KR102339677B1 - optical inspection device - Google Patents

Abstract

It aims at providing the optical inspection apparatus which can test|inspect a defect with one apparatus and one test|inspection even if a defect exists in any position of the cross section of a to-be-inspected object. In the optical inspection apparatus of the present invention, when the inspected object G is viewed from a substantially vertical upward direction using the one-dimensional imaging means 13, the central plane ( A first region 31 having a substantially semi-cylindrical surface on which the central axis ax is located on S1), and a second region 32 having a substantially semi-spherical or semi-elliptical surface formed at both ends of the first region 31 And the light is irradiated to the inspection target object (G) from the plurality of light emitting units (30) provided in the third region (33). In a 1st area|region, the light emitting part 30a is arrange|positioned along the direction substantially orthogonal to the conveyance direction F of the to-be-inspected object G in areas other than the vicinity of the center plane S1. Moreover, in the 2nd area|region 32 and the 3rd area|region 33, the light emitting part 30a is arranged in the position on the center plane S1.

Description

optical inspection device

The present invention relates to an optical inspection apparatus.

In Patent Document 1, a plurality of lighting devices are arranged so that the light irradiated onto the object to be inspected and incident on the one-dimensional imaging means becomes specularly reflected light, diffused reflected light, and transmitted light, respectively, and the timing of their lighting is determined by the transmission time of the one-dimensional imaging means. Disclosed is an imaging optical inspection apparatus that changes for each image and integrates image data transmitted from a one-dimensional imaging means for each image data lit by the same lighting device to create integrated image data.

Japanese Patent Laid-Open No. 2012-42297

The invention described in Patent Document 1 is to inspect a transparent plate-shaped object to be inspected. As a transparent plate-shaped to-be-inspected object, the cover glass used for a portable terminal etc. is mentioned, for example. The cover glass has a substantially rectangular shape, and a cross section is polished. In order to inspect a defect (for example, cracking of a cross section) in cross-section processing of such cover glass or the like, it is necessary to illuminate all the end surfaces equally, and to make the reflected light incident on the imaging means.

In the invention described in Patent Document 1, the optical axis of the one-dimensional imaging means is inclined by about 45° with respect to the normal line of the object to be inspected. Accordingly, in the invention described in Patent Document 1, light reflected from a partial end face (referred to as section I) is incident on the imaging means, but light reflected from an end face other than section I (referred to as section II) is sent to the imaging means There is a risk that you will not be hired. And in the cross section II, there exists a problem that a defect cannot be imaged, ie, a defect cannot be detected.

The present invention has been made in view of such circumstances, and an object of the present invention is to provide an optical inspection apparatus capable of inspecting a defect with one device and one inspection even if the defect is located at any position in the cross section of the object to be inspected.

In order to solve the above problems, the optical inspection apparatus according to the present invention includes, for example, a mounting unit that mounts an inspection target in a horizontal direction, and a transport unit that moves the inspection target placed on the mounting unit along a conveying direction. and a one-dimensional imaging means for imaging the object to be inspected from substantially vertically upward, the one-dimensional imaging means arranged so that a longitudinal direction is substantially orthogonal to the conveying direction, and a light emitting unit having a plurality of light emitting units for irradiating light to the object The light irradiation unit includes a first region of a substantially semi-cylindrical surface in which a central axis is positioned on a central plane that is a plane in a substantially vertical direction including the one-dimensional imaging means, and formed at both ends of the first region. It has a second region and a third region of a substantially hemispherical surface or a substantially semi-elliptical surface, and in the first region, a plurality of band-shaped light emitting units in which the light emitting units are arranged along a direction substantially orthogonal to the conveying direction; The pattern light emitting part is provided in a region other than the vicinity of the central plane in the first region, and in the second region and the third region, the light emitting part is arranged on the central plane, do.

According to the optical inspection apparatus according to the present invention, when an object to be inspected is imaged from substantially vertically upward using the one-dimensional imaging means, the central axis is positioned on the central plane, which is a plane in the substantially vertical direction including the one-dimensional imaging means. Light is irradiated to the object to be inspected from a plurality of light irradiating units provided in a first region having a substantially semi-cylindrical surface, and a second region and a third region having a substantially hemispherical or substantially semi-elliptical surface formed at both ends of the first region. In a 1st area|region, the light emitting part is arranged in the area|region other than the center plane vicinity along the direction substantially orthogonal to the conveyance direction of a to-be-inspected object. Accordingly, the light reflected from the front end surface and the rear end surface of the object to be inspected can be made incident on the one-dimensional imaging means. Moreover, in the 2nd area|region and 3rd area|region, the light emitting part is arranged in the position on the image of a center plane. Thereby, the light reflected from the left and right end surfaces of the object to be inspected can be made incident on the one-dimensional imaging means. Therefore, even if a defect exists in any position of the cross section of a to-be-inspected object, a defect can be test|inspected by one apparatus and one test|inspection.

Here, the band-shaped light emitting unit is provided such that an intersection line between the optical axis and the central plane and the upper surface of the mounting unit intersects, and the band-shaped light emitting unit has an angle between the optical axis and the central plane of about 8° or about 17° You may have a 1st strip|belt-shaped light emitting part which is phosphorus. Thereby, in the case where a pearl pigment is used, or when a pearl pigment is not used, the image which can detect the color unevenness of a printing part etc. can be imaged.

Here, the conveying unit is controlled to convey the object to be inspected at a constant speed, the one-dimensional imaging means is driven to capture images at regular intervals, and in synchronization with the imaging by the one-dimensional imaging means, the first area a first light emitting area that is a half area separated from the center plane of a second light emitting area other than the first light emitting area in the first area, a third light emitting area on the central plane of the second area, the third A control unit may be provided for irradiating the fourth light emitting region and the first band-shaped light emitting portion on the central plane of the region, respectively. As a result, an image in which the defect in the front end P surface shines, an image in which the defect in the rear end P surface shines, an image in which the defect in the left and right ends P surface shines, and an image in which the defect in the printed part is darker than in other print parts, are obtained as the inspected object. You can take pictures at different timings during one transfer.

Here, the light irradiation unit may include a cylindrical lens disposed between the band-shaped light emitting unit and an intersection between the central plane and the upper surface of the mounting unit. Thereby, the light irradiated from the strip|belt-shaped light emitting part can be condensed, and the imaging frequency of a one-dimensional imaging means can be made high (imaging time shortened).

Here, a first imaging unit provided above or below the mounting unit, and a second imaging unit provided on the opposite side with the first imaging unit and the mounting unit interposed therebetween so that the optical axis coincides with the optical axis of the first imaging unit; , a first coaxial illumination for irradiating parallel light from a normal direction to the object to be inspected, a first coaxial illumination that is a coaxial illumination of the first imaging means, and a first coaxial illumination provided on the opposite side with the first coaxial illumination and the mounting unit interposed therebetween 2 coaxial illumination comprising a second coaxial illumination that is coaxial illumination of the second imaging means, wherein light irradiated from the first coaxial illumination and specularly reflected from the inspected object is incident on the first imaging unit, and A light irradiated from the second coaxial illumination and specularly reflected by the inspected object, and a light irradiated from the first coaxial illumination and transmitted through the inspected object may enter the second imaging means. Through this, a transmitted image capable of detecting defects in opaque parts of the inspection object (for example, scratches on the printed part, chipping of the printing edge, etc.) Images can be captured.

Here, a first mode in which the transport unit is controlled to transport the object to be inspected at a constant speed, and irradiating the first coaxial illumination with a first intensity, and a second mode for irradiating the second coaxial illumination with the first intensity form, irradiating the first coaxial illumination or the second coaxial illumination with three irradiation patterns of a third type for irradiating the first coaxial illumination with a second intensity, and further, according to the irradiation of the first type 1 so that an image is acquired by an imaging means, an image is acquired by a said 2nd imaging means in accordance with irradiation of said 2nd form, and an image is acquired by said 2nd imaging means in accordance with irradiation of said 3rd form, An imaging unit and a second control unit for driving the second imaging unit may be provided. Thereby, a transmission image and a specular reflection image can be image|photographed at respective timings while the to-be-inspected object is conveyed once.

Here, the second imaging means provided on the opposite side with the one-dimensional imaging means and the mounting unit interposed therebetween so that the optical axis coincides with the optical axis of the one-dimensional imaging means; A first coaxial illumination that is coaxial illumination of the one-dimensional imaging means and a second coaxial illumination provided on the opposite side with the first coaxial illumination and the mounting unit interposed therebetween, the first coaxial illumination being coaxial illumination of the second imaging unit 2 coaxial illumination is provided, wherein the light irradiation unit is provided between the one-dimensional imaging unit and the transport unit, and the one-dimensional imaging unit is irradiated from the light irradiation unit or the first coaxial illumination unit, and in the object to be inspected The specularly reflected light is incident on the second imaging means, and the light that is irradiated from the second coaxial illumination, is specularly reflected from the inspected object, and is irradiated from the first coaxial illumination and transmitted through the inspected object. good to do Thereby, a transmission image capable of detecting defects in an opaque portion of an object to be inspected, and a specular reflection image capable of detecting scratches or foreign substances on the surface or back surface of the object to be inspected, can be captured by fewer imaging means.

Here, a first mode in which the transport unit is controlled to transport the object to be inspected at a constant speed, and irradiating the first coaxial illumination with a first intensity, and a second mode for irradiating the second coaxial illumination with the first intensity form, irradiating the first coaxial illumination or the second coaxial illumination with three irradiation patterns of a third type of irradiating the first coaxial illumination with a second intensity, and also irradiating the 1 the one-dimensional image is acquired by a dimensional imaging means, an image is acquired by the second imaging means in accordance with the irradiation of the second form, and an image is acquired by the second imaging means in accordance with the irradiation of the third mode; An imaging unit and a third control unit for driving the second imaging unit may be provided. Thereby, a transmission image and a specular reflection image can be image|photographed at respective timings while the to-be-inspected object is conveyed once.

Here, the light irradiation part may have a light diffusion plate which is provided adjacent to the light emitting part and diffuses the light irradiated from the light emitting part. Thereby, the light irradiated from the plurality of light emitting units is used as an elongated surface light source by the light diffusion plate, and it is possible to prevent inappropriateness in which the dotted light of the light emitting unit is reflected on the object to be inspected.

Here, an optical element for adjusting a focal length for adjusting the focal length of the one-dimensional imaging means and a reflecting mirror provided adjacent to the mounting unit are provided, wherein the optical element for adjusting the focal length and the reflecting mirror are installed on the central plane In a plan view, a placement area, which is an area on the placement unit on which the inspection object is placed, is located below the one-dimensional imaging means in the vertical direction, and in a plan view, the reflector is In a direction substantially orthogonal to the direction, it is provided outside the mounting area and at a position adjacent to the mounting area, the reflecting surface of the reflecting mirror is substantially flat, and the reflecting surface is a horizontal plane where a line intersecting the central plane is a horizontal plane. The optical element for focal length adjustment may be arranged so as to overlap a line joining the one-dimensional imaging means and the reflecting mirror, while extending substantially along the conveying direction so as to be inclined with respect to the . Thereby, even if it is a cover glass which has a partial cylindrical shape or an elliptical-cylindrical shape on a side surface, it can test|inspect also about a defect on a side surface by one test|inspection. That is, by reflecting the image of the side of the object to be inspected by the reflector and guiding it to the one-dimensional imaging means, in other words, by increasing the focal length of the one-dimensional imaging means with the optical element for focal length adjustment, focus on the side below the plane of the object to be inspected can match

Here, the said optical element for focal length adjustment is a glass plate, and you may provide so that both end surfaces substantially orthogonal to a plate|board thickness direction may become horizontal. Thereby, light is refracted in the process of entering the optical element for focal length adjustment and the process of light exiting from the optical element for focal length adjustment, and the focal position of the one-dimensional imaging means can be extended.

Here, a moving unit for moving the one-dimensional imaging means in an up-down direction, a height acquiring unit for acquiring the height of the object to be inspected, and controlling the moving part based on the information acquired by the height acquiring unit, the one-dimensional imaging means A movement control unit may be provided for moving the one-dimensional imaging means in an up-down direction in accordance with a change in height of the object to be inspected passing through. Accordingly, even when the height of the object to be inspected changes, a clear image in focus can be captured by the one-dimensional imaging means.

Here, the said height acquisition part may have a surface light source which irradiates light in the direction substantially orthogonal to the said conveyance direction, and the side image pickup means which irradiates from the said surface light source, and which the light which passed through the said object is incident. Accordingly, the height of the inspected object can be accurately acquired by capturing an image such as a dark shadow picture in the portion blocked by the inspected object and light in the other portions by the side imaging means.

Here, the light irradiation unit includes, in the second region and the third region, a light emitting block in which the light emitting units are arranged in a line, and a second cylindrical lens through which the light irradiated from the light emitting unit passes, In the region and the third region, the extension direction of the light emitting block is inclined with respect to the horizontal direction, and in the second region and the third region, with respect to the extension direction of the light emitting block, the The extension direction of the second cylindrical lens may be inclined. Thereby, the focus of the light irradiated from the 2nd area|region and the 3rd area|region can be adjusted to the object to be inspected. In addition, since the second region and the third region supplement the first region, the number of light emitting units included in the band-shaped light emitting unit of the first region can be reduced.

Here, the light irradiation part may have a heat dissipation member formed of a material with high thermal conductivity, and the light emitting part may be provided in the heat dissipation member. Thereby, the heat generated from the light emitting part can be efficiently dissipated.

Here, the heat dissipating member is provided with a blower for blowing air, the heat dissipating member has a plurality of plates provided with the light emitting section, the plates extending in a direction substantially orthogonal to the conveying direction, and the blowing section includes the plate You may send the wind in a direction along the direction of the speech. Thereby, the cooling effect by a heat radiating member can be improved.

Here, the second imaging means is provided below the mounting unit, and above the second imaging means, a circularly polarizing filter is provided, the circularly polarizing filter having a plane in a direction substantially perpendicular to the thickness direction, It may be provided so that it may incline slightly with respect to the direction substantially orthogonal to the optical axis of the said 2nd imaging means. Thereby, the light reflected by the imaging lens surface of the 2nd imaging means provided below the mounting part enters the camera provided above the mounting part, and it can prevent the bright light line from being included in the image picked up by this camera.

ADVANTAGE OF THE INVENTION According to this invention, even if a defect exists in any position of the cross section of a to-be-inspected object, a defect can be test|inspected by one apparatus and one test|inspection.

1 : is a front view which shows the outline of the optical inspection apparatus 1 which concerns on 1st Embodiment.
2 is a diagram showing the details of the three-dimensional lighting unit 30 .
3 is a schematic diagram showing the details of the band-shaped light emitting part 31a.
4 : is a figure which shows typically the cross section of the optical inspection apparatus 1 when the optical inspection apparatus 1 is cut|disconnected by the plane parallel to the xz plane so that the 1st area|region 31 may be included.
5 is a schematic plan view of the three-dimensional lighting unit 30 .
6 is a schematic diagram showing the details of the strip-shaped light emitting part 32a.
7 is a block diagram showing an electrical configuration of the optical inspection apparatus 1 .
8 is a block diagram for explaining the electrical connection between the output unit 73 and each configuration of the optical inspection device 1 .
9 is a diagram for explaining signals output from the output unit 73 to the first camera 11 , the second camera 12 , and the coaxial lighting unit 20 .
Fig. 10 is a timing chart in the process shown in Fig. 9;
11 is a diagram for explaining signals output from the output unit 73 to the third camera 13 and the stereoscopic illumination unit 30 .
12 is a diagram showing correspondence between the signal output shown in FIG. 11 and a defect included in an image captured by the stereoscopic illumination unit 30 .
13 : is a figure which shows the mode of the light in the cross section of cover glass G, and shows the path|route of light by the dashed-dotted line.
Fig. 14 is a timing chart in the process shown in Fig. 11;
15 : is an example of the transmission image of the cover glass G. FIG.
16 : is an example of the specular reflection image of the cover glass G. FIG.
17 : is an example of the image (partially enlarged view) in which the defect in P inner surface of the front-end|tip of cover glass G shined.
18 : is an example of the image (partially enlarged view) in which the defect of the printing part of cover glass G is darker than other printing parts.
Fig. 19 is a view schematically showing a light emitting block 30b-1 according to a modification, (A) is a side view, (B) is a view of the state shown in (A), viewed from below in the figure to be.
20 : is a front view which shows the outline of the optical inspection apparatus 2 which concerns on 2nd Embodiment.
21 : is a figure which shows the correspondence between the order of imaging processing, and the image imaged by the 1st camera 11 and the 2nd camera 12. FIG.
22 : is a front view which shows the outline of the optical inspection apparatus 3 which concerns on 3rd Embodiment.
23 is an enlarged perspective view of a part of the optical inspection device 3 .
24 : is a figure which shows schematic structure in the state which cut|disconnected the optical inspection apparatus 3 by center plane S1.
25 : is a figure which shows the relationship between the position of cover glass G1, and the image imaged by the 3rd camera 13, (A) is an enlarged view of the side part of cover glass G1, (B) is 3rd camera ( A part of the image captured in 13) is shown.
It is a figure which shows typically a mode that measures the height of cover glass G1, and is the figure seen from the direction substantially orthogonal to conveyance direction F.
It is a figure which shows typically a mode that measures the height of cover glass G1, and is the figure which looked along the conveyance direction F.
Fig. 28 is a perspective view schematically showing a stereoscopic illumination unit 30A included in the optical inspection apparatus according to the third embodiment.
29 is a schematic diagram showing details of the strip-shaped light emitting part 31a-1.
30 is a schematic diagram showing the details of the strip-shaped light emitting part 32a-1.
Fig. 31 is a diagram for explaining the path of light emitted from the three-dimensional lighting unit 30A.
32 : is a front view which shows the outline of the optical inspection apparatus 5 which concerns on 5th Embodiment.

EMBODIMENT OF THE INVENTION Hereinafter, embodiment of this invention is described in detail with reference to drawings. In each drawing, the same reference numerals are attached to the same elements, and descriptions of overlapping parts are omitted.

This invention is an optical inspection apparatus which test|inspects cover glass G, such as a portable terminal which is a to-be-inspected object. Defects such as scratches and polishing irregularities on the end face, surface, and back surface of the cover glass G, and defects such as print irregularities and cracks in the portion printed on the cover glass G are inspected based on the image captured by the optical inspection device It is possible. In addition, in this embodiment, although the form which an optical inspection apparatus test|inspects cover glass G, such as a portable terminal, is illustrated, the to-be-inspected object which an optical inspection apparatus test|inspects is not limited to a cover glass.

The cover glass G is grind|polished so that all sides may become a curved surface. Moreover, on the back surface of the cover glass G, printing is carried out partially. Hereinafter, the circular arc-shaped polished surface of the circumferential surface is referred to as a polish surface (hereinafter, P surface). In addition, to the printed part of the cover glass G, monochromatic printing in which a monochromatic organic paint is applied, or a monochromatic pigment serving as a base color is applied, and translucent particles are covered with transparent titanium dioxide or the like, pearl pigment ), a transparent layer containing a layered coating of pearl (pearl) coating is performed.

<First embodiment>

1 : is a front view which shows the outline of the optical inspection apparatus 1 which concerns on 1st Embodiment. The optical inspection apparatus 1 mainly has the imaging part 10, the coaxial illumination part 20, the stereoscopic illumination part 30, the mounting part 40, and the conveyance part 50 (refer FIG. 8).

The mounting unit 40 has a plurality of rollers 40a, and a cover glass G is mounted on the upper side. The conveyance part 50 moves the cover glass G provided in the mounting part 40 to the conveyance direction F (here, x direction), For example, the actuator which rotates the roller 40a (not shown) not), etc. Since the mounting unit 40 and the conveying unit 50 are already known, their description is omitted.

The imaging part 10 mainly consists of the 1st camera 11, the 2nd camera 12, and the 3rd camera 13 (in this embodiment, the 1st imaging means of this invention, respectively, and the 2nd imaging means and equivalent to one-dimensional imaging means). The first camera 11 , the second camera 12 , and the third camera 13 mainly include imaging lenses 11a , 12a , 13a and line sensors 11b , 12b , 13b such as line CCD and CMOS. have The line sensors 11b, 12b, 13b are arrange|positioned so that a longitudinal direction may be substantially orthogonal to the conveyance direction F of the cover glass G (that is, along the y direction). Since the imaging unit 10 is already known, its description is omitted.

The 1st camera 11 is provided in the upper side (+z side) of the mounting part 40, and images cover glass G from substantially vertical upward (+z direction). The 2nd camera 12 is provided in the opposite side (lower side (-z side) of the mounting part 40) across the 1st camera 11 and the mounting part 40, and covers glass G substantially vertically downward. The image is taken from (-z direction). The first camera 11 and the second camera 12 are installed so that the optical axis oax coincides.

The 3rd camera 13 is provided in the upper side (+z side) of the mounting part 40, and images cover glass G from substantially vertical upward. Moreover, the 3rd camera 13 is arrange|positioned so that the position (position in the plane parallel to the xy plane) in a horizontal direction differs from the 1st camera 11 and the 2nd camera 12.

The coaxial illumination unit 20 includes an upper coaxial illumination 21 that is coaxial illumination of the first camera 11 and a lower coaxial illumination 22 that is a coaxial illumination of the second camera 12 . The upper coaxial illumination 21 and the lower coaxial illumination 22 are so-called Kohler illumination, and irradiate the cover glass G with parallel light from the normal line direction (z direction). The upper coaxial illumination 21 and the lower coaxial illumination 22 are opposite sides with the mounting unit 40 interposed therebetween so that the optical axis oax coincides (the upper coaxial illumination 21 is the +z side, the lower side of the mounting unit 40) The coaxial illumination 22 is installed on the -z side of the mounting unit 40).

The configuration of the upper coaxial illumination 21 and the lower coaxial illumination 22 will be described. The upper coaxial illumination 21 and the lower coaxial illumination 22 include light sources 21a and 22a, glass integrators 21b and 22b for uniform illuminance distribution, and condensing lenses 21c and 22c, respectively. ), diaphragms 21d and 22d installed at positions approximately coincident with the focal points of the condensing lenses 21c and 22c, collimator lenses 21e and 22e for converting light into parallel light, and an optical path A bending mirror 21f, 22f, a Fresnel lens 21g, 22g having parallel straight grooves and condensing light on a straight line, and a harp bending an optical path It has half mirrors 21h and 22h.

As for the light sources 21a and 22a, the light emitting member is surface mounted on metal plates, such as aluminum. A heat sink (heat sink) is provided on the back surface of the metal plate. The light emitting member is a white (for example, 5700K color temperature) LED, and the irradiation angle is about 120 degrees.

The light sources 21a and 22a and the integrators 21b and 22b are provided adjacent to each other. Since light is irradiated from the LED in a relatively wide area, some light leaks out without being incident on the integrators 21b and 22b, but most of the light enters the integrators 21b and 22b and enters the cover glass. irradiated to G.

A half mirror 21h is installed on the optical axis of the first camera 11 . Accordingly, the light reflected by the half mirror 21h is irradiated perpendicularly to the cover glass G, and the light specularly reflected by the cover glass G is incident on the first camera 11 . Moreover, the light reflected by the half-mirror 21h penetrates the cover glass G, and enters the 2nd camera 12. As shown in FIG.

The half mirror 22h is provided on the optical axis of the second camera 12 . Accordingly, the light reflected by the half mirror 22h is irradiated perpendicularly to the cover glass G, and the light specularly reflected by the cover glass G is incident on the second camera 12 .

The three-dimensional lighting unit 30 irradiates light to the cover glass G from a plurality of directions. The light irradiated from the stereoscopic illumination unit 30 and reflected by the cover glass G is incident on the third camera 13 . 2 is a diagram showing the details of the three-dimensional lighting unit 30 . In FIG. 2 , the third camera 13 (the imaging lens 13a, the line sensor 13b) is indicated by a dotted line, and the viewing position 13c of the third camera 13 and the light to the third camera 13 are The path is indicated by a dashed dotted line.

The stereoscopic illumination unit 30 has a first area 31 having a substantially semi-cylindrical surface, and a second area 32 and a third area 33 having a substantially semi-spherical or semi-elliptical surface. The second region 32 and the third region 33 have the same shape and are disposed at both ends of the first region 31 .

In the first region 31, the light emitting portion 30a is provided on a substantially semi-cylindrical surface. The light emitting part 30a is the same as the light sources 21a and 22a, and has a white LED and a heat radiation member. The central axis ax of the first region 31 is located on the central plane S1 , which is a plane in the substantially vertical direction including the third camera 13 .

In the second region 32 and the third region 33 , the light emitting part 30a is provided on a substantially semi-spherical surface or on a substantially semi-elliptical surface. The center points of the second region 32 and the third region 33 are located on the central plane S1 . In the present embodiment, the second region 32 and the third region 33 are substantially hemispherical, but the shapes of the second region 32 and the third region 33 are not limited thereto.

In the 1st area|region 31, in the area|region other than the vicinity of the center plane S1 between the 3rd camera 13 and the mounting part 40, the direction substantially orthogonal to the conveyance direction F (that is, the y direction) Light-emitting parts 30a are arranged along the line. The light-emitting portions 30a arranged along the y-direction are referred to as band-shaped light-emitting portions 31a, 31b, 31c, 32d, 31e, 31f, 31g... (described later). Although the present embodiment has ten band-shaped light-emitting units 31a to 31j (see Fig. 4), the number of band-shaped light-emitting units is not limited thereto.

3 is a schematic diagram showing the details of the band-shaped light emitting part 31a. Since the band-shaped light-emitting units 31a to 31j have the same configuration, only the band-shaped light-emitting unit 31a will be described, and the description of the band-shaped light-emitting units 31b to 31j will be omitted.

The strip-shaped light-emitting part 31a has three light-emitting blocks 30b in which the light-emitting parts 30a are arranged in a row so that the total length is 3L and the length in the longitudinal direction is L.

The light emitting part 30a has a width w of about 3.4 mm and a length h of about 3.4 mm, and the distance between the adjacent light emitting parts 30a is about 0.2 mm. In this embodiment, since the length L of the light emitting block 30b is about 50 mm, about 13 light emitting parts 30a are arranged in one light emitting block 30b. Thereby, the band-shaped (linear) light is irradiated from the band-shaped light emitting part 31a.

In addition, although a white LED is used as the light emitting part 30a in this embodiment, the thing used for the light emitting part 30a is not limited to a white LED. The light emitting part 30a includes, for example, a combination of a blue or ultraviolet LED and a yellow phosphor, a combination of red, green and blue three-color chips, and a combination of a blue LED and a red and green phosphor, for example. You can also use that.

Next, the arrangement of the band-shaped light emitting units 31a to 31j in the stereoscopic illumination unit 30 will be described. 4 : is a figure which shows typically the cross section of the optical inspection apparatus 1 when the optical inspection apparatus 1 is cut|disconnected by the plane parallel to the xz plane so that the 1st area|region 31 may be included. In FIG. 4, the path|route of the light irradiated from the strip|belt-shaped light-emitting parts 31a-31j is shown with the dashed-two dotted line.

The central axis ax of the first region 31 is located in the vicinity of the upper surface of the cover glass G, and the band-shaped light emitting parts 31a to 31j are the circumferences of the radius R centering on the central axis ax (dotted line in FIG. 4 ). see) installed on the In addition, since the thickness of cover glass G is minute, the position of the upper surface of cover glass G substantially corresponds with the intersection of center plane S1 and the upper surface of the mounting part 40 (not shown in FIG. 4). The radius R is approximately equal to the length 3L of the strip-shaped light emitting portions 31a to 31j.

As for the strip|belt-shaped light emitting parts 31a-31j, the optical axis (refer the dashed-dotted line in FIG. 4) is the intersection of the central plane S1 and the mounting part 40 (intersection of the central plane S1 and the cover glass G), ie, the central axis ax. installed to intersect with

The band-shaped light emitting parts 31a to 31e are located on the +x side of the central plane S1, and the band-shaped light emitting parts 31f to 31j are located on the -x side of the central plane S1.

The band-shaped light emitting portions 31a and 31f are provided at positions closest to the center plane S1. The angle θ1 between the optical axis of the band-shaped light emitting units 31a and 31f and the central plane S1 is approximately 8°.

The band-shaped light emitting units 31b and 31g are provided outside the band-shaped light emitting units 31a and 31f and adjacent to the band-shaped light emitting units 31a and 31f. The angle θ2 between the optical axis of the band-shaped light emitting units 31b and 31g and the central plane S1 is approximately 17°.

The band-shaped light emitting parts 31c and 31h are provided outside the band-shaped light emitting parts 31b and 31g and adjacent to the band-shaped light emitting parts 31b and 31g. The angle θ3 between the optical axis of the band-shaped light emitting units 31c and 31h and the central plane S1 is approximately 26°.

The band-shaped light emitting units 31d and 31i are provided outside the band-shaped light emitting units 31c and 31h and adjacent to the band-shaped light emitting units 31c and 31h. An angle θ4 between the optical axis of the band-shaped light emitting units 31d and 31i and the central plane S1 is approximately 35°.

The band-shaped light emitting units 31e and 31j are provided outside the band-shaped light emitting units 31d and 31i and adjacent to the band-shaped light emitting units 31d and 31i. An angle θ5 between the optical axis of the band-shaped light emitting units 31e and 31j and the central plane S1 is approximately 44°.

The band-shaped light emitting portions 31a to 31j have a cylindrical lens 30c provided on the optical axis. The cylindrical lens 30c is formed by, for example, cutting an acrylic bar along the central axis and grinding the cut surface. The cylindrical lens 30c is provided between the light emitting part 30a and the central axis ax, and condenses the light irradiated from the light emitting part 30a in the vicinity of the central axis ax.

5 is a schematic plan view of the three-dimensional lighting unit 30 . In FIG. 5 , the viewing position 13c of the third camera 13 is indicated by a dotted line. 5, the light emitting block 30d (described later) is indicated by a broken line.

The second region 32 and the third region 33 have band-shaped light emitting portions 32a to 32i and 33a to 33i in which the light emitting portions 30a are arranged in a line. Further, in the present embodiment, each of the nine band-shaped light-emitting units 32a to 32i and 33a to 33i is provided, but the number of the band-shaped light-emitting units is not limited thereto.

The band-shaped light emitting portions 32a and 33a are provided on the central plane S1. The band-shaped light emitting parts 32b to 32e and 33b to 33e are provided on the extension lines of the band-shaped light emitting parts 31a to 31d, respectively. The band-shaped light emitting portions 32f to 32i and 33f to 33i are provided on the extension lines of the band-shaped light emitting portions 31f to 31i, respectively.

6 is a schematic diagram showing the details of the strip-shaped light emitting part 32a. Since the band-shaped light-emitting units 32a to 32i and 33a to 33i have substantially the same configuration, only the band-shaped light-emitting unit 32a will be described, and the band-shaped light-emitting units 32b to 32i and 33a to 33i will be described. omit

The strip-shaped light emitting part 32a has a plurality of light emitting blocks 30d in which the light emitting parts 30a are arranged in a line. In this embodiment, the length l of the light emitting block 30d is approximately 18.5 mm and the distance between the adjacent light emitting units 30a is approximately 0.2 mm. About 5 are arranged. The light emitting blocks 30d are arranged adjacently so that the light emitting parts 30a are positioned on a substantially cylindrical surface with a radius R (refer to the dotted line in FIG. 6 ).

Returning to the description of FIG. 5 . The number of light-emitting blocks 30d in the band-shaped light-emitting units 32a to 32c, 32f, 32g, 33a to 33c, 33f, and 33g is five, and the The number of light-emitting blocks 30d in the case is four, and the number of light-emitting blocks 30d in the band-shaped light-emitting units 32d, 32h, 33d, and 33h is two, but the band-shaped light-emitting units 32a to 32i are , 33a to 33i), the number of light emitting blocks 30d is not limited thereto.

The optical axis of each light emitting block 30d in the band-shaped light emitting portions 32a and 33a faces the center points O2 and O3 of the second region 32 and the third region 33 . The optical axis of each light emitting block 30d in the band-shaped light emitting units 32b to 32i and 33a to 33i faces the central point O1 of the first region 31 . However, the direction of the optical axis of each light emitting block 30d in the strip light emitting units 32a to 32i and 33a to 33i is not limited to the form shown in FIG. 5 .

7 is a block diagram showing an electrical configuration of the optical inspection apparatus 1 . The optical inspection apparatus 1 has an integrated circuit 71 , an input unit 72 , an output unit 73 , a power supply unit 74 , and a communication interface (I/F) 75 .

The integrated circuit 71 is, for example, an FPGA (Field-Programmable Gate Array), operates based on a program, and controls each part. The integrated circuit 71 has a function of a control unit (including the control unit of the present invention and the second control unit) that controls each unit of the optical inspection apparatus 1 . Specifically, the integrated circuit 71 acquires a signal from the input unit 72 , the output unit 73 , and the like, and generates a signal to be output from the output unit 73 based on the acquired signal. In the present embodiment, a program for realizing each function is stored in the FPGA which is the integrated circuit 71. However, the integrated circuit 71 is not limited to the FPGA, and the execution method of the program is not limited thereto.

Signals are input to the input unit 72 from various sensors such as the position detection sensors 81 and 82 . The input unit 72 has a switch for setting the output mode of each channel of the output unit 73 , setting the imaging frequency of the imaging unit 10 , and the like.

The output unit 73 has a plurality of channels, and outputs from other channels to the imaging unit 10 , the coaxial illumination unit 20 , the stereoscopic illumination unit 30 , and the like. For example, the output unit 73 outputs a drive motor pulse to the transport unit 50 , and outputs a horizontal synchronization signal, a vertical synchronization signal, and the like to the imaging unit 10 . In addition, the output unit 73 displays errors such as communication errors and time outs, while the cover glass G is traveling, while the imaging unit 10 is waiting for capture, and the coaxial illumination unit 20 . It has a display element, such as an LED and a 7-segment display which shows the illumination of the three-dimensional illumination part 30, etc.

8 is a block diagram for explaining the electrical connection between the output unit 73 and each configuration of the optical inspection device 1 . The output unit 73 includes an imaging unit 10 (first camera 11, second camera 12, and third camera 13) and a coaxial illumination unit 20 (upper coaxial illumination 21 and lower side). A signal is output to the coaxial illumination 22 ), the stereoscopic illumination unit 30 (belt-shaped light emitting units 31a to 31j , 32a to 32i , 33a to 33i ), and the carrying unit 50 .

The signal output from the output unit 73 is generated in the integrated circuit 71 based on a horizontal synchronizing signal or the like input from the personal computer (PC) 100 via the communication I/F 75 .

Returning to the description of FIG. 7 . The power supply unit 74 includes, for example, a switching power supply to which a voltage of 100 V AC is input and converted into a required voltage. The power supply unit 74 supplies electric power to the coaxial illumination unit 20 or the stereoscopic illumination unit 30 .

The communication I/F 75 receives data from an external device and transmits it to the integrated circuit 71 , and transmits data generated by the integrated circuit 71 to other devices. In addition, the communication I/F 75 has a connector for programming and debugging the integrated circuit 71 . The communication I/F 75 acquires a horizontal synchronization signal, a vertical synchronization signal, a drive motor start signal, and the like from a PC (personal computer) 100 , and outputs them to the integrated circuit 71 . In addition, the communication I/F 75 outputs image data captured by the imaging unit 10 to the PC 100 or the like.

The position detection sensors 81 and 82 detect the position of the cover glass G. As for the position detection sensor 81, the thing which the cover glass G was conveyed under the 1st camera 11 and the 2nd camera 12, and what passed under the 1st camera 11 and the 2nd camera 12 detect The position detection sensor 82 detects that the cover glass G was conveyed under the 3rd camera 13 and that the 3rd camera 13 has passed through.

PC 100, CPU (Central Processing Unit) 101, RAM (Random Access Memory) 102, ROM (Read Only Memory) 103, input/output interface (I/F) 104 and , a communication interface (I/F) 105 and a media interface (I/F) 106 .

The CPU 101 operates based on the programs stored in the RAM 102 and the ROM 103, and controls each unit. The signal output from the CPU 101 is output to the optical inspection device 1 via the communication I/F 105 .

RAM 102 is a volatile memory. The RAM 102 stores programs executed by the CPU 101, data used by the CPU 101, and the like. The ROM 103 is a nonvolatile memory in which various control programs and the like are stored. The CPU 101 operates based on the programs stored in the RAM 102 and the ROM 103, and controls each unit. The ROM 103 stores a boot program performed by the CPU 101 when the PC 100 is started, a program dependent on the hardware of the PC 100, and the like.

The CPU 101 controls an input device 111 such as a keyboard or a mouse, and an output device 112 such as a display device, via the input/output I/F 104 . The CPU 101 acquires data from the optical inspection apparatus 1 or other equipment via a network or the like via the communication I/F 105 , and outputs the generated data to the optical inspection apparatus 1 . .

Based on the input from the input device 111 , the CPU 101 sets the output of the channel of the output unit 73 , the order of outputting the lighting signal in the integrated circuit 71 , and sets the loop of processing Various settings, such as setting of the moving distance (empty running distance) of cover glass G from edge detection of cover glass G to an imaging start, are performed, and these setting data are produced|generated. The communication I/F 105 outputs the setting data generated by the CPU 101 to the optical inspection device 1 . Moreover, CPU101 acquires the image imaged by the imaging part 10 from the optical inspection apparatus 1, and produces|generates the image for inspection. Details of the image generation processing will be described later.

The media I/F 106 reads the program or data stored in the storage medium 113 and stores it in the RAM 102 . The storage medium 113 is, for example, an IC card, an SD card, a DVD, or the like.

Further, a program for realizing each function is read from, for example, the storage medium 113 , installed in the optical inspection device 1 via the RAM 102 , and executed by the CPU 101 . .

The configuration of the optical inspection device 1 and the PC 100 shown in Fig. 7 is a description of the main configuration while describing the characteristics of the present embodiment, and excluding the configuration of a general information processing device, for example. no. The constituent elements of the optical inspection apparatus 1 may be classified into more constituent elements according to the processing content, or one constituent element may process a plurality of constituent elements. In addition, in FIG. 7, although the optical inspection apparatus 1 and the PC 100 were made into different apparatus, the component of the PC 100 may be contained in the optical inspection apparatus 1. As shown in FIG.

The processing performed by the optical inspection apparatus 1 comprised in this way is demonstrated. The following processing is mainly performed by the integrated circuit 71 .

The integrated circuit 71 generates a driving motor pulse for driving the roller 40a of the mounting unit 40 , and the output unit 73 outputs it to the conveying unit 50 . Thereby, cover glass G moves at a constant speed along the conveyance direction F on the mounting part 40 top.

When it is detected that the cover glass G has been conveyed from the position detection sensor 81 under the first camera 11 and the second camera 12 , a detection signal is transmitted from the position detection sensor 81 via the input unit 72 to the integrated circuit ( 71) is entered. When this detection signal is input, the integrated circuit 71 starts processing for capturing a transmitted image and a specular reflection image with the first camera 11 and the second camera 12 . Hereinafter, the process of imaging a transmission image and a specular reflection image WHEREIN: It demonstrates using FIGS. 9 and 10. FIG.

<Processing of capturing a transmitted image and a specular reflection image>

9 is a diagram for explaining signals output from the output unit 73 to the first camera 11 , the second camera 12 , and the coaxial lighting unit 20 . A channel (hereinafter referred to as ch) is a part of a channel of the output unit 73 , ch1 to 3 are outputs to the upper coaxial illumination 21 , and ch4 to 6 are outputs to the lower coaxial illumination 22 . to be. ROOP is a signal indicating repeated processing, and is output to the integrated circuit 71 . In addition, the numerical values described in ch1 - 6 of FIG. 9 are the time for irradiating the upper coaxial illumination 21 and the lower coaxial illumination 22, The unit is microsecond (microsecond).

Fig. 10 is a timing chart in the process shown in Fig. 9; The imaging signal is a signal for driving the first camera 11 and the second camera 12 , and is generated in the integrated circuit 71 based on a horizontal synchronization signal input at a constant period. In this embodiment, the frequency of the imaging signal is 3 kHz, and the interval T of the imaging signal is approximately 330 s. The imaging signal is a signal in which the imaging period T1 is High and the blanking period T2 is Low, and the light amount of the first camera 11 or the second camera 12 is adjusted by adjusting the imaging period T1. (brightness of the captured image) is adjusted. The signal for coaxial illumination is generated in synchronization with the image pickup signal. In this embodiment, although the imaging period T1 is set to 300 microseconds, the imaging period T1 is not limited to this.

Hereinafter, the processes of steps 1 to 3 shown in FIGS. 9 and 10 will be described in detail.

(Top 1)

The integrated circuit 71 generates a signal for irradiating the upper coaxial illumination 21 with 5 μs, and the output unit 73 outputs the signal to the upper coaxial illumination 21 . At the same time, the integrated circuit 71 generates an imaging signal, and the output unit 73 outputs it to the second camera 12 . Thereby, the light which permeate|transmitted the cover glass G injects into the 2nd camera 12, and the 2nd camera 12 picks up a transmitted image. In the transmitted image, defects in the opaque part, for example, scratches on the printed part, scrambled print edges, etc. can be detected.

In step 1, the signal for irradiating the upper coaxial illumination 21 becomes high at the same time the imaging signal becomes high, and becomes low after 5 s elapses. The time of 5 microseconds for irradiating the upper coaxial illumination 21 is very short compared with the imaging period of 300 microseconds. In glass, about 4% of light is reflected, and about 96% of the remaining light is transmitted. Therefore, by shortening the time for irradiating the upper coaxial illumination 21, it is possible to capture a transmitted image having an appropriate brightness.

Further, in Step 1, the upper coaxial illumination 21 was irradiated at 5 μs and the transmitted image was captured by the second camera 12, but the lower coaxial illumination 22 was irradiated at 5 μs, and the first camera ( 11), you may pick up a transmitted image.

(Top 2)

The integrated circuit 71 generates a signal for irradiating the upper coaxial illumination 21 at 100 μs, and the output unit 73 outputs the signal to the upper coaxial illumination 21 . At the same time, the integrated circuit 71 generates an imaging signal, and the output unit 73 outputs it to the first camera 11 . Thereby, the light specularly reflected from the surface of the cover glass G injects into the 1st camera 11, and the 1st camera 11 picks up a specular reflection image.

Light is irradiated from the upper side coaxial illumination 21 to the cover glass G from the perpendicular|vertical direction. Therefore, since light specularly reflects and injects into the 1st camera 11, the part without a flaw, foreign material, etc. on the surface of cover glass G is reflected brightly in the imaged image. On the other hand, in the part with a flaw, a foreign material, etc. in the surface of cover glass G, since light diffuses and does not enter the 1st camera 11, it appears dark in the picked-up image. In this way, a flaw, foreign material, etc. on the surface of the cover glass G can be detected. In addition, it is effective only for the thing with high reflectance, such as a mirror surface, to detect a surface flaw, a foreign material, etc. with a specular reflection light.

(Top 3)

The integrated circuit 71 generates a signal for irradiating the lower coaxial illumination 22 at 100 μs, and the output unit 73 outputs this signal to the lower coaxial illumination 22 . At the same time, the integrated circuit 71 generates an imaging signal, and the output unit 73 outputs it to the second camera 12 . Thereby, the light which specularly reflected from the back surface of the cover glass G injects into the 2nd camera 12, and the 2nd camera 12 picks up a reflected image. In this way, a flaw, foreign material, etc. on the back surface of cover glass G can be detected.

In addition, the integrated circuit 71 generates a signal representing the iterative process while performing the output of turn 3 . The output unit 73 outputs a signal to the lower coaxial illumination 22 and outputs a signal representing the iterative processing to the integrated circuit 71 . The integrated circuit 71 repeats the process of receiving the signal representing the repeat process, returning the process to the first, and sequentially outputting the signals shown in steps 1 to 3.

In Steps 2 and 3, the signal for irradiating the upper coaxial illumination 21 or the lower coaxial illumination 22 becomes high at the same time as the imaging signal becomes High, and becomes low after 100 µs has elapsed. ) becomes A time of 100 µs for irradiating the upper coaxial illumination 21 in turn 2 and the lower coaxial illumination 22 in turn 3 is about 1/3 of the imaging period T1 (300 µs), and the irradiation time in turn 1 It is significantly longer than (5㎲). Thus, when imaging a specular reflection image, by lengthening the time for irradiating the upper coaxial illumination 21 or the lower coaxial illumination 22, the reflected image of suitable brightness can be imaged.

The integrated circuit 71 outputs the driving motor pulses to the conveying unit 50 through the output unit 73 simultaneously with the signal output of the irradiation patterns of steps 1 to 3 described above. Thereby, conveying the cover glass G at a constant speed on the mounting part 40 and changing the positions of the cover glass G, the 1st camera 11, and the 2nd camera 12 relatively, the 1st camera 11 or the 1st camera 12 2 The imaging is performed with the camera 12 .

Thereby, the transmission image and the specular reflection image can be image|photographed at different timings while the to-be-inspected object is conveyed once. In the process of imaging the transmission image and the specular reflection image of the cover glass G with the 1st camera 11 and the 2nd camera 12, the cover glass G passes through the 1st camera 11 and the 2nd camera 12. Continue until When the cover glass G passes through the first camera 11 and the second camera 12 , a detection signal by the position detection sensor 81 is input to the integrated circuit 71 . When this detection signal is input, the integrated circuit 71 ends signal output to the first camera 11 , the second camera 12 , and the coaxial lighting unit 20 .

The integrated circuit 71 continuously outputs the driving motor pulse to the conveying unit 50 via the output unit 73 . When it is detected by the position detection sensor 82 that the cover glass G has been conveyed under the third camera 13 , a detection signal is input from the position detection sensor 82 to the integrated circuit 71 via the input unit 72 . When this detection signal is input, the integrated circuit 71 starts processing for capturing a reflected image with the third camera 13 . Hereinafter, the process of imaging a reflected image is demonstrated using FIGS. 11-14.

<Process of capturing a reflected image>

11 is a diagram for explaining signals output from the output unit 73 to the third camera 13 and the stereoscopic illumination unit 30 . ch11-46 are a part of the channel which the output part 73 has. The numerical value described in ch11-46 is the time for irradiating the three-dimensional illumination part 30, and a unit is microsecond. In FIG. 11, illustration of a part of ch is abbreviate|omitted. Moreover, FIG. 12 is a figure which shows the correspondence between the signal output shown in FIG. 11, and the defect contained in the image imaged with the 3rd camera 13. As shown in FIG. It is a figure which shows the mode of the light in the cross section of cover glass G, and shows the path|route of light by the dashed-dotted line. Fig. 14 is a timing chart in the process shown in Fig. 11;

In Fig. 11, ch11 to 40 are outputs to the band-shaped light emitting units 31a to 31j. In this embodiment, one channel is allocated to each light emitting block 30b. For example, ch11 to 13 are outputs to the band-shaped light-emitting unit 31a (three light-emitting blocks 30d constituting it, the same hereinafter), ch14 to 16 are outputs to the band-shaped light-emitting unit 31b, ch17 to 19 are outputs to the band-shaped light emitting unit 31c, ch20 to 22 are outputs to the band-shaped light emitting unit 31d, ch23 to 25 are outputs to the band-shaped light emitting unit 31e, and ch26 to 28 are bands output to the light emitting part 31f, ch29 to 31 are outputs to the band light emitting part 31g, ch32 to 34 are outputs to the band light emitting part 31h, ch35 to 37 are the output to the band light emitting part 31i ), and ch38 to 40 are outputs to the band-shaped light emitting unit 31j.

Note that ch41 is an output to the band-shaped light-emitting units 32a, ch42 is an output to the band-shaped light-emitting units 32b to 32e, and ch43 is an output to the band-shaped light-emitting units 32f to 32i. Further, ch44 is an output to the band-shaped light-emitting units 33a, ch45 is an output to the band-shaped light-emitting units 33b to 33e, and ch46 is an output to the band-shaped light-emitting units 33f to 33i.

Hereinafter, the processes of steps 1 to 9 shown in FIGS. 11 and 13 will be described in detail.

(Top 1)

In the integrated circuit 71, the band-shaped light emitting part 31f is 100 µs, the belt-shaped light-emitting part 31g is 120 µs, the belt-shaped light-emitting part 31h is 150 µs, and the belt-shaped light-emitting part 31i is 180 µs. , generates a signal for irradiating the band-shaped light emitting unit 31j at 210 µs, and the output unit 73 outputs this signal to the band-shaped light emitting units 31f to 31j (refer to Fig. 11). At the same time, the integrated circuit 71 generates an imaging signal, and the output unit 73 outputs it to the third camera 13 . Thereby, the light reflected from the surface inside the P surface of the front-end|tip (end of the +x side) of the cover glass G which is irradiated from -x direction to the 3rd camera 13 (it is hereafter referred to as P inner surface) enters (See Fig. 13). What is imaged with the 3rd camera 13 in turn 1 is the image in which the defect (print irregularity, grinding|polishing irregularity, a flaw, etc.) in P inner surface of the front-end|tip of cover glass G shined (refer FIG. 12).

(Top 2)

When the printed portion of the cover glass G is coated with pearl, the integrated circuit 71 irradiates the band-shaped light emitting part 31b with 300 µs and the strip-shaped light-emitting part 31g with 300 µs. , and the output unit 73 outputs this signal to the band-shaped light emitting units 31b and 31g (refer to Fig. 11). At the same time, the integrated circuit 71 generates an imaging signal, and the output unit 73 outputs it to the third camera 13 . Thereby, the 3rd camera 13 is irradiated from +x direction 17 degrees and -x direction 17 degrees, and the light reflected by the printing part of the cover glass G injects.

In addition, when printing other than pearl coating (monochromatic printing, etc.) is performed on the printed part of the cover glass G, the integrated circuit 71 sets the band-shaped light-emitting part 31a to 300 µs, and the band-shaped light-emitting part. A signal for irradiating 31f at 300 s is generated, and the output unit 73 outputs the signal to the band-shaped light emitting units 31a and 31f. At the same time, the integrated circuit 71 generates an imaging signal, and the output unit 73 outputs it to the third camera 13 . Thereby, the 3rd camera 13 is irradiated from +x direction 8 degrees and -x direction 8 degrees, and the light reflected by the printing part of the cover glass G injects.

The image captured by the third camera 13 in turn 2 is an image of contrast (for example, the defect of the printed part is different from that of the other printed part) in which the defect (stain, etc.) of the printed part of the cover glass G is different from that of the other printed part. dark or bright image) (refer to Fig. 12).

(Top 3)

In the integrated circuit 71, the band-shaped light emitting part 31a is 100 µs, the belt-shaped light-emitting part 31b is 120 µs, the belt-shaped light-emitting part 31c is 150 µs, and the belt-shaped light-emitting part 31d is 180 µs. , generates a signal for irradiating the band-shaped light emitting unit 31e at 210 µs, and the output unit 73 outputs this signal to the band-shaped light emitting units 31a to 31e (refer to Fig. 11). At the same time, the integrated circuit 71 generates an imaging signal, and the output unit 73 outputs it to the third camera 13 . Thereby, the 3rd camera 13 is irradiated from the +x direction, and the light reflected by P inner surface of the rear end (the -x side end) of the cover glass G enters (refer FIG. 13). What is imaged with the 3rd camera 13 in turn 3 is the image which the defect in P inner surface of the rear end of cover glass G shone (refer FIG. 12).

(Top 4)

The integrated circuit 71 generates a signal for irradiating the band-shaped light emitting unit 32a at 200 μs, and the output unit 73 outputs this signal to the band-shaped light emitting unit 32a (refer to Fig. 11). . At the same time, the integrated circuit 71 generates an imaging signal, and the output unit 73 outputs it to the third camera 13 . Thereby, the 3rd camera 13 is irradiated from -y direction, and the light reflected by P inner surface of the left end (end of the +y side) of cover glass G injects. What is imaged with the 3rd camera 13 in turn 4 is the image which the defect in P inner surface of the left end of cover glass G shone (refer FIG. 12).

(Top 5)

The integrated circuit 71 generates a signal for irradiating the band-shaped light emitting units 33a, 33f to 33i, and 31f to 31j at 3 μs, and the output unit 73 transmits the signal to the band-shaped light emitting unit 33a, 33f to 33i, and 31f to 31j) (refer to FIG. 11). At the same time, the integrated circuit 71 generates an imaging signal, and the output unit 73 outputs it to the third camera 13 . Thereby, it irradiates to the 3rd camera 13 from between the +y direction and +y direction, and -x direction, and the left end of cover glass G and the front side of the P surface of the left rear end side (hereinafter referred to as P surface) ) and the reflected light is incident (see FIG. 13). What is imaged with the 3rd camera 13 in turn 5 is the image which the defect in the P surface of the left end and left rear end side of cover glass G was reflected (refer FIG. 12). In this image, most of the defects such as scratches and foreign substances on the P surface are reflected darkly.

(Top 6)

The integrated circuit 71 generates a signal for irradiating the band-shaped light-emitting units 33b to 33e at 3 μs, and the output unit 73 outputs the signal to the band-shaped light-emitting units 33b to 33e ( 11). At the same time, the integrated circuit 71 generates an imaging signal, and the output unit 73 outputs it to the third camera 13 . Thereby, the 3rd camera 13 is irradiated from between the +y direction and the +x direction, and the light reflected by the P surface of the front-end|tip side from the left end of the cover glass G injects. What is imaged with the 3rd camera 13 in turn 6 is the image which the defect in the P surface of the front-end|tip side from the left end of cover glass G reflected (refer FIG. 12).

(Top 7)

The integrated circuit 71 generates a signal for irradiating the band-shaped light emitting unit 33a at 200 µs, and the output unit 73 outputs this signal to the band-shaped light emitting unit 33a (refer to Fig. 11). . At the same time, the integrated circuit 71 generates an imaging signal, and the output unit 73 outputs it to the third camera 13 . Thereby, the 3rd camera 13 is irradiated from the +y direction, and the light reflected by P inner surface of the right end (end of -y side) of cover glass G injects. What is imaged with the 3rd camera 13 in turn 7 is the image which the defect in P inner surface of the right end of cover glass G shone (refer FIG. 12).

(Top 8)

The integrated circuit 71 generates a signal for irradiating the band-shaped light-emitting units 32f to 32i at 3 μs, and the output unit 73 outputs this signal to the band-shaped light-emitting units 32f to 32i ( 11). At the same time, the integrated circuit 71 generates an imaging signal, and the output unit 73 outputs it to the third camera 13 . Thereby, the 3rd camera 13 is irradiated from between a -y direction and a -x direction, and the light reflected by the P surface on the rear end side from the right end of the cover glass G enters. What is imaged with the 3rd camera 13 in turn 8 is the image which the defect in P surface of the rear end side from the right end of cover glass G reflected (refer FIG. 12).

(Top 9)

The integrated circuit 71 generates a signal for irradiating the band-shaped light-emitting units 32a to 32e and 31a to 31e at 3 μs, and the output unit 73 transmits the signal to the band-shaped light-emitting units 32a to 32e, 31a to 31e) (refer to Fig. 11). At the same time, the integrated circuit 71 generates an imaging signal, and the output unit 73 outputs it to the third camera 13 . Thereby, the 3rd camera 13 is irradiated from between the -y direction and the -y direction and the +x direction, and the light reflected by the P surface on the right end side from the right end of the cover glass G enters. What is imaged by the 3rd camera 13 in turn 9 is the image which the defect in the P surface of the right end and right end side of cover glass G was reflected (refer FIG. 12).

In addition, the integrated circuit 71 outputs a sequence of 9 and generates a signal indicating the iterative processing, and the output unit 73 outputs a signal indicating the repetition processing to the integrated circuit 71 . The integrated circuit 71 repeats the process of receiving the signal indicating the iterative process, returning the process to the first, and sequentially outputting the signals shown in steps 1 to 9.

Here, when inspecting the inner surface of the P at the left end and the right end in steps 4 and 7, respectively, a much longer time than when inspecting the P surface in steps 5, 6, 8, and 9, the band-shaped light emitting parts 32a and 33a investigate Therefore, in the 3rd camera 13 in sequence 4 and 7, the saturated image in which the P surface of the cover glass G shone purely white is imaged, respectively.

In addition, the order 1-9 shown to FIG. 11, 12 etc. are an example, and the order of an examination site|part and examination content can be set arbitrarily. In addition, the test|inspection of the P inner surface of the front-end|tip of the cover glass G shown in turn 1, and the test|inspection of the P surface on the front-end|tip side from the left end of cover glass G shown in turn 6 are unnecessary in the central part of cover glass G, a rear-end part, The test|inspection of the P inner surface of the rear end of cover glass G shown by 3, and the test|inspection of the P surface on the rear end side from the right end of cover glass G shown by sequence 8 are unnecessary in the front-end|tip part of cover glass G, and a center part. The integrated circuit 71 calculates the number of drive motor pulses from the information indicating the length of the cover glass G, finds the position of the cover glass G based on the output drive motor pulse number, and at the position of the cover glass G You may make it abbreviate|omit sequence 1, 3, 6, and 8 according to it.

Fig. 14 is a timing chart in the process shown in Fig. 11; In addition, in turn 1, only the signal to be irradiated with 100 s is displayed. The imaging signal is the same as that shown in FIG. The signal for irradiating the stereoscopic illumination unit 30 becomes high at the same time that the imaging signal becomes high, and becomes low after the irradiation time has elapsed.

In addition, when the light reflected from the P surface is made to enter the third camera 13 and when the light reflected from the printing unit is made to enter the third camera 13, the required amount of light is about 1:100. Accordingly, when the light reflected from the P-plane is incident on the third camera 13 and when the light reflected from the printing unit is incident on the third camera 13 , the irradiation time of the stereoscopic illumination unit 30 is different.

The integrated circuit 71 outputs a driving motor pulse to the conveying unit 50 through the output unit 73 simultaneously with outputting the signals of steps 1 to 9 above. Imaging is performed with the 3rd camera 13, conveying the cover glass G at a constant speed on the mounting part 40 by this, and changing the position of cover glass G and the 3rd camera 13 relatively.

Thereby, the image in which the defect in the front end P surface shines, the image in which the defect in the rear end P surface shines, the image in which the defect in the left and right ends P surface shines, and the image in which the defect in a printed part is darker than other printed parts are obtained by the cover glass During one transfer of G, it is possible to take pictures at different timings. The process of imaging the transmission image of the cover glass G and the specular reflection image with the 3rd camera 13 continues until the cover glass G passes the 3rd camera 13 all. When the cover glass G passes through the third camera 13 , a detection signal by the position detection sensor 82 is input to the integrated circuit 71 . When this detection signal is input, the integrated circuit 71 ends signal output to the third camera 13 and the stereoscopic illumination unit 30 .

Then, the integrated circuit 71 outputs a drive motor pulse to the conveyance part 50 by a predetermined number of pulses, and moves the cover glass G to the process end position. Then, the integrated circuit 71 ends the series of processing.

When the series of processing is finished, the images captured by the first camera 11 , the second camera 12 , and the third camera 13 are outputted to the PC 100 through the output unit 73 . The CPU 101 generates an image for inspection from images captured by the first camera 11 , the second camera 12 , and the third camera 13 . In the present embodiment, the CPU 101 extracts an image captured by the same illumination pattern from among the images captured by the first camera 11 , the second camera 12 , and the third camera 13 , and Connect to create a flat image. Hereinafter, image generation processing will be described.

The CPU 101 generates a transmitted image and a specular reflection image from images captured by the first camera 11 and the second camera 12 . In the process of imaging a transmitted image and a specular reflection image, as shown in FIGS. 9 and 10, irradiation of the irradiation pattern of steps 1 - 3 is repeated. Accordingly, the CPU 101 extracts frames of three frames offset (the first frame, the fourth frame ...) from the images captured by the second camera 12 based on the first frame, and converts these images to They are connected to create a two-dimensional image. Thereby, the transmission image (planar image) of the cover glass G is produced|generated. As shown in FIG. 15, the transparent image is an image in which the opaque printed part is reflected darkly, and the defect part of printing (the round display part of the dotted line in FIG. 15) can be confirmed.

Further, the CPU 101 extracts frames of 3 frames offset (2nd frame, 5th frame...) from among the images captured by the first camera 11 on the basis of the 2nd frame, and extracts these images They are connected to create a two-dimensional image. Thereby, the upper regular reflection image, ie, the regular reflection image (planar image) in the surface of the cover glass G is produced|generated. As for the specular reflection image, as shown in FIG. 16, the part without a defect (the flaw is illustrated in FIG. 16) is a bright image, and a flaw is the image reflected darkly. Moreover, even if the flaw overlaps with the printed part, since the reflectance in the glass surface is higher than that of a printed part, the flaw is reflected darker than the other part.

Further, the CPU 101 extracts frames of 3 frames offset (3rd frame, 6th frame...) from among the images captured by the second camera 12 on the basis of the 3rd frame, and extracts these images. They are connected to create a two-dimensional image. Thereby, the regular reflection image of the lower side, ie, the regular reflection image (planar image) in the back surface of the cover glass G is produced|generated.

Further, the CPU 101 generates a reflected image from the image captured by the third camera 13 . In the process of imaging a reflected image, as shown in FIGS. 11-13, irradiation of the irradiation pattern of steps 1-9 is being repeated. Accordingly, the CPU 101 extracts frames of 9 frames offset (1st frame, 10th frame...) from among the images captured by the third camera 13 on the basis of the 1st frame, and converts these images to They are connected to create a two-dimensional image. Thereby, as shown in FIG. 17, the planar image of the cover glass G which the defect in P inner surface of the front-end|tip of cover glass G shined is produced|generated.

CPU 101 extracts frames of 9 frames offset (2nd frame, 11th frame...) from among the images captured by the third camera 13 on the basis of the second frame, and connects these images to Creates a two-dimensional image. Thereby, as shown in FIG. 18, the flat image of the cover glass G in which the defect of the printing part of cover glass G reflected darker than other printing parts is produced|generated.

In addition, for explanation, a part of the planar image is enlarged in FIGS. 17 and 18, and black lines are displayed around the defect.

CPU 101 extracts frames of 9 frames offset (3rd frame, 12th frame...) from among the images captured by the third camera 13 based on the 3rd frame, and connects these images to Creates a two-dimensional image. Thereby, the planar image of the cover glass G which the defect in P inner surface of the rear stage of the cover glass G shined is produced|generated.

The CPU 101 extracts frames of 9 frames offset (4th frame, 13th frame...) from among the images captured by the third camera 13 on the basis of the 4th frame, and connects these images to Creates a two-dimensional image. Thereby, the planar image of the cover glass G which the defect in P inner surface of the left end of cover glass G shined is produced|generated.

The CPU 101 extracts frames of 9 frames offset (5th frame, 14th frame...) from among the images captured by the third camera 13 on the basis of the 5th frame, and connects these images to Creates a two-dimensional image. Thereby, the planar image of the cover glass G which the defect in the P surface of the left end and rear end side of cover glass G reflected is produced|generated.

The CPU 101 extracts frames of 9 frames offset (6th frame, 15th frame...) from among the images captured by the third camera 13 on the basis of the 6th frame, and connects these images to Creates a two-dimensional image. Thereby, the planar image of the cover glass G in which the defect in the P surface of the front-end|tip side was reflected from the left end of cover glass G is produced|generated.

The CPU 101 extracts frames of 9 frames offset (7th frame, 16th frame...) from among the images captured by the third camera 13 on the basis of the 7th frame, and connects these images to Creates a two-dimensional image. Thereby, the planar image of the cover glass G which the defect in P inner surface of the right end of cover glass G shined is produced|generated.

The CPU 101 extracts frames of 9 frames offset (8th frame, 17th frame...) from among the images captured by the third camera 13 on the basis of the 8th frame, and connects these images to Creates a two-dimensional image. Thereby, the planar image of the cover glass G which the defect in P surface on the rear end side reflected from the right end of cover glass G is produced|generated.

The CPU 101 extracts the frames of the 9th frame offset (the 9th frame, the 18th frame...) from among the images captured by the third camera 13 based on the 9th frame, and connects these images to Creates a two-dimensional image. Thereby, the planar image of the cover glass G which the defect in the P surface of the right end of cover glass G and the front-end|tip side was reflected is produced|generated.

According to this embodiment, since the cover glass G is irradiated with light from various directions using the stereoscopic illumination part 30 and an image is imaged, even if a defect existed in any position of the cross section of the cover glass G, one optical A defect can be inspected by one inspection using the inspection apparatus 1 .

In particular, in the first region 31, the light emitting portions 30a are arranged along the y-direction in regions other than the vicinity of the central plane S1. Therefore, by irradiating the strip|belt-shaped light to the cover glass G, the area|region in the vicinity of the central axis ax can be similarly inspected irrespective of the position in the y direction.

Further, since the plurality of band-shaped light emitting portions 31a to 31j are provided, light can be irradiated to the region near the central axis ax from various angles. In order to image the entire image of the defect on the P-plane, it is important to simultaneously irradiate light from a light source having an angle between the optical axis and the central plane S1 of around 8° to a light source near 44°. Therefore, in order to image the whole image of the defect in the P surface of a front-end|tip or a rear end, it is important to provide the some strip|belt-shaped light emitting part 31a-31j. In addition, in the second region 32 and the third region 33 , since the band-shaped light emitting portions 32a and 33a are provided at positions on the central plane S1, the overall image of the defect is with respect to the left and right P-planes. can be photographed.

In addition, according to this embodiment, the band-shaped light emitting parts 31b and 31g are arranged so that the angle θ2 between the optical axis and the central plane S1 is approximately 17°, and the scattered light when the light is reflected in pearl printing is eliminated. 3 By imaging with the camera 13, it is possible to image an image in which the contrast of the defect is increased compared to the luster of the pearl material.

For example, when an image is captured by the band-shaped light emitting portions 31a and 31f in which the angle θ1 between the optical axis and the central plane S1 is approximately 8°, the luster of the pearl material is strongly reflected. Further, for example, in the case of imaging with the band-shaped light emitting units 31c and 31h in which the angle θ3 between the optical axis and the central plane S1 is approximately 26°, or in the case where the angle θ4 between the optical axis and the central plane S1 is approximately 35°, the band When imaging with the pattern light-emitting parts 31d and 31i, the contrast of the defective part of the pearl coating will become small.

On the other hand, as in the present embodiment, by irradiating the cover glass G with light from an angle of 17° with respect to the normal direction, an image in which the contrast of the defective portion of the pearl coating becomes low or high with respect to other portions is captured. It can be done, and the luster of the pearl material does not easily hit the threshold value of defect detection. Accordingly, a defect in the pearl coating can be easily detected based on this captured image.

Moreover, according to this embodiment, the strip|belt-shaped light emitting parts 31a, 31f are arrange|positioned so that the angle θ1 formed between the optical axis and the central plane S1 is approximately 8°, and the cover glass G from an angle of 8° with respect to the normal direction. By irradiating light to the surface, an image in which the contrast of the defective portion of the monochrome printing is lowered or higher than that of the other portions can be captured.

In addition, in this embodiment, without changing the imaging time of the imaging unit 10, by changing the irradiation time of light from the coaxial illumination unit 20 and the stereoscopic illumination unit 30, the amount of light can be varied according to the contents of the imaging. have.

Moreover, in this embodiment, the three-dimensional illumination part 30 is provided corresponding to the 3rd camera 13, and the image picked up by the same irradiation pattern from the images imaged by the 3rd camera 13 is extracted, and the irradiation pattern By generating different planar images for each, an image equivalent to imaging using a plurality of cameras can be realized with a minimum number of cameras.

Moreover, in this embodiment, since the optical inspection apparatus 1 is provided with both the strip|belt-shaped light-emitting parts 31a, 31f and the strip|belt-shaped light-emitting parts 31b, 31g, in the same apparatus, a pearl pigment is used. In this case, an image in which color unevenness or the like of the printed part can be detected can be captured in any case in which the pearl pigment is not used.

In the present embodiment, the angle θ1 between the optical axis of the band-shaped light emitting units 31a and 31f and the central plane S1 is approximately 8°, but the angle θ1 may be approximately 8 to 10°. In addition, angles θ2 to θ5 are not limited to the illustrated angles.

Moreover, in this embodiment, although the image for defect detection was produced|generated with PC100, you may make it detect the defect of the cover glass G based on the created image in PC100. For example, in the image shown in FIG. 14, a defect can be detected by comparing a pixel value and a threshold value. Moreover, in the image shown in FIG. 15, for example, a defect can be detected by calculating the average value of a plurality of pixels, and comparing the average value with a threshold value.

Moreover, in this embodiment, although a cylindrical lens 30c is provided on the optical axis of the strip|belt-shaped light emitting parts 31a-31j, the cylindrical lens 30c is not essential. However, in the case of having the cylindrical lens 30c, the light irradiated from the light emitting unit 30a by the cylindrical lens 30c can be focused in the vicinity of the central axis ax, whereby the amount of light directed to the third camera 13 is achieved. can increase Accordingly, it is possible to increase the imaging frequency of the imaging unit 10 (shorten the imaging time).

Moreover, in this embodiment, as shown in FIG. 11, the strip|belt-shaped light-emitting parts 32a, 32b-32e, 32f-32i are connected to different channels, respectively, and the strip|belt-shaped light-emitting parts 33a, 33b-33e, 33f- 33i) are respectively connected to different channels, but the relationship between the band-shaped light emitting units 32a to 32i and 33a to 33i and the channel is not limited thereto. For example, the band-shaped light-emitting units 32b to 32i and 33b to 33i may be connected to one channel, and the band-shaped light-emitting units 32a to 32i and 33a to 33i may be connected to different channels, respectively.

In addition, in this embodiment, although the irradiation time in each irradiation pattern shown in FIGS. 9, 10, 11, and 13 was shown, irradiation time is an illustration, and irradiation time is not limited to the value described in these. Moreover, in each irradiation pattern shown in FIGS. 9, 10, 11, and 13, although irradiation time was prescribed|regulated to microsecond, you may prescribe|regulate irradiation time as a ratio with respect to imaging time.

Moreover, in this embodiment, although the light emitting part 30a has the light emitting blocks 30b and 30d arranged in a line, the light emitting blocks 30b, 30d may have a light-diffusion plate. Fig. 19 is a view schematically showing a light emitting block 30b-1 according to a modification, Fig. 19A is a side view, and Fig. 19B is a state shown in Fig. 19A in Fig. 19(A). It is the figure seen from the downward direction in A).

In the light emitting block 30b - 1, a lenticular lens 30e which is a light diffusion plate is installed adjacent to the light emitting unit 30a. The lenticular lens 30e is provided so as to cover the plurality of light emitting units 30a. The lenticular lens 30e is formed by arranging a large number of elongated convex lenses with a central convex cross section at an equal pitch, and a light component in the same direction as the arrangement direction of the convex lenses (direction orthogonal to the longitudinal direction of the convex lenses). to spread In the light emitting block 30b-1, the arrangement direction of the convex lenses and the light emitting portion 30a are the same. Accordingly, the light irradiated from the light emitting unit 30a is diffused by the lenticular lens 30e, and the light irradiated from the plurality of light emitting units 30a can be used as one long and thin surface light source from the lenticular lens 30e.

For example, when there is no lenticular lens 30e, when inspection is performed based on the light specularly reflected from the front-end|tip P surface or rear-end P surface of the cover glass G, the light emitting part 30a is on the front-end|tip P surface or the rear-end P surface. Although there is a possibility that the point-shaped light of , the occurrence of such inconsistency can be prevented by providing the lenticular lens 30e so as to cover the light emitting part 30a.

In addition, as an inspection of the front-end P-surface or the rear-end P-surface, the band-shaped light-emitting part 31b or the strip-shaped light-emitting part 31g is weakly illuminated, and the band-shaped light-emitting part 31b or the strip is placed on the front-end P surface or the rear end P surface. A method of irradiating the light of the pattern light emitting part 31g is conceivable. At this time, if there is no lenticular lens 30e in the band-shaped light emitting parts 31b and 31g, the point-shaped light is reflected on the front end P surface or the rear end P surface, and inspection cannot be performed easily. On the other hand, when the lenticular lens 30e is provided in the band-shaped light emitting units 31b and 31g, point-shaped light is projected on the tip P surface or the rear end P surface, so it is determined whether the light is bent or not. However, it is possible to inspect the inappropriateness of the rear end P-surface polishing.

In addition, although one lenticular lens 30e is provided in one light emitting block 30b-1 in FIG. 19, the number of lenticular lenses 30e is not limited to this. A plurality of lenticular lenses may be arranged so as to cover the plurality of light emitting portions 30a. In addition, the light diffusion plate is not limited to a lenticular lens.

<Second embodiment>

In the first embodiment of the present invention, an image using coaxial illumination and an image using stereoscopic illumination are captured by different cameras. However, an image using coaxial illumination and an image using stereoscopic illumination may be captured by the same camera.

A second embodiment of the present invention is a form of imaging with two cameras. Hereinafter, the optical inspection apparatus 2 which concerns on 2nd Embodiment is demonstrated. In addition, about the same part as the optical inspection apparatus 1, the same code|symbol is attached|subjected and description is abbreviate|omitted.

20 : is a front view which shows the outline of the optical inspection apparatus 2 which concerns on 2nd Embodiment. The optical inspection apparatus 2 mainly includes an imaging unit 10A, a coaxial illumination unit 20 , a stereoscopic illumination unit 30 , a mounting unit 40 , and a conveying unit 50 (not shown).

The imaging unit 10A includes a first camera 11 (corresponding to the one-dimensional imaging means of the present invention in this embodiment), and a second camera 12 (corresponding to the second imaging means of the present invention). have The arrangement of the first camera 11 and the second camera 12 is the same as that of the optical inspection device 1 .

The stereoscopic illumination unit 30 is provided between the first camera 11 and the mounting unit 40 . In addition, the stereoscopic illumination unit 30 is provided at a position where the central axis ax intersects the optical axis of the first camera 11 . Since the angle θ1 (refer to FIG. 4) formed between the optical axis of the band-shaped light emitting units 31a and 31f and the central plane S1 is approximately 8°, the light from the upper coaxial illumination unit 21 is not blocked by the stereo illumination unit 30. does not

The processing performed by the optical inspection apparatus 2 comprised in this way is demonstrated. The integrated circuit 71 (including the third control unit of the present invention) generates a driving motor pulse for driving the roller 40a of the mounting unit 40 , and the output unit 73 outputs it to the conveying unit 50 . do. Thereby, cover glass G moves at a constant speed along the conveyance direction F on the mounting part 40 top.

When it is detected that the cover glass G has been conveyed from the position detection sensor 81 under the first camera 11 and the second camera 12 , a detection signal is transmitted from the position detection sensor 81 via the input unit 72 to the integrated circuit ( 71) is entered. When this detection signal is input, the integrated circuit 71 performs a process of capturing a reflected image with the first camera 11 , and capturing a transmitted image and a specular image with the first camera 11 and the second camera 12 . processing is started.

21 : is a figure which shows the correspondence between the order of imaging processing, and the image imaged by the 1st camera 11 and the 2nd camera 12. FIG.

The processing of capturing the reflected image with the first camera 11 (processes in steps 1 to 9 in FIG. 21 ) is other than the point of outputting the image pickup signal generated by the integrated circuit 71 to the first camera 11 . Since it is the same as the process (FIG. 11, FIG. 12, and FIG. 14) performed in the optical inspection apparatus 1, detailed description is abbreviate|omitted.

The integrated circuit 71 starts processing for imaging the transmission image and the specular reflection image shown in the steps 10 to 12 after the processing of steps 1 to 9 is finished. Since the processes shown in steps 10 to 12 are the same as the processes shown in FIGS. 9 and 10 (processes in steps 1 to 3), detailed explanation is omitted.

The integrated circuit 71 generates a signal representing the iterative processing while outputting the turn 12, and outputs the signal to the integrated circuit 71 through the output unit 73 . The integrated circuit 71 repeats the process of receiving the signal indicating the iterative process, returning the process to the first, and sequentially outputting the signals shown in steps 1 to 12.

According to this embodiment, a defect can be test|inspected by one test|inspection using one optical inspection apparatus 2 . In addition, a reflected image, a transmitted image, and a specular reflection image can be captured with a minimum number of (two) cameras.

In addition, in this embodiment, since the half mirror 21h is provided on the optical axis of the first camera 11, the amount of light irradiated from the stereoscopic illumination unit 30 and incident on the first camera 11 is, In the optical inspection device 1 , it is irradiated from the stereoscopic illumination unit 30 and is approximately half of the amount of light incident on the third camera 13 . Therefore, it is preferable to brighten the light irradiated from the three-dimensional lighting unit 30 . Moreover, in this embodiment, since the number of images imaged by the 1st camera 11 is large compared with the 1st embodiment, it is better to brighten the light irradiated from the stereoscopic illumination part 30 and to raise the imaging frequency. desirable.

<Third embodiment>

In 1st Embodiment of this invention, although it test|inspects the cover glass G in which the circular arc-shaped P surface was formed in the periphery, the form of a cover glass is not limited to this. In recent years, the curved surface around a cover glass deepens, and the cover glass in which this curved-surface part became a partial cylindrical shape or an elliptical-cylindrical shape is used.

3rd Embodiment of this invention is an aspect which test|inspects the cover glass which has a partial cylindrical shape or an elliptical-cylindrical shape around. Hereinafter, the optical inspection apparatus 3 which concerns on 3rd Embodiment is demonstrated. In addition, about the same part as the optical inspection apparatus 1, the same code|symbol is attached|subjected and description is abbreviate|omitted.

22 : is a front view which shows the outline of the optical inspection apparatus 3 which concerns on 3rd Embodiment. The optical inspection apparatus 3 mainly includes an imaging unit 10 , a coaxial illumination unit 20 , a stereo illumination unit 30 , a mounting unit 40 , a conveying unit 50 (not shown), and a side inspection unit. It has (60) and the height acquisition part (90).

23 is an enlarged perspective view of a part of the optical inspection device 3 . The side inspection unit 60 mainly includes optical elements 61 and 62 for adjusting the focal length and reflectors 63 and 64 . The optical elements 61 and 62 for focal length adjustment and the reflecting mirrors 63 and 64 are located on the center plane S1 of the substantially vertical direction containing the 3rd camera 13. As shown in FIG.

The optical elements for focal length adjustment 61 and 62 are optical elements for adjusting the focal length of the third camera 13 . In this embodiment, a thick plate-shaped glass plate is used as the optical elements 61 and 62 for focal length adjustment. The optical elements 61 and 62 for focal length adjustment are provided so that both end surfaces substantially orthogonal to a plate|board thickness direction may become horizontal.

The optical element 61 for focal length adjustment and the optical element 62 for focal length adjustment have approximately the same positions in the x-direction and the z-direction, and a line ax1 extending in the z-direction passing through the center of the third camera 13 is interposed therebetween. installed to face each other. Moreover, the optical elements 61 and 62 for focal length adjustment are provided above the stereoscopic illumination part 30 (+z side).

The reflecting mirrors 63 and 64 are members which reflect the image of the side surface of the cover glass G1, and guide|guide it to the 3rd camera 13. The reflectors 63 and 64 are substantially plate-shaped, and are provided adjacent to the mounting part 40 . In this embodiment, it is provided between the adjacent roller 40a and the roller 40a.

The reflecting mirror 63 and the reflecting mirror 64 have substantially the same positions in the x-direction and the z-direction, and are installed to face each other with a line ax1 extending in the z-direction passing through the center of the third camera 13 therebetween. Moreover, planar view WHEREIN: The reflecting mirror 63 and the reflecting mirror 64 are respectively provided in the direction substantially orthogonal to the conveyance direction F. WHEREIN: The outside of a mounting area and the position adjacent to a mounting area. Here, a mounting area|region is an area|region on the mounting part 40 in which the cover glass G1 is mounted, and the area|region of the perpendicular direction lower side of the 3rd camera 13 is included. In FIG. 23, the state in which the cover glass G1 was mounted in the mounting area is shown.

24 : is a figure which shows schematic structure in the state which cut|disconnected the optical inspection apparatus 3 by center plane S1. 24 : shows the mode seen from the conveyance direction F downstream (+x direction). The dashed-dotted line in FIG. 24 schematically represents the path of the light incident on the third camera 13 .

The reflective surfaces 63a and 64a of the reflective mirrors 63 and 64 are substantially planar, and the line intersecting the central plane S1 (the line indicating the reflective surfaces 63a and 64a in Fig. 24) is inclined with respect to the horizontal plane, It is spread along the conveyance direction F approximately.

On central plane S1, the reflecting mirror 63 and the reflecting mirror 64 are respectively located in both sides of the cover glass G1. The cover glass G1 is a state mounted on the mounting part 40. WHEREIN: It has plane Ga parallel to a horizontal direction, and the side surface Gb inclined with respect to a horizontal direction. The side surface Gb has a partial cylindrical shape or an elliptical cylinder shape, and the inclination of the side surface Gb with respect to the horizontal direction is approximately 30 to 45°. Further, the ends Ge of the side surfaces Gb on both sides are mounted on the roller 40a.

The plane Ga image is guided to the imaging lens 13a without passing through the optical elements 61 and 62 for adjusting the focal length. In other words, on the line joining the imaging lens 13a and the plane Ga, the optical elements 61 and 62 for focal length adjustment do not exist.

On the other hand, the image of the side surface Gb is reflected by the reflective surfaces 63a and 64a, passes through the optical elements 61 and 62 for focal length adjustment, and is guided to the imaging lens 13a. In other words, the optical elements 61 and 62 for adjusting the focal length are arranged so as to overlap the line joining the imaging lens 13a and the reflective surfaces 63a and 64a.

In addition, in this embodiment, the optical elements for focal length adjustment 61, 62 are inside so that the optical elements 61 and 62 for focal length adjustment are not located on the line joining the imaging lens 13a and plane Ga. Some are notched.

The focal position F1 in the case of not passing the optical elements 61 and 62 for focal length adjustment is the position of plane Ga of the cover glass G1. It is preferable that the plate|board thickness of the cover glass G1 is about 0.5 mm, and it is located in the center vicinity of the focus position F1 of the plate|board thickness direction in plane Ga.

When passing through the optical elements for focal length adjustment 61 and 62, a process in which light is incident on the optical elements 61 and 62 for focal length adjustment, and a process in which light is emitted from the optical elements 61 and 62 for focal length adjustment Because the light is refracted at , the focal position F2 is at a position farther than the focal position F1. The extension of the focal position by passing through the optical elements 61 and 62 for focal length adjustment (refer to the black arrow in Fig. 24 ) is T, the plate pressure of the optical elements 61 and 62 for focal length adjustment. And, if the refractive index of the glass is n, it can be expressed as TT/n. For example, if T is 12 mm and n is 1.5, the focal position increases by 4 mm by passing through the optical elements 61 and 62 for focal length adjustment. That is, the focal position F2 is located on the -z side by 4 mm from the focal position F1.

25 : is a figure which shows the relationship between the position of cover glass G1, and the image imaged by the 3rd camera 13, (A) is an enlarged view of the side part of cover glass G1, (B) is 3rd camera ( A part of the image captured in 13) is shown. In FIG. 25A , the reflective surface 63a is indicated by a dotted line, and the path of light reflected by the reflective surface 63a and incident on the third camera 13 is indicated by a dashed-dotted line.

In a part of the area (region I) near the plane Ga of the cover glass G1 and the plane Ga of the side surface Gb of the cover glass G1, the image does not pass through the optical elements 61 and 62 for focal length adjustment and the imaging lens 13a is induced in Since the focal position F1 is at the position of the plane Ga, the image of the region I becomes a distinct image. The image of the side Gb is a slightly out of focus and a blurry image (see the meshed portion of Fig. 25).

The images of the side surface Gb and a part of the region (region II) near the side surface Gb of the plane Ga are reflected by the reflective surface 63a (the same applies to the reflective surface 64a) and are guided to the imaging lens 13a. Accordingly, the image of the region II is reversed left and right, the image of the end Ge of the side surface Gb becomes the inside, and the image on the plane Ga side of the side surface Gb becomes the outside.

In addition, the image of the region II is guided to the imaging lens 13a through the optical elements 61 and 62 for adjusting the focal length. Since the focal position F2 is positioned below the focal position F1 by passing through the optical elements 61 and 62 for adjusting the focal length, it becomes a clear image in focus for most of the side Gb. In the present embodiment, by making the depth of focus of the third camera 13 and the height of the side Gb approximately match, a clear image in focus on the entire side Gb can be obtained. In addition, in the boundary portion between the plane Ga and the side surface Gb, the image is slightly out of focus and is blurred (refer to the meshed portion in Fig. 25). In addition, the most central side of the image of area|region II is a part without cover glass G1, and a black image is imaged with the 3rd camera 13.

It is preferable to set the area|region I and area|region II so that it may partially overlap. As a result, for the boundary portion between the plane Ga and the side surface Gb, two images, an image passing through the optical elements 61 and 62 for focal length adjustment and an image not passing through, can be obtained, so that one image is out of focus. Even if it is not, it is possible to detect a defect in the boundary portion between the plane Ga and the side Gb.

Returning to the description of FIG. 23 . The optical inspection apparatus 3 has the height acquisition part 90 which acquires the height of the cover glass G1. The height acquisition part 90 is provided in the upstream (-x side) of the conveyance direction F rather than the side inspection part 60, and mainly has the surface light source 91, the camera 92, and the reflecting mirror 93.

26 and 27 are diagrams schematically illustrating a state of measuring the height of the cover glass G1, and FIG. 26 is a diagram viewed from a direction (here, -y direction) substantially orthogonal to the conveyance direction F, FIG. It is the figure seen along the conveyance direction F (here, +x direction). The dashed-dotted line in FIG. 27 shows the path of the light irradiated from the surface light source 91 .

The surface light source 91 , the camera 92 , and the reflecting mirror 93 are provided with the mounting unit 40 interposed therebetween. The surface light source 91 irradiates light in a direction substantially orthogonal to the conveyance direction F (here, +y direction). The camera 92 is irradiated from the surface light source 91, passes through the cover glass G1, and the light reflected by the reflecting mirror 93 is incident. Thereby, in the camera 92, the part where light was interrupted|blocked by the cover glass G1 is dark, and the image like a shadow figure is obtained in the other part. Therefore, the height of the cover glass G1 can be acquired correctly. In addition, the reflecting mirror 93 is not essential, You may make it irradiate from the surface light source 91, and you may make it inject the light which passed the cover glass G1 into the camera 92.

The front-end|tip Gc and rear-end|tip Gd of cover glass G1 are lower in height than plane Ga. Therefore, the front-end|tip by irradiating light from the surface light source 91 to the y direction, moving the cover glass G1 in the conveyance direction F by the mounting part 40, and imaging the light which passed the cover glass G1 with the camera 92, Changes in the heights of Gc and the trailing end Gd can be acquired.

Returning to the description of FIG. 23 . The 3rd camera 13 is provided with the moving part 95 which moves the 3rd camera 13 up-down direction. The moving unit 95 has an actuator (not shown) serving as a driving source, and a moving mechanism (not shown) that transmits the actuator's drive to move the third camera 13 up and down. Various well-known techniques, such as a feed screw, can be used for a moving mechanism.

The CPU 101 (refer to Fig. 7) controls the moving unit 95 based on the image captured by the camera 92, and moves the third camera 13 in the vertical direction in accordance with the height change of the tip Gc and the rear end Gd. move to After being imaged with the camera 92 in ROM 103 (refer FIG. 7), the pulse number which sends cover glass G1 to the conveyance direction F until cover glass G1 is located just below the 3rd camera 13 is stored has been Moreover, the relationship between the driving amount of an actuator and the movement amount of the 3rd camera 13 is stored in ROM 103. The CPU 101 drives the actuator of the moving unit 95 based on the information stored in the ROM 103 to match the height change of the cover glass G1 passing under the third camera 13 to the third camera. (13) is moved in the vertical direction.

According to the present embodiment, the focal length of the third camera 13 is increased using the optical elements 61 and 62 for adjusting the focal length, and the third camera 13 is incident using the reflectors 63 and 64 . By reflecting the light, even the cover glass G1 having the side Gb can be inspected for defects on the side Gb by one inspection.

Moreover, according to this embodiment, it can respond to various types of cover glass by changing the position and inclination of the reflecting mirrors 63 and 64 according to the shape of a cover glass. For example, by setting the inclination with respect to the horizontal direction of the reflective surfaces 63a and 64a according to the inclination of the side Gb with respect to the horizontal direction, defects of the side Gb can be inspected without depending on the inclination of the side Gb with respect to the horizontal direction. have. Further, for example, by changing the positions of the reflectors 63 and 64 in the y direction according to the width of the cover glass, the defect of the side Gb can be inspected regardless of the width of the cover glass.

Moreover, according to this embodiment, the height of front-end|tip Gc and rear-end Gd changes by moving the 3rd camera 13 up-down according to the height change of the cover glass G1 which passes under the 3rd camera 13. Even in this case, a clear image in focus with respect to the front end Gc and the rear end Gd can be captured by the third camera 13 . Accordingly, defects can be reliably inspected also for the leading end Gc and the trailing end Gd.

In addition, in this embodiment, although the thick plate-shaped glass plate was used as the optical elements 61 and 62 for focal length adjustment, the form of the optical elements 61 and 62 for focal length adjustment is not limited to this. For example, a concave lens may be used as the optical elements 61 and 62 for adjusting the focal length. In addition, the thickness of the glass plate and the shape of the concave lens are set according to the shape of the cover glass, but since the focal length is easily increased when the concave lens is used, when the height of the side Gb is low, the optical elements 61 and 62 for adjusting the focal length ), it is preferable to use a glass plate.

Moreover, in this embodiment, the height change of cover glass G1 which passes under the 3rd camera 13 by CPU101 controlling the moving part 95 based on the image imaged with the camera 92. Although the third camera 13 was moved in the vertical direction in accordance with doesn't happen For example, information regarding the height change of the front end Gc and the rear end Gd may be stored in the ROM 103 in advance, and the CPU 101 may control the moving unit 95 based on this information. Moreover, for example, the height of the cover glass G1 may be measured with a laser displacement meter, and CPU101 may control the moving part 95 based on this measurement result.

<Fourth embodiment>

In the first embodiment of the present invention, the stereoscopic illumination unit 30 has a first region 31 , a second region 32 , and a third region 33 , and includes a second region 32 and a third region. In (33), the light emitting portion 30a is disposed on a substantially cylindrical surface, but the shape of the three-dimensional illumination portion is not limited thereto.

A fourth embodiment of the present invention is an embodiment in which all the band-shaped light-emitting units constituting the three-dimensional lighting unit have light-emitting blocks in which the light-emitting units 30a are arranged in a straight line. Hereinafter, the optical inspection apparatus 4 which concerns on 4th Embodiment is demonstrated. In addition, since the only difference between the optical inspection device 4 and the optical inspection device 1 according to the fourth embodiment is the stereoscopic illumination unit, the optical inspection device 4 according to the fourth embodiment is provided. The three-dimensional illumination unit 30A to be used will be described, and descriptions of the same parts as those of the optical inspection device 1 will be omitted.

28 : is a perspective view which shows the outline of the stereoscopic illumination part 30A with which the optical inspection apparatus 4 is equipped. The three-dimensional illumination part 30A irradiates light to the cover glass G from several directions. The light irradiated from the stereoscopic illumination unit 30A and reflected by the cover glass G is incident on the third camera 13 (refer to FIG. 1 ).

The stereoscopic illumination unit 30A has a first region 31A having a substantially semi-cylindrical surface, and a second region 32A and a third region 33A having a substantially hemispherical surface or a substantially semi-elliptical spherical surface. The first region 31a, the second region 32A, and the third region 33A in the stereoscopic lighting unit 30A are the first region 31 and the second region ( 32) and the third region 33 .

The first region 31A includes the band-shaped light emitting portions 31a-1, 31b-1, 31c-1, 32d-1, 31e-1, 31f-1, 31g-1, 31h-1, 31i-1, 31j. -1). The band-shaped light-emitting units 31a-1 to 31j-1 in the stereoscopic illumination unit 30A correspond to the band-shaped light-emitting units 31a to 31j in the stereoscopic illumination unit 30 .

The second region 32A includes band-shaped light emitting portions 32a-1, 32b-1, 32c-1, 32d-1, 32f-1, 32g-1, and 32h-1, and the third region 33A Silver has band-shaped light emitting portions 33a-1, 33b-1, 33c-1, 33d-1, 33f-1, 33g-1, and 33h-1. The band-shaped light-emitting units 32a-1 to 32d-1 and 32f-1 to 32h-1 in the stereoscopic illumination unit 30A are the band-shaped light-emitting units 32a to 32d, 32f to in the stereoscopic illumination unit 30 . 32h). The band-shaped light-emitting units 33a-1 to 33d-1 and 33f-1 to 33h-1 in the stereoscopic illumination unit 30A are the band-shaped light-emitting units 33a to 33d, 33f to in the stereoscopic illumination unit 30 . 33h).

Moreover, the stereoscopic illumination part 30A has the frame 34 which integrates the 1st area|region 31a, the 2nd area|region 32A, and the 3rd area|region 33A. The frame 34 is formed of a metal excellent in thermal conductivity, such as aluminum. The frame 34 has two plates 34a, and a first region 31A is provided between the two plates 34a. The second region 32a and the third region 33A are provided outside the plate 34a.

29 is a schematic diagram showing details of the strip-shaped light emitting part 31a-1. Since the band-shaped light-emitting units 31a-1 to 31j-1 have the same configuration, only the band-shaped light-emitting unit 31a-1 will be described, and the band-shaped light-emitting units 31b-1 to 31j-1 will be described. omit

The band-shaped light emitting part 31a-1 includes a light emitting block 30b in which the light emitting parts 30a are arranged in a line so that the length in the longitudinal direction becomes L, a cylindrical lens 30c-1, and a lenticular lens 30e- 1) is a light emitting unit having The only difference between the cylindrical lens 30c and the cylindrical lens 30c-1 is the length in the longitudinal direction. The difference between the lenticular lens 30e and the lenticular lens 30e-1 is only the length in the longitudinal direction.

The band-shaped light emitting part 31a-1 has two light emitting blocks 30b arranged in a straight line. The two light emitting blocks 30b are directly mounted to the plate 34a via the attachment member 34b. The cylindrical lens 30c-1 is directly mounted to the plate 34a via the attachment member 34c.

A lenticular lens 30e-1 is provided between the light emitting block 30b and the cylindrical lens 30c-1. The lenticular lens 30e-1 is mounted on the light emitting block 30b through the support member 30f.

The light emitting block 30b and the cylindrical lens 30c-1 are plate ( 34a) is installed. In other words, the extending direction of the light emitting block 30b and the extending direction of the cylindrical lens 30c-1 are substantially parallel.

30 is a schematic diagram showing the details of the strip-shaped light emitting part 32a-1. Since the band-shaped light-emitting units 32a-1 to 32d-1, 32f-1 to 32h-1, 33a-1 to 33d-1, and 33f-1 to 33h-1 have the same configuration, the band-shaped light-emitting units 32a- 1) will be described, and descriptions of the band-shaped light emitting units 32b-1 to 32d-1, 32f-1 to 32h-1, 33a-1 to 33d-1, and 33f-1 to 33h-1 will be omitted. .

The band-shaped light emitting part 32a-1 includes a light emitting block 30b in which the light emitting parts 30a are arranged in a line so that the length in the longitudinal direction becomes L, a cylindrical lens 30c-2, and a plate 30g. The branch is a light emitting unit. The only difference between the cylindrical lens 30c and the cylindrical lens 30c-2 is the length in the longitudinal direction.

A light emitting block 30b and a cylindrical lens 30c-2 are mounted on the plate 30g. The plate 30g is made of a metal having excellent thermal conductivity, such as aluminum. The plate 30g is formed with a bent portion 30h for attaching the plate 30g to the plate 34a.

The light emitting block 30b and the cylindrical lens 30c-2 have a plate 30g such that the upper surface p4 of the cylindrical lens 30c-2 is inclined with respect to the front end surface p3 of the light emitting block 30b provided with the light emitting part 30a. ) is installed in In other words, the extending direction of the cylindrical lens 30c-1 is inclined with respect to the extending direction of the light emitting block 30b.

In addition, the band-shaped light emitting parts 31a-1 to 31j-1 have a lenticular lens 30e-1, but the band-shaped light emitting parts 32a-1 to 32d-1, 32f-1 to 32h-1, 33a- 1-33d-1, 33f-1-33h-1) do not have a lenticular lens. This is because the dotted light of the light emitting part 30a does not line up and shine on the P surface formed in the left end and the right end of the cover glass G.

It returns to the description of FIG. The band-shaped light emitting parts 31a-1 to 31e-1 are located on the +x side of the central plane S1, and the band-shaped light emitting parts 31f-1 to 31j-1 are located on the -x side from the central plane S1. . The band-shaped light emitting portions 31a-1 to 31j-1 are not disposed on the central plane S1.

The band-shaped light emitting portions 31a-1 to 31j-1 are provided so that the optical axis intersects the intersection of the central plane S1 and the mounting portion 40 (not shown in FIG. 28), that is, the central axis ax (refer to FIG. 31). (detailed later).

The band-shaped light emitting portions 32a-1 and 33a-1 are provided on the central plane S1. The band-shaped light-emitting parts 32b-1 to 32d-1 and 33b-1 to 33d-1 are located on the +x side of the central plane S1, and the band-shaped light-emitting parts 32f-1 to 32h-1 and 33f-1 to 33h-1) is located on the -x side of the center plane S1.

The band-shaped light emitting units 32a-1 and 33a-1 have their central axes facing toward the intersection of the central axis ax1 of the three-dimensional lighting unit 30A and the mounting unit 40 (the central point O1, see FIG. 31 ). The band-shaped light emitting parts 32b-1 to 32d-1, 32f-1 to 32h-1, 33b-1 to 33d-1, and 33f-1 to 33h-1 are the band-shaped light emitting parts 32a-1, 33a- It is installed approximately parallel to 1).

Fig. 31 is a diagram for explaining the path of light emitted from the three-dimensional lighting unit 30A. In FIG. 31, while showing the schematic structure at the time of cut|disconnecting 30 A of three-dimensional illumination part with center plane S1, the path|route of light is shown with the dashed-dotted line.

The band-shaped light emitting part 31f-1 is provided so that the optical axis intersects the central axis ax. In the band-shaped light emitting part 31f-1, the cylindrical lens 30c-1 is provided between the light emitting block 30b and the central axis ax, and the light irradiated from the light emitting part 30a is provided in the vicinity of the central axis ax. focus on In the first region 31A, the light emitting units 30a are arranged substantially horizontally, and the front end surface p1 of the light emitting block 30b and the upper surface p2 of the cylindrical lens 30c-1 are substantially parallel, so that the light emitting block The light irradiated from 30b passes through the cylindrical lens 30c-1 and is focused on the central axis ax.

The central axis of the band-shaped light emitting units 32a-1 and 33a-1 faces the central point O1. The cylindrical lens 30c-2 is provided between the light emitting block 30b and the central point O1 (central axis ax), and condenses the light irradiated from the light emitting part 30a in the vicinity of the central axis ax.

In the second region 32a and the third region 33A, the light emitting portions 30a are not arranged substantially horizontally, and the extension direction of the light emitting block 30b is inclined with respect to the horizontal direction. If the front end surface p3 of the light emitting block 30b and the upper surface p4 of the cylindrical lens 30c-2 are approximately parallel, the light irradiated from the light emitting unit 30a is focused on a line approximately parallel to the front end surface p3, , do not focus on the central axis ax. Accordingly, in the second region 32a and the third region 33A, the upper surface p4 is inclined with respect to the tip surface p3 so that the light irradiated from the light emitting unit 30a is focused on the central axis ax.

Thereby, in the 2nd area|region 32a, the 3rd area|region 33A, the light irradiated from the light emitting part 30a passes through the cylindrical lens 30c-2, and P formed in the left and right ends of the cover glass G. It is possible to irradiate light to the surface and to focus the light on the P surface. Moreover, the 2nd area|region 32a and the 3rd area|region 33A irradiate light to the area|region A2 outside the range A1 where the 1st area|region 31A can irradiate light. Thus, the 2nd area|region 32a and the 3rd area|region 33A have the function of supplementing the 1st area|region 31A.

According to this embodiment, light can be irradiated to the cover glass G from various directions using 30 A of stereoscopic illumination parts. In particular, in the second region 32a and the third region 33A, by inclining the upper surface p4 with respect to the front end surface p3, the focus of the light irradiated from the light emitting part 30a is focused on the P surface formed at the left end and the right end of the cover glass G. can fit Moreover, by inclining the upper surface p4 with respect to the front end surface p3, the 2nd area|region 32a and the 3rd area|region 33A can supplement the 1st area|region 31A. As a result, the number of light emitting blocks 30b included in the strip light emitting units 31a-1 to 31j-1 can be reduced.

Further, according to this embodiment, since the frame 34 and the plate 30g formed of a material having high thermal conductivity are integrated to form a heat dissipation member, heat generated from the light emitting portion 30a and the like can be efficiently dissipated. can be

Moreover, as shown in FIG. 28, it is preferable to provide the ventilation part 35 in the vicinity of 30 A of stereoscopic illumination parts. By sending wind from the blower part 35 to the three-dimensional lighting part 30A, the cooling effect by the heat radiation member (frame 34 and plate 30g) can be improved. In addition, since the plate 30g extends in the y direction, the blower 35 moves from the side surface (at least one of the +y direction and the -y direction) along the extension direction of the plate 30g (Fig. 28). (refer to the bold arrow of ), it is preferable to send the wind to the three-dimensional lighting unit 30A. In addition, in FIG. 28, although the blower part 35 is provided in the -y direction of 30A of three-dimensional illumination part, the position of the blower part 35 is not limited to this. In addition, although one blower part 35 is provided in FIG. 28, the number of the blower part 35 is not limited to this.

<Fifth embodiment>

In the first embodiment of the present invention, the coaxial illumination unit 20 includes an upper coaxial illumination 21 that is a coaxial illumination of the first camera 11 and a lower side coaxial illumination that is a coaxial illumination of the second camera 12 ( 22), but the shape of the coaxial lighting unit is not limited thereto.

A fifth embodiment of the present invention is an aspect in which the coaxial illumination unit has a C-PL filter. Hereinafter, the optical inspection apparatus 5 which concerns on 5th Embodiment is demonstrated. In addition, since the only difference between the optical inspection device 5 and the optical inspection device 1 according to the fifth embodiment is the coaxial illumination unit, the optical inspection device 5 according to the fourth embodiment is provided. 20A of coaxial lighting units to be used will be described, and descriptions of the same parts as those of the optical inspection apparatus 1 will be omitted.

32 : is a front view which shows the outline of the optical inspection apparatus 5 which concerns on 5th Embodiment. The coaxial illumination unit 20A includes an upper coaxial illumination 21 that is a coaxial illumination of the first camera 11 , a lower coaxial illumination 22 that is a coaxial illumination of the second camera 12 , a C-PL filter 23a, 23b). The C-PL filter 23a is provided below the first camera 11 , and the C-PL filter 23b is provided above the second camera 12 .

The C-PL filters 23a and 23b are circular polarizing filters each having a polarizing plate and a 1/4λ retardation plate giving a 1/4λ phase difference to transmitted light passing through the polarizing plate. The 1/4λ retardation plate converts linearly polarized light into circularly polarized light. The C-PL filters 23a and 23b are installed so that the polarizing plate is positioned on the half mirror 21h and 22h side, respectively, and the 1/4λ retardation plate is positioned on the far side from the half mirror 21h and 22h. Since the C-PL filters 23a and 23b are already known, their detailed description will be omitted.

The C-PL filters 23a and 23b are provided adjacent to the first camera 11 and the second camera 12 , respectively. In addition, the C-PL filters 23a and 23b are provided so that a plane in a direction substantially orthogonal to the thickness direction is slightly inclined with respect to a direction substantially orthogonal to the optical axis oax, respectively.

A part of the light irradiated from the light source 21a and reflected downward by the half mirror 21h passes through the cover glass G and is reflected on the surface of the imaging lens 12a in some cases. When this reflected light enters the 1st camera 11, there exists a possibility that the line of bright light may be contained in the center of the image imaged by the 1st camera 11. The C-PL filter 23b prevents light transmitted through the cover glass G and reflected from the surface of the imaging lens 12a from entering the first camera 11 . Thereby, it is possible to prevent a bright light line from being included in the center of the image captured by the first camera 11 .

Similarly, the C-PL filter 23a is irradiated from the light source 22a, reflected upward by the half mirror 22h, passes through the cover glass G, and the light reflected from the surface of the imaging lens 11a is transmitted to the second camera 12 ) not to enter the Thereby, it is possible to prevent a bright light line from being included in the center of the image captured by the second camera 12 .

In addition, in this embodiment, although the C-PL filters 23a and 23b are provided, the C-PL filter 23a is not essential.

As mentioned above, although embodiment of this invention was described above with reference to drawings, a specific structure is not limited to this embodiment, The design change etc. of the range which do not deviate from the summary of this invention are included. It is possible for those skilled in the art to appropriately change, add, or convert each element of the embodiment. For example, you may apply the side inspection part 60 and the height acquisition part 90 about the optical inspection apparatus 4 and 5 which concerns on 4th and 5th embodiment. Further, for example, the optical inspection apparatus 2 according to the second embodiment and the optical inspection apparatus 5 according to the fifth embodiment may be combined, and the optical inspection apparatus 5 according to the fourth embodiment may be combined. You may combine the optical inspection apparatus 4 and the optical inspection apparatus 5 which concerns on 5th Embodiment.

Moreover, in the said embodiment, although the to-be-inspected object (inspection object) of the optical inspection apparatuses 1-5 was cover glass G and G1, the inspection object of the optical inspection apparatuses 1-5 is not limited to a cover glass. For example, the inspection object of the optical inspection apparatuses 1-5 may be glass used for the touchpad of a laptop-type personal computer.

In addition, in the present invention, "approximately" is a concept including not only the strictly identical case, but also errors and deformations to the extent that the identity is not lost. For example, substantially horizontal is not limited to the case of being strictly horizontal, For example, it is a concept including the error of about several degrees. Also, for example, in the case of expressing only parallel, orthogonal, etc., not only strictly parallel, orthogonal cases, but also substantially parallel, substantially orthogonal, etc. cases are included. In the present invention, "near" means including a region in a certain range (which can be arbitrarily determined) near the reference position.

1, 2: Optical inspection device
10, 10A: imaging unit
11: first camera 12: second camera
13: third camera
11a, 12a, 13a: imaging lens
11b, 12b, 13b: line sensor
13c: the viewing position of the third camera
20, 20A: coaxial lighting unit
21, 21A: upper coaxial light 22, 22A: lower coaxial light
21a, 22a: light source
21b, 22b: integrator
21c, 22c: condensing lens 21d, 22d: aperture
21e, 22e: collimator lens
21f, 22f : mirror
21g, 22g : Fresnel lens
21h, 22h: half mirror 23a, 23b: C-PL filter
30, 30A: three-dimensional lighting unit
30a: light emitting unit 30b: light emitting block
30c, 30c-1, 30c-2: Cylindrical lens 30d: Light emitting block
30e, 30e-1 : Lenticular Lens
30g: plate 30h: bent part
31, 31A: first area
31a~31j, 31a-1~31j-1: band-shaped light emitting part
32, 32A: second area
32a~32i, 32a-1~32d-1, 32f-1~32h-1: band-shaped light emitting part
33, 33A: third area
33a~33i, 33a-1~33d-1, 33f-1~33h-1: band-shaped light emitting part
34: frame
34a: plate 34b, 34c: attachment member
35: blower
40: mounting unit 40a: roller (roller)
50: conveyance unit 60: side inspection unit
61, 62: optical element for focal length adjustment
63, 64: reflection mirrors 63a, 64a: reflection surface
71: integrated circuit
72: input unit 73: output unit
74: power supply
75: communication I/F (interface)
81: position detection sensor 82: position detection sensor
90: height acquisition part
91: surface light source 92: camera
93: reflector 95: moving part
100: personal computer (PC: personal computer)
101: CPU (Central Processing Unit)
102: RAM (Random Access Memory) 103: ROM (Read Only Memory)
104: input/output interface
105: Communication I/F (interface) 106: Media I/F (interface)
111: input device 112: output device
113: storage medium

Claims (17)

A mounting unit for placing the object to be inspected in the horizontal direction;
a conveying unit for moving the inspected object placed on the mounting unit along a conveying direction;
One-dimensional imaging means for imaging the object to be inspected from substantially vertically upward, the one-dimensional imaging means arranged so that a longitudinal direction is substantially orthogonal to the conveying direction;
and a light irradiation unit having a plurality of light emitting units for irradiating light to the object to be inspected,
The light irradiation unit includes a first area of a substantially semi-cylindrical surface in which a central axis is located on a center surface, which is a surface in a substantially vertical direction including the one-dimensional imaging means, and a substantially hemispherical surface formed at both ends of the first area; or having a second area and a third area of a substantially semi-elliptical surface,
in the first region, a plurality of band-shaped light-emitting units in which the light-emitting units are arranged along a direction substantially orthogonal to the conveying direction;
the strip-shaped light emitting part is provided in a region other than the vicinity of the central plane in the first region;
In the second region and the third region, the light emitting units are arranged on the central plane. The method of claim 1,
The band-shaped light emitting unit is installed so that the optical axis and the intersection line of the central plane and the upper surface of the mounting part intersect,
The optical inspection apparatus according to claim 1, wherein the band-shaped light emitting unit has a first band-shaped light emitting unit whose angle between the optical axis and the central plane is approximately 8° or approximately 17°. 3. The method of claim 2,
The conveying unit is controlled to convey the object to be inspected at a constant speed, the one-dimensional imaging means is driven to capture images at regular intervals, and in synchronization with the imaging by the one-dimensional imaging means, the first area is A first light emitting area that is a half area separated from the center plane, a second light emitting area other than the first light emitting area in the first area, a third light emitting area on the central plane in the second area, and among the third areas and a control unit for irradiating a fourth light emitting region on the central plane and the first band-shaped light emitting unit, respectively. 4. The method according to any one of claims 1 to 3,
The light irradiation unit includes the strip-shaped light emitting unit and a cylindrical lens disposed between an intersection between the central plane and the upper surface of the mounting unit. 4. The method according to any one of claims 1 to 3,
a first imaging means installed on the upper side or the lower side of the mounting unit;
second imaging means provided on the opposite side with the first imaging means and the mounting unit interposed therebetween so that the optical axis coincides with the optical axis of the first imaging means;
first coaxial illumination for irradiating parallel light from a normal direction to the object to be inspected, the first coaxial illumination being coaxial illumination of the first imaging means;
A second coaxial illumination provided on the opposite side with the first coaxial illumination and the mounting unit interposed therebetween, comprising a second coaxial illumination that is a coaxial illumination of the second imaging means;
Light irradiated from the first coaxial illumination and specularly reflected from the inspection object is incident on the first imaging means,
Optical inspection characterized in that the light irradiated from the second coaxial illumination and specularly reflected from the inspection object, and the light irradiated from the first coaxial illumination and transmitted through the inspection object enter the second imaging means Device. 6. The method of claim 5,
A first aspect in which the conveying unit is controlled to convey the object to be inspected at a constant speed and irradiating the first coaxial illumination with a first intensity, a second mode of irradiating the second coaxial illumination with the first intensity, The first coaxial illumination or the second coaxial illumination is irradiated with three irradiation patterns of a third type for irradiating the first coaxial illumination with a second intensity, and further, the first imaging according to the irradiation of the first type means for acquiring an image, acquiring an image by the second imaging means in accordance with irradiation of the second form, and acquiring an image by the second imaging means in accordance with irradiation of the third mode; and a second control unit for driving the second imaging unit. 4. The method according to any one of claims 1 to 3,
second imaging means provided on the opposite side with the one-dimensional imaging means and the mounting unit interposed therebetween so that the optical axis coincides with the optical axis of the one-dimensional imaging means;
first coaxial illumination for irradiating parallel light from a normal direction to the object to be inspected, the first coaxial illumination being coaxial illumination of the one-dimensional imaging means;
A second coaxial illumination provided on the opposite side with the first coaxial illumination and the mounting unit interposed therebetween, comprising a second coaxial illumination that is a coaxial illumination of the second imaging means;
The light irradiation unit is provided between the one-dimensional imaging means and the transport unit,
Light irradiated from the light irradiator or the first coaxial illumination and specularly reflected from the inspection object is incident on the one-dimensional imaging means,
Optical inspection characterized in that the light irradiated from the second coaxial illumination and specularly reflected from the inspection object, and the light irradiated from the first coaxial illumination and transmitted through the inspection object enter the second imaging means Device. 8. The method of claim 7,
A first aspect in which the conveying unit is controlled to convey the object to be inspected at a constant speed and irradiating the first coaxial illumination with a first intensity, a second mode of irradiating the second coaxial illumination with the first intensity, The first coaxial illumination or the second coaxial illumination is irradiated with three irradiation patterns of a third form for irradiating the first coaxial illumination with a second intensity, and the one-dimensional imaging according to the irradiation of the first type means for acquiring an image by means of a second imaging means, acquiring an image by the second imaging means in accordance with the irradiation of the second mode, and acquiring an image by the second imaging means in accordance with the irradiation of the third mode; and a third control unit for driving the second imaging unit. 4. The method according to any one of claims 1 to 3,
The light emitting unit is provided adjacent to the light emitting unit, the optical inspection apparatus characterized in that it has a light diffusion plate for diffusing the light irradiated from the light emitting unit. 4. The method according to any one of claims 1 to 3,
an optical element for adjusting a focal length for adjusting the focal length of the one-dimensional imaging means;
and a reflector installed adjacent to the mounting unit,
The optical element for adjusting the focal length and the reflecting mirror are installed on the central plane,
In a plan view, a placement area, which is an area on the placement unit on which the object to be inspected is placed, is located below the one-dimensional imaging means in the vertical direction,
In a plan view, the reflecting mirror is provided at a position outside the mounting area and adjacent to the mounting area in a direction substantially orthogonal to the conveying direction;
The reflective surface of the reflector is approximately planar,
the reflective surface extends substantially along the conveying direction such that a line intersecting the central plane is inclined with respect to the horizontal plane;
The optical inspection device according to claim 1, wherein the optical element for adjusting the focal length is disposed so as to overlap a line joining the one-dimensional imaging means and the reflecting mirror. 11. The method of claim 10,
The optical element for adjusting the focal length is a glass plate and is provided so that both end surfaces substantially orthogonal to the plate thickness direction are horizontal. 4. The method according to any one of claims 1 to 3,
a moving unit for moving the one-dimensional imaging means in an up-down direction;
a height acquisition unit for acquiring the height of the object to be inspected;
A movement control unit for controlling the moving unit based on the information obtained by the height obtaining unit to move the one-dimensional imaging unit in an up-down direction in accordance with a change in the height of the object to be inspected passing under the one-dimensional imaging unit; Optical inspection device characterized. 13. The method of claim 12,
The height acquisition unit includes a surface light source for irradiating light in a direction substantially orthogonal to the conveying direction, and a side imaging means through which the light irradiated from the surface light source and passed through the inspection object is incident. Optical inspection, characterized in that Device. 4. The method according to any one of claims 1 to 3,
The light irradiation unit includes, in the second region and the third region, a light emitting block in which the light emitting units are arranged in a line, and a second cylindrical lens through which the light irradiated from the light emitting unit passes,
In the second region and the third region, the extension direction of the light emitting block is inclined with respect to the horizontal direction,
The optical inspection apparatus according to claim 1, wherein in the second region and the third region, the extension direction of the second cylindrical lens is inclined with respect to the extension direction of the light emitting block. 4. The method according to any one of claims 1 to 3,
The light irradiation unit has a heat dissipation member formed of a material with high thermal conductivity,
The light emitting unit is an optical inspection device, characterized in that provided in the heat dissipation member. 16. The method of claim 15,
and a blower for blowing air to the heat dissipation member;
The heat dissipation member has a plurality of plates provided with the light emitting part,
The plate extends in a direction substantially orthogonal to the conveying direction,
The blower unit, optical inspection device, characterized in that the wind in a direction along the extension direction of the plate. 6. The method of claim 5,
The second imaging means is provided below the mounting unit,
A circularly polarizing filter is installed above the second imaging means,
The circularly polarizing filter is provided so that a plane in a direction substantially orthogonal to the thickness direction is slightly inclined with respect to a direction substantially orthogonal to the optical axis of the second imaging means.

Images