SU140047A - - Google Patents

Info

Publication number
SU140047A
SU140047A SU140047DA SU140047A SU 140047 A SU140047 A SU 140047A SU 140047D A SU140047D A SU 140047DA SU 140047 A SU140047 A SU 140047A
Authority
SU
USSR - Soviet Union
Application number
Other languages
Russian (ru)
Publication of SU140047A publication Critical patent/SU140047A/ru

Links

SU140047D SU140047A (en)

Publications (1)

Publication Number Publication Date
SU140047A true SU140047A (en)

Family

ID=2059705

Family Applications (1)

Application Number Title Priority Date Filing Date
SU140047D SU140047A (en)

Country Status (1)

Country Link
SU (1) SU140047A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0417194A4 (en) * 1988-05-20 1991-07-03 Athens Corporation Method and apparatus for purifying hydrogen fluoride

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0417194A4 (en) * 1988-05-20 1991-07-03 Athens Corporation Method and apparatus for purifying hydrogen fluoride

Similar Documents

Publication Publication Date Title
EP0417194B1 (en) Method and apparatus for purifying hydrogen fluoride
EP0831978B1 (en) On-site ammonia purification for semiconductor manufacture
WO2009110549A1 (en) Method and system for washing electronic component
KR100379886B1 (en) On-site generation system of ultra-purity buffered HF for semiconductor process
KR19990022281A (en) Point of Use Ammonia Purification for Electronic Components Manufacturing
CN1190913A (en) On-site manufacture of ultra-high-purity hydrofluoric acid for semiconductor processing
WO1996039264A1 (en) On-site manufacture of ultra-high-purity hydrochloric acid for semiconductor processing
SU140047A1 (en) The method of purification of hydrofluoric acid
SU140047A (en)