201008697 九、發明說明： 【發明所屬之技術領域】 本發明係關於-種五軸工具機檢測裳置，特別是指—種利 用光源單元以-半徑距離於感測主體周圍轉動，使感測主體偵 測光訊號後，即可推知卫具機五軸其二維或三維位移的誤差訊 號的檢測裝置。 【先前技術】201008697 IX. Description of the Invention: [Technical Field] The present invention relates to a five-axis machine tool for detecting a skirt, in particular, a light source unit that uses a light-radius distance to rotate around a sensing body to cause a sensing body After detecting the optical signal, the detection device of the error signal of the two-axis or three-dimensional displacement of the five-axis of the protection device can be inferred. [Prior Art]
❹ 目萷工具機品質提升可從兩方一 馮工具機整體結構精 度改善，而此方法可能較費時費力花錢，無法快速解決需求， 另-種方法為利用檢測系統檢測出工具機台誤差回授誤差利 用NC-code補償，提升卫具機精度，此種方法不但快速 簡便；在許多五軸加工機系統中並沒有所謂的多轴校正技術， 而現有工具機校正方法’大都是利用干涉儀來進行校正，不僅 架設複雜，亦無法做五軸同動量測，而現有的技術方面， A:t:ated Prec i s i 〇n ! nc現有的多軸量測系統其精度低且成本 昂貴’且僅有線性軸量測’而Ag i i ent Techn。i呢i以與刪】膽 PLC方面’則是要自設光路系統，造成成本之浪費，亦無法做五 軸同動量測，且目前標準與規範（膽㈣）亦無考慮五轴同動 校正，所以本發明將利用光學元件’組成一五轴檢測系統，利 用快速檢測出卫具機誤差，以提供—套高精度的檢測系統。 【發明内容】 可同 本發明之目的即在於提供一種非接觸式、高解析度 201008697 時檢測工具機五軸精度的檢測裝置。 彳達成上述發明目的之—種五轴工具機檢測裝置，包括有： —感測主體，該感測主體錢結於該王具機以’並受工 =軸控制旋轉，係具備複數個呈不同傾斜角度之感測元 件，亦以一夾持軸環列形成，其中該感測元件係至少呈有第一 感測元件、第二感測元件以及第三感測元件’該第一感測元件 ❹ 係與爽持軸互成平行，該第二感測元件以及該第三感測元件則 分設於該第-感測元件兩側且與該第一感測元件間呈—傾斜角 度； 一光源單元，其承載在卫具機之工作平台上，係具備光源， 和提供該光源沿感測主體第一方向相對轉動的旋轉裝置，和提 供該光源連結旋轉裝置沿感測主體第二方向相對轉動的旋轉電 機0 【實施方式】 請參閱圖-與圖六，本發明所提供之_種五軸卫具機檢泪 裝置，主要包括有-受工具機主軸41連結之感測主體工，及置 於感測主體1其周圍的光源單元2，利用光源單元2以一半徑距 離於感測主體1周圍轉動，使感測主體1偵測光訊號後，即可 推知工具機五軸其二維或三維位移的誤差訊號。 如圖四與圖六所示，本發明所提供之—種五軸工具機檢測 ^更i括有又工具機主軸41控制旋轉之感測主體1，及 201008697 置於感測主體1其周圍的光源單元2，利用光源單元2以—半护 距離入射於感測主體1並同步於感測主體i周圍與感測主體1 轉動，使感測主體1偵測光訊號後，即可推知工具機五軸其二 維或三維位移的誤差訊號。 該感測主體1如圖二所示，係連結於該工具機主軸4丨，並 受工具機主軸41控制旋轉，係具備複數個呈不同傾斜角度之感 測元件，該感測元件亦以一夾持軸12環列形成，其中該感測元 〇 件係至少具有複數第-感測元件⑴、複數第二感測元件⑴ 以及稷數第三感測元们13,該第一感測元# lu係與失持轴 12互成平行’其後再由複數第二感測元件112以及複數第三感 測元件113分设於該第一感測元件丨丨丨縱向兩側且與該第一感 測元件111間呈一傾斜角度型態設置； 該光源單元2如圖六所示，其承載在工具機之工作平台42 上，係具備光源2卜和提供該光源、21沿感測主體1第一方向相 ❹對轉動的旋轉裝置22，和提供該光源21連結旋轉裝置22沿感 測主體1第二方向相對轉動的旋轉電機23 ;其中，該光源21 為雷射光源，該光源單元2係以旋轉電機23設置於工作平台42 上，以使該光源21與旋轉|置22在該旋轉電機23之驅動之下， 得以一擺動中心而相對第二方向進行預定擺動角度及預定擺動 頻率之擺動。 為更加說明本發明，請再參閱圖三，為本發明另依實施例 201008697 之感測主體1，其中該感測主以為三個以上感測元件所組成一 個多面體（PQlyhed·)或凸多面體（咖vexpQlyhedrQn)，該複 數感^件能為橫向或縱向排列，且等角度均句分佈於感測主 體1外表面，其橫向排列角度能相等於縱向排列角度，或為不 相等於縱向排列角纟；以下為近—步說明感測元件之排列，盆 中感測元件至少包括一第一感測元件lu、一第二感測元件ιΐ2 以及一第三感測元件113所構成；其中，該第二感測元件ιΐ2品质 The quality of the machine tool can be improved from the overall structural accuracy of the two sides and one tool, and this method may be time-consuming and labor-intensive, and cannot quickly solve the demand. Another method is to use the detection system to detect the error of the tool machine. The error is compensated by NC-code and the accuracy of the implement is improved. This method is not only fast and simple; there is no so-called multi-axis correction technology in many five-axis machine systems, and the existing tool-tool calibration methods mostly use interferometers. For the correction, not only is the installation complicated, but also the five-axis simultaneous measurement, and the existing technical aspects, A:t:ated Prec isi 〇n ! nc existing multi-axis measurement system is low precision and expensive 'and Only linear axis measurement ' and Ag ii ent Techn. i, i and delete] bile PLC aspect 'is to set up the optical path system, resulting in waste of cost, can not do five-axis simultaneous measurement, and the current standards and norms (biliary (four)) also do not consider the five-axis movement Correction, so the present invention will utilize an optical component to form a five-axis detection system that utilizes a rapid detection of the aid machine error to provide a high-precision detection system. SUMMARY OF THE INVENTION It is an object of the present invention to provide a five-axis precision detecting device for a non-contact, high-resolution 201008697 testing machine tool. The invention relates to a five-axis machine tool detecting device, which comprises: a sensing body, the sensing body is tied to the king machine and controlled by the worker = axis, and the system has a plurality of different The sensing element of the tilting angle is also formed by a clamping collar array, wherein the sensing component is at least provided with a first sensing component, a second sensing component, and a third sensing component. The second sensing element and the third sensing element are disposed on both sides of the first sensing element and at an oblique angle to the first sensing element; a light source unit carried on a working platform of the visor machine, comprising a light source, and a rotating device for providing relative rotation of the light source in a first direction of the sensing body, and providing the light source connecting the rotating device in a second direction of the sensing body Rotating Rotary Motor 0 [Embodiment] Please refer to FIG. 6 and FIG. 6 , the five-axis guard machine tearing device provided by the present invention mainly includes a sensing main body with a coupled machine tool spindle 41, and Placed around the sensing body 1 The light source unit 2 rotates around the sensing body 1 with a radius of the light source unit 2, so that the sensing body 1 detects the optical signal, and then the error signal of the two-dimensional or three-dimensional displacement of the five axes of the machine tool can be inferred. As shown in FIG. 4 and FIG. 6, the five-axis machine tool detection provided by the present invention includes a sensing body 1 for controlling the rotation of the machine tool spindle 41, and 201008697 is placed around the sensing body 1. The light source unit 2 is incident on the sensing body 1 by using the light source unit 2 and is rotated around the sensing body i and the sensing body 1 so that the sensing body 1 detects the light signal, and then the machine tool can be inferred. Five-axis error signal for two- or three-dimensional displacement. As shown in FIG. 2, the sensing body 1 is coupled to the machine tool spindle 4丨 and is controlled to rotate by the machine tool spindle 41. The sensing body 1 is provided with a plurality of sensing elements at different inclination angles, and the sensing element is also The clamping shaft 12 is formed in a ring array, wherein the sensing element has at least a plurality of first sensing elements (1), a plurality of second sensing elements (1), and a third number of sensing elements 13, the first sensing element The #lu system and the lost axis 12 are parallel to each other', and then the plurality of second sensing elements 112 and the plurality of third sensing elements 113 are respectively disposed on the longitudinal sides of the first sensing element and the first The sensing element 111 is disposed at an oblique angle shape; the light source unit 2 is mounted on the working platform 42 of the machine tool as shown in FIG. 6, and is provided with the light source 2 and provides the light source 21 along the sensing body 1 a first direction opposite to the rotating rotating device 22, and a rotating electric machine 23 for providing the light source 21 to rotate the rotating device 22 in the second direction of the sensing body 1; wherein the light source 21 is a laser light source, the light source unit 2 The rotating motor 23 is disposed on the working platform 42 to make the light source 21 and the rotation|setting 22 are driven by the rotary electric machine 23 to swing a predetermined swing angle and a predetermined swing frequency with respect to the second direction by a swing center. In order to further illustrate the present invention, please refer to FIG. 3 again, which is a sensing body 1 according to another embodiment of the present invention, wherein the sensing main body is composed of three or more sensing elements to form a polyhedron (PQlyhed·) or a convex polyhedron ( The coffee vexpQlyhedrQn), the plurality of sensing elements can be arranged horizontally or vertically, and the equiangular average sentence is distributed on the outer surface of the sensing body 1, and the horizontal arrangement angle can be equal to the longitudinal arrangement angle, or is not equal to the longitudinal arrangement angle. The following is a step-by-step description of the arrangement of the sensing elements, wherein the sensing elements in the basin comprise at least a first sensing element lu, a second sensing element ι2, and a third sensing element 113; Two sensing elements ιΐ2
❹ 以及該第三感測元件113則分設於該第—感測元件⑴上下兩 惻且與該第一感測元件1丨1間— 傾斜角度型態設置，如此以 構成一多面體態樣的感測主體1。 又如圖四與圖五所示，該感測主體i更連結有—驅動们 3,該驅«置3係連結於該工具機主軸41上，因為該驅動身 置3包括有一馬達3卜得以驅動該感测主體i產生定量角度4 擺動’ §亥馬達31亦轉動感測主體1產 _ 肢1產生疋量角度的轉動，如此 當感測主體1在該驅動裝置3之 軔之下，得以一擺動中心 進行預定擺動角度之擺動；當感測主體i成 又。亥馬達31驅動而$ 角度轉動時，該光源單元2亦受旋轉梦 又妖轉凌置22驅動，使其光源2 輸出之光訊號可隨著該感測主體1 — 菔1之轉動角度而垂直入射於| 測元件，如圖十一所示；當感測主體 1又S亥驅動裝置3驅動布 有角度轉動時’該光源單元2亦受旌 刀又方疋轉裝置22與旋轉電機2 201008697 驅動’使其光源21輸出之光訊號可隨著該感測主體“轉動與 擺動角度而垂直入射於感測元件，如圖十四與圖十六所示。、 當感測主體1配合失治具（或驅動裝^ 3)架設於工具機主 軸41時’則該感測主體i為固定端，而承載在工具機其工作平 台42上的光源單元2為移動端，一開始將光源單元2其光源u 所發射之光束來入射於感測主體i的感測元件上，以進行五轴 加工模擬，如圖七所示，最後由感測主體1的感測元件檢測工 〇 具機五軸位移時所產生誤差之結果。 本發明應用於五軸工具機檢測其誤差時，其感測主體i與 光源單元2之架設定位步驟如下： 由感測主體1透過夹治具（或驅動裝置3)架設固定於工具 機主軸41 ; 光源單元2架設於工作平台42上； 將光源單元2之光束調整校正於可垂直入射於感測主體丄 © 之感測元件（如：第一感測元件1 1 1 )上； 凋整光束入射位置，使之能垂直入射於感測元件（如：第一 感測元件111)之原點位置； 設定光束入射之第一面感測元件為起始點； 執行預設之檢測路徑，開始作動。 接續，如圖二與圖八所示，本發明一種五軸工具機檢測裝 置具有二線性軸與一轉軸之檢測，為提供χ軸及γ軸之二線性 201008697 軸和旋轉裝s 22之垂直軸221以第—方向的檢測路徑其靜態 (感測主體1透過央治具架設固定於卫具機主軸⑴量測方式的 步驟如下：將光源單元2之光束入射於感測主體ι(工具機主轴 41不轉動）的第一面第一感測元件iu，旋轉裝i Μ之垂直輛 ⑵以第-方向轉動絲2卜該光源單元2並以—半徑距離於 感測主體1周圍轉動（X軸、Y軸二線性軸相互移動）’提供光束 入射複數排列第一感測元件111(第一面、第二面第三面第 〇 四面、弟五面、第六面、第一面第一感測元件），使該複數第— 感測元件111亦將光束入射位置轉換成輸出訊號。 次，如圖二、圖八與圖九所示，本發明一種五軸工具機檢 測裝置具有三線性軸與—轉轴之檢測，為提供χ軸、γ軸及Ζ轴 之三線性軸和旋轉裝置22之垂直軸221 w第—方向的檢測路 徑，其静態（感測主體i透過夾治具架設固定於工具機主軸ο 量測方式的步驟如下：將光源單S 2之光束人射於感測主體 Ο 1(工具機主軸41不轉動）的第一面第一感測元件111，旋轉袅置 22之垂直軸221以第一方向轉動光源21，該光源單元2並以一 半徑距離於感測主體1周圍轉動^軸、γ軸二線性軸相互移 動），如圖八所示，同時工具機主軸41連同感測主體丨做上下 往復移動（Z軸線性軸上下移動），如圖九a與圖九B所示，驅使 光束入射複數排列第一感測元件U1(第一面、第二面第三面、 第四面、第五面、第六面、第一面第一感測元件），使該複數第 201008697 一感測元件1U亦將光束入射位 置轉換成輸出訊號。The third sensing element 113 is disposed on the upper and lower sides of the first sensing element (1) and is disposed between the first sensing element and the first sensing element 1丨1, so as to form a polyhedral state. Sensing body 1. As shown in FIG. 4 and FIG. 5, the sensing body i is further coupled with a driver 3, which is coupled to the machine tool spindle 41, because the driving body 3 includes a motor 3 Driving the sensing body i to generate a quantitative angle 4 swings § The motor 31 also rotates the sensing body 1 to produce a rotation of the limb 1 so that the sensing body 1 is below the driving device 3 A swing center performs a swing of a predetermined swing angle; when the body i is sensed again. When the motor 31 is driven and the angle is rotated, the light source unit 2 is also driven by the rotating dream and the detent 22, so that the light signal output from the light source 2 can be perpendicular to the rotation angle of the sensing body 1 - 菔1. Incident on the measuring element, as shown in Figure 11; when the sensing body 1 and the driving device 3 drive the cloth to rotate angularly, the light source unit 2 is also driven by the boring tool and the rotating device 22 and the rotating motor 2 201008697 'The optical signal outputted by the light source 21 can be perpendicularly incident on the sensing element along with the rotation and the swing angle of the sensing body, as shown in FIG. 14 and FIG. 16. When the sensing body 1 cooperates with the fixture When the (or the driving device 3) is mounted on the machine tool spindle 41, the sensing body i is a fixed end, and the light source unit 2 carried on the working platform 42 of the machine tool is a moving end, and the light source unit 2 is initially The light beam emitted by the light source u is incident on the sensing element of the sensing body i for five-axis machining simulation, as shown in FIG. 7, and finally, the sensing element of the sensing body 1 detects the five-axis displacement of the tool. The result of the error produced by the time. The invention is applied to five axes When the machine detects the error, the step of setting the sensing body i and the light source unit 2 is as follows: The sensing body 1 is erected and fixed to the machine tool spindle 41 through the fixture (or the driving device 3); the light source unit 2 is erected on Working on the working platform 42; correcting the beam adjustment of the light source unit 2 to a sensing element (eg, the first sensing element 1 1 1 ) that can be perpendicularly incident on the sensing body 丄©; Normally incident on the origin of the sensing element (eg, the first sensing element 111); setting the first surface sensing element of the incident light beam as the starting point; performing the preset detection path, starting to operate. As shown in FIG. 8 , a five-axis machine tool detecting device of the present invention has a detection of a linear axis and a rotating shaft, and provides a linear axis of the 201008697 axis and the vertical axis 221 of the rotating device s 22 to provide the first axis and the γ axis. The detection path of the direction is static (the step of measuring the main body 1 through the central fixture is fixed to the main shaft of the guard machine (1). The following steps are performed: the light beam of the light source unit 2 is incident on the sensing body ι (the machine tool spindle 41 does not rotate) First side a sensing element iu, rotating the vertical vehicle (2) to rotate the wire 2 in the first direction and rotating the circumference of the sensing body 1 with a radius distance (the X-axis and the Y-axis linear axis move with each other) 'providing that the light beam is incident on the plurality of first sensing elements 111 (the first surface, the second surface, the third surface, the fourth surface, the fifth surface, the sixth surface, the first surface of the first sensing element), such that the plurality The sensing element 111 also converts the incident position of the light beam into an output signal. Secondly, as shown in FIG. 2, FIG. 8 and FIG. 9, the five-axis machine tool detecting device of the present invention has a detection of a trilinear axis and a rotating shaft, Providing a detection path of the third axis of the χ axis, the γ axis and the Ζ axis, and the vertical axis 221 w of the rotating device 22, the static direction (the sensing body i is fixed to the machine tool spindle through the clamping fixture ο. The steps are as follows: the light beam of the light source single S 2 is incident on the first surface first sensing element 111 of the sensing body Ο 1 (the machine tool spindle 41 does not rotate), and the vertical axis 221 of the rotating device 22 is in the first direction Rotating the light source 21, the light source unit 2 is at a radial distance from the sensing body 1 The rotation axis ^ axis and the γ axis two linear axes move relative to each other, as shown in FIG. 8 , at the same time, the machine tool spindle 41 and the sensing body 丨 reciprocate up and down (Z axis axis moves up and down), as shown in FIG. 9 a and FIG. As shown in B, the light beam is incident on the plurality of first sensing elements U1 (the first surface, the second surface, the third surface, the fourth surface, the fifth surface, the sixth surface, and the first surface of the first sensing element). The complex element 201008697 a sensing element 1U also converts the beam incident position into an output signal.
主體1周圍轉動（X軸、 I測元件111 ’旋轉裴置22之垂直軸221 ，β玄光源單元2並以一半徑距離於感測 Υ軸二線性軸相互移動），如圖八所示， 同時工具機主軸41連同感測主體1做上下往復移動（ζ軸線性軸 上下移動，工具機主軸41視需求水平前後移動），如圖十八與 圖十Β所示，而旋轉電機23之水平軸231以第二方向同步帶動 光源21與旋轉裝置22之垂直軸221以第一方向進行預定擺動 G 角度及預定擺動頻率之擺動（旋轉電機的擺動中心以第二方向 轉動）’驅使光束入射複數排列第一感測元件丨丨1、第二感測元 件112以及第三感測元件113(第一面第一、第二以及第三感測 元件；第二面第一、第二以及第三感測元件；第三面…；第四 面·..；第五面…；第六面…；第一面第一、第二以及第三感測 元件）’使該複數感測元件亦將光束入射位置轉換成輸出訊號。 又如圖三、圖七與圖十一所示，本發明具有二線性軸與〆 11 201008697 Μ 轉輛之檢測’為提供Χ軸及γ抽之二線性軸和旋轉MM之垂 直輕221以第-方向的檢測路徑，其其動態(感測主體}透過驅 動裝置3架設固定於工具機主轴41)量測方式的步驟如下··將光 、'、單元2之光束人射於感測主體^的第—感測元件⑴，驅動裝 置3的馬達31轉動感測主體丨，旋轉裝置22之垂直軸22丨以第 一方向轉動光源2卜該光源單元2以—半徑距離人射於感測主 體1並同步於感測主體丨翻與感測主體丨轉動（χ軸、γ轴二 Ο 線性軸相互移動)’如圖十-所示’使該第-感測元件111亦將 光束入射位置轉換成輸出訊號。The body 1 rotates around (the X-axis, the I-measuring element 111' rotates the vertical axis 221 of the device 22, and the β-light source unit 2 moves relative to each other with a radius distance from the sensing axis, as shown in FIG. At the same time, the machine tool spindle 41 is moved up and down together with the sensing body 1 (the axis axis moves up and down, the machine tool spindle 41 moves back and forth according to the required level), as shown in FIG. 18 and FIG. 10, and the level of the rotating motor 23 The shaft 231 synchronously drives the light source 21 and the vertical axis 221 of the rotating device 22 in the second direction to perform a predetermined swing G angle and a predetermined swing frequency swing in the first direction (the swing center of the rotating electrical machine rotates in the second direction) to drive the light beam into the plurality Arranging the first sensing element 丨丨1, the second sensing element 112, and the third sensing element 113 (first surface first, second, and third sensing elements; second surface first, second, and third Sensing element; third side...; fourth side ·..; fifth side...; sixth side...; first side first, second and third sensing elements) 'make the complex sensing element also The incident position of the beam is converted into an output signal. As shown in FIG. 3, FIG. 7 and FIG. 11 , the present invention has a linear axis and a 〆11 201008697 Μ rotation of the vehicle's detection for the Χ axis and the γ pumping of the two linear axes and the rotation of the MM vertical light 221 The direction of the detection path of the direction (the sensing body} is fixed to the machine tool spindle 41 via the driving device 3) is as follows: · The light, ', and the beam of the unit 2 are incident on the sensing body^ The first sensing element (1), the motor 31 of the driving device 3 rotates the sensing body 丨, and the vertical axis 22 of the rotating device 22 rotates the light source 2 in the first direction. The light source unit 2 is irradiated to the sensing body by a radius distance 1 and synchronized with the sensing body flipping and sensing the subject 丨 rotation (the χ axis, the γ axis and the 线性 axis linear axis move each other) 'as shown in FIG. 10' to make the first sensing element 111 also convert the beam incident position Into the output signal.
再如圖三、圖七、圖十一與圖十二所示，本發明具有三線 性軸與-轉軸之檢測’為提供乂軸、γ軸及ζ軸之三線性軸和旋 轉裝置22之垂直車由221卩第一方向的檢測路徑，其其動態（感 測主體1透過驅動裝置3架設固定於工具機主軸41)量測方式的 步称如下.將光源單元2之光束入射於感測主體i的第一感測 Ο 元件111，驅動震置3的馬達31轉動感測主體1，旋轉裝置2 2 之垂直軸221以第一方向轉動光源21，該光源單元2以一半徑 距離入射於感測主體1並同步於感測主體i周圍與感測主體i 轉動（X軸、γ軸二線性軸相互移動），同時工具機主軸41連同 感測主體1做上下往復移動（z軸線性軸上下移動），如圖十二A 與圖十二B所不，使該第一感測元件丨丨丨亦將光束入射位置轉 換成輸出訊號。 12 201008697 ❹ ❹ 如圖三、圖七、圖十-與圖十三所示，本發明具有三線性 軸與二轉軸之檢測，為提軸及U之三線性軸、旋轉 裝置22之垂直軸221以第一方向和工作平台42上旋轉電機μ 之水平軸231以第二方向的檢測路徑，其動態（感測主體^透過 驅動裝置3架設固定於工具機主轴41)量測方式的步驟如下：將 光源單元2之光束入射於感測主體μ第—感測元件⑴驅動 裝置3的馬達31轉動感測主體}，旋轉裝置22之垂直轴⑵ 以第一方向轉動光源21，該光源單元2以―半徑距離入射於感 測主體1並同步於感測主體丨周圍與感測主體丨轉動α轴Υ 轴二線性軸相互移動），同時卫具機絲4ι連同感測主體丄做 上下往復移動（z軸線性軸上下移動，工具機主轴4ι視需求水平 移扪，而旋轉電機23之水平軸231以第二方向同步帶動光源 ㈣旋轉裝置22之垂直軸221以第一方向進行預定擺動角度及 預定擺動頻率之擺動（旋轉電機的擺動中心以第二方向轉動）， 驅使光束入射第一感測元件⑴、第二感測元件112以及第三感 測元件113,如圖十三八與圖十1所示，使該複數感測元件亦 將光束入射位置轉換成輸出訊號。 最後，如圖三、圖十四至圖十七所示，本發明具有三線性 轴與二轉軸之檢測，為提Η軸、γ軸及4之三線性軸、驅動 裝置3之水平轴231以第二方向和工作平台42上旋轉電機Μ 之水平軸231以第二方向的檢測路徑，其其動態（感測主體1透 13 201008697 過驅動裝置3架設固定於工具機主軸41)量測方式的步驟如 下：將光源單元2之光東入射於感測主體丨的第一感測元件 111，驅動裝置3的馬達31轉動感測主體J，旋轉裝置22之垂 直軸221以第一方向轉動光源21，該光源單元2以一半徑距離 入射於感測主體1並同步於㈣主體丨㈣與感縣體i轉動 (X軸、Y軸二線性軸相互移動）’同時驅動裝置3帶動感測主體 1進行預定擺動角度及預定擺動頻率之擺動（驅動裝置的擺動中a 〇 心以第二方向轉動），而旋轉電機23之水平軸231以第二方向 同步帶動光源21與旋轉裝置22之垂直軸221以第—方向進行 預定擺動角度及預定擺動頻率之擺動（旋轉電機的擺動中心以 第二方向轉動），驅使光束入射第一感測元件m，使該第—感 測元件111亦將光束入射位置轉換成輸出訊號。 I由上述，本發明所設計一種五軸檢測系統，利用感測主 體1的感測元件，不但與光學系統相同皆具備了高解析度、非 © 接觸式的優點’更有別與傳統的檢測方式，具有架設方便成 本較低且可同時進行五軸檢測之實質效益。 本發明能同時檢測工具機的五軸精度，適用於各種工具機 上做杈測，並且與傳統干涉儀檢測技術一樣，具有非接觸式、 呵解析度的特點’而有別以往此系統所需成本低、架設方便， 下列為五軸檢測系統的規格·· 1.、’泉拴疋位重複精度：±1" m(±3 σ)、線性定位系統不確定 201008697 度：±3 // m。 2. 角度定位重複精度：±1 arcsec(±3cj)、肖度定位系統 不確定度：±3 arcsec。 3. 可依工具機之規格而有所不同，量測範圍可達工具機工 作範圍。 上列洋、.·田《兒明係針對本發明之一可行實施例之具體說明， 惟該實施例並非用以限制本發明之專利範圍，凡未脫離本發明 〇 肋精相為之等效實施或變更，均應包含於本案之專利範圍 中。 綜上所述，本案不但在空間型態上確屬創新’並能較習用 物印增進上述多項功效，應已充分符合新顆性及進步性之法定 七月專利要件’爰依法提出巾請，料f局核准本件發明專 利申請案，以勵發明，至感德便。 【圖式簡單說明】 ® ®—為本發明—種五軸卫具機檢測裝置第-實施例之立體 示意圖； 圖二為該感測主體第一實施例之立體示意圖； 圖三為該感測主體第二實施例之立體示意圖； 圖四為本發明—種五軸工具機檢測農置第二實施例之立體 示意圖； 圖五為該驅動裝置之立體示意圖； 15 201008697 圖六為該光源單元之立體示意圖； 圖七為圖四其光源單元的光束入射於感測主體之立體示意 圖； 圖八為該二線性軸與一轉軸之檢測示意圖； 圖九、圖九A及圖九B為該三線性軸與一轉軸之檢測示意 圖； 圖十、圖十A及圖十B為該三線性軸與二轉軸之檢測示意 Φ 圖； 圖十一為第二實施例該二線性軸與一轉軸之檢測示意流程 圖； 圖十二、圖十二八及圖十二B為第二實施例該三線性軸與 —轉軸之檢測示意圖； S十—圖十二Α及圖十二Β為第二實施例該三線性軸與 二轉轴之檢測之示意圖； S十四至圖十六為苐二貫施例該三線性軸與二轉軸之檢測 示意圖； 圖十七為第二實施例該三線性軸與二轉軸之檢測流程示意 圖。 【主要元件符號說明】 1感測主體 111第一感測元件 16 201008697 第二感測元件 第三感測元件 夾持軸 光源單元 光源 ❹ 旋轉裝置 垂直軸 旋轉電機 水平轴 驅動裝置 馬達 工具機主軸 工作平台Further, as shown in FIG. 3, FIG. 7, FIG. 11 and FIG. 12, the present invention has the detection of the three linear axes and the rotating shafts as the vertical axis of the 乂, γ and ζ axes and the vertical of the rotating device 22. The step of measuring the 221卩 first direction of the vehicle, and the dynamics thereof (the sensing body 1 is erected and fixed to the machine tool spindle 41 via the driving device 3) is as follows. The light beam of the light source unit 2 is incident on the sensing body. The first sensing 元件 element 111 of i, the motor 31 driving the oscillating 3 rotates the sensing body 1, and the vertical axis 221 of the rotating device 2 2 rotates the light source 21 in a first direction, the light source unit 2 being incident at a radial distance The main body 1 is measured and synchronized with the sensing body i around the sensing body i (the X-axis and the γ-axis linear axis move relative to each other), and the machine tool spindle 41 is moved up and down together with the sensing body 1 (the z-axis axis is up and down) Moving), as shown in FIG. 12A and FIG. 12B, the first sensing element 丨丨丨 also converts the beam incident position into an output signal. 12 201008697 ❹ ❹ As shown in Fig. 3, Fig. 7, Fig. 10 and Fig. 13, the present invention has the detection of a trilinear axis and a two-axis, and is a linear axis of the lifting shaft and U, and a vertical axis 221 of the rotating device 22. In the first direction and the detection axis of the second axis 231 of the horizontal axis 231 of the rotating motor μ in the first direction and the working platform 42, the dynamic (the sensing body is erected and fixed to the machine tool spindle 41 through the driving device 3) is measured as follows: The light beam of the light source unit 2 is incident on the motor 31 of the sensing body μ-sensing element (1) driving device 3, and the vertical axis (2) of the rotating device 22 rotates the light source 21 in a first direction, the light source unit 2 The radius distance is incident on the sensing body 1 and is synchronized with the sensing body 与 around the sensing body 丨 rotation α axis Υ axis and the two linear axes move relative to each other), while the guard wire 4 ι is moved up and down together with the sensing body ( ( The z-axis linear axis moves up and down, the machine tool spindle 4 is moved horizontally according to the demand, and the horizontal axis 231 of the rotary motor 23 synchronously drives the light source in the second direction. (4) The vertical axis 221 of the rotating device 22 performs the predetermined swing angle in the first direction. The swing of the predetermined swing frequency (the swing center of the rotating electrical machine rotates in the second direction) drives the light beam into the first sensing element (1), the second sensing element 112, and the third sensing element 113, as shown in FIG. As shown in Fig. 1, the complex sensing element also converts the incident position of the light beam into an output signal. Finally, as shown in Fig. 3 and Fig. 14 to Fig. 17, the present invention has the detection of the trilinear axis and the second rotating shaft, The x-axis, the γ-axis, and the three-axis linear axis, the horizontal axis 231 of the driving device 3, and the second axis in the second direction and the horizontal axis 231 of the rotating motor Μ on the working platform 42 are dynamic (sensing body) 1 through 13 201008697 The driving device 3 is mounted on the machine tool spindle 41). The measuring method is as follows: the light of the light source unit 2 is incident on the first sensing element 111 of the sensing body ,, and the motor 31 of the driving device 3 Rotating the sensing body J, the vertical axis 221 of the rotating device 22 rotates the light source 21 in a first direction, and the light source unit 2 is incident on the sensing body 1 at a radial distance and synchronized with (4) the main body (4) and the sensing body i (X) Axis, Y-axis, two-axis phase Moving] the simultaneous driving device 3 drives the sensing body 1 to perform a predetermined swing angle and a swing of a predetermined swing frequency (a center of rotation of the driving device is rotated in the second direction), and the horizontal axis 231 of the rotary electric machine 23 is in the second direction. Synchronously driving the light source 21 and the vertical axis 221 of the rotating device 22 to perform a predetermined swing angle and a swing of a predetermined swing frequency in the first direction (the swing center of the rotating electrical machine rotates in the second direction) to drive the light beam into the first sensing element m, so that the light beam is incident on the first sensing element m The first sensing element 111 also converts the incident position of the light beam into an output signal. From the above, the present invention designs a five-axis detecting system that utilizes the sensing element of the sensing body 1 to have a high height similar to that of the optical system. The advantages of resolution and non-contact type are more different from traditional detection methods, and have the advantages of low cost of erection and low cost and simultaneous five-axis detection. The invention can simultaneously detect the five-axis precision of the machine tool, is suitable for testing on various machine tools, and has the same characteristics of non-contact type and resolution as the traditional interferometer detection technology', and is different from the previous system. Low cost and easy to set up, the following are the specifications of the five-axis detection system·· 1., 'Spring position repeatability: ±1" m(±3 σ), linear positioning system uncertainty 201008697 Degree: ±3 // m . 2. Angle positioning repeatability: ±1 arcsec (±3cj), Xiaodu positioning system Uncertainty: ±3 arcsec. 3. It can be different according to the specifications of the machine tool, and the measurement range can reach the working range of the machine tool. The above is a description of a possible embodiment of the present invention, but the embodiment is not intended to limit the scope of the patent of the present invention, and the equivalent of the ribbed phase is not deviated from the present invention. Implementation or change shall be included in the scope of the patent in this case. In summary, this case is not only innovative in terms of space type, but can enhance the above-mentioned multiple functions compared with the customary printing. It should have fully complied with the statutory July patent requirements for new and progressive nature. It is expected that the invention patent application will be approved by the bureau, so as to invent the invention. BRIEF DESCRIPTION OF THE DRAWINGS FIG. 2 is a perspective view of a first embodiment of the sensing body; FIG. 3 is a perspective view of the first embodiment of the sensing body; FIG. 4 is a perspective view of a second embodiment of a fifth-axis machine tool for detecting agricultural equipment; FIG. 5 is a perspective view of the driving device; 15 201008697 FIG. 6 is a light source unit Figure 7 is a perspective view of the light source unit of the light source unit incident on the sensing body; Figure 8 is a schematic diagram of the detection of the two linear axes and a rotating shaft; Figure 9, Figure 9A and Figure 9B are the three-linear Schematic diagram of the detection of the shaft and the shaft; Fig. 10, Fig. 10A and Fig. 10B are schematic diagrams of the detection of the trilinear axis and the second axis; Fig. 11 is a schematic diagram of the detection of the two linear axes and a rotating shaft of the second embodiment FIG. 12, FIG. 12, and FIG. 12B are schematic diagrams of the detection of the trilinear axis and the rotating shaft of the second embodiment; S10-FIG. 12Α and FIG. 12Β are the second embodiment. Trilinear axis and two reels A schematic view of the detection; S fourteen to sixteen penetration is Ti detected two embodiments of the three linear axes and two rotary shaft of a schematic diagram; Figure XVII is a second embodiment of the three linear axes and two rotary shaft of detecting a schematic flow of FIG. [Main component symbol description] 1 sensing body 111 first sensing element 16 201008697 second sensing element third sensing element clamping axis light source unit light source 旋转 rotating device vertical axis rotating motor horizontal axis driving device motor tool machine spindle working platform