TWI331958B - Method and composition providing desirable characteristics between a mold and a polymerizable composition - Google Patents

Description

Nine, invention description:

C invention belongs to _^ technology leading city; J The field of the invention generally relates to the manufacture of nanostructures of structures. More particularly, the present invention relates to a method of providing desirable wetting and release properties between a mold and a polymerizable composition suitable for use in an imprint lithography process. Nanofabrication involves the fabrication of very small structures, for example, having a topography of 1 nanometer or more. The potential method for nanometer manufacturing is called imprint lithography. The exemplified embossing lithography method is described in detail in several publications, such as U.S. Patent Application Serial No. 2004-0065976 (in the name of U.S. Patent Application Serial No. 10/264,960, the title of the invention). A method and a mold for configuring a topography to reproduce a topography having a minimum dimensional change"; US Patent Publication No. 2004-0065252 (Application No. 10/264,926, the name of the invention, a type A method for forming a layer on a substrate to promote manufacturing metrics; and US Patent Application No. 2004-0046271 (Application No. 10/235,314, the name of the invention, on a substrate) The method and the mold are configured to replicate the topography with the smallest dimensional change, '; all are assigned to the assignee of the present invention. Referring to Figure 1, the basic technical idea behind the imprinting lithography is based on the substrate. Forming an embossed pattern on the etched cover or the like, so as to form a pattern corresponding to the embossed pattern on the substrate. The system 1 for forming the embossed pattern includes the platform 11, the substrate 1 2 is supported thereon. The template μ has a mold 16 having a surface 18 for patterning thereon. The patterned surface 18 can be substantially smooth and/or planar, or can be patterned therein. One or more recesses are formed. The template 14 is coupled to the stamping head 20 to facilitate movement of the template 14. The fluid dispensing system 22 is coupled to be selectively placed in fluid communication with the substrate 12 to deposit polymerizable thereon. Material 24. Source 26 of energy 28 is coupled to direct energy 28 along path 30. Imprint head 20 and platform 11 are constructed such that mold 16 and substrate 12 are individually stacked and placed in a path Within either of the embossing head 20, the platform 11, or both, the distance between the mold 16 and the substrate 12 is varied to define a desired volume therebetween that can be filled with the polymerizable material 24. Typically 'polymerizable The material 24 is placed on the substrate 12 in a desired volume defined between the mold crucible 6 and the substrate 12. However, the polymerizable material 24 can be filled with the volume after the desired volume has been obtained. The desired volume is the polymerizable material 24 After filling, source 26 produces energy 28, which causes The composite material 24 is cured and/or crosslinked to form a polymeric material that conforms to the shape of the substrate surface 24 and the mold surface 18. The control of the method is adjusted by the processor 32 to the system 11 and the stamping head 20, The fluid distribution system 22 and the source 26 are in data communication and are readable by computer readable steps stored in the memory 34. - The correct patterning of the polymerizable material - important characteristics are reduced if not prevented) and aggregated The material material is adhered to the mold and at the same time ensures the adhesion to the substrate. This is called the better release and adhesion property. In this way, the pattern recorded in the poly material is not deformed during the separation of the mold. It is known that it is intended to improve the release properties. It is used on the surface of the mold to release the mold. This nucleation layer is typically hydrophobic and/or has low surface energy. Release layer and mold set. A method of providing a composition characterized by characteristics of a polymer material is provided by a prefecture. The method comprises coating the surface of the mold with a solution of the volume: active agent. The surfactant in the solution contains a hydrophobic component consisting essentially of a plurality of fluorine-containing molecules. The plurality of t-containing molecules are distributed over the entire volume side of the polymerizable composition disposed on the substrate to provide a desired contact angle. This contact angle is at 50. Or less. The composition is characterized by improved adhesion and occupation of the substrate and mold ties having the embossed material interposed therebetween. The composition promotes the embossing material to be divided into a second portion of the surfactant-rich component and a second portion of the surfactant-free component between the second portion of the surfactant component and the substrate. Once cured, the second portion of the surfactant-rich component weakens the adhesion between the mold and the imprinted material. A method of utilizing the properties of this composition is also disclosed. These and other embodiments are described herein. BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a representative diagram of a lithography system according to the prior art; FIG. 2 is a simplified elevational view of a template according to the present invention and an imprint material placed on a substrate; 2 is a simplified elevational view of the template and the substrate, and the embossed material is formed by patterning and curing; FIG. 4 is a detailed view of the drips of the embossing material shown in FIG. Shows that the droplet is divided into a surfactant-rich region and a surfactant-depleting region; Figure 5 is a detailed view of the layer of the imprinted material deposited by spin coating, showing that the layer is divided into surfactant-rich regions and consumption a region of spent surfactant, Figure 6 is a cross-sectional view of the imprinted material in contact with the template as shown in Figure 4 or 5, demonstrating that a weak boundary sheet is formed between the cured imprint material and the template; and Figure 7 is a cross-sectional view of the template according to the invention shown in Figure 6 with a layer of surfactant solution disposed thereon. C Square Package 3 DETAILED DESCRIPTION OF THE INVENTION Referring to Figures 1 and 2, a mold 36 in accordance with the present invention can be used in a system 1 and can define a surface (not shown) having a substantially smooth or planar profile. In addition, the tool 36 may include an original pattern defined by the plurality of topography defined by the plurality of spaced recesses 38 and the portion 40, which are intended to be transferred to the substrate 2 and may include a bare wafer or have One or more wafers placed on top of it. Therefore, the "distance d" between the mold 36 and the substrate is reduced. In a two-part manner, the topography on the mold 36 can be embossed to a suitable area of the substrate 42, such as an imprint material placed on a portion of the surface 44 that presents the substantially planar rim. It is to be understood that the imprint material can be deposited using any known technique, such as spin coating, dip coating, and the like. However, in this example, the embossing material is deposited on the base ribs at a plurality of intervals. The M-plated layer 3 tin is formed from a composition which is selectively polymerized and cross-linked, and the original pattern is recorded therein to define a recording pattern. In particular, the portion of the pattern recorded on the embossed material is produced by the intersection of the mold %, the electrical interaction, the magnetic interaction, the thermal interaction, the mechanical interaction, and the D sub-die 36 and the riding material. The mechanical contact is made to cause the liquid hemostatic to expand, and an adjacent formation 50 of the imprinted material is produced on the surface material. In one embodiment, the distance "d" is reduced to cause the embossed layer portion 52 to enter and fill the recess 38. To facilitate the filling of the recess 38, the embossing material is provided to completely fill the necessary properties of the adjacent formation of the in-phase stamping material of the recess 38 to cover the surface material. In this embodiment, the distance ("the smallest" distance "d" of the second portion of the embossed layer 34 overlaid with the convex portion 40 is retained. This action provides a formation 50 having a thickness t] and a thickness K portion. The thickness, V and 'V can be any desired thickness depending on the application. After the beans, the formation 50 is cured by exposure to a suitable curing agent (e.g., actinic radiation). This money-making _polymerization and cross-linking 4 branches can occur at ambient temperature and pressure, or in an environmentally controlled room with desirable temperature and I force. In this manner, the formation 50 is cured to provide a side 56 of a shape having the same shape as the surface % of the % pure %. Referring to Figures 2 and 3, the characteristics of the housing material are important for making the substrate 42 effective in a unique patterning process. For example, the embossing material is desirably provided with certain properties to promote a mold-like morphology and uniform filling, so that all thicknesses 11 are substantially uniform and all thicknesses t2in are only homogeneous. Therefore, it is desirable to establish the embossing material on the basis of the deposition method used to achieve the aforementioned characteristics. As described above, the imprint material can be deposited on the substrate 42 using a variety of techniques. If the embossed material is deposited in a plurality of individual and separated drops %, the composition forming the embossed material is desirably relatively low in viscosity, for example, 0.5 [poise (cPs). Considering that the printed material is simultaneously unfolded and patterned, and the pattern is then cured into a formation 50 by exposure to a film, and the desired 1331958 is used to wet the surface of the core 42 and/or the mold %, and to avoid Thereafter, pits or holes are formed after the polymerization. If the imprint material is deposited using a spin coating technique, a higher viscosity material is desired, for example, having a viscosity greater than 10 cPs, and typically a coefficient of a few hundred to several thousand 〇 1 > 5 In addition to the above characteristics (referred to as liquid (tetra)), an imprint material having certain curing phase characteristics is desirably provided for the composition. For example, after the formation % is cured, the desired adhesion and release properties are evidenced by the imprint material. In particular, it is advantageous for the composition used to make the embossed tree material to provide a preferred release 10b from the substrate 42 and a preferred release of the mold 36. In this way, the reliability of the recording pattern deformation caused by the separation from the mold 36 due to the tearing, stretching or other structural ablation of the formed article 50 is reduced, and the aforementioned embossing material embossing material is provided. The composition of the wire can be different. This is caused by the substrate 42 formed from several different materials. Therefore, the chemical composition of the face 15 44 varies depending on the material from which the substrate 42 is formed. For example, Yicai

42 can be self-twisting, plastic, gallium antimonide, mercury telluride, and the like. Further, the substrate 42 can comprise - or multiple layers, for example, a dielectric layer, a metal layer, a semiconductor layer, a planarization layer, etc. On top of it, the formation 5 〇 is formed. Alternatively, the mold 36 can be formed from a variety of materials, such as molten vermiculite, quartz, indium tin oxide, diamond-like carbon, MoSi, sol, and the like. It has been discovered that the imprint material from which the formation 50 is produced can be fabricated from a plurality of different populations of bulk materials. For example, imprint materials can be made from vinyl ethers, methyl enoates, epoxides, thiols, and acrylates, just to name a few. Exemplary body materials for embossing materials are as follows: 11 1331958 Vinyl ether/too gifted slanting triethylene glycol divinyl ether tris(4-vinyloxybutyl) trimellitic acid photoinitiator 5 The first vinyl ether component, triethylene glycol divinyl mystery, has the following structure: and comprises about 67.9% by weight of the bulk material. Therefore, the mechanical properties of the formation 50 are mainly attributed to triethylene glycol divinyl ether. An exemplary source of triethylene glycol divinyl 10 alkyl ether is available from BASF Corporation of Mount Olive, New Jersy under the trade name DVE-3. The second vinyl ether component 'tris(4-vinyloxybutyl) stearic acid ester has the following structure:

15 and comprises about 29.1% by weight of the bulk material. The tris(4-vinyloxybutyl)succinic acid S component is available from Morflex Inc. of Greensboro, North Carolina under the trade name Vectomer 5015. The photoinitiator component is a cationic photoinitiator which is a mixture of triarylnickel hexafluoroantimonate in propylene carbonate having the following structure:

A 12 1331958

The photoinitiator component comprises about 3% by weight of the bulk material and is available from Dow Chemical Company of Midland, Michigan under the product name UVI 6976. 5 vinyl ether 2 / bulk material - A2 bis (4-vinyl oxybutyl) adipate vinyl ether terminated polyester polymer photoinitiator first vinyl ether component, double (4 -vinyloxybutyl) adipate, having 10 having the following structure:

And comprises about 19.4% by weight of the bulk material. An exemplary source of bis(4-vinyloxybutyl) adipic acid vinegar is the product of Morflex, Inc. of Greensboro, North Carolina under the name Vectomer 4060. The second vinyl ether component is a vinyl ether terminated polyester polymer comprising about 77.6% by weight of the bulk material. Thus, the mechanical properties of the formation 50 are primarily due to the polyester polymer terminated with vinyl ether. An exemplary source of vinyl-polycopolymer is Morflex, Inc. of Greensboro, North Carolina under the product name Vectomer 1312. The light 20 initiator comprises about 3% by weight of the bulk material and is the same as described above for the 13 1331958 ethylene bond bulk material 1 : UVI 697 ό. Thioglycidyl ester / the present material thorn _ 八 3 organically modified sulphuric acid salt can contain 100% of the bulk material exemplified organically modified bismuth oxide ORMOSIL available from Micro Resist Technology GmbH, Berlin, Germany Ormomer® b66. This material is produced by a sol method. The methacrylic and epoxy functional groups are attached to the material, and the photoinitiator component is incorporated by the mercaptopropene functionality for UV curing. Epoxy/Body Material_8 4 Bisphenol A diglycidyl ether Cationic photoinitiator Double age component A diglycidyl _ has the following structure:

And comprises about 97% by weight of the bulk material. Therefore, the mechanical properties of the formation of 5 主要 are mainly attributed to the bis-glycidol _ of the double component A. The exemplified source of the two-glycidic mystery is the DER 332 product of the Dow Chemical Company of Midland, Michigan. The cation photoinitiator component of the bulk material comprises a mixture of triaryl nickel hexafluorophosphate in propylene carbonate, providing the following structure: 8

1331958 and contains about 3% (by weight) of the bulk material. Cationic photoinitiator

The product name is UVI 6992.

Thiolene/Termoid-AS Triethylene glycol diethyl ether 1,2-bis(2-mercaptoethoxy)ethane triallyl isocyanurate 2,4,6-triazine The ethyl benzhydrylphenylphosphonic acid ethyl ester vinyl ether component comprises about 36.7% by weight of the bulk material and has the structure discussed above for the product sold under the product name DVE-3. The 1,2-bis(2-mercaptoethoxy)ethane component has the following structure:

And comprises about 47.3% by weight of the bulk material. An exemplary source of the 1,2-bis(2-mercaptoethoxy)ethyl bromide component is Aldrich Chemical Company of Milwaukee, and the product name of Wisconsin is DMDO. Therefore, the mechanical properties of the formation 50 are mainly attributed to the triethylene glycol divinyl ether and the 1,2-bis(2-mercaptoethoxy)ethane component. The triallyl isocyanurate component has the following structure:

15 1331958

And comprises about 13% by weight of the bulk material. An exemplary source of the triallyl isocyanurate component is Aldrich Chemical Company of Milwaukee,

The product of Wisconsin is called TAIC. The ethyl 2,4,6-trimethylphenylnonylphenylphosphonate component comprises about 3% by weight of the bulk material and has the following structure:

An exemplary source of the ethyl 2,4,6-trimethylphenylnonylphenylphosphonate component is the product of the TSK-L under the product name BASK Corporation of Mount Olive, New Jersey. Acrylate/Body Material-A6 Isobornyl acrylate hexyl acrylate ethylene glycol diacrylate 2-hydroxy-2-methyl-1-phenyl-propan-1-one acrylate component, isobornyl acrylate (IBOA) ), has the following structure:

】 6 1331958

It also comprises about 55% by weight of the bulk material, but may be present in the range of from 2% to 80% (inclusive). Therefore, the mechanical properties of the formation 50 are primarily due to IBOA. An exemplary source of IBOA is available from Sartomer Company, Inc. of Exton, Pennsylvania under the product name SR506. The n-hexyl acrylate component has the following structure: and comprises about 27% by weight of the bulk material, but may be present in the range of from 〇% to 5% by weight. The formation 50 is also provided with flexibility, and the n-HA is used to reduce the viscosity of the bulk material of the prior art, such that the bulk material of the liquid phase has a viscosity in the range of 2-9 centipoise (inclusive). An exemplary source of the n_HA component is Aldrich

Chemical Company of Milwaukee, Wisconsin. The crosslinking agent 'ethylene glycol diacrylate has the following structure:

It also comprises about 15% by weight of the bulk material and may be present in the range of 10% to 50% (included). EGDA also contributes to an increase in modulus and stiffness and promotes cross-linking of n_HA and IBOA during bulk material polymerization. The initiator component '2-hydroxy-2-mercapto-1-phenyl-propan-1-one, available from

Ciba Specialty Chemical of Tarrytown, New York is DAROUR® 1173 and has the following structure: 17 1331958

It also comprises about 3% by weight of the bulk material and may be present in the range of from 1% to 5% (inclusive). The initiator reflects the ultraviolet radiation from the broadband spectrum produced by the medium pressure mercury lamp. In this way, the initiator promotes cross-linking and 5 polymerization of the bulk material components. Acrylate / bulk material - A7 isobornyl acrylate hexyl acrylate ethylene glycol diacrylate 10 2-hydroxy-2-methyl-1-phenyl-propan-1-one as seen, to form the same component Sexually, the bulk material -A7 is identical to the bulk material -A6. These two materials differ in the percentage of the presence of the parent component. For bulk material - A7, IBOA comprises about 47% by weight of the material, and n-HA and EGDA each comprise 15 25% by weight of the bulk material. DAROCUR® 1173, 2-hydroxy-2-methyl-1-phenyl-propan-1-one component, containing about 3% by weight of this material. Acrylate / bulk material - A8 genomer 1122 isobornyl acrylate 20 1,6-hexane diol diacrylate

2-Hydroxy-2-indolyl-1-phenyl-propan-1-one First acrylic acid S component, genomer 1122, available from Rahn USA 18

Corporation of Aurora, an aliphatic urethane acrylate of Illinois, and having the following structure:

〇 0 and contains about 21% (by weight) of the bulk material, but can exist in the range of 5%. The acrylate component, isobornyl acrylate (IB〇A), as described above, and comprises about 56% by weight of the composition, but may be present in the range of 2% to 8% by weight. The acrylate component, 1,6-hexanediol diacrylate, is available from UCB Chemicals, Smyna, Georgia and has the following structure: Ο and comprises about 20% by weight of the bulk material, but can be 〇% to 50% (inclusive) exists. The starter component, 2-hydroxy-2-methyl-1-pentyl-propan-1-one, is as described above and comprises about 3% by weight of this composition. To provide improved wetting characteristics of bulk material A8, additional fluorinated acrylates such as '1H,1H-perfluoro-n-decyl acrylate' can be included to reduce the contact angle. This fluorinated acrylate is available from Exfluor Research Corporation, Round R0Ck, Texas under the trade name C10ACRY. One of the advantages of the bulk material Ad is that it has a viscosity of about 11 cPs, making it suitable for drop dispensing and spin coating techniques. However, it has been found that the preferred adhesion and release properties discussed above can be achieved by creating a weak boundary layer between the surface 58 of the mold 36 and the formation 50, and a thin 1331958 panel 60. The sheet 6 is maintained after the stamping material is cured. Therefore, the adhesion between the mold 36 and the formation 50 is minimal. Therefore, it has been found to be advantageous to use a composition comprising one of the bulk materials as discussed above and a component containing a low surface energy group (referred to herein as a surfactant component) for imprinting the material. After depositing the imprint material, after a period of time, the surfactant component rises to the air liquid interface, providing an imprint material having a concentration of the two portions of the material.

In the first part, the drop 146 contains a higher concentration of the surfactant component than the second portion (referred to as the sub-component of the spent surfactant component (SCD) i 3 7), referred to as a rich surface. The second part of the active agent (SCR) 136. The SCD sub-portion η 10 is placed between the surface 44 and the SCR sub-portion 136. Once cured, the SCR secondary 136 reduces the adhesion between the mold and the imprint material. In particular, the surface 2 agent component has opposite ends. When the imprint material is in the liquid phase (i.e., polymerizable), the opposite end has an affinity for the bulk material contained in the imprint material. The remaining end has a fluorine component. Because of the affinity for the bulk material, the surfactant 15 component is oriented such that the 'fluoro component' extends from the air-liquid interface defined by the imprint material and the surrounding environment. When the imprint material is cured, the first portion of the imprint material produces a thin sheet 60, and the second portion of the imprint material is cured, i.e., the formation material is not a polymer material. The thin plate 6 is located between the formation % and the mold 36. The green 60 system is caused by the existence of i secret and located in s (: r sub-dress 136. The thin plate 60 avoids strong adhesion to the mold (4) and the formation of lions. In particular, the formation 50 has the first and second relative Side weave 64. Side 62 is the first point to force the plate to be good, and the coffin is 42. The side 64 is adhered to the mold 36 with a second adhesive force. The thin plate 60 causes the second adhesive force to be less than the second. Therefore, the mold can be easily removed from the formation 5〇 while using: deformation 20 1331958 1 •ch2-c— -1 - X -CH2—ΟΙ C=〇1” y F(CF2CF2)mR"CH2CH20 Wherein R and R may be H or a thiol group; R and R may be the same or different. R" is a linking group which may be omitted or is a sulfonyl group, such as _S02N(R,,,, ,;)_,

And R is a Cl to C6 alkyl group, and typically is a group of (:! to (:4 alkyl. Component (0R''') Z-system poly(oxyalkylene)' typically comprises from 2 to 4 carbons The base of an atom such as -CH2CH2-'-CH2CH2CH2-'-CH(CH3)CH2-> or -OKCHdCtKCH3)-.R'', 'end of methyl, 11 or 〇1 to 〇4 alkyl, Typically, it is a ruthenium or osmium group. The ratio of X to y ranges from 1:2 to 3:1, and more preferably from 1:1 to 2:1. 10 It is necessary to understand the poly(oxyalkylene) Oxygen burnt groups can be the same, such as poly (oxygen)

Ethylene groups, or two or more different alkylene units may be irregularly distributed in the poly(oxyalkylene) group. More particularly, the poly(oxyalkylene) group may be composed of a linear or branched chain oxypropylene unit alone or an oxyethylene unit, or a linear or branched oxypropylene unit and an oxyethylene group. The base unit can be alternately blocked. In the case of alternating blocks of oxyethylene and oxypropylene groups, the ratio of oxyethylene to oxypropene is in the range of 2.0 to 0.5 to 1. Further, the unattached blocks of the poly(oxyalkylene) may be present in the polymer matrix. Chain transfer agents such as octyl mercaptan may also be present. Exemplary non-ionic fluorinated surfactant components which can be used are those disclosed in U.S. Patent Nos. 3,403,122, 3,787,351, 4,803,145, 4,835,084, 4,845,008, 5,380,644, 5,747,234, and 6,664,354. Active ingredient component. The remaining surfactant component can be one or more surfactants based on oxy-oxygenation and/or hydrocarbon-based surfactants. An example of a surfactant based on Shi Xi Oxygen is available from Dow Corning of

Midland, Michigan, under the trade names Q2-5211 and SYLGARD® 309 5, are both trioxane type surfactant components. A polyoxyalkylene polyether type can also be used. The hydrocarbon surfactant component suitable for use in the present invention comprises any composition which promotes the provision of a low "dynamic" surface tension and/or increases the solubility of the fluorinated surfactant in the bulk material. Exemplary hydrocarbon surfactant components are available from 10 BASF of Ontario, Canada under the trade name TETRONIC®, for example, TETR® NIC® 701, which is believed to be propylene oxide, ethylene oxide, and ethylenediamine. A tetrafunctional block copolymer. Other hydrocarbon surfactant components are available from Dow Chemical Company of Midland, Michigan under the tradenames TERGITOL® and TRITON®, for example, TERGITOL® NP-10, 15 TRITON® X-100, and TRITON® X-45. TERGITOL® surface active

The agent component is an alkyl polyoxygenated oxygen and the TRITON® surfactant component is a hospital based phenylpolyethoxylated oxygen. Uniqema Americas of New Castle, Delaware also offers suitable hydrocarbon surfactant components containing polyethoxylated alcohols and esters under the trade name BRIJ®, for example, BRIJ® 30. The hydrocarbon surfactant component containing acetylene poly 20 ethylene oxide can be obtained from Air Product and Chemicals, Inc. of Allentown, Pennsylvania under the trade names SULFYNOL® and DYNOL®, for example, SULFYNOL® 104, SULFYNOL® 440, SULFYNOL® 2502, and DYNOL® 604. Typically, the composition formed using the above bulk material comprises a surfactant component in an amount of 25 1331958, or a mixture of surfactant components, ranging from 0.05% to 5% by weight of the composition, and more In particular, it is 25% to 2% by weight. The remainder of the composition contains one or more of the bulk materials as described above. Typically, the composition from which the embossed material is made is applied at room temperature and 5 using a dispensing technique in the presence of a rolling purge (e.g., in a saturated atmosphere). Drop dispensing techniques are used for compositions having a viscosity in the range of ❽ cPs at room temperature. For higher viscosity compositions, for example, in the range of 10-500,000 cps, but more specifically, a composition of 10-20,000 cPs at room temperature, spin coating techniques can be used. 10 In order to demonstrate improved adhesion and better release provided by the presence of the surfactant component in the embossed material, the above-described compositions comprising the bulk material and the surfactant component were tested. . In particular, the following surfactant components were used: S1 15 FC-4430 as described above 'Surfactant FC-4430 is available from 3M Company of

St. Paul's NOVEC® fluorosurfactant fc-4430. NOVEC® FC4430 fluorosurfactant is a fluorochemical surfactant based on a non-ionic propylene copolymer containing a perfluorobutane sulfonate (PFBS) segment. 20 S2 FS-1230 Surfactant FS-1230 is believed to be derived from Asahi Glass and supplied by Mason Chemical of Arlington Heights, Illinois under the product name MASURF® FS-1230 and has the following general formula: 26 Surface activity SURFYNOL® 104 is an acetylene-based surfactant having the chemical name 2,4,7,9-tetradecyl-5-decyne-4,7-diol. The surfactant SURFNOL® is available from Air Products and Chemicals, Inc. of Allentown, Pennsylvania and has the following knots.

This combination surfactant S8 is 50% FSO-100 and 50% SURFYNOL® 104. The surfactant component and bulk material as described above are used to formulate 10 additional compositions to provide better adhesion and better release properties for the twelve compositions and eight bulk materials discussed above. Comparison data. The composition and/or bulk material is deposited between the two slides and then cured. Each slide is approximately 1 mm thick with a lateral dimension of '75 X 25 mm. A drop of fluid imprint material is placed on the slide. The second slide is stacked in a pattern of intersecting directions. The embossed 15 material is then cured. A four-point bending compression force is applied to separate the slides. The 'four-point bending loss is used for adhesion testing and technology, which is similar to, the measurement of the adhesion between the mold and the photocurable resin of the pressure P technology, Japanese Journal of Applied Physics, Vol. 41 (2002) ), as described on pages 4194-4197. The maximum force/load system is used as the adhesion value. The wheelbase of the upper and lower points is 60 mm. The load 20 was applied at a speed of a5 mm/min. The composition and test results are as follows: 29 1331958 Contains bulk material - A 1 imprint material ο (赘笼众γ^

A1-NS A1-S1 A1-S2 is seen in A1, with a stack of cured imprinting materials formed from the bulk material A1 and the surfactant S2 composition (shown as A1-S2) placed therebetween. The separation of the sheets (not shown) requires only 3.4 pounds of separation force. This system is much less than the 7.5 lb. separation force required to separate the cured imprint material formed from about 99.5% of the bulk material A1 and about 0.5% of the surfactant S1 (shown as AhSl). In addition, the separation force force required for the laminated slide 10 (not shown) having the solidified bulk material A1 interposed therebetween (indicated without A surfactant, denoted by A1-NS) is used. When compared to the time, the separation force is reduced by 61%. The A1-NS, A1-S1, and A1-S2 compositions each have a room temperature viscosity of about 8 cPs and are deposited at room temperature using a drop dispensing technique. The composition of A1-S2 consists of about 99.5 % of bulk material A1 and 0.5% of surfactant S 2 . The A1-S1 composition consists of about 99.5% of the bulk material A1 and 0.5% of the surface 15 active agent S1. 30 1331958 Imprint material containing bulk material - A2 (^] twA韹 Order ¥蛸

A2-NS A2-S3 A2-S4 As seen from the separation data for bulk material A2, separation of the stacked slides (not shown) with cured imprint material requires a separation force of 1.7 pounds. The composition (indicated by A2-S3) containing the bulk material A2 and the surfactant S3 is used to form a cured imprint material. The required separation force is much less than the separation force of 2.6 pounds required in the presence of the cured imprint material formed from the composition of bulk material A2 and surfactant S4 (denoted as A2-S4). In addition, when compared to the separation force required to separate a laminated slide (not shown) having a cured bulk material A 2 disposed therebetween and lacking surfactant 10 (represented by A2-NS) , to achieve a 50% separation power. Each of the A2-NS, A2-S3, and A2-S4 compositions had a room temperature viscosity of about 300 cPs and was deposited using a spin coating technique at room temperature. The A2-S3 composition consisted of about 99.5% of bulk material A2 and 0.5% of surfactant S3. The A2-S4 composition consists of about 99.5% of the bulk material 15 A2 and 0.5% of the surfactant S4. 31 1331958 息·1· Body material-A3 imprinted clock material 8,0 -, 7·6-5-4-3- (赘) 簸穴簸众¥噃 ο ο ο 2·10-

10 From the separation data for the bulk material A3, it is only a separation force of 2.0 pounds to separate the laminated slides (not shown) having the cured imprint material placed therebetween. The cured imprint material is formed of a composition of the bulk material A3 and the surfactant S4 (indicated by A2-S4). This system is much less than the separation force of 3.0 pieces required in the presence of the cured imprint material formed from the bulk material A3 and the composition of the surfactant S1 (indicated by A3-S1). The separation force associated with VIII 3 § 4 is also less than the separation force required in the presence of the cured imprint material formed from the bulk material A3 and the composition of surfactant 53 (depicted in 八三53). In addition, when compared to the separation force required to separate the laminated glass moon (not shown) having the cured bulk material A3 interposed therebetween and lacking the surfactant (indicated by A3-NS), Reduce the separation power by 72%. Each of the A3-NS, A3-S1, A3-S3, and A3-S4 compositions has a viscosity of about 1 〇〇〇〇 to 12 〇〇〇cPs (inclusive) and is used for spin coating at room temperature. Technical deposition. The A3_si composition consisted of about 99.5% of bulk material A3 and 0.5% of surfactant S1. The A3-S4 composition is composed of about 99.5% of the bulk material A3 and 5% of the surfactant S4 (S) 32 15

I. Contains too much body slant-A4 embossing 9.Q e.o. 7.0- 6.0 . 5.0 . 4.0 . 3.0 - 2.0 . 1'0 . 〇.0 ·

A4-NS M-S3 A4-S4 10 As seen from the separation data on the bulk material A4, the laminated fragments having the cured composition (including) containing the bulk material A4 and the surfactant S4 are separated (not shown). The required power is reduced by only 5.0. The separation force of 5.4 pounds required for the composition of bulk material A4 and surfactant S3 (expressed as M'S3). In addition, when compared to the separation force required to separate a laminated slide (not shown) having a cured bulk material A4 interposed therebetween and lacking a surfactant (not shown by NS), see Reduce the separation power by 40%. Each of the A4-NS, A4-S3, and A4-S4 compositions is 15° from the separation data for the bulk material VIII, and has a room temperature viscosity of about 5, 〇〇〇cps, and is spin-coated at room temperature. This product. The composition of A4-S1 consists of about 99.5% of the bulk material 八4 and 〇.5% of the surfactant. The A4_S3 composition consists of about 99% of the bulk material A4 • 5% of surfactant S3. The a4 S4 composition consists of about 99% of the bulk material A4 and 0.5% of the surfactant. (S) 33

A5-NS A5-S3 A5*S4 A5-S1 As seen from the separation data for the bulk material A5, the separation force required to separate the stacked slides (not shown) with the cured imprint material placed therebetween is only 5 0.62 lbs. The cured imprint material is formed from a composition of the bulk material A5 and the surfactant S3 (indicated by A5-S3). This is less than the separation force required for the cured imprint material formed from the bulk material A5 and the surfactant S1 (represented by A5-S1) or the bulk material A5 and the surfactant S4 (as A5-S4). . In addition, when compared to the separation force required to separate a laminated slide (not shown) having a cured body material A5 disposed therebetween and lacking a surfactant (indicated by A5-NS) , achieving a separation power of 72%. Each of the A5-NS, A5-S1, A5-S3, and A5-S4 compositions has a room temperature viscosity of about 20 to 30 cPs (inclusive) and is deposited using a spin coating technique at room temperature. The A 5 -S1 composition consists of about 9 9 % of the bulk material A 5 and 0,5 % of the surface active 15 dose S1. The A5-S3 composition consisted of about 99.5% of bulk material A5 and 0.5% of surfactant S3. The A5-S4 composition consisted of about 99.5% of the bulk material A5 and 0.5% of the surfactant S4. 34 1331958 Imprint material containing bulk material -A6 7 - (赘)彻阿黎令¥蜞

A6-NS A6-NS B/8 A6-S3 A6-S5 The separation force data for the solidification of the bulk material A6 lacking the surfactant between the two stacks is indicated by A6-NS B/B. In particular, each of the two stacked slides (not shown) has a DUV 30J layer formed thereon. The DUV30J line is available from Brewer Science, Inc. of Rolla, Missouri. The cured body material VIII is sufficiently adhered to the transfer layer (not shown) and is easily detached from the embossing stencil (not shown). The separation force data for the bulk material A6 lacking the surfactant (which is cured between two stacked slides (not shown) and having no previous layer thereon) is also shown, indicated by A6-NS. As seen from the separation data for the bulk material A6, a laminated slide for separating the cured composition containing the bulk material A6 and the surfactant S3 (indicated by A6-S3) without the above-mentioned transfer enhancement is provided. The separation force required (not shown) is only required to be broken. This is less than the separation force required for the composition of bulk material A6 and surfactant S5 (indicated by A6-S5) or the fraction of separation force required for A6-NS B/B. In other words, a separation force reduction of 84% is achieved when compared to the separation force required to separate the laminated slides (not shown) having the cured bulk material A6-NS. The data suggests that the adhesion of selectivity has been achieved. Although S3 and S5 have a perfluorohydrophobic group, S3 appears to be more effective at lowering the adhesion system than S5. Therefore, it is believed that the structural change of the fluorinated additive has a significant impact on the release properties. Example 5 For example, S3 has a surfactant molecule comprising a hydrophobic tail and a hydrophilic head which provides desirable release properties as shown. The A6-NS, A6-S3, and A6-S5 compositions have a room temperature viscosity of about 4 cPs and are deposited using a drop dispensing technique at room temperature. The A6-S3 composition consisted of about 99.5% of bulk material A6 and 0.5% of surfactant S3. The A6-S5 composition consisted of about 99.5% of the bulk material 10 A6 and 0.5% of the surfactant S5. Imprint material comprising bulk material - A7 7 6 5 4 3 2 1 r- ft. .ft ΙΒΏ 围 ______ A7-NS A7-NS A7-S3 A7-S4 A7-S1 A7-S6 A7-S7 A7- S8

8/B The separation force data for the solidification of the bulk material A7 lacking the surfactant between the two stacked transfer layers is indicated by A7-NS B/B. In particular, each of the two stacks of slides (not shown) has a DUV 30J layer as described above formed thereon. It is also shown that the bulk material A7 lacking the surfactant cures between the two stacked slides (not shown) and has no separation of the previous layers thereon. 36 Force data, indicated by A7-NS. The presence of the surfactant component provides a significantly improved release properties for the imprint material composition comprising bulk material A7, as expected from reviewing previous data. Mixed surfactant components such as S7 and S8 have also been shown to successfully reduce the required separation force. A7-NS, A7-S1, A7-S3, A7-S4, A7-S5, A7-S6 'A7-S7 and A7-S8 plants each have a room temperature viscosity of about 4 cps, and at room temperature Deposition using drop dispensing techniques. The A7-S1 composition consisted of about 99.5% of the bulk material A7 and 5% 5% of the surfactant S1. The A7-S3 composition consisted of about 99.5% of the bulk material A7 and 0.5% of the surfactant S3. The A7-S4 composition consists of about 99.5% of the bulk material a7 and 0.5% of the surfactant s4. The A7-S5 composition consisted of about 99.5% of the bulk material A7 and 0.5% of the surfactant S5. The A7-S6 composition consists of about 99.5% of the bulk material VIII and 0.5% of the surfactant S6. The A7_S7 composition consists of about 99% of the bulk material A7 and 0.5% of the surfactant S7. The A7 S8 composition consists of about 99.5% of the bulk material VIII and 5% of the surfactant S8. Referring to Figure 2, which provides surface activity (4), it is considered that the time required to store the introduced embossed material increases the time required to fill the topography of the mold 36. As described above, the release property of the layer 7_ due to contact with the imprinting material to form a 4-sided activity on the surface % is caused by its hydrophobicity, which is intended to quickly cover the wetness of the mold 36. Conflict. Particularly conceivable in the case of a surfactant containing a fluorine atom in the molecule, a large amount of fluorine-containing molecules in the molecule and coupling with a too large number of fluorine-containing molecules cause clustering of the teaching molecules. Such clusters (especially those having an extension from the air-liquid interface; end groups) are believed to provide a layer 70 having an undesired hydrophobic distribution that would greatly affect the wetting characteristics of the press material with respect to surface 58. The phase k is achieved by arranging the gas shoulders in the surfactant molecules and distributing the fluorine molecules in the volume of the entire layer 70 (hence, collectively referred to as fluorine atoms distributed throughout the volume), "5J* Accept the hydrophilic distribution. The desired distribution of fluorine atoms in the surfactant molecules and fluorine-containing molecules in the layer 7〇, the thin layer 60 is provided with the best milk degree to provide a desirable better release and adhesion 'and will not borrow The wettability of the surface 58 is unduly restricted by the embossing material. Therefore, the imprint method is provided with a thoughtful filling and demolding property. This typically occurs with a thin layer 60 having a thickness of about 1 nm. One way to determine the desired distribution of fluorine atoms in the surfactant molecules and fluorine-containing molecules involves measuring the contact angle of the imprinted material with the surface 58. Therefore, the goniometer is used for contact angle measurement. The mold 56 formed from the fused vermiculite was cleaned in a piranha solution and stored in an environment purged with nitrogen. The Piranha solution consisted of 2 parts of concentrated Η4〇4 and u>H2〇2 mixed at room temperature. The mold is then rinsed with a surfactant component isopropanol (IpA) mixture (e.g., an IPA mixture containing 0.01% of the surfactant component and the remainder consisting essentially of <p>A). After rinsing, the mold accepts a nitrogen fluid (e.g., nitrogen) to blow it. Again, mold 36 is exposed to the same IpA mixture and then directly exposed to the nitrogen fluid stream. Then, the drip of the imprint material is deposited on the mold 36 in a volume ranging from about 2 #1 to 5 //1. The contact angles of several different drops at various locations on the surface % were measured. In this embodiment, the contact angle measurement is performed using a goniometer corresponding to seven different positions on the mold 36. The average of the seven contact angle measurements was used to obtain the final contact angle value. The consideration layer 70 is refilled each time it comes into contact with the imprint material on the substrate. The foregoing experiments were considered to correctly determine the relative wetting properties of the different imprint material compositions. Contact angle, surfactant treatment solution, and filling properties are as follows. 0 5 Wetting properties of bulk material A 7 -1 Surfactant FSO-100 FC-4430 & FC-4432 FC-4430 & R-08 R -08 R-08& FS-1230 Contact angle 43.2° 20.2. 13.8° 17.3° 22.7. In terms of the identity of the constituent components, the bulk material A7-1 is the same as the bulk material -A7, but a surfactant component is added. These two materials differ in the percentage of each of the constituent components present. For the bulk material A7-1, the composition is about 46.875% by weight. 24.875% (by weight 10) of the composition of the IBOA' is 24.875% (by weight) of the composition of the 1^8'. 2.875% by weight of the composition is Darocur 1173; and about 5% of the composition is a surfactant component. Specifically, 0.5% of the bulk material A7-1 is composed of the surfactant FSO-100, and the least desirable wet characteristics are provided. The contact angle is the largest at 43.2°. Comparing to a contact angle of 13.8° provided on a bulk material A7-1 consisting of 0.5% of the combination surfactants r_〇8 and 15 FC-4430, wherein each of R-08 and FC-4430 comprises a bulk material 0.25% of A7_l. Therefore, the time required to fill the mold 3 6 is less than the layer 70 containing the FSO-100 layer 70 comprising the combined surfactants R-08 and FC-4430. For the remaining measurements, when the combination of surfactants FC-4430 and FC-4432 is included in the present bulk material A7-1, the contact angle is 20.2 ° C, wherein FC-4430 comprises about 0.333% by weight of the composition. And FC-4432 comprises about 0.167% by weight of the composition. Another surfactant composition consisting of R-08 and FS-1230 exhibits a contact angle of about 22.7°, wherein R-08 comprises about 0.4% by weight of bulk material 39 1331958 A7-1, and FS -1230 comprises about 0.1% by weight of bulk material A7-1. Wetting characteristics of bulk material A8-1 Surfactant FSO-100 FC-4432 FC-4430 FS-2000 R-08 S-222N Contact angle 49.7° 26_5. 17.2° 21.4° 18.2. 19.2. In terms of the identity of the constituent components, the bulk material A8-1 is the same as the bulk material - A8, but the surfactant component is added. In the case of each of the constituent components present, the two materials are different. About bulk material A8-1, about 20.875% by weight of the composition was Genomer 1122, and the composition was 55.875% by weight. The acrylate component 11000 was about 19.875 wt%, and about 2.875% (by weight 10) of the Darocur 1173 system composition. The remaining 0.5% of the composition is the surfactant component. Specifically, 0.5% of the bulk material is composed of FS0-100, and the minimum desirable wettability is provided. The contact angle is at 49.7. The department is the largest. The 17.2 provided on the bulk material A8-1 made of 0.5% surfactant FC-4430 was compared. Contact angle. Therefore, the time required to fill the topography of the mold 36 is less than the layer 70 comprising the surfactant FC_443, which is less than the layer 70 comprising the FSO-100. For the remaining measurements, approximately 18.2. The contact angle is exhibited when the R-08 surfactant is contained in the bulk material 8-8. With the surfactant s_222N contained in the bulk material A8-1, a contact angle of 19_2 was exhibited, and 21.4. The contact angle is exhibited when the surfactant 1^-2〇〇〇 is contained in the bulk material A8-1. 26·5. The contact angle is attached to the surface 20 when the active agent FC-4432 is contained within the bulk material Α8-1. It is to be understood that the similar benefits of preferred adhesion and demolding with desirable wetting characteristics can be achieved by varying the composition of the surfactant on or in the bulk material or both. For example, increasing the surfactant concentration in the bulk material Α8-] 40 1331958 to 0.7% (by weight) of the composition and 〇2% comprises Tergit〇i np_丨〇 and 0.5% FS-2000 by A contact angle of about 17^ confirms the second best wet lake characteristic. Note that for this measurement, about 2% of the IPA mixture (composed of surfactant mixture FS_2〇〇〇 and Tergit〇l Np_丨〇) as described above was substituted for 0.01% of the solution. In this example, a surfactant mixture in which a fluorine-containing and fluorine-free surfactant is used is used as a Tergitol NP-10 hydrocarbon surfactant, which has a fluorinated surfactant (such as FS 2 〇〇〇). ) Faster dynamic speed. Alternatively, the surfactant composition may be modified by the use of a surfactant which is different from the one contained in the imprint material in contact with the mold 10 in the layer 7 crucible. For example, bulk material A7-2 surfactant FC-4430 FC is 2 FC-4430 R-08 FC-4430 & FC-4432 R-08& FC4430 contact angle 43.2° 26. 18.1° 20.0° 22. 14.7° The bulk material A7-2 contains all of the constituent components of material A7-1 and contains the surfactant FSO-100. For the bulk material A7-2, about 15 46.875% by weight of the composition is 24.875% by weight of the composition of the IBOA ', 11 of 18, and 24.875% by weight of the composition. 00 VIII, 2.875% (by weight) of the composition is 0 (11111:1173; and about 0.5% of it is FSO-100. In particular, the surface 58 is coated with an IPA mixture containing FS〇-100, at least The desired wetting characteristics are provided, and the contact angle is at most 2 〇 at 43 2°. By coating the surface of the surfactants R-(10) and FC-4430 (each of which contains 0.5% of the IPA mixture) The contact angle exhibited was 14.7. For the remaining measurements, a contact angle of about 18.1° was present when surface 58 was coated with FC-4430 8 41 surfactant, and a contact angle of about 20° was at surface 58 with R- 08 Surfactant when applied. When surface 58 is coated with a combination surfactant comprising FC-4430 and FC-4432 is deposited on layer 70, it exhibits a contact angle of about 22°. FC-4430 contains 0.333 of IPA mixture. % and FC-4432 comprises 0.167% by weight of the IPA blend. When surface 58 is coated with FC-4432 lacking any other surfactant, It has a contact angle of about 26.0. Therefore, it can be seen that by appropriately selecting the surfactant component in each bulk material, the desired wetting property can be obtained together with the desired better adhesion and release properties. The embodiments of the present invention are exemplified. Many variations and modifications may be made to the above disclosure while remaining within the scope of the present invention. Therefore, the scope of the present invention should not be determined with reference to the above description, but instead The drawings should be determined with reference to the scope of the appended claims and the full scope of the equivalents. 15 [Simple description of the drawings] Figure 1 is a representative diagram of a lithography system according to the prior art; Figure 2 is a template according to the present invention and A simplified elevational view of the embossed material placed on the substrate; Figure 3 is a simplified elevational view of the stencil and substrate shown in Figure 2, and the embossed 20 is shown as being patterned and cured; Figure 4 is a detailed view of the drip of the imprint material shown in Figure 2, which shows that the drip is divided into a surfactant-rich region and a surfactant-depleted region; Figure 5 is deposited using spin coating techniques. Imprint A detailed view of the layer, shown in pp. 13 1331958, shows that the layer is divided into a surfactant-rich region and a surfactant-depleting region; Figure 6 is an impression of the template deposited as shown in Figure 4 or Figure 5. a cross-sectional view of the material, demonstrating that the weak boundary sheet is formed between the cured imprint material and the stencil; and a cross-sectional view of the stencil according to the present invention shown in Fig. 6 having the surface on which it is placed Active agent solution layer. [Main component symbol description] 10". ,., 34 34.· ----Memory 11... Platform 36·. .... Mold 12... 38.. ....recess 14...template 40.....stone 16...mold 42·....new 18...formed surface 44.. ... Surface 20...imprint head 46.....•drop 22...fluid distribution system 50.....formation 24...polymerizable Material 52.....·Second part 26... Energy source 54·....Second part 28... Energy 56·. •... Side 30... Path 58·· .. Surface 32... Processor 60·. •... Sheet 43 1331958 62, 64.., Side 146... Drops 70•...·· Layer 236 ...the second part of the rich surfactant 136......the second part of the surfactant-rich 237...the second part of the surfactant is consumed 137..... Part of the component

44

Claims (1)

1331958 Patent Application No. 94M1186 Application for Patent Scope Amendment 99.7.19 X. Patent Application Range: ^n 1 锸 且 亡 亡 • • • • • • • • • 表面 表面 表面 表面 表面 表面 表面 表面 表面 表面 表面 表面 表面 表面 表面 表面 表面 表面 表面 表面 表面 表面 表面 表面 表面And the material of the demolishing ship, the method comprising: forming a coating of 5 layers on the surface by a volume of the surfactant-containing solution, and the surfactant comprises a hydrophobic component, wherein the coating layer is not a A priori release layer: The x die is contacted with the polymerizable composition wherein the coating provides a contact angle having less than 50 relative to the polymerizable composition. The method of claim 1, wherein the contact angle is less than 20°. 3. The method of claim 1, wherein the surfactant is included And the polymerizable composition is formed from the same component. 5. The method of claim 1, wherein the fluorinated hydrophobic component comprises CF3 and CF2 groups. 6. A method of reducing adhesion between a substrate and a mold, the method comprising: An embossing material is placed between the mold and the substrate, wherein the embossed material comprises a surfactant component and a bulk material, and the embossed material has a second portion of the surfactant-rich component And a second portion of the spent surfactant component between the second portion of the rich surfactant component and the substrate; contacting the imprint material with the mold; curing between the mold and the substrate Imprinted material and the mold is not 45 1331958 a pre-release layer; and separating the mold from the cured ink-printing material such that the cured imprint material remains adhered to the substrate. 7. The method of claim 6 wherein The embossing material is placed in a 5 t step further comprising forming an "air liquid interface, the surfactant component having a plurality of opposite ends, and one of the relative enthalpy of the surfactant component The bulk material has an affinity, and the remaining end has a fluorine component, and the fluorine component extends from the air/liquid interface. 8. The method of claim 6, wherein the imprint material is placed 10 The step further comprises depositing a plurality of drops of the imprinting material on the substrate. 9. The method of claim 6, wherein the step of placing the imprinting material is further included in the base The embossing material is spin-coated. 10. The method of claim 6, further comprising curing the embossing 15 material to form a cured formation and a sheet disposed between the mold and the cured formation. Such as applying for a patent The method of claim 6, wherein the mold comprises a material selected from the group consisting of molten vermiculite, quartz, indium tin oxide, diamond-like carbon, MoSi, and sol. 2〇12. a composition defining an air-liquid interface, the composition comprising: a polymerizable bulk material; and a surfactant having a plurality of opposite ends, the ends having an affinity for the bulk material and the remaining ends having a fluorine group The surfactant has the following chemical formula: 46 1331958 七巧士七Η2~Ά 〒=〇f—(OR ...)z—R,"· F(CF2CF2)mR"CH2CH20 O where R and R are the same Or different and selected from the group consisting of H and methyl; wherein R" is a selective sulfonyl linking group -s〇2N(R'''"), and R,,,, , selected from the group consisting of (: 丨 to (: 6 alkyl groups; wherein (〇R''') z series a poly(oxyalkylene) group comprising at least one type of oxyalkylene unit; wherein R',' is an end group selected from the group consisting of hydrazine, methyl and (^ to (: 4 alkyl) a group consisting of; wherein the ratio of X to y is in the range of 1:2 to 3:1; and wherein ni is an integer in the range of 2 to 10. 13. The composition of claim 12 And the fluorine component is extended from the air-liquid interface. 14. The composition of claim 12, further comprising an additional surfactant, the additional surfactant component a group selected from the group consisting of π, nonionic, cationic and amphoteric surfactants. 15 15. The composition of claim 12, further comprising an additional surfactant group The formula has the following chemical formula: f(cf2cf2)x, ch2ch2o(r,,,,,'〇)Y,R,,,,,,,,,(R",,,,0)Y=systematic County), which contains a group having 2 to 4 carbon atoms, and a ruler,,,,,,, a system of 11 or (:| to (:4 alkyl) And the parent, and "20" contains an integer in the range of 2 to 10. 16. The composition of claim 12, which further comprises - an additional 47 1331958 surfactant component having the following structure: F(CF2CF2 X, -alkyl-N+R, ' ' '·, 3cr wherein X' contains an integer ranging from 1 to 7. 17. The composition of claim 12, further comprising an additional The surfactant component of 5 has the following structure: Wherein X' contains an integer in the range of 0 to 6, and y' contains an integer in the range of 0 to 15. 18. The composition of claim 12, further comprising an additional 10 surfactant component having the structure: 〇S [CF3CF2{CF2CF2 ^.CH2CH20] xP(OH)y. wherein, the X' system An integer having a value of 1 to 2; y' is an integer having a value of 2 to 1; z' has an integer containing a value in the range of 0 to 6. 19. The composition of claim 12, further comprising an additional 15 surfactant comprising fluorine and deuterium atoms. 20. The composition of claim 12, further comprising an additional surfactant, and the additional surfactant component is selected from the group consisting of surfactants based on ruthenium and hydrocarbons. a group of surfactants, and fluorinated surfactants. 48 1331958 21. The composition of claim 15, wherein (R''"'O)Y is a poly(oxyalkylene) group, the group comprising CH2CH2-, -CH2CH2CH2-, - CH(CH3)CH2-, or -CH(CH3)CH(CH3)-. 22. The composition of claim 15 which is hydrogen or alpha-5.