TW201000380A - Electronic component handling apparatus, electronic component test apparatus and electronic component holding tray - Google Patents

Abstract

An electronic component handling apparatus comprises a pitch change mechanism (260A) for changing a pitch between plates (81-84) in a contact plate (8), wherein each of the plates has a retaining hole (89) provided thereto.

Description

201000380 5 0 0~Removal unit; 51 〇~ carry-out device; 520~2nd tray transfer device. The chemical formula that best shows the characteristics of the invention: 5. If there is a chemical formula in this case, please disclose the benefits*, VI, and the description of the invention: [Technical field of the invention] The present invention relates to the ability to process the For example, an electronic component of a semiconductor integrated circuit (hereinafter referred to as "W yr M ^ iin. ^ two components") is used to carry out the electronic component transporting device for performing the test. An electronic component measuring device and a holding tray capable of holding the electronic component. [Prior Art]

In the manufacturing process of the component, an electronic (four) test device is used to test the performance or function of the IC component in the packaged state. ―The hamner constituting the electronic component testing device transfers the 1C and the two pieces from the client tray to the test tray, and carries the test tray to the state where the '纟iC兀' on the H-type head is carried on the test tray. Next, press the 1C component to the socket provided in the test head. In this state, a tester constituting the electronic component test device performs IC component = test through the test head. When the test is over, the processor classifies the ic components based on the test results and moves them from the test tray to the guest tray again. 2247-l〇44i-PF; Alicewu 201000380 Furthermore, each end tray is a tray that is fixed, 丨 4 a ★, 1, 勹 纳 刖 test or ic component after testing. I before the test (3 components, mountain,

In the case of carrying the %% pallet, the previous program is sent to handle the crying, 攸^- and the 1C component after the test is carried in the passenger tray, from the 泠; Go to the next program. On the other hand, the test tray is a dedicated tray that is circulated and transported in the processing state of the chop. SUMMARY OF THE INVENTION Problem to be Solved by the Invention It takes time to move the ic member between the test tray and the test tray with the = device. By changing the pick and place operation to directly shift the "displacement method", it is possible to shorten the shift operation. Alternatively, when the Ic element is displaced between the test tray and the test tray, the spacing between the I C TL members is not changed, and the pick-and-place device can be simplified. The interval between the storage sections of Ren's guest tray is relatively narrow. Therefore, for example, in the case of processing using its bucket g 4 % breakage test... Sometimes it is not possible to sufficiently ensure the space necessary for wiring around the socket on the head. The problem to be solved by this month is to provide electronic, 70-piece storage, electronic S-testing devices, and electronic 7-liter holding trays that ensure sufficient wiring space on the test head. The means for solving the problem is clear, and an electronic component transporting device is provided, which is capable of manipulating the electronic component transporting device of the holding tray of the π and the electronic 兀*, and changing the interval, and changing the holding. The tray has a plurality of holding portions 2247-10441-PF; Alicewu 201000380, at least a part of which holds the first item). The interval between them (see the scope of the patent application. Although the above-mentioned invention is not particularly limited to the plurality of holding portions, it is preferable to do so: it is the second item). In the above invention, the device is not limited, and it is preferable to change the plurality of holding portions to the second two in the device: the interval is changed, and the holding portion is wounded by the holding portion. In the guest tray of the piece transporting device, the electronic component is placed in or out of the electronic unit, or 'the contact portion in the test head: the integer range of the interval between the pieces is the third item). The same is true (see the application in the above-mentioned invention, and the device is not particularly limited, and the change is made by the special feature, and the interval is changed by at least a part of the number of the fixed holding groups. Group knife does not constitute a multiple of the range of interest 4). , and the interval (see the application is not specifically limited in the above invention), but the group is independent of each other and can be fine-acting ^. The plural holds each, the brother TD patent scope item 5). In the above invention, the present invention is not particularly limited, and the apparatus is further configured to change the plurality of holding groups. The interval between the holding groups of at least a part of the group is changed such that the holding portion 曰' is disposed. The interval between the integers ν or ' between the 7" pieces in the passenger tray that enters and exits the electronic component transport device is the same as the interval between the contacts and the contact head in the test head (see the application of Qiu + net & π - contact 邛) (see application) Article 6 of the patent scope). Ding 3 search in the above invention does not identify the other is not limited, but this is better: the holding bracket 2247-l 〇 441-PF; Alicewu 5 201000380 disk directly receives the electronic item 7 from the passenger tray) . 〃 凊 凊 凊 凊 凊 依据 依据 依据 依据 依据 依据 依据 依据 依据 依据 依据 依据 依据 依据 依据 依据 依据 依据 凊 依据 凊 凊 凊 凊 凊 凊 凊 凊 凊 凊 凊 凊 凊 凊 凊 凊 凊 凊 凊 凊 凊 凊 凊 凊 凊 凊And when testing the electrical connection portion of the test head, the tested electronic element is moved to the device, and the ^ ^ J 接触 接触 contact portion (refer to the third item of the 中 軎 軎 patent scope).匕见A "Month is not particularly limited in the above invention, 鈇^ pw . ? ^ ...' is preferable: the interval becomes π ^ Deng, widening the interval between the holding portions, so that the holding portion j配 The arrangement of the contact portion is corresponding to the space on the test head corresponding to the space between the holder of the library and the space between the holders in the holding tray, and is disposed in the space around the contact portion corresponding to the space between the holders The wiring, the electronic component mounted around the contact portion, or at least one of the position determining means for determining the position of the contact portion of the holding portion (see the ninth application of the patent application). According to the present invention, there is provided an electronic component transporting device capable of steering a holding tray having a plurality of holding portions capable of holding electronic components, comprising: a housing portion having a receiving portion for accommodating the electronic component The electronic component is evacuated and displaced to the holding portion of the holding tray (see item 10 of the patent application scope). In the above invention, it is not particularly limited, but it is preferable that the plurality of holding portions or the plurality of holding groups respectively constituted by the specific number of the holding portions are independent of each other and can be finely moved (see the patent application scope item u) ). 2247-l〇441-PF; Alicewu 6 201000380 • The above invention is not particularly limited, but it is preferable to further include a plurality of transport devices that carry the holding tray holding the electronic component to the opposite test head. a displacement device that evacuates and displaces the tested thunder $ + # ^ ^ 刀 knife stored in the storage device to each of the holding trays (see patent application) Scope 12). It is said that Central Asia is not particularly limited, but it is better: the storage device is a passenger tray that enters and exits the "Hai Electronics 70" transport device, and the interval between the plurality of f-holding portions is a Hummer. The number of times between the accommodating parts in the tray is (integral), (4) holding the tray, maintaining the arrangement of the electronic components = 攸 the customer tray receives the electronic component (see the patent application scope 丄d item) ). The description of the hairpin is not particularly limited. However, it is preferable that the holding device is connected to the electronic component (see application for the professional i). In the above invention, the invention is not particularly limited. X is not particularly limited, but it is preferable to include the occlusion cluster ▲ ▲ when the electronic element is planted, the "one skirt is placed on the holding tray. See patent application. Scope 15). 收纳 〃 〃 ( ( ( ( ( ( ( 依据 依据 依据 依据 依据 依据 依据 依据 依据 依据 依据 依据 依据 依据 依据 依据 依据 提供 提供 提供 提供 提供 提供 提供 提供 提供 提供 提供 提供 提供 提供 提供 提供 提供 提供 提供 提供f includes: the above-mentioned operation ^ jg . „. _ ^ the contact of the contact part of the electric contact, and the tester electrically connected with the salty head; when the transport device is tested, the tested electronic element &quot ; Article 16 of the scope of interest). The m Hai contact portion (see application 2247^l〇441-PF; Alicewu 7 201000380 is not particularly limited in the above invention, but it is preferable that the displacement tray is placed in the holding tray by the displacement t The reading pass μ + D corresponding to the work space between the tested electronic components, and the two of the upper ones are disposed to connect the wiring around the contact portion and the electronic device around the contact portion. The holding unit determines the position of the contact portion.../the at least one of the position of the mouth-to-summer position (see the patent application item No. 17). According to the present invention, an electronic component holding tray is provided, The method includes a plurality of first working holding portions that can respectively hold the electronic component to be tested, and the plurality of first holding portions are arranged at least along the first direction of the phlegm and the ;; the ith holding along the second 丨 direction The interval between the parts includes the potential, βθ _. the first interval, and the second interval different from the first interval (see the 18th item of the patent application scope). In the above invention, it is not particularly limited. And this is better: the first holding of the search at the second interval The spacing between the first holding portions arranged at the first interval is more than five times the distance between the first holding portions _ 1q... (see the patent application for the ninth item). Preferably, the mechanism includes a _μ # · 4 person k mechanism that can change the second interval, and the variable mechanism can change the second interval such that the second interval and the first door are separated. For the same (see item 20 of the patent scope) 匕见申 is not particularly limited in the above invention, 鈇..., preferably: the plural first retaining portion or a specific number of the 彳/plural number ^ is ^ m fr ^-V 1 Oral. The group of holdings is independent of each other and can be jogged (see θ 寻利干围第21). Furthermore, according to the present invention, Ray-Sub 7L pieces are provided. The transporting device, the soybean meal can handle the handling of the holding device as described above, and it is a self-contained moving device, which is 2247-l〇441-PF; Alicewu 8 201000380 .f includes the first displacement attack. The lightning in the passenger tray of the electronic component transporting device; # a few pieces of the state of the arrangement The trays are disposed between the trays and the electronic trays (see Patent Application No. 2). The invention is not particularly limited, but it is preferable that the passenger tray has the thunder. _The number of the first compartments in the plurality of storage sections of the electronic parts, the interval between the 盥兮 幵 幵 幵 /, and the 3 客 知The interval between the sb _ 10000 and the accommodating portion along the second direction of the occupant in the tray Item 23). U is the same - (see the patent application is not particularly limited in the above invention, which is preferred; the MW device has a plurality of adsorption ports for adsorbing and holding the electronic component, along the first direction 兮 κ , π square... the interval between the adsorption ports is the same as the i-th interval, and the interval between the adsorption ports along the second direction and the second direction of the one of the holding trays The interval between the first holding portions is the same as the above--(see Patent Application No. 24). "It is not particularly limited in the month of the month, but it is preferable to include: press 2:,:: the electronic component storage In the state in which the tray is held, the electronic member 70 is pressed to the contact portion (see Patent Application No. 2). The invention is not particularly limited, and the second displacement device is a good package.匕栝. The liver is placed between the holding tray and the second holding tray of the second holding portion of the plurality of strips that can hold the electronic component; the pressing device is in the Leigong & ί < The interdigitated electronic device is held in the second holding bracket 2247-l〇441-PF; Alicewu 9 201000380 状~, the next electronic component is deviled, and then 4 夕 Α ' ' 下 下 Γ 碉 碉 碉 碉 碉 碉 碉 碉 第 第 。 邛 邛 邛 邛 邛 邛 邛 邛 邛 邛 邛 邛 邛 邛The present invention provides a test device, an electronic device "type device, which is used to test the electronic component, and the transfer device: and the electronic component of the electronic component to be tested /, the electric device / The contact portion of the contact portion of the contact portion is electrically connected to the contact portion (see item 27) and the electronic component Du Layu and Ba Shou will be electrically connected to the contact portion (see item 27). According to the invention, the electronic component is provided in the state in which the electronic component is held in the state of the holding tray having a plurality of 趑4^U characters.

The next step is to test the electronic component # i* Μ XI n..., which is pressed to the contact portion of the test head for binding the test of the electronic component to be tested and the contact of the test head. The tested electronic part has direct contact with the snowman, and the 7L piece of the tested electronic device is determined to be sent to the contact part of the Shenzhu nasal brake & FI..., position determining device (see A°) In the above invention, there is no particular limitation, and the electronic disk is directly loaded from the electronic component ',,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,, The disk receives the piece (see claim 29). Effect of the Invention In the present invention, the holding 4 of the holding tray or the interval between the holding groups is changed by the 4dr ^ under-device, or by, ._ ^ The displacement device dissipates the tested electronic components and displaces them from the storage device to the solid and the tray. Therefore, the interval between the tested electronic components that are fixed in the m holding tray and the contact portions is also increased. Wide, the mouth of this 'can be used to test 2247-1044I-PF; Ali Cewu _ ^ 10 201000380 The wiring on the head has a wide space. In addition, in the present invention, the interval between the first tamping in the two holding trays is set. Therefore, it is possible to hold a portion of the shackle held in the holding tray. The width of the test electronic components is widened, so that the interval between the contact portions of the test heads is also partially widened, and the space for wiring on the head can be broadened. Further, in the present invention, the position is determined. The device is in direct contact with the K-electron 7G member held in the holding tray, so that the electronic component to be tested determines the position of the contact portion to accurately determine the position of the electronic component to be tested. [Embodiment] [First Embodiment] Fig. 1 is a schematic plan view showing the overall configuration of an electronic component testing apparatus according to a first embodiment of the present invention. In a state where a high-temperature or low-temperature temperature stress is applied to the IC element, the IC element is pressed by the processor A to the socket 61 of the test head 6, and the tester (not shown) passes the test. (6) A device for outputting a test signal to a 1C device, thereby testing (checking) whether or not the IC device is properly operated. The processor 1A of the present embodiment, as shown in Fig. 1, includes a loading unit 100 and an application unit 200A. The test unit 300A, the heat removal unit 40〇a, and the carry-out unit 500. 11 2247-l〇441-PF; Alicewu 201000380 Loading unit 100 'send the passenger tray 7 _妗 1 1 ^ ^ % from one supply to the other The stacking body 70A of the processor 1A is carried into the applying portion 2A.

It is composed of a guest body 70A < a tray in which the 1C component before the test is accommodated; The application part 2 0 0 A 'allows the IC element % μ - to be held in the guest tray 7 in a state of 'applying high or low temperature thermal stress to the lc element contact plate δ overlapping on the client tray 7 The jaws are displaced from the client tray 7 to the contact plate (holding plate) 8. Next, the client tray 7 is removed from the contact plate 8 and the contact panel 8 is carried into the test portion 3_. Then, the tray 7 taken out from the contact plate 8 is sent back to the heat removing portion 4''. The test unit 300A moves the contact plate 8 below the test head 6, and in a state where the π element is held (accommodated) in the contact plate 8, the 胄IC element is pressed to the socket 6 of the test head 6 in this state, the tester Through the test head 6, the test signal transmission between the ic component and the ic component is performed, and the test of the lc component is performed. After the end of the test of the 1C member, the contact plate 8 is carried out from the test portion to the heat removing portion 400A. In addition to the heat portion 400A, after the client tray 7 returned from the application portion 2A is overlaid on the contact plate 8, 'reverses it, and the tested IC component is displaced from the contact panel 8 to the guest. The end tray 7 removes the contact plate 8 from the passenger tray 7. After the thermal stress is removed from the κ element, the guest tray 7 is transported from the heat removing unit 4_ to the carry-out unit _. Then, the contact plate 8' removed from the passenger tray 7 is returned to the applying portion 2 〇 〇 a. Then, at the carry-out portion 5, the guest tray 7 carried out from the heat removing portion 4A is superposed on the stacked body 7??. Further, the stacked body 7 〇β is composed of 2247-1044l-PF; Alicewu 201000380. The carried-out passenger trays 7 are stacked, and the tested IC components are housed in these guest trays. The stacking body 70B of the client tray 7 is transported to a sorting-dedicated device (not shown) independent of the processor 1A by an operator or an automatic transfer device such as an ADV. The IC components are classified into corresponding test result classifications by the dedicated placement of the classification. Next, the guest tray 7 and the contact plate 8 of this embodiment will be described first. r Fig. 2 is a perspective view showing a guest tray for the electronic component testing device of Fig. 1, and Fig. 3 is a perspective view showing a contact panel for the electronic component testing device of Fig. 1, Fig. 4 Fig. 5 is a perspective view showing the unfolded state of the contact plate of Fig. 3, Fig. 5 is a rear view showing the contact plate of Fig. 3, and Fig. 6 is a cross-sectional view taken along line VI-VI of Fig. 3. As shown in Fig. 2, the client tray 7 in the present embodiment is a flat upper tray main body 71, and a plurality of concave storage pockets 72 for accommodating the ic elements are formed. In this embodiment, A total of 64 storage holes 72 Lj are arranged on the tray body 71 in 8 rows and 8 columns. In this client tray 7, the interval between the accommodation holes 72 in the Y-axis direction is p], and the interval between the accommodation holes 72 is ρ2 along the z-axis direction. On the other hand, as shown in Figs. 3 and 4, the contact plate 8 in this embodiment includes the fourth plate 81 to 84 and the shaft 85 to which the contact plate 8 is connected. The shafts 85 are respectively inserted into the insertion holes formed in the respective plates 8 and 84, and the respective plates are slid in the γ-axis direction along the axis 85. Thereby, as shown in Fig. 4, the first to fourth plates 81 to 84 can be made. The interval between the two becomes wider. Furthermore, in the contact plate 8, the mechanism for connecting the plates 8丨-84 between the movable sides 2247-1044i-PF; Alicewu 13 201000380 is not limited to (4), for example, pantagraph or linear. Slippery and so on. Using the pantograph, as shown in Fig. 5, the back sides of the plates 81 to 84 are slightly centered, and the needle-shaped cam followers 81a to 84a are provided. These J 4 -knife protrusions 81a to 84a are moved in the cam i of the ^^ changing mechanism 26A, 42A, which will be described later, whereby the third cam groove can be made... The interval between the plates 81 is widened or changed. Furthermore, in the text, the mechanism for widening or narrowing the gap between the plates 81 to 8 4 is limited to the cam mechanism, such as a cylinder. , or connect the horse phase rolling surface (four) structure, etc. As shown in Figs. 3 and 4, each of the holding units 87 is provided. (5) h 89 for holding the IC element is formed on each of the solid-state _ 4 7 4 on the solid-state _ 4 7 4 . Each IC7G# 89 is configured as 2 rows and 4 columns. Above, 8 solid points, as shown in Figure 3, +丄 by the door...! In the pattern, the interval between the first to fourth plates 8H4 in the narrowest interval is P3, and is located between the holding holes 89 in the X-direction direction. The holding hole 89 in the X-axis direction These intervals p3, 4 4 丨 丨 α 门 。 。. r , θ 〇 之 之 客 客 客 客 客 客 客 客 客 客 客 客 客 客 客 客 客 客 客 客 客 客 客 客 客 客 客 客 客 客 客 客 客 客 客 客 客 客 客 客 客 客 客 客 客 客 客 客 客 客 客 客The state and the passenger tray 7 are aligned by the arrangement of the holding holes 89 in the plate 8 in the arrangement of the holding holes 89 in the plate 8. The other aspect is as shown in Fig. 4, and the spacing of the holes is placed # When the fourth board 81-84 between the two brothers dared to limit the gap, the penetration of the g-element 87 was formed, and the axis 85 was formed between the adjacent holdings of the singularity and the eighty-eighths. )〇,χ., , ^# The interval in the Y-axis direction is widened from P3 to 加. This interval P4 is arranged in the interval between the holding pockets 89. 1010441卞This coffee u 14 201000380 S2, in intervals & It is preferable that the interval between the anchoring holes 89 is 5 times or more (S2$Six5), more preferably 10 times or more (SdSixlO). In the test, 'in the vicinity of the side of one side of each holding unit 87, The i-th position determining hole 87a for determining the position of the IC element to the socket 6 is formed. Further, in the fourth drawing, the protruding piece 87c' of the second position determining hole 87b is formed from the upper and lower sides of each holding unit 87. Projection. The second positioning hole 87b and the first positioning hole 87a, as in the test for

The position of the IC 7L piece to the socket 6丨 is determined. As shown in Fig. 4, an insertion hole 87d into which the opposing protruding piece 87c can be inserted is formed on the upper and lower side faces ' of the holding unit 87. As shown in Fig. 3, in the narrowest state, each of the protruding pieces, as shown in Fig. 6, holds the mounting member 88 of the single women's hole 86, and here, the small rear screw portion 88a of the female skirt hole 86 The outer diameter, and the head portion 87 of the female baboon element 8 8 can be hidden in the insertion hole 87d for the inter-division, and the inter-87c between the first to fourth plates 8 1 to 84, respectively. The 8 7's are attached to the respective plates 81 to 84 by being inserted into the respective plates 81 to 84. The inner diameter ' of the portion 864a is larger than the inner diameter of the large diameter portion 86b of the mounting hole 86 of the mounting member 88', and the outer diameter of 8 8 b. Therefore, the holding units 4 plates 81 to 8 4 are moved. On the other hand, the choice of materials. The outer diameter of the head portion 88b of the eighth member 8 is larger than the small diameter portion 86a of the mounting hole 86. therefore,

u, ^ ^ ^ The contact plate 8 is reversed using the inverting devices 250A, 460A, and the holding unit is detached. 87 also does not cause the retaining elements to be slightly inseparated from each other from the fourth plate 8 in the present embodiment, whereby the thermal expansion due to stress can be generated in each of the plates 8. &amp; is accompanied by the application of heat to the 1C element 2247-l 441-PF; Alicewu 201000380, followed by a detailed description of the various parts of the electronic component testing apparatus of the present embodiment. <Loading unit 1〇〇> Fig. 7 is a plan view showing the loading unit of the electronic component testing device of Fig. i. As shown in Fig. 1, the loading unit 100 includes: an i-th tray shifting device no' which is a stacking body 7〇A supplied from a previous program, a tray 7; a heart-shaped, which shifts the first _ please = a passenger tray 7Loading the application unit 2 〇〇a. As shown in Fig. 7, the first tray shifting|setting 11 〇 includes: a Y-axis rail provided along the γ-axis direction on the main base (device substrate) of the local machine 1· 111' can be moved in the Y-axis direction on the above-mentioned Y-axis rail 111; and an actuator provided at the tip end of the movable arm 112 (not necessarily a holding head 113 that can move up and down. The holding head 113) And the opening and closing type of holding claws η, "the other initial - U claws are used to hold the passenger tray 7. The younger 1 tray shifting device 11 〇, the passenger plane tray 7m of the plane - the enemy 70A Most of the best, the holding claws 114 of the mouth holding head 113 grasp and move the upper 12 on the yaw axis 111, and 7 is sent to the loading device 12n. The stalks are moved to form the stacking body. The f ^ &amp; t accommodates the IC component in the state of the customer tray t which is outputted with the terminal facing downward.

As shown in Fig. 7, A1A, ,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,, Constitute 'can

Move in the direction of the axis. The carry-in I tray shifting device 110 gantry 120' will be carried by the first passenger tray 7' to the applying portion 200.

2247-l〇441-PF; AlicewU 16 201000380 <Applying section 200A> Figs. 8 and 9 are a plan view and a front view showing an applying portion of the electronic component testing device of Fig. 1. σ, &quot;&quot; plus 卩 has a thermostatic bath for the thermal stress of the right or low temperature of the right person who is stored in the passenger tray 7 . The inside of the thermostatic chamber has a vertical conveying device as shown in Fig. 1; the first horizontal conveying device 210 is moved horizontally by moving the passenger tray 7 or the contact plate 8 by # mi I τα; the cover plate 8 is covered by the guest The end tray 'or the first loading and unloading device 220A' that removes the passenger tray 7 from the contact plate 8 is superimposed in alignment with the passenger tray 7 and the contact plate 8. The i-th reversing device 25qa that reverses this is the first interval changing mechanism 260A that widens the interval between the plates 81 to 84 in the contact plate 8. The 2 straight conveyance device can receive the passenger tray 7' from the loading device 120, and hold the guest tray 7 to count down, and sequentially lower. During the period before the test portion 300A is vacated, the passenger cup-like 7 + 1 tray 7 stands by in the application portion 200A under the bear held by the vertical conveyance device, thereby setting the Celsius to 55 degrees to the side. Thermal stress is applied to the IC component. The vertical transport device feeds the lowermost passenger tray 7 to the i-th horizontal transport device 2i〇A. Alternatively, the passenger tray 7 may be sequentially raised by the vertical conveying device. The first horizontal conveying device 21f)Ak, A is configured such that, for example, a plurality of rotating rollers driven by a motor are arranged in parallel, and the passenger tray 7 can be moved from the vertical conveying device to the first reverse drying. The device 250A moves the contact plate 8 from the first reversing device 25A to the test portion 3A. As shown in FIG. 9, the first loading and unloading device 220 includes: a γ-axis track 2247-l 441-PF disposed on the main base (device substrate) of the processor U in the γ-axis direction; Alicewu 17 201000380 221 ' Tenth, 230, and 240 that move in the direction of the γ-axis rail % 1 and the second movable head-to-(9). In addition, in Fig. 8, in order to make the #r brother 1 inverting device 250A and the returning device 27

The structure is very different. The younger brother 1 returned to the 470A 〃 里 solution, and omitted the first! Loading and unloading device 2m. Dry): 1:2: movable 帛230 '240 respectively has an actuator (a retaining head that is not moved downward, such as 241. Further, the holding head 23 has a downwardly-closed holding claw 232 And 242 for holding the passenger tray 7 or the contact plate 8. The γ-axis 221 is spanned over the returning device 2m 'i-inverting device 250A and the second returning device 47A. The second movable heads 23A and 240 are movable independently of each other by the γ-axis rails 221. In the present embodiment, the i-th movable head 23 is transported between the ith reversing device 250A and the returning device 270A. On the other hand, the second movable head 240 moves the contact plate 8 between the second reverse charging unit 25A and the second returning unit 47A. Further, the returning device 270A is constituted by, for example, a conveyor belt or the like, and can transport the passenger tray 7 removed from the contact plate 8 by the first attaching and detaching device 220A to the heat removing unit 400A. Further, the passenger tray 7 transported by the loopback device 27 is covered by the contact plate 8 by the second attaching and detaching device 430A in the heat removing portion 400A. The same applies to the first returning device 470A, for example, by a conveyor belt. The first returning device 470A can transport the client tray 7 recovered by the second attaching and detaching device 430A of the heat removing unit 400A to the applying unit 200A. The contact plate 8' returned by the first returning and detaching device 470A is covered by the first tray detaching device 220A by 2247-1 441 pp1; Ali cewu 18 201000380 is covered by the client tray 7. As shown in Figures 8 and 9, hey,

The first reversing device 250A includes: a material door A' on the main base of the processor 1A, a pair of rotations 卩2 51; and a telescopic portion 252 which is oppositely disposed on the revolving portion 251. 1 'The nip 2 4 4 which is placed at the tip end of each of the stretchable portions 252. Each of the rotating parts 2 5 1 is connected to the teeth of the swing motor and its drive shaft by a distance r~l ±*

The wheel mechanism (none of which is shown) can be used to rotate the telescopic portion 252 around the Y-axis direction. Each of the expansion and contraction portions 252 is configured by a cylinder, and is said to move the rod 253 in the Y-axis direction. The two telescopic portions 2 5 2 B? Pills λ a I Ζ are arranged such that the tips of the rods 253 are opposed to each other. Therefore, when the stretchable portion 252 is extended by the knife (1), the distance between the tips of the rods 253 is narrowed. When the stretchable portions 252 respectively give a thinner, the distance between the tips of the rods 253 becomes wider. The tip 254 of each of the rods 253 of each of the stretchable portions 252 is sturdy and sturdy. Each rod 253 is opened and closed by air pressure, etc. J is closed, and the overlapping pair can be grasped.

kJ is the passenger tray 7 and the contact plate 8. In the first reversing device 250, when the first attaching and detaching device 2m covers the contact plate 8 on the passenger tray 7 on the first horizontal conveying device 21, the crucible is rotated by 180 degrees. At this time, the arrangement of the rows of the holding pockets 89 of the contact plate 8 and the accommodating pockets 7 2 of the guest tray 7 are actually _ ^ ^ π π π, so that the storage pockets accommodated in the client tray 7 can be accommodated. The household in 72 is right-handed — J listens to the IC 7G piece and moves directly to the holding hole 89 of the contact plate 8. Furthermore, as shown in Fig. 9, in order to avoid obstructing the passenger tray 7 and the contact panel 8, it is in the first! When the reversing device 25A is reversed, the i-th horizontal carrying device 2247-10441-PF; Alicewu 201000380 can be lowered by a portion of 210A. Further, the retracting direction of the first horizontal conveying device 21A may be a horizontal direction. As shown in Fig. 8, the first interval changing mechanism 260A is constituted by a plate member in which four cam grooves 2 61 to 2 6 4 are formed. The fourth fourth cam grooves 261 to 264 correspond to the fourth and fourth cam followers 81a to 81d of the contact plate 8 shown in Fig. 5. As shown in Fig. 1, the first interval changing mechanism 260A is provided between the first inverting device 250A and the test portion 300A. Further, when the first horizontal conveying device 21 0 A moves the contact plate 8 toward the test portion 300 A, the fourth cam followers 81 a to 84 a contacting the plate , are in the first interval changing mechanism 26 〇 The first to fourth cam grooves 261 to 264 are moved to widen the interval between the Lth, fourth, and fourth plates 84 of the contact plate 8. In this application portion 200A, when the passenger tray 7 is from the vertical conveyance device to the first horizontal conveyance device 210, it is 帛! The horizontal carrying device 21 〇&quot; the client tray 7 is moved to the cymbal reversing device 25A. Next, the second movable head 24 of the i-th feeding device 220A. The contact plate 8 sent from the heat removing portion 400A on the side of the returning device is placed on the passenger tray 7. Following the 'first reversal device 250A, the 梏 梏 安 化 化 得 得 得 得 住客 住客 住客 住客 住客 住客 住客 住客 住客 住客 住客 住客 住客 住客 住客 住客 住客 住客 住客 住客 住客. By the person, all the 1C components housed in the passenger tray r are moved to the holding pockets 89 of the contact plate 8. When the first reversing device 250A is anti-Korean, the portion of the first horizontal conveying device 210A is lowered, but the reverse rotation of the Kawasaki 1 reversing device 250A is performed. The portion that has fallen has risen. Then, when the 250A is released, the contact plate 8, the contact plate 8, and the passenger tray 7 are again held on the 1st 2,247, 044i-PP; AIicewu 20 201000380 horizontal handling device 21 〇A. Following the first movable head 23 of the first loading and unloading device 罝220A, the tray 8 is brought into contact with the tray 7 by the take-up cup, and the passenger tray 7 is moved to the return 270A. The client tray 7 is transported to the heat removing unit by the returning device, and the first horizontal carrying skirt 210A is placed, and the contact portion 300A is placed. In this movement period door #n_J^H, the interval between the plates ～Qj ～8 4 in the contact plate 8 is widened by the first interval changing mechanism 260 A, and is carried in this state. The test unit 3 0 〇A. ~ <Test Unit 300A> Fig. 10 shows an upper view of the test head of the electronic component test apparatus of Fig. 1, and Fig. u shows the present invention! A schematic cross-sectional view of the contact plates and sockets in the implementation. The test portion 300A includes a test chamber for maintaining thermal stress applied to the IC element when the IC 7L member held on the contact plate 8 is pressed to the socket 61 of the test head 6. The (four) 'test head 6 # of the test chamber enters through an opening formed above the processor A1, and is provided with a Z-axis driving device (pressing device) 31 用以 for pressing the 丨c element to the socket 61 (see the u Figure). As shown in Fig. 10, the upper portion of the test head 6 is provided with a plurality of sockets 61 which face the inside of the test chamber. In the upper part of the test head 6, 64 sockets 61 are arranged in 8 rows and 8 columns. The arrangement of the arrangement of the socket 61 on the test head 6 and the holding hole 89 in the contact plate 8 which widens the space between the plates 8 by the first interval changing mechanism 26A is substantially the same. In the present embodiment, the first interval changing mechanism 260A widens the solid 2247-1044l-PF; Alicewu 21 201000380 holds the interval of _mail eight degrees between 8 and 8 9 ' The socket β1 is #; ^ y, one part, forming a relatively large space 65, which uses the surrounding wiring space as the socket 61. Further, the socket 61 may be, for example, a wiring around the music #1, a socket board (not shown) of the socket 61, and the like. In addition, the wiring on the ampule, the electronic components around the socket 61 can also be in the space 65. The sockets 1 are arranged here as shown in Fig. 11. The respective sockets 61 include: a wheel-out cover 63 which is in electrical contact with the terminal ΗΒ. Further, around the outer socket 6] for inserting and holding the contact pins 62, a position determining pin 64 for holding the holding unit and the contact plate 8 is provided. Further, although the gluten force is particularly illustrated, since the protrusions ... and the large pieces 87c are faced from the holding unit 87 to the solid portion; In the space of 70,000, the second position of the seventh and seventh positions determines the position of the hole 87b, and the needle is placed in the space 65 shown in Fig. 10. When the contact plate §; ^ Chu 1 is below, the Ι (: 搬运 handling device 21GA is transported to the test head 6 axis drive device::: is determined by the position of the pin 64 =: factory _ seat 61. At this time, the socket 61 The fixed hole 87a, the younger brother of the heart Danzhao 87, and the second position of the squat hole Wa, 87b, respectively, by ##舍1C _ The member of the socket 61 determines the position of the field iC7G piece of the wheel-in terminal (10) #杜When reading..,,,,^ When the 鳊βΗ and the contact pin 62 are in electrical contact, in this case, the tester transmits and receives the test signal through the test f&amp;, λ. ^ ^ b and the test signal of the 1C component. 'Execute the test of the IC it piece. The test result, as the barcode ^ 7 ^ ^, the identification of the owe temple is attached to the body of each client tray 7, or the data of the ^ ^ $ π μ 攸 processor Α transfer To the classification-specific device. When the test is completed, pick up

The contact plate 8 is carried out to the heat removing unit 40 〇 A while holding the tested 1C 2247-1044i-PF; Alicewu ^ 201000380 . Figs. 12A and 12B are schematic cross-sectional views showing another example of the contact plate and the socket in the first embodiment of the present invention. As shown in FIGS. 12A and 12B, the position determining hole may not be provided on the contact plate 8, and when the IC element is pressed to the socket 61, the position determining needle β 4 is abutted against the side of the holding unit 87. The position of the Ic element to the socket 61 is determined. In this case, the position determining needle 61 is disposed in the space 65 as shown in Fig. 1 . η - The first and third figures show a schematic cross-sectional view of still another example of the contact plate and the socket in the i-th embodiment of the present invention. As shown in FIGS. 1A and 13B, the position determining hole may not be provided on the contact plate 8, and when the IC element is pressed to the socket 61, the position determining pin 64 and the side of the 1C element are directly contacted. The position of the κ element to the socket 61. In this case, the surface of the contact plate 8' can be made smooth, and the IC element can be held by adsorption so that the ic element can be slightly moved on the contact plate 8' when the position is determined. Thereby, the position of the component to the socket 61 can be determined with high precision. Further, the position determining pin 64 may be an L-shaped guide that surrounds the four corners of the IC component. <The heat removal unit 400A> The heat removal unit 400A has a heat removal tank 'which is used to remove the applied thermal stress from the tested 1C element'. As shown in the figure, the inside of the heat removal tank is provided: The second horizontal conveying device 410A in which the passenger tray 7 or the contact plate 7 is horizontally moved; the 2247-10441-PF which narrows the interval between the plates 81 to 84 in the contact plate 8; Alic ewu 23 201000380 2 interval changing mechanism 420A The second loading and unloading device 380 is attached to the contact plate 8 or the contact plate 8 is removed from the passenger tray 7; and the contact plate 8 and the passenger tray 7 are overlapped and aligned. The inverted second inverting device 46A; and the vertical conveying device illustrated in Fig. 1. The second horizontal conveying device 41G "" is configured such that a plurality of rotating rollers driven by a motor are substantially parallel and (four) two rows, and the contact plate 8 can be moved from the test portion 300A to the second inverting device 46A, and The passenger tray 7 is transported from the second reversing device 460A to the vertical transport device. As shown in Fig. 1, the 帛2 interval changing mechanism 42A has the fourth cam groove 26 of the second interval changing mechanism 260A. In the case of the second horizontal conveying device 4i, the contact plate 8 is moved to the second inverting device 460A, and the interval between the fourth plates 81 to 84 of the contact plate 8 is made. The narrowing is substantially the same as the interval between the receiving pockets 72 of the passenger tray 7. As shown in Fig. 1, the second loading and unloading device 43A and the i-th loading and unloading device 220A have a γ-axis rail 431. And two movable heads 44A and 45〇. In the present embodiment, the first movable head 44〇 transports the passenger tray 7 between the second inverting device 46〇8 and the returning device 270A. The second movable head 450 conveys the contact plate 8 between the second inverting device 460A and the second returning device 47A. The second inverting device 46A and the above-described i-th inverting device 250A have a pair of turning portions, an elasticizing portion that is provided on the rotating portion, and a tip end of each of the extending and contracting portions. Clamp 2427-1041-4-PF; Alicewu 201000380 2 loading and unloading device 43 0A will carry the passenger terminal 41 0 A out of the test part 300 A to 18 degrees 'will be held on the contact plate 8 second reversal device 460A, in the tray 7After being placed on the contact plate 8 of the second level, the 1C component of the holding hole 89 which is rotated is transferred to the storage tray 8 of the passenger tray 7 in the first step. In addition, although the 4± Si| and the special picture are not, in order to avoid the interference between the passenger tray 7 and the contact plate 8, the second level is blocked, and a part of the moving device 41 0A is It can be lowered when inverted by the second inverting device 460A.

The vertical transport device ' receives the guest tray 7 from the second horizontal transport device 4m, and can hold the guest tray 7 in order to ascend. In the heat removing unit 400A, when the application unit 20 applies a high temperature to the IC element, the 1C element is cooled to room temperature by air blowing, and then the exiting unit 500 is removed. On the other hand, the applying unit 2 is applied. 〇 (^) When the IC device is subjected to a low temperature, the Ic element is heated and returned to the unloading water by the warm air or the heater, and then moved out to the carry-out unit 5. In addition, the application unit In the case where the passenger tray 7 is sequentially raised by the vertical conveyance device in the 〇〇a, the passenger tray 7 is sequentially lowered by the vertical conveyance device in the heat removal unit 400A. In the heat removal unit 400A, The second horizontal conveyance device 41Aa carries out the contact plate 8 holding the tested IC component from the test portion 300A to the heat removal portion 400A. The second horizontal conveyance device 410A moves the contact plate 8 to the second reverse Next, the first movable head 440 of the second loading and unloading device 430A covers the passenger tray 7 that is transported from the applying unit 200A by the returning device 270A on the contact plate 8. Following the second inversion The device 460A holds the contact plate 8 and the guest tray 7 and rotates it by 180 degrees. Thereby, it is held in contact The holding of the plate 8 is 2247-1044l-PF; all the Ic components of the Alicewu 25 201000380 八89 are moved to the storage hole of the passenger tray 7 at one time. The period of the reverse rotation of the device 2 is reversed, the first one Partial decline 'but when ... reverses the reverse of the farmer's cut, the score is increased. Then, when the 2nd reversal device 4_% is held, the contact panel 8 and the client tray 7 are held. On the transport device 410A, following the second movable head 45A of the 'second loading and unloading device 43A', the contact plate 8' is lowered from the passenger tray 7 and the contact plate 8 is moved to the 帛1 returning device 47A. The contact plate 8 is moved to the application unit 2_ by the 帛1 returning device 47GA. Then, the second horizontal conveying device 4m moves the passenger tray 7 to the vertical conveying device. After the passenger tray 7 is raised, the passenger tray 7 is raised. The passenger tray 7 is delivered to the carry-out unit 5〇〇. <Removing unit 500> The first carrying unit 5 includes a carrying-out unit 51 that carries the passenger tray 7 out of the heat removing unit 400A. The second tray transfer device 520 of the stack tray 7 is stacked from the carry-out device 510 to the stack 7B. The carry-out device 510 and the above-described carry-in Similarly, for example, a plurality of rotary rollers driven by a motor are arranged in parallel in two rows, and the passenger tray 7 can be moved in the γ-axis direction. The carry-out device 5 will be located in the heat removal portion. The passenger tray 7 at the top of the vertical conveyance device of the 400A is received from the vertical conveyance device and carried out to the carry-out unit 500. Further, as shown in Fig. 1, the second tray transfer device 520 and the loading unit 100 are 1 pallet shifting device 11〇, including: γ-axis track, 2247-10441-PF/Aiicewu 26 201000380 movable arm, holding head, tamping claw. The second tray transfer device 52A can stack the client tray 7 transported by the carry-out device i 510 on the uppermost side of the stack 7β. As described above, in the present embodiment, the interval between the holding units 87 of the contact plate 8 is changed by the first interval changing mechanism 260A. Therefore, a portion of the space between the IC elements held in the holding holes 89 of the contact plate 8 is widened, and the portion of the space between the sockets 61 on the test head 6 is also widened with f, thereby enabling Make sure that the space 65 for the wiring on the test head 6 is wide. Further, in the present embodiment, the two kinds of % P" P4 are set as the interval between the holding members 87 in the contact plate 8. Therefore, the interval portion between the IC elements held by the contact plate 12 can be set. As the ground is widened, the portion of the gap between the test head 6 and the socket 61 is also widened, and the space 65 for the wiring on the test head 6 can be widened. [Second Embodiment] No. 14 FIG. 2 is a schematic plan view showing the overall configuration of an electronic component testing apparatus according to a second embodiment of the present invention, and FIGS. 15 and 16 are for display; and FIG. Fig. 17 and Fig. 18 are perspective views showing the first and second cover plates for the electronic component testing device of Fig. 14. As shown in Fig. 1416, in the present embodiment, In the middle, the shape of the contact plate, the application portion, the measurement 'k 1 ° °卩, and the configuration of the heat removal unit are different from those of the first embodiment', but other configuration items 4 &amp; and the first embodiment are the same. In the following, only the electronic measuring and reducing device of the second embodiment is different from the first embodiment 2247-10441-P. F; Alicewu 27 201000380 Pointing, the same components are denoted by the same reference numerals, and the description thereof will be omitted. First, the contact plate in the present embodiment (for the first embodiment) The holding trays 9A and 9B will be described. In the present embodiment, two kinds of contact plates are used, and the contact plates 9A and 9B are not like the first camp __##上-弟1 The contact plate 8 in the form is stretched and contracted. As shown in Figures 15 and 16, the plurality of holding units 92 are independently and independently movable on the body plate 91. The holding units 92 respectively form the mouth holding IC tl pieces. The holding unit 93 can hold the ic unit one by one. In addition, the position of each holding unit 92 on the side of the socket 6i determines the position determining hole that the needle can be inserted. ° Contact plate 9A, 9B have 32 holding units 9 2 different configurations. &lt;One 疋 holding, as shown in Fig. 15, in the second contact plate 9A, only in the first guest tray 7 is arranged in odd rows (Differs, ^, Figure 3, 5, 7th) The holding unit is not disposed. The other positions are opposite to each other. In the second contact plate 9B, the second tray 9B is arranged in the passenger tray 7 shown in Fig. 2 as shown in Fig. 16. The positional arrangement corresponding to the storage hole 72 of the even-numbered row (the ' '16, the 8th row) = the second position, the other position is not the holding unit 92. 疋92', that is, the first contact plate 9 In the arrangement of the holdings and the eight in the A, the holding holes 93 in the contact plate 9B are integrated, and the arrangement of the receiving holes 72 of the disk 7 shown in Fig. 2 is the same. I h button 2247-l 〇 441-PF; Aiicewu 28 201000380 Furthermore, in the present embodiment, when the 1C element is displaced between the client tray 7 and the contact plates 9A, 9B, the first one is used. And the plate-shaped cover plates 1A, 10B shown in Fig. 18. Both of the cover plates 1 and 1 〇 β open a plurality of window portions 11. The first cover 10A is a cover plate used when the κ element is displaced from the passenger tray 7 to the 帛i contact plate 9 in the application unit 2A. The first

As shown in Fig. 17, the cover plate ^A+' is provided with 32 window portions corresponding to the arrangement of the holding members 92 of the i-th contact plate 9. The second cover 10B is a cover plate used when the guest tray 7 is reversed in the heat removing unit. In the second cover (10), as shown in Fig. 18, 32 window portions ι are arranged corresponding to the arrangement of the holding members in the second contact S9B. Next, the electronic component testing device of the present embodiment will be described. As shown in Fig. 14, the processor 1β includes a passenger unit (10), an application unit 20 0B, a test unit 3_, a heat removal unit 4_, and a carry-out unit 5A. The application portion 2〇〇β in the present embodiment has a constant temperature bath like the application portion 20 0A of the t-th embodiment. In the inside of the thermostatic chamber, a vertical conveyance device as shown in the drawings, an i-th horizontal conveyance device, a discharge device 220B'i-inversion device 25A, and a third reversing device are provided.

Move to the third level (10). The application unit 2nR in the present embodiment differs from the application unit 200A in the first embodiment in that the third inversion device 28〇β and the “,” are added instead of the first interval changing mechanism. There is a transport device 290. &amp; Leveling again, the application unit 200B has a vertical transport device, 224 7-104 41-PF; Alicewu 29 201000380 transport device 2 coffee, the first loading and unloading device 22qb, and the following In particular, the first horizontal conveyance 2m view 1 loading and unloading device 220A and the ith reverse reversal 210A are used in the vertical transfer of the first hand. , 筮qg ±± 25〇A is the same configuration. The brother 3 inverting device 28〇β and the attacking unit 1 inverting device 25〇b are formed, and the system is arranged in the ith inversion device_ The structure p, ^ λ ^ reaches between 270 装置. The γ-axis orbital 221 of the W loading and unloading device 2_ is 270 Β, the third and the first 凫 罘 罘 在 在 在 回 回 回 回 回 回 回 及 及 及, the top of the 25qb device side. Furthermore, the return of the brother 1 in this embodiment

The first returning device 470B has the same configuration as the first transfer device 270A and the first return device 470A in the second embodiment. Similarly to the horizontal conveyance device 2 (10) of the first horizontal conveyance device 290, for example, a plurality of rotary rollers that are driven to be driven are actually laid in parallel and arranged in two rows, and the contact plate can be removed from the third inversion device. M〇b moved to the test section 300B. As shown in Fig. 14, in the test portion 3 (10) of the present embodiment, $ test heads 6 are inserted into the test chamber through the opening, and can be simultaneously tested (4) in the contact of &lt; 2A, 9B Ic component. The heat removing portion 400B in this embodiment has a heat removing groove like the heat removing portion 4A in the i-th embodiment. Inside the heat removal tank, a second horizontal conveyance device 4 〇β, a second attachment/detachment device 430B, a second reversing device 460B, a fourth horizontal conveyance device 480, a fourth reversing device 490B, and a 14th drawing are provided. A vertical handling device as indicated in the figure. The heat removal part of the present embodiment and the heat removal part 224 7-104 41-PF of the first embodiment; Alicewu 30 201000380 is different in that it does not have the second heat removal unit. 400B 1 has μ ^ set 4_. In addition, 'the side, the second, the second horizontal transfer shirt 41 叩, the second agricultural unloading special id surface straight handling device, if the following devices (10), the first: and the third implementation type The second horizontal conveyance straight conveyance step is the same as the second reverse rotation device side and the vertical conveyance device.

In this case, the 2 horizontal transporter is cut and the 2nd horizontal transporter is installed with a 410B, ''', for example, a plurality of rotary rollers of the motor (4) are arranged side by side in parallel to form 2 columns, and the contact plate can be taken from the test section. It is carried to the *reverse rotation device 490β' and the passenger tray 7俨篦4 can be moved to the vertical conveyance. Again = reversing device 49°Β.... "The second level is shifted to the second inversion device 46. The difference between the 12th and the second inversion devices 460 is set to be the same as that of the second reversal device 460. The second reversing device 460β is disposed between the second reversing device 460β and the rewinding device 270B. Accordingly, the reeling device 431 of the first loading and unloading device 430A is spanned across the returning device 270Β, the fourth and second reversing devices 4_, 46〇β, And the upper part of the i-th &amp; 47〇β. Next, the operation of the electronic component testing device in the present embodiment will be described. In the processor 1 β of the present embodiment, the guest tray 7 is taken from the cutting unit 100. After moving into the application unit 200, the vertical conveyance device lowers the passenger tray 7, and delivers the passenger tray 7 to the first horizontal conveyance device 21〇β. The second horizontal conveyance device 210Β moves the passenger tray 7 to the Inverting device 25〇β. 2247-10441-PF; Alicewu 31 201000380 Following the '1st loading and unloading set + setting' 20Β 苐1 movable head 230, the first cover 10 held by the cover is placed on the passenger end On the code tray 7. On the other hand, the second movable head 240 moves to the 筮, ,, #m 运机 470B, and holds the first sacred aunt A, which is moved from the sputum part 400B, and A ya moves it' Covered on the client tray 7 and the first cover 10A. + Following the ' f 1 reversing device 250B, the guest end tray 7, the first cover 1A, and the first contact plate 9A are held and rotated (10) degrees. As a result, the 1C component received in the storage pocket 72 located in the odd number of times in the guest tray 7 passes through the window portion of the first cover 10A.

- The person is snapped into the holding element 92 of the 苐1 contact plate 9A. The other side; because the face is blocked by the first cover 10A, the 1C component does not move to the first contact plate 9A in the storage hole 72 located in the even-numbered row of the passenger tray 7 Φ to the i/disk 7. in. When the first reversing device 25〇b is reversed, a part of the horizontal conveying device 21 0B of the younger brother 1 is lowered, and the reverse rotation of the first reversing device 250B of the social field is reduced. Part of the rise. wood

Jie Tian Gu Shi Following the s brother 1 reversal device 250B to explain the mouth holding ¥, the first! The contact plate 9A, the other board 1A and the client tray 7 are broken and held on the "1 horizontal conveying device 210B. Following the first movable head 230 of the '1st loading and unloading device 220B', the first movable head 230 of the first feast 4, holds the phoenix such as 10A and the client tray 7, and moves to the 筮Q, Weizhu with the younger brother 1 contact plate 9A rises and moves to the i-third level horizontal handling device 29〇. In the case of 冲 〇1Πβ, the first contact plate 9Α is carried into the test unit 3_. Following the '3rd reversal device 28', the β-solid tray 7 allowed the dry Gu Gu to get the 1st board 10 Α and the customer 祀 7 and turn it ι8〇.

The reversal of the squeaking ## 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在

When the inversion of the third inverting means 28 OB is ended, 兮P ^ the lowered portion rises. Then, when the third inverting device 280B releases the solid state, the guest tray 7 and the first board 10A are held by the third horizontal carrying device 29, and the first loading and unloading device 220B The first reproducible cloth 1 is moved 230, and the first cover 10 is removed from the passenger tray 7. Then, the second movable head 240 of the first loading and unloading device 220A covers the second contact plate 9B carried by the first returning device 47〇R (8) B on the guest tray 7. Next, the third reversal device surface holds the guest end tray 7 and the second contact plate 9B and rotates it by 18 degrees. Thereby, the iC element remaining in the accommodating pockets of the even rows in the passenger tray 7 is moved into the holding unit 92 of the second contact panel 9B. As described above, in the present embodiment, all of the IC components housed in the guest tray 7 are moved to the i-th and the first touch panels 9A and 9B by the three-time reversal operation. The period reversed by the third inversion device 280B, the flute Q a

Between the L U and the third horizontal conveying device 2 - the portion is lowered, but when the third reversing device is reversing, the lowered portion rises. Then, when the third reversing device 2_ is released from holding, the second contact plate 9B and the guest cup-like 7 v^ τ trough tray 7 are again held by the third horizontal conveying device 290. Following, the first! The second movable head 24A of the loading and unloading device 220A removes the passenger tray 7 from the second contact plate 9A, and moves the elbow passenger tray 7 to the returning device 270. On the other hand, the third level &gt; 卞 conveyance device 290 carries the second contact VB into the test portion surface. Further, in order to avoid interference between the movable heads of the loading and unloading device 22〇β, the γ 2247-i〇44i_PF of each of the unloading devices 220 and the side, and the Alicewu 33 201000380 shafts 221 and 431 are extended to the lower side of the same figure. After the test of the IC element is performed in the test unit 300B, the first and second contact plates 9A and 9B are carried out to the heat removing unit 40〇b. In the heat removing unit 400B, when the second contact conveying device 41A moves the second working device 9A to the second reversing device 46qb, the second movable head 450 of the second unloading device is returned by the returning device 27. The guest disk 7' carried by the application unit 2A (10) is placed on the first contact plate 9A. Next, the f 2 inverting device 460B holds the i-th contact plate and the guest: (4) 7 and rotates it by 180 degrees. Thereby, all 1 (: element ' of the first contact plate holding member ¥ is displaced to the storage pocket 72 located in the passenger tray 7. During the period of reverse rotation by the second reversing device 460B, the second horizontal conveyance On the side of the device, the portion is lowered. However, when the second reversing device is turned: the lower portion is raised. Then, when the second reversing device _ is released, the client tray 7 and the The i-contact plate 9 is again held by the horizontal transporting device 41 0B. Next, the second loading and unloading device 430B can be twentieth π. The fourth contact plate 9 is removed from the passenger tray 7. And the Le 1 contact plate 9 is moved to the brother 1 returning device 4 70. On the other hand, the second movable head 440 of the second 奘 壮 壮 Ζ Β Β Β Β , , , , , , 第 第 第 第 第 第 第 第^ ^ 汉υβ盍 is located on the passenger tray 7 on the 2nd level of the 裳 运 置 41 41 41 41 41 。 。 。 。 。 。 。 。 Β Β Β Β Β Β Β Β Β Β Β Β Β Β Β Β Β Β Β Β Β Β 第 第 第 第The second raft 10 turns and turns it 18 degrees. At this time, when the 1 n W turns, it is blocked by the 21st board 10B, so it is located in the storage tray 224 of the odd-numbered row in the passenger tray. 7-l〇441-Pr; Allcewu 34 201000380 72, the 1C element does not fall out of the accommodating hole 72. The second level 1 part falls during the period in which the second reversal side is reversed, but when At the end of the second inversion of the second inverting device, the portion of the p-single AA_, j that has been lowered for a long time has risen. The release of the solid body &lt; the Tiandi 2 reversing device 460B, in addition to the holding, the second cover 1 0B and the client cup Λ ^ m each of the trays 7 is held by the second water ten transport device 41〇B. Next, the first movable head 440 on the second loading and unloading device side, the second seesaw 10B And the passenger tray 7 is placed on the second contact plate 9b of the fourth reversing device 49A by the horizontal conveyance device 48. 1 Next, the fourth reversing device side holds the second contact plate. 9B, the second slab 1 〇 B and the guest pedestal #7 are rotated by 18. degrees. Thereby, all the IC components held by the second contact plate 9B, _ _ people are displaced to the guest cup tray In the storage hole 72 of the even-numbered row of 7th, the second movable head 45A on the second loading/unloading side is removed from the second cover_and the guest tray 7 from the second contact plate and the guest tray 7 The brother 2 contact plate 9B moves to the i-th return device 47〇b Next, the first movable head 440 of the device 43〇B removes the second cover 10B from the passenger tray 7. The passenger tray 7 is handed over from the fourth horizontal conveyance device 48 to the vertical conveyance device, and is vertically conveyed. After the device is lowered, the device is moved (four) to move (4). As described above, in the present embodiment, the 1C and the third inverting devices 250B and 280B are evacuated and moved from the guest tray 7 to the contact plate 9A. 9B. Therefore, the interval between the contact plates 9A and _ic elements is partially widened, and the interval between the sockets 61 on the test head 6 is also increased by 2247-10441-PF; Alicewu 35 201000380 is wide a thus ensuring The space for wiring on the test head is wide. [Third Embodiment] FIG. 19 is a schematic plan view showing the overall configuration of an electronic component according to a third embodiment of the present invention, and FIG. 2 is a view showing an electronic component test for the drawing. The oblique view of the contact plate, the 21st to 2^ ρ ^ shows a cross-sectional view for explaining the operation of the electronic component testing device in the third embodiment of the present invention. As shown in Figure 19, the right apricot is the same as the first embodiment. The composition of the % plus and heat removal parts can be π π U冋. Further, in the present embodiment, the plate 8 shown in Figs. 3 and 4 used as the contact plate in the first embodiment is used as the intermediate plate, and the plate 12 shown in Fig. 2 is used as the contact plate. . That is, 'in this embodiment', the 1C component is first moved from the client tray 7 to the intermediate plate (holding plate) 8' and the IC component is moved from the intermediate plate 8 to the contact plate (holding ^) 1 2 MT 'only In the third embodiment, the electronic component testing apparatus and the second embodiment will be described. The same reference numerals are given to the fifth embodiment of the first embodiment, and the description thereof is omitted. The ear contact plate 2 in the present embodiment will be described. The contact plate 12 in this embodiment includes a substrate 12a and eight holdings held on the substrate 12a. The unit 12b. The holding unit 12b of the contact plate cannot slide relative to the substrate (7), which is quite different from the contact plate 8 of the first embodiment. The holding sheet 7L 1 2b and the contact plate 8 of the first embodiment are The configuration of the holding unit 87 is the same. The first position determination 1] 2d and the eight holding holes 12c are formed on the surface of each holding unit 12b. Further, the second position 2247-a 〇 442_PF is formed; Alicewu 36 201000380 The protruding piece 12f of 12e protrudes from the side of the holding unit 12b, and also forms the protrusion 12f can be inserted into the insertion hole 12g. Although not specifically shown, the respective holding units 12b are held in the same manner as in the first embodiment, so that the substrate 12a is independently micro-moved. The arrangement of the retaining pockets 12c is substantially identical to the arrangement of the retaining pockets 89 in the intermediate plate 8. S, the spacing of the contact plates 12 shown by 帛20 SI, pe, p8, and the passenger tray shown in Fig. 2 The interval between P7 and P2 is substantially the same (Ρ6 = Ρι, 匕 leaf 2), that is, the arrangement of 16 holding holes 12c of the two holding units 12b adjacent in the X direction in the contact plate i2 and The arrangement of a part of the holding pockets 89 in the guest tray 7 shown in Fig. 2 is substantially identical. Further, as shown in Fig. 20, in the present embodiment, and the i-th implementation The contact developed in the middle is the same as the 'relatively narrower interval' h and the second interval p7 (p6 &lt; p7) wider than the first interval P6, as between the holding holes 1 2c along the γ-axis direction Interval. The interval S4 between the holding holes amp and the spacing according to the second interval P? is the holding hole 12 arranged at the ith interval p6. More preferably 5 times or more (S4S3X5), more preferably 1 time or more (sg SsxlO). Next, the electronic component testing device of the present embodiment will be described. As shown in Fig. 19, the processor 1C includes: The human part (10), the application part 200C, the test part 300C, the heat removal part 4〇〇c, and the carry-out part 5〇〇. Moreover, the test part 3〇〇C and the 帛i implementation type test part of this embodiment form. The application unit 200C in the present embodiment has a constant temperature bath as in the application 224 7- ]_〇 "l-PF; Ali ce wu 37 201000380 part 200A" of the first embodiment. A vertical conveyance device, an i-th horizontal conveyance device 21〇c, an i-th loading and unloading device 220C, a third attachment/detachment device 225, an i-th reversing device 25〇c, and a first one as shown in the i-th diagram are provided inside the thermostatic chamber. The interval changing mechanism 260C, the third interval changing mechanism 265, the second inverting device 2_', and the second return device 295. The difference between the application unit 200C in the present embodiment and the application unit 2A in the first embodiment is that the third attachment/detachment device 225, the f3 interval changing mechanism 265, and the second inversion device 280B are added. And a second return device 295. Further, the application unit 200C includes the vertical conveyance device 'i-th horizontal conveyance device 21GC and the first attachment/detachment device 22 () (: 'and the reversing device 2 grasps the second/interval change mechanism 2, if none of the following In particular, the vertical conveyance device, the fi μ first horizontal conveyance device 210 , the first attachment/detachment device 22 , the i-th reversing device 25A, and the second interval changing mechanism 26 in the first embodiment are shown. (^ is the same configuration. In the present embodiment, the i-th loading and unloading device reads across the returning device 27〇C, the first horizontal conveying device 2i〇c, and the second returning device 295' and the first The i-th movable head that attaches and detaches the skirt 22〇c transports the intermediate plate 8 from the second returning device 295 to the first horizontal conveying device 210C. On the other hand, the $2 movable head 24〇 and the passenger tray 7 are from the working level. The conveyance device 21 (10) is conveyed to the return device 270C. The second rotation device 280c is disposed between the second interval changing mechanism and the measurement and reduction unit 3C. The second anti-Korean step reverse clothing 280C and the second embodiment The second inversion device 28〇β of the state has the same configuration. The third loading and unloading device 225 includes: in the processor 1C's main base along the 38 201000380 Y-axis direction frame VL VL ^ axis track 226; can be supported on the Y-axis track 226; 8 in the axial direction to support the first and second The movable head 227 and the second = 3 裴 裴 225 are placed across the first returning device 47〇C, the loading and unloading device, and the second returning device 295. The first moving device 2125 is movable first. The head milk transports the intermediate plate 8 from the first level e and QC to the second returning skirt 295. On the other hand, the second movable head 2 28 transports the contact plate i 2 from the 篦^ to the device. It is sent to the first level = the returning farm 295 is configured, for example, a plurality of backs that are driven by the motor are arranged in parallel, and the intermediate plate 8 can be moved. Further, the second returning device 295 is provided. The third interval changing mechanism 265 of the same structure can move the intermediate plate 8 from the third attaching and detaching device 225 to the first cloaking machine 1 and the unloading device 22 〇 C. The interval between the first and fourth plates 8 and 84 in the intermediate plate 8 is narrowed. "Furthermore" in the present embodiment, the returning skirt 270C, and the implementation of The configuration of the returning device 27〇a 』 in the present type of sorrow. Further, the returning device in the present embodiment is disposed between the fourth loading and unloading device and the second loading and unloading I 225, and the feeding device is removed. The configuration of the side is the same. The third embodiment of the first embodiment has the heat removing groove on the side of the heat removing portion 4, and the heat removing groove in the outer and /1 embodiment. The inside is provided with: 2nd horizontal conveying device (4), 2nd interval changing mechanism tender, 4th interval changing 2247-l〇441-pF; Alicewu 39 201000380

Further, the mechanism 425, the fourth loading/discharging device Q 435, the second reversing device 460C, the third returning device 475, the fourth reversing device 49C, and the vertical conveying device illustrated in Fig. 19 are provided. The difference between the heat removal unit 4〇〇c in the present embodiment and the heat removal unit 400A in the i-th embodiment is that the 'new addition brother 4 interval changing mechanism 425, the fourth loading and unloading device 435, and the third returning device are different. The jryp; the device 475, and the fourth inverting device 49〇c. Further, the heat removal unit 400C has a younger horizontal conveyance device 410C of mm 9 + τ ', a second interval changing mechanism 420C, and a first?骷土壮w 2 loading and unloading device 430C, second reversing device 460C and vertical conveying device, if specifically described below,

In the first embodiment, the second horizontal transport unit #jΛ A ten transport flat 410A, the second interval changing mechanism 420A' second assembly... the loading and unloading device 430A, the second reversing device 460A, and the vertical transport device have the same configuration. . In the embodiment, the second movable head 440 is placed across the second movable head 440 which is erected in the back = setting plus: the second reversing device (4) and the fourth returning device still plate second loading and unloading device 43A == Two carriers are moved to the third return device 475. The second tray is transported from the returning device to the second horizontal conveying device 41 0C. The 4th inversion device 49〇c is disposed in the test unit 3, the mechanism 420C, and does not change the I-between. The fourth inverting device 490C and the fourth inversion in the second f are the same in the configuration of the type of the under-returning device 490B. The fourth loading and unloading device 435 includes: along the main pedestal of the processor Υ 竿 纟 纟 processor 1C along the track 436; to be movable in the heart of the Y track, to support the movable Head 437, 2247 - 10441 - (4) icewu 仏 201000380 438 ° 4th loading and unloading device 435 horizontal 4 reversing device 49QC, and the third party in the ^ return device iron, the first unloading device 435! Move &lt;/^ to set the top of 475. The fourth device 475 sends S 437 to move the intermediate plate 8 from the third returning device _ horizontal conveying device 41 〇C. On the other hand, the second movable head 438 takes the contact plate 12 from the second feeding device 4. The thousands of handling devices (10) are sent to the delivery device 475$, for example, by the motor drive (four) plural (four) the revolving shafts are parallel and parallel along the X-axis direction. In addition, the inter-board 8 is reviewed and the other structure is the same as that of the second interval changing mechanism 42〇c, and the intermediate plate 8 is moved from the second loading/unloading=430C to the third returning device 4-5. During the fourth dream and the fourth loading and unloading device 435, the interval between the fourth plates 81 to 84 in the intermediate plate 8 can be widened. Next, the operation of the electronic component testing device in the present embodiment will be described. In the processor 1C of the present embodiment, after the client tray 7 is carried from the loading unit 1〇0 into the application unit, the vertical transport device lowers the client tray 7 and delivers the client tray 7 to the first level. Handling device (10). The first! The horizontal transport device 21 ° C moves the passenger tray 7 to the ith reversing device 250C. Further, in the present embodiment, as shown in Fig. 21A, the ic element is housed in the guest tray 7 with the wheel inlet and outlet terminals facing upward. Then, the first movable head 221 of the first attaching and detaching device 220C moves the intermediate plate 8 and the second returning device 295, and as shown in Fig. 21A, the intermediate plate 8 is placed on the passenger tray 7. 2247*l〇441-PF; Alicewu 41 201000380 Following the '1st reversal setting 250Γ in姥 8 It# J: ι«η ^ Hold the passenger end tray 7 and the intermediate plate 8 and make it rotate 180 degrees. By the way, 7C ΛΑ Μ Μ — — — — — — — — — — — — — — — — — — — — — — — — — — — — — — — — — — — — — — — — — — — — — — — — — — — — ώ ^ 1 c ^ ^ Set a part of Z1 〇C to fall, but when the reversal of the brother 1 reversing device 250C goes to the Japanese, the falling part rises. Then, when the first inverting device 2 卩 μ μ ^ - is placed at 250 C % for holding, the intermediate plate 8 and the end trays 7 are held by the first 芈 ' 丄 丄 丄 襞 210 210 210 210C. Following the second movable head 240 of the 'first loading and unloading shock 9', the holder 2 is held by the guest on the intermediate plate 8, and the tray 7 is moved to the returning device 270C (refer to the 21st page). Figure). The guest tray 7 is transported to the heat removing unit 400C by the field return device 270C. Then, the first horizontal conveyance 奘罟9inr At reverse device 21 0C moves the intermediate plate 8 toward the third reverse rotation device 28〇c. During this movement, the interval between the plates 81 to 84 in the intermediate plate 8 is widened by the first interval changing mechanism 260C. The first level conveyance device 2 1 0C causes the intermediate plate 8 A Ming # # &amp;# π , &gt; j rice 8 to move again, and stops it below the third loading and unloading device 225. Then, the second movable head 228 of the third loading/unloading 225 is moved to move the contact plate 12 from the first returning device 47〇c, and the contact plate 12 is placed on the intermediate plate 8. Then, the second inverting device 28〇c holds the intermediate plate 8 and the contact plate 12 and rotates it by 180 degrees (see the second drawing, by which the entire IC component housed in the intermediate plate 8 is moved. In the holding hole 12c of the contact plate 丨2, during the reversal period, the portion of the i-th horizontal conveying device 211c is lowered, but when it is reversed by the reversal of the second reversing device 280C, 2247-10441-PF; Alicewu 42 201000380 The falling portion is raised. ^" When the second reversing device 280C is released, the contact plate 12 and the middle armor plate 8 are again held on the first horizontal carrying cassette 210C. As described above, in the present embodiment, all of the I components housed in the guest tray 7 are moved into the contact plate 12 by the two inversion operations, and 'in the 1C component, the wheel is inserted into the terminal. When it is stored in the passenger tray 7 in the downward state, a further grazing contact plate 12 is added, and the reverse operation is performed three times. The first movable head 227 of the third loading and unloading device 225 of Γ·' The intermediate plate 8 covering the contact plate 12 is moved and moved to the second returning device 295. The hunting device 295 is used by the second returning device 295. The intermediate plate 8 is returned to the first attaching and detaching device 220C. During this movement, the interval between the first to fourth plates 8 and 84 in the intermediate plate 8 is narrowed by the third interval changing mechanism. 210C, the contact plate 12 is carried into the test portion 300C, and as shown in Fig. 21D, the D test of the ic element is performed in the test portion 3〇〇c. After the end of the test, the contact plate 12 is carried out to the heat removing portion 4 c. In the heat removing unit 4〇〇C, the second horizontal conveying device 41 moves the contact plate 12 to the fourth inverting device_C. Then, the first movable head 437' of the fourth loading and unloading device 435 is in the middle. The plate 8 is moved from the third returning device 475, and the contact plate 12 is placed on the intermediate plate 8. Then, the fourth reversing device 8' is rotated by 180 degrees. All of the 1C elements in the plate 12 are moved into the holding pockets 89 of the intermediate plate 8. During this reversal, a portion of the second horizontal handling device 410C is lowered, but when by 2247-10414-PF; Alicewu 43 201000380 When the reversal of the reversing device 25GC is completed, the lower portion, that is, the rising fourth row reversing device 490c is released, the intermediate plate 8 is connected. The plate 12 is held by the second horizontal conveying device 41〇c. Then, the second movable head of the fourth unloading 435 is held, and the contact plate 12' covering the intermediate plate 8 is held and moved to the first The i returning device 470C transports the contact plate to the applying unit 200C by the first returning skirt 47〇c. Then, the second horizontal conveying device 41qc moves the intermediate plate 8 toward the second inverting device 460C. The plates 81 to 84 of the intermediate plate 8 are transported by the device 410C so that the intermediate plate 8 is moved again below the device 430C. The interval between the second interval changing mechanisms is narrowed. The second horizontal movement 'stops the second movable head 45〇 of the f 2 loading and unloading device 43〇c, and the passenger tray 7 is moved from the returning device 270C, and the passenger (four) is covered. On the intermediate plate 8. Next, the second reversing device 46A holds the intermediate plate 8 and the passenger carrier 7 and rotates it by 18 degrees. By this rotation, all the ic elements housed in the intermediate plate are moved to the holding 7' of the passenger tray 7 at a time. During this period, the portion of the f 2 horizontal carrying device 41GC is lowered, but when inverted by 2 At the end of the reversal of the reloading f 46GC, the lowered portion is raised, and then when the reversing device 460C is released, the client tray 7 and the intermediate plate 8 are again held by the second horizontal conveying device 41. c. "Next, the first movable head 440 of the second loading and unloading device 430C holds the intermediate plate 8 on the passenger tray 7, and moves it to the third returning device 2247-104^i-pF; AiiCewu 201000380 475. The third returning device 475 returns the intermediate plate 8 to the fourth loading and unloading device 4 3 5 ' and returns the first to fourth plates of the intermediate plate 8 by the fourth interval changing mechanism 4 5 5 during the return period. The interval between 81 and 84 is widened. The client tray 7 is delivered to the vertical transport device by the second horizontal transport device 410C, and is carried out to the carry-out portion 5A after being raised by the vertical transport device. As described above, in the present embodiment, the interval between the holding units 89 of the intermediate plate 8 is changed by the first interval changing mechanism 260C', and is moved from the intermediate plate 8 to the contact plate 12 while the arrangement is maintained. The test of the Ic element is performed in a state of being carried on the contact plate 12, and therefore, a portion of the space between the IC elements held in the holding hole 8.9 of the contact plate 12 is widened, and the socket 61 on the test head 6 is widened. A portion of the interval between them is also widened, so that the space for the wiring on the test head 6 can be ensured to be wide. Further, in the present embodiment, two kinds of intervals pe and P7 are set as the interval between the holding holes 12c in the contact plate 12. Therefore, the interval between the 1C elements held by the contact board 12 can be partially widened, and a portion of the interval between the sockets 61 of the test head 6 is also widened, and the test head can be secured. The space on the wiring 6 of 6 is wide. [Fourth embodiment] Fig. 22 is a schematic plan view showing the overall configuration of an electronic component testing apparatus according to a fourth embodiment of the present invention, and Fig. 23 is a view showing the adsorption of the displacement device of the electronic component testing device of Fig. 22. The bottom view of the head. As shown in Fig. 22, in the present embodiment, the configuration of the applying portion and the heat removing portion is different from that of the first embodiment. Further, in the present embodiment, the difference between the first embodiment and the first embodiment is that the contact plate (holding plate) 2247-10441-PF shown in Fig. 2; Alicewu Δς 201000380 is used instead of the third and fourth figures. Contact plate 8. Further, this embodiment differs from the third embodiment in that the intermediate plate 8 shown in Figs. 3 and 4 is not used, and the 1C element is directly displaced from the guest tray 7 shown in Fig. 2 to the second. The contact plate 1 2 shown in the figure. In the following, the electronic component testing apparatus of the third embodiment will be described with reference to the first embodiment, and the same components as those of the first embodiment will be denoted by the same reference numerals and will not be described. As shown in Fig. 22, the processor 1D includes a loading unit 1A, an application unit 200D, a test unit 300D, a heat removal unit 4D, and a carry-out unit 5 (and, in addition, the test unit of this embodiment) The test unit 3〇〇a in the 300D and the third embodiment has the same configuration. The application unit 200D in the present embodiment has a constant temperature bath as in the application of the first embodiment. The inside of the constant temperature bath is provided with a vertical conveyance device, a second horizontal conveyance device 2i〇D, a second loading and unloading device 22GD, and a second displacement device 2Q5 as shown in Fig. 2 in the present embodiment. The difference between the 卩2〇〇D and the application unit 200A in the first embodiment is that the first reversing device and the second interposition changing device are not provided, and the first disposing device 205 is newly added. The vertical conveyance device, the second horizontal conveyance device 21GD, and the first discharge device 22GD provided in the portion 200D are not described below, and the vertical conveyance device and the first embodiment are in the first embodiment. The first horizontal conveyance device 2A and the first loading and unloading device 220A have the same configuration. The vertical transport device is different from the vertical transport dream device of the ce1 implementation type 2247-l〇441-PF; Allcewu 201000380 plus 200A, which causes the guest tray to rise sequentially. In addition, the application portion η η η Iso, the first loading and unloading device 22〇]), i, the i-th movable head 230 is supported by the Y-axis rail 991 „ * /, 裨 rail curb 221, and

The movable head 240. In addition, a Shi Yi, Mouth Z

In the normal target type, the first attaching and detaching device 220D is spanned only above the first horizontal transport W (four). The first loading and unloading device 2_, the contact plate 12 is from the first! The return device 47GD is moved to the first horizontal conveyance device 21GD. Further, the first returning and closing device side is constituted by, for example, a conveyor belt in the same manner as the first returning device 4m of the first embodiment, and the face is brought back to the applying unit 200D from the heat removing unit 400D. As shown in Fig. 22, the second displacement device 2〇5 includes: a γ-axis track 2〇6 disposed along the γ-axis direction on the main base of the processor 1D; is held to be capable of being held on the above-mentioned axis A suction head 207 that moves in the direction of the ¥ axis on the track. The first! The displacement device moves the member from the passenger tray 7 located at the uppermost position of the vertical transporting movement to the contact plate 12 held at the ith level to carry the ribs. As shown in Fig. 23, the adsorption head 207 is provided with 16 adsorption pads 2〇8 which can adsorb and hold the 1C element. The adsorption pad 2〇8 is arranged in two rows and eight columns. The interval between the adsorption pads 208 along the Y-axis direction is Pg, and the interval between the adsorption pads 208 along the X-axis direction is Ριβ. This Pg#〇 ρ!. And the intervals P!, P2 in the guest tray 7 shown in Fig. $ are substantially the same, and also the intervals pe, h in the contact plate 12 shown in Fig. 20 are substantially - (P9 = p1 = pe'. By this, the i-th displacement device can change 16 intervals without changing the interval'; the component is displaced from the client tray 7 to: 2247-l〇441-PF; Aiicewu 47 201000380 Plate 12. Further, it is installed in the adsorption head 2ϋ7^ as long as it does not need to change the interval, and is not particularly limited. For example, '8 adsorption 塾2〇8 are arranged in 2 rows at intervals pe and ps. "Example f is carried on the passenger tray 7 1. After the element is displaced by the first displacement skirt 205 to the contact plate 12, the empty passenger tray (4) is transported from the application portion 2 to the heat removal portion by the return. In the present embodiment, the delivery device is 'for example, a plurality of rotations driven by a motor; two: a row... constitutes, ... the heat removal of the passenger tray 7 along the center I: In the side of the unit, and in the first embodiment, the sputum has a heat removal tank. The inside of the heat removal tank is provided with: = a second loading and unloading device, and a second displacement device. Figure 22 The vertical transportation device is schematically illustrated. The decoupling portion of the present embodiment differs from the heat removal portion of the i-th embodiment in that it does not include the second interval changing mechanism and the second inverting device. Further, the second horizontal conveying device 4_the second loading and unloading device side and the vertical conveying device included in the heat removing portion 4GDD are not particularly described below, and the second horizontal conveying in the i-th embodiment is not described. The device "θ', the second swinging device 43GA, and the vertical transporting device have the same configuration. The second attaching and detaching device of the heat removing portion 4_ is supported by the y-axis rail 431 and supported by the y-axis rail 431, and The second movable head 45 is provided. In the present embodiment, the second loading and unloading device side spans only the side of the second horizontal conveying device 4 (10) and the second working device. The second loading and unloading device 430D, The contact plate 12 is moved from the second horizontal conveyance 224, -l 441-PF; Alicewu 4 6 201000380 device 410D to the first return device 47 〇d. The second displacement device is called the above-described third transfer configuration, which is capable of 1C. The component is moved from the contact plate i2 which is held at 5 to the same, and is moved to the returning and feeding device 2_ horizontal conveying device The vertical transfer device of the heat removal part 4GGD=the end tray 7 part 400A is different', which causes the guest tray 7 to be sequentially lowered, and the heat removal of the end tray type is followed, indicating that the electric rabbit is 70 pieces in this embodiment. In the processor 1D of the present embodiment, after the client tray 7 is carried into the 16-plus-part 2GGD from the loading unit 100, the vertical transport device raises the guest tray 7. Then, the second shift is performed. The device 205 moves the pre-test components from the client tray 7 located at the top of the vertical transport device to the first stage! The contact plate 12 of the horizontal transporting device 210D is placed. At the time of this displacement, in the present embodiment, the passenger places the interval P1 between the pockets 72 in the tray 7. 2 and holding the hole 12 in the contact plate 12. The interval between p6 and P8 is actually the same (Pl=P6, P2=P8). Therefore, it is possible to change the interval between the members without V, /, and by the ith shifting device 2〇5 once. The 16 1C elements are displaced. In the present embodiment, all of the Ic components on the guest tray 7 can be displaced onto the contact board 12 by a total of four displacements. The contact plate 1 2 loaded with the IC element is carried into the test unit 3 〇 〇 D by the first horizontal transfer device 210D. Then, after the test of the IC element is ended in the test portion 3 〇 〇 d, the contact plate 1 2 is carried out to the heat removing portion 4 〇 〇 D. On the other hand, the passenger tray 7' without the 1C component is returned to the heat removing portion 400D by the returning device 270D. 2247-1044l-PF; Alicewu 49 201000380 In the heat removal device 40D, the second horizontal conveying device 410D moves the contact plate 12 into the operation area of the second loading and unloading skirt 430D and the second displacement loading device 405. Then, the flute&gt; and the "2" shifting device 405 move the tested IC component from the contact plate 12 held on the second horizontal transfer device 41 0D to the return from the L device 270D. The part 2〇〇D is sent back to the passenger tray 7. The guest tray 7 of the 1C component that has been fully loaded and tested is lowered by the vertical conveyance device, and then carried out to the carry-out portion 500. The h can be held by the test head 6 and can be secured as described above. In the present embodiment, the interval between the holding holes 87 in the two kinds of the spaced contact plates 1 2 is set. Therefore, a portion of the interval between the sockets 61 in which the interval between the Ic elements of the contact plate 12 is partially widened is also widened, and the space 65 of the wiring on the test head 6 is wide. In the present embodiment, the spacing P], P2 of the receiving pockets 72 of the client tray 7 and the spacing between the holding pockets 12c in the contact panel 12 /

Ps is actually - so that the UC element can be mounted by the first displacement without changing the Μ 6 of the gate of the ic element. The interval between the pieces is the same as the description of the embodiment described above, which is used to make the invention "unexplained" and is not intended to limit the disclosure. "Therefore, the above implementation changes: change or 4: inclusion It belongs to the technical field of the present invention, such as the number of turns (four) and the number of turns between the holding groups constituted by the holding holes of the first embodiment. For example, the name mI _ π 4, ~ is not particularly "as 纟 纟 成 成 成 成 个 个 个 个 个 个 个 个 个 个 个 固 固 固 固 固 固 固 固 固 固 固 固 固 固 固 固 固 固 固 固 固 固 ^ ^ ^ The gap between the 〇44i-PF; Alicewu 5〇201000380 is widened, so that the interval between all the holding holes can be widened. Further, in the first embodiment, it is explained that all the IC elements housed in the guest tray are placed on the contact plate. In the second embodiment, it is not particularly limited to the fact that the IC device is intermittently displaced from the passenger tray to the connector in the month. For example, the 胄IC component can be displaced from the guest tray to the contact panel 2 rows, or other IC 7L components except the specific row can be moved from the guest tray to the contact panel. Γ I + use the reversing device as the displacement means for displacement of the component between the passenger tray and the contact, and use the pick-and-place device or the like. [Simple description of the drawing] Figure 1 shows the basis SUMMARY OF THE INVENTION A schematic plan view of the overall configuration of an electronic component testing apparatus of a well-known type is disclosed. Fig. 2 is a perspective view of the electronic disk used in Fig. 1 .

Fig. 3 is a perspective view showing a contact pad for the electronic component testing device of Fig. i. FIG. 4 shows the contact plate of FIG. 3. FIG. 5 shows the back of the contact plate of FIG. 3. FIG. 6 shows the electronic component of FIG. 1 along the VI-VI of FIG. An oblique view of the measured state. Surface map. Sectional view of the line. The flat part of the moving part of the test dress is not flat. The electronic component test set of the application part is 2247-1044l-PF; Alicewu 201000380 Figure 9 shows the view along the X axis! A front view of the application portion of the electronic component testing device of the drawing. Fig. 10 is a top view showing the test head of the electronic component testing device of Fig. 1. Fig. 11 is a schematic sectional view showing a contact plate and a socket in the first embodiment of the present invention. Fig. 1 2A is a schematic cross-sectional view showing another example of the contact plate and the socket in the first embodiment of the present invention. Figure 1 2B shows that it will be held on the contact plate of Figure 1A! A schematic cross-sectional view of the state in which the c component is pressed to the socket. Fig. 13A is a schematic cross-sectional view showing still another example of the contact plate and the socket in the first embodiment of the present invention. Fig. 13B is a schematic cross-sectional view showing a state in which the IC component held on the contact plate of Fig. 13A is pressed to the socket. Fig. 14 is a schematic plan view showing the overall configuration of an electronic component testing apparatus according to a second embodiment of the present invention. Fig. 15 is a perspective view showing the first contact plate for the electronic component testing apparatus of Fig. 14. Fig. 16 is a perspective view showing the second contact plate for the electronic component testing device of Fig. 14. Fig. 17 is a perspective view showing the first cover plate for the electronic component testing device of Fig. 14. Fig. 8 is a perspective view showing the second cover of the electronic component testing device used in Fig. 14. &gt;Alicewu

2247-10441-PP 201000380 * Fig. 19 is a schematic plan view showing the overall configuration of an electronic component testing apparatus according to a third embodiment of the present invention. Fig. 20 is a perspective view showing a contact plate for the electronic component testing device of Fig. 19. Fig. 21A is a cross-sectional view (1) for explaining the operation of the electronic component testing apparatus in the third embodiment (4) of the present invention. Fig. 21B is a cross-sectional view (No. 2) showing the operation of the electronic component testing apparatus in the embodiment of the invention of Fig. 3 in the fourth embodiment. (Fig. 21C) Fig. 21C is a cross-sectional view (No. 3) for explaining the operation of the electronic component testing apparatus in the third embodiment of the present invention. Fig. 21D is a cross-sectional view (fourth) for explaining the operation of the electronic component testing apparatus in the third embodiment of the present invention. Fig. 22 is a schematic plan view showing the overall configuration of an electronic component testing apparatus according to the fourth embodiment of the present invention. Fig. 23 is a view showing the bottom view of the adsorption head of the snow absorbing device / Ϊ of the electron το member test device of Fig. 22; [Main component symbol description] 1A-1D processor; 100 loading section; 200A~200D application section; 210A~210D 1st horizontal handling skirt 220A~220C 1st loading and unloading device. 250A-250C 1st reversal 2247-10441-PF; Alicewu 53 201000380 251 swivel, 252 telescopic 253 rod; 254 collet; 260A, 260C 1st interval changing mechanism; 261-264 1st to 4th cam groove; 310 Z-axis drive; 400A-400D heat removal unit; 410A, -410D 2nd horizontal handling device; 420A, 420C 2nd interval changing mechanism; 430A--430C 2nd handling device; 460A-, 460C 2nd reversing device; 500 moving out part 6 test Head; 61 socket; 62 contact foot; 63 outer cover; 64 position determining needle; 65 space; 7 passenger tray; 70A, 70B stacking body; 71 tray body; 7 2 receiving hole; 8 contact plate (middle plate); 2247-10441-PF; Aiicewu 4201000380 84 1st to 4th plates; 81a to 84a 1st to 4th cam followers; 85 shafts; 86 mounting holes; 86a small diameter parts; 86b large diameter parts; 87 holding unit; 87a 1st position decision hole; 87b 2nd position Fixed hole; 87c protruding piece; 87d insertion hole; 88 mounting element; 88a screw; 88b head; 89 holding hole; 9A, 9B 1st, 2nd contact plate, 92 holding unit; 93 holding point; 10A, 10B 1, the second cover; 12 contact plate; 12b holding unit 12c to hold the hole. 2247-1044l-PF; Alicewu 55

Claims (1)

201000380 VII. Application for Patent Model 1 - An electronic component transporting device capable of manipulating a holding tray capable of holding 70 pieces of electrons, comprising an interval changing skirt, which changes at least a plurality of holding portions of the holding tray A portion of the spacing between the retaining portions. For example, in the electronic component transporting device described in claim i, the plurality of retaining portions are independent of each other and can be slightly moved. The electronic component transporting apparatus according to the above aspect of the invention, wherein the interval changing means changes the between the retaining portions of at least one of the plurality of retaining portions so that the interval between the retaining portions is It is disposed in the access: several times between the electronic components in the passenger tray of the electronic component transport device, or 'the same as the interval between the contact portions in the test head. Shenyue Patent Co., Ltd. The electronic component transport device described in 1 item, ^ B . The changing device is configured to change at least the holding group of the specific number of holding groups: the electronic component transporting device described in the patent scope f 4 of the Guangshenqing, the plurality of holding groups are independent of each other and can be jogged . 6. The electronic component transporting apparatus according to claim 4, wherein the interval changing means changes at least # of the plurality of holding groups, and the interval between the solids and the portion of the v-group is such that the holding portion The interval between them is the positive between the electronic components in the passenger tray of the == transport device. 'or' is the same as the spacing between the contacts in the test head. 7. The holding tray receives the electronic component directly from the guest tray, as described in claim 3 or 6. &quot;Installation 2247~10441-PF; Alicewu 56 201000380 8. An electronic component component, comprising: a test device for testing the transported agricultural plant described in any of the items of the test electronic enclosure; The test of the contact portion of the test electronic component and the tester electrically connected to the test head; the transfer is performed, the contact portion at the time of the test. - The electronic component to be tested is pressed to 9. According to the scope of the patent application, the interval changing device, for the electronic component test, the spacing between the holding parts, you, ... thousand H-type 'widening Corresponding to the column, the arrangement of the holder and the matching of the contact For example, the patent application has a wiring with the probe; and the phantom of the test head corresponding to the space between the holding portions of the holding tray towel p widened, and is installed in the contact portion. An electronic component of the 颂β circumference of the 丨β, or the holding portion determines at least one of the position p of the contact portion and the device. 10. An electronic component transporting apparatus capable of manipulating a holding tray having a plurality of holding portions capable of holding electronic components, comprising a displacement device, the electronic component from a housing portion having a housing device housing the electronic component The evacuation portion is evacuated and displaced to the holding portion of the holding tray. 11. The electronic component transporting apparatus according to claim 10, wherein the plurality of retaining portions or the plurality of retaining groups respectively formed by the specific number of the retaining portions are independent of each other and are frillable. 2247-1044l-PF; Alicewu 57 201000380 !2. The electronic component set as described in the patent application scope further includes a plurality of handling shocks, which carry the holding tray holding the electronic component to the position of the opposite test head 3, the displacement skirt, the tested electronic object stored in the storage vibration == evacuated and displaced to the respective patents of the respective handling devices, the first (1) item The electronic component transporting device 'the accommodating device is a passenger tray of the smart-input-side electronic transport device: the interval between the plurality of retaining portions is the storage in the passenger tray. An integer multiple of the interval between turns, and the holding &amp;disk&apos; receives the electronic component from the S-sinus consumer in a state in which the electronic component is maintained. The electronic component transporting device 4 as described in claim 1G of the patent application holds the electronic component directly from the storage device. The electronic component transporting and closing device described in Item 14 of the Japanese Patent Application No. 14 is configured to block the accommodating portion of the electronic component that is stored in the arranging device when the electronic component is displaced from the accommodating device to the holding tray. . The electronic component testing device is used for testing the electronic component to be tested, and includes: the handling device described in the patent application scope 帛1G~15 $ zhong--; and having electrical contact with the electronic component to be tested The test head of the contact portion; and 2247-l〇44l-PF; Alicewu 58 201000380. and the test head of the test head lightning electrical connection; the transport shock, /, test, the tested electronic The component is pressed to the contact. The electronic component testing device according to claim 16 of the patent application, wherein the test is performed by the displacement device in the holding tray, and the space between the tested electronic components is separated by the displacement device. At least one of the wiring around the contact portion, the electronic component D attached to the periphery of the contact portion, or the position determining device for determining the position of the contact portion by the holding portion is provided in the space above the head. 18. An electronic component holding tray comprising a plurality of first holding portions respectively capable of holding a tested electronic component, wherein the (four) first holding portions are arranged along at least an i-th direction; the first holding along the first direction The interval between the portions includes a first interval 'and a second interval different from the i-th interval. 19. The electronic component holding tray according to claim 18, wherein a spacing between the third holding portions arranged at the second interval is the ith holding portion arranged at the first interval More than 5 times the spacing between the two. 20. The electronic component holding tray of claim 18, wherein the variable mechanism is configured to change the second interval such that the second interval and the first interval Essentially the same. The electronic component holding tray according to claim 18, wherein the plurality of first holding portions or the holding group constituted by the specific number of the second holding portions are independent of each other and can be slightly moved. 2247-10441-PF; A1ice wu 201000380 22. An electronic component transporting device capable of handling a holding tray according to any one of claims 18 to 21, comprising a first displacement device, being maintained The electronic component is displaced between the guest tray and the holding tray in a state in which the electronic component is placed in the guest tray of the electronic component transport device. 23. The electronic component transport device of claim 22, wherein the guest tray has a plurality of storage portions that can accommodate the electronic component, the first interval in the retention tray, along with the passenger tray The interval between the accommodating portions in the first direction is substantially the same, and the interval between the first holding portions along the second direction in the holding tray and the second direction in the guest tray The interval between the accommodating portions is substantially the same. [24] The electronic component transport device of claim 23, wherein the first displacement device has a plurality of adsorption σ adsorbing and holding the electronic component, and an interval between the adsorption ports along the first direction The first interval is the same as the same 'and the interval between the adsorption ports along the second direction and the interval between the first holding portions along the second direction in the holding tray is actually with_. The electronic component transporting device according to claim 22, comprising a pressing device that presses the electronic component to the contact portion while the electronic component is housed in the holding tray. The electronic component transport device of claim 22, comprising: 2247-i〇44l-PF; Alicewu 60 201000380 second displacement device, wherein the electronic component is in the holding tray and has a plurality of The electronic component 2 is placed between the electronic components 2; the device 2 holds the tray, and the electronic component is held in the second holding tray, and the electronic component is pressed to the contact portion of the test head. 27. An electronic component testing device for testing an electronic component to be tested, comprising: the transporting device as described in claim 22; having a contact portion in electrical contact with the electronic component to be tested a test head, and a tester electrically connected to the test head; the transport device, when tested, electrically contacts the contact portion.卞 i i to 28 ─ ─ electronic component testing device 'in the state in which the tested electronic components respectively have a plurality of holding portions of the holding tray, the measured = component is pressed to the contact portion of the test head, to perform the The test of the electronic component to be tested, == the contact portion has a position determining means for directly contacting the electronic component held by the holding portion, and the electronic component to be tested is determined by the position of the contact portion. The electronic component testing device according to claim 28, wherein the holding tray receives the electronic component to be tested directly from a passenger terminal that is directly loaded into the electronic component testing device. 2247-i〇44i-pF; Alicewu 61