TWI621384B - Film peeling machine and a rolling device of the same - Google Patents

Abstract

A stripping machine comprises a conveying device, a rolling device and a stripping device, wherein the conveying device can transport the plate member in the conveying direction, the rolling device comprises a driving mechanism and a rotating pressing member, and the driving mechanism can drive the rotating pressing device The piece moves in the pressing direction to be pressed onto the outer surface via the front end edge of the plate member, so that the film is concavely deformed to form an indentation to break the adhesion between the film and the photoresist layer when the rotating pressing member moves away from the film. a gas chamber is formed between the film and the photoresist layer, and an opening of the gas chamber is formed between the front end edge and the photoresist layer, and the stripping device comprises a clamping blowing mechanism and a peeling mechanism, and the clamping blowing mechanism is used for clamping The front protrusion may blow the opening to peel the photoresist layer from the portion adjacent to the front edge, and the peeling mechanism is used to engage the portion of the film adjacent to the front edge to peel the film from the photoresist layer.

Description

Stripping machine and its rolling device

The invention relates to a stripping machine, in particular to a stripping machine for stripping a film on a printed circuit board and a rolling device thereof.

In the manufacturing process of the printed circuit board, the surface of the substrate is usually formed with a dry film. Before the substrate is subjected to the exposure step, the dry film has a photoresist layer and a film adhered to the photoresist layer, and the film is a Mylar. After the substrate is subjected to the exposure step, the photoresist is stripped from the photoresist layer to expose the photoresist layer to perform subsequent development and etching steps on the substrate.

Most of the existing stripping machines for peeling off the film are rolled on the surface of the film by the embossing wheel to form wrinkles. Subsequently, the film is adhered by a bonding wheel and peeled off from the photoresist layer to separate the film from the photoresist layer.

The film and the photoresist layer are in a vacuumed state. Therefore, the embossing wheel needs to apply a predetermined pressure to the film to form a wrinkle. Since the thickness of the photoresist layer and the film is very thin, the embossing wheel is pressed into the film during the process of pressing, and the force of the rolling force is too large, thereby causing damage to the photoresist layer and the substrate. Therefore, the film stripping method of the existing stripping machine There is still room for further improvement.

Therefore, it is an object of the present invention to provide a film stripping machine which can reduce the deformation of the rotating stamping member by rolling the film through the rolling device of the rolling device to deform the film to form an indentation. The photoresist layer and the substrate are damaged during the process.

Another object of the present invention is to provide a film stripper which forms a gas chamber having an opening between the film and the photoresist layer when the rotating stamping member presses the film to deform it to form an indentation and remove the film. Thereby, the adhesion between the film and the photoresist layer can be effectively broken, so that the film can be quickly peeled off from the photoresist layer.

Therefore, the film stripping machine of the present invention is adapted to peel a film of a plate member from a photoresist layer, the film having a front end edge, a bonding surface bonded to the photoresist layer, and a bonding surface opposite to the bonding surface The outer surface of the plate member has a substrate bonded to a side of the photoresist layer opposite to the film, the substrate having a front projection projecting from the front end edge.

The stripping machine comprises a conveying device, a rolling device, and a stripping device, wherein the conveying device can transport the plate member in a conveying direction from the rear to the front, the rolling device is located at a middle portion of the conveying device, and the rolling device comprises a fixing frame, a driving mechanism disposed on the fixing frame, and a rotating pressing member disposed on the driving mechanism, the driving mechanism can drive the rotating pressing member to move in a pressing direction to press through the front end edge Adhesively deforming the film to form an indentation on the outer surface to break the adhesion between the film and the photoresist layer, and the film and the light when the rotating stamping member moves away from the film Forming a gas chamber between the resist layers, an opening of the gas chamber is formed between the front end edge and the photoresist layer, and the driving mechanism can drive the rotating rolling member along the pressing direction at the front protruding portion Moving between the front end edge and the initial position aligned with the front end edge, and an end position pressed against the outer surface and spaced behind the front end edge, the rotary pressing member comprises a disk shape a squeezing blade comprising a cutting edge for pressing the film, the peeling device being located at a front side of the rolling device, the peeling device comprising a clamping blowing mechanism, and a peeling mechanism, the clamping blowing a gas mechanism for clamping the front projection and blowing the opening of the gas chamber to peel the photoresist layer from a portion adjacent to the front end edge, the peeling mechanism for engaging the film adjacent to the front end edge The portion is stripped of the photoresist layer.

The tip is rounded.

The driving mechanism includes a shell member for pivotally connecting the rotary stamping member, a biasing spring disposed in the shell member, and a biasing spring for biasing the end of the biasing member toward the shell member Lower bias pressure adjustment lever.

The driving mechanism further includes a first carrier, a second carrier, a third carrier, a first cylinder, a second cylinder, and a third cylinder. The first cylinder is disposed on the fixing frame. The first carrier is driven to move in a translation direction parallel to the front end edge, and the second cylinder is disposed on the first carrier to drive the second carrier to move in an up and down direction, the third cylinder is disposed The second carrier is configured to drive the third carrier to move along the pressing direction, and the shell member is movably coupled to the third carrier in the up and down direction.

The rolling direction is inclined to the front end edge.

The clamping air blowing mechanism comprises two clamping jaws for clamping the front protruding portion, and a nozzle disposed on the corresponding clamping jaw and capable of blowing the opening, the peeling mechanism comprising a stopping member, a recovery roller, a receiving film wound around the recovery roller and retractable by the recovery roller, and a joint module, the receiving film portion abutting the stopper, the film adjacent to the front end edge The portion is blown by the nozzle to a position against the stopper and overlapped with the receiving film, and the joint module is used to join the portion of the film overlapping the receiving film.

Still another object of the present invention is to provide a rolling device for a film stripping machine which can reduce the rotational pressing member by rolling a film by a rolling pressing device of the rolling device to deform the film to form an indentation. The photoresist layer and the substrate are damaged during the process of pressing the film.

A further object of the present invention is to provide a rolling device for a stripping machine which is formed between a film and a photoresist layer after the rolling member is pressed to deform the film to form an indentation and is removed from the film. The open gas chamber can thereby effectively break the adhesion between the film and the photoresist layer.

Therefore, the rolling device of the stripping machine of the present invention is adapted to press a film of a plate member, the plate member having a photoresist layer having a front end edge and a bonding surface bonded to the photoresist layer. And an outer surface opposite to the bonding surface.

The rolling device comprises a fixing frame, a driving mechanism and a rotating pressing member.

The driving mechanism is disposed on the fixing frame, and the rotating pressing member is disposed on the driving mechanism, and the driving mechanism can drive the rotating pressing member along a raft Moving in a pressing direction to press onto the outer surface via the front end edge, deforming the film to form an indentation to break the adhesion between the film and the photoresist layer, when the rotating stamping member moves away from the film Forming a gas chamber between the film and the photoresist layer, an opening of the gas chamber is formed between the front end edge and the photoresist layer, and the driving mechanism can drive the rotating pressing member along the pressing direction Aligning with an initial position in front of the front end edge and moving between the end surface and the end position spaced behind the front end edge, the rotary pressing member includes a disk-shaped pressing blade, The squeezing blade includes a tip for pressing the film.

The utility model has the advantages that the film is pressed and deformed by the rotating rolling device of the rolling device to deform the film to form an indentation, thereby breaking the adhesion and adhesion between the film and the photoresist layer, thereby reducing the rotation. The photoresist layer and the substrate are damaged during the process of rolling the film. After the rotating stamping member is moved away from the film, a gas chamber having an opening is formed between the film and the photoresist layer, whereby the peeling device can easily and quickly peel the film from the photoresist layer.

1‧‧‧ boards

421‧‧‧First carrier

10‧‧‧Substrate

422‧‧‧Second carrier

101‧‧‧Front projection

423‧‧‧ Third carrier

11‧‧‧Photoresist layer

424‧‧‧First cylinder

12‧‧‧ Film

425‧‧‧Second cylinder

121‧‧‧ front edge

426‧‧‧ third cylinder

122‧‧‧ rear edge

427‧‧‧ oblique rail

123‧‧‧ joint surface

428‧‧‧Shell

124‧‧‧ outer surface

429‧‧‧bias spring

13‧‧‧Indentation

430‧‧‧pressure adjustment rod

14‧‧‧ air chamber

431‧‧‧ accommodating slots

141‧‧‧ openings

44‧‧‧Rotary rolling parts

200‧‧‧Strip machine

441‧‧‧辗压刀

2‧‧‧ machine base

442‧‧‧Tool tip

3‧‧‧Conveyor

5‧‧‧ peeling device

31‧‧‧ rear feed end

51‧‧‧Clamping air blowing mechanism

32‧‧‧ front discharge end

511‧‧‧claw

33‧‧‧Transport roller

512‧‧‧ nozzle

4‧‧‧辗压装置

52‧‧‧ peeling mechanism

41‧‧‧Fixed frame

521‧‧‧stops

411‧‧‧ transverse rail

522‧‧‧Recycling roller

42‧‧‧ drive mechanism

523‧‧‧ receiving film

524‧‧‧ joint module

D‧‧‧Direction direction

525‧‧ ‧Baffle Department

H‧‧‧Translation direction

526‧‧‧Sucker Department

V‧‧‧Up and down direction

I‧‧‧Transport direction

Other features and advantages of the present invention will be apparent from the embodiments of the present invention. FIG. 1 is a perspective view of an embodiment of the stripping machine of the present invention, illustrating the base, the conveying device, the rolling device, and 2 is a side view of an embodiment of a stripping machine of the present invention; and FIG. 3 is a side view of a sheet to be processed by an embodiment of the stripping machine of the present invention; A perspective view of a rolling device of an embodiment of the stripping machine Figure 5 is a rear elevational view of the rolling device of one embodiment of the film stripping machine of the present invention; Figure 6 is a partial perspective view of the rolling device of one embodiment of the film stripping machine of the present invention, illustrating the fixed frame, the drive mechanism and the rotating jaw Figure 7 is a partial rear elevational view of the rolling device of one embodiment of the film stripping machine of the present invention; Figure 8 is a side elevational view of the rotary rolling member of one embodiment of the film stripping machine of the present invention; Figure 9 is a partial side elevational view showing an embodiment of the stripping machine of the present invention, illustrating a detailed configuration of the gripping blowing mechanism and the peeling mechanism; and Figure 10 is a perspective view of the gripping and blowing mechanism of an embodiment of the stripping machine of the present invention. Figure 11 is a front view of a stopper of an embodiment of the stripping machine of the present invention; Figure 12 is a schematic view of the operation of an embodiment of the stripping machine of the present invention, illustrating that the rotary stamping member is in an initial position; BRIEF DESCRIPTION OF THE DRAWINGS FIG. 14 is a schematic view showing the operation of an embodiment of the stripping machine of the present invention; FIG. 14 is a schematic view showing the operation of an embodiment of the stripping machine of the present invention, illustrating that the rotating stamping member is at the end position; Actuating an embodiment of the stripping machine Intent described rolling member rolling cutter rotary rolling to form a thin film so that deformation of the recess indentation; FIG. 16 is a film of one of the stripping machine of the present invention as a schematic example of embodiment the movable described The rotary rolling member is reset to the initial position; FIG. 17 is a schematic view showing the operation of one embodiment of the stripping machine of the present invention, illustrating that a gas chamber having an opening is formed between the film and the photoresist layer when the rotating stamping member is moved away from the film; 18 is a schematic diagram of the operation of one embodiment of the stripping machine of the present invention, illustrating the front projection of the clamping substrate; FIG. 19 is an operation diagram of an embodiment of the stripping machine of the present invention, illustrating the opening of the nozzle to the air chamber Blowing the film to peel the photoresist layer from the portion adjacent to the front edge and superimposing on the receiving film; FIG. 20 is a schematic view showing the operation of one embodiment of the film stripping machine of the present invention, illustrating that the bonding module is moved to the bonding position to receive the film The overlapping portions of the film are joined together; and Figure 21 is a schematic view of the operation of one embodiment of the stripping machine of the present invention, illustrating that the recovery roller retracts the receiving film and pulls the film to move it to the receiving position.

1 , 2 and 3 are an embodiment of the stripping machine of the present invention. Stripped on. In the embodiment, the board member 1 has a substrate 10, two photoresist layers 11 respectively formed on the front and back surfaces of the substrate 10, and two thin films 12 respectively formed on the two photoresist layers 11. Each film 12 is exemplified by Mylar. Each film 12 is used to protect the corresponding photoresist layer 11 and has a front edge 121, a rear edge 122, a bonding surface 123 adhered to the corresponding photoresist layer 11, and a film The outer surface 124 of the bonding surface 123 is opposite. The substrate 10 has a front projection projecting from the front end edge 121 of each film 12. 101.

Referring to Figures 1, 3, 4 and 5, the stripping machine 200 comprises a base 2, a conveying device 3, a rolling device 4, and a stripping device 5. The conveying device 3 is disposed on the machine base 2 and includes a rear feeding end 31, a front discharging end 32, and a plurality of conveying rollers 33 between the rear feeding end 31 and the front discharging end 32, and the conveying The roller 33 transports the panel 1 in a transport direction I from the rear to the front. The rolling device 4 is located at a middle portion of the conveying device 3, and the rolling device 4 includes a fixing frame 41 fixed to the frame 2, two driving mechanisms 42 disposed upside down on the fixing frame 41, and two of which are respectively disposed on The two driving mechanisms 42 rotate the rolling members 44.

Referring to FIG. 1 , FIG. 4 , FIG. 6 and FIG. 7 , since the two driving mechanisms 42 have the same structure and the two rotating squeezing members 44 have the same structure, in the following description, the group will be positioned above. The drive mechanism 42 and the rotary squeezing member 44 are described as an example. The driving mechanism 42 includes a first carrier 421, a second carrier 422, a third carrier 423, a first cylinder 424, two second cylinders 425, and a third cylinder 426. The first carrier 421 is slidably coupled to a laterally extending transverse rail 411 of the fixed frame 41. The first cylinder 424 is fixedly disposed on the fixed frame 41 and connected to the first carrier 421. The first cylinder 424 is used for the first carrier 421. The first carrier 421 is driven to move in a translational direction H, wherein the translational direction H is parallel to the front edge 121 of the film 12 and perpendicular to the conveying direction I. The two second cylinders 425 are fixedly disposed on the first carrier 421 and adjacent to the left and right ends of the first carrier 421, and the second cylinders 425 are connected to the top of the second carrier 422 and are used to drive the second carrier 422. Move along a vertical direction V, where The up and down direction V is perpendicular to the translation direction H. The third carrier 423 is slidably connected to an obliquely extending inclined rail 427 of the second carrier 422. The third cylinder 426 is fixedly disposed on the second carrier 422 and connected to the third carrier 423. The third cylinder 426 is configured to drive the third carrier 423 to move in a rolling direction D. The rolling direction D of this embodiment is inclined to the front end edge 121 of the film 12.

The driving mechanism 42 further includes a shell member 428, a biasing spring 429, and a pressure adjusting rod 430. The case member 428 is movably coupled to the third carrier 423 in the up and down direction V. The case member 428 is formed with a receiving groove 431 for receiving the biasing spring 429. Each of the rotary rolling members 44 is rotatably pivotally coupled to the housing member 428 of the corresponding drive mechanism 42. The pressure adjusting rod 430 of the embodiment is exemplified by a screw screwed to the third carrier 423. The pressure adjusting rod 430 extends into the receiving groove 431 for pressing against the top end of the biasing spring 429. The biasing spring 429 can bias the housing member 428 downward and can adjust the pressure applied by the biasing spring 429 to the housing member 428 by rotating the pressure adjustment lever 430. Thereby, the force when the rotary squeezing member 44 is pressed against the outer surface 124 of the film 12 (as shown in FIG. 3) can be adjusted.

Referring to Figures 3, 6, and 8, the rotary squeezing member 44 includes a disk-shaped squeezing blade 441. The squeezing blade 441 includes a blade tip 442 for pressing the film 12, the tip of the embodiment. 442 is rounded. By the design of the blade tip 442 of the squeezing blade 441 in a rounded shape, the squeezing blade 441 can be prevented from cutting the film 12 during the pressing of the film 12. The driving mechanism 42 can drive the rotating rolling member 44 to move along a pressing direction D to be pressed onto the outer surface 124 via the front end edge 121 of the film 12, so that the film 12 is concavely deformed to form a pressure. The mark 13 is used to break the adhesion and adhesion between the film 12 and the photoresist layer 11. When the rotary pressing member 44 is moved away from the film 12, a gas chamber 14 is formed between the film 12 and the photoresist layer 11 (as shown in FIG. 17), and an opening 141 (shown in FIG. 17) of the gas chamber 14 is formed at the front end. Between the edge 121 and the photoresist layer 11.

Referring to FIGS. 3, 9, and 10, the peeling device 5 is disposed on the frame 2 and located on the front side of the rolling device 4. The peeling device 5 includes a holding air blowing mechanism 51 and a peeling mechanism 52. The clamping air blowing mechanism 51 includes two clamping jaws 511 and two nozzles 512 respectively disposed on the two clamping jaws 511. The two clamping jaws 511 are used for clamping the front protruding portions 101 of the substrate 10 of the panel member 1, each of which The nozzle 512 is used to blow the opening 141 (shown in FIG. 17) of the corresponding gas chamber 14 to peel the photoresist layer 11 from the portion of the film 12 adjacent to the front edge 121.

Referring to FIGS. 9 and 11, the peeling mechanism 52 is used to engage the portion of the film 12 adjacent the front end edge 121 to peel the film 12 from the photoresist layer 11. The peeling mechanism 52 includes two upper and lower spaced stop members 521, two upper and lower spaced recovery rollers 522, and two receiving films 523 which are respectively wound around the two recovery rollers 522 and can be wound by the recovery rollers 522, and two Bonding modules 524. Each of the stoppers 521 has a baffle portion 525 and a suction cup portion 526 located at one end of the baffle portion 525 adjacent to the recovery drum 522. Each of the receiving films 523 of the present embodiment is exemplified by Mylar. A part of each receiving film 523 is wound around the corresponding recovery roller 522, and the other portion is abutted against the suction portion 526 of the corresponding stopper 521, and the suction cup portion. The 526 can absorb the receiving film 523 by suction, whereby another portion of the receiving film 523 can be placed flat against the chuck portion 526.

The portion of each film 12 adjacent to the front edge 121 will be correspondingly sprayed The mouth 512 is blown against the corresponding stopper 521 and overlaps the portion of the corresponding receiving film 523 that abuts against the suction cup portion 526. The portions of the film 12 that overlap the receiving film 523 are joined together by the corresponding bonding module 524 so that the film 12 can be coupled to the receiving film 523. Thereby, when each of the recovery rolls 522 is taken up by the receiving film 523, the film 12 joined to the receiving film 523 can be pulled at the same time, whereby the film 12 can be completely peeled off from the photoresist layer 11.

The following describes in detail how the stripping machine 200 operates:

Referring to Figures 1 and 12, first, the plate member 1 is placed on the conveying roller 33 of the conveying device 3 from the rear feeding end 31, and the conveying roller 33 moves the conveying plate member 1 in the conveying direction I. When the panel 1 is moved to a predetermined position adjacent to the rear side of the rolling device 4, the conveying roller 33 stops the movement of the conveying plate member 1.

Referring to Figures 6, 12 and 13, the second cylinder 425 of the upper set of drive mechanisms 42 drives the second and third carriers 422, 423 and the rotary rolling member 44 downward in the up and down direction V, and The second cylinder 425 of the other group of driving mechanisms 42 at the lower side drives the second and third carriers 422, 423 and the rotary rolling member 44 to move upward in the up and down direction V, so that the two rotating rolling members 44 can be respectively moved. Up to an initial position (as shown in FIG. 13), when each of the rotary squeezing members 44 is in the initial position, each of the rotary squeezing members 44 is located between the front projections 101 of the substrate 10 and the front end edge 121 of the corresponding film 12. And each of the rotary squeezing members 44 is aligned in front of the front end edge 121 of the corresponding film 12.

Referring to Figures 6, 14, and 15, then, the third cylinder 426 of each drive mechanism 42 drives the third carrier 423 and the rotary squeezing member 44 to move in the squeezing direction D to rotate the squeezing member 44. The pressing blade 441 is pressed onto the outer surface 124 via the front end edge 121 of the film 12. During the pressing of the pressing blade 441, the cutting edge 442 presses the film 12 toward the photoresist layer 11 to make the film 12 and the photoresist The layer 11 is recessed and deformed as shown in FIG. 15, respectively, and an indentation 13 is formed on the outer surface 124 of the film 12 to break the adhesion and adhesion between the film 12 and the photoresist layer 11. When the third cylinder 426 drives the rotary ram 44 to move to an end position (as shown in FIG. 14) spaced behind the front end edge 121, the third cylinder 426 stops driving the rotary ram 44 to move.

Referring to Figures 6, 16 and 17, after that, the third cylinder 426 will urge the rotary ram 44 to be reset from the end position to the initial position (as shown in Figure 16). When the pressing blade 441 of the rotating pressing member 44 is separated from the outer surface 124 of the film 12, an air chamber 14 is formed between the bonding surface 123 of the film 12 and the photoresist layer 11, and an opening 141 of the air chamber 14 is formed at the front end edge. Between 121 and the photoresist layer 11. By the third cylinder 426 driving the rotary squeezing member 44 to reciprocate a plurality of times between the initial position and the end position, the film 12 can be repeatedly pressed, thereby being more effectively destroyed. The adhesion and adhesion between the film 12 and the photoresist layer 11 increase the separation of the film 12 from the photoresist layer 11, and the formation of the gas cell 14 and its opening 141 can be more remarkable.

It should be noted that, by the first cylinder 424, the first, second, and third carriers 421, 422, 423 and the rotating squeezing member 44 can be driven to translate. The direction H is moved such that the rotary squeezing member 44 can be pressed at different positions of the front end edge 121 of the film 12 to press a plurality of indentations 13 spaced apart from each other on the outer surface 124 of the film 12. Thereby, a plurality of gas cells 14 can be formed between the film 12 and the photoresist layer 11, and the adhesion and adhesion between the film 12 and the photoresist layer 11 can be more effectively destroyed.

Referring to Figures 9, 18 and 19, after the rolling operation of the film 12 is completed, the conveying roller 33 moves the conveying member 1 in the conveying direction I. When the panel 1 is moved to a position where the front projection 101 is located between the two jaws 511 (as shown in FIG. 18), the two jaws 511 will approach each other and hold the front projection 101. The panel 1 is positioned at a position where the opening 141 of the plenum 14 (shown in Figure 17) is aligned with the nozzle 512. Subsequently, each of the nozzles 512 blows the opening 141 of the gas chamber 14 to peel the photoresist layer 11 from the portion of the film 12 adjacent to the front end edge 121. The portion of each film 12 adjacent to the front end edge 121 is blown against the corresponding stopper 521 by the corresponding nozzle 512, and overlaps the portion where the corresponding receiving film 523 abuts against the chuck portion 526.

Referring to FIG. 9 and FIG. 20, each of the bonding modules 524 is moved from an initial position (as shown in FIG. 9) to an abutting position of the film 12 and the receiving film 523 (as shown in FIG. 20). The film 12 is joined to the receiving film 523 by joining together the portions where the two overlap. Subsequently, each of the joint modules 524 is reset to the initial position. At this time, each of the recovery rollers 522 can take up the receiving film 523 to simultaneously pull the film 12 connected to the receiving film 523, thereby completing the film 12 completely. The photoresist layer 11 is stripped. In this embodiment, the bonding module 524 can be bonded to the overlapping portion of the film 12 and the receiving film 523 by, for example, heat fusion or bonding or other bonding means. together.

Referring to Figures 20 and 21, then, the two jaws 511 release the front projections 101, causing the conveying roller 33 to move the conveying member 1 in the conveying direction I to the front discharge end 32 (as shown in Fig. 1) so as to The panel 1 performs subsequent development and etching steps. On the other hand, after each recovery roller 522 is taken up by the receiving film 523, the film 12 is pulled to move to a receiving position shown in FIG. 21, and the film 12 is used as a receiving film. Thereby, when the film 12 of the next sheet member 1 is peeled off from the portion of the front end edge 121, it can be connected to the film 12 serving as the receiving film to perform the peeling and recovery of the film 12 again.

In summary, the stripping machine 200 of the present embodiment presses the film 12 through the rotating rolling member 44 of the rolling device 4 to deform the film 12 to form an indentation 13 to destroy the film 12 and the photoresist layer 11. The adhesion and adhesion therebetween can reduce the damage of the photoresist layer 11 and the substrate 10 during the process of rolling the film 12 by the rotating stamper 44. When the rotary pressing member 44 is moved away from the film 12, a gas chamber 14 having an opening 141 is formed between the film 12 and the photoresist layer 11, whereby the peeling device 5 can easily and quickly peel the film 12 from the photoresist layer. 11, it is indeed possible to achieve the object of the present invention.

However, the above is only the embodiment of the present invention, and the scope of the present invention is not limited thereto, that is, the simple equivalent changes and modifications made by the patent application scope and the patent specification of the present invention are still It is within the scope of the patent of the present invention.

Claims (12)

A film stripping machine adapted to peel a film of a plate member from a photoresist layer, the film having a front end edge, a bonding surface bonded to the photoresist layer, and an outer surface opposite to the bonding surface The plate member has a substrate bonded to a side of the photoresist layer opposite to the film, the substrate having a front protrusion protruding from the front end edge, the stripping machine comprising: a conveying device, along a The plate member is conveyed from a rearward and forward conveying direction, and a rolling device is located at a middle portion of the conveying device, the rolling device includes a fixing frame, a driving mechanism disposed on the fixing frame, and a driving mechanism a rotating pressing member, the driving mechanism can drive the rotating rolling member to move along a pressing direction to press the front end edge to the outer surface, so that the film is concavely deformed to form an indentation to destroy the film and the An adhesive force between the photoresist layers, when the rotating stamping member moves away from the film, a gas chamber is formed between the film and the photoresist layer, and an opening of the gas chamber is formed at the front end edge and the photoresist layer Between the drive mechanism can drive the rotary rolling An initial position between the front projection and the front end edge and aligned in front of the front end edge along the pressing direction, and an end position which is pressed against the outer surface and spaced behind the front end edge Moving, the rotary pressing member comprises a disk-shaped pressing blade, the pressing blade comprises a cutting edge for pressing the film, and a peeling device is located on the front side of the rolling device, the peeling device comprises a clamping air blowing mechanism, and a peeling mechanism for clamping the front protruding portion and blowing the opening of the air chamber to make the The photoresist layer is peeled off from a portion of the film adjacent to the front end edge, and the peeling mechanism is configured to engage a portion of the film adjacent to the front end edge to peel the film from the photoresist layer. The stripping machine of claim 1, wherein the cutting edge has a rounded shape. The stripping machine of claim 2, wherein the driving mechanism comprises a shell member for pivotally connecting the rotary stamping member, a biasing spring disposed in the shell member, and a pressing member A pressure adjustment rod that biases the housing member downwardly at one end of the biasing spring. The stripping machine of claim 3, wherein the driving mechanism further comprises a first carrier, a second carrier, a third carrier, a first cylinder, a second cylinder, and a third a cylinder, the first cylinder is disposed on the fixing frame for driving the first carrier to move in a translation direction parallel to the front end edge, and the second cylinder is disposed on the first carrier to drive the second The carrier moves along an up and down direction, the third cylinder is disposed on the second carrier to drive the third carrier to move along the pressing direction, and the shell member is movably coupled to the third portion along the up and down direction On the carrier. The film stripper of any one of claims 1 to 4, wherein the rolling direction is inclined to the front end edge. The film stripping machine of any one of claims 1 to 4, wherein the gripping air blowing mechanism comprises two jaws for clamping the front protrusion, and a corresponding one of the jaws a nozzle that can blow the opening, the peeling mechanism includes a stopper, a recovery roller, a receiving film wound around the recovery roller and can be wound by the recovery roller, and a joint module, The receiving film portion abuts against the stopping member, and the portion of the film adjacent to the front end edge is blown by the nozzle to a position of the blocking member and is overlapped with the receiving film, and the bonding module is configured to The film is joined to the portion where the receiving film overlaps. A rolling device for a film stripping machine, which is suitable for pressing a film of a plate member, the plate member having a photoresist layer having a front end edge, a bonding surface bonded to the photoresist layer, and a reverse The pressing device includes: a fixing frame, a driving mechanism disposed on the fixing frame, and a rotating pressing member disposed on the driving mechanism, the driving mechanism can drive the rotating frame The pressing member moves in a pressing direction to be pressed onto the outer surface via the front end edge, and the film is concavely deformed to form an indentation to break the adhesion between the film and the photoresist layer, when the rotation is pressed When the film is removed from the film, a gas chamber is formed between the film and the photoresist layer, and an opening of the gas chamber is formed between the front end edge and the photoresist layer, and the driving mechanism can drive the rotary pressing member along The pressing direction moves between an initial position aligned in front of the front end edge and an end position pressed against the outer surface and spaced behind the front end edge, the rotating pressing member comprising a disk shape Rolling knives, the squeezing knives include a squeegee The cutting edge of the film. The rolling device of the stripping machine according to claim 7, wherein the cutting edge has a rounded shape. The rolling device of the stripping machine according to claim 8, wherein the driving machine The structure includes a shell member for pivotally connecting the rotary stamping member, a biasing spring disposed in the shell member, and a biasing spring for biasing the end of the biasing member to bias the shell member downwardly Pressurized pressure adjustment lever. The rolling device of the stripping machine of claim 9, wherein the driving mechanism further comprises a first carrier, a second carrier, a third carrier, a first cylinder, and a second cylinder. And a third cylinder, the first cylinder is disposed on the fixing frame for driving the first carrier to move along a translation direction parallel to the front end edge, and the second cylinder is disposed on the first carrier for Driving the second carrier to move in an up and down direction, the third cylinder is disposed on the second carrier for driving the third carrier to move along the pressing direction, and the shell member is movably coupled along the up and down direction On the third carrier. The rolling device of the stripping machine according to any one of claims 7 to 10, wherein the rolling direction is inclined to the front end edge. A rotary stamping device for stripping machine, suitable for pressing a film of a plate member, the plate member having a photoresist layer, the film having a front end edge, a bonding surface bonded to the photoresist layer, and a film Contrary to the outer surface of the bonding surface, the film stripping machine comprises a driving mechanism, the rotating pressing member is disposed on the driving mechanism and comprises: a disk-shaped pressing blade, the pressing blade comprises a cymbal Pressing the blade tip of the film, the rotating pressing member being driven by the driving mechanism in an initial position aligned with the front end edge in a pressing direction, and a pressing on the outer surface and spaced apart from the front end edge Moving between the rear end positions, the rotating squeezing member can be driven by the driving mechanism along the rolling Moving in a direction to press onto the outer surface via the front end edge, causing the film to be deformed to form an indentation to break the adhesion between the film and the photoresist layer when the rotating stamping member is moved away from the film An air chamber is formed between the film and the photoresist layer, and an opening of the gas chamber is formed between the front end edge and the photoresist layer.