SE364396B - - Google Patents
Info
- Publication number
- SE364396B SE364396B SE07961/71A SE796171A SE364396B SE 364396 B SE364396 B SE 364396B SE 07961/71 A SE07961/71 A SE 07961/71A SE 796171 A SE796171 A SE 796171A SE 364396 B SE364396 B SE 364396B
- Authority
- SE
- Sweden
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
- H01L21/76897—Formation of self-aligned vias or contact plugs, i.e. involving a lithographically uncritical step
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/48—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
- H01L23/482—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of lead-in layers inseparably applied to the semiconductor body
- H01L23/485—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of lead-in layers inseparably applied to the semiconductor body consisting of layered constructions comprising conductive layers and insulating layers, e.g. planar contacts
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/52—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames
- H01L23/522—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Manufacturing & Machinery (AREA)
- Ceramic Engineering (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US050779A US3865624A (en) | 1970-06-29 | 1970-06-29 | Interconnection of electrical devices |
Publications (1)
Publication Number | Publication Date |
---|---|
SE364396B true SE364396B (xx) | 1974-02-18 |
Family
ID=21967376
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
SE07961/71A SE364396B (xx) | 1970-06-29 | 1971-06-18 |
Country Status (8)
Country | Link |
---|---|
US (1) | US3865624A (xx) |
BE (1) | BE769050A (xx) |
CA (1) | CA922426A (xx) |
DE (1) | DE2132034A1 (xx) |
FR (1) | FR2096565B1 (xx) |
GB (1) | GB1347410A (xx) |
NL (1) | NL7108657A (xx) |
SE (1) | SE364396B (xx) |
Families Citing this family (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
NL166156C (nl) * | 1971-05-22 | 1981-06-15 | Philips Nv | Halfgeleiderinrichting bevattende ten minste een op een halfgeleidersubstraatlichaam aangebrachte halfge- leiderlaag met ten minste een isolatiezone, welke een in de halfgeleiderlaag verzonken isolatielaag uit door plaatselijke thermische oxydatie van het half- geleidermateriaal van de halfgeleiderlaag gevormd isolerend materiaal bevat en een werkwijze voor het vervaardigen daarvan. |
JPS59220952A (ja) * | 1983-05-31 | 1984-12-12 | Toshiba Corp | 半導体装置の製造方法 |
US4400867A (en) * | 1982-04-26 | 1983-08-30 | Bell Telephone Laboratories, Incorporated | High conductivity metallization for semiconductor integrated circuits |
JPH06314687A (ja) * | 1993-04-30 | 1994-11-08 | Sony Corp | 多層配線構造の半導体装置およびその製造方法 |
US5736457A (en) | 1994-12-09 | 1998-04-07 | Sematech | Method of making a damascene metallization |
US8361856B2 (en) | 2010-11-01 | 2013-01-29 | Micron Technology, Inc. | Memory cells, arrays of memory cells, and methods of forming memory cells |
US8329567B2 (en) * | 2010-11-03 | 2012-12-11 | Micron Technology, Inc. | Methods of forming doped regions in semiconductor substrates |
US8431458B2 (en) | 2010-12-27 | 2013-04-30 | Micron Technology, Inc. | Methods of forming a nonvolatile memory cell and methods of forming an array of nonvolatile memory cells |
US8450175B2 (en) | 2011-02-22 | 2013-05-28 | Micron Technology, Inc. | Methods of forming a vertical transistor and at least a conductive line electrically coupled therewith |
US8569831B2 (en) | 2011-05-27 | 2013-10-29 | Micron Technology, Inc. | Integrated circuit arrays and semiconductor constructions |
US9036391B2 (en) | 2012-03-06 | 2015-05-19 | Micron Technology, Inc. | Arrays of vertically-oriented transistors, memory arrays including vertically-oriented transistors, and memory cells |
US9006060B2 (en) | 2012-08-21 | 2015-04-14 | Micron Technology, Inc. | N-type field effect transistors, arrays comprising N-type vertically-oriented transistors, methods of forming an N-type field effect transistor, and methods of forming an array comprising vertically-oriented N-type transistors |
US9129896B2 (en) | 2012-08-21 | 2015-09-08 | Micron Technology, Inc. | Arrays comprising vertically-oriented transistors, integrated circuitry comprising a conductive line buried in silicon-comprising semiconductor material, methods of forming a plurality of conductive lines buried in silicon-comprising semiconductor material, and methods of forming an array comprising vertically-oriented transistors |
US9478550B2 (en) | 2012-08-27 | 2016-10-25 | Micron Technology, Inc. | Arrays of vertically-oriented transistors, and memory arrays including vertically-oriented transistors |
US9111853B2 (en) | 2013-03-15 | 2015-08-18 | Micron Technology, Inc. | Methods of forming doped elements of semiconductor device structures |
US11259402B1 (en) | 2020-09-08 | 2022-02-22 | United States Of America As Represented By The Secretary Of The Air Force | Fabrication of electrical and/or optical crossover signal lines through direct write deposition techniques |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3386894A (en) * | 1964-09-28 | 1968-06-04 | Northern Electric Co | Formation of metallic contacts |
US3436611A (en) * | 1965-01-25 | 1969-04-01 | Texas Instruments Inc | Insulation structure for crossover leads in integrated circuitry |
US3442701A (en) * | 1965-05-19 | 1969-05-06 | Bell Telephone Labor Inc | Method of fabricating semiconductor contacts |
DE1564705A1 (de) * | 1966-09-12 | 1970-05-14 | Siemens Ag | Halbleiteranordnung mit mindestens einem in Emitterschaltung betriebenen Transistor |
US3988214A (en) * | 1968-06-17 | 1976-10-26 | Nippon Electric Company, Ltd. | Method of fabricating a semiconductor device |
-
1970
- 1970-06-29 US US050779A patent/US3865624A/en not_active Expired - Lifetime
-
1971
- 1971-01-26 CA CA103684A patent/CA922426A/en not_active Expired
- 1971-06-18 SE SE07961/71A patent/SE364396B/xx unknown
- 1971-06-23 NL NL7108657A patent/NL7108657A/xx unknown
- 1971-06-24 GB GB2961171A patent/GB1347410A/en not_active Expired
- 1971-06-25 BE BE769050A patent/BE769050A/xx unknown
- 1971-06-28 DE DE19712132034 patent/DE2132034A1/de active Pending
- 1971-06-28 FR FR7123521A patent/FR2096565B1/fr not_active Expired
Also Published As
Publication number | Publication date |
---|---|
DE2132034A1 (de) | 1972-01-05 |
CA922426A (en) | 1973-03-06 |
BE769050A (fr) | 1971-11-03 |
NL7108657A (xx) | 1971-12-31 |
FR2096565B1 (xx) | 1974-05-31 |
FR2096565A1 (xx) | 1972-02-18 |
US3865624A (en) | 1975-02-11 |
GB1347410A (en) | 1974-02-27 |