TWI502223B - Partial random laser illumination system and device having random phase and amplitude component - Google Patents
Partial random laser illumination system and device having random phase and amplitude component Download PDFInfo
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- G—PHYSICS
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- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/48—Laser speckle optics
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
- H01S3/106—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating by controlling devices placed within the cavity
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- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
- H04N9/00—Details of colour television systems
- H04N9/12—Picture reproducers
- H04N9/31—Projection devices for colour picture display, e.g. using electronic spatial light modulators [ESLM]
- H04N9/3141—Constructional details thereof
- H04N9/315—Modulator illumination systems
- H04N9/3161—Modulator illumination systems using laser light sources
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- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/10—Beam splitting or combining systems
- G02B27/1006—Beam splitting or combining systems for splitting or combining different wavelengths
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S2301/00—Functional characteristics
- H01S2301/02—ASE (amplified spontaneous emission), noise; Reduction thereof
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/02—Constructional details
- H01S3/025—Constructional details of solid state lasers, e.g. housings or mountings
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/05—Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
- H01S3/08—Construction or shape of optical resonators or components thereof
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/09—Processes or apparatus for excitation, e.g. pumping
- H01S3/091—Processes or apparatus for excitation, e.g. pumping using optical pumping
- H01S3/094—Processes or apparatus for excitation, e.g. pumping using optical pumping by coherent light
- H01S3/0941—Processes or apparatus for excitation, e.g. pumping using optical pumping by coherent light of a laser diode
- H01S3/09415—Processes or apparatus for excitation, e.g. pumping using optical pumping by coherent light of a laser diode the pumping beam being parallel to the lasing mode of the pumped medium, e.g. end-pumping
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
- H01S3/106—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating by controlling devices placed within the cavity
- H01S3/108—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating by controlling devices placed within the cavity using non-linear optical devices, e.g. exhibiting Brillouin or Raman scattering
- H01S3/109—Frequency multiplication, e.g. harmonic generation
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Description
本發明係關於一種雷射照明裝置,特別是關於一種具有任意相位與振幅元件以抑制光斑之部分任意雷射照明系統及裝置BACKGROUND OF THE INVENTION 1. Field of the Invention This invention relates to a laser illumination device, and more particularly to a partial laser illumination system and apparatus having an arbitrary phase and amplitude component for suppressing light spots.
傳統高同調雷射照明光源應用於投影系統中,在粗糙屏幕表面時會產生雷射光斑現象,造成影像對比度變差,令觀眾感到刺眼不舒服之現象。為消除前述之雷射光斑現象,一種習知技術是以擺動研磨玻璃來降低雷射光斑。雖然此習知技術可有效抑制光斑,但因為其光源形成面光源,雷射光源無法聚焦成一點,換句話說其使用的擴散元件破壞了雷射原本的發散角度,導致無法維持小角度輸出(發散角約正負20度),穿透率僅有約50%,因此浪費相當大之光能量。有鑑於此,實施此習知技術之輸出光源僅適用於液晶矽基(Liquid Crystal on Silicon,LCOS)或數位光源處理(Digital Light Processing,DLP)之投影機顯示器,而不適合應用於小角度、小光點之微機電系統(Micro Electro Mechanical Systems,MEMS)。Conventional high-coherence laser illumination sources are used in projection systems to produce laser flares on rough screen surfaces, resulting in poor image contrast and irritating viewers. In order to eliminate the aforementioned laser spot phenomenon, a conventional technique is to reduce the laser spot by oscillating the ground glass. Although this prior art can effectively suppress the spot, the laser source cannot be focused to a point because its light source forms a surface light source. In other words, the diffusing element used destroys the original divergence angle of the laser, and the small angle output cannot be maintained ( The divergence angle is about plus or minus 20 degrees), and the penetration rate is only about 50%, so a considerable amount of light energy is wasted. In view of this, the output light source implementing the prior art is only applicable to liquid crystal on silicon (LCOS) or digital light processing (DLP) projector displays, and is not suitable for small angles and small. Micro Electro Mechanical Systems (MEMS).
另一種習知技術則是以擺動週期性繞射光學元件來降低雷射光斑,可用於微機電掃描系統中,但其光學元件設計複雜,結構須為完美週期性結構,導致製作困難且價格偏高。另一種習知技術中使用任意雷 射(Random Laser),由於其光源為空間低同調性,因此雷射光源無法完美聚焦於一點。Another conventional technique is to reduce the laser spot by oscillating periodic diffractive optical elements, which can be used in a microelectromechanical scanning system, but the optical component design is complicated, and the structure must be a perfect periodic structure, resulting in difficulty in production and price deviation. high. Another conventional technique uses arbitrary lightning Random Laser, because the light source is low spatial coherence, the laser source cannot be perfectly focused on one point.
有鑑於上述習知技藝之問題,本發明之目的在於提供一種具有任意相位與振幅元件之部分任意雷射照明系統及裝置,其可有效降低雷射光斑之對比值至8.5%或更低,同時能維持小角度之發散角、以及維持光之高穿透率,使得本發明之雷射光束的傳播距離可長達數公尺至數公里遠,並且適用於液晶矽基掃瞄系統、數位光源處理、微機電系統或其他掃描型系統中。In view of the above problems of the prior art, it is an object of the present invention to provide a partial laser illumination system and apparatus having any phase and amplitude components, which can effectively reduce the contrast value of the laser spot to 8.5% or lower, while The laser beam can be maintained at a small angle and maintains a high transmittance of light, so that the laser beam of the present invention can travel for distances of several meters to several kilometers, and is suitable for liquid crystal 矽-based scanning systems and digital light sources. Processing, MEMS or other scanning systems.
根據本發明之目的,提出一種具有任意相位與振幅元件之部分任意雷射照明裝置,包含:增益介質、激發體、高反射鏡、以及任意相位與振幅元件。激發體將增益介質電子由低能態激發至高能態;高反射鏡被該增益介質放射出的增益後雷射光束所穿越;任意相位與振幅元件介於該增益介質與該高反射鏡之間,被該增益介質放射出的該增益後雷射光束所穿越。In accordance with the purpose of the present invention, a portion of any laser illumination device having arbitrary phase and amplitude elements is provided, including: a gain medium, an excitation body, a high mirror, and any phase and amplitude elements. The excitation body excites the gain medium electrons from a low energy state to a high energy state; the high mirror is traversed by the gain laser beam emitted by the gain medium; any phase and amplitude elements are interposed between the gain medium and the high reflection mirror, The laser beam is traversed by the gain emitted by the gain medium.
基於上述構想,其中該任意相位與振幅元件為相位型任意相位與振幅元件或散射子型任意相位與振幅元件或其組合,其中該任意相位與振幅元件亦可為擴散膜元件、繞射元件、微透鏡元件或其組合。該增益介質具有一高反射性面以及一抗反射性面,該激發體將雷射光束打入該高反射性面,並由該抗反射性面放射出該增益後雷射光束。該任意相位與振幅元件與該增益後雷射光束之垂直方向具有一角度,該角度係選自近±0度至近±90度之其中之一者。較佳地,該任意相位與振幅元件反射部分該增益後雷射光束至該增益介質。Based on the above concept, the arbitrary phase and amplitude elements are phase-type arbitrary phase and amplitude elements or scattering sub-type arbitrary phase and amplitude elements or a combination thereof, wherein the arbitrary phase and amplitude elements may also be diffusion film elements, diffraction elements, Microlens elements or combinations thereof. The gain medium has a highly reflective surface and an anti-reflective surface. The excitation body drives a laser beam into the highly reflective surface, and the gain-emitting laser beam is emitted from the anti-reflective surface. The arbitrary phase and amplitude elements have an angle with the vertical direction of the post-gain laser beam, the angle being selected from one of approximately ±0 degrees to approximately ±90 degrees. Preferably, the arbitrary phase and amplitude elements reflect a portion of the gain of the laser beam to the gain medium.
基於上述構想,更包含一擺動元件,該擺動元件來回擺動該 任意相位與振幅元件,擺動之方向約正交於該增益後雷射光束之方向或夾約0至45度擺動。其中,該擺動元件係選自音圈馬達、磁動元件、電動元件、光動元件、聲動元件、壓電元件之其中之一或其組合。Based on the above concept, further comprising a swinging element, the swinging element swinging back and forth For any phase and amplitude component, the direction of the wobble is approximately orthogonal to the direction of the laser beam after the gain or about 0 to 45 degrees. Wherein, the swinging component is selected from one of a voice coil motor, a magnetic moving component, an electric component, a photodynamic component, an acoustic component, and a piezoelectric component, or a combination thereof.
基於上述構想,更包含一或多個光轉換元件於該增益介質與 該任意相位與振幅元件之間,使得該些光轉換元件被該增益介質放射出的增益後雷射光束所穿越。較佳地,有一聚焦透鏡於該些光轉換元件與該任意相位與振幅元件之間,使得該雷射光束穿透該聚焦透鏡。其中,該光轉換元件係選自線性或非線性元件,其中光轉換元件可為二倍頻元件、和頻元件、差頻元件或其他轉換元件。Based on the above concept, one or more optical conversion elements are further included in the gain medium and Between the arbitrary phase and the amplitude element, the light conversion elements are traversed by the gain laser beam emitted by the gain medium. Preferably, a focusing lens is disposed between the light converting elements and the arbitrary phase and amplitude elements such that the laser beam penetrates the focusing lens. Wherein, the light conversion component is selected from a linear or non-linear component, wherein the optical conversion component can be a double frequency component, a frequency component, a difference frequency component or other conversion component.
基於上述構想,更包含一或多個外加任意相位與振幅元件, 該些外加任意相位與振幅元件位於該增益介質與該高反射鏡之間,使得該雷射光束穿透該些外加任意相位與振幅元件。Based on the above concept, one or more additional phase and amplitude components are added, The additional arbitrary phase and amplitude components are located between the gain medium and the high mirror such that the laser beam penetrates the applied arbitrary phase and amplitude elements.
基於上述構想,更包含一聚焦透鏡於該增益介質與該任意相位與振幅元件之間,使得該雷射光束穿透該聚焦透鏡。Based on the above concept, a focus lens is further disposed between the gain medium and the arbitrary phase and amplitude elements such that the laser beam penetrates the focus lens.
根據本發明之目的,又提出一種具有任意相位與振幅元件之部分任意雷射照明系統。包含:一雷射照明裝置,將一雷射光束發射至投射標的;一任意相位與振幅元件,介於該雷射照明裝置與該投射標的之間,被該雷射光束所穿越。較佳地,該任意相位與振幅元件反射部分該雷射光束至該雷射照明裝置In accordance with the purpose of the present invention, a partial arbitrary laser illumination system having arbitrary phase and amplitude elements is also proposed. The invention comprises: a laser illumination device for transmitting a laser beam to the projection target; an arbitrary phase and amplitude component interposed between the laser illumination device and the projection target and traversed by the laser beam. Preferably, the arbitrary phase and amplitude component reflects a portion of the laser beam to the laser illumination device
基於上述構想,更包含一發散透鏡以及一聚焦透鏡,該發散透鏡位於該任意相位與振幅元件與該雷射照明裝置之間,該聚焦透鏡位於 該任意相位與振幅元件與該投射標的之間,該雷射光束穿透該發散透鏡以及該聚焦透鏡。Based on the above concept, further comprising a diverging lens and a focusing lens, the diverging lens being located between the arbitrary phase and amplitude component and the laser illumination device, the focusing lens being located Between the arbitrary phase and the amplitude element and the projection target, the laser beam penetrates the diverging lens and the focusing lens.
基於上述構想,更包含一或多個外加任意相位與振幅元件, 該些外加任意相位與振幅元件位於該任意相位與振幅元件與該投射標的之間,使得該雷射光束穿透該些外加任意相位與振幅元件。Based on the above concept, one or more additional phase and amplitude components are added, The additional arbitrary phase and amplitude elements are located between the arbitrary phase and amplitude elements and the projection target such that the laser beam penetrates the additional phase and amplitude elements.
基於上述構想,更包含一或多個外加雷射照明裝置,該雷射 照明裝置以及該些外加雷射照明裝置將雷射發射至十字分色棱鏡(cross dichroic prism),以產生多波長任意雷射光源,使得該多波長任意雷射光源穿透該任意相位與振幅元件並投射至該投射標的。Based on the above concept, one or more additional laser illumination devices are further included, the laser The illumination device and the additional laser illumination device emit a laser to a cross dichroic prism to generate a multi-wavelength arbitrary laser source such that the multi-wavelength arbitrary laser source penetrates the arbitrary phase and amplitude element And cast to the projection target.
基於上述構想,更包含一或多個光轉換元件,該些光轉換元 件位於該雷射照明裝置以及該任意相位與振幅元件之間,使得該雷射光束穿透該些光轉換元件。抑或,該些光轉換元件位於該任意相位與振幅元件以及該投射標的之間,使得該雷射光束穿透該些光轉換元件。Based on the above concept, further comprising one or more light conversion elements, the light conversion elements A member is positioned between the laser illumination device and the arbitrary phase and amplitude elements such that the laser beam penetrates the light conversion elements. Or, the light conversion elements are located between the arbitrary phase and amplitude elements and the projection target such that the laser beam penetrates the light conversion elements.
根據本發明之目的,又提出一種具有任意相位與振幅元件之 部分任意雷射照明系統,包含:一雷射照明裝置,將一雷射光束發射至投射標的;複數個光轉換模組,其中每一個光轉換模組包含一任意相位與振幅元件以及一光轉換元件,該些光轉換模組介於該雷射照明裝置與該投射標的之間,被該雷射光束所穿越。According to the purpose of the present invention, another element having arbitrary phase and amplitude is proposed. Partially arbitrary laser illumination system comprising: a laser illumination device for transmitting a laser beam to a projection target; a plurality of optical conversion modules, wherein each of the optical conversion modules comprises an arbitrary phase and amplitude component and a light conversion The optical conversion module is interposed between the laser illumination device and the projection target and is traversed by the laser beam.
根據本發明之目的,較佳地可結合具有任意相位與振幅元件之部分任意雷射照明裝置於具有任意相位與振幅元件之部分任意雷射照明系統。上述雷射照明系統之包含:如申請專利範圍第1項之具有任意相位與振幅元件之部分任意雷射照明裝置;一任意相位與振幅元件,介於該雷 射照明裝置與該投射標的之間,被該雷射光束所穿越。較佳地,雷射照明系統更包含一或多個光轉換元件。For the purposes of the present invention, it is preferred to incorporate a portion of any laser illumination device having any phase and amplitude components in a portion of any laser illumination system having any phase and amplitude components. The above laser illumination system comprises: any part of the laser illumination device having any phase and amplitude components as claimed in claim 1; an arbitrary phase and amplitude component between the mine The laser beam is traversed by the laser beam between the illumination device and the projection target. Preferably, the laser illumination system further comprises one or more light conversion elements.
承上所述,本發明之具有任意相位與振幅元件之部分任意雷射照明系統及裝置,其可有效降低雷射光斑之對比值至8.5%或更低,同時能維持小角度之發散角、同時能維持光之高穿透率,適於用在液晶矽基或小光點之微機電系統、或其他掃描型系統中。In view of the above, a part of any laser illumination system and device having any phase and amplitude components of the present invention can effectively reduce the contrast value of the laser spot to 8.5% or lower while maintaining a divergence angle of a small angle, At the same time, it can maintain high transmittance of light, and is suitable for use in MEMS or small-spot MEMS, or other scanning systems.
1‧‧‧雷射照明裝置1‧‧‧Laser lighting installation
2‧‧‧發散透鏡2‧‧‧Divergent lens
3‧‧‧任意相位與振幅元件3‧‧‧Arbitrary phase and amplitude components
4‧‧‧音圈馬達4‧‧‧ voice coil motor
5‧‧‧聚焦透鏡5‧‧‧focus lens
6‧‧‧投射標的6‧‧‧projection target
7‧‧‧光斑抑制雷射照明裝置7‧‧‧Spot suppression laser lighting device
71‧‧‧激發體71‧‧‧Excited body
72‧‧‧增益介質72‧‧‧ Gain medium
721‧‧‧高反射性面721‧‧‧Highly reflective surface
722‧‧‧抗反射性面722‧‧‧Anti-reflective surface
73‧‧‧任意相位與振幅元件73‧‧‧Arbitrary phase and amplitude components
74‧‧‧音圈馬達74‧‧‧ voice coil motor
75‧‧‧高反射鏡75‧‧‧High Mirror
76‧‧‧發射口76‧‧‧ Launch port
77‧‧‧聚焦透鏡77‧‧‧focus lens
8‧‧‧十字分色棱鏡8‧‧‧cross dichroic prism
9‧‧‧光轉換元件9‧‧‧Light conversion components
10‧‧‧光轉換模組10‧‧‧Light Conversion Module
LS‧‧‧雷射光束LS‧‧‧Laser beam
LS1‧‧‧增益前雷射光束LS1‧‧‧Gas Front Laser Beam
LS2‧‧‧增益後雷射光束Laser beam after LS2‧‧‧ gain
LSA‧‧‧基頻雷射光束LSA‧‧‧ fundamental laser beam
LSB、LSC‧‧‧波長轉換雷射光束LSB, LSC‧‧‧ wavelength converted laser beam
D1~D5‧‧‧數據線D1~D5‧‧‧ data line
第1圖係本發明第一實施例之具有任意相位擴散膜之部分任意雷射照明系統示意圖。1 is a schematic view of a portion of an arbitrary laser illumination system having an arbitrary phase diffusion film according to a first embodiment of the present invention.
第2圖係本發明之音圈馬達震動頻率對於光斑抑制效果成效圖。Fig. 2 is a graph showing the effect of the vibration frequency of the voice coil motor of the present invention on the spot suppression effect.
第3圖係本發明第二實施例之具有任意相位與振幅元件之部分任意雷射照明系統示意圖。Figure 3 is a schematic illustration of a portion of an arbitrary laser illumination system having arbitrary phase and amplitude elements in accordance with a second embodiment of the present invention.
第4圖係本發明第三實施例之具有任意相位與振幅元件之部分任意雷射照明系統示意圖。Figure 4 is a schematic illustration of a portion of an arbitrary laser illumination system having arbitrary phase and amplitude elements in accordance with a third embodiment of the present invention.
第5圖係本發明第四實施例之具有任意相位與振幅元件之部分任意雷射照明系統示意圖。Figure 5 is a schematic illustration of a portion of an arbitrary laser illumination system having arbitrary phase and amplitude elements in accordance with a fourth embodiment of the present invention.
第6圖係本發明第五實施例之具有任意相位與振幅元件之部分任意雷射照明系統示意圖。Figure 6 is a schematic illustration of a portion of an arbitrary laser illumination system having arbitrary phase and amplitude elements in accordance with a fifth embodiment of the present invention.
第7圖係本發明第六實施例之具有任意相位與振幅元件之部分任意雷射照明系統示意圖。Figure 7 is a schematic illustration of a portion of an arbitrary laser illumination system having arbitrary phase and amplitude elements in accordance with a sixth embodiment of the present invention.
第8圖係本發明第七實施例之具有任意相位與振幅元件之部分任意雷射照明系統示意圖。Figure 8 is a schematic illustration of a portion of an arbitrary laser illumination system having arbitrary phase and amplitude elements in accordance with a seventh embodiment of the present invention.
第9圖係本發明第七實施例之具有任意相位與振幅元件之部分任意雷 射照明系統示意圖。Figure 9 is a partial lightning diagram of a seventh embodiment of the present invention having arbitrary phase and amplitude components A schematic diagram of the lighting system.
第10圖係本發明第八實施例之具有任意相位與振幅元件之部分任意雷射照明裝置之內部結構示意圖。Figure 10 is a schematic view showing the internal structure of a portion of an arbitrary laser illumination device having an arbitrary phase and amplitude element according to an eighth embodiment of the present invention.
第11圖係本發明第九實施例之具有任意相位與振幅元件之部分任意雷射照明裝置之內部結構示意圖。Figure 11 is a schematic view showing the internal structure of a portion of an arbitrary laser illumination device having an arbitrary phase and amplitude element according to a ninth embodiment of the present invention.
第12圖係本發明第十實施例之具有任意相位與振幅元件之部分任意雷射照明裝置之內部結構示意圖。Figure 12 is a schematic view showing the internal structure of a portion of an arbitrary laser illumination device having an arbitrary phase and amplitude element according to a tenth embodiment of the present invention.
第13圖係本發明第十一實施例之加入非線性晶體或光轉換元件裝置後的部分任意雷射照明裝置之內部結構示意圖。Figure 13 is a schematic view showing the internal structure of a portion of an arbitrary laser illumination device incorporating a nonlinear crystal or light conversion element device according to an eleventh embodiment of the present invention.
第14圖係本發明第十二實施例之具有任意相位與振幅元件之部分任意雷射照明裝置之內部結構示意圖。Figure 14 is a schematic view showing the internal structure of a portion of an arbitrary laser illumination device having an arbitrary phase and amplitude element according to a twelfth embodiment of the present invention.
第15圖係本發明第十三實施例之具有任意相位與振幅元件之部分任意雷射照明裝置之內部結構示意圖。Fig. 15 is a view showing the internal structure of a part of an arbitrary laser illumination device having an arbitrary phase and amplitude element according to a thirteenth embodiment of the present invention.
第16圖係本發明具有任意相位與振幅元件之部分任意雷射照明裝置之雷射特性圖。Figure 16 is a graph of the laser characteristics of a portion of any of the laser illumination devices of the present invention having any phase and amplitude components.
第17圖係本發明之雷射照射任意相位與振幅元件後之遠場分佈示意圖Figure 17 is a schematic diagram showing the far-field distribution of the laser irradiated with arbitrary phase and amplitude elements of the present invention.
以下舉出具體實施例以詳細說明本案之內容,並以圖式作為輔助說明。說明中提及之符號係參照圖式符號。值得注意的是,說明中提及之「包含」係為一開放式的用語,應解釋成「包含、但不限定於」。此外,所屬領域中具有通常知識者應了解,同一技術內容常具有不同之稱呼方式,例如「雷射」或「激光」,因此與本說明書中所提及之同領域且功能相似之技術內容應當然被包含於本說明書範圍之中。Specific examples are given below to explain the contents of the present invention in detail, and the drawings are used as an auxiliary explanation. The symbols mentioned in the description refer to the schema symbols. It is worth noting that the "include" mentioned in the description is an open term and should be interpreted as "including, but not limited to". In addition, those of ordinary skill in the art should understand that the same technical content often has different calling methods, such as "laser" or "laser", so the technical content similar to the same domain and functionally similar in this specification should be Of course, it is included in the scope of this specification.
請參考第1圖,第1圖係本發明第一實施例之具有任意相位 與振幅元件之腔外部分任意雷射照明系統示意圖。如第1圖所示,本發明之雷射照明系統包含有雷射照明裝置1、發散透鏡2、任意相位與振幅元件3、音圈馬達4以及聚焦透鏡5。其中,雷射照明裝置1為一般之可產生並發射雷射光束之裝置,一般而言具有將能量供給低能級的電子激發使其成為高能級電子之激發來源(常見的為半導體雷射或雷射二極體或電子激發源),再透過增益介質(Gain Medium)以及共振腔,使被激發的光經過增益介質多次以得到足夠的放大後,將此能量放大後的光自雷射照明裝置1中發射出去成為雷射光束LS。Please refer to FIG. 1 , which is an arbitrary phase of the first embodiment of the present invention. Schematic diagram of an arbitrary laser illumination system with an external portion of the amplitude element. As shown in Fig. 1, the laser illumination system of the present invention comprises a laser illumination device 1, a diverging lens 2, an arbitrary phase and amplitude element 3, a voice coil motor 4, and a focus lens 5. Among them, the laser illuminating device 1 is generally a device capable of generating and emitting a laser beam, and generally has an energy source for supplying energy to a low level to be an excitation source of high-energy electrons (commonly a semiconductor laser or a thunder) The emitter or the electron excitation source is transmitted through the gain medium (Gain Medium) and the resonant cavity, and the excited light is passed through the gain medium a plurality of times to obtain sufficient amplification, and the amplified light is self-exposed to the laser. The device 1 emits a laser beam LS.
雷射光束LS穿越發散透鏡2後發散入射任意相位與振幅元件3,其中該發散透鏡2可以將雷射光束LS進行發散,較佳地為凹透鏡。任意相位與振幅元件3可以為相位型任意相位與振幅元件或散射子型任意相位與振幅元件,任意相位與振幅元件3可以有近±0度至近±5度之小角度(相較於雷射光束LS的垂直方向),甚至可延伸至近±90度,其中各角度擁有不同的抑制光斑特性。當雷射光束LS穿越任意相位與振幅元件3後,雷射光束LS會與任意相位與振幅元件3交互作用,產生物理現象包含至少干涉、繞射、散射、漫射或其組合之光學現象並將任意相位與振幅分佈資訊以時間與空間之方式加載於其傳播之光束中,以致使雷射光束LS入射此任意相位與振幅元件3以達到其在空間座標與時間座標上之相位與振幅重新分佈,而這樣可重新任意的改變雷射光束之相位與振幅分佈之元件稱之為任意相位與振幅元件。接著,雷射光束LS穿越任意相位與振幅元件3後入射聚焦透鏡5,再穿越聚焦透鏡5後投射於投射標的6之表面,其中聚焦透鏡5較佳地為凸透鏡。換言之,任意相位與振幅元件3置於發散透鏡2以 及聚焦透鏡5之間,雷射光束LS自雷射照明裝置1發射而出後,依序經過發散透鏡2、任意相位與振幅元件3、聚焦透鏡5後,最後投射於投射標的6之表面。較佳地,雷射光束LS穿越聚焦透鏡5後聚焦成一點投射於投射標的6之表面。如此一來,透過前述之任意相位與振幅元件3,本發明之雷射照明系統將可以有效抑制雷射光束LS之雷射光斑雜訊,並形成部份任意雷射照明光源。其中形成部分任意雷射照明光源之簡易物理機制為,當雷射光穿越靜止任意相位與振幅元件後,雷射光會將任意相位與振幅元件上之任意相位與振幅資訊載入其光束中,其中包含至少一種以上干涉、繞射、散射、漫射等光學交互作用現象會產生,其在空間座標與時間座標上之相位與振幅分部會重新分佈以達到光斑抑制效果;在擺動任意相位與振幅元件時,雷射光斑空間分佈會隨著元件擺動位置而改變,在一個固定的時間內,雷射光斑分佈可以重新均勻佈滿整個照射面,藉此以達到更大之光斑抑制效果。這包含原有雷射相位同調特性並加上後來外加因素改變其原本雷射之部分空間上與時間上之相位與振幅分佈特性以形成部分相位與振幅任意分佈之雷射光源,在此稱之為部分任意雷射光源,此雷射光源在時間上與空間上並非完全改變原有雷射之空間同調性與時間同調,而是部分改變,因此部分任意雷射光源仍保有原雷射之部分傳播特性、頻寬特性、準直性與聚焦特性。After the laser beam LS passes through the diverging lens 2, it is divergently incident on any phase and amplitude element 3, wherein the diverging lens 2 can diverge the laser beam LS, preferably a concave lens. The arbitrary phase and amplitude component 3 can be any phase and amplitude component of the phase type and the amplitude component or the scattering component, and any phase and amplitude component 3 can have a small angle of approximately ±0 degrees to nearly ±5 degrees (compared to the laser) The vertical direction of the beam LS can even extend to nearly ±90 degrees, with each angle having different suppression spot characteristics. When the laser beam LS crosses any phase and amplitude element 3, the laser beam LS interacts with any phase and amplitude element 3, producing an optical phenomenon that includes at least interference, diffraction, scattering, diffusion, or a combination thereof. Loading any phase and amplitude distribution information into its propagating beam in a time and space manner such that the laser beam LS is incident on the arbitrary phase and amplitude element 3 to achieve its phase and amplitude on the space coordinates and time coordinates. The distribution, and thus the elements that can arbitrarily change the phase and amplitude distribution of the laser beam, are referred to as arbitrary phase and amplitude elements. Next, the laser beam LS passes through the arbitrary phase and amplitude element 3 and enters the focus lens 5, passes through the focus lens 5, and is projected onto the surface of the projection target 6, wherein the focus lens 5 is preferably a convex lens. In other words, any phase and amplitude element 3 is placed in the diverging lens 2 Between the focus lens 5 and the laser beam LS, the laser beam LS is emitted from the laser illumination device 1, and then passes through the diverging lens 2, the arbitrary phase and amplitude element 3, and the focus lens 5, and finally is projected on the surface of the projection target 6. Preferably, the laser beam LS passes through the focusing lens 5 and is focused to a point projected onto the surface of the projection target 6. In this way, the laser illumination system of the present invention can effectively suppress the laser spot noise of the laser beam LS through any of the foregoing phase and amplitude elements 3, and form a part of any laser illumination source. The simple physical mechanism for forming a portion of an arbitrary laser illumination source is that when the laser light passes through any of the stationary phase and amplitude components, the laser beam loads any phase and amplitude information on any phase and amplitude component into its beam, including At least one of the above-mentioned optical interaction phenomena such as interference, diffraction, scattering, and diffusion will occur, and the phase and amplitude fractions on the space coordinates and time coordinates will be redistributed to achieve the spot suppression effect; any phase and amplitude components are oscillated At this time, the spatial distribution of the laser spot changes with the swing position of the component. In a fixed time, the laser spot distribution can re-equally spread the entire illumination surface, thereby achieving a larger spot suppression effect. This includes the original laser phase coherence characteristics and the subsequent addition of some of the spatial and temporal phase and amplitude distribution characteristics of the original laser to form a partial source and amplitude arbitrary distribution of the laser source, referred to herein For some arbitrary laser sources, this laser source does not completely change the spatial coherence and time coherence of the original laser in time and space, but is partially changed, so some of the arbitrary laser sources still retain the original laser part. Propagation characteristics, bandwidth characteristics, collimation and focusing characteristics.
其中,當雷射光束LS入射任意相位與振幅3元件時,雷射光源在空間座標與時間座標上之相位與振幅會重新分佈,當分佈的速度較慢時,穿透雷射光束之相位與振幅分佈在空間座標上與時間座標上沒有被完全破壞,穿透後之雷射光束LS在空間座標上與時間座標上仍持有原本雷 射光束LS之部分相位與振幅特性,其擁有部分空間同調性、部分時間同調性、部分任意相位分佈、或/及部分任意振幅分佈,以"部分任意"稱之。形成部分任意雷射照明光源之簡易物理機制為,當雷射光束LS穿越靜止任意相位與振幅元件3後,雷射光束LS會將任意相位與振幅元件3上之任意相位與振幅資訊加入其光束中,其中包含至少一種以上干涉、繞射、散射、漫射等光學交互作用現象會產生,其在空間座標與時間座標上之相位與振幅分部會重新分佈以形成部分任意雷射,並達到光斑抑制效果。Wherein, when the laser beam LS is incident on any phase and amplitude 3 components, the phase and amplitude of the laser source on the space coordinates and time coordinates are redistributed. When the velocity of the distribution is slow, the phase of the laser beam is penetrated. The amplitude distribution is not completely destroyed on the space coordinates and time coordinates. The laser beam LS after penetration still holds the original mine on the space coordinates and time coordinates. Part of the phase and amplitude characteristics of the beam LS, which has partial spatial coherence, partial temporal coherence, partial arbitrary phase distribution, or / and partial arbitrary amplitude distribution, is called "partially arbitrary". A simple physical mechanism for forming a portion of an arbitrary laser illumination source is that when the laser beam LS passes through the stationary arbitrary phase and amplitude element 3, the laser beam LS adds any phase and amplitude information on any phase and amplitude element 3 to its beam. The optical interaction phenomenon including at least one of interference, diffraction, scattering, and diffusion is generated, and the phase and amplitude fractions on the space coordinates and the time coordinates are redistributed to form part of the arbitrary laser, and reach Spot suppression effect.
為使本發明之效果更加明顯,較佳地可使用音圈馬達4來對任意相位與振幅元件3來回擺動,擺動之方向近正交於雷射光束LS之方向。擺動任意相位與振幅元件3會使得雷射光束之空間座標與時間座標上之相位與振幅再次重新分佈。在擺動任意相位與振幅元件3時,雷射光斑空間分佈會隨著元件擺動位置而改變,在一個固定的時間內,雷射光斑分佈可以重新均勻佈滿整個照射面,藉此以達時間與空間變化之部分任意雷射,以獲得更大之光斑抑制效果。這包含原有雷射相位同調特性並加上後來外加因素改變其原本雷射之部分空間上與時間上之相位與振幅分佈特性以形成部分相位與振幅任意分佈之雷射光源,在此稱之為部分任意雷射光源,此雷射光源在時間上與空間上並非完全改變原有雷射之空間同調性與時間同調,而是部分改變,因此部分任意雷射光源仍保有原雷射之部分傳播特性、頻寬特性、準直性與聚焦特性。另外必須說明的是,本領域具有通常知識者應可當然明瞭,音圈馬達4用以作為一擺動元件,然而於實際實施本發明時可以使用其他擺動元件來達成與音圈馬達4相同或相似之擺動效果,而不必要拘限於使用音圈馬達4,此處之音圈馬達4僅為實施態樣 之舉例而非限制,在此先行敘明。In order to make the effect of the present invention more apparent, it is preferable to use the voice coil motor 4 to swing the arbitrary phase and the amplitude element 3 back and forth, and the direction of the oscillation is nearly orthogonal to the direction of the laser beam LS. Swinging the arbitrary phase and amplitude elements 3 redistributes the phase and amplitude of the spatial coordinates and time coordinates of the laser beam again. When swinging the arbitrary phase and amplitude component 3, the spatial distribution of the laser spot changes with the swing position of the component. In a fixed time, the laser spot distribution can re-equally spread the entire illumination surface, thereby achieving time and Partially random lasers with varying spatial variations for greater spot suppression. This includes the original laser phase coherence characteristics and the subsequent addition of some of the spatial and temporal phase and amplitude distribution characteristics of the original laser to form a partial source and amplitude arbitrary distribution of the laser source, referred to herein For some arbitrary laser sources, this laser source does not completely change the spatial coherence and time coherence of the original laser in time and space, but is partially changed, so some of the arbitrary laser sources still retain the original laser part. Propagation characteristics, bandwidth characteristics, collimation and focusing characteristics. In addition, it should be noted that those skilled in the art should of course understand that the voice coil motor 4 is used as a swinging component, however, other swinging components may be used to achieve the same or similar to the voice coil motor 4 when actually implementing the present invention. The swinging effect is not necessarily limited to the use of the voice coil motor 4, and the voice coil motor 4 here is only an implementation aspect. The examples are not limiting, and are described here first.
透過上述之音圈馬達4來回擺動任意相位與振幅元件3,可使得本發明之具有任意相位與振幅元件之部份任意雷射照明系統有效降低雷射光斑雜訊。請參考第2圖,第2圖係本發明之音圈馬達振動頻率對於光斑抑制效果成效圖,其中上方之數據線D1表示使用之任意相位與振幅元件3相較於雷射光束LS的垂直方向具有約1.0度之小角度,下方之數據線D2表示使用之任意相位與振幅元件3垂直(或稱正交)於雷射光束LS方向。如第2圖所示,無論任意相位與振幅元件3相較於雷射光束LS的垂直方向是否具有小角度偏差,於加入音圈馬達4來回擺動任意相位與振幅元件3後,隨著音圈馬達4之振動頻率上升(從0Hz上升至約130Hz),其雷射光束LS之雷射光斑雜訊比例(光斑對比值)從30%一路下降到10~15%,可見得本發明之具有任意相位與振幅元件之部份任意雷射照明系統對於雷射光束LS之雷射光斑雜訊具有良好的抑制效果。另外,本發明使用之音圈馬達4可為電壓需求低之輕巧裝置,尺寸可為0.8立方公分或更小,電壓可為5V或更小,使得本發明之具有任意相位與振幅元件之雷射照明系統整體可保持低驅動電壓、同時具備小體積而不至於佔用過多空間。By swinging the arbitrary phase and amplitude elements 3 back and forth through the voice coil motor 4 described above, a portion of any laser illumination system having any phase and amplitude elements of the present invention can effectively reduce laser spot noise. Please refer to FIG. 2, which is a graph showing the effect of the vibration frequency of the voice coil motor of the present invention on the spot suppression effect, wherein the upper data line D1 indicates the arbitrary phase used and the vertical direction of the amplitude element 3 compared to the laser beam LS. With a small angle of about 1.0 degrees, the lower data line D2 indicates that any phase used is perpendicular (or orthogonal) to the amplitude element LS in the direction of the laser beam LS. As shown in FIG. 2, regardless of whether the arbitrary phase and the amplitude element 3 have a small angular deviation from the vertical direction of the laser beam LS, after the voice coil motor 4 is added to swing back and forth between the arbitrary phase and the amplitude element 3, the voice coil is used. The vibration frequency of the motor 4 rises (from 0 Hz to about 130 Hz), and the laser spot noise ratio (spot contrast value) of the laser beam LS decreases from 30% to 10 to 15%, which shows that the present invention has any Part of the arbitrary laser illumination system of the phase and amplitude components has a good suppression effect on the laser spot noise of the laser beam LS. In addition, the voice coil motor 4 used in the present invention may be a lightweight device with a low voltage requirement, and may have a size of 0.8 cubic centimeters or less and a voltage of 5 V or less, so that the laser of the present invention has any phase and amplitude components. The lighting system as a whole can maintain a low driving voltage while having a small volume without occupying too much space.
上述之本發明具有任意相位與振幅元件之雷射照明系統可應用於紅、綠、藍雷射照明系統。若延伸使用之波長範圍,本發明具有任意相位與振幅元件之部份任意雷射照明系統可應用於紫外光、可見光、近紅外光、甚至遠紅外光之照明系統。另外,本雷射照明系統除了應用於連續波雷射照明系統外,亦可延伸使用於准連續波、脈衝波,形成新穎之部分任意相位雷射照明系統。The laser illumination system of the present invention having any phase and amplitude components can be applied to red, green, and blue laser illumination systems. If the wavelength range is extended, the arbitrary laser illumination system of the present invention having any phase and amplitude components can be applied to illumination systems of ultraviolet light, visible light, near infrared light, and even far infrared light. In addition, the laser illumination system can be extended to quasi-continuous waves and pulse waves in addition to continuous wave laser illumination systems to form a novel partial phase laser illumination system.
為使本發明之效果更加明顯,較佳地可針對任意相位與振幅元件3上端之任意結構圖紋進行設計,以達較高之抑制光斑之能力。此結構圖紋可為週期性分佈的結構圖紋或部分週期性分佈圖紋、或任意分佈的圖紋。在任意相位與振幅元件上設計出結構圖紋大小為奈米級至微米之結構圖紋,結構圖紋可為小於10um等級至大於150um等級結構圖紋分佈,或更小的圖紋結構或更大之圖紋結構。根據上述之本發明特點,本發明具有任意相位與振幅元件之部分任意雷射照明系統可應用於成像系統或用於顯微系統中。其中形成光斑圖紋重新分佈之簡易物理機制為,當雷射光穿越任意相位與振幅元件後,雷射光會將任意相位與振幅元件上之任意相位與振幅資訊載入其光束中,其中包含至少一種以上干涉、繞射、散射、漫射等光學交互作用現象會產生,其在空間座標與時間座標上之相位與振幅分部會重新分佈。In order to make the effect of the present invention more apparent, it is preferable to design any structural pattern of the upper end of the arbitrary phase and the amplitude element 3 to achieve a higher ability to suppress the light spot. The structural pattern may be a periodically distributed structural pattern or a partially periodically distributed pattern, or an arbitrarily distributed pattern. Structural patterns with a structure pattern of nanometers to micrometers are designed on arbitrary phase and amplitude components. The structure pattern can be a structure pattern of less than 10um to more than 150um, or a smaller pattern or more. Large pattern structure. In accordance with the features of the invention described above, a portion of any of the laser illumination systems of the present invention having any phase and amplitude components can be used in imaging systems or in microscopy systems. The simple physical mechanism for forming the redistribution of the spot pattern is that when the laser light passes through any phase and amplitude component, the laser beam loads any phase and amplitude information on any phase and amplitude component into its beam, including at least one of The above optical interaction phenomena such as interference, diffraction, scattering, and diffusion will occur, and the phase and amplitude fractions on the space coordinates and time coordinates will be redistributed.
綜上所述,可知透過設置發散透鏡2、任意相位與振幅元件3(較佳地配合音圈馬達4以來回擺動)、及聚焦透鏡5於雷射照明裝置1與投射標的6之間,本發明具有任意相位與振幅元件之部份任意雷射照明系統可有效地降低雷射光束LS之雷射光斑雜訊。由於發散透鏡2、任意相位與振幅元件3、音圈馬達4、及聚焦透鏡5皆設置於雷射照明裝置1之外部,因此可知本系統可應用於所有雷射照明裝置1使其雷射光斑雜訊有效降低而不影響既有之雷射照明裝置構造。In summary, it can be seen that by providing the diverging lens 2, the arbitrary phase and amplitude element 3 (preferably oscillating with the voice coil motor 4), and the focus lens 5 between the laser illumination device 1 and the projection target 6, The invention of a part of any laser illumination system with arbitrary phase and amplitude components can effectively reduce the laser spot noise of the laser beam LS. Since the diverging lens 2, the arbitrary phase and amplitude element 3, the voice coil motor 4, and the focus lens 5 are all disposed outside the laser illumination device 1, it is known that the system can be applied to all laser illumination devices 1 to make their laser spotes The noise is effectively reduced without affecting the existing laser illuminator construction.
另外,本發明之雷射照明系統更具有其他多種實施方式。請參考第3圖,第3圖係本發明第二實施例之具有任意相位與振幅元件之雷 射照明系統示意圖。如第3圖所示,搭配發散透鏡2以及聚焦透鏡5後,可增加入射相位與振幅元件之尺寸,以提升光斑抑制能力,可用於點光源與面光源之光斑抑制。Additionally, the laser illumination system of the present invention has many other embodiments. Please refer to FIG. 3, which is a thunder of any phase and amplitude component according to a second embodiment of the present invention. A schematic diagram of the lighting system. As shown in FIG. 3, after the diverging lens 2 and the focusing lens 5 are combined, the incident phase and the amplitude element can be increased in size to enhance the spot suppression capability, and can be used for spot suppression of the point source and the surface source.
事實上,若拿掉發散透鏡2以及聚焦透鏡5,本發明之具有任意相位與振幅元件之部份任意雷射照明系統仍具有光斑抑制之能力。請參考第4圖,第4圖係本發明第三實施例之具有任意相位與振幅元件之部份任意雷射照明系統示意圖。如第4圖所示,只要由雷射照明裝置1發射而出的於雷射光束LS有穿越任意相位與振幅元件3,即使不具有透鏡組,本發明之雷射照明系統形成部分任意雷射光源仍具有基本光斑抑制能力,因此透鏡組僅為本發明之一種較佳實施方式而非限制條件。In fact, if the diverging lens 2 and the focusing lens 5 are removed, the part of any laser illumination system of the present invention having any phase and amplitude elements still has spot suppression capability. Please refer to FIG. 4, which is a schematic diagram of a portion of an arbitrary laser illumination system having arbitrary phase and amplitude elements according to a third embodiment of the present invention. As shown in Fig. 4, as long as the laser beam LS emitted by the laser illumination device 1 crosses any phase and amplitude element 3, the laser illumination system of the present invention forms part of an arbitrary laser even without a lens group. The light source still has a basic spot suppression capability, so the lens group is only a preferred embodiment of the invention and not a limitation.
本發明之雷射照明系統進一步可以包含複數個任意相位與振幅元件,並使得雷射光束LS穿越該些任意相位與振幅元件,以提升光斑之抑制能力。請參考第5圖,第5圖係本發明第四實施例之具有任意相位與振幅元件之雷射照明系統示意圖。如第5圖所示,在雷射照明裝置1與投射標的6之間可以包含多個任意相位與振幅元件3(或稱為外加任意相位與振幅元件於原任意相位與振幅元件與投射標的之間),使得雷射光束LS穿越該些任意相位與振幅元件,以大幅提升光斑之抑制能力。其中,每一個任意相位與振幅元件3可以搭配音圈馬達4來進行擺動提升光斑抑制效果。The laser illumination system of the present invention may further comprise a plurality of arbitrary phase and amplitude elements and such that the laser beam LS traverses the arbitrary phase and amplitude elements to enhance spot suppression. Please refer to FIG. 5, which is a schematic diagram of a laser illumination system with arbitrary phase and amplitude elements according to a fourth embodiment of the present invention. As shown in FIG. 5, a plurality of arbitrary phase and amplitude elements 3 may be included between the laser illumination device 1 and the projection target 6 (or any arbitrary phase and amplitude elements may be added to the original arbitrary phase and amplitude elements and projection targets). In between, the laser beam LS is traversed through the arbitrary phase and amplitude components to greatly enhance the suppression of the spot. Among them, each of the arbitrary phase and amplitude elements 3 can be combined with the voice coil motor 4 to perform the swing lifting spot suppression effect.
本發明之雷射照明系統其中的一種實施方式,具有複數個雷射照明裝置,共同朝向十字分色棱鏡(cross dichroic prism)發射雷射光束。請 參考第6圖,第6圖係本發明第五實施例之具有任意相位與振幅元件之雷射照明系統示意圖。如第6圖所示,複數個雷射照明裝置1將雷射光束發射至十字分色棱鏡8之中,此時十字分色棱鏡將結合多波長雷射光源,當該些多波長雷射光源穿透任意相位與振幅元件3時,任意相位與振幅元件3將抑制多波長任意雷射光源中的光斑,並形成多波長部份任意雷射光源,以實現本發明對於多波長雷射光源之光斑抑制效果。One embodiment of the laser illumination system of the present invention has a plurality of laser illumination devices that collectively emit a laser beam toward a cross dichroic prism. please Referring to Figure 6, Figure 6 is a schematic illustration of a laser illumination system having arbitrary phase and amplitude elements in accordance with a fifth embodiment of the present invention. As shown in Fig. 6, a plurality of laser illumination devices 1 emit a laser beam into the cross dichroic prism 8, and the cross dichroic prism will combine a multi-wavelength laser source as the multi-wavelength laser source. When penetrating any phase and amplitude element 3, any phase and amplitude element 3 will suppress the spot in the multi-wavelength arbitrary laser source and form a multi-wavelength partial laser source to achieve the present invention for multi-wavelength laser sources. Spot suppression effect.
與上述原理相似地,本發明之雷射照明系統可以在任意相位與振幅元件之兩側放置一或多個光轉換元件,以形成不同波長之雷射。請參考第7圖,第7圖係本發明第六實施例之具有任意相位與振幅元件之雷射照明系統示意圖。如第7圖所示,在雷射照明裝置1以及任意相位與振幅元件3之間設有光轉換元件9,使得雷射照明裝置1發射之雷射光束LS會經過光轉換元件9以產生基頻雷射光束LSA以及波長轉換雷射光束LSB,其中轉換後基頻雷射光束LSA以及波長轉換雷射光束LSB之波長相異。基頻雷射光束LSA以及波長轉換雷射光束LSB穿過任意相位與振幅元件3後,兩者之光斑皆將被抑制。請繼續參考第8圖,第8圖係本發明第七實施例之具有任意相位與振幅元件之雷射照明系統示意圖。如第8圖所示,在雷射照明裝置1以及任意相位與振幅元件3之間的光轉換元件9可以為複數個,使得雷射光束LS透過各個光轉換元件9產生出不同的波長雷射,例如透過第一個光轉換元件9進行第一次轉換後得出基頻雷射光束LSA、透過第二個光轉換元件9進行第二次轉換後得出波長轉換雷射光束LSB,再透過第三個光轉換元件9進行第三次轉換後得出波長轉換雷射光束 LSC,將雷射光束LSA~LSC打入任意相位與振幅元件3之後,將可同時抑制該些雷射光束LSA~LSC的光斑。另外,一或多個光轉換元件9以可置於任意相位與振幅元件3與投射標的6之間,使得雷射光束LS先穿過任意相位與振幅元件3再穿透該些光轉換元件9,此時所產生之光轉換之多波長雷射光束仍為具有光斑抑制能力)。Similar to the above principles, the laser illumination system of the present invention can place one or more light conversion elements on either side of any phase and amplitude elements to form lasers of different wavelengths. Please refer to FIG. 7. FIG. 7 is a schematic diagram of a laser illumination system with arbitrary phase and amplitude elements according to a sixth embodiment of the present invention. As shown in Fig. 7, a light conversion element 9 is provided between the laser illumination device 1 and any phase and amplitude elements 3 such that the laser beam LS emitted by the laser illumination device 1 passes through the light conversion element 9 to generate a basis. The frequency laser beam LSA and the wavelength-converted laser beam LSB, wherein the wavelengths of the converted fundamental-frequency laser beam LSA and the wavelength-converted laser beam LSB are different. After the fundamental laser beam LSA and the wavelength-converted laser beam LSB pass through any phase and amplitude element 3, both spots will be suppressed. Please refer to FIG. 8 again. FIG. 8 is a schematic diagram of a laser illumination system with arbitrary phase and amplitude components according to a seventh embodiment of the present invention. As shown in Fig. 8, the light conversion element 9 between the laser illumination device 1 and any phase and amplitude elements 3 may be plural such that the laser beam LS transmits different wavelengths of laser light through the respective light conversion elements 9. For example, after the first conversion by the first light conversion element 9, the fundamental frequency laser beam LSA is obtained, and after the second conversion by the second light conversion element 9, the wavelength conversion laser beam LSB is obtained, and then transmitted. The third light conversion element 9 performs a third conversion to obtain a wavelength converted laser beam The LSC, after driving the laser beam LSA~LSC into any phase and amplitude component 3, can simultaneously suppress the spot of the laser beams LSA~LSC. In addition, one or more light conversion elements 9 can be placed between any phase and amplitude element 3 and the projection target 6 such that the laser beam LS passes through any phase and amplitude element 3 and then penetrates the light conversion elements 9 At this time, the multi-wavelength laser beam converted by the light is still capable of spot suppression.
請參考第9圖,第9圖係本發明第七實施例之具有任意相位與振幅元件之雷射照明系統示意圖。如第9圖所示,本發明之雷射照明系統可進一步包含複數個光轉換模組10,其中每一個光轉換模組10包含一任意相位與振幅元件3以及一光轉換元件9,該些光轉換模組10介於雷射照明裝置1與投射標的6之間並且被雷射光束LS所穿越。經過第一個光轉換模組10產生第一與第二部分任意相位雷射,遇到第二個光轉換模組10產生第三、第四與第五部分任意雷射。換言之,遇到第N個光轉換模組10可產生2+N(N+1)/2部分任意雷射,以此類推。較佳地,每一個光轉換模組10更包含一音圈馬達4,使得音圈馬達4來回擺動任意相位與振幅元件3,以增加抑制光斑之效果。另外,上述所有系統之實施例中,皆可較佳地反射部分之任意雷射光束從任意相位與振幅元件3回饋至雷射照明裝置1,以擾亂雷射光源在時間座標軸上與空間座標軸上之相位與振幅分佈,藉此以使得同調性佳之雷射光源形成部分任意雷射輸出,此雷射光束因此產生光斑抑制之效果。Please refer to FIG. 9. FIG. 9 is a schematic diagram of a laser illumination system with arbitrary phase and amplitude components according to a seventh embodiment of the present invention. As shown in FIG. 9, the laser illumination system of the present invention may further include a plurality of optical conversion modules 10, wherein each of the optical conversion modules 10 includes an arbitrary phase and amplitude component 3 and a light conversion component 9, The light conversion module 10 is interposed between the laser illumination device 1 and the projection target 6 and is traversed by the laser beam LS. The first and second portions of the arbitrary phase laser are generated by the first optical conversion module 10, and the second optical conversion module 10 is encountered to generate the third, fourth, and fifth portions of the arbitrary laser. In other words, encountering the Nth optical conversion module 10 can generate a 2+N(N+1)/2 partial arbitrary laser, and so on. Preferably, each of the light conversion modules 10 further includes a voice coil motor 4 such that the voice coil motor 4 swings back and forth between the arbitrary phase and amplitude elements 3 to increase the effect of suppressing the light spot. In addition, in all embodiments of the above system, any laser beam of preferably reflected portion is fed back from the arbitrary phase and amplitude component 3 to the laser illumination device 1 to disturb the laser source on the time coordinate axis and the space coordinate axis. The phase and amplitude distribution are such that a portion of the laser light source with good coherence is formed to form a portion of the arbitrary laser output, which thus produces a spot suppression effect.
請參考第10圖,第10圖係本發明第八實施例之具有任意相位與振幅元件之雷射照明裝置之內部結構示意圖。第10圖所示之雷射照明 裝置為本發明之另一種實施樣態,其有別於上述之腔外光斑抑制部分任意雷射照明系統,而是一種將任意相位與振幅元件3直接內嵌於雷射照明裝置之中的腔內光斑抑制部分任意相位雷射照明裝置。與上述之腔外雷射系統之原理相似,腔內雷射之增益光源經過在雷射共振腔中經過至少一至以上的放大後,穿越至少一次任意相位與振幅元件後、離開雷射共振腔。在腔內,產生部分任意雷射照明光源因為含有共振腔之共振現象,故產生部分任意雷射之物理機制與腔外有別。其部分任意雷射在空間軸上與時間軸上之相位與振幅分佈也因為共振發生有所差異。如第10圖所示,光斑抑制雷射照明裝置7中包含有激發體71、增益介質72、任意相位與振幅元件73以及高反射鏡75。其中,激發體71將能量供給低能級的電子激發使其成為高能級電子後,將增益前雷射光束LS1朝向增益介質72發射,使增益前雷射光束LS1穿越增益介質72形成增益後雷射光束LS2。其中,增益介質72具有一高反射性面721以及一抗反射性面722,高反射性面721具有良好的光反射特性,而抗反射性面722則不具有光反射特性。激發體71將增益前雷射光束LS1打入高反射性面721,使得增益後雷射光束LS2多次反射經過增益介質72以得到足夠的放大後,由抗反射性面722放射出增益後雷射光束LS2。另外,激發體71亦可使用其他半導體雷射或電子電洞注入來替代。71可為亦可為電激發元件、光激發元件或化學能激發元件。Please refer to FIG. 10, which is a schematic diagram showing the internal structure of a laser illumination device having an arbitrary phase and amplitude component according to an eighth embodiment of the present invention. Laser illumination shown in Figure 10 The device is another embodiment of the present invention, which is different from the above-mentioned cavity-spot suppression portion arbitrary laser illumination system, but a cavity in which an arbitrary phase and amplitude component 3 is directly embedded in the laser illumination device. The inner spot suppresses part of the arbitrary phase laser illumination device. Similar to the principle of the above-described out-of-cavity laser system, the gain source of the intra-cavity laser passes through at least one or more amplifications in the laser cavity, and after leaving at least one arbitrary phase and amplitude element, leaves the laser cavity. In the cavity, a part of the arbitrary laser illumination source is generated because it contains the resonance phenomenon of the resonance cavity, so the physical mechanism of generating part of the arbitrary laser is different from that outside the cavity. The phase and amplitude distribution of some of the arbitrary lasers on the spatial axis and the time axis also differs due to resonance. As shown in Fig. 10, the spot suppression laser illumination device 7 includes an excitation body 71, a gain medium 72, an arbitrary phase and amplitude element 73, and a high reflection mirror 75. Wherein, after the excitation body 71 supplies energy to the low-level electrons to become high-level electrons, the pre-gain laser beam LS1 is emitted toward the gain medium 72, so that the pre-gain laser beam LS1 passes through the gain medium 72 to form a gain laser. Beam LS2. The gain medium 72 has a highly reflective surface 721 and an anti-reflective surface 722. The highly reflective surface 721 has good light reflection characteristics, and the anti-reflective surface 722 has no light reflection characteristics. The excitation body 71 drives the pre-gain laser beam LS1 into the highly reflective surface 721, so that after the gain, the laser beam LS2 is reflected multiple times through the gain medium 72 to obtain sufficient amplification, and the gain is reflected by the anti-reflective surface 722. Beam LS2. Alternatively, the exciter 71 can be replaced with other semiconductor laser or electron hole injection. 71 can also be an electrical excitation element, a photoexcited element, or a chemically active element.
增益後雷射光束LS2自抗反射性面722放射而出後,穿越任意相位與振幅元件73以及高反射鏡75,最後透過發射口76將光斑抑制後的增益後雷射光束LS2向光斑抑制雷射照明裝置7外部發射。其中,任意 相位與振幅元件73介於增益介質72與高反射鏡75之間,被增益介質72放射出的增益後雷射光束LS2所穿越,前述任意相位與振幅元件73較佳地為相位型任意相位與振幅元件或散射子型任意相位與振幅元件,任意相位與振幅元件73可以有近±0度至±5度之小角度(相較於雷射光束LS的垂直方向),甚至可延伸至近±90度,其中各角度擁有不同的抑制光斑特性。增益前雷射光束LS1自雷射二極體71發射而出後,依序經過增益介質72、任意相位與振幅元件73以及高反射鏡75後,最後透過發射口76朝向光斑抑制雷射照明裝置7之外部發射。如此一來,透過前述之任意相位與振幅元件73,將可有效降低雷射光束中的雷射光斑雜訊,使得本發明之光斑抑制雷射照明裝置相較於習知雷射照明裝置更能有效抑制雷射光斑雜訊。After the gain, the laser beam LS2 radiates from the anti-reflective surface 722, passes through the arbitrary phase and amplitude element 73 and the high mirror 75, and finally passes the gain-reduced post-reduction laser beam LS2 to the spot to suppress the thunder through the emission port 76. The illumination device 7 is externally emitted. Among them, any The phase and amplitude element 73 is interposed between the gain medium 72 and the high mirror 75, and is passed by the gain laser beam LS2 emitted by the gain medium 72. The arbitrary phase and amplitude elements 73 are preferably phase-type arbitrary phases and Any phase and amplitude element of the amplitude element or the scattering sub-type, the arbitrary phase and amplitude element 73 can have a small angle of approximately ±0 degrees to ±5 degrees (compared to the vertical direction of the laser beam LS), and can even extend to nearly ±90 Degree, in which each angle has different suppression spot characteristics. After the pre-gain laser beam LS1 is emitted from the laser diode 71, it passes through the gain medium 72, the arbitrary phase and amplitude element 73, and the high mirror 75, and finally passes through the emission port 76 toward the spot to suppress the laser illumination device. 7 external launch. In this way, through any of the foregoing phase and amplitude elements 73, the laser spot noise in the laser beam can be effectively reduced, so that the spot suppression laser illumination device of the present invention is more capable than the conventional laser illumination device. Effectively suppresses laser spot noise.
為使本發明之效果更加明顯,較佳地可使用音圈馬達74來對任意相位與振幅元件73來回擺動,擺動之方向近正交於增益後雷射光束LS2之方向。另外必須說明的是,本領域具有通常知識者應可當然明瞭,音圈馬達74用以作為一擺動元件,然而於實際實施本發明時可以使用其他擺動元件來達成與音圈馬達74相同或相似之擺動效果,而不必要拘限於使用音圈馬達74,此處之音圈馬達74僅為實施態樣之舉例而非限制,在此先行敘明。另外關於音圈馬達74對於光斑抑制效果之成效,請參考圖式第2圖及上述相關說明,在此則不再贅述。另外,較佳地任意相位與振幅元件73可反射部分任意雷射光束回饋至增益介質72,以擾亂部分任意雷射之時間上與空間上之相位與振幅分佈,藉此提升部分任意雷射光斑抑制之能力。In order to make the effect of the present invention more apparent, it is preferable to use the voice coil motor 74 to swing the arbitrary phase and amplitude element 73 back and forth, and the direction of the swing is nearly orthogonal to the direction of the post-gain laser beam LS2. In addition, it should be understood that those skilled in the art should of course understand that the voice coil motor 74 is used as a swinging element. However, other swinging elements may be used to achieve the same or similar to the voice coil motor 74 when actually implementing the present invention. The swinging effect is not necessarily limited to the use of the voice coil motor 74, and the voice coil motor 74 herein is merely an example of an embodiment and not a limitation, and is described herein. In addition, regarding the effect of the voice coil motor 74 on the spot suppression effect, please refer to FIG. 2 and the above related description, and details are not described herein again. In addition, preferably any phase and amplitude element 73 can reflect a portion of the arbitrary laser beam to the gain medium 72 to disturb the temporal and spatial phase and amplitude distribution of a portion of the arbitrary laser, thereby enhancing part of the arbitrary laser spot. The ability to suppress.
請參考第11圖,第11圖係本發明第九實施例之具有任意相 位與振幅元件之部份任意雷射照明裝置之內部結構示意圖。如第11圖所示,在增益介質72與高反射鏡75之間可以包含多個任意相位與振幅元件73(或稱為外加任意相位與振幅元件於原任意相位與振幅元件與高反射鏡之間),使得雷射光束LS穿越該些任意相位與振幅元件,以大幅提升光斑之抑制能力,其原理類似於第5圖及上述第四實施例所述內容。其中,每一個任意相位與振幅元件73可以搭配音圈馬達74來進行擺動提升光斑抑制效果。Please refer to FIG. 11, which is a ninth embodiment of the present invention having any phase. Schematic diagram of the internal structure of a portion of an arbitrary laser illumination device. As shown in FIG. 11, a plurality of arbitrary phase and amplitude elements 73 may be included between the gain medium 72 and the high mirror 75 (or any arbitrary phase and amplitude elements may be added to the original arbitrary phase and amplitude elements and high mirrors). The laser beam LS is caused to traverse the arbitrary phase and amplitude elements to greatly enhance the suppression of the spot, and the principle is similar to that described in FIG. 5 and the fourth embodiment described above. Among them, each of the arbitrary phase and amplitude elements 73 can be combined with the voice coil motor 74 to perform the swing lifting spot suppression effect.
請參考第12圖,第12圖係本發明第十實施例之具有任意相位與振幅元件之雷射照明裝置之內部結構示意圖。如第12圖所示,在增益介質72與任意相位與振幅元件73之間設有一聚焦透鏡77,使得增益後雷射光束LS2穿透聚焦透鏡77,以提升入射相位元件光束尺寸,以提升光斑抑制效果,並可獲得聚焦之點照明光源。Please refer to FIG. 12, which is a schematic diagram showing the internal structure of a laser illumination device having arbitrary phase and amplitude elements according to a tenth embodiment of the present invention. As shown in Fig. 12, a focusing lens 77 is disposed between the gain medium 72 and the arbitrary phase and amplitude element 73, so that the post-gain laser beam LS2 penetrates the focusing lens 77 to increase the beam size of the incident phase element to enhance the spot. Suppress the effect and obtain a point source of illumination.
值得注意的是,本發明之一大特色為,即使將任意相位與振幅元件內嵌於雷射照明裝置之中,仍能維持傳統雷射光之特性,如窄線寬特性、高斯傳播特性、優良聚焦能力、小發散角、遠距離傳播特性,甚至加入光轉換元件於增益介質72與任意相位與振幅元件73之間,還是能良好地維持雷射光之特性,其中光轉換元件較佳地為非線性元件或線性元件。請參考第13圖,第13圖係本發明第十一實施例之加入光轉換元件裝置後的雷射照明裝置之內部結構示意圖。如第13圖所示,加入光轉換元件9於增益介質72與任意相位與振幅元件73之間,光轉換元件9被增益介質72放射出的增益後雷射光束LS2所穿越,使得增益後雷射光束LS2成為經過光 轉換元件裝置後的雷射光束LS3。較佳地,前述光轉換元件9可為二倍頻元件、和頻元件、差頻元件、多倍頻元件或其他轉換元件,使得經過光轉換元件裝置後的雷射光束LS3之頻率/波長被改變。如此一來,本發明之光斑抑制效果即可應用於多種不同場合,例如應用於紅外光雷射或可見光雷射之場合,使得紅外光、可見光或其他特性之雷射皆能具有降低光斑之特性。其中,前述之光轉換元件較佳地為KTP晶體(KTiOPO4)、摻氧化鎂鈮酸鋰晶體(MgO:LiNb3)、摻氧化鎂鉭酸鋰(MgO:LiTaO3)晶體、BBO晶體或其他高效率光轉換晶體。It is worth noting that one of the features of the present invention is that even if any phase and amplitude components are embedded in the laser illumination device, the characteristics of the conventional laser light can be maintained, such as narrow line width characteristics, Gaussian propagation characteristics, and excellent Focusing ability, small divergence angle, long-distance propagation characteristics, even adding a light conversion element between the gain medium 72 and any phase and amplitude element 73, the characteristics of the laser light can be well maintained, wherein the light conversion element is preferably non- Linear or linear component. Please refer to FIG. 13, which is a schematic diagram showing the internal structure of a laser illumination device after adding a light conversion element device according to an eleventh embodiment of the present invention. As shown in Fig. 13, a light conversion element 9 is added between the gain medium 72 and an arbitrary phase and amplitude element 73, and the light conversion element 9 is traversed by the gain laser beam LS2 emitted from the gain medium 72, so that the gain is followed by a thunder. The beam LS2 becomes passing light The laser beam LS3 after the conversion of the component device. Preferably, the optical conversion component 9 can be a double frequency component, a sum frequency component, a difference frequency component, a multiple frequency component or another conversion component, so that the frequency/wavelength of the laser beam LS3 after passing through the optical conversion component device is change. In this way, the spot suppression effect of the present invention can be applied to a variety of different occasions, for example, in the case of infrared light laser or visible light laser, so that the infrared light, visible light or other characteristic laser can have the characteristics of reducing the spot. . Wherein, the aforementioned light conversion element is preferably KTP crystal (KTiOPO4), magnesium oxide lithium niobate crystal (MgO: LiNb3), magnesium oxide lithium niobate (MgO: LiTaO3) crystal, BBO crystal or other high efficiency light. Convert the crystal.
請參考第14圖,第14圖係本發明第十二實施例之具有任意相位與振幅元件之部分任意雷射照明裝置之內部結構示意圖。如第14圖所示,增益介質72與任意相位與振幅元件73之間的光轉換元件9可以為複數個,透過該些光轉換元件9將增益後雷射光束LS2轉換成基頻雷射光束LSA以及波長轉換雷射光束LSB、LSC,使得任意相位與振幅元件73可以針對基頻雷射光束LSA以及波長轉換雷射光束LSB、LSC進行光斑抑制。Please refer to FIG. 14, which is a schematic diagram showing the internal structure of a portion of an arbitrary laser illumination device having an arbitrary phase and amplitude element according to a twelfth embodiment of the present invention. As shown in FIG. 14, the light conversion element 9 between the gain medium 72 and the arbitrary phase and amplitude element 73 may be plural, and the gain rear laser beam LS2 is converted into the fundamental frequency laser beam through the light conversion elements 9. The LSA and the wavelength-converted laser beams LSB, LSC enable arbitrary phase and amplitude elements 73 to be spot-suppressed for the fundamental-frequency laser beam LSA and the wavelength-converted laser beams LSB, LSC.
請參考第15圖,第15圖係本發明第十三實施例之具有任意相位與振幅元件之部份任意雷射照明裝置之內部結構示意圖。如第15圖所示,光轉換元件9與任意相位與振幅元件73之間設有一聚焦透鏡77,使得增益後雷射光束LS2穿透聚焦透鏡77,以提升入射相位元件光束尺寸以提升光斑抑制效果,並可獲得聚焦之點照明光源。Please refer to FIG. 15, which is a schematic diagram showing the internal structure of a portion of an arbitrary laser illumination device having an arbitrary phase and amplitude element according to a thirteenth embodiment of the present invention. As shown in Fig. 15, a focusing lens 77 is disposed between the light converting element 9 and the arbitrary phase and amplitude element 73, so that the post-gain laser beam LS2 penetrates the focusing lens 77 to enhance the beam size of the incident phase element to enhance spot suppression. The effect, and the point of illumination of the point of illumination can be obtained.
另外,上述之各實施例中,亦可設置光學擴散膜元件(diffuser)、光學繞射元件(diffractive optical elements,DOE)以及微透鏡 (microlens)於共振腔內部,即增益介質72與任意相位與振幅元件73之間,以同時對基頻與光轉換光源達成光斑抑制增益效果。In addition, in the above embodiments, an optical diffuser film element, a diffuser optical element (DOE), and a microlens may be disposed. (microlens) is inside the resonant cavity, that is, between the gain medium 72 and any phase and amplitude element 73, to achieve a spot suppression gain effect on the fundamental frequency and the light conversion source at the same time.
另外,亦可應用上述之具有任意相位與振幅元件之部份任意雷射照明裝置於雷射照明系統中。例如,將任意相位與振幅元件置於實施例八至十三之雷射照明裝置與該投射標的之間,使該任意相位與振幅元件被該雷射光束所穿越。如此一來,部分任意雷射其相位與振幅在時間軸上與空間軸上擁有一分佈,並擁有光斑抑制能力,經由線性與非線性之光波長轉換,可獲得一新穎之光轉換之部分任意雷射,此部分任意雷射擁有光斑之抑制能力。再另外一個例子中,具有任意相位與振幅元件之部份任意雷射照明裝置的雷射照明系統更包含一或多個光轉換元件。複數個部分任意雷射經由一光轉換元件或多個光轉換元件,以形成新穎之光轉換波長之部分任意雷射光源,此部分任意雷射擁有光斑之抑制能力,此部分任意雷射之光斑抑制能力因此而提升。Alternatively, any of the above-described arbitrary laser illumination devices having any phase and amplitude components can be applied to the laser illumination system. For example, any phase and amplitude elements are placed between the laser illumination devices of embodiments 8 through 13 and the projection target such that the arbitrary phase and amplitude elements are traversed by the laser beam. In this way, part of the arbitrary laser has a phase and amplitude distribution on the time axis and the spatial axis, and has spot suppression capability. Through linear and nonlinear wavelength conversion, a novel part of the light conversion can be obtained. Laser, this part of the arbitrary laser has the ability to suppress the spot. In still another example, a laser illumination system having a portion of any laser illumination device of any phase and amplitude component further includes one or more light conversion elements. A plurality of partial arbitrary lasers are passed through a light conversion element or a plurality of light conversion elements to form a part of an arbitrary laser light source of a novel light conversion wavelength, and any part of the laser has the suppression capability of the spot, and the spot of any part of the laser The ability to suppress is thus enhanced.
請參考第16圖,第16圖係本發明具有任意相位與振幅元件之部分任意雷射照明裝置之雷射特性圖,其中,數據線D3代表未加入任意相位與振幅元件之一般雷射照明裝置、數據線D4代表具有靜態(不擺動)的任意相位與振幅元件之雷射照明裝置、數據線D5代表具有音圈馬達以130Hz之頻率來回擺動任意相位與振幅元件之雷射照明裝置,數據線D3之Y軸請參考右側之一般雷射輸出座標值,數據線D4、D5之Y軸請參考左側之部分任意相位雷射輸出座標值。透過第16圖可知,本發明之具有任意相位與振幅元件之部分任意雷射照明裝置,無論具備音圈馬達與否,其發 射而出的雷射光束仍可維持良好的雷射光特性。換句話說,由於本發明之雷射入射任意相位與振幅元件後雷射光束可維持小角度之發散角,因此易於控制雷射光束外型,而不會因為發散角過大導致雷射照明裝置無法維持雷射光特性。Please refer to FIG. 16, which is a laser characteristic diagram of a part of any laser illumination device having arbitrary phase and amplitude components, wherein the data line D3 represents a general laser illumination device without any phase and amplitude components. , data line D4 represents a laser illumination device with static (non-swing) arbitrary phase and amplitude components, and data line D5 represents a laser illumination device with a voice coil motor swinging back and forth with arbitrary phase and amplitude components at a frequency of 130 Hz, data line For the Y axis of D3, please refer to the general laser output coordinate value on the right side. For the Y axis of data line D4 and D5, please refer to the arbitrary phase laser output coordinate value on the left side. As can be seen from Fig. 16, the arbitrary laser illumination device of the present invention having any phase and amplitude components, whether or not the voice coil motor is provided, The laser beam that is emitted can still maintain good laser light characteristics. In other words, since the laser beam of the present invention can maintain a divergence angle of a small angle after the incident of the arbitrary phase and amplitude components, it is easy to control the appearance of the laser beam without causing the laser illumination device to fail due to the excessive divergence angle. Maintain laser light characteristics.
在一光學元件上設計一個可讓雷射光源入射後相位與振幅會重新改變其在空間座標上與時間座標上重新分佈的元件。如任意相位與振幅擴散膜元件,雷射光束之結構圖紋可為週期性分佈的結構圖紋或部分週期性分佈圖紋、或任意分佈的圖紋及其組合。在任意相位與振幅元件上設計出結構圖紋大小可為奈米級至微米之結構圖紋、可為更小的圖紋結構或更大之圖紋結構,如第17圖之雷射照射任意相位與振幅元件後之遠場分佈圖,穿越圖紋結構約10um至約150um之任意相位與振幅元件,雷射發散角約為小於±0.5度,並在空間座標軸上產生強度(振幅)之重新分佈。當雷射光束經由此任意相位與振幅元件產生基本的光學現象至少如干涉、折射、繞射、散射或漫射之現象,並在穿透後此元件,重新在空間座標軸與時間座標上產生新的相位與振幅分佈,再依照應用所需之部分任意雷射光源之特性需求之情形調整圖紋結構之尺寸大小,以滿足部分雷射光源發散角度與光斑抑制特性之需求。Designing an element on an optical component that allows the phase and amplitude of the laser source to change its redistribution over the space coordinates and time coordinates. For any phase and amplitude diffusing film element, the structural pattern of the laser beam can be a periodically distributed structural pattern or a partially periodic distribution pattern, or an arbitrarily distributed pattern and combinations thereof. Designing the structure pattern on any phase and amplitude component can be a nanometer to micrometer structure pattern, a smaller pattern structure or a larger pattern structure, such as laser irradiation in FIG. The far-field distribution diagram of the phase and amplitude components, the arbitrary phase and amplitude components passing through the pattern structure of about 10um to about 150um, the laser divergence angle is less than ±0.5 degrees, and the intensity (amplitude) is re-created on the space coordinate axis. distributed. When the laser beam passes through the arbitrary phase and amplitude elements to generate basic optical phenomena such as interference, refraction, diffraction, scattering or diffusion, and after the penetration, the element re-creates a new coordinate on the space coordinate axis and the time coordinate. The phase and amplitude distribution, and then adjust the size of the pattern structure according to the characteristics of some of the laser light sources required by the application to meet the requirements of some laser light source divergence angle and spot suppression characteristics.
另外,本發明之任意雷射照明系統與裝置之光源可具有之特性:a.)其可具有部分時間同調性,其可具有部分時間非同調之特性。b.)其可有部分空間同調性,可具有部分空間非同調之特性。c.)投射至光滑與粗造表面具有時間平均與空間平均之光斑抑制效果。d.)其空間平均能量分佈或 強度分佈可具有高度均勻之特性。e.)其空間平均能量分佈或強度分佈可具有高度非均勻之特性。f.)其空間瞬時能量分佈或強度分佈可具有高度均勻之特性。g.)其空間瞬時能量分佈或強度分佈可具有高度非均勻之特性。h.)其於空間傳播可具有平均高斯傳播之特性。i.)其於空間傳播可具有平均非高斯傳播之特性。j.)光譜線寬可具有窄線寬之特性、可具有寬線寬之特性。k.)其投射至標的可具有小角度特性,可具有高度準直之特性。l.)其投射至標的可具有大角度特性,可具有大面積之特性。m.)其用於聚焦具有時間平均小尺寸之特性。n.)其用於發散具有時間平均大尺寸之特性。o.)此部分任意雷射光源可具有連續波之特性。p.)此部分任意雷射光源可具有準連續波之特性。q.)此部分任意雷射光源可具有脈衝波之特性。Additionally, the light source of any of the laser illumination systems and devices of the present invention may have the following characteristics: a.) It may have partial temporal homology, which may have partial time non-coherence characteristics. b.) It may have some spatial coherence and may have the characteristics of partial spatial non-coherence. c.) Projection to smooth and rough surfaces with time-averaged and spatially averaged spot suppression. d.) its spatial average energy distribution or The intensity distribution can have a highly uniform nature. e.) Its spatial average energy distribution or intensity distribution may have a highly non-uniform nature. f.) Its spatial instantaneous energy distribution or intensity distribution may have a highly uniform nature. g.) Its spatial instantaneous energy distribution or intensity distribution may have a highly non-uniform nature. h.) Its spatial propagation can have the characteristics of mean Gaussian propagation. i.) Its spatial propagation may have the characteristics of average non-Gaussian propagation. j.) The spectral line width can have the characteristics of a narrow line width and can have a wide line width. k.) Its projection to the target may have a small angle characteristic and may have a high degree of collimation. l.) Its projection to the target can have large angle characteristics and can have a large area. m.) It is used to focus on characteristics with a time average small size. n.) It is used to diverge the characteristics of time-averaged large size. o.) Any part of this laser source can have continuous wave characteristics. p.) Any part of this laser source can have the characteristics of quasi-continuous wave. q.) Any part of this laser source can have the characteristics of pulse wave.
綜上所述,本發明將任意相位與振幅元件直接置於雷射照明裝置之中,以達成射出之雷射直接具有抑制雷射光斑之效果,而無須於雷射照明裝置之外再設置光斑抑制裝置。甚至,利用設置非線性元件或線性元件裝置於近紅外光雷射腔內以產生可見光雷射輸出,並透過擺動任意相位與振幅元件可同時降低基頻光與波長轉換光之雷射光斑雜訊。另外,本發明可延伸用於更高諧波轉換之雷射光斑抑制。若本發明之雷射為大角度聚焦時,雷射之光點可聚焦成小尺寸,其尺寸可為波長等級、二分之一波長等級或更小。In summary, the present invention directly places any phase and amplitude components in the laser illumination device to achieve the effect of suppressing the laser spot directly by the emitted laser without setting the spot outside the laser illumination device. Suppression device. Even, by using a non-linear element or a linear element device in a near-infrared light laser cavity to generate a visible light laser output, and by oscillating any phase and amplitude element, the laser beam noise of the fundamental frequency and the wavelength-converted light can be simultaneously reduced. . In addition, the present invention can be extended for laser spot suppression of higher harmonic conversion. If the laser of the present invention is focused at a large angle, the spot of the laser can be focused to a small size, which can be of a wavelength level, a half wavelength class or less.
總結以上,本發明之具有任意相位與振幅元件之雷射照明系統及裝置不但可有效地降低雷射光斑雜訊、同時維持雷射光束特性之外,由於本發明之出射可為小角度發散與大角度發散,故雷射光束傳播距離可 為數公尺至數公里等級或更大,適於用在液晶矽基(LCoS)、數位光處理器(DLP)或小光點之微機電系統(MEMS)、或其他掃描型系統中。In summary, the laser illumination system and apparatus of the present invention having arbitrary phase and amplitude components can not only effectively reduce the laser spot noise but also maintain the characteristics of the laser beam, and the emission of the present invention can be small angle divergence and Large angle divergence, so the laser beam propagation distance can be It is a few meters to several kilometers or more and is suitable for use in liquid crystal germanium (LCoS), digital light processor (DLP) or small spot microelectromechanical systems (MEMS), or other scanning systems.
以上所述僅為舉例性,而非為限制性者。任何未脫離本發明之精神與範疇,而對其進行之等效修改或變更,均應包含於後附之申請專利範圍中。The above is intended to be illustrative only and not limiting. Any equivalent modifications or alterations to the spirit and scope of the invention are intended to be included in the scope of the appended claims.
7‧‧‧光斑抑制雷射照明裝置7‧‧‧Spot suppression laser lighting device
71‧‧‧激發體71‧‧‧Excited body
72‧‧‧增益介質72‧‧‧ Gain medium
721‧‧‧高反射性面721‧‧‧Highly reflective surface
722‧‧‧抗反射性面722‧‧‧Anti-reflective surface
73‧‧‧任意相位及振幅元件73‧‧‧Arbitrary phase and amplitude components
74‧‧‧音圈馬達74‧‧‧ voice coil motor
75‧‧‧高反射鏡75‧‧‧High Mirror
76‧‧‧發射口76‧‧‧ Launch port
LS1‧‧‧增益前雷射光束LS1‧‧‧Gas Front Laser Beam
LS2‧‧‧增益後雷射光束Laser beam after LS2‧‧‧ gain
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