cause the predetermined position of the center of the workpiece S and the workpiece holding station of the processing stations 130T1, 130T2 quasi. In one aspect, the extended/retracted two-axis displacement can be used for automatic workpiece-to-center and/or independent workpiece configuration adjustments such as workpiece holding station position changes between facets of transfer modules 125A, 125B, 125C, 125D. . In other aspects, the linear motor 520 is operable to move the drive portion 251 such that the unique shafting displacement of the extension/retraction R1 causes the center of the workpiece S to align with a predetermined position of the workpiece holding station within the processing station 130T1. In another aspect, the linear motor 510 is operable to move the drive portion 252 to align the shaft system that extends/retracts R2 only with the workpiece holding station within the processing station 130T2. A suitable example of an automated workpiece-to-center can be found in the following documents, for example, U.S. Patent Application Serial No. 13/617,333, filed on September 14, 2012, entitled "Fabric Center Search with Carmen Filters" U.S. Patent No. 7,925,378, entitled "Processing Equipment for Transferring Workpieces to the Center," issued on December 12, and US Patent No. 7,859,685, entitled "Fabric Center Search Using Charge Coupled Devices", issued on December 28, 2010. On September 18, 2012, U.S. Patent No. 8,270,702, entitled "Fabric Center Search with Carmen Filters", issued on September 7, 2010, issued the US Patent No. 7,792,350 entitled "Wafer Center Search". U.S. Patent No. 7,894,657, entitled "Wafer Center Search", issued on February 22, 2011, and U.S. Patent No. 8,125,652, entitled "Fabric Center Search Using Charge Coupler", issued on February 28, 2012, and U.S. Patent No. 8,253,945, entitled "Finding of Wafer Centers Using Charge Coupled Devices", was issued on August 28, 2012. The entire content is incorporated herein by reference. As can be appreciated, one or more encoders 510E, 520E substantially similar to those described above can be configured to detect the position of the drive motors 510, 520 and/or the arms 210-213 (and the workpiece held thereon) along the Y-axis. The displacement is used to achieve automatic workpiece-to-center and/or independent workpiece configuration adjustments for workpiece holding station position changes between facets.

Referring now to Figures 6A and 6B, the transfer unit module 104" is illustrated in accordance with the aspects of the disclosed embodiment. The transfer unit module 104" can be substantially similar to the transfer unit module 104' described above. In this aspect, the rotary drive units 600, 601 are coupled to the telescopic members 560, 561 in a manner substantially similar to that described above with respect to the drive portions 251, 252. One or more suitable transfer arms 605, 606 (such as the transfer arms described above with respect to Figures 2F-2J or any other suitable transfer arm that can be driven by a rotary motor) can be drivingly mounted to each of the rotary drive portions 600 in any suitable manner, 601. In this aspect, each of the rotary drive units 600, 601 includes a frame or housing 600F, 601F, a first drive motor 610, and a second drive motor 620 that is mounted to the frames 600F, 601F in any suitable manner. The motor configuration can be a coaxial motor configuration as shown or in other aspects, the motors can be arranged side by side. The drive motor can be any suitable motor such as, for example, a piezoelectric electric motor, an inductive motor, a synchronous motor, a brush or a brushless motor, a linear stepper horse , servo motor, reluctance motor, simple harmonic drive motor, etc. The first motor 610 can include a stator 610S and a rotor 610R. The second motor 620 can include a stator 620S and a rotor 620R. In this aspect, the coaxial drive shaft assembly 645 is at least partially rotatably supported within the frame 600F, 601F in any suitable manner such as, for example, substantially non-contact (e.g., having a self-bearing motor) or having any suitable bearing. . The coaxial drive shaft assembly 645 includes an outer drive shaft 640 and an inner drive shaft 650. Rotor 610R can be coupled to outer drive shaft 640 in any suitable manner such that drive shaft 640 rotates as rotor 610R rotates. In other aspects, any suitable amount of drive motor can be provided in each of the rotary drives 600, 601 for driving any suitable number of drive shafts. In one aspect, the rotors 610R, 620R and the drive shaft assembly 645 can be disposed in an environment in which the transfer arms 605, 606 operate. Any suitable seal 660, such as a can seal, can be disposed between the stators 610S, 620S and their respective rotors 610R, 620R to isolate or seal the environment in which the transfer arms 605, 606 operate and are configured and driven The inside of the unit 200 and the bottom member 550 is shared in an atmosphere. In other aspects, one or more magnetic fluid seals may be provided around each of the drive shafts 640, 650 for sealing the rotors 210R, 220R and the stators 210S, 220S from the environment in which the transfer arms 605, 606 operate. A suitable example of a rotary drive can be found in the following documents, for example, U.S. Patent Application Serial No. 13/270,844, filed on October 11, 2011, entitled "Coaxially Driven Vacuum Robot", filed on October 5, 2012 U.S. Patent No. 3,720,590, entitled "Artic Arm Transfer Device", issued on February 24, 1998, to "Robot-driven with magnetic mandrel bearings", U.S. Patent No. 3,646,282, U.S. Patent No. 5,899,658, filed on May 4, 1999, entitled "Articular Arm Transfer Device", and U.S. Patent No. 5,813,823, filed on September 29, 1998, entitled "Artic Arm Transfer Device", and October 9, 2012 U.S. Patent No. 8,283,813, the disclosure of which is incorporated herein by reference. In other aspects, one or more of the driving units 600, 601 (or any of the other driving units of 251, 252, 251', 252', 850, 851 described herein) may also include a Z-axis driving 600Z, 601Z, configured to move one or more arms attached to the jaws of the other drive portions 600, 601.

Referring now to Figures 7A-7C, the transfer unit module 104''' is illustrated in accordance with the aspects of the disclosed embodiments. The transfer unit module 104''' can be substantially similar to the transfer unit module 104 described above. In this aspect, the drive portions 251', 252' can include a drive system having pulleys substantially parallel to the seating plane of the end effectors 210E-213E, while the drive motors 320, 321 of each of the arms 210-213 are tied Inside the bottom member 201'. The driving portion 251' will be explained with reference to Fig. 7A, however, it should be understood that the driving portion 252' is substantially similar to the driving portion 251'. Drive portion 251' includes a frame 251F' that can have any suitable size, shape, and/or configuration. While the frame 251F' is illustrated as a flat panel for exemplary purposes, in other aspects the frame 251F' may include any suitable cover for accommodating drive transmissions such that the cover structures are configured to substantially prevent any of the drive transmissions from being generated. The particles enter an environment with arm manipulation. The frame 251F' can include any suitable rail or guide member similar to that described above with respect to the transfer unit modules 104, 104' on which the respective bottom members 210B, 211B are movably mounted. Each drive motor 320, 321 can include a drive The moving shaft, coupled to the respective drive pulleys 733A, 733B, for driving the respective belts or belts 740, 741 that may be substantially similar to the above. As can be appreciated, any suitable idler 734A, 734B, 735A, 735B can be provided and mounted to the frame 251F' for guiding the belt or straps 740, 741 adjacent the respective bottom members 210B, 211B such that the belt or belt can be The manner is fixedly coupled or anchored to the bottom member for driving the respective arms 210, 211. As can also be appreciated, the bottom member 201' can be suitably sealed, such as the outer cover 250C, to position the motor in an atmosphere common to the drive unit 200. Although the two drive portions are shown mounted to the bottom member 201' in Fig. 7A, in other aspects about two drive portions can be mounted to the bottom member 201'. For example, Figure 7C illustrates a single drive portion having two arms mounted to the bottom portion 201'. As can be appreciated, the single drive portion illustrated in Figure 7C can be substantially similar to the three-axis drive described above. In one aspect, a drive shaft of the three shaft drives can be coupled to the extension/retraction pulley for driving the arm 210, and one shaft of the three shaft drives can be coupled to the frame 251F for the rotary arms 210, 211. 'As a unit, and one shaft driven by three shafts can be coupled to the extension/retraction pulley for driving the arm 211.

Referring now to Figures 8A-9D, the transfer unit module 104''' is illustrated in accordance with the aspects of the disclosed embodiments. The transfer unit module 104''' can be substantially similar to the transfer unit module 104 described above. In this aspect, the drive units 800 and 801 are provided with single-stage linear slide arms 810-813. In this aspect, each of the driving portions 800, 801 includes frames 851, 852 having a sealed motor portion 860 and a transmission portion 853. The driving portions 800, 801 will be described with respect to the driving portion 801. It should be understood that the driving portions 800 are substantially similar and may be opposite in direction as shown in Fig. 8A. The sealed motor portion 860 can be included in the solid Mounted to the frame 851 and configured to receive the outer casing or outer cover 851C1 of the motors 320,321. The outer casing 851C1 may be sealed to the frame in any suitable sealing member 860S such that the motors 320, 321 are disposed within an atmosphere environment common to the atmosphere within the drive portion 200. In a manner substantially similar to that described above, the outer casing 851C1 can include a hole or opening 851M that is configured to mount the outer casing 851C1 to the seal support member 560 in any suitable manner, such as described above. As can be appreciated, the outer casing 851C1 can be constructed of any suitable material and configured to support (eg, when coupled to the seal support member 560), the frame 851, the drive assembly, the arms 812, 813, and any of the arms 812, 813 carried Workpiece. The motors 320, 321 can be mounted to the frame 251 in any suitable manner such that, for example, the magnetic fluid seals 320S of the respective motors 320, 321 seal the respective openings 973, 974 in the frame 851 through which the drive shaft 370 extends for maintaining a seal The sealing atmosphere in the motor portion 860.

One or more linear rails or guide members 930, 931 can be mounted to the frame 851 within the transmission portion 853 in any suitable manner to define the degrees of freedom of the independent drive shafts of the at least one arm 812, 813. In this aspect, there are two guide rails 930, 931 disposed along the X-axis or the axis of the extension/retraction R of the arms 812, 813, however, in other aspects, any suitable amount of rails may be provided for guiding Any amount of arms. Bracket or arm supports 940, 941 can be mounted to the respective rails for movement by the rails and along the X-axis (eg, along the axis of extension/retraction R). In this aspect, the bracket 940 is movably mounted to the rail 930 and the bracket 941 is movably mounted to the rail 931. Each bracket may include arm mounting portions 940M, 941M to which the respective arms 812, 813 are fixedly attached. Brackets 940, 941 can be configured in any suitable manner to enable a tray The brackets 940 and 941 allow the other of the through brackets 940 and 941 to pass along the axis of the extension/retraction R. Bracket 940 can be coupled to motor 320 and bracket 941 can be coupled to motor 321 (or vice versa) via any suitable drive transmission. In one aspect, the drive pulley 921 can be coupled to the shaft 370 of the motor 320 such that the drive pulley 921 rotates as the shaft 370 rotates. The idler pulleys 910A, 910B can be disposed substantially at opposite ends of the rails 930, 931 and configured such that one or more belts or belts can at least partially surround the idlers 910A, 910B. Referring also to Figures 9E and 9F, one or more belts or belts 940B1, 940B2 (e.g., substantially similar to the above) can couple drive pulleys 920, 921 to respective brackets 940, 941. For example, with reference to the drive pulley 921 and the bracket 940, the first belt/belt 940B1 can be fixedly coupled to the pulley 921 at one end BE1 of the belt/belt 940B1. The belt/belt 940B1 can at least partially surround the idler pulley 910A and extend to the bracket 940 such that the other opposite end BE2 of the belt/belt 940B1 is fixedly coupled to the bracket 940. The second belt/belt 940B2 can be fixedly coupled to the pulley 921 at one end BE3 of the belt/belt 940B2. The belt/belt 940B2 can at least partially surround the idler 910B and extend to the bracket 940 (eg, from a direction opposite the first belt/belt 940B1) such that one of the first and second belts/belts 940B1, 940B2 Pulling the bracket while the other belt/belt 940B1, 940B2 pushes the bracket) causes the other opposite end BE4 of the belt/belt 940B2 to be fixedly coupled to the bracket 940. Similarly, as for the bracket 941, the first belt/belt 941B1 can be fixedly coupled to the pulley 920 at one end of the belt/belt 941B1. The belt/belt 941B1 can at least partially surround the idler pulley 910A and extend to the bracket 941 such that the other opposite end of the belt/belt 941B1 is fixedly coupled to the bracket 941. First The two belt/belt 941B2 can be fixedly coupled to the pulley 920 at one end of the belt/belt 941B2. The belt/belt 941B2 can at least partially surround the idler 910B and extend to the bracket 941 (eg, from a direction opposite the first belt/belt 941B1) such that one of the first and second belts/belts 941B1, 941B2 Pulling the bracket while the other belt/belt 941B1, 941B2 pushes the bracket) causes the other opposite end of the belt/belt 941B2 to be fixedly coupled to the bracket 941.

In one aspect, the transmission portion 853 can be exposed to the atmosphere in which the arms 812, 813 operate but can include one or more outer covers to substantially prevent any particles generated by the belt/belt, pulley, and/or bracket/rail from entering the The environment is in contact with the workpiece held by the arms 812, 813. In one aspect, the outer cover 851C3 can be placed over at least a portion of the transmission portion 853, such as on at least a portion of the drive pulleys 920, 921. The outer cover 851C3 may include a sealing portion 998 that is disposed adjacent to the guide rails 930, 931. The outer cover 851C2 can also be placed over the rails 930, 931 and configured such that the brackets 940, 941 span their respective rails 930, 931. The outer cover 851C2 may include a sealing portion 997 to extend the sealing portions 997 and 998 toward each other. In one aspect, a space or opening 901 can be provided between the seals 997, 998 such that the arm mounting portions 940M, 941M of the brackets 940, 941 can extend through the space or opening 901 for connection to the respective arms 812, 813 is also such that the respective arms 812 and 813 are disposed above each other. The seals 997, 998 may form a gas seal to substantially contain any particles within the outer cover 851C2, 851C3 while permitting extension/contraction of the arms 812, 813.

In other aspects, the one or more brackets can be substantially directly driven by any suitable linear motor such as described above. For example, in one aspect, the transmission portion 853 can operate the atmosphere of the arms 812, 813 to make the common atmosphere The environment is shared between the transmission portion 853 and the drive portion 200 in a manner substantially similar to that described above with respect to the sealed motor portion 860. The rails 930, 931 can be disposed outside of the transmission and include brackets 940, 941 and an outer cover including seals 997, 998. Each bracket may have a magnetic follower attached thereto that is transmissive through, for example, the transmission portion 853 via magnetic coupling between the magnetic follower and the magnetic active member in a manner substantially similar to that described in the following document The wall or the outer cover is magnetically driven by a magnetic active member, for example, U.S. Patent Nos. 7,901,539, 8,293,066, 8,419, 341, and U.S. Patent Application Serial No. 13/286,186, the entire disclosure of which is incorporated herein by reference. In other aspects, each of the brackets 940, 941 can include a magnetic roller that is driven by a linear array of motor coils disposed within a sealed atmosphere environment of the transmission portion 853 in a manner substantially similar to that described above, for example, U.S. Patent Nos. 7,575,406, 7, 959, 395, and U.S. Patent Application Serial No. 13/159,034, the entire disclosures of

In one aspect, each arm 810-813 includes an end effector 810E-813E that is coupled to a respective bracket 940, 941 through a substantially rigid arm or end effector extension member 810EM-813EM. For example, the substantially rigid arms 810EM-813EM can be fixedly coupled to the respective arm mounting portions 940M, 941M of the respective brackets 940, 941, such as by any suitable means of mechanical fasteners. End effectors 810E-813E are fixedly coupled to respective substantially rigid arms 810EM-813EM in any suitable manner, such as by mechanical fasteners. In other aspects, the substantially rigid arms 810EM-813EM and the respective end effectors 810E-813E can have a single piece construction. In other aspects, the substantially rigid arms 810EM-813EM, each The end effectors 810E-813E and the respective brackets 940, 941 can have a single piece construction.

As can be seen from the above, each of the end effectors 810E-813E independently stretches/contracts along the respective axes of the extension/retraction R1, R2. Alternatively, as can be seen from the above, each of the driving portions 800, 801 can be independently moved along the Y axis independently of the other of the driving portions 800, 801 to change the distance D between the respective axes of the extension/retraction R1, R2 or Changing the distance D1, D2 of the one or more axes of the extension/contraction relative to the common axis of the rotation CAX (see Fig. 5A) is used in a manner substantially similar to that described above for, for example, the transfer modules 125A, 125B, 125C, 125D Automatic workpiece-to-center and/or independent workpiece configuration adjustments for workpiece position changes between faces. 10A and 10B, in one aspect, one of the driving portions 800, 801 can move relative to the other driving portion 800, 801 along the Y-axis and/or the common axis CAX while the other driving portion 800, 801 has a relative The fixed distances D1, D2 of the common axis CAX are not movable along the Y axis. For example, the driving portion 800 may be movably mounted to the bottom member 550 through the seal support member 560 to move along the Y axis through the driver 510 disposed within the bottom member 550. The driving portion 801 is fixedly attached to the bottom member 550 through the fixed supporting member 1000, wherein the fixed supporting member is configured to allow at least the atmosphere between the sealing motor portion 860 and the driving portion 200 to communicate.

Referring now to Figures 11A and 11B, one or more of the drive portions 800, 801' can be pivoted relative to the other of the drive portions 800, 801' for changing the angle β between the axes of the extension/retraction R1, R2 and Used to allow automatic workpiece centering and/or independent workpiece configuration adjustments for, for example, transfer module 125A, The position of the workpiece holding station between the facets of 125B, 125C, 125D changes. For example, the transfer unit module 1104, which may be substantially similar to the one or more transfer unit modules described above, may include a bottom member 1150 that is substantially similar to the bottom member 550. In this aspect, the midsole member 1150 can be configured to be coupled to the drive portion 800, such as, for example, by any suitable means of securing the support member 1000. The bottom member 1150 can also be configured to couple with the drive portion 801' (which can be substantially similar to the drive portion 801 described above). Here, the bottom member can include any suitable one or more of the drivers 1100 (which can be substantially similar to the upper drivers 280, 320, 321, 610, 620). The drive shaft 1100D can extend through the wall of the bottom member 1150 for coupling the housing 851C1' (which can be substantially similar to the housing 851C1 described above) to pivot the drive portion 801 and the arms 812, 813 about the common axis X1 to the arrow The direction of T2 is used to change the angle β. As can be appreciated, one or more workpieces held by the drive unit 800 can be permeable to one or more workpieces held by the drive unit 801' by, for example, rotating the two drive portions as a unit about the axis CAX. The drive unit 800' is rotated about the axis X1 to perform centering.

In other aspects, as can be seen in Figure 11C, the drive portion 800' (which can be substantially similar to the drive portion 801') and the drive portion 801' can be pivotally mounted to the base member 1150' (which can be substantially Similar to the bottom member 1150), each drive portion is configured to pivot through the respective drive 1100 about each of the axes X1, X2 in each of the directions T1, T2 to change the angle β. Here, the automatic workpiece-to-center and/or independent workpiece configuration adjustment for changing the position of the workpiece holding station between the facets of the transfer modules 125A, 125B, 125C, 125D, for example, can be rotated through the respective driving portions 800', 801. 'Day any pre Quantitatively enforced. In one aspect, the two drive portions are rotatable as a unit about the axis CAX and one or more workpieces held by the drive portions 800', 801' can be rotated about the respective axes X1, X2 by one or more The drive units 800', 801' are centered.

In other aspects, movement of one or more arms 810-813 along the Y-axis may also be provided with rotation of one or more of the drive portions 800, 801. For example, referring to FIG. 11D, the bottom member is configured to be coupled to the outer casing 851C1 through the seal support member 560 so as to be movable along the Y-axis. In other aspects, the outer casing 851C1 can be coupled to the bottom member 1150 through the fixed support member 1000. Pivot housing 1130 (which may be substantially similar to housing 851C1') may be pivotally coupled to bottom member 1150 in a manner substantially similar to that described above with respect to Figures 11A-11C. The outer casing 1130 can have a bore to which the seal support member 561 is coupled and can include a linear drive motor 1110 substantially similar to that described above with respect to the bottom member 550. The driving portion 801 can be coupled to the seal support member 861 through the outer casing 851C1 substantially in a manner similar to that described above. In other aspects, both of the drive portions 800, 801 can be mounted to the pivoting housing 1130 in any suitable manner.

12A and 12B, in one aspect, one or more of the sealed drive housings 1250, 1251 of the drive portions 800, 801 can be configured to be rotationally coupled to the drive portion 200 about a common axis CAX to enable one or several The drive units 800, 801 can be pivoted about the common axis CAX for changing the angle β and allowing the automatic workpiece centering of the workpiece holding station position between the facets of the transfer modules 125A, 125B, 125C, 125D, for example, and/or Or independent workpiece configuration adjustments. For example, the outer casing 1251 (which may be substantially similar to the above The outer casing 851C1) may be substantially directly coupled to the drive shaft 280S of the drive portion 200 such that the outer casing 1251 rotates together with the drive shaft 280S when the drive shaft 280S rotates. A housing 1250 (which may be substantially similar to the housing 851C1 described above) is rotatably mounted to the housing 1251 about a common axis CAX. For example, any suitable driver 1200 (such as 280, 320, 321, 610, 620 described above) can be disposed within the housing 1251. The outer casing 1251 can include an aperture through which the drive shaft 1200S extends and the outer casing 1250 can include an aperture to which the drive shaft 1200S is coupled. As can be appreciated, any suitable seal (such as described above) can be disposed about the drive shaft between the driver 1200 and the housing 1251 and between the drive shaft 1200S and the housing 1250 for retaining the seal within the housing 1250, 1251 and the drive portion 200. Atmosphere. In any aspect, any suitable bearing 1200B may be disposed between the outer casings 1250, 1251 and in other aspects may include bearings such that the outer casing 1250 is supported by the coupling between the drive shaft 1200S and the driver 1200 and the outer casing 1251. Here, the driver 280 and the driver 1200 are independently operable to allow the drive portions to pivot relative to each other about the common axis CAX for changing the angle β in any suitable manner. In other aspects, one or more of the drive portions 800, 801 are movable along the Y axis. For example, referring to Figure 12C, the pivoting housing 1220 (which can be substantially similar to the pivoting housing 1130) can be configured such that the housing 851C1 of the drive portions 800, 801 is transparently transmitted through the sealing support member in a manner substantially similar to that described above with respect to Figure 11D. The 560 is coupled to the pivoting housing 1220. Here, the adjustment of the rotation allowable angle β of the pivoting housing 1220 and/or the housing 1250, 1251 and the movement of the one or more driving portions 800, 801 along the Y axis allow the axis of the extension/retraction R1, R2 and the adjustment Distance between common axes CAX D1, D2 are used for automatic workpiece centering and/or independent workpiece configuration adjustments for, for example, workpiece holding station position changes between facets of transfer modules 125A, 125B, 125C, 125D.

In one aspect, referring to Figures 11A-12C, any suitable amount of controllers 110A, 110B can be disposed within the transfer unit modules described herein. In one aspect, there may be a controller for transferring one or more drivers within the unit module. These controllers 110A, 110B can be connected to the controller 110 or any other suitable controller. As noted above, in one aspect, controllers 110A, 110B can be part of a group control structure, while in other aspects, the controller can have any suitable structure.

In accordance with one or more aspects of the disclosed embodiments, a transfer apparatus includes: a frame; a plurality of arms coupled to the frame, each arm having an end effector and an independent drive shaft for each arm of the plurality of arms a stretch and contraction relative to the others; a linear track defining a degree of freedom of the independent drive shaft for extending and contracting at least one arm; and a common drive shaft shared by each arm and configured to cause the plurality of arms Pivoting about a common pivot axis; at least one of the plurality of arms having another drive axis defines an independent degree of freedom relative to the other of the plurality of arms.

In accordance with one or more aspects of the disclosed embodiments, other drive shafts that define the independent degrees of freedom have an angle with respect to the shaft for extension and contraction.

In accordance with one or more aspects of the disclosed embodiments, the other drive shaft configurations defining the independent degrees of freedom are such that the independent degrees of freedom are coplanar with the seating plane of the end effector.

In accordance with one or more aspects of the disclosed embodiments, other drive shaft configurations that define the independent degrees of freedom are such that the independent degrees of freedom have an angle with respect to other independent degrees of freedom.

In accordance with one or more aspects of the disclosed embodiments, other drive shaft configurations that define the independent degrees of freedom are such that the independent degrees of freedom are parallel with respect to other independent degrees of freedom.

In accordance with one or more aspects of the disclosed embodiments, the transfer apparatus further includes a second common drive shaft configured to co-adjust the plurality of arms about a common axis.

In accordance with one or more aspects of the disclosed embodiments, the other drive shafts perform automatic workpiece centering.

In accordance with one or more aspects of the disclosed embodiments, the other drive shafts perform independent workpiece configuration adjustments for workpiece retention station position changes.

The plurality of arm telescoping arms are in accordance with one or more aspects of the disclosed embodiments.

In accordance with one or more aspects of the disclosed embodiments, a transfer apparatus includes: a frame; a plurality of arms coupled to the frame, each arm having an end effector and an independent drive shaft for extension and contraction of the respective arms To move the workpiece into and out of a handling chamber; the linear drive shaft defines another degree of freedom for at least one arm that is flush with the seating plane of the end effector; and a common drive shaft that is shared by each arm And configured to pivot the plurality of arms about a common pivot axis; wherein at least one of the plurality of arms having the other drive shaft defines an independent degree of freedom relative to the other of the plurality of arms.

Defining the one or more aspects according to the disclosed embodiments Other drive shafts of independent degrees of freedom have an angle with respect to the shaft for extension and contraction.

In accordance with one or more aspects of the disclosed embodiments, the other drive shaft configurations defining the independent degrees of freedom are such that the independent degrees of freedom are coplanar with the seating plane of the end effector.

In accordance with one or more aspects of the disclosed embodiments, other drive shaft configurations that define the independent degrees of freedom are such that the independent degrees of freedom have an angle with respect to other independent degrees of freedom.

In accordance with one or more aspects of the disclosed embodiments, other drive shaft configurations that define the independent degrees of freedom are such that the independent degrees of freedom are parallel with respect to other independent degrees of freedom.

In accordance with one or more aspects of the disclosed embodiments, the transfer apparatus further includes a second common drive shaft configured to co-adjust the plurality of arms about a common axis.

In accordance with one or more aspects of the disclosed embodiments, the independent degrees of freedom perform automatic workpiece centering.

In accordance with one or more aspects of the disclosed embodiments, the independent degrees of freedom perform independent workpiece configuration adjustments for workpiece retention station position changes.

The plurality of arm telescoping arms are in accordance with one or more aspects of the disclosed embodiments.

In accordance with one or more aspects of the disclosed embodiments, a transfer apparatus includes: a frame forming a sealed chamber having a chamber atmosphere; a plurality of arms coupled to the frame and disposed within the sealed chamber, each arm having a stretch and Shrinking independent drive shafts of the respective arms; a first driving portion disposed outside the sealed chamber and connected to the plurality of arms for moving the plurality of arms about a common axis; and a second driving portion disposed in the sealed chamber The second drive portion includes a sealed outer casing configured to maintain a sealed atmosphere different from the atmosphere of the chamber; wherein the sealed outer casing has a first sealing portion including a first degree of freedom of the first drive shaft for at least one arm; a second seal portion sealingly communicating with the first seal portion and including a second degree of freedom for the at least one arm of the second drive shaft.

In accordance with one or more aspects of the disclosed embodiments, at least one of the plurality of arms includes a second degree of freedom independent of the drive shaft for extending and retracting the respective arms.

In accordance with one or more aspects of the disclosed embodiments, the second degree of freedom performs an automatic workpiece centering.

In accordance with one or more aspects of the disclosed embodiments, the second degree of freedom performs independent workpiece configuration adjustments for workpiece retention station position changes.

In accordance with one or more aspects of the disclosed embodiments, the sealed outer casing includes an opening in the sealed outer casing, and the second sealing portion communicates with the first sealing portion through the opening.

In accordance with one or more aspects of the disclosed embodiments, at least one of the first and second degrees of freedom has an included angle with respect to an axis of extension and contraction of the respective arms.

In accordance with one or more aspects of the disclosed embodiments, at least one of the first and second degrees of freedom is coplanar with the seating plane of the end effector.

In accordance with one or more aspects of the disclosed embodiments, at least one of the first and second degrees of freedom has an angle with respect to other independent degrees of freedom.

In accordance with one or more aspects of the disclosed embodiments, at least one of the first and second degrees of freedom is parallel with respect to other independent degrees of freedom.

In accordance with one or more aspects of the disclosed embodiments, the first drive portion includes a common rotational drive shaft configured to co-rotate the plurality of arms about a common rotational axis.

The plurality of arm telescoping arms are in accordance with one or more aspects of the disclosed embodiments.

It should be understood that the above description is only illustrative of the aspects of the disclosed embodiments. Various alternatives and modifications can be devised by those skilled in the art without departing from the scope of the disclosed embodiments. Accordingly, the disclosed embodiments are intended to cover all such alternatives, modifications and Moreover, the mere fact that the various features are recited in mutually different singular or singular items does not mean that the combination of these features is not advantageously used, and such combinations remain within the scope of the invention.

The scope of the patent application is as follows:

Claims (29)

A transfer apparatus comprising: a frame; a plurality of arms coupled to the frame for pivoting about a common pivot axis, each arm having an end effector and an independent drive shaft for each arm relative to the plurality of arms Other extensions and contractions; linear rails defining the freedom of the independent drive shaft for the extension and contraction of at least one arm; and common drive shafts of the common motor, shared by each arm such that each arm is attached to the a common motor, and the common motor outputs a common torque defining a common drive shaft common to each arm such that the common motor is configured to surround the plurality of arms as a unit by the common drive shaft Pivoting the pivot axis; wherein at least one of the plurality of arms has another drive axis defining independent degrees of freedom with respect to the other of the plurality of arms. A transfer apparatus according to claim 1, wherein the other drive shafts defining the independent degrees of freedom have an angle with respect to the shaft for stretching and contracting. A transfer apparatus according to claim 1, wherein the other drive shaft configuration defining the independent degree of freedom is such that the independent degree of freedom is flush with the seating plane of the end effector. A transfer apparatus according to claim 1, wherein the other drive shaft configuration defining the independent degree of freedom is such that the independent degree of freedom has an angle with respect to other independent degrees of freedom. A transfer apparatus according to claim 1, wherein the other drive shaft configurations defining the independent degrees of freedom are arranged such that the independent degrees of freedom are parallel with respect to other independent degrees of freedom. The transfer apparatus of claim 1, further comprising a second common drive shaft configured to co-adjust the plurality of arms about a common axis. For example, the transfer device of claim 1 wherein the other drive shafts perform automatic workpiece centering. A transfer apparatus as claimed in claim 1, wherein the other drive shafts perform independent workpiece configuration adjustments for position changes of the workpiece holding station. The transfer device of claim 1, wherein the plurality of arm telescopic arms. A transfer apparatus comprising: a frame; a plurality of arms coupled to the frame for pivoting about a common pivot axis, each arm having an end effector and an independent drive shaft for each arm to extend and contract to move the workpiece Moving in and out of the handling room; the linear drive shaft defining another degree of freedom for at least one arm that is flush with the seating plane of the end effector; and a common drive shaft shared by each arm and configured to The plurality of arms pivot about a common pivot axis; wherein at least one of the plurality of arms has another drive axis defining independent degrees of freedom with respect to the others of the plurality of arms. Such as the transfer equipment of claim 10, which defines The other drive shafts of this independent degree of freedom have an angle with respect to the shaft for extension and contraction. A transfer apparatus according to claim 10, wherein the other drive shaft configuration defining the independent degree of freedom is such that the independent degree of freedom is flush with the seating plane of the end effector. A transfer apparatus according to claim 10, wherein the other drive shaft configuration defining the independent degree of freedom is such that the independent degree of freedom has an angle with respect to other independent degrees of freedom. A transfer apparatus according to claim 10, wherein the other drive shaft configuration defining the independent degree of freedom is such that the independent degrees of freedom are parallel with respect to other independent degrees of freedom. The transfer apparatus of claim 10, further comprising a second common drive shaft configured to co-adjust the plurality of arms about a common axis. The transfer device of claim 10, wherein the independent degree of freedom performs an automatic workpiece centering. A transfer apparatus according to claim 10, wherein the independent degree of freedom performs independent workpiece configuration adjustment for a change in position of the workpiece holding station. The transfer device of claim 10, wherein the plurality of arm telescopic arms. A transfer apparatus comprising: a sealed chamber having a chamber atmosphere in which a frame is disposed; a plurality of arms coupled to the frame for pivoting and configuring about a common pivot axis In the sealed chamber, each arm has an independent drive shaft for extending and contracting the respective arms; a first drive portion disposed outside the sealed chamber and coupled to the plurality of arms to move the plurality of arms about a common axis And a second driving portion disposed inside the sealed chamber, the second driving portion including a sealed outer casing configured to maintain a sealing atmosphere different from the atmosphere of the chamber; wherein the sealed outer casing has a first sealing portion including a first driving shaft a first degree of freedom for at least one arm; and a second seal portion sealingly communicating with the first seal portion and including a second drive shaft for a second degree of freedom of the at least one arm. A transfer apparatus according to claim 19, wherein at least one of the plurality of arms includes a second degree of freedom independent of the drive shaft for extending and contracting the respective arms. The transfer device of claim 20, wherein the second degree of freedom performs an automatic workpiece centering. The transfer apparatus of claim 20, wherein the second degree of freedom performs an independent workpiece configuration adjustment for a change in position of the workpiece holding station. The transfer device of claim 19, wherein the sealed outer casing comprises an opening in the sealed outer casing, and the second sealing portion communicates with the first sealing portion through the opening. A transfer apparatus according to claim 19, wherein at least one of the first and second degrees of freedom has an angle with respect to an axis of extension and contraction of the respective arms. The transfer device of claim 19, wherein at least one of the first and second degrees of freedom is coplanar with a seating plane of the end effector. The transfer device of claim 19, wherein at least one of the first and second degrees of freedom has an angle with respect to other independent degrees of freedom. The transfer device of claim 19, wherein at least one of the first and second degrees of freedom is parallel with respect to other independent degrees of freedom. The transfer device of claim 19, wherein the first drive portion comprises a common rotational drive shaft configured to rotate the plurality of arms co-rotating about a common rotational axis. The transfer device of claim 19, wherein the plurality of arm telescopic arms.